Quartz crucible surface polishing equipment

Abstract

This application discloses a quartz crucible surface polishing device, including a polishing table, two limiting rotation mechanisms, a first polishing mechanism, and a second polishing mechanism. A support plate is provided on the polishing table, and a driving component is provided on the support plate. One limiting rotation mechanism is connected to the output end of the driving component, and the other limiting rotation mechanism is mounted on the polishing table via a support base. The two limiting rotation mechanisms are arranged symmetrically vertically. A first slide module is provided on the polishing table, and a slide plate is provided on the slide plate of the first slide module. The first polishing mechanism is mounted on the slide plate and located on one side of the limiting rotation mechanism. A second slide module is provided on the polishing table, and a slide frame is provided on the slide plate of the second slide module. The second polishing mechanism is mounted on the slide frame and located on the opposite side of the first polishing mechanism. Therefore, simultaneous polishing of the inner and outer walls of the crucible can be achieved, requiring only one clamping operation, making it convenient to use. Furthermore, the polishing range completely covers the inner wall, outer wall, and bottom surface of the crucible, significantly improving polishing efficiency.

Description

Technical Field

[0001] This application relates to the technical field of quartz crucibles, and more particularly to a quartz crucible surface polishing device. Background Technology

[0002] In semiconductor and photovoltaic monocrystalline silicon growth processes, the quartz crucible is the core container for holding the molten silicon, and the surface quality of its inner and outer walls directly affects the crystal growth yield. After the quartz crucible is prepared, its inner and outer walls need to be polished. Currently, a robotic arm carrying a polishing head is commonly used for this operation. When polishing the inner wall, a long cantilevered polishing head needs to be inserted into the cavity, while when polishing the outer wall, the fixture needs to be changed and repositioned before the outer curved surface polishing operation can be performed. This polishing method requires repeated positioning and clamping of the crucible, which is time-consuming, and the inner and outer surfaces need to be polished sequentially, resulting in low efficiency. In addition, the limited contact area of ​​the polishing head further restricts the polishing efficiency. Summary of the Invention

[0003] This application aims to at least partially address one of the technical problems in the related art.

[0004] Therefore, one objective of this application is to provide a quartz crucible surface grinding device that can simultaneously grind the inner and outer walls of the crucible, requiring only one clamping and is easy to operate. Furthermore, the grinding range completely covers the inner wall, outer wall, and bottom surface of the crucible, significantly improving grinding efficiency.

[0005] To achieve the above objectives, a first aspect of this application provides a quartz crucible surface polishing device, comprising a polishing table, two limiting rotation mechanisms, a first polishing mechanism, and a second polishing mechanism. The polishing table is provided with a support plate, and a driving component is provided on the support plate. One of the limiting rotation mechanisms is connected to the output end of the driving component, and the other limiting rotation mechanism is mounted on the polishing table via a support base. The two limiting rotation mechanisms are arranged symmetrically vertically. The polishing table is provided with a first slide module, and a sliding plate is provided on the slide of the first slide module. The first polishing mechanism is mounted on the sliding plate and located on one side of the limiting rotation mechanism. The polishing table is provided with a second slide module, and a sliding frame is provided on the slide of the second slide module. The second polishing mechanism is mounted on the sliding frame and located on the opposite side of the first polishing mechanism.

[0006] In addition, the quartz crucible surface polishing equipment proposed in this application may also have the following additional technical features:

[0007] In one embodiment of this application, the limiting rotation mechanism includes a support frame and a plurality of rotating rollers, wherein the plurality of rotating rollers are rotatably disposed within the support frame and are arranged in an arcuate array.

[0008] In one embodiment of this application, the first polishing mechanism includes a tension adjustment component, a first bracket, a second bracket, a plurality of first pressure rollers, and a first polishing belt. The tension adjustment component and the first bracket are both mounted on the sliding plate. One end of the first bracket is provided with a connecting plate, and a support shaft is rotatably connected to the connecting plate. The second bracket is mounted on the support shaft. The plurality of first pressure rollers are rotatably mounted within their respective first and second brackets. The first polishing belt is sleeved on the first pressure rollers and fits against the outer wall of the crucible.

[0009] In one embodiment of this application, the tension adjustment assembly includes a third slide module, a C-shaped plate, a third bracket, and an adjustment wheel. The third slide module is disposed on the slide plate; the C-shaped plate is disposed on the slide of the third slide module; the third bracket is slidably connected to the C-shaped plate, and a first spring is provided between the C-shaped plate and the third bracket; the adjustment wheel is rotatably disposed within the third bracket, and the first grinding belt is sleeved on the adjustment wheel.

[0010] In one embodiment of this application, the first bracket is provided with an electric push rod, the output end of the electric push rod is provided with a push plate, the push plate is provided with a toothed plate, and the toothed plate is meshed with a gear on the support shaft.

[0011] In one embodiment of this application, the second polishing mechanism includes a fourth bracket, a plurality of second pressure rollers, a second polishing belt, and a plurality of support components, wherein the fourth bracket is disposed on the slide; the plurality of second pressure rollers are respectively rotatably disposed within the fourth bracket; the plurality of support components are connected to the fourth bracket, and the support surface formed by the plurality of support components is an arc surface; the second polishing belt is respectively sleeved on the second pressure rollers and the support components.

[0012] In one embodiment of this application, the support assembly includes a second spring, a fifth bracket, and a support wheel, wherein the second spring is disposed on the fourth bracket; the fifth bracket is connected to the second spring; and the support wheel is rotatably disposed on the fifth bracket.

[0013] Compared with the prior art, the present invention has at least the following beneficial effects: two limiting rotation mechanisms can limit the crucible and drive its rotation, which, together with the first and second grinding belts, can simultaneously grind the outer and inner surfaces of the crucible. The grinding belts have a large contact area, which significantly improves efficiency compared with traditional single-point grinding. The grinding area of ​​the crucible changes continuously, effectively avoiding grinding dead corners and ensuring the uniformity of grinding; at the same time, the inner and outer wall processing can be completed in one clamping, making the operation convenient.

[0014] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0015] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the following description of the embodiments taken in conjunction with the accompanying drawings, wherein:

[0016] Figure 1 This is a schematic diagram of the structure of a quartz crucible surface polishing device according to an embodiment of this application;

[0017] Figure 2 For this application Figure 1 Enlarged structural diagram of area A in the middle;

[0018] Figure 3 For this application Figure 1 Enlarged structural diagram of region B in the middle;

[0019] Figure 4 This is a schematic diagram of the limiting rotation mechanism in a quartz crucible surface polishing device according to an embodiment of this application;

[0020] Figure 5 This is a cross-sectional view of a quartz crucible surface polishing apparatus according to an embodiment of this application;

[0021] Figure 6 For this application Figure 5 A magnified structural diagram of region C;

[0022] Figure 7 This is a schematic diagram of the structure of the first grinding mechanism in a quartz crucible surface grinding device according to an embodiment of this application;

[0023] Figure 8 This is a schematic diagram of the structure of the second grinding mechanism in a quartz crucible surface grinding device according to an embodiment of this application.

[0024] As shown in the figure: 1. Grinding table; 2. Limiting rotation mechanism; 3. First grinding mechanism; 4. Second grinding mechanism; 5. Support plate; 6. Driving component; 7. First slide module; 8. Slide plate; 9. Slide carriage; 10. Electric push rod; 11. Push plate; 12. Toothed plate; 13. Gear; 14. Second slide module; 21. Support frame; 22. Rotating roller; 31. Tension adjustment assembly; 32. First bracket; 33. Second bracket; 34. First pressure roller; 35. First grinding belt; 36. Support shaft; 311. Third slide module; 312. C-shaped plate; 313. Third bracket; 314. Adjusting wheel; 315. First spring; 41. Fourth bracket; 42. Second pressure roller; 43. Second grinding belt; 44. Support assembly; 441. Second spring; 442. Fifth bracket; 443. Support wheel. Detailed Implementation

[0025] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this application, and should not be construed as limiting this application.

[0026] The quartz crucible surface polishing equipment of this application embodiment will be described below with reference to the accompanying drawings.

[0027] like Figures 1 to 8 As shown, the quartz crucible surface polishing equipment of this application embodiment may include a polishing table 1, two limiting rotation mechanisms 2, a first polishing mechanism 3, and a second polishing mechanism 4.

[0028] The grinding table 1 is provided with a support plate 5, and the support plate 5 is provided with a driving component 6. One of the limiting rotation mechanisms 2 is connected to the output end of the driving component 6, and the other limiting rotation mechanism 2 is set on the grinding table 1 through a support base. The two limiting rotation mechanisms 2 are arranged symmetrically up and down.

[0029] It should be noted that the grinding table 1 has a groove, the support base is set in the groove, the lower limiting rotation mechanism 2 is set on the support base, and the crucible is located between the two limiting rotation mechanisms 2. The limiting rotation mechanism 2 can limit the crucible and drive the crucible to rotate slowly.

[0030] Furthermore, the driving component 6 can be a pneumatic rod, which can control the upper limiting rotation mechanism 2 to move up or down, thereby adjusting the distance between the two limiting rotation mechanisms 2, and ultimately making the limiting rotation mechanism 2 fit against the outer wall of the crucible.

[0031] The grinding table 1 is provided with a first slide module 7, and a slide plate 8 is provided on the slide of the first slide module 7. The first grinding mechanism 3 is provided on the slide plate 8 and is located on one side of the limiting rotation mechanism 2.

[0032] It should be noted that the sliding direction of the first sliding module 7 is perpendicular to the axis of the crucible. The first sliding module 7 can adjust the distance between the first grinding mechanism 3 and the crucible. The first grinding mechanism 3 is used to grind the outer wall and the outer bottom wall of the crucible.

[0033] Furthermore, in the embodiments of this application, the grinding area of ​​the first grinding mechanism 3 is adjustable, which can grind both the outer wall of the crucible and its outer bottom wall, and can also fit well to the bottom with a certain chamfer, thus making it more widely applicable.

[0034] The grinding table 1 is provided with a second slide module 14, and a slide 9 is provided on the slide of the second slide module 14. The second grinding mechanism 4 is provided on the slide 9 and is located on the opposite side of the first grinding mechanism 3.

[0035] It should be noted that the second polishing mechanism 4 described in this embodiment is used to polish the inner sidewall and inner bottom wall of the crucible. The sliding direction of the second slide module 14 is parallel to the axis of the crucible. The slide 9 is a U-shaped frame. Through the cooperation of the second slide module 14 and the slide 9, the second polishing mechanism 4 can be extended into the interior of the crucible from the opening of the crucible, thereby polishing its inner surface.

[0036] Further, see Figure 1 The slide 9 adopts a laterally telescopic structure, which consists of two L-shaped plates forming a U-shaped plate structure. One L-shaped plate is fixed below the second grinding mechanism 4, and the other L-shaped plate is fixed on the slide of the second slide module 14. The ends of the two L-shaped plates are slidably engaged and can be fixed by bolts, so that the slide 9 can be telescopically extended and retracted, which facilitates the adjustment of the distance between the second grinding mechanism 4 and the inner wall of the crucible.

[0037] Specifically, the relevant technicians place the crucible on the lower limiting rotation mechanism 2 and control the drive component 6 to start. The drive component 6 drives the upper limiting rotation mechanism 2 to move down and fit against the outer wall of the crucible.

[0038] Then, relevant personnel can control the first slide module 7 and the second slide module 14 to start. The first slide module 7 drives the slide plate 8 and the first grinding mechanism 3 to move towards the crucible, so that the first grinding belt 35 fits against the outer wall and the outer bottom wall of the crucible. The second slide module 14 drives the slide 9 and the second grinding mechanism 4 to extend into the interior of the crucible, so that the second grinding belt 43 fits against the inner wall and the inner bottom wall of the crucible. Then, the limiting rotation mechanism 2, the first grinding mechanism 3 and the second grinding mechanism 4 can be started simultaneously. The first grinding mechanism 3 and the second grinding mechanism 4 can respectively drive the first grinding belt 35 and the second grinding belt 43 to move, so as to grind the outer wall and the inner wall of the crucible at the same time. The limiting rotation mechanism 2 can drive the crucible to rotate slowly, so that the inner and outer walls of the crucible are simultaneously ground by the first grinding belt 35 and the second grinding belt 43. During the rotation, the grinding area of ​​the crucible changes continuously. Combined with the large coverage of the grinding belt, the grinding dead corners are effectively avoided, ensuring the uniformity of grinding. In addition, the crucible only needs to be clamped and positioned once to achieve simultaneous grinding of the inner and outer surfaces, which significantly improves grinding efficiency.

[0039] To further clarify the above embodiments, in one embodiment of this application, such as Figure 4As shown, the limiting rotation mechanism 2 includes a support frame 21 and multiple rotating rollers 22, wherein the multiple rotating rollers 22 are rotatably disposed within the support frame 21 and are arranged in an arc-shaped array.

[0040] It should be noted that the support frame 21 is an arc-shaped frame, and the rotating rollers 22 are evenly distributed inside the support frame 21. The rotating rollers 22 are connected to an external drive mechanism. The drive mechanism can drive multiple rotating rollers 22 to rotate synchronously in the same direction. It is understood that the specific structure and principle of the drive mechanism are common knowledge in the field, and will not be described in detail in this application.

[0041] Furthermore, two symmetrically arranged support frames 21 are respectively set on the output end of the drive component 6 and the support base. The drive component 6 can adjust the upper support frame 21 to move up and down to adjust the distance between the two support frames 21. The bottom of the support frame 21 has a hollow structure, which allows the dust generated by grinding to pass through and effectively prevents it from accumulating inside.

[0042] In one embodiment of this application, such as Figure 5 As shown, the first grinding mechanism 3 includes a tension adjustment component 31, a first bracket 32, a second bracket 33, multiple first pressure rollers 34, and a first grinding belt 35. The tension adjustment component 31 and the first bracket 32 ​​are both mounted on the slide plate 8. One end of the first bracket 32 ​​is provided with a connecting plate, and a support shaft 36 is rotatably connected to the connecting plate. The second bracket 33 is mounted on the support shaft 36. The multiple first pressure rollers 34 are respectively rotatably mounted in the corresponding first brackets 32 and second brackets 33. The first grinding belt 35 is sleeved on the first pressure rollers 34 and fits against the outer wall of the crucible.

[0043] It should be noted that the angle between the second support 33 and the first support 32 is adjustable, which can be used to polish straight surfaces and bent surfaces (outer wall and outer bottom wall of the crucible), significantly expanding the polishing range.

[0044] Furthermore, the tension adjustment component 31 ensures that the first grinding belt 35 is in a taut state, preventing slippage and ensuring grinding uniformity. A first pressure roller 34 serves as a drive roller and is connected to an external motor. The motor drives this roller to rotate, thereby moving the first grinding belt 35 to achieve a stable and uniform grinding effect.

[0045] Furthermore, such as Figure 3As shown, the tension adjustment assembly 31 includes a third slide module 311, a chamfered plate 312, a third support 313, and an adjustment wheel 314. The third slide module 311 is mounted on the slide plate 8, the chamfered plate 312 is mounted on the slide of the third slide module 311, the third support 313 is slidably connected to the chamfered plate 312, and a first spring 315 is provided between the chamfered plate 312 and the third support 313. The adjustment wheel 314 is rotatably mounted inside the third support 313, and a first grinding belt 35 is sleeved on the adjustment wheel 314.

[0046] In the embodiments of this application, the C-shaped plate 312 supports the third bracket 313 and the adjusting wheel 314. The third slide module 311 can adjust the position of the wheel 314 to compensate for the shape change of the first grinding belt 35 and ensure that the first grinding belt 35 is in a taut state.

[0047] Specifically, the relevant personnel control the first slide module 7 to start, and the first slide module 7 drives the first grinding mechanism 3 to move closer to the crucible, so that the first grinding belt 35 fits against the outer wall and bottom wall of the crucible.

[0048] In one embodiment of this application, such as Figure 2 and Figure 7 As shown, the first bracket 32 ​​is provided with an electric push rod 10, the output end of the electric push rod 10 is provided with a push plate 11, the push plate 11 is provided with a toothed plate 12, and the toothed plate 12 is meshed with a gear 13 on the support shaft 36.

[0049] Specifically, when the electric push rod 10 is started, it drives the push plate 11 and the toothed plate 12 to move, and uses the meshing relationship between the toothed plate 12 and the gear 13 to drive the support shaft 36 to rotate a certain angle, thereby adjusting the angle between the second bracket 33 and the first bracket 32, and using the tension adjustment component 31 to tension the first grinding belt 35. In the embodiment of this application, the second bracket 33 and the first bracket 32 ​​are perpendicular to each other.

[0050] In one embodiment of this application, such as Figure 5 As shown, the second polishing mechanism 4 includes a fourth bracket 41, multiple second pressure rollers 42, a second polishing belt 43, and multiple support components 44. The fourth bracket 41 is mounted on the slide 9, the multiple second pressure rollers 42 are rotatably mounted inside the fourth bracket 41, the multiple support components 44 are connected to the fourth bracket 41, and the support surface formed by the multiple support components 44 is an arc surface. The second polishing belt 43 is respectively sleeved on the second pressure rollers 42 and the support components 44.

[0051] It should be noted that one of the second pressure rollers 42 is a drive roller and is connected to a motor. The rotation of the drive roller drives the other second pressure rollers 42 to rotate, thereby achieving stable movement of the second grinding belt 43.

[0052] In the embodiments of this application, a plurality of support components 44 are arranged in an arc-shaped array. The support components 44 enable the second polishing belt 43 to fit against the arc-shaped concave surface of the crucible, thereby enabling the arc-shaped concave surface to be polished.

[0053] Furthermore, such as Figure 6 As shown, the support assembly 44 includes a second spring 441, a fifth bracket 442 and a support wheel 443. The second spring 441 is mounted on the fourth bracket 41, the fifth bracket 442 is connected to the second spring 441, and the support wheel 443 is rotatably mounted on the fifth bracket 442.

[0054] In the embodiments of this application, the support wheel 443 enables the second grinding belt 43 to fit against the arc-shaped inner wall of the crucible, and the second spring 441 is in a compressed state at this time, and the second grinding belt 43 is sleeved on the support wheel 443 and the second pressure wheel 42.

[0055] Specifically, after the relevant personnel start the second slide module 14, the second slide module 14 drives the slide 9 and the second grinding mechanism 4 located on the slide 9 to extend into the interior of the crucible, so that the second grinding belt 43 is in contact with the inner side wall, inner bottom wall and arc concave surface of the crucible respectively. By driving one of the second pressure rollers 42 to rotate, the second grinding belt 43 is moved. During the movement of the second grinding belt 43, the inner wall is ground. In conjunction with the slow rotation of the crucible, the inner wall is ground evenly and quickly.

[0056] In summary, the quartz crucible surface polishing equipment of this application embodiment has two limiting rotation mechanisms that can limit the crucible and drive its rotation. Combined with the first and second polishing belts, it can simultaneously polish the outer and inner surfaces of the crucible. The polishing belts have a large contact area, significantly improving efficiency compared to traditional single-point polishing. The polishing area of ​​the crucible continuously changes, effectively avoiding polishing dead corners and ensuring polishing uniformity. Furthermore, the inner and outer wall processing can be completed in a single clamping operation, making it convenient to use.

[0057] In the description of this specification, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0058] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

Claims

1. A quartz crucible surface polishing device, characterized in that, It includes a grinding table, two limit rotation mechanisms, a first grinding mechanism, and a second grinding mechanism, wherein, The grinding table is provided with a support plate, and the support plate is provided with a driving component. One of the limiting rotation mechanisms is connected to the output end of the driving component, and the other limiting rotation mechanism is set on the grinding table through a support base. The two limiting rotation mechanisms are arranged symmetrically up and down. The grinding table is provided with a first slide module, and the slide of the first slide module is provided with a sliding plate; The first grinding mechanism is mounted on the slide plate and is located on one side of the limiting rotation mechanism; The grinding table is provided with a second slide module, and the slide of the second slide module is provided with a slide frame; the second grinding mechanism is disposed on the slide frame, and the second grinding mechanism is located on the opposite side of the first grinding mechanism; The first polishing mechanism includes a tension adjustment component, a first bracket, a second bracket, multiple first pressure rollers, and a first polishing belt. The tension adjustment component and the first bracket are both mounted on the sliding plate. One end of the first bracket has a connecting plate, and a support shaft is rotatably connected to the connecting plate. The second bracket is mounted on the support shaft. The multiple first pressure rollers are rotatably mounted within their respective first and second brackets. The first polishing belt is sleeved on the first pressure rollers and fits against the outer wall of the crucible. The tension adjustment assembly includes a third slide module, a C-shaped plate, a third bracket, and an adjusting wheel. The third slide module is mounted on the slide plate; the C-shaped plate is mounted on the slide of the third slide module; the third bracket is slidably connected to the C-shaped plate, and a first spring is provided between the C-shaped plate and the third bracket; the adjusting wheel is rotatably mounted inside the third bracket, and the first grinding belt is sleeved on the adjusting wheel. The first bracket is equipped with an electric push rod, the output end of the electric push rod is equipped with a push plate, the push plate is equipped with a toothed plate, and the toothed plate is meshed with a gear on the support shaft; The second polishing mechanism includes a fourth bracket, multiple second pressure rollers, a second polishing belt, and multiple support components. The fourth bracket is mounted on the slide. The multiple second pressure rollers are rotatably mounted inside the fourth bracket. The multiple support components are connected to the fourth bracket, and the support surface formed by the multiple support components is an arc surface. The second polishing belt is respectively sleeved on the second pressure rollers and the support components.

2. The quartz crucible surface polishing equipment according to claim 1, characterized in that, The limiting rotation mechanism includes a support frame and multiple rotating rollers, wherein the multiple rotating rollers are rotatably disposed within the support frame and are arranged in an arc array.

3. The quartz crucible surface polishing equipment according to claim 1, characterized in that, The support assembly includes a second spring, a fifth bracket, and a support wheel, wherein, The second spring is mounted on the fourth bracket; The fifth bracket is connected to the second spring; The support wheel is rotatably mounted on the fifth bracket.

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