A chip copper production and processing device

Abstract

This invention provides a chip copper production and processing apparatus, belonging to the technical field of chip copper production and processing apparatus. Its structure includes a roller conveyor belt for conveying chip copper horizontally to the left. A diversion guide device is located on the left side of the roller conveyor belt to adsorb and grasp the chip copper on the roller conveyor belt and guide it to a vertical clamping conveyor. The vertical clamping conveyor is located on the rear side of the roller conveyor belt and the diversion guide device. The angle compensation sliding group on the diversion guide mechanism also has a clockwise rotation function at the same frequency as the counterclockwise rotation of the rotating disk, compensating for the rotation angle. This allows the chip copper to rotate and be guided to a state perpendicular to the pneumatic gripper, enabling intermittent pauses to allow sufficient time for it to be vertically clamped by the pneumatic gripper.

Description

Technical Field

[0001] This invention relates to a chip copper production and processing apparatus, belonging to the technical field of chip copper production and processing apparatus. Background Technology

[0002] A chip, also known as an integrated circuit, microcircuit, microchip, or wafer / chip, is a method of miniaturizing circuits in electronics and is often manufactured on the surface of a semiconductor wafer. In chip manufacturing, the packaging process involves placing and soldering copper sheets of specific shapes onto the corresponding chip to form a qualified soldered product before injection molding and encapsulation.

[0003] In the production and processing of copper chips, chemical mechanical polishing (CMP) is required in the later stages of the process. During CMP, the copper chips are laid flat. However, after CMP, subsequent processing is required, including cleaning (to remove polishing residue) and annealing (to improve the crystal structure of copper and reduce resistance). During cleaning and annealing, the copper chips need to be placed vertically. The above-mentioned production and processing requires the copper chips to be transferred from a flat state to a vertical state. In order to meet the above requirements, this invention proposes a copper chip production and processing apparatus. Summary of the Invention

[0004] In view of the shortcomings of the existing technology, the purpose of this invention is to provide a chip copper production and processing apparatus to solve the existing problems.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solution: a chip copper production and processing apparatus, the structure of which includes a roller conveyor belt for conveying chip copper flat to the left, and a deflecting material guiding device for adsorbing and grabbing the chip copper on the roller conveyor belt and guiding it to a vertical clamping conveyor, the vertical clamping conveyor being located on the rear side of the roller conveyor belt and the deflecting material guiding device.

[0006] The variable guide device includes a support, and a rotary drive end is provided on the support, and a rotary disk is connected to the rear side of the rotary drive end.

[0007] The rotating disk includes a disc, and four walking slots are arranged in a circular array on the disc. A variable material guiding mechanism is longitudinally movably fitted on the four walking slots. A vacuum pump and a controller are respectively fixed in the middle of the rear side of the disc. The vacuum pump is connected to the four variable material guiding mechanisms through air pipes. The rotating drive end, the variable material guiding mechanism, the vacuum pump and the controller are electrically connected.

[0008] The four aforementioned deflection mechanisms include an angle-compensating sliding assembly that is movably mounted on the travel trough. A telescopic arm body is longitudinally arranged on the angle-compensating sliding assembly, and a deflection shaft is mounted on the rear end of the telescopic arm body. A suction cup swing frame assembly is arranged on the left side of the deflection shaft, and a first servo rotator for reciprocating 90° angle deflection of the suction cup swing frame assembly is connected to the right end of the deflection shaft.

[0009] A further improvement is that the roller conveyor belt includes a base frame, and multiple roller conveyor frames are longitudinally spaced on the top surface of the base frame. Multiple rollers are drivenly connected to each roller conveyor frame, and a swing channel is formed at the left end between two adjacent roller conveyor frames. An infrared sensor for positioning when the chip copper is conveyed to the left is provided on the left side of one of the roller conveyor frames.

[0010] A further improvement is that each of the aforementioned travel grooves includes an arc-shaped travel groove, and a fixed opening is provided on the front side of the left groove wall of the arc-shaped travel groove, and multiple arc-shaped pressure slides are provided on the discs on the front and rear sides of the arc-shaped travel groove.

[0011] A further improvement is that the angle compensation sliding assembly includes an arc-shaped slide rail fitted between the arc-shaped travel groove and the fixed opening, and a slider is movably fitted on the arc-shaped slide rail, and two support and pressure roller sets are fitted on the front and rear sides of the slider for rolling against the arc-shaped pressure slide to provide support.

[0012] The two support roller sets consist of a pressure seat and multiple universal abutments.

[0013] A further improvement is that the suction cup swing frame assembly includes a swing bracket, and the swing suction cup frame assembly is hinged on the swing bracket. A second servo rotator is driven to one side of the swing suction cup frame assembly for swinging the swing suction cup frame assembly backward at a 5-25º angle.

[0014] A further improvement is that the swing suction cup frame assembly includes a longitudinal tube frame, and the left side of the longitudinal tube frame is horizontally connected and welded with multiple transverse tube frames for rotating through a swing channel formed at the left end between two adjacent roller conveyor frames. Multiple suction cups are spaced apart on the top surface of each transverse tube frame. An air inlet is opened in the middle of the longitudinal tube frame, and an air intake hose for communicating with a vacuum pump is connected to the air inlet.

[0015] A further improvement is that the vertical clamping and conveying device includes a ring chain conveyor frame, on which multiple drag blocks are connected at intervals, and each drag block is vertically provided with a pneumatic gripper on its bottom surface. The lower middle part of the pneumatic gripper is provided with an anti-jamming channel for rotating through when the chip copper is redirected to a vertical position by the redirecting material guiding mechanism.

[0016] A further improvement is that when one of the variable guide mechanisms guides the copper chip in a vertical counterclockwise rotation through the middle of the anti-jamming channel, the corresponding angle compensation sliding group rotates clockwise at a speed of 15-25º at the same frequency as the counterclockwise rotation of the disc for angle compensation, so that the copper chip can be intermittently stopped and vertically gripped by the pneumatic gripper.

[0017] A further improvement is that the rotary drive end, controller, telescopic arm body, roller conveyor frame, annular chain conveyor frame and pneumatic gripper are all existing technologies, and their structures will not be described in detail here.

[0018] A further improvement is that a chemical mechanical polisher is connected to the right side of the roller conveyor belt, and a cleaning device and an annealing device are installed below the rear side of the vertical clamping conveyor.

[0019] The beneficial effects of this invention are:

[0020] This invention provides a chip copper production and processing apparatus. Through a coordinated design of a variable material guiding device (comprising a support, a rotary drive end, a rotary disk, a variable material guiding mechanism, a vacuum pump, and a controller) and a roller conveyor belt, a chip copper production and processing apparatus is constructed. This variable material guiding device uses uniform counter-clockwise rotation to vacuum-adsorb and transfer chip copper conveyed to the left on the roller conveyor belt. After the variable material guiding mechanism adsorbs and guides one chip copper, it extends backward and changes direction by 90°, so that the chip copper is aligned with the pneumatic gripper. The rotating guide mechanism performs rotational feeding. When the copper chip is rotated to a position perpendicular to the pneumatic gripper, the angle compensation sliding group on the variable guide mechanism also has a clockwise rotation function at the same frequency as the counterclockwise rotation of the rotating disk. This compensates for the rotation angle, allowing the copper chip to pause intermittently after being rotated to a position perpendicular to the pneumatic gripper, providing sufficient time for it to be vertically gripped by the pneumatic gripper. Furthermore, the variable guide mechanism also has a backward swing angle function, which can prevent the surface of the copper chip after being vertically gripped by the pneumatic gripper from being scratched by the suction cup during counterclockwise rotation. Attached Figure Description

[0021] Figure 1 This is a front view of the transfer mechanism of a chip copper production and processing device according to the present invention;

[0022] Figure 2 This is a schematic diagram of the top structure of a chip copper production and processing device according to the present invention;

[0023] Figure 3 This is a schematic diagram of the roller conveyor belt structure of the present invention;

[0024] Figure 4 This is a schematic diagram of the rotating disk structure of the present invention;

[0025] Figure 5This is a schematic diagram of the angle compensation sliding assembly structure of the present invention;

[0026] Figure 6 This is a schematic diagram of the variable material guiding mechanism of the present invention;

[0027] Figure 7 This is a schematic diagram of the vertical clamping and conveying device of the present invention;

[0028] Figure 8 This is a diagram illustrating the effect of rotating and introducing copper into the anti-jamming channel of the chip according to the present invention.

[0029] Figure 9 For the present invention Figure 2 Enlarged view of part A in the image. Detailed Implementation

[0030] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0031] Please see Figures 1-9 This invention provides a chip copper production and processing apparatus: its structure includes a roller conveyor belt 1 for conveying chip copper a1 horizontally to the left, and a variable material guide device 2 for adsorbing, gripping, and guiding the chip copper a1 on the roller conveyor belt 1 to a vertical clamping conveyor device 3 on the left side of the roller conveyor belt 1. The vertical clamping conveyor device 3 is located on the rear side of the roller conveyor belt 1 and the variable material guide device 2. The variable material guide device 2 includes a support 21, and a rotary drive end 22 is provided on the support 21. A rotating disk 23 is connected to the rear side of the rotary drive end 22. The rotating disk 23 includes a disc 231, and four traveling grooves 232 are arranged in a circular array on the disc 231. Variable material guides are longitudinally movably fitted on the four traveling grooves 232. Mechanism 24, a vacuum pump 25 and a controller 26 are fixedly mounted on the middle of the rear side of the disc 231. The vacuum pump 25 is connected to four variable material guiding mechanisms 24 through air pipes. The rotary drive end 22, the variable material guiding mechanism 24, the vacuum pump 25 and the controller 26 are electrically connected. The four variable material guiding mechanisms 24 include an angle compensation sliding group 241 movably mounted on the walking groove 232. A telescopic arm body 242 is longitudinally arranged on the angle compensation sliding group 241, and a direction changing shaft 243 is mounted on the rear end of the telescopic arm body 242. A suction cup swing frame group 244 is arranged on the left side of the direction changing shaft 243, and a first servo rotator 245 for reciprocating 90º angle direction change of the suction cup swing frame group 244 is connected to the right end of the direction changing shaft 243.

[0032] The roller conveyor belt 1 includes a base frame 11, and multiple roller conveyor frames 12 are longitudinally spaced on the top surface of the base frame 11. Multiple rollers 13 are drivenly connected to each roller conveyor frame 12. A swing channel is formed at the left end between two adjacent roller conveyor frames 12. An infrared sensor 14 for positioning the copper chip a1 when it is conveyed to the left is provided on the left side of one of the roller conveyor frames 12.

[0033] Each of the aforementioned travel grooves 232 includes an arc-shaped travel groove 2321, and a fixed opening 2322 is provided on the front side of the left groove wall of the arc-shaped travel groove 2321, and multiple arc-shaped pressure slides 2323 are provided on the disc 231 on one side of the front and rear sides of the arc-shaped travel groove 2321.

[0034] The angle compensation sliding assembly 241 includes an arc-shaped slide rail 2411 fitted between the arc-shaped travel groove 2321 and the fixed opening 2322. A slider 2412 is movably fitted on the arc-shaped slide rail 2411. Two support and pressure roller assemblies 2413 are fitted on the front and rear sides of the slider 2412 for rolling against the arc-shaped pressure slide 2323 to provide support. The two support and pressure roller assemblies 2413 are composed of a pressure seat 2414 and multiple universal abutments 2415.

[0035] The suction cup swing frame assembly 244 includes a swing bracket 2441, and a swing suction cup frame assembly 2442 is hinged on the swing bracket 2441. A second servo rotator 2443 for swinging the swing suction cup frame assembly 2442 backward at a 5-25º angle is connected to one side of the swing suction cup frame assembly 2442.

[0036] The swing suction cup frame assembly 2442 includes a longitudinal tube frame 24421, and a plurality of transverse tube frames 24422 are welded to the left side of the longitudinal tube frame 24421 at intervals for rotating through a swing channel formed at the left end between two adjacent roller conveyor frames 12. A plurality of suction cups 24423 are spaced apart on the top surface of each transverse tube frame 24422. An air inlet 24424 is provided in the middle of the longitudinal tube frame 24421, and an air intake hose 24425 for communicating with the vacuum pump 25 is connected to the air inlet 24424.

[0037] The vertical clamping conveyor 3 includes a ring chain conveyor frame 31, and multiple drag blocks 32 are connected at intervals on the ring chain conveyor frame 31. Each drag block 32 has a pneumatic gripper 33 vertically arranged on its bottom surface. The pneumatic gripper 33 has an anti-jamming channel 34 in the middle of its lower end, which is used to allow the chip copper a1 to rotate and pass through after being redirected to a vertical position by the redirecting guide mechanism 24.

[0038] When one of the variable guide mechanisms 24 guides the copper chip a1 in a vertical counterclockwise rotation through the middle of the anti-jamming channel 34, the corresponding angle compensation sliding group 241 rotates clockwise at the same frequency as the counterclockwise rotation of the disc 231 at an angle of 15-25º for angle compensation, so that the copper chip a1 can be intermittently stopped and vertically gripped by the pneumatic gripper 33.

[0039] Working principle:

[0040] When the copper chip a1 processed by the chemical mechanical polisher is conveyed to the left by the rollers 13 on the roller conveyor belt 1, it will be positioned after being sensed by the infrared sensor 14. Then, the variable guide device 2 will perform the transfer operation. The rotary drive end 22 drives the rotary disk 23 to rotate counterclockwise at a uniform speed. At this time, the horizontal tubes 24422 on the variable guide mechanism 24 at the upper and lower ends of the rotary disk 23 will rotate sequentially through a swing channel formed at the left end between two adjacent roller conveyor frames 12, using suction cups 24. 423 The suction cup lifts the copper chip a1 by rotation, and then extends longitudinally towards the vertical clamping conveyor 3 via the telescopic arm body 242 to the right side of a pneumatic gripper 33 below the vertical clamping conveyor 3. Simultaneously, through the cooperation of the first servo rotator 245 and the reversing shaft 243, the suction cup swings towards the frame assembly 244 at a 90° angle. At this time, the copper chip a1 will rotate vertically counterclockwise. When the copper chip a1 rotates vertically counterclockwise from right to left and passes through the middle of the anti-jamming channel 34, the chip... When copper a1 is vertically aligned, and the rotating disk 23 rotates at a constant speed, the corresponding angle compensation sliding group 241 needs to rotate clockwise at a 19-21° angle at the same frequency as the counterclockwise rotation of the disk 231 for angle compensation. This allows the copper chip a1 to pause intermittently for sufficient static time to be vertically gripped by the pneumatic gripper 33. After the copper chip a1 is gripped by the pneumatic gripper 33, the second servo rotator 2443 drives the swing suction cup frame group 2442 to swing backward at a 10° angle, and simultaneously cancels the rotation. The suction cup 24423 adsorbs the copper chip a1, thus increasing the distance between the suction cup 24423 and the rear side of the copper chip a1. This step prevents the rear side of the copper chip a1 from rubbing against the subsequently counterclockwise rotating suction cup 24423. When one of the variable guide mechanisms 24 is rotated counterclockwise to the left end of the rotary disk 23, it needs to be initialized and reset. This allows the next copper chip a1 to be transferred when the variable guide mechanism 24 rotates back to the roller conveyor belt 1. The above transfer operation is referenced in the appendix. Figure 1 .

[0041] In addition, after the previous copper chip a1 is transferred and adsorbed by a variable guide mechanism 24, the infrared sensor 14 will sense that there is no object, and the next copper chip a1 can be transported to the left by the roller 13.

[0042] Additionally, after a pneumatic gripper 33 grabs a copper chip a1, the annular chain conveyor 31 transports the next pneumatic gripper 33 to its original position via the transmission block 32 to wait for the transfer of the next copper chip a1. Meanwhile, the copper chip a1 vertically gripped by the vertical clamping conveyor 3 will be transferred in an annular manner to the cleaning and annealing equipment at the rear for processing. The chemical mechanical polishing, cleaning, and annealing operations mentioned above are existing technologies and will not be described in detail here.

[0043] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, from all perspectives, the embodiments should be regarded as illustrative and non-restrictive. The scope of the present invention is defined by the appended claims, not the foregoing description, and it is intended that all variations that come within the meaning and range of equivalents of the claims be included within the present invention. Any reference signs in the claims should not be construed as limiting the claim to which they relate.

[0044] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A chip copper production and processing apparatus, characterized in that: Its structure includes a roller conveyor belt for conveying the copper chip flat to the left, and a deflecting material conveyor device is provided on the left side of the roller conveyor belt for adsorbing and grabbing the copper chip on the roller conveyor belt and deflecting it to the vertical clamping conveyor device. The vertical clamping conveyor device is located on the rear side of the roller conveyor belt and the deflecting material conveyor device. The variable guide device includes a support, and a rotary drive end is provided on the support, and a rotary disk is connected to the rear side of the rotary drive end. The rotating disk includes a disc, and four walking slots are arranged in a circular array on the disc. A variable material guiding mechanism is longitudinally movably fitted on the four walking slots. A vacuum pump and a controller are respectively fixed in the middle of the rear side of the disc. The vacuum pump is connected to the four variable material guiding mechanisms through air pipes. The rotating drive end, the variable material guiding mechanism, the vacuum pump and the controller are electrically connected. The four aforementioned deflection mechanisms include an angle-compensating sliding group that is movably mounted on the walking groove. A telescopic arm body is longitudinally arranged on the angle-compensating sliding group, and a deflection shaft is mounted on the rear end of the telescopic arm body. A suction cup swing frame group is arranged on the left side of the deflection shaft, and a first servo rotator for reciprocating 90º angle deflection of the suction cup swing frame group is connected to the right end of the deflection shaft. Each of the aforementioned travel grooves includes an arc-shaped travel groove, and a fixed opening is provided on the front side of the left groove wall of the arc-shaped travel groove, and multiple arc-shaped pressure slides are provided on the discs on the front and rear sides of the arc-shaped travel groove. The angle compensation sliding assembly includes an arc-shaped slide rail fitted between the arc-shaped travel groove and the fixed opening, and a slider is movably fitted on the arc-shaped slide rail. Two support and pressure roller sets are fitted on the front and rear sides of the slider for rolling against the arc-shaped pressure slide to provide support. The two support roller sets consist of a pressure seat and multiple universal abutments.

2. The chip copper production and processing apparatus according to claim 1, characterized in that: The roller conveyor belt includes a base frame, and multiple roller conveyor frames are longitudinally spaced on the top surface of the base frame. Multiple rollers are driven to each roller conveyor frame. A swing channel is formed at the left end between two adjacent roller conveyor frames. An infrared sensor for positioning when the chip copper is conveyed to the left is provided on the left side of one of the roller conveyor frames.

3. The chip copper production and processing apparatus according to claim 2, characterized in that: The suction cup swing frame assembly includes a swing bracket, and a swing suction cup frame assembly is hinged on the swing bracket. A second servo rotator is driven to one side of the swing suction cup frame assembly for swinging the swing suction cup frame assembly backward at a 5-25º angle.

4. The chip copper production and processing apparatus according to claim 3, characterized in that: The swing suction cup frame assembly includes a longitudinal tube frame, and multiple transverse tube frames are welded to the left side of the longitudinal tube frame at horizontal intervals for rotating through a swing channel formed at the left end between two adjacent roller conveyor frames. Multiple suction cups are spaced apart on the top surface of each transverse tube frame. An air inlet is provided in the middle of the longitudinal tube frame, and a suction hose for communicating with a vacuum pump is connected to the air inlet.

5. The chip copper production and processing apparatus according to claim 4, characterized in that: The vertical clamping and conveying device includes a ring chain conveyor frame, on which multiple drag blocks are connected at intervals. Each drag block has a pneumatic gripper vertically arranged on its bottom surface. The pneumatic gripper has an anti-jamming channel in the middle of its lower end, which allows it to rotate through when the chip copper is redirected to a vertical position by the redirecting material guiding mechanism.

6. The chip copper production and processing apparatus according to claim 5, characterized in that: When one of the variable guide mechanisms guides the copper chip in a vertical counterclockwise rotation through the middle of the anti-jamming channel, the corresponding angle compensation sliding group rotates clockwise at a speed of 15-25º at the same frequency as the counterclockwise rotation of the disc for angle compensation, so that the copper chip can be intermittently stopped and vertically gripped by the pneumatic gripper.

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