Talc porcelain as well as preparation method and application thereof

Abstract

The invention relates to talc porcelain as well as a preparation method and application thereof. The preparation method of the talc porcelain provided by the invention comprises the following steps: mixing magnesium-containing powder, a dispersing agent and a solvent to prepare slurry; mixing the slurry with a binder and a plasticizer, and after molding, preparing a green ceramic chip; after the green ceramic chips are laminated, isostatic pressing treatment is carried out, and a green body is prepared; degreasing and sintering the green body to prepare talc porcelain; wherein the magnesium-containing powder comprises talcum powder, barium carbonate, silicon dioxide and aluminum oxide in a mass ratio of (50-70): (6-18): (15-25): (4-12). The sintering process parameters are as follows: the sintering temperature is 1250-1300 DEG C, and the sintering time is 2-6 hours. The preparation method provided by the invention can further widen the sintering temperature of the talc porcelain while ensuring the strength of the talc porcelain, so that large-scale production of the talc porcelain can be realized.

Description

Technical Field

[0001] The present application relates to the field of ceramic technology, and in particular to a steatite porcelain and a preparation method and application thereof. Background Art

[0002] Steatite is a magnesium-based ceramic material made from talc through high-temperature sintering. Its primary crystalline phase is protoenstatite, or magnesium metasilicate (chemical formula: MgSiO₃). It is a cost-effective, high-frequency structural ceramic with excellent electrical properties. Its chemical stability and low dielectric loss make it widely used in semiconductor devices such as integrated circuits.

[0003] However, during the preparation of steatite porcelain, the sintering temperature range is relatively narrow, only around 20°C. This lower sintering temperature range limits the sintering of the porcelain blank. Low sintering temperatures can result in underfiring, which can lead to insufficient mechanical strength and affect product quality. Higher sintering temperatures can easily cause deformation, significantly complicating actual firing operations and hindering large-scale production. Summary of the Invention

[0004] Based on this, the present application provides a steatite porcelain and its preparation method and application. The preparation method provided in the present application can further widen the sintering temperature of steatite porcelain while ensuring the strength of steatite porcelain, thereby enabling large-scale production of steatite porcelain.

[0005] In a first aspect of the present application, a method for preparing steatite porcelain is provided, comprising the following steps:

[0006] Mixing magnesium-containing powder, a dispersant and a solvent to prepare a slurry;

[0007] The slurry is mixed with a binder and a plasticizer, and formed into a green ceramic sheet;

[0008] After laminating the green ceramic sheets, isostatic pressing is performed to prepare a green body;

[0009] Degreasing and sintering the green body to prepare the steatite porcelain;

[0010] The magnesium-containing powder comprises talc, barium carbonate, silicon dioxide and aluminum oxide in a mass ratio of (50-70): (6-18): (15-25): (4-12);

[0011] The sintering process parameters include: a sintering temperature of 1250° C. to 1300° C., and a sintering time of 2 h to 6 h.

[0012] In one embodiment, the mass ratio of the magnesium-containing powder, the dispersant and the solvent is (3-5): (0.02-0.06): (4-6).

[0013] In one embodiment, the dispersant includes one or more of SC-0505k dispersant, DP8300 dispersant and JM558B dispersant.

[0014] In one embodiment, the solvent comprises ethyl acetate and butyl acetate in a mass ratio of 3:(1.5-2.5).

[0015] In one embodiment, the step of mixing the slurry with a binder and a plasticizer has one or more of the following characteristics:

[0016] (1) The mass ratio of the slurry, the binder and the plasticizer is 1: (0.1-0.3): (0.02-0.05);

[0017] (2) The binder includes one or more of polyvinyl butyral and ethyl cellulose;

[0018] (3) The plasticizer includes one or more of dibutyl phthalate and polyethylene glycol.

[0019] In one embodiment, the steps of preparing the green ceramic sheet include:

[0020] The slurry is mixed with a binder and a plasticizer, and subjected to degassing and tape casting to prepare a green ceramic sheet;

[0021] The degassing process parameters include: vacuum degree of -0.015 MPa to -0.01 MPa, and degassing time of 20 min to 40 min.

[0022] In one embodiment, the process parameters of the isostatic pressing treatment include: a temperature of 65° C. to 75° C. and a pressure of 55 MPa to 65 MPa.

[0023] In one embodiment, the degreasing process parameters include: keeping warm at 75°C~85°C for 1h~3h, heating to 125°C~135°C and keeping warm for 1h~3h, heating to 345°C~355°C at a heating rate of 0.2°C / min~1.5°C / min, and keeping warm for 1.5h~2.5h.

[0024] The second aspect of the present application provides a talc porcelain prepared by the preparation method described in any embodiment of the first aspect of the present application.

[0025] The third aspect of the present application provides a semiconductor device comprising the steatite porcelain described in the second aspect of the present application.

[0026] In the preparation method of talc porcelain provided in the present application, by selecting talc powder, barium carbonate, silicon dioxide and aluminum oxide in a specific mass ratio and using them as magnesium-containing powder, on the one hand, the viscosity of the high-temperature liquid phase structure generated during sintering can be increased and the skeleton effect of the magnesium-containing powder can be used to make the talc porcelain less likely to deform, thereby widening the sintering range of the talc porcelain.

[0027] On the other hand, by adjusting the raw material formula of talc porcelain and supplementing it with the preparation steps of isostatic pressing, degreasing and sintering, the phase change aging of talc porcelain can be further prevented and the strength of talc porcelain can be improved. DETAILED DESCRIPTION

[0028] Below in conjunction with specific embodiment, the talc porcelain of the present application and its preparation method and application are described in further complete and clear manner.The present application can be realized in many different forms and is not limited to the embodiment described herein.On the contrary, the purpose of providing these embodiments is to make the present application's disclosure be understood more thoroughly and comprehensively.

[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application pertains. The terms used herein in the specification of this application are for the purpose of describing specific embodiments only and are not intended to limit this application.

[0030] As used herein, "one or more" refers to any one, any two, or any two or more of the listed items.

[0031] In this application, terms such as "first aspect," "second aspect," "third aspect," "fourth aspect," and "fifth aspect" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or quantity, nor should they be understood as implicitly indicating the importance or quantity of the technical features indicated. Furthermore, terms such as "first," "second," "third," "fourth," and "fifth" serve only as non-exhaustive enumeration and description, and should not constitute a closed-ended limitation on quantity.

[0032] In this application, the technical features described in an open manner include closed technical solutions composed of the listed features, and also include open technical solutions containing the listed features.

[0033] In this application, when referring to numerical ranges, unless otherwise specified, the numerical ranges are considered continuous and include the minimum and maximum values ​​of the range, as well as every value between such minimum and maximum values. Further, when a range refers to an integer, every integer between the minimum and maximum values ​​of the range is included. In addition, when multiple ranges are provided to describe a feature or characteristic, the ranges can be combined. In other words, unless otherwise specified, all ranges disclosed herein should be understood to include any and all subranges subsumed therein.

[0034] Unless otherwise specified, the percentage contents mentioned in this application refer to mass percentage for solid-liquid mixture and solid-solid mixture, and refer to volume percentage for liquid-liquid mixture.

[0035] The percentage concentrations mentioned in this application, unless otherwise specified, refer to the final concentration, which refers to the percentage of the added component in the system after the addition of the component.

[0036] The temperature parameters in this application, unless otherwise specified, allow for both constant temperature treatment and treatment within a certain temperature range. The constant temperature treatment allows for temperature fluctuations within the precision range of instrument control.

[0037] In a first aspect of the present application, a method for preparing steatite porcelain is provided, comprising the following steps:

[0038] S10. The magnesium-containing powder, dispersant and solvent are mixed to prepare a slurry;

[0039] S20 the slurry is mixed with a binder and a plasticizer, and after forming, a green porcelain sheet is prepared;

[0040] S30 After the green porcelain sheets are laminated, isostatic pressing is performed to prepare a green body;

[0041] S40. Degreasing and sintering the green body to prepare the steatite porcelain.

[0042] In one example, in step S10, the magnesium-containing powder includes talc, barium carbonate, silicon dioxide, and aluminum oxide in a mass ratio of (50-70): (6-18): (15-25): (4-12). It is understood that in the present application, the mass ratio of talc, barium carbonate, silicon dioxide, and aluminum oxide can be selected from any value between (50-70): (6-18): (15-25): (4-12). Specifically, the mass ratio of talc, barium carbonate, silicon dioxide, and aluminum oxide includes, but is not limited to, 50:6:15:4, 60:8:20:8, 60:11:20:8, 61:11:20:8, 62:11:20:8, 61:12:22:8, 65:11:20:8, or 70:18:25:12.

[0043] Preferably, the mass ratio of talc, barium carbonate, silicon dioxide, and aluminum oxide is (58-63): (8-13): (18-22): (6-10). Magnesium-containing powder selected within this mass range can provide a high bonding strength between the particles, resulting in excellent flexural strength.

[0044] In the preparation method of talc porcelain provided in the present application, by selecting talc powder, barium carbonate, silicon dioxide and aluminum oxide in a specific mass ratio and using them as magnesium-containing powder, on the one hand, the viscosity of the high-temperature liquid phase structure generated during sintering can be increased and the skeleton effect of the magnesium-containing powder can be used to make the talc porcelain less likely to deform, thereby widening the sintering range of the talc porcelain to 50°C.

[0045] On the other hand, by adjusting the raw material formula of talc porcelain and supplementing it with the preparation steps of isostatic pressing, degreasing and sintering, the phase change aging of talc porcelain can be further prevented and the strength of talc porcelain can be improved.

[0046] In one example, in step S40, the sintering process parameters include: a sintering temperature of 1250°C to 1300°C, and a sintering time of 2h to 6h. The sintering temperature in this application can be selected from any value between 1250°C and 1300°C. Specifically, the sintering temperature includes but is not limited to 1250°C, 1260°C, 1270°C, 1275°C, 1278°C, 1280°C, 1282°C, 1285°C, 1290°C, 1295°C or 1300°C. Specifically, the sintering time includes but is not limited to 2h, 2.5h, 3h, 4h, 4.5h, 5h, 5.5h or 6h.

[0047] In one example, in step S10, the mass ratio of the magnesium-containing powder, dispersant, and solvent is (3-5): (0.02-0.06): (4-6). It is understandable that the mass ratio of the magnesium-containing powder, dispersant, and solvent can be selected from any value between (3-5): (0.02-0.06): (4-6). Specifically, the mass ratio of the magnesium-containing powder, dispersant, and solvent includes but is not limited to 3:0.02:4, 4:0.02:4, 4:0.03:4, 4:0.03:5, 4:0.03:6, 4:0.04:3, 4:0.04:5, 4:0.04:6, 5:0.02:4, 5:0.04:6, or 5:0.06:6. By further limiting the mass ratio of the magnesium-containing powder, dispersant, and solvent, it is beneficial to improve the dispersion performance of the magnesium-containing powder and increase the mixing rate.

[0048] In one example, in step S10, the dispersant includes one or more of SC-0505k dispersant, DP8300 dispersant, and JM558B dispersant. The use of these dispersants can better disperse and stabilize the magnesium-containing powder, reduce agglomeration, further promote uniform dispersion, and contribute to the densification of the magnesium ceramic.

[0049] In one example, in step S10, the solvent includes ethyl acetate and butyl acetate in a mass ratio of 3:(1.5-2.5). Specifically, the mass ratio of ethyl acetate to butyl acetate includes, but is not limited to, 3:1.5, 3:1.8, 3:1.9, 3:2, 3:2.1, 3:2.2, or 3:2.5. The combined use of ethyl acetate and butyl acetate effectively reduces surface tension between powders, improves contact between powder particles, and enhances mixing. Furthermore, the high volatility of ethyl acetate and butyl acetate allows for rapid removal during subsequent drying or degreasing processes, reducing residual content.

[0050] In one example, in step S20, the mass ratio of the slurry, the binder, and the plasticizer is 1:(0.1-0.3):(0.02-0.05). Specifically, the mass ratio of the slurry, the binder, and the plasticizer includes but is not limited to 1:0.1:0,02, 1:0.15:0.02, 1:0.17:0.02, 1:0.175:0.02, 1:0.175:0.03, 1:0.175:0.035, 1:0.2:0.03, 1:0.02:0.035, or 1:0.3:0.05. By limiting the mass ratio of the slurry, the binder, and the plasticizer, the bonding strength and impact resistance can be enhanced, thereby allowing the subsequently prepared talc porcelain to have excellent strength properties.

[0051] In one example, in step S20, the binder includes one or more of polyvinyl butyral and ethyl cellulose.

[0052] In one example, in step S20, the plasticizer includes one or more of dibutyl phthalate and polyethylene glycol.

[0053] In one specific example, in step S20, the plasticizer is selected from polyvinyl butyral glue with a solid content of 30%.

[0054] It is understood that in step S10 and step S20 of the present application, the mixing method can be any mixing method known in the art, for example, ball milling can be used. The ball milling speed can be 10 Hz to 20 Hz, the ball milling time can be 4 hours to 10 hours, and the ball milling material-liquid ratio can be (2 to 3):1.

[0055] In one example, in step S20, the step of preparing the green ceramic sheet includes:

[0056] The slurry is mixed with a binder and a plasticizer, and subjected to degassing and tape casting to prepare a green ceramic sheet.

[0057] In one example, the degassing process parameters include a vacuum degree of -0.015 MPa to -0.01 MPa and a degassing time of 20 to 40 minutes. By applying negative pressure and controlling the degassing time, bubbles can be quickly lifted and released. Furthermore, the addition of the binder in the previous step can further enhance the bonding properties of the material, further improving the density of the material and increasing the strength of the talc porcelain provided in this application.

[0058] It is understood that the present application does not limit the thickness of the green ceramic sheet and the laminate, and the thickness of both can be determined according to actual needs. In one example, the thickness of the green ceramic sheet is 150 μm to 300 μm.

[0059] In one specific example, step S20 includes the following steps:

[0060] S210. The slurry is mixed with a binder and a plasticizer, degassing, casting, and preparing a cast sheet;

[0061] S220 the cast sheet is dried to prepare a single-layer green porcelain sheet;

[0062] S230. The single-layer green ceramic sheets are stacked, vacuum-packed, and isostatically pressed to prepare a green body.

[0063] In step S220, the cast sheet may be dried by heating.

[0064] In one example, in step S30, the process parameters of the isostatic pressing treatment include: a temperature of 65°C to 75°C and a pressure of 55MPa to 65MPa. Specifically, the temperature of the isostatic pressing treatment includes but is not limited to 65°C, 66°C, 67°C, 68°C, 69°C, 70°C, 71°C, 72°C, 73°C, 74°C or 75°C. The pressure of the isostatic pressing treatment includes but is not limited to 55MPa, 56MPa, 57MPa, 58MPa, 59MPa, 60MPa, 62MPa, 63MPa or 65MPa. The isostatic pressing treatment carried out at this temperature and pressure can release the residual stress after lamination and reduce the risk of deformation of the material; it can also enhance the interaction force between molecules, increase the density of the material, and thereby increase the strength of the talc porcelain.

[0065] In one example, in step S40, the degreasing process parameters include: keeping warm at 75°C~85°C for 1h~3h, heating to 125°C~135°C and keeping warm for 1h~3h, heating to 345°C~355°C at a heating rate of 0.2°C / min~1.5°C / min, and keeping warm for 1.5h~2.5h. It can be understood that the holding temperature of the first stage can be selected from any value between 75°C~85°C, specifically including but not limited to 75°C, 76°C, 77°C, 79°C, 80°C, 82°C or 85°C. The holding temperature of the second stage can be selected from any value between 125°C~135°C, specifically including but not limited to 126°C, 128°C, 130°C, 133°C or 135°C. The holding temperature in the second stage can be selected from any value between 345°C and 355°C, including but not limited to 346°C, 348°C, 350°C, 353°C, or 355°C. The heating rate can be, but not limited to, 0.2°C / min, 0.5°C / min, 0.7°C / min, 1°C / min, 1.2°C / min, or 1.5°C / min.

[0066] Setting the heating rate to 0.2℃ / min~1.5℃ / min can avoid material stress and cracking temperature caused by excessive temperature changes, ensuring the stability and uniformity of the material during the degreasing process. At the same time, holding at 75℃~85℃, 125℃~135℃ and 345℃~355℃ respectively can ensure the removal of moisture from the organic matter in the material and reduce the porosity of the material. Furthermore, the final holding temperature of 345℃~355℃ realizes the preheating of the material, which, in conjunction with the subsequent sintering steps, can further improve the mechanical properties of the material.

[0067] In one example, the method for preparing talc porcelain further includes the following steps:

[0068] S50. Level the steatite porcelain that does not meet the flatness requirements.

[0069] In one example, the temperature for the leveling process is 1240°C to 1260°C.

[0070] In a second aspect of the present application, a talc porcelain is provided, which is prepared by the preparation method described in any example of the first aspect of the present application.

[0071] The third aspect of the present application provides a use of the steatite porcelain described in the second aspect of the present application in the preparation of semiconductor devices.

[0072] The following are specific examples. Unless otherwise specified, the raw materials used in the examples are all commercially available products.

[0073] Example 1

[0074] Example 1 of the present application provides a steatite porcelain and a preparation method thereof, comprising the following steps:

[0075] (1) Talc, barium carbonate, silicon dioxide and aluminum oxide were weighed in a mass ratio of 61:11:20:8 to prepare magnesium-containing powder.

[0076] (2) Add SC-0505k dispersant and solvent to the magnesium-containing powder in step (1) to make the mass ratio of magnesium-containing powder, dispersant and solvent be 4:0.04:5, wherein the solvent includes ethyl acetate and butyl acetate in a mass ratio of 3:2; then mix and ball-mill the above mixture at a rotation speed of 15 Hz for 8 h, with a ball-milling material-liquid ratio of 3:1 to obtain a slurry.

[0077] (3) Add PVB glue (binder) with a solid content of 30% and dibutyl phthalate (plasticizer) to the slurry of step (2) so that the mass ratio of the slurry, binder and plasticizer in step (2) is 1:0.177:0.035; after the addition is completed, continue ball milling and mixing for 8 hours.

[0078] (4) The slurry in step (3) is vacuum degassed at a pressure of -0.01 MPa for 30 minutes, and then cast to prepare a cast sheet; the cast sheet is dried at a temperature of 30°C to 95°C to prepare a single-layer green ceramic sheet.

[0079] (5) The single-layer green ceramic sheets in step (4) are stacked and vacuum-packed, and then isostatically pressed at a temperature of 70°C and a pressure of 60 MPa for 50 minutes to obtain a green body.

[0080] (6) The green body in step (5) was kept at 80°C for 2 hours, then heated to 130°C and kept at this temperature for another 2 hours, and then heated to 350°C at a heating rate of 0.5°C / min and kept at this temperature for 2 hours for degreasing; and a semi-finished product was prepared.

[0081] (7) The semi-finished product in step (6) is sintered at a temperature of 1280°C for 3 hours to obtain talc porcelain.

[0082] Example 2

[0083] Example 2 of the present application provides a talc porcelain and a preparation method thereof, comprising the following steps:

[0084] (1) Talc, barium carbonate, silicon dioxide and aluminum oxide were weighed in a mass ratio of 55:18:15:12 to prepare magnesium-containing powder.

[0085] (2) Add SC-0505k dispersant and solvent to the magnesium-containing powder in step (1) to make the mass ratio of magnesium-containing powder, dispersant and solvent be 3:0.02:5, wherein the solvent includes ethyl acetate and butyl acetate in a mass ratio of 3:1.5; then mix and ball-mill the above mixture at a rotation speed of 20 Hz for 8 h, with a ball-milling material-liquid ratio of 3:1 to obtain a slurry.

[0086] (3) Add PVB glue with a solid content of 30% and dibutyl phthalate to the slurry of step (2) so that the mass ratio of the slurry, binder and plasticizer in step (2) is 1:0.1:0.02; after the addition is completed, continue ball milling and mixing for 8 hours.

[0087] (4) The slurry in step (3) is vacuum degassed at a pressure of -0.015 MPa for 40 minutes, and then tape-casted to prepare a tape-cast sheet; the tape-cast sheet is dried at a temperature of 30°C to 95°C to prepare a single-layer green ceramic sheet.

[0088] (5) The single-layer green ceramic sheets in step (4) are stacked and vacuum-packed, and then isostatically pressed at a temperature of 65°C and a pressure of 55 MPa for 60 minutes to obtain a green body.

[0089] (6) The green body in step (5) was kept at 75°C for 3 hours, then heated to 125°C and kept at this temperature for 2 hours, and then heated to 345°C at a heating rate of 0.2°C / min and kept at this temperature for 1.5 hours for degreasing; and a semi-finished product was prepared.

[0090] (7) The semi-finished product in step (6) is sintered at a temperature of 1250° C. for 4 hours to obtain talc porcelain.

[0091] Example 3

[0092] Example 3 of the present application provides a steatite porcelain and a preparation method thereof, comprising the following steps:

[0093] (1) Talc, barium carbonate, silicon dioxide and aluminum oxide were weighed in a mass ratio of 70:15:15:10 to prepare magnesium-containing powder.

[0094] (2) Add JM558B dispersant and solvent to the magnesium-containing powder in step (1) to make the mass ratio of magnesium-containing powder, dispersant and solvent be 5:0.06:6, wherein the solvent includes ethyl acetate and butyl acetate in a mass ratio of 3:2.5; then the above-mentioned mixture is mixed and ball-milled at a speed of 20 Hz for 8 hours with a ball-milling material-liquid ratio of 3:1 to obtain a slurry.

[0095] (3) Add PVB glue with a solid content of 30% and dibutyl phthalate to the slurry of step (2) so that the mass ratio of the slurry, binder and plasticizer in step (2) is 1:0.3:0.05; after the addition is completed, continue ball milling and mixing for 8 hours.

[0096] (4) The slurry in step (3) is vacuum degassed at a pressure of -0.01 MPa for 20 minutes, and then cast into a cast sheet; the cast sheet is dried at a temperature of 30°C to 95°C to prepare a single-layer green ceramic sheet.

[0097] (5) The single-layer green ceramic sheets in step (4) are stacked and vacuum-packed, and then isostatically pressed at a temperature of 75°C and a pressure of 65 MPa for 60 minutes to obtain a green body.

[0098] (6) The green body in step (5) was kept at 85°C for 1 hour, then heated to 135°C and kept heated for 1 hour, and then heated to 355°C at a heating rate of 1.5°C / min and kept heated for 2.5 hours for degreasing; and a semi-finished product was prepared.

[0099] (7) The semi-finished product in step (6) is sintered at a temperature of 1300° C. for 2 hours to obtain talc porcelain.

[0100] Example 4

[0101] Example 4 of the present application provides a steatite porcelain and a preparation method thereof, comprising the following steps:

[0102] (1) Talc, barium carbonate, silicon dioxide and aluminum oxide were weighed in a mass ratio of 61:11:20:8 to prepare magnesium-containing powder.

[0103] (2) Dispersant DP8300 and solvent were added to the magnesium-containing powder in step (1) to make the mass ratio of magnesium-containing powder, dispersant and solvent be 4:0.04:5, wherein the solvent comprises ethyl acetate and butyl acetate in a mass ratio of 3:2; then the above-mentioned mixture was mixed and ball-milled at a speed of 15 Hz for 8 h, with a ball-milling material-liquid ratio of 3:1 to obtain a slurry.

[0104] (3) Add PVB glue (binder) with a solid content of 30% and dibutyl phthalate (plasticizer) to the slurry of step (2) so that the mass ratio of the slurry, binder and plasticizer in step (2) is 1:0.177:0.035; after the addition is completed, continue ball milling and mixing for 8 hours.

[0105] (4) The slurry in step (3) is vacuum degassed at a pressure of -0.01 MPa for 30 minutes, and then cast to prepare a cast sheet; the cast sheet is dried at a temperature of 30°C to 95°C to prepare a single-layer green ceramic sheet.

[0106] (5) The single-layer green ceramic sheets in step (4) are stacked and vacuum-packed, and then isostatically pressed at a temperature of 70°C and a pressure of 60 MPa for 50 minutes to obtain a green body.

[0107] (6) The green body in step (5) was kept at 80°C for 2 hours, then heated to 130°C and kept at this temperature for another 2 hours, and then heated to 350°C at a heating rate of 0.5°C / min and kept at this temperature for 2 hours for degreasing; and a semi-finished product was prepared.

[0108] (7) The semi-finished product in step (6) is sintered at a temperature of 1280° C. for 3 hours to obtain talc porcelain.

[0109] Example 5

[0110] Example 5 of the present application provides a steatite porcelain and a preparation method thereof, comprising the following steps:

[0111] (1) Talc, barium carbonate, silicon dioxide and aluminum oxide were weighed in a mass ratio of 61:11:20:8 to prepare magnesium-containing powder.

[0112] (2) Add DP8300 dispersant and solvent to the magnesium-containing powder in step (1) to make the mass ratio of magnesium-containing powder, dispersant and solvent be 4:0.04:5, wherein the solvent includes ethyl acetate and butyl acetate in a mass ratio of 3:2; then the above-mentioned mixture is mixed and ball-milled at a speed of 15 Hz for 8 hours with a ball-milling material-liquid ratio of 3:1 to obtain a slurry.

[0113] (3) Add ethyl cellulose (binder) and dibutyl phthalate (plasticizer) to the slurry of step (2) so that the mass ratio of the slurry, binder and plasticizer in step (2) is 1:0.177:0.035; after the addition is completed, continue ball milling for 8 hours.

[0114] (4) The slurry in step (3) is vacuum degassed at a pressure of -0.01 MPa for 30 minutes, and then cast to prepare a cast sheet; the cast sheet is dried at a temperature of 30°C to 95°C to prepare a single-layer green ceramic sheet.

[0115] (5) The single-layer green ceramic sheets in step (4) are stacked and vacuum-packed, and then isostatically pressed at a temperature of 70°C and a pressure of 60 MPa for 50 minutes to obtain a green body.

[0116] (6) The green body in step (5) was kept at 80°C for 2 hours, then heated to 130°C and kept at this temperature for another 2 hours, and then heated to 350°C at a heating rate of 0.5°C / min and kept at this temperature for 2 hours for degreasing; and a semi-finished product was prepared.

[0117] (7) The semi-finished product in step (6) is sintered at a temperature of 1280° C. for 3 hours to obtain talc porcelain.

[0118] Example 6

[0119] Example 6 of the present application provides a steatite porcelain and a preparation method thereof, comprising the following steps:

[0120] (1) Talc, barium carbonate, silicon dioxide and aluminum oxide were weighed in a mass ratio of 61:11:20:8 to prepare magnesium-containing powder.

[0121] (2) Dispersant JM558B and solvent were added to the magnesium-containing powder in step (1) to make the mass ratio of magnesium-containing powder, dispersant and solvent be 4:0.04:5, wherein the solvent includes ethyl acetate and butyl acetate in a mass ratio of 3:2; then the above-mentioned mixture was mixed and ball-milled at a speed of 15 Hz for 8 h, with a ball-milling material-liquid ratio of 3:1 to obtain a slurry.

[0122] (3) Add PVB glue (binder) with a solid content of 30% and dibutyl phthalate (plasticizer) to the slurry of step (2) so that the mass ratio of the slurry, binder and plasticizer in step (2) is 1:0.177:0.035; after the addition is completed, continue ball milling and mixing for 8 hours.

[0123] (4) The slurry in step (3) is vacuum degassed at a pressure of -0.01 MPa for 30 minutes, and then cast to prepare a cast sheet; the cast sheet is dried at a temperature of 30°C to 95°C to prepare a single-layer green ceramic sheet.

[0124] (5) The single-layer green ceramic sheets in step (4) are stacked and vacuum-packed, and then isostatically pressed at a temperature of 70°C and a pressure of 60 MPa for 50 minutes to obtain a green body.

[0125] (6) The green body in step (5) was kept at 80°C for 2 hours, then heated to 130°C and kept at this temperature for another 2 hours, and then heated to 350°C at a heating rate of 0.5°C / min and kept at this temperature for 2 hours for degreasing; and a semi-finished product was prepared.

[0126] (7) The semi-finished product in step (6) is sintered at a temperature of 1280° C. for 4 hours to obtain talc porcelain.

[0127] Comparative Example 1

[0128] Comparative Example 1 is substantially the same as Example 1, with the main difference being that, in step (1), the magnesium-containing powder comprises talc, barium carbonate, silicon dioxide, and aluminum oxide in a mass ratio of 80:5:5:10.

[0129] Comparative Example 2

[0130] Comparative Example 2 is substantially the same as Example 1, except that, in step (1), the magnesium-containing powder does not include barium carbonate. Specifically, the magnesium-containing powder is prepared by weighing talc, silicon dioxide, and aluminum oxide in a mass ratio of 72:20:8.

[0131] Comparative Example 3

[0132] Comparative Example 3 is basically the same as Example 1, with the main difference being that, in step (6), the process parameters for the degreasing treatment are different, specifically comprising: keeping the green body in step (5) at 100°C for 2h, heating it to 210°C and keeping it for 2h, then heating it to 350°C at a heating rate of 0.5°C / min and keeping it for 2h, and performing degreasing treatment; preparing a semi-finished product.

[0133] Comparative Example 4

[0134] Comparative Example 4 is basically the same as Example 1, with the main difference being that in step (7), the process parameters for the sintering treatment are different, specifically comprising: sintering the semi-finished product in step (6) at a temperature of 1350° C. for 4 hours to obtain talc porcelain.

[0135] The performance tests were performed on the steatite porcelain of the embodiment and the comparative example, and the corresponding test results are shown in Table 1.

[0136] Performance testing:

[0137] (1) Test water absorption according to GB / T 25995-2010;

[0138] (2) Test the bending strength in accordance with GB / T 39826-2021.

[0139] Table 1

[0140]

[0141] The composition and mass ratio of the magnesium-containing powder in Comparative Examples 1 and 2 resulted in poor strength and high water absorption of the talc porcelain produced therefrom. In Comparative Example 3, the green body degreasing process parameters were different, resulting in slightly poorer technical results. In Comparative Example 4, the sintering temperature was too high, which resulted in over-sintering of the talc porcelain, affecting its strength and water absorption.

[0142] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0143] The embodiments described above only express several implementation methods of the present application, which are convenient for understanding the technical solutions of the present application in a specific and detailed manner, but they cannot be understood as limiting the scope of protection of the invention patent. It should be pointed out that for ordinary technicians in this field, without departing from the concept of the present application, several variations and improvements can be made, which all fall within the scope of protection of the present application. It should be understood that the technical solutions obtained by those skilled in the art through logical analysis, reasoning or limited experiments on the basis of the technical solutions provided in the present application are all within the scope of protection of the claims attached to the present application. Therefore, the scope of protection of the patent of this application shall be based on the content of the attached claims, and the description can be used to interpret the content of the claims.

Claims

1. A method for preparing talc porcelain, characterized in that: The following steps are involved: Mixing magnesium-containing powder, a dispersant and a solvent to prepare a slurry; The slurry is mixed with a binder and a plasticizer, and formed into a green ceramic sheet; After laminating the green ceramic sheets, isostatic pressing is performed to prepare a green body; Degreasing and sintering the green body to prepare the steatite porcelain; The magnesium-containing powder comprises talc, barium carbonate, silicon dioxide and aluminum oxide in a mass ratio of (50-70): (6-18): (15-25): (4-12); The sintering process parameters include: a sintering temperature of 1250° C. to 1300° C., and a sintering time of 2 h to 6 h.

2. The preparation method according to claim 1, characterized in that The mass ratio of the magnesium-containing powder, the dispersant and the solvent is (3-5): (0.02-0.06): (4-6).

3. The preparation method according to claim 1, characterized in that The dispersant includes one or more of SC-0505k dispersant, DP8300 dispersant and JM558B dispersant.

4. The preparation method according to claim 1, characterized in that The solvent includes ethyl acetate and butyl acetate in a mass ratio of 3: (1.5-2.5).

5. The preparation method according to claim 1, characterized in that The step of mixing the slurry with the binder and the plasticizer has one or more of the following characteristics: (1) The mass ratio of the slurry, the binder and the plasticizer is 1: (0.1-0.3): (0.02-0.05); (2) The binder includes one or more of polyvinyl butyral and ethyl cellulose; (3) The plasticizer includes one or more of dibutyl phthalate and polyethylene glycol.

6. The preparation method according to claim 1, characterized in that The steps of preparing green ceramic sheets include: The slurry is mixed with a binder and a plasticizer, and subjected to degassing and tape casting to prepare a green ceramic sheet; The degassing process parameters include: vacuum degree of -0.015 MPa to -0.01 MPa, and degassing time of 20 min to 40 min.

7. The preparation method according to any one of claims 1 to 6, characterized in that The process parameters of the isostatic pressing treatment include: a temperature of 65° C. to 75° C. and a pressure of 55 MPa to 65 MPa.

8. The preparation method according to any one of claims 1 to 6, characterized in that The degreasing process parameters include: keeping the temperature at 75°C to 85°C for 1 hour to 3 hours, heating to 125°C to 135°C and keeping the temperature for 1 hour to 3 hours, heating to 345°C to 355°C at a heating rate of 0.2°C / min to 1.5°C / min, and keeping the temperature for 1.5 hours to 2.5 hours.

9. A talc porcelain, characterized in that: It is prepared by the preparation method according to any one of claims 1 to 8.

10. A semiconductor device, characterized in that: Including the steatite porcelain according to claim 9.

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