Full-aperture rapid polishing device and polishing method for intense laser plane optical element

Abstract

The invention relates to a quick polishing device and method for full aperture of an intense laser plane optical element, and the quick polishing device comprises a lathe bed, a lower polishing disc, a workpiece moving part, an upper polishing disc part, a lower polishing disc measuring and trimming part and an electrical control system, the lower polishing disc is rotatably arranged in the middle of the lathe bed, and a plurality of stations are arranged on the periphery of the lathe bed; wherein one station is a lower polishing disc in-place finishing station, the other stations are workpiece machining stations, the number of the workpiece moving parts and the number of the upper polishing disc parts correspond to the workpiece machining stations, and the workpiece moving parts are installed on the lathe bed and located above the workpiece machining stations to drive workpieces to do rotary motion and linear motion. The upper polishing disc component comprises an upper polishing disc, a rotating mechanism, a radial moving component and a polishing pressure control component, the upper polishing disc is located over the workpiece moving component, and each upper polishing disc component operates independently under the electrical control system. The multi-station machining device is reasonable in structure, multi-station machining can be achieved, and efficiency and machining precision are effectively improved.

Description

Technical Field

[0001] The present invention relates to a full-aperture rapid polishing device and polishing method for high-power laser planar optical elements, in particular to a high-efficiency polishing device and method for high-precision medium- and large-aperture high-power laser planar optical elements. Background Art

[0002] In December 2022, Lawrence Livermore National Laboratory (LLNL) achieved fusion ignition for the first time, opening a new chapter in this field. In July 2023, the NIF laser once again demonstrated its powerful capabilities, injecting 2.05 megajoules of energy into the target and creating 3.88 megajoules of fusion energy output. In October 2023, the NIF laser successfully achieved fusion ignition for the third time, with its laser energy reaching 1.9 megajoules and fusion energy output of 2.4 megajoules. There is no doubt that laser transmission can transmit such a huge amount of energy. When controlled nuclear fusion is finally achieved, humanity will have access to massive amounts of carbon-free clean energy for the first time, completely changing the future energy roadmap, and the energy shortage problem that has plagued humanity will disappear forever.

[0003] Giant laser drivers represent a country's technological advancement in this field, and their development significantly drives related science and technology. High-power solid-state laser devices used in inertial confinement fusion research are among the largest, most complex, and most systematic optical systems currently in use, requiring tens of thousands of medium- and large-aperture, high-power laser optical components.

[0004] In the existing processing technology process for high-precision, low-defect medium- and large-aperture optical components, the shape accuracy of the components after grinding is usually on the micron level, and the roughness is on the order of tens of nanometers, which is still a large gap from the final component specifications. The existing initial polishing uses a ring-oscillating polisher or a planetary double-sided polisher to meet the workpiece's transmitted wavefront parallelism requirements. The ring-oscillating polisher is a single-arm polisher with low polishing efficiency and cannot meet the requirements of mass production. The 32B planetary double-sided polisher, although capable of multi-station processing, has a single large upper polishing disk with only one rotational motion. The workpiece movement is driven by planetary gears, and the polishing parameters of all station components are consistent, which cannot meet the technical requirements of high-power laser components, seriously restricting the development of laser confinement fusion technology. Existing laser confinement fusion places urgent demands on optical lenses for high transmitted wavefront parallelism, complex polishing paths, inconsistent polishing textures of optical components, high polishing efficiency, and minimal sub-surface damage.

[0005] Therefore, there is an urgent need to research an efficient polishing machine tool and processing method, which not only has high processing efficiency but also intelligently controls the polishing path and polishing pressure of each component. Summary of the Invention

[0006] The first technical problem to be solved by the present invention is to provide a full-aperture rapid polishing device for high-power laser planar optical elements, which can realize multi-station processing, shorten processing time, and effectively improve efficiency and processing accuracy.

[0007] The first technical problem to be solved by the present invention is to provide a method for rapid full-aperture polishing of high-power laser planar optical elements, which can realize multi-station processing. It not only has high processing efficiency, but also can intelligently control the polishing path and polishing pressure of each element, effectively improving the processing accuracy.

[0008] The present invention solves the first technical problem by adopting a technical solution: a rapid polishing device for a full-aperture high-power laser planar optical element, characterized in that it includes a bed, a lower polishing plate assembly, a workpiece moving assembly, an upper polishing plate assembly, an electrical control system, and a polishing liquid circulation system, wherein the lower polishing plate is rotatably arranged in a central position above the bed, and a plurality of workstations are arranged circumferentially around the bed, one of which is a lower polishing plate in-situ dressing station, and the rest are workpiece processing stations. The workpiece moving assembly and the upper polishing plate assembly are corresponding to the workpiece processing stations. The workpiece moving assembly is mounted on the bed above the workpiece processing station and drives the workpiece to perform rotational and linear motion. The upper polishing plate assembly includes an upper polishing plate, a rotating mechanism for driving the upper polishing plate to rotate, a radial moving assembly for driving the upper polishing plate to move radially, and a polishing pressure control assembly. The upper polishing plate is located directly above the workpiece moving assembly, and each upper polishing plate assembly operates independently under the electrical control system. A lower polishing plate measuring and dressing assembly for performing dressing on the lower polishing plate is provided above the lower polishing plate in-situ dressing station.

[0009] As an improvement, the bed is welded from a base, an intermediate base, columns and a top beam. A circular groove for installing a lower polishing disc is provided in the middle of the upper end surface of the bed. The lower polishing disc is rotatably arranged in the circular groove and the upper end surface is higher than the bed. The bottom of the lower polishing disc is a liquid static pressure turntable, and a servo motor is provided in the bed to drive the lower polishing disc to rotate.

[0010] Furthermore, the workpiece motion component is divided into two parts: a rotary motion component and a linear motion component. The rotary motion component includes a base plate, a rotating disk, a support ring, and a first rotary motor. The base plate is horizontally arranged at the workpiece processing station position above the lower polishing disk, the rotating disk is arranged in the middle position of the base plate, and the workpiece is arranged in the rotating disk. The first rotary motor is installed on the base plate, and the first rotary motor is transmission-connected to the rotating disk and the support ring; the linear motion component includes a support seat, a first slider, a first lead screw and a first drive motor. The support seat is fixed on the bed and is located on the left and right sides of the base plate. The left and right sides of the base plate are formed with first guide rails. The first slider is arranged on the support seat and corresponds to the first guide rails. The first lead screw and the first drive motor are installed on the outside of one of the support seats. The lead screw nut matching the first lead screw is connected to the base plate through a connecting plate. When working, the first drive motor rotates to drive the first lead screw to rotate, thereby driving the lead screw nut to move linearly along the first lead screw, thereby driving the base plate to move linearly.

[0011] Furthermore, the support rings are several and evenly distributed along the outer circumference of the rotating disk. The upper end surface of the base plate is concavely provided with a circular groove for the support ring to be placed in. The support ring is arranged in the circular groove and connected to the base plate through a bearing. The rotating disk is fixed to the support ring by screws. The transmission connection between the first rotating motor and the rotating disk and the support ring is as follows: the driving gear is arranged on one side of the rotating disk and is located below the first rotating motor. The output shaft of the first rotating motor is connected to the driving gear. The driving gear and the driven gear are engaged with each other. The driven gear is connected to the support ring and the rotating disk by screws. The first rotating motor rotates, driving the driving gear to rotate, and then driving the driven gear to rotate. The driven gear drives the support ring and the rotating disk to rotate, thereby realizing the rotation of the workpiece.

[0012] Furthermore, the upper polishing plate and the rotating mechanism are installed on a bracket, which includes a horizontal plate, a vertical plate and a connecting plate. The upper polishing plate is arranged below the horizontal plate. A second rotating motor that drives the upper polishing plate to rotate is installed on the horizontal plate. A second guide rail is vertically provided on the connecting plate, and a second slider that cooperates with the second guide rail is provided on the vertical plate. The connecting plate is connected to the radial motion mechanism.

[0013] Furthermore, the bottom of the horizontal plate is provided with a support and a connecting seat in sequence, the upper polishing plate is connected to the connecting seat by screws, a ball spline is vertically provided on the horizontal plate and is connected to the second rotating motor for transmission, the connecting seat is connected to the spline shaft through a floating mechanism, and both ends of the spline shaft are fixed to the support and the bearing seat through bearings, and the support and the bearing seat are fixed to the vertical plate by screws.

[0014] Furthermore, the transmission connection between the spline shaft and the second rotating motor is specifically as follows: a driving pulley and a driven pulley are installed on the horizontal plate, the driving pulley is connected to the motor shaft of the second rotating motor, the driving pulley is connected to the driven pulley through a transmission belt, and the driven pulley is sleeved outside the spline nut of the spline shaft. When working, the second rotating motor rotates, the motor shaft drives the driving pulley to rotate, and drives the driven pulley to rotate through the transmission belt, and the driven pulley drives the spline nut to rotate, and then drives the spline shaft to rotate, thereby realizing the rotation of the upper polishing disk.

[0015] Furthermore, the polishing pressure control component includes a pressure sensor and a driving cylinder. The pressure sensor is arranged at the upper end of the spline shaft and cooperates with the piston rod of the driving cylinder; the radial motion component includes a first beam, a moving box, a second screw and a second driving motor. The connecting plate is fixedly connected to the moving box. The first beam is fixed to the top beam of the bed by screws. A third guide rail is provided on the inner side of the first beam. A third slider that cooperates with the third guide rail is provided on the side of the moving box. The second screw is fixed to the upper end of the first beam through screw supports at both ends. The screw nut is connected and fixed to the moving box by screws. When the second driving motor rotates, it drives the second screw to rotate, thereby driving the screw nut to move linearly, driving the moving box to move linearly, and then driving the upper polishing plate to move linearly.

[0016] Finally, the lower polishing disc measuring and dressing component includes a dressing disc, a dressing disc rotating mechanism, a dressing disc radial motion mechanism, a correction pressure control mechanism and a weight balancing mechanism. The dressing disc rotating mechanism includes a third rotating motor, which is mounted on a horizontal mounting plate. A second ball spline, a vertical mounting plate and a movable connecting plate are vertically provided on the horizontal mounting plate. The third rotating motor is connected to the spline nut through an active pulley and a passive pulley. The correction disc is arranged below the horizontal mounting plate and is connected to the lower end of the spline shaft of the ball spline through a connecting seat. The upper end of the spline shaft is connected to the bearing seat through a bearing. The bearing seat is fixedly connected to the vertical mounting plate. A fourth guide rail is provided on the movable connecting plate, and a fourth slider cooperating with the fourth guide rail is provided on the vertical mounting plate.

[0017] The radial motion mechanism of the dressing disk includes a box body, a second crossbeam, a fifth guide rail and a third lead screw. The movable connecting plate is fixedly connected to the box body, the fifth guide rail is fixed on the side of the second crossbeam, the fifth guide rail slider is connected to the box body by screws, the third lead screw is fixed to the upper end of the second crossbeam through a bearing seat, the lead screw nut is connected to the box body by screws, and the third drive motor is connected to the fifth lead screw through a coupling.

[0018] The correction pressure control mechanism includes a cylinder and a sensor. The sensor is connected to the cylinder through a thread, and the other end of the sensor is connected to the upper end of the spline shaft; the cylinder piston rod is connected to the movable connecting plate through a connecting seat;

[0019] A lower polishing disc flatness measuring device is also installed on the horizontal mounting plate.

[0020] The technical solution adopted by the present invention to solve the second technical problem is: a method for rapid polishing of the full aperture of a high-power laser planar optical element, characterized in that the polishing is performed using the above-mentioned rapid polishing device, and the specific steps are as follows:

[0021] 1) Start the electrical control system and automatically detect the zero position of each system;

[0022] 2) Install the workpiece to be processed, and according to the different characteristics of the workpiece to be processed, modify or select the working procedures of the upper polishing plate component, radial motion mechanism, workpiece motion component, and polishing pressure control component, and match the polishing liquid flow rate according to the processing requirements of the component to be processed;

[0023] 3) Start the polishing liquid circulation control system, start the upper polishing plate vertical motion mechanism, the upper polishing plate weight balance component, and the polishing pressure control component, fast-forward and lower the upper polishing plate, work-feed the upper polishing plate, and adjust the pressure of the upper polishing plate close to the workpiece to be processed;

[0024] 4) Start the lower polishing plate, the workpiece moving parts, the upper polishing plate parts rotation movement mechanism, the radial movement mechanism, and at the same time start the lower polishing plate measurement and dressing parts detection function as needed;

[0025] 5) Different workpieces have different processing procedures and processing times. After the workpiece is processed, the polishing disc, the radial moving parts of the upper polishing disc, and the moving parts of the workpiece are returned to their original positions. The finished workpiece is removed, cleaned and dried before entering the precision inspection process.

[0026] Compared with the prior art, the advantages of the present invention are:

[0027] 1. The bed is rationally arranged with the lower polishing plate, workpiece moving parts, upper polishing plate parts, upper polishing plate radial moving parts, polishing pressure control parts, lower polishing plate measuring and dressing parts, electrical control system, and polishing liquid circulation system. This balances the weight of the polishing mechanism and the polishing plate itself, truly achieving precise and controllable polishing pressure, and providing equipment guarantee for high-precision processing of optical components.

[0028] Second, multiple workpiece processing stations are set up to realize multi-station processing, which not only improves efficiency, but also the specifications and process parameters of the optical components processed at each station are independent of each other, essentially ensuring the inconsistency of the polishing texture of each optical component;

[0029] 3. The movement of the workpiece to be processed and the movement of the upper polishing plate are independently linked to each other. The dwell time and polishing force of the workpiece processing are independently controlled, which essentially improves the processing accuracy and convergence time.

[0030] 4. Set up the lower polishing plate flatness measuring device to realize the on-site monitoring and correction of the polishing plate flatness;

[0031] The present invention has a reasonable and scientific structure, can realize multi-station processing, shorten processing time, effectively improve efficiency and processing accuracy, and can be promoted and applied to all high-precision, low sub-surface damage planar optical lens processing such as photolithography machines. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 is a schematic diagram of the three-dimensional structure of a polishing device in an embodiment of the present invention;

[0033] Figure 2 yes Figure 1 Schematic diagram of the three-dimensional structure from another direction (some columns are omitted);

[0034] Figure 3 Schematic diagram of the three-dimensional structure of the workpiece moving part in an embodiment of the present invention;

[0035] Figure 4 2 is a schematic structural diagram of the radial motion component of the upper polishing plate in an embodiment of the present invention;

[0036] Figure 5 1 is a schematic diagram of the three-dimensional structure of the upper polishing plate component in an embodiment of the present invention;

[0037] Figure 6 It is a schematic diagram of the three-dimensional structure of the lower polishing plate measuring and trimming component in an embodiment of the present invention.

[0038] In the figure: 1-bed; 1-1 base; 1-2 middle base; 1-3 column; 1-4 top beam; 4-workpiece moving part; 4-1 support seat; 4-2 first slider; 4-3 first guide rail; 4-4 first drive motor; 4-6 first screw rod support; 4-7 first screw rod; 4-8 first connecting plate; 4-9 second screw rod support; 4-10 rotating disk; 4-11 support ring; 4-12 base; 4-14 first rotating motor; 5-upper polishing disk component; 5-1 Upper polishing plate; 5-2 First connecting seat; 5-3 First support; 5-4 Horizontal plate; 5-5 First motor seat; 5-6 Driving pulley; 5-7 First spline shaft; 5-8 Second rotating motor; 5-9 First bearing seat; 5-10 Pressure sensor; 5-11 First cylinder; 5-12 Vertical plate; 5-13 Second guide rail; 5-14 Balancing cylinder; 5-15 Second connecting seat; 5-16 Second connecting plate; 5-17 Second slider; 5-18 Driven pulley 6- radial motion component of upper polishing plate; 6-1 first crossbeam; 6-2 stopper; 6-3 third guide rail; 6-4 third screw support; 6-5 second screw; 6-8 moving box; 6-9 fourth screw support; 6-10 second drive motor; 6-11 baffle; 7- polishing pressure control component; 8- measuring and trimming component of lower polishing plate; 8-1 correction plate; 8-2 third connecting seat; 8-3 second bearing seat; 8-4 second motor seat; 8-6 third rotating motor Machine; 8-7 second spline shaft; 8-9 sensor; 8-10 third drive motor; 8-12 vertical mounting plate; 8-13 second cylinder; 8-14 third cylinder; 8-15 third connecting plate; 8-16 second support; 8-17 third slider; 8-19 third lead screw; 8-20 second crossbeam; 8-21 fifth guide rail; 8-22 lead screw bearing seat; 8-23 movable connecting plate; 8-24 horizontal mounting plate; 8-25 transmission belt; 9- lower polishing plate. DETAILED DESCRIPTION

[0039] The present invention will be described in further detail below with reference to the accompanying drawings and embodiments.

[0040] like Figures 1 to 6As shown, the rapid polishing device for full-aperture high-intensity laser flat optical elements comprises a bed 1, a lower polishing disc component, a workpiece moving component 4, an upper polishing disc component 5, an electrical control system and a polishing liquid circulation system. Four stations are provided around the bed 1 in a circular direction, of which I, II and III are workpiece processing stations, and IV is an in-situ dressing station for the lower polishing disc 9. The four stations are evenly spaced at 90 degrees from each other; the lower polishing disc 9 is rotatably arranged in the middle position above the bed 1, and the lower polishing disc 9 is controlled by the electrical control system to perform rotational motion; the workpiece moving component 4 and the upper polishing disc component 5 are three corresponding to the workpiece processing stations, and the workpiece moving component 4 is installed on the bed 1 above the workpiece processing station to drive the workpiece to Rotational motion and linear motion; the upper polishing disc component 5 includes an upper polishing disc 5-1, a rotating mechanism for driving the upper polishing disc 5-1 to rotate, a radial motion component 6 for driving the upper polishing disc 5-1 to move radially, and a polishing pressure control component 7. The upper polishing disc 5-1 is located above the workpiece motion component 4. Each upper polishing disc component 5 operates independently under the electrical control system. A lower polishing disc measuring and dressing component 8 for dressing the lower polishing disc 9 is provided above the in-situ dressing station of the lower polishing disc. According to the detection results of the full morphology of the lower polishing disc 9, the small grinding head dressing principle is adopted. Under the unified control of the electrical control system, the lower polishing disc 9 can be dressed by adjusting the dressing force, dressing speed and dressing disc residence time of the lower polishing disc measuring and dressing component 8.

[0041] The specific structure is as follows: the bed 1 is the supporting component, welded together by a base 1-1, an intermediate base 1-2, columns 1-3, and a top beam 1-4. The intermediate base 1-2 is mounted above the base 1-1, and the four columns 1-3 are screwed to the four corners of the intermediate base 1-2. The top beam 1-4 is also screwed above the four columns 1-3. A circular groove is provided in the middle of the upper surface of the bed 1 for mounting the lower polishing plate 9. The lower polishing plate 9 is rotatably mounted within this circular groove, with its upper end surface raised above the bed 1. The bottom of the lower polishing plate 9 is a hydrostatic turntable, and a servo motor is installed within the bed 1 to drive the rotation of the lower polishing plate 9.

[0042] The workpiece motion component 4 is divided into two parts: a rotary motion component and a linear motion component. The rotary motion component includes a base plate 4-12, a rotating disk 4-10, a support ring 4-11, and a first rotary motor 4-14. The base plate 4-12 is horizontally arranged at the workpiece processing station position above the lower polishing disk 9, the rotating disk 4-10 is arranged in the middle position of the base plate 4-12, the workpiece is arranged in the rotating disk 4-10, the first rotary motor 4-14 is installed on the base plate 4-12, and the first rotary motor 4-14 is connected to the rotating disk 4-10 and the support ring 4-11 through transmission; the support rings 4-11 are uniformly distributed along the outer periphery of the rotating disk 4-10, and the upper end surface of the base plate 4-12 is concave with a circular groove for the support ring 4-11 to be placed, and the support ring 4-11 is arranged in the circular groove The inner portion is connected to the base plate 4-12 through a bearing, the rotating disk 4-10 is fixed to the support ring 4-11 by screws, and the transmission connection between the first rotating motor 4-14 and the rotating disk 4-10 and the support ring 4-11 is as follows: the driving gear is installed on one side of the rotating disk 4-10 and is located below the first rotating motor 4-14, the output shaft of the first rotating motor 4-14 is connected to the driving gear, and the driven gear is connected to the support ring 4-11 and the rotating disk 4-10 by screws. The driven gear is located above the rotating disk 4-10, and the driving gear and the driven gear are engaged with each other. The first rotating motor 4-14 rotates, driving the driving gear to rotate, and then driving the driven gear to rotate. The driven gear drives the support ring 4-11 and the rotating disk 4-10 to rotate, and finally realizes the rotation of the workpiece.

[0043] The linear motion component includes a support seat 4-1, a first slider 4-2, a first lead screw 4-7 and a first drive motor 4-4. The support seat 4-1 is fixed on the bed 1 and is located on the left and right sides of the base plate 4-12. The left and right sides of the base plate 4-12 are formed with first guide rails 4-3. The first slider 4-2 is arranged on the support seat 4-1 and corresponds to the first guide rail 4-3. The first lead screw 4-7 and the first drive motor 4-4 are installed on the outside of one of the support seats 4-1. The lead screw nut matching the first lead screw 4-7 is connected to the base plate 1-12 through the first connecting plate 4-8. When working, the first drive motor 4-4 rotates to drive the first lead screw 4-7 to rotate, and then drives the lead screw nut to move linearly along the first lead screw 4-7, and then drives the base plate 4-12 to move linearly, thereby realizing linear motion of the workpiece.

[0044] The upper polishing disc 5-1 and the rotating mechanism are installed on the bracket, which includes a horizontal plate 5-4, a vertical plate 5-12 and a second connecting plate 5-16. The upper polishing disc 5-1 is arranged below the horizontal plate 5-4. A second rotating motor 5-8 that drives the upper polishing disc 5-1 to rotate is installed on the horizontal plate 5-4. A second guide rail 5-13 is vertically provided on the second connecting plate 5-16. A second slider 5-17 that cooperates with the second guide rail 5-13 is provided on the vertical plate 5-12. The second connecting plate 5-16 is connected to the radial motion mechanism 6. The bottom of the horizontal plate 5-4 is provided with a first support 5-3 and a first connecting seat 5-2 in sequence. The upper polishing disc 5-1 is connected to the first connecting seat 5-2 by screws. A ball spline is vertically provided on the horizontal plate 5-4 and is connected to the second rotating motor 5-8 for transmission. The first connecting seat 5-2 is connected to the first spline shaft 5-7 through a floating mechanism. Both ends of the first spline shaft 5-7 are fixed to the first support 5-3 and the first bearing seat 5-9 by bearings. The first support 5-3 and the first bearing seat 5-9 are fixed to the vertical plate 5-12 by screws. The transmission connection between the first spline shaft 5-7 and the second rotating motor 5-8 is specifically as follows: a driving pulley 5-6 and a driven pulley 5-18 are installed on the horizontal plate 5-4, the driving pulley 5-6 is connected to the motor shaft of the second rotating motor 5-8, the driving pulley 5-6 is connected to the driven pulley 5-18 through a transmission belt 8-25, and the driven pulley 5-18 is sleeved outside the spline nut of the first spline shaft 5-7. When working, the second rotating motor 5-8 rotates, and the motor shaft drives the driving pulley 5-6 to rotate, which drives the driven pulley 5-18 to rotate through the transmission belt 8-25, and the driven pulley 5-18 drives the spline nut to rotate, and then drives the first spline shaft 5-7 to rotate, thereby realizing the rotation of the upper polishing disc 5-1.

[0045] The polishing pressure control component 7 includes a pressure sensor 5-10 and a first cylinder 5-11 for driving the same. The pressure sensor 5-10 is connected to the first spline shaft 5-7 and the piston rod for driving the first cylinder 5-11 through a connecting mechanism. The radial motion component 6 includes a crossbeam 6-1, a moving box 6-8, a second lead screw 6-5 and a second drive motor 6-10. The second connecting plate 5-16 is fixedly connected to the moving box 6-8. The crossbeam 6-1 is fixed to the top beam 1-4 of the bed 1 by screws. The inner side of the crossbeam 6-1 is provided with a The third guide rail 6-3 and the side of the movable box 6-8 are provided with a third slider 6-7 that cooperates with the third guide rail 6-3. The second lead screw 6-5 is fixed to the upper end of the beam 6-1 through the third lead screw support 6-4 and the fourth lead screw support 6-9 at both ends. The lead screw nut is connected and fixed to the movable box 6-8 by screws. When the second drive motor 6-10 rotates, it drives the second lead screw 6-5 to rotate, thereby driving the lead screw nut to move linearly, driving the movable box 6-8 to move linearly, and then driving the upper polishing plate 5-1 to move linearly.

[0046] The lower polishing disc measuring and dressing component 8 includes a dressing disc 8-1, a dressing disc rotating mechanism, a dressing disc radial motion mechanism, a correction pressure control mechanism and a weight balancing mechanism. The dressing disc rotating mechanism includes a third rotating motor 8-6, which is mounted on a horizontal mounting plate 8-24. The horizontal mounting plate 8-24 is vertically provided with a second ball spline, a vertical mounting plate 8-12 and a movable connecting plate 8-23. The third rotating motor 8-6 is connected to the spline nut through the active pulley 5-6 and the passive pulley. The correction disc 8-1 is arranged below the horizontal mounting plate 8-24 and is connected to the lower end of the second spline shaft 8-7 of the second ball spline through the first connecting seat 8-2. The upper end of the second spline shaft 8-7 is connected to the second bearing seat 8-3 through a bearing. The second bearing seat 8-3 is fixedly connected to the vertical mounting plate 8-12. A fourth guide rail is provided on the movable connecting plate 8-23, and a fourth slider cooperating with the fourth guide rail is provided on the vertical mounting plate 8-12.

[0047] The radial motion mechanism of the dressing disk includes a slide 8-17, a second beam 8-20, a fifth guide rail 8-21 and a third lead screw 8-19. The movable connecting plate 8-23 is fixedly connected to the slide 8-17. The fifth guide rail 8-21 cooperating with the slide 8-17 is fixed on the side of the second beam 8-20. The third lead screw 8-19 is fixed to the upper end of the second beam 8-20 through the lead screw bearing seat 8-22. The lead screw nut is connected to the slide 8-17 by a screw, and the third drive motor 8-10 is connected to the third lead screw 8-19 through a coupling.

[0048] The correction pressure control mechanism includes a second cylinder 8-13 and a sensor 8-9. The sensor 8-9 is connected to the second cylinder 8-13 through a thread, and the other end of the sensor 8-9 is connected to the upper end of the second spline shaft 8-7; the piston rod of the second cylinder is connected to the movable connecting plate 8-23 through the first connecting seat;

[0049] A lower polishing plate flatness measuring device is also mounted on the horizontal mounting plate 8-24. When the lower polishing plate correction component is trimming the lower polishing plate 9, the second spline shaft 8-7 is connected to the correction plate 8-1. When the lower polishing plate 9 does not need to be trimmed, the electrical control system controls the measurement and monitoring of the flatness of the lower polishing plate 9 during machine operation. If the measured flatness of the lower polishing plate 9 exceeds a set value, an alarm is triggered, prompting the lower polishing plate 9 to be trimmed. This real-time control and measurement of the flatness of the lower polishing plate 9 substantially improves the automation level of the equipment.

[0050] A method for rapid polishing of the full aperture of a high-intensity laser planar optical element is provided, wherein the rapid polishing device is used for polishing, and the specific steps are as follows:

[0051] 1) Start the electrical control system and automatically detect the zero position of each system;

[0052] 2) Install the workpiece to be processed, and modify or select the working procedures of the upper polishing disc component 5, radial motion mechanism, workpiece motion component, and polishing pressure control component 7 according to the different characteristics of the workpiece to be processed, and match the polishing liquid flow rate according to the processing requirements of the component to be processed;

[0053] 3) Start the polishing liquid circulation control system, start the upper polishing plate vertical motion mechanism, the upper polishing plate weight balancing component, and the polishing pressure control component 7, fast-forward and lower the upper polishing plate 5-1, advance the upper polishing plate 5-1, and adjust the pressure of the upper polishing plate 5-1 close to the workpiece to be processed;

[0054] 4) Start the lower polishing plate 9, the workpiece moving part, the upper polishing plate part 5 rotational motion mechanism, the radial motion mechanism, and at the same time start the detection function of the lower polishing plate measuring and dressing part 8 as needed;

[0055] 5) Different workpieces have different processing procedures and processing times. For the completed workpiece, the polishing disc 5-1, the upper polishing disc radial motion component 6, and the workpiece motion component are returned to their original positions. The finished workpiece is removed, cleaned and dried before entering the precision inspection process.

[0056] In the embodiment:

[0057] (1) Realize double-sided polishing of large-diameter thin plate components, quickly remove sub-surface defects after grinding, and actively adjust component processing surface accuracy and double-sided parallel accuracy. The processing component size is 500×500mm×8mm

[0058] (2) The size of the lower polishing disc 9 is: 4m in diameter, the polishing disc speed range covers 0-100rpm; the radial runout of the polishing disc spindle is ≤50μm, the axial runout of the polishing disc spindle is ≤20μm, the end runout of the disc surface is better than 50μm, and the flatness of the working disc surface within any 1m range is better than 3μm;

[0059] (3) Component processing accuracy transmitted wavefront: better than 0.5λ;

[0060] (4) The machine tool can realize simultaneous processing of multiple stations, and the components and upper plate of each station can be independently controlled;

[0061] (5) It has a precise polishing disc dressing system, and the dressing track must cover the entire disc surface;

[0062] The lower polishing plate 9 has a servo control function and can be servo-rotated at any specified angle;

[0063] (6) The upper polishing plate 5-1 has a precise control function for polishing pressure;

[0064] The polishing disc has a central liquid supply function, the return water tank has a slope, and is equipped with a polishing liquid recovery brush;

[0065] Lower polishing plate 9 is made of granite;

[0066] (7) The polishing disc can apply a polishing pressure range of 0 to 2000N; the pressure adjustment accuracy is ≤50N.

[0067] Specific operation process:

[0068] The electrical control system is started and the system zero position is detected; the workpiece is installed and the first rotary motor 4-14 of the workpiece moving part 4 is started at the same time, the servo motor that drives the lower polishing disc 9 to rotate is started, and the first drive motor 4-4 is started; the polishing liquid circulation system is started; the second rotary motor 5-8 of the upper polishing disc 5-1, the polishing pressure control mechanism, and the upper polishing disc balancing mechanism are started; the upper polishing disc radial moving mechanism 6 is started, and the parts are automatically processed according to the designed program.

[0069] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A rapid polishing device for full-aperture high-intensity laser planar optical components, characterized by: It includes a bed, a lower polishing disc, a workpiece moving part, an upper polishing disc part, an electrical control system and a polishing liquid circulation system, wherein the lower polishing disc is rotatably arranged in the middle position above the bed, and a number of workstations are arranged around the bed in an upward direction, one of which is an in-situ dressing station for the lower polishing disc, and the rest are workpiece processing stations. The workpiece moving parts and the upper polishing disc part are several corresponding to the workpiece processing stations, and the workpiece moving part is installed on the bed above the workpiece processing station, driving the workpiece to perform rotational motion and linear motion; the upper polishing disc part includes an upper polishing disc, a rotating mechanism for driving the upper polishing disc to rotate, a radial moving part for driving the upper polishing disc to move radially, and a polishing pressure control part. The upper polishing disc is located above the workpiece moving part, and each upper polishing disc part operates independently under the electrical control system. A lower polishing disc measuring and dressing part for dressing the lower polishing disc is provided above the in-situ dressing station for the lower polishing disc.

2. The rapid polishing device according to claim 1, characterized in that: The bed is welded together by a base, an intermediate base, columns and a top beam. A circular groove for installing a lower polishing disc is provided in the middle of the upper end surface of the bed. The lower polishing disc is rotatably arranged in the circular groove, and the upper end surface is higher than the bed. The bottom of the lower polishing disc is a liquid static pressure turntable, and a servo motor is provided in the bed to drive the lower polishing disc to rotate.

3. The rapid polishing device according to claim 1, characterized in that: The workpiece motion component is divided into two parts: a rotary motion component and a linear motion component. The rotary motion component includes a base plate, a rotating disk, a support ring, and a first rotary motor. The base plate is horizontally arranged at a workpiece processing station position above the lower polishing disk, the rotating disk is arranged in the middle position of the base plate, the workpiece is arranged in the rotating disk, the first rotary motor is installed on the base plate, and the first rotary motor is transmission-connected to the rotating disk and the support ring; the linear motion component includes a support seat, a first slider, a first lead screw and a first drive motor. The support seat is fixed on the bed and is located on the left and right sides of the base plate. First guide rails are formed on the left and right sides of the base plate. The first slider is arranged on the support seat and corresponds to the first guide rail. The first lead screw and the first drive motor are installed on the outside of one of the support seats. The lead screw nut matching the first lead screw is connected to the base plate through a connecting plate. When working, the first drive motor rotates to drive the first lead screw to rotate, thereby driving the lead screw nut to move linearly along the first lead screw, thereby driving the base plate to move linearly.

4. The rapid polishing device according to claim 3, characterized in that: The support rings are evenly distributed along the outer circumference of the rotating disk. The upper end surface of the base plate is concavely provided with a circular groove for the support ring to be placed in. The support ring is arranged in the circular groove and connected to the base plate through a bearing. The rotating disk is fixed to the support ring by screws. The transmission connection between the first rotating motor and the rotating disk and the support ring is as follows: the output shaft of the first rotating motor is connected to the driving gear, the driving gear is connected to the driven gear, and the driven gear is connected to the support ring and the rotating disk by screws. The first rotating motor rotates, driving the driving gear to rotate, and then driving the driven gear to rotate. The driven gear drives the support ring and the rotating disk to rotate, thereby realizing the rotation of the workpiece.

5. The rapid polishing device according to claim 1, characterized in that: The upper polishing plate and the rotating mechanism are installed on a bracket, which includes a horizontal plate, a vertical plate and a connecting plate. The upper polishing plate is arranged below the horizontal plate. A second rotating motor that drives the upper polishing plate to rotate is installed on the horizontal plate. A second guide rail is vertically provided on the connecting plate, and a second slider that cooperates with the second guide rail is provided on the vertical plate. The connecting plate is connected to the radial motion mechanism.

6. The rapid polishing device according to claim 5, characterized in that: The bottom of the horizontal plate is provided with a support and a connecting seat in sequence. The upper polishing plate is connected to the connecting seat by screws. A ball spline is vertically provided on the horizontal plate and is connected to the second rotating motor for transmission. The connecting seat is connected to the spline shaft through a floating mechanism. The two ends of the spline shaft are fixed to the support and the bearing seat through bearings. The support and the bearing seat are fixed to the vertical plate by screws.

7. The rapid polishing device according to claim 6, characterized in that: The transmission connection between the spline shaft and the second rotating motor is specifically as follows: a driving pulley and a driven pulley that mesh with each other are installed on the horizontal plate, the driving pulley is connected to the motor shaft of the second rotating motor, the driving pulley is connected to the driven pulley through a transmission belt, and the driven pulley is sleeved outside the spline nut of the spline shaft. During operation, the second rotating motor rotates, the motor shaft drives the driving pulley to rotate, and the driven pulley is driven to rotate through the transmission belt. The driven pulley drives the spline nut to rotate, and then drives the spline shaft to rotate, thereby realizing the rotation of the upper polishing disk.

8. The rapid polishing device according to claim 1, characterized in that: The polishing pressure control component includes a pressure sensor and a driving cylinder. The pressure sensor is arranged at the upper end of the spline shaft and cooperates with the piston rod of the driving cylinder; the radial motion component includes a first beam, a moving box, a second screw and a second driving motor. The connecting plate is fixedly connected to the moving box. The first beam is fixed to the top beam of the bed by screws. A third guide rail is provided on the inner side of the first beam. A third slider that cooperates with the third guide rail is provided on the side of the moving box. The second screw is fixed to the upper end of the first beam through the third screw support and the fourth screw support at both ends. The screw nut is connected and fixed to the moving box by screws. When the second driving motor rotates, it drives the second screw to rotate, thereby driving the screw nut to move linearly, driving the moving box to move linearly, and then driving the upper polishing plate to move linearly.

9. The rapid polishing device according to claim 8, characterized in that: The lower polishing disc measuring and dressing component includes a dressing disc, a dressing disc rotating mechanism, a dressing disc radial motion mechanism, a correction pressure control mechanism and a weight balancing mechanism, the dressing disc rotating mechanism includes a third rotating motor, the third rotating motor is mounted on a horizontal mounting plate, a second ball spline, a vertical mounting plate and a movable connecting plate are vertically provided on the horizontal mounting plate, the third rotating motor is connected to the spline nut through an active pulley and a passive pulley, the correction disc is arranged below the horizontal mounting plate, connected to the lower end of the spline shaft of the ball spline through a connecting seat, the upper end of the spline shaft is connected to the bearing seat through a bearing, the bearing seat is fixedly connected to the vertical mounting plate, a fourth guide rail is provided on the movable connecting plate, and a fourth slider cooperating with the fourth guide rail is provided on the vertical mounting plate; The radial motion mechanism of the dressing disk includes a box body, a second crossbeam, a fifth guide rail and a third lead screw. The movable connecting plate is fixedly connected to the box body, the fifth guide rail is fixed to the side of the second crossbeam, the fifth guide rail slider is connected to the box body by screws, the third lead screw is fixed to the upper end of the second crossbeam by a bearing seat, the lead screw nut is connected to the box body by screws, and the third drive motor is connected to the fifth lead screw by a coupling. The correction pressure control mechanism includes a cylinder and a sensor. The sensor is connected to the cylinder through a thread, and the other end of the sensor is connected to the upper end of the spline shaft; the cylinder piston rod is connected to the movable connecting plate through a connecting seat; A lower polishing disc flatness measuring device is also installed on the horizontal mounting plate.

10. A method for rapid full-aperture polishing of high-power laser planar optical components, characterized by: Polishing is performed using the rapid polishing device according to claim 9, and the specific steps are as follows: 1) Start the electrical control system and automatically detect the zero position of each system; 2) Install the workpiece to be processed, and according to the different characteristics of the workpiece to be processed, modify or select the working procedures of the upper polishing plate component, radial motion mechanism, workpiece motion component, and polishing pressure control component, and match the polishing liquid flow rate according to the processing requirements of the component to be processed; 3) Start the polishing liquid circulation control system, start the upper polishing plate vertical motion mechanism, the upper polishing plate weight balance component, and the polishing pressure control component, fast-forward and lower the upper polishing plate, work-feed the upper polishing plate, and adjust the pressure of the upper polishing plate close to the workpiece to be processed; 4) Start the lower polishing plate, the workpiece moving parts, the upper polishing plate parts rotation movement mechanism, the radial movement mechanism, and at the same time start the lower polishing plate measurement and dressing parts detection function as needed; 5) Different workpieces have different processing procedures and processing times. After the workpiece is processed, the polishing disc, the radial moving parts of the upper polishing disc, and the moving parts of the workpiece are returned to their original positions. The finished workpiece is removed, cleaned and dried before entering the precision inspection process.

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