Novel high-precision eutectic chip mounter

Abstract

The invention relates to the technical field of eutectic chip mounting, in particular to a novel high-precision eutectic chip mounter which comprises a workbench and an XY-direction moving mechanism, the workbench is provided with a slide taking area, a soldering lug taking area, a chip taking area and a heating eutectic area, and the XY-direction moving mechanism is provided with a coaxial visual positioning taking and placing mechanism. The coaxial visual positioning taking and placing mechanism comprises a camera with the camera shooting end facing downwards and three material taking and placing mechanical arms evenly distributed on the outer side of the camera, each material taking and placing mechanical arm comprises a loading part, and a suction rod is arranged on each loading part. The three material taking and placing mechanical arms can sequentially stack a slide glass, a soldering lug and a chip on a heating eutectic area in a camera positioning state, meanwhile, a hollow stepping motor is matched with a spline of a suction rod through a connecting sleeve, and the horizontal angle of the chip can be dynamically rotated and adjusted when a visual inspection table is involved. The problem that high-precision dynamic correction of the horizontal angle of the chip cannot be realized when existing eutectic equipment is positioned, taken and placed for multiple times is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of eutectic chip placement, and in particular to a novel high-precision eutectic chip placement machine. Background Art

[0002] In the existing eutectic bonding process, a vacuum pick-up pen is typically used to separately pick up the solder wafer and chip, and then stack them onto the carrier surface on the heated eutectic zone. The specific process is as follows: First, the carrier is placed on the heated eutectic zone and heated to the set temperature. The vacuum pick-up pen is then used to position and pick up the solder wafer and chip, respectively, and stack them onto the carrier surface. When the solder wafer reaches a molten state, the pick-up pen applies pressure to the chip and rubs it against the carrier surface. Once the solder wafer solidifies, the eutectic bonding is complete.

[0003] Since existing eutectic bonding equipment uses a step-by-step positioning operation method, the solder pads, chips and carriers need to be visually positioned and adjusted individually in sequence, resulting in redundant operating processes and low production efficiency. At the same time, multiple positioning can easily introduce cumulative errors in the mechanical and visual systems, affecting the welding alignment accuracy and reducing the eutectic quality. In addition, the discrete positioning and stacking actions lack coordination, further restricting the improvement of production rhythm and making it difficult to meet the needs of efficient mass production.

[0004] Existing equipment is also unable to achieve high-precision dynamic real-time correction, resulting in angular deviations during component placement. During the eutectic process, this angular deviation directly affects the contact quality of the soldering interface and reduces product reliability. Summary of the Invention

[0005] In response to the problems existing in the existing technology, a new type of high-precision eutectic placement machine is provided. By setting up a coaxial visual positioning and placing mechanism, the three placing and picking robots can all pick up materials under the camera positioning state. When stacking, the three placing and picking robots can stack the carrier, solder sheet and chip on the heated eutectic area in turn under the camera positioning state. At the same time, the hollow stepper motor cooperates with the spline of the suction rod through the connecting sleeve, and can dynamically rotate and adjust the horizontal angle of the chip when the visual inspection table intervenes, which solves the problem that the existing eutectic equipment cannot achieve high-precision dynamic correction of the horizontal angle of the chip during multiple positioning and placing.

[0006] In order to solve the problems of the prior art, the present invention provides a new type of high-precision eutectic placement machine, including a workbench and an XY-direction moving mechanism arranged on the top of the workbench, the workbench is provided with a wafer picking area, a solder piece picking area, a chip picking area and a heating eutectic area, the XY-direction moving mechanism is provided with a coaxial visual positioning picking and placing mechanism, the coaxial visual positioning picking and placing mechanism includes a camera with a camera end facing downward and three picking and placing mechanical arms evenly distributed on the outside of the camera, the picking and placing mechanical arms include a loading part that can be moved from the outside of the camera to the bottom of the camera, and the loading part is provided with a suction rod , the suction rod is installed in the vertical direction, and when the loading part moves to the bottom of the camera, the suction rod is coaxial with the camera. In the heating eutectic area, the suction rods on the three picking and placing robotic arms stack the carrier, solder sheet and chip in sequence on the heating eutectic area. The picking and placing robotic arms are provided with a swing arm drive assembly that enables the suction rod to move from the outside of the camera to the bottom of the camera. A hollow stepper motor is provided on the loading part, and the suction rod is connected to the hollow shaft of the hollow stepper motor. When the suction rod passes through the visual inspection table, the hollow stepper motor adjusts the horizontal angle of the component carried by the suction rod.

[0007] Preferably, a visual inspection table with an upward inspection direction is provided on the workbench.

[0008] Preferably, the material picking and unloading robot arm also includes a fixed plate and a movable plate extending longitudinally, the suction rod is arranged longitudinally on the movable plate, two groups of parallel connecting rods are arranged between the fixed plate and the movable plate, one of the connecting rods is provided with a driving arm rotatably connected to it, and the swing arm driving assembly is arranged on the fixed plate and rotatably connected to the driving arm, when the driving arm swings relative to the fixed plate, the suction rod moves from the outside of the camera to the bottom of the camera.

[0009] Preferably, the swing arm drive assembly includes a drive block, a screw rod and a drive motor. The drive block is longitudinally slidingly arranged on one side of the fixed plate, the screw rod is rotatably arranged on the fixed plate, the screw rod extends longitudinally and passes through the drive block and is threadedly connected to it, one end of the drive arm is rotatably connected to the drive block, the drive motor is arranged on the fixed plate, and the output shaft of the drive motor is transmission-connected to the screw rod.

[0010] Preferably, a connecting sleeve is provided at the bottom end of the hollow shaft of the hollow stepping motor, the top end of the suction rod forms a spline connection with the lower part of the inner cavity of the connecting sleeve, and a lower elastic element is provided between the top end of the suction rod and the hollow stepping motor.

[0011] Preferably, a lower fixing ring coaxial with the bottom end of the inner wall of the connecting sleeve is provided, and the lower fixing ring is spline-connected to the suction rod. An upper fixing ring is provided at the top end of the suction rod, and the upper fixing ring is in sealing and sliding fit with the inner wall of the connecting sleeve.

[0012] Preferably, a piston is further provided in the connecting sleeve, and the piston is located between the suction rod and the hollow shaft of the hollow stepping motor. An upper elastic element is provided between the piston and the hollow shaft of the hollow stepping motor.

[0013] Preferably, a sealing shell is provided at the bottom end of the movable plate, a turntable is provided at the bottom end of the hollow shaft of the hollow stepper motor, an eccentric shaft extending downward is provided on the turntable, a sliding seat with a sealing sliding fit along the front and rear directions is provided at the bottom inner side of the sealing shell, a connecting sleeve is provided in the sliding seat and its top end passes through the sliding seat, a sliding groove perpendicular to its sliding direction is provided at the top end of the sliding seat, the eccentric shaft slides in fit with the sliding groove, and when the hollow shaft of the hollow stepper motor rotates, the sliding seat can move back and forth along the front and rear directions.

[0014] Preferably, the bottom end of the turntable is provided with a mounting groove extending radially thereof, and the top end of the eccentric shaft is slidably provided in the mounting groove. An adjusting pin rotatably connected thereto is also provided in the mounting groove, and the adjusting pin is threadedly connected to the eccentric shaft. The eccentric shaft is rotated to adjust the distance between the eccentric shaft and the hollow shaft of the hollow stepper motor, thereby adjusting the sliding stroke of the sliding seat.

[0015] Preferably, the sliding seat includes a lower slider and an upper slider, the lower slider is arranged at the lower interior of the sealing shell for sliding along the front-to-back direction, the upper slider is arranged on the lower slider for vertical sliding, the upper slider is engaged with the horizontal contact surface of the lower slider, an electromagnetic coil is provided at the bottom edge of the turntable, the upper part of the connecting sleeve is rotatably matched with the lower slider and is splined with the upper slider, when the electromagnetic coil is energized, the upper slider moves upward relative to the lower slider and forms a transmission connection with the turntable.

[0016] Compared with the prior art, the present invention has the following advantages:

[0017] This application sets up a coaxial visual positioning material picking and unloading mechanism, so that the three material picking and unloading robotic arms can synchronously complete the material picking operation under the guidance of a unified camera positioning system, and accurately stack the wafer carrier, solder sheet and chip on the heated eutectic area in sequence when stacking. The three robotic arms share the same high-precision visual positioning system, and the precise position information of the solder sheet, chip and wafer carrier can be obtained synchronously during the material picking stage. In the stacking stage, the three can be accurately stacked in sequence through control, thus completely solving the problem that traditional equipment requires repeated positioning many times. This integrated positioning and sequential stacking design not only greatly improves production efficiency, but also significantly improves the accuracy and consistency of eutectic welding by eliminating the cumulative errors caused by multiple positioning. At the same time, the camera set directly above the center of the three robotic arms can cooperate with each robotic arm to further improve the positioning accuracy and stacking consistency of the chip picking and unloading through symmetrical field of view coverage and real-time visual feedback.

[0018] This application uses a hollow stepper motor that cooperates with the spline of the suction rod through a connecting sleeve, so that the horizontal angle of the chip can be dynamically rotated and adjusted when the visual inspection table intervenes. It ensures that each component being picked up has completed precise posture adjustment before entering the stacking process to match the heated eutectic zone. Through this coordinated control mechanism of visual inspection and angle adjustment, even if there is a slight deflection in the component during the initial material removal, it can be corrected in real time before entering the eutectic. This not only prevents welding offsets caused by inconsistent component rotation angles, but also effectively reduces defects such as cold solder joints and biased solder joints during the eutectic process, further improving the stability of the mounting quality.

[0019] This application incorporates a piston into the suction rod, dividing its inner cavity into a lower chamber that directly contacts the component and an upper chamber connected to the vacuum system. When negative pressure is generated in the upper chamber, the piston moves upward, creating negative pressure in the lower chamber. Because the piston's displacement is limited, damage to the component caused by excessive suction in the lower chamber is prevented, thereby enhancing the system's adaptability. The negative pressure during each adsorption process is controlled within a reasonable range, preventing adsorption failure or component damage due to excessive or insufficient negative pressure.

[0020] This application utilizes a sealed housing at the bottom of a movable plate, housing a turntable and sliding seat structure driven by a hollow stepper motor, to achieve frictional motion during chip eutectic formation. The turntable engages the sliding seat's groove via an eccentric shaft. This converts the hollow stepper motor's rotational motion into reciprocating motion of the sliding seat, ensuring stable friction during chip eutectic formation. Rotating an adjustment pin changes its eccentricity, allowing for flexible adjustment of the sliding seat's travel to suit varying process requirements.

[0021] This application also locks the upper and lower sliders through a meshing surface, completely converting the turntable's rotational force into linear motion, ensuring the stability of eutectic friction. Furthermore, when the electromagnetic coil is energized, the upper and lower sliders disengage, and the upper slider, under the action of magnetic force, forms a friction transmission with the turntable, allowing the hollow stepper motor to drive the suction rod to rotate, achieving chip angle adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a stereoscopic diagram of a novel high-precision eutectic mounter of the present invention at a first viewing angle.

[0023] Figure 2 This is a stereoscopic diagram of a novel high-precision eutectic mounter of the present invention under a second viewing angle.

[0024] Figure 3 It is a three-dimensional diagram of a coaxial visual positioning pick-and-place mechanism in a novel high-precision eutectic placement machine of the present invention.

[0025] Figure 4 It is a bottom view of a coaxial visual positioning pick-and-place mechanism in a novel high-precision eutectic placement machine of the present invention.

[0026] Figure 5 It is a three-dimensional diagram of a material taking and placing mechanical arm in a new type of high-precision eutectic placement machine of the present invention.

[0027] Figure 6 This is a schematic diagram of a new type of high-precision eutectic placement machine of the present invention, in which the pick-up and unloading mechanical arm is in its initial position.

[0028] Figure 7 This is a schematic diagram of a new type of high-precision eutectic placement machine in the present invention, in which a material picking and placing mechanical arm is used.

[0029] Figure 8 It is a cross-sectional view of a hollow stepping motor and a suction rod of a novel high-precision eutectic placement machine of the present invention.

[0030] Figure 9 yes Figure 8 A partial enlarged view of point A.

[0031] Figure 10 This is a three-dimensional exploded view of a hollow stepping motor and a suction rod of a novel high-precision eutectic placement machine of the present invention.

[0032] Figure 11 The present invention is a schematic diagram of an upper slider and a lower slider of a novel high-precision eutectic placement machine when they move in a forward and backward reciprocating direction.

[0033] Figure 12 The present invention is a schematic diagram of a novel high-precision eutectic placement machine in which an upper slider and a lower slider are separated.

[0034] The numbers in the figure are: 1, XY moving mechanism; 11, longitudinal lifting mechanism; 2, workbench; 21, wafer picking area; 22, soldering sheet picking area; 23, chip picking area; 24, heating eutectic area; 25, visual inspection table; 31, camera; 32, pick-up and unplacing robot arm; 321, fixed plate; 322, movable plate; 323, connecting rod; 324, driving arm; 3251, driving block; 3252, screw rod; 3253, driving motor; 3254, upper limit block; 3255, lower Limit block; 3256, positioning block; 33, suction rod; 331, upper fixing ring; 34, hollow stepper motor; 35, connecting sleeve; 351, lower fixing ring; 352, piston; 36, lower elastic element; 37, upper elastic element; 41, sealing shell; 411, operating port; 42, turntable; 421, eccentric shaft; 423, adjusting pin; 43, sliding seat; 431, slide groove; 432, upper slider; 433, lower slider; 44, electromagnetic coil; 45, sealing ring; 46, sealing gasket. DETAILED DESCRIPTION

[0035] In order to further understand the features, technical means, specific objectives and functions achieved by the present invention, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0036] like Figure 1-Figure 4 As shown, a new type of high-precision eutectic placement machine includes a workbench 2 and an XY-direction moving mechanism 1 arranged on the top of the workbench 2. The workbench 2 is provided with a wafer picking area 21, a soldering sheet picking area 22, a chip picking area 23 and a heating eutectic area 24. The XY-direction moving mechanism 1 is provided with a coaxial visual positioning pick-and-place mechanism, which includes a camera 31 with a downward camera end and three pick-and-place mechanical arms 32 evenly distributed outside the camera 31. The pick-and-place mechanical arms 32 include a plurality of mechanical arms that can be positioned from the camera 31. The outside of the camera 31 moves to the loading part at the bottom of the camera 31, and a suction rod 33 is provided on the loading part. The suction rod 33 is installed in the vertical direction. When the loading part moves to the bottom of the camera 31, the suction rod 33 is coaxial with the camera 31. In the heating eutectic zone 24, the suction rods 33 on the three picking and placing robot arms 32 stack the carrier, solder sheet and chip in sequence on the heating eutectic zone 24. The picking and placing robot arms 32 are provided with a swing arm drive assembly that enables the suction rod 33 to move from the outside of the camera 31 to the bottom of the camera 31.

[0037] The workbench 2 is divided into a wafer pick-up area 21, a solder pick-up area 22, a chip pick-up area 23, and a heating eutectic area 24. These functional areas are compactly and orderly arranged, providing the basic space for efficient operation of the placement machine. The XY motion mechanism 1 can flexibly move horizontally, driving the components on it to precisely reach each work area, achieving rapid spatial switching and positioning.

[0038] The XY-axis motion mechanism 1 is equipped with a coaxial visual positioning pick-and-place mechanism, a core component of the placement machine's high-precision operations. It comprises a downward-facing camera 31 and three pick-and-place robotic arms 32 evenly spaced outside the camera 31. The camera 31 accurately captures images within the work area, providing visual guidance for pick-and-place operations. The three pick-and-place robotic arms 32 are evenly spaced around the camera 31, creating a compact and streamlined layout that enables multifunctional collaborative operations within a limited space.

[0039] The pick-and-place robotic arm 32 includes a loading section that can move from the outside of the camera 31 to the bottom of the camera 31. A suction rod 33 is mounted vertically on the loading section. This design allows the loading section to move flexibly between the outside and bottom of the camera 31. When the loading section reaches the bottom of the camera 31, the suction rod 33 is coaxial with the camera 31. This coaxial design is crucial because it ensures that, guided by the vision positioning system, the suction rod 33 can precisely align with the component to be picked up and placed, ensuring high accuracy in the picking and placing positions.

[0040] In the heated eutectic zone 24, the suction rods 33 on the three material-pickup and placement robotic arms 32 stack the wafers, solder sheets, and chips sequentially on the heated eutectic zone 24. Throughout the entire process, the three material-pickup and placement robotic arms 32 work together under the guidance of a unified camera 31 positioning system. During the material-pickup stage, the three robotic arms sharing the same high-precision visual positioning system can synchronously obtain the precise position information of the solder sheets, chips, and wafer carriers, avoiding the cumbersome process of repeated positioning required by traditional equipment, greatly improving the material-pickup efficiency. In the stacking stage, precise control is used to achieve precise sequential stacking of the three, completely solving the problem of cumulative errors caused by multiple positioning of traditional equipment, and significantly improving the accuracy and consistency of eutectic welding.

[0041] This new high-precision eutectic placement machine has significant beneficial effects. In terms of production efficiency, the integrated positioning design enables the three robotic arms to perform material removal operations simultaneously, eliminating the need for positioning and material removal one by one as with traditional equipment. This significantly shortens the production cycle and increases output per unit time. In terms of accuracy and consistency, the cumulative errors caused by multiple positioning are eliminated, allowing the carrier, solder pads, and chips to be accurately stacked, ensuring the high quality of eutectic welding, improving product reliability and stability, reducing the scrap rate caused by positioning errors, and lowering production costs. In addition, the compact and reasonable structural design optimizes the overall layout of the equipment, occupies relatively less space, and the collaborative operation between the various components is smoother, further improving the overall performance and market competitiveness of the equipment.

[0042] like Figure 2 As shown, the workbench 2 is provided with a visual inspection table 25 with an upward inspection direction, the loading part is provided with a hollow stepping motor 34, and the suction rod 33 is connected to the output shaft of the hollow stepping motor 34. When the suction rod 33 passes through the visual inspection table 25, the hollow stepping motor 34 adjusts the horizontal angle of the component carried by the suction rod 33.

[0043] On workbench 2, an upward-facing visual inspection station 25 is specifically designed for real-time inspection of the component's posture while it's attached to a suction rod 33. The suction rod 33, serving as the end effector of the pick-and-place mechanism, is mounted on the loading platform and connected to the output shaft of a hollow stepper motor 34. As the suction rod 33, carrying a component, passes over the visual inspection station 25, the visual system instantly and accurately identifies the component's planar posture, including subtle errors in horizontal angles.

[0044] Once the visual inspection station 25 detects a posture deviation, the system immediately drives the hollow stepper motor 34 to rotate to the corresponding angle for compensation. Because of the hollow stepper motor 34, the suction rod 33 can be connected to the hollow output shaft of the hollow stepper motor 34, allowing it to rotate and adjust posture while maintaining a compact structure, stable transmission, and fast rotation response with high resolution. This mechanism ensures that each component being picked up and placed is precisely adjusted to match the heated eutectic zone 24 before entering the stack.

[0045] Through this coordinated control mechanism of visual inspection and angle adjustment, even slight component deflection during initial material removal can be corrected in real time before entering the eutectic. This not only prevents soldering offsets caused by inconsistent component rotation angles, but also effectively reduces defects such as cold solder joints and offset solder joints during the eutectic process, further improving the stability of placement quality.

[0046] like Figure 5-Figure 7As shown, the material picking and unloading robot arm 32 also includes a fixed plate 321 and a movable plate 322 extending longitudinally, the suction rod 33 is arranged on the movable plate 322 longitudinally, and two groups of parallel connecting rods 323 are arranged between the fixed plate 321 and the movable plate 322, one of the connecting rods 323 is provided with a driving arm 324 rotatably connected thereto, and a swing arm driving assembly is arranged on the fixed plate 321 and rotatably connected to the driving arm 324. When the driving arm 324 swings relative to the fixed plate 321, the suction rod 33 moves from the outside of the camera 31 to the bottom of the camera 31.

[0047] The loading and unloading robot 32 consists of a fixed plate 321 and a movable plate 322 extending longitudinally. The suction rod 33 is mounted longitudinally on the movable plate 322. Two parallel connecting rods 323 are positioned between the fixed plate 321 and the movable plate 322 to maintain the positional stability and control the trajectory of the suction rod 33 during movement. This parallel connecting rod structure not only ensures the controllable movement path of the suction rod 33 but also improves the rigidity and precision of the overall movement.

[0048] One of the two connecting rods 323 is rotatably connected to a driving arm 324. This driving arm 324 forms a power transmission mechanism with the swing-arm drive assembly mounted on the fixed plate 321. When the swing-arm drive assembly is activated, the swing arm causes the driving arm 324 to swing angularly, which in turn, through the connecting rod 323, causes the movable plate 322 to change position as a whole. As the movable plate 322 moves, the suction rod 33 gradually rotates from the outside of the camera 31 to its bottom, achieving a smooth transition from the standby position to the coaxial positioning position.

[0049] By leveraging the control characteristics of mechanical transmission, the suction rod 33 can perform precise movements without relying on complex slides or linear guides, reducing system size while improving operational response speed and repeatability. Furthermore, because the movement of the suction rod 33 is completely constrained by the mechanism, it effectively avoids posture drift or nonlinear offset issues that can occur during high-speed pick-and-place operations.

[0050] like Figure 5-Figure 7 As shown, the swing arm drive assembly includes a drive block 3251, a screw rod 3252 and a drive motor 3253. The drive block 3251 is longitudinally slidingly arranged on one side of the fixed plate 321, and the screw rod 3252 is rotatably arranged on the fixed plate 321. The screw rod 3252 extends longitudinally and passes through the drive block 3251 and is threadedly connected to it. One end of the drive arm 324 is rotatably connected to the drive block 3251. The drive motor 3253 is arranged on the fixed plate 321, and the output shaft of the drive motor 3253 is transmission-connected to the screw rod 3252.

[0051] A drive block 3251 is disposed on one side of the fixed plate 321 for longitudinal sliding. Its primary function is to transmit power from the drive motor 3253 to the movable plate 322 via the drive arm 324, thereby controlling the movement of the suction rod 33. The longitudinal sliding function of the drive block 3251 ensures that the suction rod 33 can be precisely positioned vertically to a predetermined position.

[0052] The screw rod 3252 is rotatably mounted on the fixed plate 321, extending longitudinally and penetrating the drive block 3251. The structural design of the screw rod 3252 enables the drive block 3251 to slide freely thereon and achieve precise transmission through a threaded connection. When the drive motor 3253 is started, the output shaft of the drive motor 3253 drives the screw rod 3252 to rotate. The rotational movement of the screw rod 3252 drives the drive block 3251 to slide along the direction of the fixed plate 321 through the action of the thread. Through this linear transmission, the drive block 3251 pushes the movable plate 322 to move precisely through the drive arm 324, thereby driving the suction rod 33 to complete high-precision movement.

[0053] like Figure 5-Figure 7 As shown, the fixed plate 321 is provided with an upper limit block 3254 and a lower limit block 3255 from top to bottom, and the driving block 3251 is provided with a positioning block 3256 located between the upper limit block 3254 and the lower limit block 3255, and the positioning block 3256 slides between the upper limit block 3254 and the lower limit block 3255.

[0054] An upper limit block 3254 and a lower limit block 3255 are provided on the fixed plate 321 from top to bottom, respectively defining the maximum and minimum longitudinal sliding ranges of the driver block 3251. The upper limit block 3254 and the lower limit block 3255 prevent the driver block 3251 from sliding beyond the predetermined range during operation, which could lead to inaccurate positioning or abnormal deviation of the suction rod 33.

[0055] The driver block 3251 is also equipped with a positioning block 3256, located between the upper limit block 3254 and the lower limit block 3255. The main function of positioning block 3256 is to precisely constrain the motion trajectory of the driver block 3251 to the sliding range specified by the upper limit block 3254 and the lower limit block 3255. During system operation, the driver block 3251 slides longitudinally, while the positioning block 3256 slides between the upper limit block 3254 and the lower limit block 3255, ensuring that the sliding of the driver block 3251 is always controlled within the set travel limit.

[0056] like Figure 5 As shown, two connecting rods 323 are provided on both sides of the fixed plate 321 and the movable plate 322 .

[0057] Two connecting rods 323 are located on each side of the fixed plate 321 and the movable plate 322, connecting them in parallel. This four-bar linkage configuration more effectively offsets the yaw and torsional torque generated by motion or load compared to traditional single-sided double-bar structures. The synchronized movement of the four-bar linkage allows the movable plate 322 to move smoothly and parallel to the drive arm 324, avoiding offset or angular error caused by unilateral force.

[0058] like Figure 1 As shown, the XY moving mechanism 1 is also provided with a longitudinal lifting mechanism 11, and the coaxial visual positioning and placing mechanism is provided at the working end of the longitudinal lifting mechanism 11, and the longitudinal lifting mechanism 11 is used to drive the coaxial visual positioning and placing mechanism to move in the vertical direction.

[0059] The addition of a longitudinal lift mechanism 11 to the existing XY motion platform enhances the device's freedom of movement in both the horizontal and vertical planes. The XY motion mechanism 1 controls precise horizontal movement, while the longitudinal lift mechanism 11 vertically drives the visual positioning pick-and-place mechanism up and down, adapting to the handling of objects at varying heights.

[0060] A coaxial vision-based pick-and-place mechanism is installed at the working end of the longitudinal lift mechanism 11. It utilizes visual sensors and positioning technology to monitor and adjust the accuracy of the pickup action in real time. This coaxial layout ensures motion synchronization between the vision system and the pick-and-place mechanism, reducing spatial errors and positional deviations during the pick-and-place operation.

[0061] like Figure 8 、 Figure 9 and Figure 10 As shown, a connecting sleeve 35 is provided at the bottom end of the output shaft of the hollow stepping motor 34, the top end of the suction rod 33 forms a spline connection with the lower part of the inner cavity of the connecting sleeve 35, and a lower elastic element 36 is provided between the top end of the suction rod 33 and the hollow stepping motor 34.

[0062] A connecting sleeve 35 is installed at the bottom end of the output shaft of the hollow stepper motor 34. The connecting sleeve 35 serves as a transition connection component between the hollow stepper motor 34 and the suction rod 33. Its function is not only to make a mechanical connection, but more importantly, to achieve power transmission and structural transition. The spline connection enables the torque of the output shaft of the hollow stepper motor 34 to be transmitted to the suction rod 33, thereby adjusting the horizontal angle of the component sucked by the suction rod 33. During the process of the suction rod 33 moving up and down (especially rapid lifting) or sucking / releasing components, sudden impact loads are effectively alleviated. The lower elastic element 36 can provide flexible pre-compression to make the connection tighter, prevent loosening or abnormal noise caused by gaps, and avoid excessive pressure on the component by the suction rod 33.

[0063] like Figure 8 、 Figure 9 and Figure 10 As shown, the bottom end of the inner wall of the connecting sleeve 35 is provided with a lower fixing ring 351 coaxial therewith, and the lower fixing ring 351 is spline-connected to the suction rod 33. The top of the suction rod 33 is provided with an upper fixing ring 331, and the upper fixing ring 331 is sealingly and slidingly matched with the inner wall of the connecting sleeve 35.

[0064] A coaxial lower retaining ring 351 is located at the bottom of the inner wall of the connecting sleeve 35. This ring and the suction rod 33 are mechanically secured via a spline connection, preventing the suction rod 33 from becoming detached or loosened during operation due to rotation or external forces. The spline connection provides efficient torque transmission, ensuring stable rotation of the suction rod 33 and reducing interference with the system caused by axial displacement.

[0065] The upper fixing ring 331 cooperates with the lower fixing ring 351 to prevent the suction rod 33 from being separated from the connecting sleeve 35 .

[0066] like Figure 8 、 Figure 9 and Figure 10 As shown, a piston 352 is further provided in the connecting sleeve 35 , and the piston 352 is located between the suction rod 33 and the output shaft of the hollow stepping motor 34 . An upper elastic element 37 is provided between the piston 352 and the output shaft of the hollow stepping motor 34 .

[0067] A piston 352 is provided in the connecting sleeve 35, and the piston 352 is located between the suction rod 33 and the output shaft of the hollow stepping motor 34. This design can adjust the suction force by the movement of the piston 352, so as to avoid the suction rod 33 from adsorbing too much force and damaging the component.

[0068] When the output shaft of the hollow stepper motor 34 generates negative pressure, the piston 352 overcomes the elastic force of the upper elastic element 37 (such as a spring) and moves upward. At this time, the pressure space between the piston 352 and the top of the suction rod 33 decreases, allowing the suction rod 33 to generate appropriate suction force to absorb the component.

[0069] The upper elastic element 37 between the piston 352 and the output shaft provides a restoring force. When the negative pressure disappears or is eliminated, the piston 352 automatically returns to its original position under the elastic force of the upper elastic element 37, thereby restoring the suction rod 33 to its normal working state and ensuring that the suction rod 33 can continue to effectively absorb the component.

[0070] The piston 352's limited range of motion ensures it remains within the proper range of motion during operation. When the negative pressure within the suction rod 33 is too low, the piston 352 adjusts the suction force to prevent damage to the component caused by excessive suction. When the negative pressure disappears, the piston 352 quickly returns to its original position, preventing the suction rod 33 from applying excessive suction force to the target component, ensuring that each suction is performed under appropriate negative pressure conditions.

[0071] The piston 352 design not only effectively adjusts suction force but also prevents component damage caused by excessive suction, enhancing the system's adaptability. The negative pressure during each suction process is controlled within a reasonable range, preventing suction failure or component damage due to excessive or insufficient negative pressure.

[0072] like Figure 11 and Figure 12 As shown, a sealing shell 41 is provided at the bottom end of the movable plate 322, a turntable 42 is provided at the bottom end of the hollow shaft of the hollow stepping motor 34, an eccentric shaft 421 extending downward is provided on the turntable 42, and a sliding seat 43 with a sealed sliding fit along the front-to-back direction is provided at the bottom inner side of the sealing shell 41, the connecting sleeve 35 is provided in the sliding seat 43 and its top end passes through the sliding seat 43, the top end of the sliding seat 43 is provided with a sliding groove 431 perpendicular to its sliding direction, the eccentric shaft 421 slides with the sliding groove 431, and when the hollow shaft of the hollow stepping motor 34 rotates, the sliding seat 43 can move back and forth along the front-to-back direction.

[0073] The hollow stepper motor 34 drives the turntable 42 to rotate, causing the eccentric shaft 421 to drive the sliding seat 43 to move back and forth in the front-to-back direction, so that the suction rod 33 can rub the chip back and forth during eutectic formation. At the same time, rubbing can expel bubbles and ensure that the solder piece is tightly attached to the interface.

[0074] In the eutectic process, the main purpose of driving the chip to rub back and forth is to promote the uniform distribution of the eutectic solder pads, remove the interface oxide layer and enhance the welding reliability.

[0075] like Figure 11 and Figure 12 As shown, the bottom end of the turntable 42 is provided with a mounting groove extending along its radial direction, and the top end of the eccentric shaft 421 is slidably set in the mounting groove. The mounting groove is also provided with an adjusting pin 423 rotatably connected thereto. The adjusting pin 423 is threadedly connected to the eccentric shaft 421. By rotating the eccentric shaft 421 to adjust the distance between the eccentric shaft 421 and the hollow shaft of the hollow stepping motor 34, the sliding stroke of the sliding seat 43 is adjusted.

[0076] A stepped groove is provided on the circumferential surface of the turntable 42 to seal with the inner surface of the sealing shell 41 . A sealing ring 45 is provided on the stepped groove. The sealing shell 41 is provided with an operating port 411 facing the adjustment pin 423 .

[0077] The adjustment pin 423 is rotated through the operation port 411 to adjust the rotation radius of the deflection axis, thereby adjusting the sliding shape of the sliding seat 43 and controlling the friction amplitude of the suction rod 33.

[0078] The bottom end of the sealing shell 41 is provided with a mounting opening, and the bottom end of the lower slider 433 is provided with a connecting block that passes through the mounting opening and slides with it in the front-to-back direction. The bottom of the lower slider 433 is larger than the mounting opening to prevent air pressure leakage. A sealing gasket 46 is provided between the bottom end of the lower slider 433 and the bottom of the sealing shell 41.

[0079] The sealing shell 41 is fixedly connected to the movable plate 322 and serves as a base for the movement of the sliding seat 43. The sealing ring 45 and the sealing gasket 46 are used to ensure that negative pressure can be generated in the sealing shell 41.

[0080] like Figure 11 and Figure 12 As shown, the sliding seat 43 includes a lower slider 433 and an upper slider 432. The lower slider 433 is slidably arranged in the front-to-back direction at the lower inner portion of the sealing shell 41, and the upper slider 432 is slidably arranged on the lower slider 433 in the vertical direction. The upper slider 432 is engaged with the horizontal contact surface of the lower slider 433. The bottom edge of the turntable 42 is provided with an electromagnetic coil 44. The upper part of the connecting sleeve 35 is rotatably matched with the lower slider 433 and is spline-matched with the upper slider 432. When the electromagnetic coil 44 is energized, the upper slider 432 moves upward relative to the lower slider 433 and forms a transmission connection with the turntable 42.

[0081] The upper slider 432, the lower slider 433 and the overall material can be made of 3D printed materials. The material of the turntable 42 is a material that can be attracted by the magnetic field, such as iron, or an iron sheet is provided at the bottom end of the turntable 42, which can be attracted by the electromagnetic coil 44, thereby guiding the electromagnetic coil 44 and the upper slider 432 to move upward, thereby forming a connection.

[0082] When the upper slider 432 is engaged with the horizontal contact surface of the lower slider 433, the upper slider 432 cannot rotate relative to the lower slider 433. Then, when the turntable 42 rotates, the eccentric shaft 421 can drive the upper slider 432 and the lower slider 433 to move back and forth in the front and rear directions.

[0083] When the electromagnetic coil 44 is energized, the upper slider 432 is attracted by the magnetic force, and the upper slider 432 can move upward relative to the lower slider 433, thereby releasing the horizontal meshing force between the upper slider 432 and the lower slider 433, and the upper slider 432 forms a friction fit with the turntable 42. The turntable 42 can input torque to the upper slider 432, thereby inputting torque to the suction rod 33 that forms a spline fit with the upper slider 432, and then adjusting the rotation angle of the suction rod 33.

[0084] The bottom of the sliding groove 431 is lower than the bottom end of the eccentric shaft 421 so that the top end of the upper sliding block 432 can contact the bottom end of the rotating disk 42 .

[0085] An elastic reset element (such as a spring) can be provided between the turntable 42 and the upper slider 432 so that the upper slider 432 can be quickly reset relative to the lower slider 433 after the electromagnetic coil 44 is powered off.

[0086] An elastic centering element (such as a spring) is provided between the front and rear sides (both sides of the moving direction) of the lower slider 433 and the inner wall of the sealing shell 41 to ensure that the lower slider 433 is always in the center position in the initial state, while suppressing the fluctuation of the lower slider 433 caused by the rotation of the upper slider 432.

[0087] The above embodiments merely represent one or more embodiments of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of protection of the present invention. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present invention, and such modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be subject to the appended claims.

Claims

1. A new type of high-precision eutectic bonding machine, comprising a workbench and an XY moving mechanism arranged on the top of the workbench, wherein the workbench is provided with a wafer picking area, a soldering sheet picking area, a chip picking area and a heating eutectic area, characterized in that: The XY moving mechanism is provided with a coaxial visual positioning pick-and-place mechanism, which includes a camera with a downward camera end and three pick-and-place mechanical arms evenly distributed on the outside of the camera. The pick-and-place mechanical arm includes a loading portion that can move from the outside of the camera to the bottom of the camera. A suction rod is provided on the loading portion, and the suction rod is installed in a vertical direction. When the loading portion moves to the bottom of the camera, the suction rod is coaxial with the camera. The suction rods on the three pick-and-place mechanical arms sequentially stack the carrier, solder sheet and chip on the heated eutectic area. The material picking and unloading robot arm is provided with a swing arm drive assembly that enables the suction rod to move from the outside of the camera to the bottom of the camera; a hollow stepper motor is provided on the loading part, and the suction rod is connected to the hollow shaft of the hollow stepper motor. When the suction rod passes through the visual inspection table, the hollow stepper motor adjusts the horizontal angle of the component carried by the suction rod.

2. A novel high-precision eutectic bonding machine according to claim 1, characterized in that: The workbench is provided with a visual inspection table with an upward inspection direction.

3. A novel high-precision eutectic bonding machine according to claim 1 or 2, characterized in that: The material picking and unloading robot arm also includes a fixed plate and a movable plate extending longitudinally, the suction rod is arranged longitudinally on the movable plate, two sets of parallel connecting rods are arranged between the fixed plate and the movable plate, one of the connecting rods is provided with a driving arm rotatably connected to it, and a swing arm driving assembly is arranged on the fixed plate and rotatably connected to the driving arm. When the driving arm swings relative to the fixed plate, the suction rod moves from the outside of the camera to the bottom of the camera.

4. A novel high-precision eutectic bonding machine according to claim 3, characterized in that: The swing arm drive assembly includes a drive block, a screw rod and a drive motor. The drive block is longitudinally slidingly arranged on one side of the fixed plate, the screw rod is rotatably arranged on the fixed plate, the screw rod extends longitudinally and passes through the drive block and is threadedly connected to the drive block, one end of the drive arm is rotatably connected to the drive block, the drive motor is arranged on the fixed plate, and the output shaft of the drive motor is transmission-connected to the screw rod.

5. A novel high-precision eutectic bonding machine according to claim 3, characterized in that: A connecting sleeve is provided at the bottom end of the hollow shaft of the hollow stepping motor, the top end of the suction rod forms a spline connection with the lower part of the inner cavity of the connecting sleeve, and a lower elastic element is provided between the top end of the suction rod and the hollow stepping motor.

6. A novel high-precision eutectic bonding machine according to claim 5, characterized in that: The bottom end of the inner wall of the connecting sleeve is provided with a coaxial lower fixing ring, the lower fixing ring is spline-connected to the suction rod, and the top end of the suction rod is provided with an upper fixing ring, the upper fixing ring is sealingly and slidingly matched with the inner wall of the connecting sleeve.

7. A novel high-precision eutectic bonding machine according to claim 6, characterized in that: A piston is also provided in the connecting sleeve. The piston is provided between the top end of the suction rod and the hollow shaft of the hollow stepping motor. An upper elastic element is provided between the piston and the hollow shaft of the hollow stepping motor.

8. The novel high-precision eutectic bonding machine according to claim 5, characterized in that: A sealing shell is provided at the bottom end of the movable plate, a turntable is provided at the bottom end of the hollow shaft of the hollow stepper motor, an eccentric shaft extending downward is provided on the turntable, a sliding seat with a sealed sliding fit along the front and rear directions is provided at the bottom inner side of the sealing shell, a connecting sleeve is provided in the sliding seat and its top end passes through the sliding seat, a sliding groove perpendicular to its sliding direction is provided at the top end of the sliding seat, the eccentric shaft slides with the sliding groove, and when the hollow shaft of the hollow stepper motor rotates, the sliding seat can move back and forth along the front and rear directions.

9. A novel high-precision eutectic bonding machine according to claim 8, characterized in that: The bottom end of the turntable is provided with a mounting groove extending radially thereof, and the top end of the eccentric shaft is slidably arranged in the mounting groove. An adjusting pin rotatably connected to the eccentric shaft is also provided in the mounting groove. The adjusting pin is threadedly connected to the eccentric shaft. The eccentric shaft is rotated to adjust the distance between the eccentric shaft and the hollow shaft of the hollow stepper motor, thereby adjusting the sliding stroke of the sliding seat.

10. The novel high-precision eutectic bonding machine according to claim 8, characterized in that: The sliding seat includes a lower slider and an upper slider. The lower slider is slidably arranged at the bottom of the sealing shell along the front-back direction. The upper slider is slidably arranged on the lower slider along the vertical direction. The upper slider is engaged with the horizontal contact surface of the lower slider. An electromagnetic coil is provided at the bottom edge of the turntable. The upper part of the connecting sleeve is rotatably matched with the lower slider and is splined with the upper slider. When the electromagnetic coil is energized, the upper slider moves upward relative to the lower slider and forms a transmission connection with the turntable.

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