Micro-nano material transfer system and method

Abstract

The invention discloses a micro-nano material transfer system and method, and relates to the technical field of micro-nano material transfer. The micro-nano material transfer system comprises a microscope assembly, a micro-nano material transfer manipulator and a smearing manipulator; the microscope assembly comprises a sample operation table, and a micro-nano material and a target substrate are placed on the sample operation table; the micro-nano material transfer manipulator and the smearing manipulator are respectively arranged on two sides of the sample operation table; the microscope assembly is used for positioning and observing the micro-nano material and / or the target substrate; the smearing manipulator is used for smearing an adhesive on a target substrate; the micro-nano material transfer manipulator is used for sucking the micro-nano material by utilizing negative pressure and moving the micro-nano material to a position right above the target substrate; and the micro-nano material transfer manipulator is also used for releasing the micro-nano material and enabling the micro-nano material to fall onto the target substrate. The problem that the surface of the micro-nano material is polluted or damaged during transfer operation can be avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of micro-nano material transfer, and in particular to a micro-nano material transfer system and method. Background Art

[0002] At present, the transfer of micro-nanomaterials mainly relies on micromanipulation transfer methods under optical microscope and scanning electron microscope.

[0003] Traditional transfer methods under optical microscopes usually use tweezers to grasp and move materials. The operation relies on the operator's skills and has a high risk of contact damage and contamination to micro-nano materials. It is easy to cause physical damage to the material surface, limiting its application in fields with high precision requirements.

[0004] The transfer method under a scanning electron microscope uses platinum spraying technology. Platinum spraying will inevitably leave platinum particles on the sample surface. These particles may contaminate the surface of the sample and affect subsequent material analysis or application. Especially for materials that need to maintain the original surface characteristics and performance, platinum contamination is an issue that cannot be ignored.

[0005] In view of the above problems of the prior art, those skilled in the art are in urgent need of a micro-nano material transfer system and method. Summary of the Invention

[0006] The purpose of the present invention is to provide a micro-nano material transfer system and method to solve the problems existing in the above-mentioned prior art and to avoid contamination or damage to the surface of the micro-nano material during the transfer operation.

[0007] To achieve the above object, the present invention provides the following solutions:

[0008] In a first aspect, the present invention provides a micro-nano material transfer system, comprising a microscope assembly, a micro-nano material transfer robot and a smearing robot; the microscope assembly comprises a sample operating table, on which micro-nano materials and a target substrate are placed; the micro-nano material transfer robot and the smearing robot are respectively arranged on both sides of the sample operating table; the microscope assembly is used to position and observe the micro-nano materials and / or the target substrate; the smearing robot is used to smear adhesive on the target substrate; the micro-nano material transfer robot is used to use negative pressure to absorb the micro-nano material and drive the micro-nano material to move to a position directly above the target substrate; the micro-nano material robot is also used to release the micro-nano material and make the micro-nano material fall onto the target substrate; the micro-nano material transfer robot or the smearing robot can push the micro-nano material located on the target substrate to the target position.

[0009] In some embodiments, the micro-nano material transfer robot includes a suction device, a first micro-motion device and a negative pressure device; the suction device is connected to the first micro-motion device, and a negative pressure channel is provided inside the suction device, one end of the negative pressure channel is connected to the negative pressure device, and the other end is connected to the outside world; the negative pressure device can form a negative pressure in the negative pressure channel, and the suction device can absorb the micro-nano material when the negative pressure channel is in a negative pressure state; the first micro-motion device can drive the suction device and the micro-nano material to move, and the negative pressure device can release the negative pressure in the negative pressure channel when the micro-nano material is located directly above the target substrate, and the suction device can release the micro-nano material when the negative pressure channel is in a negative pressure released state so that the micro-nano material falls onto the target substrate.

[0010] In some embodiments, the suction device is a hollow tube, which includes a suction end and a connecting end. The interior of the hollow tube is formed with the negative pressure channel connecting the suction end and the connecting end. The connecting end is connected to the negative pressure device through a pipeline, and the suction end is provided with a blocking structure; the blocking structure is configured to block the micro-nano material from entering the negative pressure channel; and the blocking structure has multiple gas channels connecting the negative pressure channel with the outside world. The negative pressure device can form a negative pressure on the surface of the blocking structure and absorb the micro-nano material.

[0011] In some embodiments, the suction end is provided with a plurality of the clamps along the circumference, and the longitudinal cross-section of the clamps is an arc-shaped structure; one end of the plurality of the clamps is used to abut against the sample operating table and the micro-nano material is located in the area between the plurality of the clamps; the surface of the blocking structure forms a negative pressure and is used to absorb the micro-nano material located between the plurality of the clamps.

[0012] In some embodiments, the barrier structure is a mesh structure having a plurality of the gas channels, and the size of the gas channels is smaller than the size of the micro-nano material.

[0013] In some embodiments, the coating robot includes a second micro-motion device, a second mounting part and a probe, the second micro-motion device is connected to the second mounting part, and one end of the probe is detachably connected to the second mounting part; the second micro-motion device can drive the probe to dip the adhesive and apply it to the target substrate.

[0014] In some embodiments, the microscope assembly further includes a microscope, an imaging device, and a display device, wherein the imaging device is electrically connected to the display device; the sample operating table can drive the micro-nano material or the target substrate to move in three dimensions so that the micro-nano material or the target substrate is displayed in the field of view of the microscope.

[0015] In some embodiments, the hollow tube is made of glass, the negative pressure device is an oil-free vacuum pump, the first micro-motion device is a three-dimensional high-precision slide and includes a first X-axis slide, a first Y-axis slide and a first Z-axis slide; the second micro-motion device is a three-dimensional high-precision slide and includes a second X-axis slide, a second Y-axis slide and a second Z-axis slide.

[0016] In some embodiments, one end of the hollow tube is bent and radially extended to form an extension portion, and the end of the extension portion away from the axis of the hollow tube is the suction end; the inner diameter of the suction end is smaller than the inner diameter of the connecting end, and the outer diameter of the suction end is smaller than the outer diameter of the connecting end; and / or the micro-nano material transfer robot also includes a connecting hose and a first mounting portion; the connecting end of the hollow tube is detachably connected to one end of the first mounting portion, and the other end of the first mounting portion is connected to the negative pressure device through the connecting hose; the first mounting portion is connected and fixed to the first micro-motion device, and a channel connecting the negative pressure channel and the connecting hose is provided inside the first mounting portion.

[0017] In a second aspect, the present invention provides a micro-nano material transfer method, which adopts the above-mentioned micro-nano material transfer system and includes the following steps: using a microscope component to position the micro-nano material, and a micro-nano material transfer robot uses negative pressure to absorb the micro-nano material; using the microscope component to position the target substrate, and a smearing robot smears an adhesive on the target substrate; using the micro-nano material transfer robot to drive the micro-nano material to move to a position directly above the target substrate; under the observation of the microscope component, the micro-nano material transfer robot releases the micro-nano material and allows the micro-nano material to fall onto the target substrate; under the observation of the microscope component, the micro-nano material transfer robot or the smearing robot pushes the micro-nano material located on the target substrate to the target position, and uses the adhesive to fix the micro-nano material on the target substrate.

[0018] Compared with the prior art, the present invention has achieved the following technical effects:

[0019] The micro-nano material transfer system and method of the present invention uses a microscope component to observe and locate micro-nano materials in real time. A micro-nano material transfer robot uses negative pressure to absorb micro-nano materials. Then, the microscope component is used to observe and locate the target substrate, and an adhesive is applied to the target substrate by an application robot. The micro-nano material transfer robot can move the absorbed micro-nano material to a position directly above the target substrate and release the micro-nano material so that the micro-nano material falls onto the target substrate. The micro-nano material transfer robot or the application robot pushes the micro-nano material to the target position, and the adhesive is used to firmly fix the micro-nano material to achieve the transfer of the micro-nano material. The present invention uses negative pressure absorption by the micro-nano material transfer robot to accurately grasp and release micro-nano materials, achieving fine grasping of the materials, avoiding mechanical contact and contamination problems in traditional methods, and improving the success rate and efficiency of the transfer process. In addition, combined with high-resolution imaging technology, the operator can precisely control the grasping and transfer position of the micro-nano material, ensuring accuracy and stability during the transfer process.

[0020] Furthermore, the micro-nano material transfer robot of the present invention forms a negative pressure in the negative pressure channel through a negative pressure device. At this time, the suction device can use the negative pressure to absorb the micro-nano material, and the first micro-motion device can drive the suction device and the micro-nano material to move, and move the micro-nano material to a position directly above the target substrate; then the negative pressure device can release the negative pressure in the negative pressure channel, and at this time the suction device can release the micro-nano material and make the micro-nano material fall onto the target substrate, so as to realize the operation of transferring the micro-nano material to the target substrate; the micro-nano material robot of the present invention can use negative pressure to realize the fine operation of absorbing / releasing micro-nano materials, avoiding the problem of damage and contamination to micro-nano materials in existing traditional transfer methods, so that the micro-nano materials can maintain their original performance during the transfer process, and meet the requirements for material surface protection in high-precision applications.

[0021] Furthermore, the suction device of the present invention is a hollow tube, and a blocking structure is provided at the suction end of the hollow tube. The blocking structure has multiple gas channels connecting the negative pressure channel and the external atmosphere. When negative pressure is formed in the negative pressure channel, the surface of the blocking structure can form negative pressure to absorb the micro-nano material; and the size of the gas channel of the blocking structure is smaller than the size of the micro-nano material to avoid sucking the micro-nano material into the negative pressure channel; thus, the present invention can achieve the adsorption of micro-nano material on the surface of the blocking structure and then transfer it.

[0022] Furthermore, the suction end of the present invention is also provided with a plurality of clamping claws. When it is necessary to suck up micro-nano materials, one end of the clamping claw abuts against the surface of the sample operating table, and the micro-nano materials are located between the plurality of clamping claws. Then, the negative pressure generated by the blocking structure can adsorb the micro-nano materials. Thus, the present invention can limit the position through the plurality of clamping claws to avoid squeezing the micro-nano materials when the suction end approaches the micro-nano materials for suction; and in the process of transferring the micro-nano materials after being sucked up, the inner end of the clamping claw can also play a supporting role for the micro-nano materials.

[0023] Furthermore, the present invention bends one end of the hollow tube to form an extension, and the end of the extension away from the axis of the hollow tube serves as the suction end. When the micro-nano material is moved to a position directly above the target substrate, the micro-nano material and the target substrate are in relative positions up and down. After the suction device is controlled to release the micro-nano material, the micro-nano material can fall onto the target substrate to achieve the transfer of the micro-nano material. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0025] Figure 1 Schematic diagram of the overall structure of the micro-nano material transfer system in some embodiments of the present invention;

[0026] Figure 2 Schematic diagram of the overall structure of the micro-nano material transfer robot in some embodiments of the present invention;

[0027] Figure 3 This is one of the schematic diagrams of the suction end in some embodiments of the present invention;

[0028] Figure 4 This is a second schematic diagram of the suction end in some embodiments of the present invention;

[0029] Figure 5 This is a second schematic diagram of the suction end in some embodiments of the present invention;

[0030] Figure 6 Schematic diagram of the overall structure of the painting robot in some embodiments of the present invention;

[0031] Figure 7 for Figure 1 A partial enlarged view of point A in the middle.

[0032] In the figure: 1-micro-nano material transfer robot; 2-smearing robot; 3-microscope assembly; 4-target substrate; 5-micro-nano material; 11-suction device; 12-first micro-motion device; 13-negative pressure device; 14-blocking structure; 15-connecting hose; 16-first mounting part; 17-mounting frame; 18-gripping jaw; 21-second micro-motion device; 22-second mounting part; 23-probe; 31-sample operating table; 32-optical microscope; 33-imaging device; 34-display device; 111-suction end; 112-connecting end; 113-extension part; 231-needle tip. DETAILED DESCRIPTION

[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0034] The purpose of the present invention is to provide a micro-nano material system and method to solve the problems existing in the prior art and avoid the problem of contamination or damage to the surface of the micro-nano material during the transfer operation.

[0035] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0036] Example 1

[0037] This embodiment provides a micro-nano material transfer system, such as Figures 1 to 7 As shown, it includes a micro-nano material transfer robot 1, a smearing robot 2 and a microscope assembly 3; wherein, the microscope assembly 3 includes a three-dimensional movable sample operating table 31, on which micro-nano materials 5 and a target substrate 4 are placed; the micro-nano material transfer robot 1 and the smearing robot 2 are respectively arranged on both sides of the sample operating table 31.

[0038] The microscope assembly 3 is used to locate and observe the micro-nano material 5 and / or the target substrate 4 to ensure that the position of the micro-nano material 5 and / or the target substrate 4 is accurately visible under the light microscope; the micro-nano material transfer robot 1 is used to use negative pressure to absorb the micro-nano material 5 and move it to a position directly above the target substrate 4; the coating robot 2 is used to coat the adhesive on the target substrate 4; the micro-nano material robot 1 is also used to release the micro-nano material 5 and make the micro-nano material 5 fall onto the target substrate 4; the micro-nano material transfer robot 1 or the coating robot 2 can push the micro-nano material 5 located on the target substrate 4 to the target position.

[0039] In some embodiments, as Figures 2 to 5 As shown, the micro-nano material transfer robot 1 includes a suction device 11, a first micro-motion device 12 and a negative pressure device 13; wherein, the suction device 11 is connected to the first micro-motion device 12, and the first micro-motion device 12 is used to drive the suction device 11 to move. Specifically, the first micro-motion device 12 of this embodiment can drive the suction device 11 to move along the three-dimensional coordinate X / Y / Z direction, so that the suction device 11 moves in the direction close to the micro-nano material 5 or the target substrate 4.

[0040] A negative pressure channel is provided inside the suction device 11, one end of the negative pressure channel is connected to the negative pressure device 13 through a pipeline, and the other end of the negative pressure channel is connected to the outside atmosphere; the negative pressure device 13 can form a negative pressure in the negative pressure channel by pumping air, and the negative pressure device 13 can release the negative pressure in the negative pressure channel when it stops pumping air.

[0041] When the negative pressure channel is in a negative pressure state, the suction device 11 can use the negative pressure to absorb the micro-nano material 5. The first micro-motion device 12 drives the suction device 11 and the micro-nano material 5 to move as a whole and moves the micro-nano material 5 to a position directly above the target substrate 4. At this time, the negative pressure device 13 controls the negative pressure channel to be in a negative pressure release state. The suction device 11 can release the micro-nano material 5, and the micro-nano material 5 can fall onto the target substrate 4 below, thereby realizing the operation of transferring the micro-nano material 5 to the target substrate 4.

[0042] It should be noted that the position of the micro-nano material 5 directly above the target substrate 4 should be understood as that when the micro-nano material 5 falls at this position, it can fall onto the target substrate 4; and the first micro-motion device 12 of the present invention can be precisely controlled by electronic control or manual operation, and the present invention does not make specific limitations; and the micro-nano material 5 of the present invention can be a micro-nano block or other micro-nano materials; the first micro-motion device 12 is a three-dimensional high-precision slide and includes a first X-axis slide, a first Y-axis slide and a first Z-axis slide.

[0043] In some embodiments, as Figure 4 As shown, the suction device 11 is a hollow tube, which includes a suction end 111 and a connecting end 112. The interior of the hollow tube has a negative pressure channel connecting the suction end 111 and the connecting end 112, wherein the connecting end 112 is connected to the negative pressure device 13 through a pipeline, and the suction end 111 is connected to the outside world. The suction end 111 can use negative pressure to absorb the micro-nano material 5, and the suction end 111 can also release the micro-nano material 5 when the micro-nano material 5 is located directly above the target substrate 4.

[0044] In some embodiments, as Figure 3As shown, the suction end 111 of the hollow tube is provided with a blocking structure 14, which is used to prevent the micro-nano material 5 from entering the negative pressure channel, and the blocking structure 14 has multiple gaps, i.e., gas channels, connecting the negative pressure channel with the outside world. The negative pressure device 13 can control the formation of negative pressure on the surface of the blocking structure 14. When the blocking structure 14 is close to the micro-nano material 5, the micro-nano material 5 can be sucked in by using the negative pressure.

[0045] It should be noted that those skilled in the art can specifically set the shape and number of the gas channels on the blocking structure 14, and the present invention does not impose any specific limitation on this.

[0046] In some embodiments, the blocking structure 14 is a mesh structure having multiple gaps, i.e., gas channels, connecting the negative pressure channel and the outside atmosphere. The size of the gas channel is smaller than the size of the micro-nano material 5 to be absorbed to avoid the micro-nano material 5 being sucked into the negative pressure channel.

[0047] In addition, when controlling the barrier structure 14 to approach the micro-nano material 5, the present invention needs to adjust the contact direction with the micro-nano material 5 so that the barrier structure 14 contacts a larger surface of the micro-nano material 5 to improve the negative pressure adsorption effect and avoid falling during movement due to weak adsorption.

[0048] In some embodiments, see Figure 3 As shown, the suction end 111 is provided with a plurality of jaws 18 along the circumferential direction, and the jaws 18 are bent from one end connected to the suction end 111 to the other end in a direction close to the center of the suction end 111; one end of the plurality of jaws 18 is used to abut against the sample operation table 31 and the micro-nano material 5 is located in the area between the plurality of jaws 18; the surface of the blocking structure 14 forms a negative pressure and is used to absorb the micro-nano material 5 located between the plurality of jaws 18.

[0049] It should be noted that, when the present invention absorbs the micro-nano material 5, multiple clamps 18 are abutted against the sample operating table 31 and the micro-nano material 5 is located in the area between the multiple clamps 18. At this time, the surface of the blocking structure 14 generates an adsorption force that can absorb the micro-nano material 5. Therefore, the present invention can limit the moving position of the blocking structure 14 through the multiple clamps 18, so that the blocking structure 14 will not squeeze the micro-nano material 5, and the distance between the abutment of the multiple clamps 18 and the sample operating table 31 and the blocking structure 14 is set to enable the adsorption force of the surface of the blocking structure 14 to absorb the micro-nano material 5; and after the micro-nano material 5 is absorbed, the multiple clamps 18 are located around the micro-nano material 5, and the side ends of the multiple clamps 18 can play a certain supporting role for the absorbed micro-nano material 5, thereby avoiding the phenomenon of the micro-nano material 5 falling during the transfer process.

[0050] Furthermore, the method for preparing the blocking structure 14 and the clamping jaw 18 of the present invention can use a femtosecond laser to write a modified track on the inner wall of the absorption end 111, wherein the modified track includes the clamping jaw 18 and the blocking structure 14, and then remove the glass in the modified area by chemical etching such as HF acid to form a hollow grid and the clamping jaw 18.

[0051] In some embodiments, as Figure 1 As shown, the microscope assembly 3 also includes an optical microscope 32, an imaging device 33, and a display device 34. The display device 34 is connected to the imaging device 33. The target substrate 4 and the micro-nano material 5 are placed on the sample operating table 31. The operator adjusts the focal length of the optical microscope 32 and the three-dimensional movable sample operating table 31 to adjust the relative position of the micro-nano material 5 in real time to ensure that the target material is in the center of the microscope field of view; the imaging device 33 can be an industrial camera for transmitting the image of the micro-nano material 5 to the display device 34 in real time, so that the operator can clearly monitor the real-time position of the micro-nano material 5.

[0052] In some embodiments, as Figure 5 As shown, the coating robot 2 includes a second micro-motion device 21, a second mounting part 22 and a probe 23, wherein the second mounting part 22 is connected and fixed to the second micro-motion device 21, and the second micro-motion device 21 includes a second X-axis slide, a second Y-axis slide and a second Z-axis slide, which are used to drive the second mounting part 22 to move along the X-axis / Y-axis / Z-axis; one end of the probe 23 is detachably connected to the second mounting part 22, and the other end is a needle tip 231 and is used to dip the adhesive and apply it to the target substrate 4.

[0053] The second mounting portion 22 of the present embodiment is a rigid columnar structure, and those skilled in the art may specifically set the structure of the second mounting portion 22 according to actual conditions; the second mounting portion 22 of the present embodiment is provided with a claw structure, which utilizes the claw structure to achieve a detachable connection with the probe 23, and those skilled in the art may also specifically set a detachable connection structure between the second mounting portion 22 and the probe; the present invention does not make specific limitations.

[0054] In addition, the probe 23 of this embodiment is a tungsten probe, and the outer diameter of its tip 231 is 1.0 micron; those skilled in the art can specifically select the material of the probe 23 and can specifically set the size of the tip 231; the adhesive of this embodiment can be glue or other adhesives; the present invention does not make specific limitations on this.

[0055] In some embodiments, one end of the hollow tube is bent along the radial direction of the hollow tube and extends along the radial direction to form an extension portion 113 . An end of the extension portion 113 away from the axis of the hollow tube is a suction end 111 .

[0056] In some embodiments, the outer diameter of the suction end 111 is smaller than the outer diameter of the connection end 112 , and the inner diameter of the suction end 111 is smaller than the inner diameter of the connection end 112 .

[0057] In a specific embodiment, the outer diameter of the connecting end 112 is 1.0 mm, and the inner diameter is 0.6 mm; the inner diameter of the suction end 111 is 4.0-5.0 microns.

[0058] It should be noted that those skilled in the art can select a hollow tube of appropriate caliber according to the size of the micro-nano material 5 to be absorbed, that is, those skilled in the art can specifically set the inner diameter and outer diameter of the absorption end 111 and the connection end 112, as long as the effect of absorbing the micro-nano material 5 can be achieved, and the present invention does not make any specific limitations.

[0059] In some embodiments, the device further includes a connecting hose 15 and a first mounting portion 16. The connecting end 112 of the hollow tube is detachably connected to one end of the first mounting portion 16, and the other end of the first mounting portion 16 is connected to the negative pressure device 13 via the connecting hose 15. The first mounting portion 16 is fixedly connected to the first micro-motion device 12, and a channel is provided within the first mounting portion 16 that connects the negative pressure channel and the connecting hose 15. In other words, the negative pressure channel within the suction device 11 of this embodiment is connected to the inlet of the negative pressure device 13 via the channel within the first mounting portion 16 and the channel within the connecting hose 15, respectively. A seal is provided at the junction of the hollow tube and the first mounting portion 16 to prevent leakage.

[0060] The first mounting portion 16 of the present embodiment is a rigid tubular structure, and those skilled in the art may specifically set the structure of the first mounting portion 16 according to actual conditions; the first mounting portion 16 of the present embodiment is provided with a claw structure, which utilizes the claw structure to achieve a detachable connection with the hollow tube, and those skilled in the art may also specifically set a detachable connection structure between the first mounting portion 16 and the hollow tube; the present invention does not make specific limitations.

[0061] In addition, the present invention can also connect the connecting end 112 of the hollow tube to the connecting hose 15, and the hollow tube is connected to the negative pressure device through the connecting hose 15. A seal is provided at the junction of the hollow tube and the connecting hose 15 to avoid air leakage at the junction.

[0062] In some embodiments, the hollow tube of this embodiment is a hollow glass tube, and the negative pressure device 13 is an oil-free vacuum pump. The oil-free vacuum pump can accurately control the absorption and release of the micro-nano material 5 by adjusting the suction intensity; the first micro-motion device 12 is a three-dimensional high-precision slide, which includes a first X-axis slide, a first Y-axis slide and a first Z-axis slide, and is used to drive the absorption device 11 and the micro-nano material to move along the three-dimensional coordinates of the X / Y / Z direction, and can move the micro-nano material 5 from the initial position to the position directly above the target substrate 4.

[0063] In some embodiments, a mounting bracket 17 is further included, to which the first mounting portion 16 is detachably connected. The mounting bracket 17 is used to coarsely adjust and fix the position of the suction device 11, thereby allowing fine adjustment of the position of the suction device 11 via the first micro-motion device 12. It is understood that the specific structure of the mounting bracket 17 can be specifically designed by those skilled in the art, and the present invention is not limited thereto.

[0064] When the micro-nano material transfer system of the present invention is used:

[0065] The first micro-motion device 12 drives the suction device 11 to move and brings the suction end 111 close to the micro-nano material 5 . The negative pressure device 13 evacuates air to form a negative pressure in the negative pressure channel, so that the suction end 111 can absorb the micro-nano material 5 using the negative pressure.

[0066] The adhesive is applied to the target substrate 4 using the coating robot 2 .

[0067] The first micro-motion device 12 drives the suction device 11 and the micro-nano material 5 to move together and move the micro-nano material 5 to a position directly above the target substrate 4. The negative pressure device 13 stops pumping air and releases the negative pressure in the negative pressure channel, allowing the suction end 111 to release the micro-nano material 5, which then falls onto the target substrate 4 under its own gravity.

[0068] Example 2

[0069] This embodiment provides a micro-nano material transfer method, which uses the micro-nano material transfer system in the first embodiment and includes the following steps:

[0070] Step S1: using the microscope assembly 3 to locate the micro-nano material 5, and the micro-nano material transfer robot 1 uses negative pressure to absorb the micro-nano material 5;

[0071] Step S2: using the microscope assembly 3 to locate the target substrate 4, and the coating robot 2 to apply adhesive on the target substrate 4;

[0072] Step S3: using the micro-nano material transfer robot 1 to move the micro-nano material 5 to a position directly above the target substrate 4;

[0073] Step S4: Under the observation of the microscope assembly 3 , the micro-nano material transfer robot 1 releases the micro-nano material 5 and causes the micro-nano material 5 to fall onto the target substrate 4 ;

[0074] Step S5: Under the observation of the microscope assembly 3, the micro-nano material transfer robot 1 or the coating robot 2 is used to push the micro-nano material 5 on the target substrate 4 to the target position, and the micro-nano material 5 is fixed on the target substrate 4 using an adhesive.

[0075] Based on the above steps S1 to S5, it should be noted that, in the process of executing steps S1 to S5, the position of the micro-nano material 5 is observed and located in real time by the microscope assembly 3 and the display device 34 in this embodiment; in step S1, the negative pressure device 13 forms a negative pressure in the negative pressure channel by pumping air, and the suction device 11 uses the negative pressure to suck the micro-nano material 5 located at the initial position; in step S3, the first micro-motion device 12 drives the suction device 11 and the micro-nano material 5 to move together; in step S4, the negative pressure device 13 stops pumping air and releases the negative pressure in the negative pressure channel, and the suction device 11 releases the micro-nano material 5. Since the micro-nano material 5 and the target substrate 4 are in relative positions up and down at this time, the micro-nano material 5 can fall directly onto the target substrate 4; in step S5, the micro-nano material transfer robot 1 or the smearing robot 2 is used to push the micro-nano material 5 on the target substrate 4 to the target position; thereby, the present invention can achieve rapid transfer of the micro-nano material 5 from the initial position to the target position.

[0076] The micro-nano material transfer system and method of the present invention uses an oil-free vacuum pump, a suction device 11, and a second micro-motion device 21 to accurately grasp and release the micro-nano material 5, avoiding the problems of mechanical damage and contamination in traditional methods and improving the success rate and efficiency of the transfer process. Combined with high-resolution imaging technology, the operator can accurately control the grasping and transfer position of the micro-nano material 5, ensuring accuracy and stability during the transfer process.

[0077] Furthermore, the micro-nano material transfer system of the present invention has lower equipment cost and higher operating efficiency, and can perform fine operations in applications requiring high precision, thereby avoiding the high errors and operational complexity of traditional methods.

[0078] Furthermore, the present invention utilizes an integrated design to reduce the number of operating steps and the reliance on operator skills, making the transfer process of micro-nanomaterial 5 simpler and more automated. The operator only needs to adjust the platform position and use an oil-free vacuum pump for control, which greatly reduces the operational difficulty and is suitable for wide application in high-precision and large-scale production environments.

[0079] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only intended to help understand the method and core concept of the present invention. At the same time, those skilled in the art will find that the specific implementation methods and application scopes may vary based on the concept of the present invention. In summary, the contents of this specification should not be construed as limiting the present invention.

Claims

1. A micro-nano material transfer system, characterized in that: Includes microscope components, micro-nanomaterial transfer robot and coating robot; The microscope assembly includes a sample operation stage, on which micro-nano materials and a target substrate are placed; The micro-nano material transfer robot and the smearing robot are respectively arranged on both sides of the sample operation table; The microscope assembly is used to locate and observe the micro-nano material and / or the target substrate; The coating robot is used to apply adhesive on the target substrate; The micro-nano material transfer robot is used to absorb the micro-nano material by using negative pressure and drive the micro-nano material to move to a position directly above the target substrate; The micro-nano material manipulator is further used to release the micro-nano material and allow the micro-nano material to fall onto the target substrate; The micro-nano material transfer robot or the coating robot can push the micro-nano material on the target substrate to a target position.

2. The micro-nano material transfer system according to claim 1, characterized in that: The micro-nano material transfer robot comprises a suction device, a first micro-motion device and a negative pressure device; The suction device is connected to the first micro-motion device, and a negative pressure channel is provided inside the suction device, one end of the negative pressure channel is connected to the negative pressure device, and the other end is connected to the outside; The negative pressure device can form a negative pressure in the negative pressure channel, and the suction device can suck the micro-nano material when the negative pressure channel is in a negative pressure state; the first micro-motion device can drive the suction device and the micro-nano material to move, and the negative pressure device can release the negative pressure in the negative pressure channel when the micro-nano material is located directly above the target substrate, and the suction device can release the micro-nano material when the negative pressure channel is in a negative pressure released state so that the micro-nano material falls onto the target substrate.

3. The micro-nano material transfer system according to claim 2, characterized in that: The suction device is a hollow tube, comprising a suction end and a connecting end. The hollow tube is provided with a negative pressure channel connecting the suction end and the connecting end. The connecting end is connected to the negative pressure device through a pipeline. The suction end is provided with a blocking structure. The blocking structure is configured to block the micro-nano material from entering the negative pressure channel; and the blocking structure has multiple gas channels connecting the negative pressure channel with the outside world. The negative pressure device can form a negative pressure on the surface of the blocking structure and absorb the micro-nano material.

4. The micro-nano material transfer system according to claim 3, characterized in that: The suction end is provided with a plurality of clamping claws along the circumference, and the longitudinal cross-section of the clamping claws is an arc-shaped structure; One end of the plurality of clamping jaws is used to abut against the sample operation platform, and the micro-nano material is located in the area between the plurality of clamping jaws; A negative pressure is formed on the surface of the blocking structure and is used to absorb the micro-nano material between the plurality of clamping jaws.

5. The micro-nano material transfer system according to claim 3, characterized in that: The blocking structure is a mesh structure having a plurality of gas channels, and the size of the gas channels is smaller than the size of the micro-nano material.

6. The micro-nano material transfer system according to claim 2, characterized in that: The smearing robot comprises a second micro-motion device, a second mounting portion and a probe, wherein the second micro-motion device is connected to the second mounting portion, and one end of the probe is detachably connected to the second mounting portion; The second micro-motion device can drive the probe to dip into the adhesive and apply the adhesive to the target substrate.

7. The micro-nano material transfer system according to claim 1, characterized in that: The microscope assembly further comprises a microscope, an imaging device and a display device, wherein the imaging device is electrically connected to the display device; The sample operating stage can drive the micro-nano material or the target substrate to move three-dimensionally so that the micro-nano material or the target substrate is displayed in the field of view of the microscope.

8. The micro-nano material transfer system according to claim 6, characterized in that: The hollow tube is made of glass, the negative pressure device is an oil-free vacuum pump, and the first micro-motion device is a three-dimensional high-precision slide and includes a first X-axis slide, a first Y-axis slide, and a first Z-axis slide; The second fine motion device is a three-dimensional high-precision slide and includes a second X-axis slide, a second Y-axis slide, and a second Z-axis slide.

9. The micro-nano material transfer system according to claim 3, characterized in that: One end of the hollow tube is bent and radially extended to form an extension portion, and the end of the extension portion away from the axis of the hollow tube is the suction end; the inner diameter of the suction end is smaller than the inner diameter of the connecting end, and the outer diameter of the suction end is smaller than the outer diameter of the connecting end; and / or The micro-nano material transfer robot also includes a connecting hose and a first mounting part; the connecting end of the hollow tube is detachably connected to one end of the first mounting part, and the other end of the first mounting part is connected to the negative pressure device through the connecting hose; the first mounting part is connected and fixed to the first micro-motion device, and a channel connecting the negative pressure channel and the connecting hose is provided inside the first mounting part.

10. A micro-nano material transfer method, characterized in that: The micro-nano material transfer system according to any one of claims 1 to 9 comprises the following steps: The micro-nano material is positioned by using a microscope component, and the micro-nano material transfer robot absorbs the micro-nano material by using negative pressure; Positioning a target substrate using the microscope assembly, and applying adhesive on the target substrate using a coating robot; Using the micro-nano material transfer robot to move the micro-nano material to a position directly above the target substrate; Under the observation of the microscope assembly, the micro-nano material transfer robot releases the micro-nano material and causes the micro-nano material to fall onto the target substrate; Under the observation of the microscope assembly, the micro-nano material transfer robot or the coating robot is used to push the micro-nano material on the target substrate to a target position, and the adhesive is used to fix the micro-nano material on the target substrate.

Images