Detection and in-situ modification method and device for thin-wall optical element

Abstract

The invention discloses a detection and in-situ modification method and device for a thin-wall optical element, and belongs to the technical field of precision optical manufacturing. According to the method, high-precision real-time measurement of the surface shape of the thin-wall optical element and online correction of local errors are realized through laser confocal optical detection and plasma heating modification technologies. In the detection stage, acquiring three-dimensional surface shape data of the surface of the optical element by using a confocal microscopy technology; in the shaping stage, according to the surface shape data, local heating shaping is carried out by adopting an ion beam. The invention provides a detection and in-situ modification method and device for a thin-wall optical element, so as to realize rapid and accurate detection and modification of the thin-wall optical element. The method breaks through the efficiency bottleneck of traditional detection and modification, effectively reduces the clamping error, and is suitable for rapid and high-precision detection and modification of the thin-wall optical element.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical element processing, and in particular relates to a method and device for detecting and in-situ shaping of thin-walled optical elements. Background Art

[0002] Against the backdrop of continuous advancements in processing and detection technologies, aspheric optical components are widely used in cutting-edge fields such as deep space observation, biomedicine, and military industry due to their unique advantages over traditional components, such as high design freedom, good imaging quality, and lightweight. However, due to their complex shape characteristics, how to detect and modify the processed aspheric surfaces has become an important challenge and key issue in the field of optical processing.

[0003] Optical components are typically ultra-smooth, often with complex free-form shapes. Thin-walled optical components are susceptible to deformation during processing, and their surface accuracy and quality directly impact the performance of optical systems. Therefore, precise inspection and shaping of thin-walled optical components are crucial. Existing inspection and shaping methods often require complex equipment and cumbersome procedures, making in-situ shaping difficult to achieve, limiting the efficiency and accuracy of optical component processing. Therefore, a method and device for inspecting and in-situ shaping thin-walled optical components was designed. Summary of the Invention

[0004] The purpose of the present invention is to provide a method and device for detecting and reshaping thin-walled optical elements, so as to achieve rapid and accurate detection and reshaping of thin-walled optical elements.

[0005] The technical solution adopted by the present invention is:

[0006] A device for detecting and in-situ shaping of thin-walled optical elements comprises a laser confocal detection device, a heating shaping and cleaning device; the laser confocal detection device is used to detect the surface shape of the thin-walled optical element, and the heating shaping device is used to heat and shape the thin-walled optical element and can also clean the outer surface to improve its surface quality.

[0007] Compared with the prior art, the present invention has the following beneficial effects:

[0008] 1. The present invention realizes high-precision detection of thin-walled optical components through laser confocal detection technology, and can quickly obtain the surface shape data of thin-walled optical components.

[0009] 2. The present invention adopts plasma heating modification technology, which can effectively correct the detected surface errors, improve the processing accuracy of optical components, and reduce the roughness of their outer surfaces.

[0010] 3. The laser confocal detection device of the present invention is symmetrically arranged with the heating modification device. The surface shape data obtained by laser confocal detection is used to quickly modify the surface shape of the thin-walled optical element by plasma heating.

[0011] 4. This invention breaks through the efficiency bottleneck of traditional detection and shaping, effectively reduces clamping errors, and is suitable for fast and high-precision detection and shaping of thin-walled optical components.

[0012] 5. Compared with other heating methods, the plasma heating modification technology adopted in the present invention can prevent the oxidation reaction of the metal surface caused by heating. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic structural diagram of the present invention;

[0014] Figure 2 Schematic diagram of the shaping device of the present invention;

[0015] Figure 3 Schematic diagram of the detection device of the present invention;

[0016] Figure 4 It is composed of a plasma generating device system;

[0017] Among them: 1. Plasma heating and shaping device; 2. Thin-walled optical element; 3. Laser confocal detection device; 4. Optical platform; 5. Turntable; 6. Gas tank; 7. Plasma control device; 8. Plasma generating device; 9. Guide rail; 10. Plasma spray gun; 11. Side head; 12. Air floatation guide rail; 13. Column; 14. Gas supply system; 15. Gas flow controller; 16. Quartz reaction chamber; 17. Power supply system; 18. Sealed working chamber; 19. Metal pipe; 20. Motion control system; 21. Exhaust gas treatment system; 22. Cooling system water inlet; 23. Cooling system water outlet. DETAILED DESCRIPTION

[0018] In order to better understand the purpose, structure and function of the present invention, the embodiments of the present invention are further described in detail below with reference to the accompanying drawings.

[0019] like Figure 1 As shown, the present invention provides a device for detecting and reshaping thin-walled optical elements, comprising a plasma heating and reshaping device (1); a thin-walled optical element (2); a laser confocal detection device (3); an optical platform (4); and a turntable (5). The plasma heating and reshaping device (1), the laser confocal detection device (3), and the turntable (5) are all mounted on the optical platform (4). The plasma heating and reshaping device (1) is used to heat and reshape surface defects of the optical element; the laser confocal detection device (3) is used to perform surface shape detection on the optical element; and the turntable is used to rotate the optical element.

[0020] like Figure 2 As shown, the plasma heating and shaping device (1) comprises a gas cylinder (6), a plasma control device (7), a plasma generating device (8), a guide rail (9), and a plasma spray gun (10) for heating and repairing the surface shape of a thin-walled optical element.

[0021] like Figure 3 As shown, the laser confocal detection device (2) comprises a probe (11), an air-floating guide rail (12), and a column (13), and is used to detect surface shape data of thin-walled optical elements.

[0022] like Figure 4 As shown, the plasma generating device (8) includes a gas supply system (14), a gas flow controller (15), a quartz reaction chamber (16), a power supply system (17), a sealed working chamber (18), a metal pipe (19), a motion control system (20), an exhaust gas treatment system (21), a cooling system water inlet (22), and a cooling system water outlet (23).

[0023] Furthermore, if Figure 2 As shown, the plasma heating and shaping device is provided with gas by a gas cylinder (6), a plasma generating device (8) is used to generate plasma, and a plasma control device (7) is used to control the flow rate and temperature of the plasma. The plasma heating and shaping device is connected to a plasma spray gun (10) through a metal pipe. The plasma spray gun (10) is fixed on a guide rail and can be moved by computer control.

[0024] Furthermore, if Figure 3 As shown, the laser confocal detection device (2) detects the optical element by controlling the air-floating guide rail (12) through a computer, and the surface data collected by the detection head is transmitted to the computer for analysis.

[0025] Furthermore, when the plasma is heated, an ionosphere is formed on the heated surface, which effectively prevents the oxidation reaction of the metal caused by heating.

[0026] like Figure 1 As shown, the present invention provides a method for detecting and modifying thin-walled optical components, comprising the following steps:

[0027] S1. Install the laser confocal detection device (1), the plasma heating and shaping device (2), and the turntable on the optical platform.

[0028] S2. Mount the optical element on the turntable;

[0029] S3. Adjust the inspection head to a position 2 cm from the inner surface of the optical element for subsequent inspection;

[0030] S4. Adjust the position of the plasma torch so that it is symmetrical with the side head;

[0031] S5. Start the detection device, and the computer analyzes the detected surface data;

[0032] S6. The computer will analyze the defects of the optical element's surface shape and transmit them to the control system of the plasma generator. It will automatically adjust the temperature, residence time and flow of the plasma according to the degree of the surface defect, so as to accurately modify the optical element and clean the outer surface at the same time.

[0033] The present invention has the characteristics of high efficiency, high precision, simple operation and the like in the process of detecting and modifying thin-walled optical elements.

[0034] It will be understood that the present invention is described by way of some embodiments, and it will be appreciated by those skilled in the art that various changes or equivalent substitutions may be made to these features and embodiments without departing from the spirit and scope of the present invention. In addition, under the teachings of the present invention, these features and embodiments may be modified to adapt to specific circumstances and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are intended to be protected by the present invention.

Claims

1. A method and apparatus for detecting and in-situ shaping of thin-walled optical components, characterized by: The invention comprises a laser confocal detection device (3) and a heating and shaping device (1); the laser confocal detection device (3) is used to detect the surface shape of a thin-walled optical element (2); the plasma heating and shaping device (1) is used to quickly heat and shape the surface defects detected on the thin-walled optical element (2), and is also used to clean the surface of the thin-walled optical element (2).

2. The device for detecting and reshaping thin-walled optical components according to claim 1, characterized in that: The laser confocal detection device (3), the plasma heating and shaping device (1), and the turntable (5) are all mounted on an optical platform (4) and are used to precisely position the laser confocal detection device (3), the heating and shaping device (1), and the thin-walled optical element (2) to ensure the accuracy of surface shape detection and shaping of the thin-walled optical element (2).

3. The device for detecting and reshaping thin-walled optical components according to claim 1, characterized in that: The laser confocal detection device (3) and the plasma heating and shaping device (1) are symmetrically arranged, and detection and shaping are performed simultaneously.

4. The device for detecting and reshaping thin-walled optical components according to claim 1, characterized in that: The laser confocal detection device (3) comprises a probe (11), an air-floating guide rail (12), and a column (13) and is used for detecting the surface shape of a thin-walled optical element (2).

5. The device for detecting and reshaping thin-walled optical components according to claim 1, characterized in that: The plasma heating and shaping device (1) comprises a plasma generating device (8), a gas cylinder (6), a control device (7), a plasma spray gun (10), and a guide rail (9), and is used for locally heating a thin-walled optical element (2) to achieve shaping of defects in surface detection.

6. The plasma heating shaping device (1) according to claim 5, characterized in that: The plasma generating device (8) comprises a gas supply system (14), a gas flow controller (15), a quartz reaction chamber (16), a power supply system (17), a sealed working chamber (18), a metal pipe (19), a motion control system (20), an exhaust gas treatment system (21), a cooling system water inlet (22), and a cooling system water outlet (23).

7. A method for detecting and reshaping thin-walled optical components according to any one of claims 1 to 6, characterized in that: The following steps are involved: S1. Install the laser confocal detection device (1), the plasma heating and shaping device (2), and the turntable (5) on the optical platform; S2. Mount the optical element on the turntable; S3. Adjust the probe position to 2 cm from the inner surface of the optical component for subsequent inspection; S4. Adjust the position of the plasma torch so that it is symmetrical with the side head; S5. Start the detection device, and the computer analyzes the detected surface data; S6. The computer will analyze the defects of the optical element's surface shape and transmit them to the control system of the plasma generator. It will automatically adjust the temperature, residence time and flow of the plasma according to the degree of the surface defect, so as to accurately modify the optical element and clean the outer surface at the same time.

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