Portal frame

Abstract

The invention relates to the technical field of die bonders, and discloses a portal frame which comprises a cross beam, a heat insulation pad, a first workbench and a first linear motor, a first installation groove is formed in the cross beam and extends in the length direction of the cross beam, the groove bottom face of the first installation groove is connected with the heat insulation pad, and the first workbench is connected to the cross beam. The first workbench can slide in the length direction of the cross beam, the first linear motor comprises a first primary part and a first secondary part, the first primary part is connected to the first workbench, at least part of the first primary part is arranged in the first mounting groove, and the first secondary part is arranged in the first mounting groove; and the first secondary part is connected with the heat insulation pad, a ventilation gap is formed between the first secondary part and the groove bottom face of the first mounting groove in the depth direction of the first mounting groove, in the portal frame, the first linear motor can effectively dissipate heat, and the working efficiency of the first linear motor is guaranteed.

Description

Technical Field

[0001] The present invention belongs to the technical field of crystal bonding machines, and more specifically, relates to a gantry. Background Art

[0002] The gantry is one of the components of the die bonder. It consists of a crossbeam, columns, slider guides and linear motors, achieving high-speed and high-precision movement in the X, Y and Z axis planes, driving the die bond head to complete die retrieval and placement actions. Among them, the linear motor on the crossbeam is used to drive the die bond head to translate along the X axis. In order to achieve efficient production, the linear motor on the crossbeam needs to drive the die bond head to start and stop frequently and translate at high speed. In this process, due to the high frequency of operation, the linear motor generates a lot of heat and heats up. The increase in temperature causes the linear motor body and the crossbeam structure to expand thermally and deform, which will cause the position of the die bond head to change slightly when it translates along the X axis, resulting in die bond position deviation, making it difficult for the chip placement accuracy to meet process requirements and the product yield low. In addition, the increase in temperature will also cause the linear motor's working efficiency to decrease. Therefore, it can be seen that the linear motor on the crossbeam is the direct drive source in the X-axis direction. Because it needs to drive the die bond head to start and stop frequently and translate at high speed, it becomes the component with the highest heat generation and the most urgent heat dissipation demand in the gantry. Summary of the Invention

[0003] The main purpose of the present invention is to provide a gantry, the linear motor on the crossbeam of which can effectively dissipate heat, thereby ensuring the working efficiency of the linear motor.

[0004] According to a first aspect of the present invention, a gantry is provided, comprising a crossbeam, a thermal insulation pad, a first workbench and a first linear motor, wherein the crossbeam is provided with a first mounting groove, the first mounting groove extends along the length direction of the crossbeam, the bottom surface of the first mounting groove is connected to the thermal insulation pad, the first workbench is connected to the crossbeam, and the first workbench can slide along the length direction of the crossbeam, the first linear motor comprises a first primary component and a first secondary component, the first primary component is connected to the first workbench, and the first primary component is at least partially arranged in the first mounting groove, the first secondary component is arranged in the first mounting groove, and the first secondary component is connected to the thermal insulation pad, and a ventilation gap is formed between the first secondary component and the bottom surface of the first mounting groove along the depth direction of the first mounting groove.

[0005] In a specific embodiment of the present invention, both ends of the first mounting groove are open ends in the length direction of the beam, the groove cavity cross-section of the first mounting groove perpendicular to the length direction of the beam is trapezoidal, and the space of the first mounting groove gradually increases from the bottom surface of the groove to the groove mouth.

[0006] In a specific embodiment of the present invention, the gantry further comprises a first heat dissipation assembly;

[0007] In the depth direction of the first mounting groove, a second mounting groove is provided on the side of the first workbench facing the beam, the second mounting groove extends along the length direction of the beam, the bottom surface of the second mounting groove is connected to the first heat dissipation assembly, and the first primary component is connected to the first heat dissipation assembly.

[0008] In a specific embodiment of the present invention, the first heat dissipation assembly includes a first support frame, a first cooling pipe and a first support seat, the first support frame is connected to the bottom surface of the second mounting groove, the first cooling pipe is connected to the first support frame, the first support seat connects the first primary component and the first support frame, the first cooling pipe is a serpentine pipe, the first cooling pipe is arranged between the first support frame and the first support seat, and the first cooling pipe is used to transport cooling medium.

[0009] In a specific embodiment of the present invention, in the length direction of the beam, both ends of the second mounting groove are open ends, the first support frame and the groove side of the second mounting groove are spaced apart to form a first ventilation channel, and the first ventilation channel extends along the length direction of the beam.

[0010] In a specific embodiment of the present invention, the gantry further includes a second worktable and a second linear motor, the second worktable is connected to the first worktable and can slide in a vertical direction, the second linear motor is arranged between the first worktable and the second worktable, the second linear motor includes a second primary component and a second secondary component, the second primary component is connected to the first worktable, and the second secondary component is connected to the second worktable;

[0011] Wherein, a cooling channel is provided in the second workbench, and the cooling channel is used to transport cooling medium.

[0012] In a specific embodiment of the present invention, the gantry further includes a support beam, a second cooling pipe, a third workbench and a third linear motor, the support beam extending horizontally and longitudinally, a top surface of the support beam being provided with a receiving groove, a second cooling pipe being provided in the receiving groove, the second cooling pipe being used for conveying a cooling medium, the third workbench being connected to the top surface of the support beam, and the third workbench being capable of sliding along the length direction of the support beam, the third linear motor being arranged between the support beam and the third workbench, the third linear motor including a third primary component and a third secondary component, the third primary component being connected to the third workbench, the third secondary component being connected to the top surface of the support beam, and the third secondary component covering at least a portion of the receiving groove, and the third secondary component being arranged opposite to the second cooling pipe in a vertical direction;

[0013] The crossbeam is connected to the third workbench.

[0014] In a specific embodiment of the present invention, the gantry further comprises a second heat dissipation assembly;

[0015] In the vertical direction, a third mounting groove is provided on a side of the third workbench facing the support beam, and the third mounting groove extends along the length direction of the support beam. The bottom surface of the third mounting groove is connected to the second heat dissipation assembly, and the third primary component is connected to the second heat dissipation assembly.

[0016] In a specific embodiment of the present invention, the second heat dissipation assembly includes a second support frame, a third cooling pipe and a second support seat, the second support frame is connected to the bottom surface of the third mounting groove, the third cooling pipe is connected to the second support frame, the second support seat connects the third primary component and the second support frame, the third cooling pipe is a serpentine pipe, the third cooling pipe is arranged between the second support frame and the second support seat, and the third cooling pipe is used to transport cooling medium.

[0017] In a specific embodiment of the present invention, in the length direction of the support beam, both ends of the third mounting groove are open ends, the second support frame is spaced apart from the groove side of the third mounting groove and forms a second ventilation channel, and the second ventilation channel extends along the length direction of the support beam.

[0018] One of the above technical solutions of the present invention has at least one of the following advantages or beneficial effects:

[0019] In the gantry of the present invention, in the first linear motor, the first secondary component is connected to the bottom surface of the first mounting groove of the beam through a thermal insulation pad. Based on the setting of the thermal insulation pad, a ventilation gap is formed between the first secondary component and the bottom surface of the first mounting groove. In actual application, the first workbench slides along the length direction of the beam under the drive of the first linear motor. During this process, the first workbench drives the air to flow and generates airflow. The airflow flows through the ventilation gap and the space between the first primary component and the first secondary component, thereby taking away the heat generated by the operation of the first linear motor. As a result, the first linear motor can effectively dissipate heat and ensure the working efficiency of the first linear motor. The setting of the ventilation gap increases the contact area between the airflow and the first linear motor, so that the airflow can better take away the heat generated by the operation of the first linear motor. Based on this, the gantry has the characteristic of good heat dissipation effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0021] Figure 1 is a perspective view of a gantry according to an embodiment of the present invention;

[0022] Figure 2 This is a three-dimensional diagram of the crossbeam, thermal insulation pad, first workbench and first linear motor in accordance with an embodiment of the present invention;

[0023] Figure 3 This is an embodiment of the present invention Figure 2 A is an enlarged schematic diagram;

[0024] Figure 4 This is a structural diagram of the crossbeam, thermal insulation pad and first secondary component in accordance with an embodiment of the present invention;

[0025] Figure 5 It is an exploded schematic diagram of the cooperation between the first primary component, the first heat dissipation assembly, the first workbench, the second primary component and the second workbench according to an embodiment of the present invention;

[0026] Figure 6 This is an embodiment of the present invention Figure 5 A magnified schematic diagram of middle B;

[0027] Figure 7 is a cross-sectional view of the second workbench according to an embodiment of the present invention;

[0028] Figure 8 is a three-dimensional diagram of the coordination of the support beam, the second cooling pipe, the third linear motor, and the third workbench according to an embodiment of the present invention;

[0029] Figure 9 This is an embodiment of the present invention Figure 8 A magnified schematic diagram of middle C;

[0030] Figure 10 This is an exploded schematic diagram of the cooperation between the third workbench, the third primary component, and the second heat dissipation assembly according to an embodiment of the present invention;

[0031] Figure 11 It is a structural diagram of the second heat dissipation component according to an embodiment of the present invention.

[0032] In the figure, 1. crossbeam; 1A. first mounting groove; 2. thermal insulation pad; 3. first workbench; 3A. second mounting groove; 4. first linear motor; 41. first primary component; 42. first secondary component; 5. first heat dissipation assembly; 51. first support frame; 52. first cooling pipe; 53. first support seat; 6. second workbench; 6A. cooling channel; 7. second linear motor; 71. second primary component; 8. support beam; 8A. accommodating groove; 9. second cooling pipe; 10. third workbench; 10A. third mounting groove; 11. third linear motor; 111. third primary component; 112. third secondary component; 12. second heat dissipation assembly; 121. second support frame; 122. third cooling pipe; 123. second support seat; 100. ventilation gap; 200. first ventilation channel; 300. second ventilation channel. DETAILED DESCRIPTION

[0033] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and are not to be construed as limiting the present invention.

[0034] In practical applications, the linear motor includes a primary component and a secondary component, wherein the primary component includes an iron core and coil windings connected to each other, and the secondary component includes a permanent magnet array. The primary component and the secondary component are electromagnetically coupled.

[0035] Reference Figures 1 to 11As shown, a gantry of a preferred embodiment of the present application includes a beam 1, an insulation pad 2, a first workbench 3 and a first linear motor 4. A first mounting groove 1A is provided on the beam 1, and the first mounting groove 1A extends along the length direction of the beam 1. The bottom surface of the first mounting groove 1A is connected to the insulation pad 2. The first workbench 3 is connected to the beam 1, and the first workbench 3 can slide along the length direction of the beam 1. The first linear motor 4 includes a first primary component 41 and a first secondary component 42. The first primary component 41 is connected to the first workbench 3, and the first primary component 41 is at least partially arranged in the first mounting groove 1A. The first secondary component 42 is arranged in the first mounting groove 1A, and the first secondary component 42 is connected to the insulation pad 2. Along the depth direction of the first mounting groove 1A, a ventilation gap 100 is formed between the first secondary component 42 and the bottom surface of the first mounting groove 1A.

[0036] In the gantry of the present invention, in the first linear motor 4, the first secondary component 42 is connected to the bottom surface of the first mounting groove 1A of the beam 1 through the thermal insulation pad 2. Based on the setting of the thermal insulation pad 2, a ventilation gap 100 is formed between the first secondary component 42 and the bottom surface of the first mounting groove 1A. In actual application, the first workbench 3 slides along the length direction of the beam 1 under the drive of the first linear motor 4. During this process, the first workbench 3 will drive the air flow to generate airflow, and the airflow will flow through the ventilation gap 100 and the space between the first primary component 41 and the first secondary component 42, thereby taking away the heat generated by the operation of the first linear motor 4. As a result, the first linear motor 4 can effectively dissipate heat and ensure the working efficiency of the first linear motor 4. Among them, the setting of the ventilation gap 100 increases the contact area between the airflow and the first linear motor 4, so that the airflow can better take away the heat generated by the operation of the first linear motor 4. Based on this, the gantry has the characteristics of good heat dissipation effect.

[0037] In this embodiment, the thermal insulation pad 2 is circular, and there are multiple thermal insulation pads 2, which are arranged at intervals; the arrangement of the thermal insulation pad 2 can prevent the heat generated by the operation of the first secondary component 42 from being directly transferred to the beam 1, and the heat of the first linear motor 4 is taken away by the air flow in the ventilation gap 100, effectively avoiding the problem of structural deformation of the beam 1 due to excessive temperature.

[0038] Further, such as Figure 4As shown, in the length direction of the beam 1, both ends of the first mounting groove 1A are open ends, which is more conducive to airflow, and the groove cavity cross-section of the first mounting groove 1A perpendicular to the length direction of the beam 1 is trapezoidal, and the space of the first mounting groove 1A gradually increases from the bottom surface of the groove to the groove mouth, that is, the first mounting groove 1A is a structure with a wide groove mouth and a narrow groove bottom. In actual application, since the first primary component 41 and the first secondary component 42 are arranged in the first mounting groove 1A, the heat generated by the first linear motor 4 during operation is concentrated in the first mounting groove 1A. At this time, the temperature in the first mounting groove 1A increases and the air pressure decreases. As a result, the airflow generated by the movement of the first workbench 3 will flow toward the first mounting groove 1A to form convection, and the groove mouth of the first mounting groove 1A is relatively wide, which reduces the resistance of the airflow entering the first mounting groove 1A, so that more airflow can flow into the first mounting groove 1A smoothly and quickly, with high air replacement efficiency, and fully exerting the effect of convection heat dissipation.

[0039] Further, such as Figure 3 and Figure 5 As shown, the gantry also includes a first heat dissipation component 5; in the depth direction of the first mounting groove 1A, a second mounting groove 3A is provided on the side of the first workbench 3 facing the beam 1, and the second mounting groove 3A extends along the length direction of the beam 1. The bottom surface of the second mounting groove 3A is connected to the first heat dissipation component 5, and the first primary component 41 is connected to the first heat dissipation component 5. Specifically, as mentioned above, the first primary component 41 includes a coil winding. Therefore, when the first linear motor 4 is working, the coil winding will generate higher heat, and the first heat dissipation component 5 is connected between the first workbench 3 and the first primary component 41. Based on this, the heat generated by the first primary component 41 will be taken away by the first heat dissipation component 5, that is, the first heat dissipation component 5 can further dissipate heat for the first primary component 41. The gantry has the characteristic of good heat dissipation effect. At the same time, the setting of the first heat dissipation component 5 avoids the direct transfer of heat to the first workbench 3, which causes thermal deformation of the first workbench 3, thereby ensuring the positioning accuracy of the first workbench 3.

[0040] In this embodiment, if Figure 5 and Figure 6 As shown, the first heat dissipation assembly 5 includes a first support frame 51, a first cooling pipe 52 and a first support seat 53. The first support frame 51 is connected to the bottom surface of the second mounting groove 3A, the first cooling pipe 52 is connected to the first support frame 51, and the first support seat 53 connects the first primary component 41 and the first support frame 51. The first cooling pipe 52 is a serpentine pipe. The first cooling pipe 52 is arranged between the first support frame 51 and the first support seat 53. The first cooling pipe 52 is used to transport a cooling medium. For example, the cooling medium is cooling air. The first cooling pipe 52 is a serpentine pipe, which has a longer transport path and can effectively take away the heat generated by the operation of the first primary component 41.

[0041] Specifically, the first support frame 51 is plate-shaped, and the first support frame 51 has a first connecting groove. The first cooling pipe 52 is arranged in the first connecting groove. Therefore, the first heat dissipation component 5 has the advantage of compact structure, and the first support seat 53 is strip-shaped, and there are multiple first support seats 53. Multiple first support seats 53 are arranged at intervals. At this time, based on the setting of the first support seat 53, a space for airflow to pass through is formed between the first support frame 51 and the first primary component 41. Therefore, heat can be dissipated through the airflow generated by the movement of the first workbench 3 and the cooling medium in the first cooling pipe 52, which is conducive to further improving the heat dissipation effect.

[0042] In this embodiment, if Figure 3 As shown, in the longitudinal direction of the beam 1, both ends of the second mounting groove 3A are open ends, and the first support frame 51 is spaced apart from the groove side of the second mounting groove 3A to form a first ventilation channel 200. The first ventilation channel 200 extends along the longitudinal direction of the beam 1. Specifically, the first ventilation channel 200 can also allow airflow to pass through. Thus, the airflow generated by the movement of the first workbench 3 and the cooling medium in the first cooling pipe 52 can dissipate heat for the first workbench 3 and the first primary component 41, which is conducive to further improving the heat dissipation effect.

[0043] In this embodiment, if Figure 2 and Figure 7As shown, the gantry also includes a second workbench 6 and a second linear motor 7. The second workbench 6 is connected to the first workbench 3, and the second workbench 6 can slide in the vertical direction. The second linear motor 7 is arranged between the first workbench 3 and the second workbench 6. The second linear motor 7 includes a second primary component 71 and a second secondary component (not shown in the figure). The second primary component 71 is connected to the first workbench 3, and the second secondary component is connected to the second workbench 6. The second linear motor 7 is used to drive the second workbench 6 to move in the vertical direction; wherein, a cooling channel 6A is provided in the second workbench 6, and the cooling channel 6A is used to transport a cooling medium. Exemplarily, the cooling medium transported in the cooling channel 6A is cooling air; the second workbench 6 is provided with a cooling channel 6A. In actual application In the cooling channel 6A, a cooling medium is transported, thereby taking away the heat generated by the second linear motor 7, and at the same time, it can also prevent the heat generated by the second linear motor 7 from causing thermal deformation of the second worktable 6, thereby ensuring the positioning accuracy of the second worktable 6; in addition, as mentioned above, the second primary component 71 includes a coil winding, so when the second linear motor 7 is working, the coil winding will generate higher heat. Based on this, the second primary component 71 is connected to the first worktable 3, and the heat generated by its operation will be conducted to the first worktable 3, so that the heat is taken away by the cooling medium in the first cooling pipe 52. Therefore, the heat generated by the second linear motor 7 can be taken away by the cooling medium in the first cooling pipe 52 and the cooling channel 6A at the same time, and the heat dissipation effect is good.

[0044] In this embodiment, if Figure 1 and Figure 8As shown, the gantry also includes a support beam 8, a second cooling pipe 9, a third workbench 10 and a third linear motor 11. The support beam 8 extends horizontally and longitudinally. The top surface of the support beam 8 is provided with a accommodating groove 8A. The accommodating groove 8A is provided with a second cooling pipe 9. The second cooling pipe 9 is used to transport a cooling medium. The third workbench 10 is connected to the top surface of the support beam 8, and the third workbench 10 can slide along the length direction of the support beam 8. The third linear motor 11 is provided between the support beam 8 and the third workbench 10. The third linear motor 11 includes a third primary component 111 and a third secondary component 112. The third primary component 111 is connected to the third workbench 10, and the third secondary component 112 is connected to the top surface of the support beam 8, and the third secondary component 112 covers at least part of the accommodating groove 8A, and the third secondary component 112 is arranged opposite to the second cooling pipe 9 in the vertical direction; the crossbeam 1 is connected to the third workbench 10, specifically, the third linear motor 11 is used to drive the crossbeam 1 to move along the length direction of the support beam 8, wherein the heat generated by the operation of the third linear motor 11 can be taken away by the cooling medium in the second cooling pipe 9, and the heat dissipation effect is good. Exemplarily, the cooling medium in the second cooling pipe 9 is cooling air; Exemplarily, the support beam 8, the second cooling pipe 9, the third workbench 10 and the third linear motor 11 constitute a support assembly, such as Figure 1 As shown, two support assemblies are provided that are arranged in parallel and spaced apart, and the two ends of the crossbeam 1 along its length direction are respectively connected to the two support assemblies.

[0045] Further, such as Figure 9 and Figure 10 As shown, the gantry also includes a second heat dissipation component 12; in the vertical direction, a third mounting groove 10A is provided on the side of the third workbench 10 facing the support beam 8, and the third mounting groove 10A extends along the length direction of the support beam 8. The bottom surface of the third mounting groove 10A is connected to the second heat dissipation component 12, and the third primary component 111 is connected to the second heat dissipation component 12. Specifically, as mentioned above, the third primary component 111 includes a coil winding. Therefore, when the third linear motor 11 is working, the coil winding will generate higher heat. Based on this, the setting of the second heat dissipation component 12 can effectively take away the heat generated by the third primary component 111, and at the same time, it can also avoid the heat generated by the third linear motor 11 from causing thermal deformation of the third workbench 10, thereby ensuring the positioning accuracy of the third workbench 10.

[0046] Further, such as Figure 11As shown, the second heat dissipation assembly 12 includes a second support frame 121, a third cooling pipe 122 and a second support seat 123. The second support frame 121 is connected to the bottom surface of the third mounting groove 10A, the third cooling pipe 122 is connected to the second support frame 121, and the second support seat 123 connects the third primary component 111 and the second support frame 121. The third cooling pipe 122 is a serpentine pipe. The third cooling pipe 122 is provided between the second support frame 121 and the second support seat 123. The third cooling pipe 122 is used to transport the cooling medium. Specifically, the second support frame 121 is plate-shaped and has a second connecting groove. The second cooling pipe 9 is arranged in the second connecting groove, thereby, the second heat dissipation assembly 12 has the advantage of compact structure, and the second support seat 123 is strip-shaped, and there are multiple second support seats 123, and multiple second support seats 123 are arranged at intervals. At this time, based on the setting of the second support seat 123, a space for airflow to pass through is formed between the second support frame 121 and the third primary component 111, thereby, the third linear motor 11 can be cooled by the airflow generated by the movement of the third workbench 10 and the cooling medium in the second cooling pipe 9, which is conducive to further improving the heat dissipation effect. Exemplarily, the cooling medium in the second cooling pipe 9 is cooling air.

[0047] Further, such as Figure 9 As shown, in the length direction of the support beam 8, both ends of the third mounting groove 10A are open ends, and the second support frame 121 is spaced apart from the groove side of the third mounting groove 10A to form a second ventilation channel 300. The second ventilation channel 300 extends along the length direction of the support beam 8. Specifically, the second ventilation channel 300 can also allow airflow to pass through, thereby allowing the airflow generated by the movement of the third workbench 10 and the cooling medium in the second cooling pipe 9 to dissipate heat for the third primary component 111 and the third workbench 10, which is beneficial to further improve the heat dissipation effect.

[0048] It should be noted that the gantry realizes high-speed and high-precision movement in the XYZ axis plane through the first linear motor 4, the second linear motor 7 and the third linear motor 11, wherein the first linear motor 4 realizes X-axis movement, the second linear motor 7 realizes Z-axis movement, and the third linear motor 11 realizes Y-axis movement. The gantry of the present invention is applied to a crystal bonding machine, the crystal bonding head is connected to the second workbench 6, and the support beam 8 is connected to the frame. The crystal bonding machine has the advantages of the above-mentioned gantry, and this application will not go into too much detail about this.

[0049] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A gantry, characterized in that: The invention comprises a crossbeam (1), a heat insulating pad (2), a first workbench (3) and a first linear motor (4), wherein the crossbeam (1) is provided with a first mounting groove (1A), the first mounting groove (1A) extends along the length direction of the crossbeam (1), the bottom surface of the first mounting groove (1A) is connected to the heat insulating pad (2), the first workbench (3) is connected to the crossbeam (1), and the first workbench (3) can slide along the length direction of the crossbeam (1), and the first linear motor (4) comprises a first primary component (41) and A first secondary component (42), wherein the first primary component (41) is connected to the first workbench (3), and the first primary component (41) is at least partially disposed in the first mounting groove (1A), the first secondary component (42) is disposed in the first mounting groove (1A), and the first secondary component (42) is connected to the thermal insulation pad (2), and a ventilation gap (100) is formed between the first secondary component (42) and the bottom surface of the first mounting groove (1A) along the depth direction of the first mounting groove (1A).

2. The gantry according to claim 1, characterized in that: In the longitudinal direction of the crossbeam (1), both ends of the first mounting groove (1A) are open ends, the groove cavity cross-section of the first mounting groove (1A) perpendicular to the longitudinal direction of the crossbeam (1) is trapezoidal, and the space of the first mounting groove (1A) gradually increases from the groove bottom surface to the groove opening.

3. The gantry according to claim 1, characterized in that: The gantry also includes a first heat dissipation component (5); In the depth direction of the first mounting groove (1A), a second mounting groove (3A) is provided on a side of the first workbench (3) facing the crossbeam (1), the second mounting groove (3A) extends along the length direction of the crossbeam (1), the bottom surface of the second mounting groove (3A) is connected to the first heat dissipation component (5), and the first primary component (41) is connected to the first heat dissipation component (5).

4. The gantry according to claim 3, characterized in that: The first heat dissipation assembly (5) comprises a first support frame (51), a first cooling pipe (52) and a first support seat (53); the first support frame (51) is connected to the bottom surface of the second mounting groove (3A); the first cooling pipe (52) is connected to the first support frame (51); the first support seat (53) is connected to the first primary component (41) and the first support frame (51); the first cooling pipe (52) is a serpentine pipe; the first cooling pipe (52) is arranged between the first support frame (51) and the first support seat (53); and the first cooling pipe (52) is used for conveying a cooling medium.

5. The gantry according to claim 4, characterized in that: In the longitudinal direction of the crossbeam (1), both ends of the second mounting groove (3A) are open ends, the first support frame (51) and the groove side of the second mounting groove (3A) are spaced apart and form a first ventilation channel (200), and the first ventilation channel (200) extends along the longitudinal direction of the crossbeam (1).

6. The gantry according to claim 4, characterized in that: The gantry also includes a second workbench (6) and a second linear motor (7), the second workbench (6) is connected to the first workbench (3), and the second workbench (6) can slide in a vertical direction, the second linear motor (7) is arranged between the first workbench (3) and the second workbench (6), the second linear motor (7) includes a second primary component (71) and a second secondary component, the second primary component (71) is connected to the first workbench (3), and the second secondary component is connected to the second workbench (6); A cooling channel (6A) is provided in the second workbench (6), and the cooling channel (6A) is used for conveying a cooling medium.

7. The gantry according to claim 1, characterized in that: The gantry also includes a support beam (8), a second cooling pipe (9), a third workbench (10) and a third linear motor (11), wherein the support beam (8) extends horizontally and longitudinally, a top surface of the support beam (8) is provided with a receiving groove (8A), the receiving groove (8A) is provided with the second cooling pipe (9), and the second cooling pipe (9) is used to transport a cooling medium, the third workbench (10) is connected to the top surface of the support beam (8), and the third workbench (10) can slide along the length direction of the support beam (8), and the third linear motor (11) is provided with a second cooling pipe (9). The motor (11) is arranged between the support beam (8) and the third workbench (10), the third linear motor (11) comprises a third primary component (111) and a third secondary component (112), the third primary component (111) is connected to the third workbench (10), the third secondary component (112) is connected to the top surface of the support beam (8), and the third secondary component (112) covers at least a portion of the accommodating groove (8A), and the third secondary component (112) is arranged to face the second cooling pipe (9) in a vertical direction; The crossbeam (1) is connected to the third workbench (10).

8. The gantry according to claim 7, characterized in that: The gantry also includes a second heat dissipation component (12); In the vertical direction, a third mounting groove (10A) is provided on a side of the third workbench (10) facing the support beam (8), the third mounting groove (10A) extends along the length direction of the support beam (8), the bottom surface of the third mounting groove (10A) is connected to the second heat dissipation component (12), and the third primary component (111) is connected to the second heat dissipation component (12).

9. The gantry according to claim 8, characterized in that: The second heat dissipation assembly (12) comprises a second support frame (121), a third cooling pipe (122) and a second support seat (123); the second support frame (121) is connected to the bottom surface of the third mounting groove (10A); the third cooling pipe (122) is connected to the second support frame (121); the second support seat (123) is connected to the third primary component (111) and the second support frame (121); the third cooling pipe (122) is a serpentine pipe; the third cooling pipe (122) is arranged between the second support frame (121) and the second support seat (123); and the third cooling pipe (122) is used for conveying a cooling medium.

10. The gantry according to claim 8, characterized in that: In the longitudinal direction of the support beam (8), both ends of the third mounting groove (10A) are open ends, the second support frame (121) is spaced apart from the groove side of the third mounting groove (10A) to form a second ventilation channel (300), and the second ventilation channel (300) extends along the longitudinal direction of the support beam (8).

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