Multi-sound-field cooperative control device for micro-nano robot and preparation method of multi-sound-field cooperative control device

Abstract

The invention discloses a multi-sound-field cooperative control device for a micro-nano robot and a preparation method of the multi-sound-field cooperative control device, and relates to the technical field of micro-nano robot ultrasonic control. The multi-sound-field cooperative control device for the micro-nano robot comprises a piezoelectric ceramic circular ring, a substrate and a plurality of signal sources, one side of the piezoelectric ceramic circular ring is fixedly connected with the base, and a cavity for loading the micro-nano robot is defined by the inner ring side of the piezoelectric ceramic circular ring and the surface of the base; the piezoelectric ceramic circular ring is divided in the circumferential direction to form a plurality of sector-ring-shaped array elements, the sides, away from the substrate, of the array elements are connected with the signal sources in a one-to-one correspondence mode through positive electrode leads to form a plurality of ultrasonic excitation sources, and the sides, close to the substrate, of the array elements are integrally connected and provided with common ground electrode layers. According to the invention, cooperative control of multiple sound fields on the micro-nano robot can be met, sound wave energy can be better gathered to the center of the sound field, and stronger power is provided for the micro-nano robot.

Description

Technical Field

[0001] The present invention relates to the technical field of ultrasonic control of micro-nano robots, and in particular to a multi-sound field cooperative control device for micro-nano robots and a preparation method thereof. Background Art

[0002] Micro-nano robots are machines with sizes ranging from micrometers to nanometers. The ultrasonic driving technology of micro-nano robots is to controllably drive the micro-nano robots under the action of an external ultrasonic field to perform specific tasks.

[0003] The current ultrasonic driving device of micro-nano robot cannot meet the requirements of coordinated control of micro-nano robot, and has the disadvantage of not being able to gather sound wave energy to provide stronger power to the micro-nano robot.

[0004] In view of the problems existing in the above-mentioned prior art, those skilled in the art are in urgent need of a multi-sound field collaborative control device for micro-nano robots and a preparation method thereof.

[0005] The above information disclosed in this background technology is only used to increase the understanding of the background technology of this application. Therefore, it may contain information that does not constitute the prior art known to ordinary technicians in this field. Summary of the Invention

[0006] The purpose of the present invention is to provide a multi-sound field collaborative control device for micro-nano robots and a preparation method thereof, so as to solve the problems existing in the above-mentioned prior art, meet the collaborative control of micro-nano robots by multiple sound fields, better concentrate the sound wave energy to the center of the sound field, and provide the micro-nano robots with stronger power.

[0007] To achieve the above object, the present invention provides the following solutions:

[0008] In a first aspect, the present invention provides a multi-sound field collaborative control device for a micro-nano robot, comprising a piezoelectric ceramic ring, a substrate and multiple signal sources; one side of the piezoelectric ceramic ring is connected and fixed to the substrate, and the inner ring side of the piezoelectric ceramic ring and the surface of the substrate form a cavity for loading the micro-nano robot; the piezoelectric ceramic ring is divided along the circumferential direction to form a plurality of fan-shaped array elements, and the sides of the multiple array elements away from the substrate are respectively connected one-to-one with the multiple signal sources through positive leads to form multiple ultrasonic excitation sources, and the sides of the multiple array elements close to the substrate are integrally connected and provided with a common ground electrode layer.

[0009] In some embodiments, the piezoelectric ceramic ring is cut along multiple straight lines passing through the center of the piezoelectric ceramic ring from one side away from the substrate to the other side close to the substrate and is evenly divided along the circumference to form a plurality of the array elements; a cutting groove is formed between two adjacent array elements, and the depth of the cutting groove is smaller than the thickness of the piezoelectric ceramic ring.

[0010] In some embodiments, multiple signal sources are used to generate different electrical signals, multiple array elements can generate ultrasonic waves with the same frequency as the corresponding electrical signals, and the ultrasonic waves generated by multiple array elements can be focused toward the center of the piezoelectric ceramic ring and act on the micro-nano robot through the substrate.

[0011] In some embodiments, a silver paste electrode layer is plated on one side of the piezoelectric ceramic ring close to the substrate and the other side away from the substrate.

[0012] In some embodiments, the piezoelectric ceramic ring further includes a metal thin layer; the metal thin layer is bonded to a side of the piezoelectric ceramic ring close to the substrate, and at least a portion of the metal thin layer is extended away from the piezoelectric ceramic ring to form the common ground electrode layer.

[0013] In some embodiments, the side of the piezoelectric ceramic ring close to the substrate is connected and fixed to the substrate via epoxy resin.

[0014] In some embodiments, the frequencies, phases, and amplitudes of the ultrasonic waves generated by the multiple array elements are different.

[0015] In some embodiments, the piezoelectric ceramic ring is polarized along the thickness direction; and / or the substrate is made of silicon wafer material.

[0016] In a second aspect, the present invention provides a method for preparing a multi-sound field collaborative control device for a micro-nano robot, comprising the following steps: step S1, cutting a circular piezoelectric ceramic sheet into a circular piezoelectric ceramic ring; step S2, dividing the piezoelectric ceramic ring into a plurality of fan-shaped array elements along the circumferential direction, and one side of the plurality of array elements is integrally connected and provided with a common ground electrode layer; step S3, connecting and fixing one side of the plurality of array elements integrally connected to a substrate, and the inner ring side of the piezoelectric ceramic ring and the surface of the substrate form a cavity for loading a micro-nano robot; step S4, connecting the other side of the plurality of array elements away from the substrate to a plurality of signal sources one by one through positive leads to form a plurality of ultrasonic excitation sources.

[0017] In some embodiments, before step S1, the method further includes: polarizing the piezoelectric ceramic sheet along the thickness direction, and plating silver paste electrode layers on both sides of the piezoelectric ceramic sheet.

[0018] Compared with the prior art, the present invention has achieved the following technical effects:

[0019] The present invention provides a multi-sound field cooperative control device for micro-nano robots and a preparation method thereof. The piezoelectric ceramic ring is divided into multiple sector-shaped array elements, and the multiple array elements form a closed-loop ultrasonic field. The inner ring side of the piezoelectric ceramic ring forms a cavity with the substrate surface, and the micro-nano robot is carried in the cavity. The multiple array elements are interconnected on one side, that is, the multiple array elements are not completely divided, and the connected side is connected to the common ground electrode layer. At the same time, the other sides of the multiple array elements are connected to multiple signal sources one by one through positive leads to form multiple ultrasonic excitation sources. Thus, each array element is equivalent to an independent ultrasonic excitation source. When a high-frequency signal is connected to each array element, due to the inverse piezoelectric effect of the piezoelectric ceramic sheet, it generates high-frequency vibration and is transmitted to the substrate. Through propagation on the substrate surface, it finally acts on the micro-nano robot. Due to the arrangement of the array elements, a closed-loop ultrasonic field is formed, and the sound field is better focused toward the center. Therefore, the present invention can meet the requirements of the cooperative control of the micro-nano robot by multiple sound fields, better concentrate the sound wave energy toward the center of the sound field, and provide the micro-nano robot with stronger power. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1 Schematic diagram of the structure of a multi-sound field cooperative control device for a micro-nano robot in some embodiments of the present invention;

[0022] Figure 2A Schematic diagram of the structure of a circular piezoelectric ceramic piece in some embodiments of the present invention;

[0023] Figure 2B Schematic diagram of cutting a piezoelectric ceramic ring on a circular piezoelectric ceramic sheet in some embodiments of the present invention;

[0024] Figure 2C A schematic diagram of a structure in which a plurality of array elements are formed by cutting a piezoelectric ceramic ring in some embodiments of the present invention;

[0025] Figure 2D Schematic diagram of the connection between a piezoelectric ceramic ring and a substrate in some embodiments of the present invention;

[0026] Figure 3This is a diagram showing the simulated acoustic field structure of an array element of a multi-acoustic field cooperative control device for a micro-nano robot in some embodiments of the present invention when the ultrasonic driving frequency is 254 kHz;

[0027] Figure 4 This is a diagram showing the simulated acoustic field structure of an array element of a multi-acoustic field cooperative control device for a micro-nano robot in some embodiments of the present invention when the ultrasonic driving frequency is 103 kHz;

[0028] Figure 5 This is a flow chart of the main steps of a method for preparing a multi-sound field cooperative control device for micro-nano robots in some embodiments of the present invention.

[0029] In the figure: 1- piezoelectric ceramic ring; 2- substrate; 3- piezoelectric ceramic sheet; 11- array element; 12- positive lead; 13- common ground electrode layer. DETAILED DESCRIPTION

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0031] The purpose of the present invention is to provide a multi-sound field collaborative control device for micro-nano robots and a preparation method thereof to solve the problems existing in the prior art, which can meet the collaborative control of micro-nano robots by multiple sound fields, better concentrate the sound wave energy to the center of the sound field, and provide the micro-nano robots with stronger power.

[0032] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0033] Example 1

[0034] The embodiment of the present invention provides a multi-sound field cooperative control device for a micro-nano robot, such as Figure 1 、 Figures 2A to 2D 、 Figure 3 and Figure 4 As shown, the device includes a piezoelectric ceramic ring 1, a substrate 2 and multiple signal sources; wherein, one side of the piezoelectric ceramic ring 1 is connected and fixed to the substrate 2, and the inner ring side of the piezoelectric ceramic ring 1 and the surface of the substrate 2 form a cavity for loading the micro-nano robot.

[0035] Figure 2C In the embodiment, the piezoelectric ceramic ring 1 is divided along the circumferential direction to form a plurality of fan-shaped array elements 11. Figure 1In the figure, the sides of the multiple array elements 11 away from the substrate 2 are connected to the multiple signal sources one by one through the multiple positive leads 12 to form multiple ultrasonic excitation sources, and the sides of the multiple array elements 11 close to the substrate 2 are connected as a whole and are provided with a common ground electrode layer 13.

[0036] It should be noted that the piezoelectric ceramic ring 1 of the present invention can be divided into multiple array elements 11 according to actual control needs. One side of the multiple array elements 11 is connected as a whole, that is, one side of the multiple array elements 11 is not completely divided; and the positive lead 12 of each array element 11 is separately led out, wherein each array element 11 is equivalent to a small transducer, and each transducer can be individually controlled by a signal source. By regulating multiple signal sources, different electrical signals are generated, and the positive leads 12 of multiple transducers are separately connected. The negative electrode lead is a common ground electrode layer 13, and all the divided transducer array elements share the common ground electrode layer 13. Due to the inverse piezoelectric effect of the piezoelectric ceramic of a single array element 11, a single array element 11 can generate an ultrasonic wave with the same frequency as the electrical signal. The sound wave radiates directly toward the centripetal line, forming an ultrasonic field focused on the center, and acts on the micro-nano robot, forming the power of the micro-nano robot. Thus, multiple transducer array elements 11 can form different ultrasonic sound fields.

[0037] In some embodiments, the piezoelectric ceramic ring 1 is cut along multiple straight lines passing through the center of the piezoelectric ceramic ring 1 from one side away from the substrate 2 to the other side close to the substrate 2 and is evenly divided along the circumference to form multiple array elements 11; and a cutting groove is formed between two adjacent array elements 11, and the depth of the cutting groove is smaller than the thickness of the piezoelectric ceramic ring 1.

[0038] It should be noted that the present invention cuts along multiple diameter lines of the piezoelectric ceramic ring 1 from one side to the other side, but does not cut through, so that the bottom electrode surface of the piezoelectric ceramic ring 1 is not divided and remains connected, ensuring simultaneous excitation of the electrical signal; Figure 1 As shown, the thickness dimension of the piezoelectric ceramic ring 1 is the distance dimension between its upper and lower surfaces.

[0039] In some embodiments, multiple signal sources are used to generate different electrical signals, and multiple array elements 11 can generate ultrasonic waves with the same frequency as the corresponding electrical signals. The ultrasonic waves generated by the multiple array elements 11 can be focused toward the center of the piezoelectric ceramic ring 1 and act on the micro-nano robot through the substrate 2.

[0040] In some embodiments, the frequencies, phases, and amplitudes of the ultrasonic waves generated by the multiple array elements 11 are different.

[0041] It should be noted that the present invention generates alternating current signals of different frequencies, phases and amplitudes by regulating multiple signal sources. Due to the inverse piezoelectric effect of the piezoelectric ceramics of a single array element 11, a single array element 11 generates ultrasonic waves with the same frequency as the electrical signal. The sound waves radiate directly toward the centripetal line to form an ultrasonic field focused on the center and act on the micro-nano robot to form the power of the micro-nano robot. Since the ultrasonic waves of different frequencies, phases and amplitudes generated by multiple transducer array elements 11 propagate from different directions, different ultrasonic sound fields are formed. Therefore, the device belongs to the drive and control of the micro-nano robot by fusion of multiple sound fields.

[0042] In some embodiments, a silver paste electrode layer is plated on one side of the piezoelectric ceramic ring 1 close to the substrate 2 and the other side away from the substrate 2 .

[0043] In some embodiments, the piezoelectric ceramic ring 1 further includes a metal thin layer; the metal thin layer is bonded to one side of the piezoelectric ceramic ring 1 close to the substrate 2 , and at least a portion of the metal thin layer is extended away from the piezoelectric ceramic ring 1 to form a common ground electrode layer 13 .

[0044] In the present invention, multiple signal sources are individually connected to the positive leads 12 of multiple transducers, and the negative electrode leads are bonded using a thin metal layer to form a common ground electrode surface. All divided transducer array elements 11 share the common ground electrode surface.

[0045] In some embodiments, the side of the piezoelectric ceramic ring 1 close to the substrate 2 is fixed to the substrate 2 by epoxy resin. It should be noted that the piezoelectric ceramic ring 1 of the present invention can also be fixed to the substrate 2 by other adhesives, which is not specifically limited in the present invention.

[0046] In some embodiments, the piezoelectric ceramic ring 1 is polarized along the thickness direction. Figure 1 As shown, the thickness direction of the piezoelectric ceramic ring 1 is perpendicular to the upper and lower surfaces of the piezoelectric ceramic ring 1.

[0047] In some embodiments, the substrate 2 is made of a silicon wafer. The substrate 2 of the present invention serves to load the experimental sample, and the reflection on the surface of the silicon wafer can help observe the experimental sample.

[0048] The multi-sound field collaborative control device for micro-nano robots integrates the composite control capabilities of multiple sound fields, such as ultrasound, surface acoustic waves, and standing wave fields, to achieve precise actuation, formation control, and functional operation of robot clusters at the micro-nanoscale. In biomedical engineering, the device utilizes the focusing effect of acoustic fields to guide drug-loaded micro-nano robots through vascular barriers, enabling targeted drug release at tumor sites. In micro-nano manufacturing and precision machining, multiple acoustic fields collaboratively control the formation of metamaterial structures on chip surfaces using nanoparticles. In the field of lab-on-a-chip and microfluidics, the device utilizes differences in acoustic pressure nodes to achieve label-free sorting of blood cells and circulating tumor cells.

[0049] The present invention can arbitrarily cut the number of array elements 11 to form a multi-sound field coordinated control ultrasonic excitation drive micro-nano robot device. In addition, the circular arrangement of multiple array elements 11 can focus the ultrasonic field toward the center to generate greater acoustic radiation energy to act on the micro-nano robot.

[0050] Example 2

[0051] The embodiment of the present invention provides a method for preparing a multi-sound field cooperative control device for a micro-nano robot, which is used to prepare the multi-sound field cooperative control device for a micro-nano robot in Example 1, such as Figure 1 、 Figures 2A to 2D 、 Figure 5 As shown, it mainly includes the following steps:

[0052] Step S1: cutting the circular piezoelectric ceramic sheet 3 into an annular piezoelectric ceramic ring 1;

[0053] Step S2: dividing the piezoelectric ceramic ring 1 into a plurality of fan-shaped array elements 11 along the circumferential direction, wherein one side of the plurality of array elements 11 is integrally connected and provided with a common ground electrode layer 13;

[0054] Step S3: fixing one side of the plurality of array elements 11 integrally connected to the substrate 2, and the inner ring side of the piezoelectric ceramic ring 1 and the surface of the substrate 2 to form a cavity for loading the micro-nano robot;

[0055] Step S4: connecting the other side of the plurality of array elements 11 away from the substrate 2 to the plurality of signal sources in a one-to-one correspondence through the positive leads 12 to form a plurality of ultrasonic excitation sources.

[0056] Based on the above steps S1 to S4, it should be noted that in step S1, if Figure 2A and Figure 2B As shown, a circular piezoelectric ceramic sheet 3 is cut into a circular piezoelectric ceramic ring 1 by laser cutting process; in step S2, as shown in FIG. Figure 2C As shown, the piezoelectric ceramic ring 1 is divided into a plurality of fan-shaped array elements 11 along the circumferential direction by laser cutting technology; in step S3, as shown in FIG. Figure 2DIt is shown that one side of the plurality of array elements 11 is bonded to the substrate 2 by epoxy resin; and the execution order of step S3 and step S4 of the present invention can be adjusted, that is, step S4 can be executed first and then step S3.

[0057] In some embodiments, before step S1, the preparation method of the present invention further comprises:

[0058] The piezoelectric ceramic sheet 3 is polarized along the thickness direction, and silver paste electrode layers are plated on both sides of the piezoelectric ceramic sheet 3 .

[0059] The preparation method of the present invention first selects a polarized piezoelectric ceramic sheet 3, whose electrode direction is the thickness direction, and the upper and lower surfaces have been plated with silver paste electrode layers, and uses a laser cutting method or other cutting method to cut the disc into a ring shape, and then uses a laser cutting method or other method to cut the ring into equal parts of uniform size, at least 4 equal parts, without cutting through, so that the bottom electrode surface of the piezoelectric ceramic sheet 3 is not divided and remains connected, ensuring simultaneous excitation of the electrical signal, such as Figure 2C In the illustrated embodiment, the ring 20 is divided into equal parts, each of which is equivalent to a small array element 11, which can be individually excited by a signal to produce a single-element acoustic field. A thin layer of copper metal is bonded to the bottom surface of the ring, and a lead is drawn out at one end to serve as a common ground electrode surface for all ceramic array elements 11. The bottom surface of the entire ring is bonded to the substrate 2 using epoxy resin, which serves as a cavity for loading the micro-nano robot. The electrode signal of each array element 11 is individually welded and led out using a positive lead 12. At this point, each array element 11 is equivalent to an independent ultrasonic excitation source. When a high-frequency signal is connected to each array element 11, due to the inverse piezoelectric effect of the piezoelectric ceramic plate 3, it generates high-frequency vibrations and is transmitted to the substrate 2. It propagates through the surface of the substrate 2 and ultimately acts on the micro-nano robot. The arrangement of the array elements 11 forms a closed-loop ultrasonic field, which is better focused toward the center. Therefore, by controlling a single array element 11 or multiple array elements 11, a device for ultrasonically driving and controlling a micro-nano robot with coordinated control of multiple sound fields can be formed.

[0060] Also see Figure 3 The figure shows the structure of the array element simulation sound field of the multi-sound field cooperative control device for micro-nano robots when the ultrasonic driving frequency is 254kHz; Figure 4 This is a diagram of the simulated acoustic field structure of the array element of the multi-sound field cooperative control device for micro-nano robots when the ultrasonic driving frequency is 103kHz; Figure 3 and Figure 4 It can be seen that multiple array elements 11 can generate multiple sound fields and better focus them toward the center, forming greater sound radiation energy to act on the micro-nano robot, which can meet the coordinated control of the micro-nano robot by multiple sound fields, better enrich the sound wave energy toward the center of the sound field, and provide the micro-nano robot with stronger power.

[0061] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only intended to help understand the method and core concept of the present invention. At the same time, those skilled in the art will find that the specific implementation methods and application scopes may vary based on the concept of the present invention. In summary, the contents of this specification should not be construed as limiting the present invention.

Claims

1. A multi-sound field cooperative control device for micro-nano robots, characterized in that: It includes a piezoelectric ceramic ring, a substrate and multiple signal sources; One side of the piezoelectric ceramic ring is connected and fixed to the substrate, and the inner ring side of the piezoelectric ceramic ring and the surface of the substrate form a cavity for loading the micro-nano robot; The piezoelectric ceramic ring is divided along the circumferential direction to form a plurality of fan-shaped array elements. The sides of the plurality of array elements away from the substrate are respectively connected to the plurality of signal sources one by one through positive leads to form a plurality of ultrasonic excitation sources. The sides of the plurality of array elements close to the substrate are integrally connected and provided with a common ground electrode layer.

2. The multi-sound field cooperative control device for micro-nano robots according to claim 1, characterized in that: The piezoelectric ceramic ring is cut along a plurality of straight lines passing through the center of the piezoelectric ceramic ring from one side away from the substrate to the other side close to the substrate and is evenly divided along the circumference to form a plurality of array elements; A cutting groove is formed between two adjacent array elements, and the depth of the cutting groove is smaller than the thickness of the piezoelectric ceramic ring.

3. The multi-sound field coordinated control device for micro-nano robots according to claim 1, characterized in that: The multiple signal sources are used to generate different electrical signals, and the multiple array elements can generate ultrasonic waves with the same frequency as the corresponding electrical signals. The ultrasonic waves generated by the multiple array elements can be focused toward the center of the piezoelectric ceramic ring and act on the micro-nano robot through the substrate.

4. The multi-sound field cooperative control device for micro-nano robots according to claim 1, characterized in that: A silver paste electrode layer is plated on one side of the piezoelectric ceramic ring close to the substrate and the other side away from the substrate.

5. The multi-sound field coordinated control device for micro-nano robots according to claim 1, characterized in that: The piezoelectric ceramic ring also includes a metal thin layer; The metal thin layer is bonded to a side of the piezoelectric ceramic ring close to the substrate, and at least a portion of the metal thin layer is led out in a direction away from the piezoelectric ceramic ring to form the common ground electrode layer.

6. The multi-sound field coordinated control device for micro-nano robots according to claim 1, characterized in that: The side of the piezoelectric ceramic ring close to the substrate is bonded and fixed to the substrate through epoxy resin.

7. The multi-sound field coordinated control device for micro-nano robots according to claim 3, characterized in that: The frequencies, phases and amplitudes of the ultrasonic waves generated by the multiple array elements are all different.

8. The multi-sound field coordinated control device for micro-nano robots according to claim 1, characterized in that: The piezoelectric ceramic ring is polarized along the thickness direction; and / or The substrate is made of silicon wafer material.

9. A method for preparing a multi-sound field cooperative control device for micro-nano robots, characterized in that: The following steps are involved: Step S1, cutting the circular piezoelectric ceramic sheet into annular piezoelectric ceramic rings; Step S2, dividing the piezoelectric ceramic ring into a plurality of fan-shaped array elements along the circumferential direction, wherein one side of the plurality of array elements is integrally connected and provided with a common ground electrode layer; Step S3, fixing one side of the plurality of array elements connected integrally to a substrate, and the inner ring side of the piezoelectric ceramic ring and the surface of the substrate to form a cavity for loading the micro-nano robot; Step S4: connecting the other side of the plurality of array elements away from the substrate to a plurality of signal sources in a one-to-one correspondence through positive leads to form a plurality of ultrasonic excitation sources.

10. The method for preparing a multi-sound field coordinated control device for a micro-nano robot according to claim 9, characterized in that: Before step S1, the method further includes: The piezoelectric ceramic sheet is polarized along the thickness direction, and silver paste electrode layers are plated on both sides of the piezoelectric ceramic sheet.

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