An optical automatic detecting device for defects of a semiconductor wafer

Abstract

The application discloses a kind of optical automatic detection device of semiconductor wafer defect, including upper feeding conveying component and lower feeding conveying component;Upper feeding bin assembly side is provided with upper feeding handling assembly, and upper feeding handling assembly is placed to upper feeding conveying component by the product to be detected grabbing;Detection component includes first detection camera and second detection camera, and detection component side is provided with turnover transfer component, and turnover transfer component is placed after the product of first detection camera detection completion overturn and to lower feeding conveying component;Lower feeding conveying component one end is provided with lower feeding bin assembly, and lower feeding handling assembly is handled to lower feeding bin assembly by OK product after detection;Lower feeding conveying component one end is provided with NG mechanism above, and NG mechanism is handled to lower feeding by NG product of detection defect;The application can realize the full automation detection of product, greatly improve production efficiency, reduce comprehensive cost, reduce manpower dependence.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer defect detection, and more particularly to an optical automatic detection device for semiconductor wafer defects. BACKGROUND

[0002] Die detection technology is a key link in the semiconductor industry, mainly involving chip (Die) defect detection (such as integrated circuit wafer). With the development of industrial automation, artificial intelligence and precision measurement technology, Die detection technology has evolved from traditional manual detection to intelligent and high-precision automatic detection. The existing technology mainly uses a microscope for manual detection, which has the disadvantages of low efficiency, easy to miss detection and strong subjectivity.

[0003] In the prior art, the Pack tray may have residual glue and the size tolerance of the Pack tray may be large. The more the Pack trays are stacked, the larger the deviation is, which makes it difficult to separate the Pack trays during feeding. After the product TOP (top surface) detection is completed, the product needs to be flipped over 180° for Bottom (bottom surface) detection. After being flipped over 180°, the cover tray needs to be clamped. During the clamping process, the Die may stick to the top surface of the cover tray, which may fall off during the movement of the cover tray. In addition, the existing detection device needs to be assisted by manual detection, and cannot realize full-automatic detection. Therefore, the detection efficiency is low, and the detection result is inaccurate. SUMMARY

[0004] To solve at least one of the above technical problems, the present application provides an optical automatic detection device for semiconductor wafer defects.

[0005] The first aspect of the present application provides an optical automatic detection device for semiconductor wafer defects, comprising: a device platform and a shell arranged on the top of the device platform;

[0006] The top of the device platform is provided with a feeding conveying assembly and a discharging conveying assembly arranged side by side;

[0007] One end of the feeding conveying assembly is provided with a feeding bin assembly, the feeding bin assembly is placed with a product to be detected, and one side of the feeding bin assembly is provided with a feeding handling assembly, the feeding handling assembly grabs and places the product to be detected on the feeding conveying assembly;

[0008] The top of the device platform is provided with a detection assembly, the detection assembly comprises a first detection camera and a second detection camera, the first detection camera is arranged above the feeding conveying assembly, and the second detection camera is arranged above the discharging conveying assembly;

[0009] The detection assembly is provided with a turnover transfer assembly on one side, which turns the product after detection by the first detection camera and places it on the unloading conveying assembly;

[0010] The unloading conveying assembly is provided with an unloading hopper assembly at one end, and the unloading hopper assembly is provided with an unloading carrying assembly on one side, which carries the OK product after detection to the unloading hopper assembly.

[0011] The unloading conveying assembly is provided with an NG mechanism above one end, which carries the NG product with defects for unloading.

[0012] In a preferred embodiment of the application, the feeding conveying assembly and the unloading conveying assembly are both arranged in parallel, and the two feeding conveying assemblies are each provided with a feeding hopper assembly, the feeding hopper assembly comprises a feeding clamp, a plurality of products to be detected are arranged inside the feeding clamp, a jacking rod is arranged below the feeding clamp, and a feeding jacking module is connected to the bottom of the jacking rod.

[0013] In a preferred embodiment of the application, the feeding conveying assembly is two, and the two feeding conveying assemblies are arranged in parallel, any of the feeding conveying assemblies comprises a conveying support and a feeding conveying flow channel mounted on the top of the conveying support, a conveying guide rail is arranged below the feeding conveying flow channel, a conveying mechanism is connected to the conveying guide rail, the conveying mechanism is used to drive the product to be detected to slide along the feeding conveying flow channel, and a side pushing mechanism is arranged on one side of the feeding conveying flow channel.

[0014] In a preferred embodiment of the application, the feeding carrying assembly comprises a feeding carrying support fixedly mounted on the top of the equipment platform, a feeding carrying horizontal movement module is arranged on the top of the feeding carrying support, a feeding carrying horizontal sliding table is connected to the top of the feeding carrying horizontal movement module, a feeding carrying vertical sliding table is connected to one side of the feeding carrying horizontal sliding table, a feeding carrying electric claw is connected to one side of the feeding carrying vertical sliding table, and the feeding carrying electric claw is used to clamp the product to be detected in the feeding clamp and place it on the feeding conveying flow channel.

[0015] In a preferred embodiment of the application, the detection assembly comprises a detection support mounted on the top of the equipment platform, and the detection support is provided with detection adjusting seats arranged in parallel on the top, one of the detection adjusting seats is provided with a first detection mounting seat connected to the top, and the other detection adjusting seat is provided with a second detection mounting seat connected to the top.

[0016] The first detection mounting seat is provided with two first detection vertical adjustment modules side by side on one side, and any first detection vertical adjustment module is connected with a first detection camera and a first detection light source on one side, the first detection light source is located below the first detection camera, and two first detection cameras correspond to the positions of two feeding conveying flow channels.

[0017] In a preferred embodiment of the present application, the detection adjusting seat comprises a first detection horizontal sliding module and a second detection horizontal sliding module arranged vertically, the second detection horizontal sliding module can slide along the length direction of the first detection horizontal sliding module, the first detection mounting seat and the second detection mounting seat are fixedly installed on the second detection horizontal sliding module, two second detection vertical adjustment modules are arranged side by side on one side of the second detection mounting seat, and a second detection camera and a second detection light source are connected on one side of the second detection vertical adjustment module, and two second detection cameras correspond to the positions of two discharging conveying flow channels.

[0018] In a preferred embodiment of the present application, the turnover transfer assembly comprises a turnover transfer horizontal module and two turnover transfer horizontal guide rails connected on the top of the turnover transfer horizontal module, a turnover transfer horizontal sliding block is connected above the turnover transfer horizontal guide rail, a turnover transfer vertical plate is arranged on the top of the turnover transfer horizontal sliding block, a turnover transfer vertical module is arranged on one side of the turnover transfer vertical plate, turnover transfer vertical guide rails are symmetrically arranged on both sides of the turnover transfer vertical module, a turnover transfer vertical sliding block is movably connected on one side of the turnover transfer vertical module, both ends of the turnover transfer vertical sliding block on one side are movably connected to the turnover transfer vertical guide rails on both sides, rotatable turnover transfer electric claws are symmetrically arranged at both ends of the turnover transfer vertical sliding block, and the turnover transfer electric claws are used for grabbing the products to be detected on the feeding conveying assembly to perform 180-degree turnover.

[0019] In a preferred embodiment of the present application, the detection support is provided with an empty tray carrying assembly on one side close to the turnover transfer assembly, the empty tray carrying assembly comprises an empty tray carrying horizontal moving module fixedly installed on the detection support, an empty tray carrying horizontal sliding plate is connected on one side of the empty tray carrying horizontal moving module, an empty tray carrying vertical moving module is arranged on one side of the empty tray carrying horizontal sliding plate, an empty tray carrying vertical sliding plate is connected on one side of the empty tray carrying vertical moving module, first and second empty tray carrying electric claws are symmetrically arranged at both ends of the empty tray carrying vertical sliding plate, the first and second empty tray carrying electric claws are used for synchronously grabbing Pack trays on two feeding conveying flow channels, and the products to be detected are placed in the Pack trays.

[0020] In a preferred embodiment of the present application, the NG mechanism comprises an NG carrying support and a first NG carrying horizontal module arranged on the top of the NG carrying support, the top of the first NG carrying horizontal module is connected with a second NG carrying horizontal module in a matched mode, a movable NG carrying electric claw is connected with the second NG carrying horizontal module in a matched mode, an NG product edge detection camera is arranged below the NG carrying support, and an ion fan is arranged on one side of the NG carrying support.

[0021] In a preferred embodiment of the present application, an NG unloading sliding table is arranged on one side of the unloading conveying assembly and close to one side of the NG carrying support, an NG unloading clamp jaw is connected with the top of the NG unloading sliding table in a matched mode, an NG material bin is arranged on one side of the NG unloading sliding table and below the NG unloading clamp jaw, the NG material bin comprises two parallel arranged NG magazines, the NG unloading clamp jaw is used to grab NG products and place them into the two NG magazines alternately, an NG jacking mechanism is arranged below any of the two NG magazines, an NG product positioning camera is arranged below the NG material bin, and the ion fan is arranged on one side of the NG magazine.

[0022] The above technical scheme of the present application has the following advantages compared with the prior art:

[0023] By arranging two unloading conveying flow channels and two unloading conveying flow channels in parallel, two groups of products to be detected can be synchronously subjected to front face detection, after the front face detection is completed, the two flipping and transferring electric claws are driven by the flipping and transferring assembly at the end to grab the products subjected to the front face detection to flip by 180 degrees and synchronously place them in the two unloading conveying flow channels, the back faces of the two products are simultaneously detected by the two second detection cameras, the detection efficiency is improved, the NG mechanism is arranged to detect the NG products to perform edge detection and positioning and clamp and place them in the NG magazines, the full automatic detection of the products is realized, the production efficiency is greatly improved (automatic feeding and discharging + high-speed CCD camera imaging), the comprehensive cost is reduced, the manpower dependence is reduced, the defects are automatically classified, and the manual visual inspection is replaced. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the specific embodiments of the present application or the technical scheme in the prior art, the drawings needed to be used in the following specific embodiments or prior art description will be briefly introduced. Obviously, some of the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0025] Figure 1 is a schematic diagram of a three-dimensional structure of a semiconductor wafer defect optical automatic detection device according to an embodiment of the present application;

[0026] Figure 2is a schematic view of the internal structure of the semiconductor wafer defect optical automatic detection device according to an embodiment of the present application;

[0027] Figure 3 is a top view of the device platform according to an embodiment of the present application;

[0028] Figure 4 is a schematic view of the loading and conveying assembly structure according to an embodiment of the present application;

[0029] Figure 5 is a schematic view of the loading and conveying assembly structure according to an embodiment of the present application;

[0030] Figure 6 is a schematic view of the detection assembly structure according to an embodiment of the present application;

[0031] Figure 7 is a schematic view of the empty wafer conveying assembly structure according to an embodiment of the present application;

[0032] Figure 8 is a schematic view of the installation of the first empty wafer conveying electric claw and the second empty wafer conveying electric claw according to an embodiment of the present application;

[0033] Figure 9 is a schematic view of the NG mechanism structure according to an embodiment of the present application;

[0034] Figure 10 is a schematic view of the installation of the NG bin according to an embodiment of the present application;

[0035] Figure 11 is a schematic view of the turnover and transfer assembly structure according to an embodiment of the present application;

[0036] Figure 12 is a schematic view of the operation principle of the semiconductor wafer defect optical automatic detection device according to an embodiment of the present application.

[0037] In the figure, 1, fan filter unit, 2, indicator light, 3, shell, 4, operation computer, 5, scroll wheel, 6, support, 7, equipment platform, 8, operation button, 9, display screen, 10, detection assembly, 1001, detection support, 1002, detection adjustment seat, 10021, first detection horizontal sliding module, 10022, second detection horizontal sliding module, 1003, first detection vertical adjustment module, 1004, first detection mounting seat, 1005, first detection light source, 1006, first detection camera, 1007, second detection light source, 1008, second detection camera, 1009, second detection vertical adjustment module, 10010, second detection mounting seat; 11, feeding conveying assembly, 1101, side pushing mechanism, 1102, feeding conveying flow channel, 1103, conveying guide rail, 1104, conveying mechanism; 12, feeding carrying assembly, 1201, feeding carrying support, 1202, feeding carrying horizontal moving module, 1203, feeding carrying horizontal sliding table, 1204, feeding carrying vertical sliding table, 1205, feeding carrying electric claw; 13, feeding bin assembly, 1301, feeding magazine, 1302, jacking rod, 1303, feeding jacking module; 14, discharging carrying assembly, 15, discharging bin assembly, 16, discharging conveying assembly, 17, NG mechanism, 1701, NG carrying electric claw, 1702, NG carrying support, 1703, first NG carrying horizontal module, 1704, second NG carrying horizontal module, 1705, ion fan, 1706, NG discharging clamping jaw, 1707, NG discharging sliding table, 1708, NG jacking mechanism, 1709, NG bin, 17010, NG magazine, 17011, NG product edge detection camera, 17012, NG product positioning camera; 18, turnover transfer assembly, 1801, turnover transfer horizontal module, 1802, turnover transfer horizontal guide rail, 1803, turnover transfer horizontal control motor, 1804, turnover transfer horizontal sliding block, 1805, turnover transfer vertical guide rail, 1806, turnover transfer vertical plate, 1807, turnover transfer vertical control motor, 1808, turnover transfer vertical module, 1809, turnover transfer vertical sliding block, 18010, turnover transfer electric claw; 19, empty tray carrying assembly, 1901, empty tray carrying horizontal moving module, 1902, first empty tray carrying electric claw, 1903, empty tray carrying vertical sliding plate, 1904, second empty tray carrying electric claw, 1905, empty tray carrying vertical moving module, 1906, empty tray carrying horizontal sliding plate, 1907, empty tray carrying vertical guide rail, 1908, in-place detector, 1909, electric claw control electric cylinder. DETAILED DESCRIPTION

[0038] In order to enable the above-mentioned objects, features and advantages of the present application to be clearer, a further detailed description will be given to the present application with reference to the specific embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0039] In the following description, a large number of specific details are set forth in order to facilitate a thorough understanding of the present application, however, the present application can also be implemented in other manners different from those described herein, and therefore, the protective scope of the present application is not limited to the specific embodiments disclosed below.

[0040] Embodiment one

[0041] Referring to Figures 1-3 As shown in the figure, the present application proposes an optical automatic detection device for semiconductor wafer defects, comprising: a device platform 7 and a shell 3 arranged on the top of the device platform 7;

[0042] The top of the device platform 7 is provided with a feeding conveying assembly 11 and a discharging conveying assembly 16 arranged side by side;

[0043] One end of the feeding conveying assembly 11 is provided with a feeding bin assembly 13, and the feeding bin assembly 13 is placed with products to be detected. One side of the feeding bin assembly 13 is provided with a feeding carrying assembly 12, and the feeding carrying assembly 12 grabs and places the products to be detected to the feeding conveying assembly 11;

[0044] The top of the device platform 7 is provided with a detection assembly 10, and the detection assembly 10 comprises a first detection camera 1006 and a second detection camera 1008. The first detection camera 1006 is arranged above the feeding conveying assembly 11, and the second detection camera 1008 is arranged above the discharging conveying assembly 16. One side of the detection assembly 10 is provided with a turnover transfer assembly 18, and the turnover transfer assembly 18 turns over the products after the first detection camera 1006 detects and places them to the discharging conveying assembly 16;

[0045] One end of the discharging conveying assembly 16 is provided with a discharging bin assembly 15, and one side of the discharging bin assembly 15 is provided with a discharging carrying assembly 14. The discharging carrying assembly 14 carries the OK products after detection to the discharging bin assembly 15;

[0046] The top of one end of the discharging conveying assembly 16 is provided with an NG mechanism 17, and the NG mechanism 17 carries the NG products with defects for discharging.

[0047] Specifically, one side of the shell 3 is provided with an operation computer 4 and a display screen 9. A plurality of operation buttons 8 are arranged below the display screen 9. A fan filter unit 1 and an indicator light 2 are arranged on the top of the shell 3. Rollers 5 and supporting legs 6 are arranged at the four corners of the bottom of the device platform 7, which are used for moving and fixing the device, and improve the safety of the device in use.

[0048] According to the embodiment of the present application, the upper feeding conveying assembly 11 and the lower feeding conveying assembly 16 are both arranged in parallel, and the two upper feeding conveying assemblies 11 are both provided with an upper feeding bin assembly 13, the upper feeding bin assembly 13 comprises an upper feeding clamp 1301, a plurality of products to be detected are arranged in the upper feeding clamp 1301, a jacking rod 1302 is arranged below the upper feeding clamp 1301, and the jacking rod 1302 is connected with an upper feeding jacking module 1303 at the bottom.

[0049] As shown in Figure 4 the embodiment of the present application, the upper feeding conveying assembly 11 is two, the two upper feeding conveying assemblies 11 are arranged in parallel, any upper feeding conveying assembly 11 comprises a conveying support and an upper feeding conveying channel 1102 mounted on the top of the conveying support, a conveying guide rail 1103 is arranged below the upper feeding conveying channel 1102, a conveying mechanism 1104 is connected with the conveying guide rail 1103, the conveying mechanism 1104 is used for driving the product to be detected to slide along the upper feeding conveying channel 1102, and a side pushing mechanism 1101 is arranged on one side of the upper feeding conveying channel 1102.

[0050] It should be noted that the upper feeding conveying assembly 11 and the lower feeding conveying assembly 16 are the same in structure, and the lower feeding conveying assembly 16 also comprises two lower feeding conveying channels arranged in parallel and two lower feeding clamps at the ends.

[0051] As shown in Figure 5 the embodiment of the present application, the upper feeding conveying assembly 11 is two, the two upper feeding conveying assemblies 11 are arranged in parallel, any upper feeding conveying assembly 11 comprises a conveying support and an upper feeding conveying channel 1102 mounted on the top of the conveying support, a conveying guide rail 1103 is arranged below the upper feeding conveying channel 1102, a conveying mechanism 1104 is connected with the conveying guide rail 1103, the conveying mechanism 1104 is used for driving the product to be detected to slide along the upper feeding conveying channel 1102, and a side pushing mechanism 1101 is arranged on one side of the upper feeding conveying channel 1102.

[0052] As shown in Figure 6 the embodiment of the present application, the detection assembly 10 comprises a detection support 1001 mounted on the top of the equipment platform 7, and the detection support 1001 is provided with detection adjusting seats 1002 arranged in parallel on the top, one of the detection adjusting seats 1002 is connected with a first detection mounting seat 1004 on the top, and the other detection adjusting seat 1002 is connected with a second detection mounting seat 10010 on the top.

[0053] The first detection mounting seat 1004 is provided with two first detection vertical adjustment modules 1003 side by side, and any first detection vertical adjustment module 1003 is connected with a first detection camera 1006 and a first detection light source 1005 on one side, the first detection light source 1005 is located below the first detection camera 1006, and the two first detection cameras 1006 correspond to the positions of the two upper feeding conveying flow channels 1102.

[0054] As shown in the figure, Figure 7 According to the embodiment of the present application, the detection adjustment seat 1002 comprises a first detection horizontal sliding module 10021 and a second detection horizontal sliding module 10022 arranged vertically, the second detection horizontal sliding module 10022 can slide along the length direction of the first detection horizontal sliding module 10021, the first detection mounting seat 1004 and the second detection mounting seat 10010 are fixedly installed on the second detection horizontal sliding module 10022, the second detection mounting seat 10010 is provided with two second detection vertical adjustment modules 1009 side by side on one side, the second detection vertical adjustment module 1009 is connected with a second detection camera 1008 and a second detection light source 1007 on one side, and the two second detection cameras 1008 correspond to the positions of the two lower feeding conveying flow channels.

[0055] As shown in the figure, Figure 11 According to the embodiment of the present application, the turnover transfer assembly 18 comprises a turnover transfer horizontal module 1801 and two turnover transfer horizontal guide rails 1802 connected on the top of the turnover transfer horizontal module 1801, one end of the turnover transfer horizontal guide rail 1802 is provided with a turnover transfer horizontal control motor 1803, the shaft end of the turnover transfer horizontal control motor 1803 is connected with a synchronous belt, the other end of the synchronous belt is connected to the bottom of a turnover transfer horizontal sliding block 1804, the turnover transfer horizontal guide rail 1802 is connected with the turnover transfer horizontal sliding block 1804 above, the turnover transfer horizontal sliding block 1804 is provided with a turnover transfer vertical plate 1806 on the top, the turnover transfer vertical plate 1806 is provided with a turnover transfer vertical module 1808 on one side, the turnover transfer vertical module 1808 is provided with a turnover transfer vertical control motor 1807 on the top, which is used for controlling the turnover transfer vertical sliding block 1809 to move in the vertical direction, the turnover transfer vertical module 1808 is provided with turnover transfer vertical guide rails 1805 symmetrically on both sides, the turnover transfer vertical module 1808 is movably connected with a turnover transfer vertical sliding block 1809 on one side, the turnover transfer vertical sliding block 1809 is movably connected to the turnover transfer vertical guide rails 1805 on both sides on both ends of one side, the turnover transfer vertical sliding block 1809 is provided with rotatable turnover transfer electric claws 18010 symmetrically on both ends, the turnover transfer electric claws 18010 are used for grabbing the products to be detected on the upper feeding conveying assembly 11 to perform 180-degree turnover.

[0056] As shown in the figure, Figure 7 And Figure 8As shown, according to the embodiment of the present application, the detection support 1001 is provided with an empty tray carrying assembly 19 close to the side of the turnover transfer assembly 18, the empty tray carrying assembly 19 comprises an empty tray carrying horizontal moving module 1901 fixedly installed on the detection support 1001, one side of the empty tray carrying horizontal moving module 1901 is connected in cooperation with an empty tray carrying horizontal sliding plate 1906, one side of the empty tray carrying horizontal sliding plate 1906 is provided with an empty tray carrying vertical moving module 1905, one side of the empty tray carrying vertical moving module 1905 is connected in cooperation with an empty tray carrying vertical sliding plate 1903, the two ends of the empty tray carrying vertical sliding plate 1903 are symmetrically provided with a first empty tray carrying electric claw 1902 and a second empty tray carrying electric claw 1904, the first empty tray carrying electric claw 1902 and the second empty tray carrying electric claw 1904 are used for synchronously grabbing the Pack trays on the two loading and conveying flow channels 1102, and the products to be detected are placed in the Pack trays.

[0057] It should be noted that the empty tray carrying vertical sliding block is symmetrically provided with electric claw control cylinders 1909 on the two sides, one side of the electric claw control cylinders 1909 is provided with a position detector 1908, the first empty tray carrying electric claw 1902 and the second empty tray carrying electric claw 1904 are respectively connected to the electric claw control cylinders 1909 on the two sides, the electric claw control cylinders 1909 are used for finely adjusting the lifting displacement of the first empty tray carrying electric claw 1902 and the second empty tray carrying electric claw 1904, and the position detector 1908 is used for detecting the maximum stroke of the first empty tray carrying electric claw 1902 and the second empty tray carrying electric claw 1904.

[0058] Further, the two ends of one side of the empty tray carrying horizontal sliding plate 1906 are symmetrically provided with two empty tray carrying vertical guide rails 1907, and one side of the empty tray carrying vertical sliding plate 1903 is movably connected to the empty tray carrying vertical guide rails 1907.

[0059] As shown in the figure, Figures 9-10 As shown, according to the embodiment of the present application, the NG mechanism 17 comprises an NG carrying support 1702 and a first NG carrying horizontal module 1703 arranged on the top of the NG carrying support 1702, the top of the first NG carrying horizontal module 1703 is connected in cooperation with a second NG carrying horizontal module 1704, the second NG carrying horizontal module 1704 is connected in cooperation with a movable NG carrying electric claw 1701 below, the NG carrying support 1702 is provided below with an NG product edge detection camera 17011, and one side of the NG carrying support 1702 is provided with an ion air blower 1705.

[0060] According to the embodiment of the present application, the one side of the blank conveying assembly 16 and the one side close to the NG carrying support 1702 is provided with an NG blank sliding table 1707, the top of the NG blank sliding table 1707 is matched and connected with an NG blank clamping jaw 1706, the one side of the NG blank sliding table 1707 and below the NG blank clamping jaw 1706 is provided with an NG material bin 1709, the NG material bin 1709 includes two parallel arranged NG cartridges 17010, the NG blank clamping jaw 1706 grabs the NG products and places them into the two NG cartridges 17010 alternately, any one of the two NG cartridges 17010 is provided with an NG jacking mechanism 1708 below, the NG material bin 1709 is provided with an NG product positioning camera 17012 below, and the ion fan 1705 is arranged on the one side of the NG cartridge 17010.

[0061] As shown in the drawings, the working principle of the present application is as follows: Figure 12

[0062] The worker puts the Pack tray (44 trays) into the feeding cartridge 1301 and presses the start button, and the feeding carrying module carries the first Pack tray to the feeding conveying flow channel 1102, one of the feeding conveying flow channels 1102 moves the Pack tray to the position below the TOP camera (the first detection camera 1006) for detection, the other feeding conveying flow channel 1102 moves the second Pack tray to the position below the TOP camera, the camera completes the detection, moves the Pack tray to the tray covering position, the empty tray carrying assembly 19 lowers the cover tray, then the turnover and transfer module clamps and turns over the completed Pack tray by 180° and puts it into the blank conveying flow channel, the empty tray carrying assembly 19 takes up the cover tray, the Pack tray in the blank conveying flow channel is transferred to the position below the Bottom camera (the second detection camera 1008), the second detection camera 1008 completes the detection, and the blank carrying assembly 14 clamps and carries the Pack tray with the detection completed to the blank cartridge.

[0063] ​To sum up, the device is mainly used for automatically detecting Single Die, and the detection items mainly include Bump damage, Bump welding offset, Die pollution, Die edge collapse / cracking, Bump oxidation, wafer manufacturing defects, chip front edge collapse, back gold shedding and the like. Two feeding conveying flow channels 1102 and two discharging conveying flow channels are arranged in parallel, so that two groups of products to be detected can be synchronously detected from the front. After the front detection is completed, the end turnover transfer assembly 18 drives the two turnover transfer claws 18010 to grab the products whose front detection is completed to turn over by 180 degrees, and synchronously place them in the two discharging conveying flow channels. The back of the two products is detected by the two second detection cameras 1008 at the same time, so as to improve the detection efficiency. The NG mechanism 17 arranged is used for performing edge detection and positioning on the NG products detected, and clamping and placing them in the NG magazine 17010, so as to realize automatic detection of the products, greatly improve the production efficiency (automatic feeding and discharging + high-speed CCD camera imaging), reduce the comprehensive cost, reduce the dependence on manpower, automatically classify defects, and replace manual visual inspection.

[0064] The technical features of the above embodiments can be combined in any manner. In order to make the description simple, all possible combinations of the technical features in the above embodiments are not described, however, as long as the combinations of the technical features do not contradict, they should be considered as the scope disclosed in the specification.

[0065] The above description of the disclosed embodiments enables a person skilled in the art to implement or use the present application. Various modifications to the above embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the above-described embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

[0066] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or replacements within the technical scope disclosed in the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. An apparatus for the automatic optical detection of defects in a semiconductor wafer, comprising: The device platform and the shell arranged on the top of the device platform; characterized in that: The device platform top is provided with a feeding conveying assembly and a discharging conveying assembly side by side; The feeding conveying assembly is provided with a feeding bin assembly at one end, the feeding bin assembly is placed with products to be detected, and the feeding bin assembly is provided with a feeding carrying assembly on one side; The device platform top is provided with a detection assembly, the detection assembly includes a first detection camera and a second detection camera, the first detection camera is arranged above the feeding conveying assembly, and the second detection camera is arranged above the discharging conveying assembly; The detection assembly is provided with a turnover transfer assembly on one side, the turnover transfer assembly turns the products after the first detection camera detects and puts them on the discharging conveying assembly; The discharging conveying assembly is provided with a discharging bin assembly at one end, the discharging bin assembly is provided with a discharging carrying assembly on one side, and the discharging carrying assembly carries the OK products after detection to the discharging bin assembly; The upper side of the end of the discharging conveying assembly is provided with an NG mechanism, and the NG mechanism carries the NG products with defects for discharging; The feeding conveying assembly and the discharging conveying assembly are both provided with two, the ends of the two feeding conveying assemblies are provided with feeding bin assemblies, the feeding bin assembly includes a feeding clip, the inside of the feeding clip is provided with a plurality of products to be detected, the bottom of the feeding clip is provided with a jacking rod, the bottom of the jacking rod is connected with a feeding jacking module in a matched mode, and the feeding jacking module is used to control the jacking rod to move in a vertical direction; The detection assembly includes a detection support mounted on the top of the device platform, the top of the detection support is provided with detection adjusting seats side by side, one of the detection adjusting seats is connected with a first detection mounting seat on the top in a matched mode, and the other detection adjusting seat is connected with a second detection mounting seat on the top in a matched mode; The first detection mounting seat is provided with two first detection vertical adjusting modules side by side on one side, the first detection camera and the first detection light source are connected with any first detection vertical adjusting module on one side in a matched mode, the first detection light source is located below the first detection camera, and the positions of the two first detection cameras correspond to the positions of the two feeding conveying channels; The turnover transfer assembly includes a turnover transfer horizontal module and two turnover transfer horizontal guide rails connected with the turnover transfer horizontal module in a matched mode, the turnover transfer horizontal guide rails are connected with turnover transfer horizontal sliders above in a matched mode, the turnover transfer horizontal sliders are provided with turnover transfer vertical plates on the top, the turnover transfer vertical plates are provided with turnover transfer vertical modules on one side, the turnover transfer vertical modules are provided with turnover transfer vertical guide rails on the two sides in a symmetrical mode, the turnover transfer vertical modules are movably connected with turnover transfer vertical sliders on one side, the turnover transfer vertical sliders are movably connected with the turnover transfer vertical guide rails on the two sides at the two ends on one side, the two ends of the turnover transfer vertical sliders are provided with rotatable turnover transfer electric claws in a symmetrical mode, and the turnover transfer electric claws are used to grasp the products to be detected on the feeding conveying assembly and turn them by 180 degrees.

2. The apparatus according to claim 1, wherein The upper feeding conveying assembly is two, two upper feeding conveying assemblies are arranged side by side, any upper feeding conveying assembly comprises a conveying support and an upper feeding conveying flow channel mounted on the top of the conveying support, a conveying guide rail is arranged below the upper feeding conveying flow channel, a conveying mechanism is connected with the conveying guide rail in a matched mode, the conveying mechanism is used for driving the to-be-detected product to slide along the upper feeding conveying flow channel, and a side pushing mechanism is arranged on one side of the upper feeding conveying flow channel.

3. The apparatus according to claim 2, wherein The upper feeding conveying assembly comprises a upper feeding conveying support fixedly installed on the top of the equipment platform, a upper feeding conveying horizontal moving module is arranged on the top of the upper feeding conveying support, a upper feeding conveying horizontal sliding table is connected with the upper feeding conveying horizontal moving module in a matched mode, a upper feeding conveying vertical sliding table is connected with one side of the upper feeding conveying horizontal sliding table in a matched mode, and a upper feeding conveying electric claw is connected with one side of the upper feeding conveying vertical sliding table in a matched mode.

4. The apparatus according to claim 1, wherein The detection adjusting seat comprises a first detection horizontal sliding module and a second detection horizontal sliding module arranged perpendicularly, the second detection horizontal sliding module can slide along the length direction of the first detection horizontal sliding module, the first detection mounting seat and the second detection mounting seat are fixedly installed on the second detection horizontal sliding module, two second detection vertical adjusting modules are arranged side by side on one side of the second detection mounting seat, a second detection camera and a second detection light source are connected with one side of the second detection vertical adjusting module in a matched mode, and two second detection cameras correspond to the positions of two lower feeding conveying flow channels.

5. The apparatus according to claim 1, wherein The detection support is provided with an empty tray conveying assembly on the side close to the turnover transfer assembly, the empty tray conveying assembly comprises an empty tray conveying horizontal moving module fixedly installed on the detection support, an empty tray conveying horizontal sliding plate is connected with one side of the empty tray conveying horizontal moving module in a matched mode, an empty tray conveying vertical moving module is arranged on one side of the empty tray conveying horizontal sliding plate, an empty tray conveying vertical sliding plate is connected with one side of the empty tray conveying vertical moving module in a matched mode, a first empty tray conveying electric claw and a second empty tray conveying electric claw are symmetrically arranged at the two ends of the empty tray conveying vertical sliding plate, the first empty tray conveying electric claw and the second empty tray conveying electric claw are used for synchronously grabbing the Pack trays on the two upper feeding conveying flow channels, and the to-be-detected products are placed in the Pack trays.

6. The apparatus according to claim 1, wherein The NG mechanism comprises an NG conveying support and a first NG conveying horizontal module arranged on the top of the NG conveying support, a second NG conveying horizontal module is connected with the top of the first NG conveying horizontal module in a matched mode, a movable NG conveying electric claw is connected with the lower portion of the second NG conveying horizontal module in a matched mode, an NG product edge detection camera is arranged on the lower portion of the NG conveying support, and an ion fan is arranged on one side of the NG conveying support.

7. The apparatus according to claim 6, wherein the light source is a laser light source. The side of the blank conveying assembly and the side close to the NG carrying support are provided with an NG blanking sliding table, the top of the NG blanking sliding table is matched with an NG blanking clamping jaw, the side of the NG blanking sliding table and below the NG blanking clamping jaw is provided with an NG stock bin, the NG stock bin comprises two parallel NG magazines, the NG blanking clamping jaw is used for grabbing NG products and placing the NG products into the two NG magazines alternately, any NG magazine is provided with an NG jacking mechanism below, the NG stock bin is provided with an NG product positioning camera below, and the ion fan is arranged on the side of the NG magazine.

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