Ceramic radio frequency connector processing jig and method for etching equipment

Abstract

The invention discloses a ceramic radio-frequency connector processing jig and method for etching equipment, and aims to overcome the defects that the processing precision of a product is reduced and the production efficiency is relatively low due to the fact that a ceramic radio-frequency connector needs to be clamped for multiple times during processing. The jig comprises a jig body installed on an indexing chuck, the jig body comprises a bottom plate and a pressing plate, the pressing plate is arranged in a lifting mode, the bottom plate is connected with a backup plate and an indexing rotating base, and a ceramic radio frequency connector semi-finished product is clamped between the bottom plate and the pressing plate and is located with the backup plate in an abutting mode. According to the ceramic radio frequency connector processing jig for the etching equipment, the processing precision of a ceramic radio frequency connector product is improved, the operation is convenient, and meanwhile, the production efficiency is improved.

Description

Technical Field

[0001] The present invention relates to semiconductor dielectric etching equipment, and more particularly to a ceramic radio frequency connector processing jig and method for the etching equipment. Background Art

[0002] Ceramic RF connectors are essential components for dielectric etching equipment and are widely used by etching equipment developers. Due to the high demand for these products, their high tolerances, and their relatively complex structure, traditional CNC lathe processing requires multiple clamping steps (using a three-jaw chuck), resulting in reduced precision and relatively low production efficiency. Chinese patent application No. 2004200350435 discloses a sample stage for a reactive ion etching machine, primarily consisting of a cathode, bracket, water cooling device, RF signal connector, and shielding cover. However, the details of how the RF signal connector is manufactured are not disclosed. Summary of the Invention

[0003] In order to overcome the above-mentioned shortcomings, the present invention provides a ceramic RF connector processing jig and method for etching equipment, which improves the processing accuracy of ceramic RF connector products, facilitates operation, and improves production efficiency.

[0004] In order to solve the above technical problems, the present invention adopts the following technical solutions: a ceramic RF connector processing jig for etching equipment, comprising a jig body mounted on a dividing chuck, the jig body comprising a base plate and a pressure plate, the pressure plate being arranged to be raised and lowered, the base plate being connected to a back plate and a dividing swivel seat, the ceramic RF connector semi-finished product being clamped between the base plate and the pressure plate, and the ceramic RF connector semi-finished product being positioned against the back plate.

[0005] The ceramic RF connector semi-finished product has a T-shaped structure, and the middle part of the ceramic RF connector semi-finished product has a square block structure to form a clamping part. The clamping part of the ceramic RF connector semi-finished product is clamped between the base plate and the pressure plate, and the ceramic RF connector semi-finished product is clamped by raising and lowering the pressure plate. During the clamping process, the position of the ceramic RF connector semi-finished product is adjusted, and the indexing swivel is rotated to ensure that each end of the ceramic RF connector semi-finished product is coaxial with the indexing chuck. The indexing chuck is clamped to the machine tool, and then the ceramic RF connector semi-finished product is processed. After one end is processed, the indexing swivel is rotated to process the other end until all ends are processed. The processing of the ceramic RF connector is achieved through one-time clamping, which avoids error accumulation, ensures processing accuracy, and helps improve work efficiency.

[0006] The ceramic RF connector processing jig for etching equipment of the present application improves the processing accuracy of ceramic RF connector products, facilitates operation, and improves production efficiency.

[0007] Preferably, the pressure plate is connected to the guide rod, a laterally extending connecting portion is provided on the upper portion of the support plate, the guide rod and the connecting portion are movably plug-in connected, a return spring is installed between the connecting portion and the guide rod, the connecting portion is connected to a push screw, the push screw is pressed against the pressure plate and can push the pressure plate to move.

[0008] Under the action of the return spring, the pressure plate presses against the connection part and is in the highest position. When the pressure plate needs to be clamped, the push screw is turned, and the push screw presses against the pressure plate and pushes the pressure plate downward, thereby clamping the ceramic RF connector semi-finished product.

[0009] Preferably, a mounting cavity is provided on the indexing chuck, the fixture body is provided in the mounting cavity, and the front portion of the mounting cavity is open.

[0010] The jig body is set in the installation cavity, and the ceramic RF connector semi-finished product is clamped on the jig body, which plays a protective role during the processing.

[0011] Preferably, the indexing rotary seat includes a connecting seat and a rotating column, the rotating column is rotatably mounted on the indexing chuck, the connecting seat is tightly connected to the rotating seat, and the base plate is tightly connected to the connecting seat.

[0012] The rotation of the rotating column realizes the rotation of the indexing swivel seat, thereby adjusting the posture of the ceramic RF connector semi-finished product, which facilitates the processing of multiple end positions of the ceramic RF connector semi-finished product.

[0013] Preferably, a mounting hole is provided on the indexing chuck, the rotating column is rotatably connected to the mounting hole, the end of the rotating column is connected to a limit head, the limit head is limited at one end of the mounting hole, and the connecting seat is limited at the other end of the mounting hole.

[0014] The rotating column is rotatably mounted in the mounting hole on the indexing chuck, and the limit head and the connecting seat realize the axial limitation of the rotating column, thereby ensuring the smooth operation of the rotating column.

[0015] Preferably, the edge of the bottom plate is turned down to form a protective flange, and the protective flange covers the upper part of the indexing swivel.

[0016] The setting of the protective flange facilitates the connection between the base plate and the indexing swivel.

[0017] Preferably, the support plate is connected to the side adjustment plate that moves in the X direction, and a positioning bar that moves in the Y direction is provided on the side adjustment plate. The side adjustment plate and the positioning bar are respectively positioned against two side surfaces of the semi-finished ceramic RF connector.

[0018] During the clamping process of the semi-finished ceramic RF connector, the clamping position needs to be adjusted. The side adjustment plate can move in the X direction to adjust the X position of the semi-finished ceramic RF connector. The positioning bar on the side adjustment plate can move in the Y direction to adjust the Y position of the semi-finished ceramic RF connector.

[0019] Preferably, a lower adjustment plate with a lifting arrangement is installed on the bottom plate, and the semi-finished ceramic RF connector is clamped between the pressing plate and the lower adjustment plate.

[0020] The lower adjustment plate clamps the ceramic RF connector semi-finished product, and the Z-direction position of the ceramic RF connector semi-finished product is adjusted by lifting and lowering the lower adjustment plate.

[0021] Preferably, a centering mechanism is installed on the dividing chuck, and the centering mechanism includes a centering ring and an adjusting ring. Several radially movable centering blocks are evenly distributed circumferentially connected to the centering ring. The adjusting ring is rotatably connected to the centering ring. A push bar corresponding to the centering block is provided on the adjusting ring. The edge of the push bar is gradually arranged close to the center of the circle along the circumferential direction. The edge of the push bar abuts against the centering block and pushes the centering block to move radially to clamp and center the ceramic RF connector semi-finished product.

[0022] During the clamping process, a centering mechanism centers the end of the semi-finished ceramic RF connector, ensuring it is concentric with the indexing chuck. During centering, the adjusting ring is rotated until the edge of the push bar on the adjusting ring abuts the centering block, pushing the block radially to clamp and center the semi-finished ceramic RF connector. The clamping and positioning of the semi-finished ceramic RF connector are then achieved using the pressure plate and base plate.

[0023] A method for processing a ceramic RF connector for etching equipment comprises the following steps: utilizing a ceramic RF connector processing jig for etching equipment, clamping a T-shaped ceramic RF connector semi-finished product between a base plate and a pressure plate, rotating a dividing swivel, and adjusting the position of the ceramic RF connector semi-finished product so that each end of the ceramic RF connector semi-finished product is coaxial with the dividing chuck; then, clamping the dividing chuck onto a machine tool to process the ceramic RF connector semi-finished product, and rotating the dividing swivel to achieve processing of each end of the ceramic RF connector semi-finished product.

[0024] The semi-finished ceramic RF connector is clamped by raising and lowering the pressure plate. During the clamping process, the position of the semi-finished ceramic RF connector is adjusted, and the indexing swivel is rotated to ensure that each end of the semi-finished ceramic RF connector is coaxial with the indexing chuck. The indexing chuck is clamped to the machine tool, and then the semi-finished ceramic RF connector is processed. After processing one end, the indexing swivel is rotated to process the other end until all ends are processed. Processing the ceramic RF connector in a single clamping operation avoids error accumulation, ensures processing accuracy, and improves work efficiency.

[0025] Compared with the prior art, the beneficial effects of the present invention are as follows: (1) the ceramic RF connector processing jig for etching equipment of the present application improves the processing accuracy of ceramic RF connector products, is easy to operate, and improves production efficiency; (2) during the clamping process of the ceramic RF connector semi-finished product, the side adjustment plate can move in the X direction, thereby adjusting the X-direction position of the ceramic RF connector semi-finished product; the positioning bar on the side adjustment plate can move in the Y direction, thereby adjusting the Y-direction position of the ceramic RF connector semi-finished product; the lifting and lowering movement of the lower adjustment plate adjusts the Z-direction position of the ceramic RF connector semi-finished product, ensuring that each end of the ceramic RF connector semi-finished product can be coaxial with the dividing chuck to ensure processing accuracy; at the same time, the jig body is suitable for processing ceramic RF connectors of different sizes and specifications; (3) during the clamping process, the end of the ceramic RF connector semi-finished product is centered by the centering mechanism, and then clamped and positioned to ensure the accuracy of the clamping of the ceramic RF connector semi-finished product. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a structural schematic diagram of the present invention.

[0027] Figure 2 It is a structural diagram of the fixture body of the present invention.

[0028] Figure 3 This is a cross-sectional view of a jig body according to Example 1 of the present invention.

[0029] Figure 4 It is an exploded view of the present invention.

[0030] Figure 5 This is a cross-sectional view of a jig body according to Example 2 of the present invention.

[0031] Figure 6 It is a structural diagram of the centering mechanism of Example 3 of the present invention.

[0032] In the figure: 1. Indexing chuck, 2. Fixture body, 3. Mounting cavity, 4. Raised ring, 5. Base plate, 6. Pressure plate, 7. Back plate, 8. Indexing swivel seat, 9. Semi-finished ceramic RF connector, 10. Guide rod, 11. Connecting part, 12. Lower screw, 13. Upper screw, 14. Stop washer, 15. Return spring, 16. Push screw, 17. Raised rib, 18. Connecting seat, 19. Rotating column, 20. Expanding slot, 21. Anti-rotation protrusion, 22. Positioning protrusion, 23. Insert column, 24. Mounting hole, 25. Limiting head, 26. Protective flange, 27. Connecting block , 28, pad, 29, side adjustment plate, 30, positioning bar, 31, guide cross bar, 32, transverse screw, 33, transverse screw sleeve, 34, operating handle, 35, guide longitudinal rod, 36, longitudinal screw, 37, connecting convex strip, 38, lower adjustment plate, 39, vertical rod, 40, vertical screw, 41, vertical screw sleeve, 42, bevel gear ring, 43, bevel gear, 44, centering ring, 45, adjusting ring, 46, centering block, 47, tension spring, 48, mounting ring, 49, slide rail, 50, slide groove, 51, centering head, 52, abutment, 53, push bar. DETAILED DESCRIPTION

[0033] The technical solution of the present invention is further described in detail below through specific embodiments and in conjunction with the accompanying drawings: Example 1: A ceramic RF connector processing jig for etching equipment (see Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 ), including a fixture body 2 installed on a dividing chuck 1, a mounting cavity 3 is provided on the dividing chuck 1, the fixture body 2 is provided in the mounting cavity 3, the lower part of the fixture body 2 is connected to the dividing chuck 1, the upper part of the fixture body 2 is suspended, the dividing chuck 1 is a circular structure, a convex ring 4 is provided at the rear end of the dividing chuck 1, the front part of the mounting cavity 3 is open, and openings are also provided on the left and right sides of the dividing chuck 1.

[0034] The fixture body 2 includes a base plate 5 and a pressure plate 6. The pressure plate 6 is set to rise and fall. The pressure plate 6 is placed above the base plate 5. The base plate 5 is connected to the support plate 7 and the indexing seat 8. The support plate 7 is placed on the rear side of the base plate 5. The indexing seat 8 is set below the base plate 5. The ceramic RF connector semi-finished product 9 is clamped between the base plate 5 and the pressure plate 6. The ceramic RF connector semi-finished product 9 is positioned against the support plate 7.

[0035] The pressure plate 6 is connected to the guide rod 10, and a laterally extending connecting portion 11 is provided on the upper portion of the support plate 7. The guide rod 10 and the connecting portion 11 are movably plug-in connected. The guide rod 10 is a hollow tubular structure. A lower screw 12 is connected between the pressure plate 6 and the lower end of the guide rod 10. An upper screw 13 is connected to the upper end of the guide rod 10. A stop washer 14 is installed between the upper screw 13 and the guide rod 10. A return spring 15 is installed between the connecting portion 11 and the guide rod 10. The return spring 15 is sleeved on the guide rod 10 and abuts between the connecting portion 11 and the stop washer 14. The connecting portion 11 is connected to a push screw 16, which presses on the pressure plate 6 and can push the pressure plate 6 to move. Four push screws 16 are evenly distributed along the circumference of the guide rod 10. The lower end of the push screw 16 is a hemispherical structure, and the upper end of the push screw 16 is provided with a rotary handle, and the outer wall of the rotary handle is provided with anti-slip grooves. Under the action of the return spring 15, the pressure plate 6 is pressed against the connecting portion 11 and is in the highest position. When the pressure plate 6 needs to be clamped, the push screw 16 is turned, and the push screw 16 presses against the pressure plate 6 and pushes the pressure plate 6 downward, thereby clamping the ceramic RF connector semi-finished product 9.

[0036] Two convex ribs 17 are provided on the lower surface of the connecting portion 11 , and the two convex ribs 17 are respectively provided on the left and right sides of the pressing plate 6 , thereby limiting the left and right sides of the pressing plate 6 and preventing the pressing plate 6 from rotating.

[0037] The indexing swivel base 8 includes a connecting base 18 and a rotating column 19. The rotating column 19 is rotatably mounted on the indexing chuck 1. The connecting base 18 is tightly connected to the rotating base, and the base plate 5 is tightly connected to the connecting base 18. The rotating column 19 has a hollow tubular structure. An expansion slot 20 is provided at the upper end of the rotating column 19. Two opposing anti-rotation protrusions 21 are provided on the side walls of the expansion slot 20. A positioning protrusion 22 is provided on the lower surface of the connecting base 18. A plug 23 is provided on the positioning protrusion 22. The plug 23 is inserted into the upper portion of the rotating column 19. The positioning protrusion 22 is inserted and positioned between the two anti-rotation protrusions 21, thereby preventing the connecting base 18 and the rotating column 19 from rotating relative to each other.

[0038] A mounting hole 24 is provided on the indexing chuck 1, and the rotating column 19 is rotatably connected to the mounting hole 24. A limiting head 25 is connected to the end of the rotating column 19, and the limiting head 25 is limited at one end of the mounting hole 24, and the connecting seat 18 is limited at the other end of the mounting hole 24. The limiting head 25 is connected to the rotating column 19 by a fastening screw, and the fastening screw is fastened to the plug column 23 on the connecting seat 18, thereby realizing the connection between the connecting seat 18, the rotating column 19, and the limiting head 25. The rotating column 19 is rotatably installed in the mounting hole 24 on the indexing chuck 1, and the limiting head 25 and the connecting seat 18 realize the axial limitation of the rotating column 19, ensuring the smooth operation of the rotating column 19. The rotation of the rotating column 19 realizes the rotation of the indexing turntable 8, thereby adjusting the posture of the ceramic RF connector semi-finished product 9, and facilitating the processing of multiple end positions of the ceramic RF connector semi-finished product 9. The rotating column 19 is driven by the cooperation of a pneumatic cylinder, a hydraulic cylinder, an electric cylinder or a worm gear, and its driving structure is a prior art and will not be described in detail in this application.

[0039] The edge of the base plate 5 is folded downward to form a protective flange 26, which covers the upper portion of the indexing swivel base 8. A connecting block 27 is provided on the upper portion of the connecting base 18, with the protective flange 26 covering the edge of the connecting block 27. A spacer 28 is installed between the base plate 5 and the connecting block 27. The protective flange 26 and the connecting block 27 are connected by transversely arranged locking screws.

[0040] A method for processing a ceramic RF connector for etching equipment comprises: utilizing a ceramic RF connector processing jig for etching equipment, clamping a T-shaped ceramic RF connector semi-finished product 9 between a base plate 5 and a pressure plate 6, clamping a middle portion of the ceramic RF connector semi-finished product 9 between the base plate 5 and the pressure plate 6, rotating a dividing swivel 8, and causing a jig body 2 to correct and position the ceramic RF connector semi-finished product 9 at positions of 90°, 180°, and 270°, respectively; adjusting the position of the ceramic RF connector semi-finished product 9 in three directions so that each end of the ceramic RF connector semi-finished product 9 is coaxial with a dividing chuck 1; then, clamping the dividing chuck 1 onto a machine tool to process the ceramic RF connector semi-finished product 9, and rotating the dividing swivel 8 to process each end of the ceramic RF connector semi-finished product 9.

[0041] The ceramic RF connector semi-finished product 9 is clamped by raising and lowering the pressure plate 6. During the clamping process, the position of the ceramic RF connector semi-finished product 9 is adjusted, and the indexing swivel 8 is rotated to ensure that each end of the ceramic RF connector semi-finished product 9 is coaxial with the indexing chuck 1. The indexing chuck 1 is clamped to the machine tool, and then the ceramic RF connector semi-finished product 9 is processed. After one end is processed, the indexing swivel 8 is rotated to process the other end. Each end of the ceramic RF connector semi-finished product 9 is processed at 90°, 180°, and 270° positions until all ends are processed. The processing of the ceramic RF connector is achieved by clamping it once, which avoids error accumulation, ensures processing accuracy, and helps improve work efficiency.

[0042] Example 2: A ceramic RF connector processing jig for etching equipment (see Figure 1 、 Figure 5 ), including a fixture body 2 installed on a dividing chuck 1, a mounting cavity 3 is provided on the dividing chuck 1, the fixture body 2 is provided in the mounting cavity 3, the lower part of the fixture body 2 is connected to the dividing chuck 1, the upper part of the fixture body 2 is suspended, the dividing chuck 1 is a circular structure, a convex ring 4 is provided at the rear end of the dividing chuck 1, the front part of the mounting cavity 3 is open, and openings are also provided on the left and right sides of the dividing chuck 1.

[0043] The fixture body 2 includes a base plate 5 and a pressure plate 6. The pressure plate 6 is set to rise and fall. The pressure plate 6 is placed above the base plate 5. The base plate 5 is connected to the support plate 7 and the indexing seat 8. The support plate 7 is placed on the rear side of the base plate 5. The indexing seat 8 is set below the base plate 5. The ceramic RF connector semi-finished product 9 is clamped between the base plate 5 and the pressure plate 6. The ceramic RF connector semi-finished product 9 is positioned against the support plate 7.

[0044] The pressure plate 6 is connected to the guide rod 10, and a laterally extending connecting portion 11 is provided on the upper portion of the support plate 7. The guide rod 10 and the connecting portion 11 are movably plug-in connected. The guide rod 10 is a hollow tubular structure. A lower screw 12 is connected between the pressure plate 6 and the lower end of the guide rod 10. An upper screw 13 is connected to the upper end of the guide rod 10. A stop washer 14 is installed between the upper screw 13 and the guide rod 10. A return spring 15 is installed between the connecting portion 11 and the guide rod 10. The return spring 15 is sleeved on the guide rod 10 and abuts between the connecting portion 11 and the stop washer 14. The connecting portion 11 is connected to a push screw 16, which presses on the pressure plate 6 and can push the pressure plate 6 to move. Four push screws 16 are evenly distributed along the circumference of the guide rod 10. The lower end of the push screw 16 is a hemispherical structure, and the upper end of the push screw 16 is provided with a rotary handle, and the outer wall of the rotary handle is provided with anti-slip grooves. Under the action of the return spring 15, the pressure plate 6 is pressed against the connecting portion 11 and is in the highest position. When the pressure plate 6 needs to be clamped, the push screw 16 is turned, and the push screw 16 presses against the pressure plate 6 and pushes the pressure plate 6 downward, thereby clamping the ceramic RF connector semi-finished product 9.

[0045] Two convex ribs 17 are provided on the lower surface of the connecting portion 11 , and the two convex ribs 17 are respectively provided on the left and right sides of the pressing plate 6 , thereby limiting the left and right sides of the pressing plate 6 and preventing the pressing plate 6 from rotating.

[0046] The indexing swivel base 8 includes a connecting base 18 and a rotating column 19. The rotating column 19 is rotatably mounted on the indexing chuck 1. The connecting base 18 is tightly connected to the rotating base, and the base plate 5 is tightly connected to the connecting base 18. The rotating column 19 has a hollow tubular structure. An expansion slot 20 is provided at the upper end of the rotating column 19. Two opposing anti-rotation protrusions 21 are provided on the side walls of the expansion slot 20. A positioning protrusion 22 is provided on the lower surface of the connecting base 18. A plug 23 is provided on the positioning protrusion 22. The plug 23 is inserted into the upper portion of the rotating column 19. The positioning protrusion 22 is inserted and positioned between the two anti-rotation protrusions 21, thereby preventing the connecting base 18 and the rotating column 19 from rotating relative to each other.

[0047] A mounting hole 24 is provided on the indexing chuck 1, and the rotating column 19 is rotatably connected to the mounting hole 24. A limiting head 25 is connected to the end of the rotating column 19, and the limiting head 25 is limited at one end of the mounting hole 24, and the connecting seat 18 is limited at the other end of the mounting hole 24. The limiting head 25 is connected to the rotating column 19 by a fastening screw, and the fastening screw is fastened to the plug column 23 on the connecting seat 18, thereby realizing the connection between the connecting seat 18, the rotating column 19, and the limiting head 25. The rotating column 19 is rotatably installed in the mounting hole 24 on the indexing chuck 1, and the limiting head 25 and the connecting seat 18 realize the axial limitation of the rotating column 19, ensuring the smooth operation of the rotating column 19. The rotation of the rotating column 19 realizes the rotation of the indexing turntable 8, thereby adjusting the posture of the ceramic RF connector semi-finished product 9, and facilitating the processing of multiple end positions of the ceramic RF connector semi-finished product 9. The rotating column 19 is driven by the cooperation of a pneumatic cylinder, a hydraulic cylinder, an electric cylinder or a worm gear, and its driving structure is a prior art and will not be described in detail in this application.

[0048] The edge of the base plate 5 is folded downward to form a protective flange 26, which covers the upper portion of the indexing swivel base 8. A connecting block 27 is provided on the upper portion of the connecting base 18, with the protective flange 26 covering the edge of the connecting block 27. A spacer 28 is installed between the base plate 5 and the connecting block 27. The protective flange 26 and the connecting block 27 are connected by transversely arranged locking screws.

[0049] The support plate 7 is connected to the side adjustment plate 29 for movement in the X direction. The side adjustment plate 29 is provided with a positioning bar 30 for movement in the Y direction. The side adjustment plate 29 and the positioning bar 30 are respectively aligned with the two side surfaces of the ceramic RF connector semi-finished product 9 for positioning. The side adjustment plate 29 is provided with a guide crossbar 31 and a transverse screw 32. Both the guide crossbar 31 and the transverse screw 32 are plug-connected to the support plate 7. A transverse screw sleeve 33 is mounted on the support plate 7 and is rotationally connected to the transverse screw 32. The rotation of the transverse screw sleeve 33 drives the transverse screw 32 to move, thereby achieving X-direction movement of the side adjustment plate 29. The transverse screw sleeve 33 is connected to an operating handle 34 via a plurality of circumferentially arranged ribs. A guide longitudinal rod 35 and a longitudinal screw 36 are provided on the positioning bar 30, and a connecting ridge 37 is provided on the side adjustment plate 29. The guide longitudinal rod 35 and the connecting ridge 37 are movably plug-in connected, and the longitudinal screw 36 is threadedly connected to the connecting ridge 37. The end of the longitudinal screw 36 is pressed against the positioning bar 30, and a positioning spring is installed on the longitudinal screw 36. The positioning spring abuts between the positioning ridge and the connecting ridge 37. The longitudinal screw 36 is rotated to realize the Y-direction movement of the positioning bar 30.

[0050] A lower adjustment plate 38 is installed on the base plate 5, and the ceramic RF connector semi-finished product 9 is clamped between the pressure plate 6 and the lower adjustment plate 38. A vertical rod 39 and a vertical screw 40 are provided on the lower adjustment portion. The vertical rod 39 and the vertical screw 40 are both movably connected to the base plate 5. A vertical screw sleeve 41 is installed on the base plate 5. The vertical screw sleeve 41 is threadedly connected to the vertical screw 40. The vertical screw sleeve 41 rotates to drive the vertical screw 40 to move up and down, thereby realizing the Z-direction movement of the lower adjustment plate 38. A bevel gear ring 42 is provided on the outer wall of the vertical screw sleeve 41. A bevel gear 43 is installed on the base plate 5. The bevel gear 43 meshes with the bevel gear ring 42 for transmission. A rotating rod is provided on the bevel gear 43, and the rotating rod extends to the outside of the base plate 5 for easy operation.

[0051] When processing ceramic RF connectors of different sizes, it is necessary to adjust the clamping position. The side adjustment plate 29 can move in the X direction, thereby adjusting the X-direction position of the ceramic RF connector semi-finished product 9. The positioning bar 30 on the side adjustment plate 29 can move in the Y direction, thereby adjusting the Y-direction position of the ceramic RF connector semi-finished product 9. The Z-direction position of the ceramic RF connector semi-finished product 9 is adjusted by lifting and lowering the lower adjustment plate 38. This structural setting facilitates the clamping processing of ceramic RF connectors of different sizes, ensures that each end of the ceramic RF connector can be coaxial with the dividing chuck 1, and ensures processing accuracy.

[0052] A method for processing a ceramic RF connector for an etching device comprises: utilizing a ceramic RF connector processing jig for the etching device; clamping a T-shaped ceramic RF connector semi-finished product 9 between a base plate 5 and a pressure plate 6; clamping a middle portion of the ceramic RF connector semi-finished product 9 between the base plate 5 and the pressure plate 6; rotating a dividing swivel 8 to correct and position the ceramic RF connector semi-finished product 9 at positions of 90°, 180°, and 270°, respectively; and simultaneously moving a side adjustment plate 29 in the X direction, a positioning bar 30 in the Y direction, and a lower adjustment plate 38 in the Z direction to ensure that the position of the ceramic RF connector semi-finished product 9 is adjusted in three directions so that each end of the ceramic RF connector semi-finished product 9 is coaxial with a dividing chuck 1; then, clamping the dividing chuck 1 on a machine tool to process the ceramic RF connector semi-finished product 9; and rotating the dividing swivel 8 to process each end of the ceramic RF connector semi-finished product 9.

[0053] The ceramic RF connector semi-finished product 9 is clamped by raising and lowering the pressure plate 6. During the clamping process, the position of the ceramic RF connector semi-finished product 9 is adjusted, and the indexing swivel 8 is rotated to ensure that each end of the ceramic RF connector semi-finished product 9 is coaxial with the indexing chuck 1. The indexing chuck 1 is clamped to the machine tool, and then the ceramic RF connector semi-finished product 9 is processed. After one end is processed, the indexing swivel 8 is rotated to process the other end. Each end of the ceramic RF connector semi-finished product 9 is processed at 90°, 180°, and 270° positions until all ends are processed. The processing of the ceramic RF connector is achieved by clamping it once, which avoids error accumulation, ensures processing accuracy, and helps improve work efficiency.

[0054] Example 3: A ceramic RF connector processing jig for etching equipment (see Figure 1 、 Figure 5 、 Figure 6 ), including a fixture body 2 installed on a dividing chuck 1, a mounting cavity 3 is provided on the dividing chuck 1, the fixture body 2 is provided in the mounting cavity 3, the lower part of the fixture body 2 is connected to the dividing chuck 1, the upper part of the fixture body 2 is suspended, the dividing chuck 1 is a circular structure, a convex ring 4 is provided at the rear end of the dividing chuck 1, the front part of the mounting cavity 3 is open, and openings are also provided on the left and right sides of the dividing chuck 1.

[0055] The fixture body 2 includes a base plate 5 and a pressure plate 6. The pressure plate 6 is set to rise and fall. The pressure plate 6 is placed above the base plate 5. The base plate 5 is connected to the support plate 7 and the indexing seat 8. The support plate 7 is placed on the rear side of the base plate 5. The indexing seat 8 is set below the base plate 5. The ceramic RF connector semi-finished product 9 is clamped between the base plate 5 and the pressure plate 6. The ceramic RF connector semi-finished product 9 is positioned against the support plate 7.

[0056] The pressure plate 6 is connected to the guide rod 10, and a laterally extending connecting portion 11 is provided on the upper portion of the support plate 7. The guide rod 10 and the connecting portion 11 are movably plug-in connected. The guide rod 10 is a hollow tubular structure. A lower screw 12 is connected between the pressure plate 6 and the lower end of the guide rod 10. An upper screw 13 is connected to the upper end of the guide rod 10. A stop washer 14 is installed between the upper screw 13 and the guide rod 10. A return spring 15 is installed between the connecting portion 11 and the guide rod 10. The return spring 15 is sleeved on the guide rod 10 and abuts between the connecting portion 11 and the stop washer 14. The connecting portion 11 is connected to a push screw 16, which presses on the pressure plate 6 and can push the pressure plate 6 to move. Four push screws 16 are evenly distributed along the circumference of the guide rod 10. The lower end of the push screw 16 is a hemispherical structure, and the upper end of the push screw 16 is provided with a rotary handle, and the outer wall of the rotary handle is provided with anti-slip grooves. Under the action of the return spring 15, the pressure plate 6 is pressed against the connecting portion 11 and is in the highest position. When the pressure plate 6 needs to be clamped, the push screw 16 is turned, and the push screw 16 presses against the pressure plate 6 and pushes the pressure plate 6 downward, thereby clamping the ceramic RF connector semi-finished product 9.

[0057] Two convex ribs 17 are provided on the lower surface of the connecting portion 11 , and the two convex ribs 17 are respectively provided on the left and right sides of the pressing plate 6 , thereby limiting the left and right sides of the pressing plate 6 and preventing the pressing plate 6 from rotating.

[0058] The indexing swivel base 8 includes a connecting base 18 and a rotating column 19. The rotating column 19 is rotatably mounted on the indexing chuck 1. The connecting base 18 is tightly connected to the rotating base, and the base plate 5 is tightly connected to the connecting base 18. The rotating column 19 has a hollow tubular structure. An expansion slot 20 is provided at the upper end of the rotating column 19. Two opposing anti-rotation protrusions 21 are provided on the side walls of the expansion slot 20. A positioning protrusion 22 is provided on the lower surface of the connecting base 18. A plug 23 is provided on the positioning protrusion 22. The plug 23 is inserted into the upper portion of the rotating column 19. The positioning protrusion 22 is inserted and positioned between the two anti-rotation protrusions 21, thereby preventing the connecting base 18 and the rotating column 19 from rotating relative to each other.

[0059] A mounting hole 24 is provided on the indexing chuck 1, and the rotating column 19 is rotatably connected to the mounting hole 24. A limiting head 25 is connected to the end of the rotating column 19, and the limiting head 25 is limited at one end of the mounting hole 24, and the connecting seat 18 is limited at the other end of the mounting hole 24. The limiting head 25 is connected to the rotating column 19 by a fastening screw, and the fastening screw is fastened to the plug column 23 on the connecting seat 18, thereby realizing the connection between the connecting seat 18, the rotating column 19, and the limiting head 25. The rotating column 19 is rotatably installed in the mounting hole 24 on the indexing chuck 1, and the limiting head 25 and the connecting seat 18 realize the axial limitation of the rotating column 19, ensuring the smooth operation of the rotating column 19. The rotation of the rotating column 19 realizes the rotation of the indexing turntable 8, thereby adjusting the posture of the ceramic RF connector semi-finished product 9, and facilitating the processing of multiple end positions of the ceramic RF connector semi-finished product 9. The rotating column 19 is driven by the cooperation of a pneumatic cylinder, a hydraulic cylinder, an electric cylinder or a worm gear, and its driving structure is a prior art and will not be described in detail in this application.

[0060] The edge of the base plate 5 is folded downward to form a protective flange 26, which covers the upper portion of the indexing swivel base 8. A connecting block 27 is provided on the upper portion of the connecting base 18, with the protective flange 26 covering the edge of the connecting block 27. A spacer 28 is installed between the base plate 5 and the connecting block 27. The protective flange 26 and the connecting block 27 are connected by transversely arranged locking screws.

[0061] The support plate 7 is connected to the side adjustment plate 29 for movement in the X direction. The side adjustment plate 29 is provided with a positioning bar 30 for movement in the Y direction. The side adjustment plate 29 and the positioning bar 30 are respectively aligned with the two side surfaces of the ceramic RF connector semi-finished product 9 for positioning. The side adjustment plate 29 is provided with a guide crossbar 31 and a transverse screw 32. Both the guide crossbar 31 and the transverse screw 32 are plug-connected to the support plate 7. A transverse screw sleeve 33 is mounted on the support plate 7 and is rotationally connected to the transverse screw 32. The rotation of the transverse screw sleeve 33 drives the transverse screw 32 to move, thereby achieving X-direction movement of the side adjustment plate 29. The transverse screw sleeve 33 is connected to an operating handle 34 via a plurality of circumferentially arranged ribs. A guide longitudinal rod 35 and a longitudinal screw 36 are provided on the positioning bar 30, and a connecting ridge 37 is provided on the side adjustment plate 29. The guide longitudinal rod 35 and the connecting ridge 37 are movably plug-in connected, and the longitudinal screw 36 is threadedly connected to the connecting ridge 37. The end of the longitudinal screw 36 is pressed against the positioning bar 30, and a positioning spring is installed on the longitudinal screw 36. The positioning spring abuts between the positioning ridge and the connecting ridge 37. The longitudinal screw 36 is rotated to realize the Y-direction movement of the positioning bar 30.

[0062] A lower adjustment plate 38 is installed on the base plate 5, and the ceramic RF connector semi-finished product 9 is clamped between the pressure plate 6 and the lower adjustment plate 38. A vertical rod 39 and a vertical screw 40 are provided on the lower adjustment portion. The vertical rod 39 and the vertical screw 40 are both movably connected to the base plate 5. A vertical screw sleeve 41 is installed on the base plate 5. The vertical screw sleeve 41 is threadedly connected to the vertical screw 40. The vertical screw sleeve 41 rotates to drive the vertical screw 40 to move up and down, thereby realizing the Z-direction movement of the lower adjustment plate 38. A bevel gear ring 42 is provided on the outer wall of the vertical screw sleeve 41. A bevel gear 43 is installed on the base plate 5. The bevel gear 43 meshes with the bevel gear ring 42 for transmission. A rotating rod is provided on the bevel gear 43, and the rotating rod extends to the outside of the base plate 5 for easy operation.

[0063] The indexing chuck 1 is provided with a centering mechanism, which includes a centering ring 44 and an adjusting ring 45. The centering ring 44 is mounted on the end face of the indexing chuck 1 and is coaxial with the indexing chuck 1. Three radially movable centering blocks 46 are evenly distributed circumferentially connected to the centering ring 44. The centering blocks 46 are connected to a tensioning spring 47. The adjusting ring 45 is rotatably connected to the centering ring 44. A mounting ring 48 is provided on the centering ring 44 and the adjusting ring 45 is threadedly connected to the mounting ring 48. Slide rails 49 are provided on the inner wall of the mounting ring 48 corresponding to the centering blocks 46. A slide groove 50 is provided on the slide rail 49. The centering block 46 is slidably mounted in the slide groove 50. The tensioning spring 47 is connected between the slide groove 50 and the centering block 46. The tensioning spring 47 is placed in the slide groove 50. A centering head 51 is provided at the inner end of the centering block 46, and an abutment 52 is provided at the outer end of the centering block 46. The ends of the centering head 51 and the abutment 52 are both arc-shaped. A pushing bar 53 corresponding to the centering block 46 is provided on the adjusting ring 45. The edge of the pushing bar 53 is gradually arranged close to the center of the circle along the circumferential direction. The edge of the pushing bar 53 abuts against the abutment head 52 of the centering block 46 and pushes the centering block 46 to move radially so that the centering head 51 clamps and centers the ceramic RF connector semi-finished product 9.

[0064] When processing ceramic RF connectors of different sizes, it is necessary to adjust the clamping position. The side adjustment plate 29 can move in the X direction, thereby adjusting the X-direction position of the ceramic RF connector semi-finished product 9. The positioning bar 30 on the side adjustment plate 29 can move in the Y direction, thereby adjusting the Y-direction position of the ceramic RF connector semi-finished product 9. The Z-direction position of the ceramic RF connector semi-finished product 9 is adjusted by lifting and lowering the lower adjustment plate 38. This structural setting facilitates the clamping processing of ceramic RF connectors of different sizes, ensures that each end of the ceramic RF connector can be coaxial with the dividing chuck 1, and ensures processing accuracy.

[0065] During the clamping process, the end of the semi-finished ceramic RF connector 9 is centered by a centering mechanism, ensuring that it is concentric with the indexing chuck 1. During this centering process, the side adjustment plate 29 moves in the X direction, the positioning bar 30 moves in the Y direction, and the lower adjustment plate 38 moves in the Z direction. The adjustment ring 45 is rotated so that the edge of the push bar 53 on the adjustment ring 45 abuts the centering block 46, pushing the centering block 46 radially to clamp and center the semi-finished ceramic RF connector 9. Subsequently, the clamping and positioning of the semi-finished ceramic RF connector 9 is achieved by the pressure plate 6 and the lower adjustment plate 38 on the base plate 5.

[0066] A method for processing ceramic RF connectors for etching equipment is disclosed. A ceramic RF connector processing jig for etching equipment is used to clamp a T-shaped ceramic RF connector semi-finished product 9 between a base plate 5 and a pressure plate 6. The middle of the ceramic RF connector semi-finished product 9 is clamped between the base plate 5 and the pressure plate 6. The indexing swivel 8 is rotated to correct and position the ceramic RF connector semi-finished product 9 at 90°, 180°, and 270°, respectively. At the same time, the side adjustment plate 29 moves in the X direction, the positioning bar 30 moves in the Y direction, and the lower adjustment plate 38 moves in the Z direction. The adjustment ring 45 is rotated so that the edge of the push bar 53 on the adjustment ring 45 abuts against the centering block 46 and pushes the centering block 46 to move radially to clamp and center the ceramic RF connector semi-finished product 9. Ensure that the position of the ceramic RF connector semi-finished product 9 is adjusted in three directions so that each end of the ceramic RF connector semi-finished product 9 can be coaxial with the indexing chuck 1; then clamp the indexing chuck 1 onto the machine tool to process the ceramic RF connector semi-finished product 9, and rotate the indexing swivel 8 to realize the processing of each end of the ceramic RF connector semi-finished product 9.

[0067] The ceramic RF connector semi-finished product 9 is clamped by raising and lowering the pressure plate 6. During the clamping process, the position of the ceramic RF connector semi-finished product 9 is adjusted, and the indexing swivel 8 is rotated to ensure that each end of the ceramic RF connector semi-finished product 9 is coaxial with the indexing chuck 1. The indexing chuck 1 is clamped to the machine tool, and then the ceramic RF connector semi-finished product 9 is processed. After one end is processed, the indexing swivel 8 is rotated to process the other end. Each end of the ceramic RF connector semi-finished product 9 is processed at 90°, 180°, and 270° positions until all ends are processed. The processing of the ceramic RF connector is achieved by clamping it once, which avoids error accumulation, ensures processing accuracy, and helps improve work efficiency.

[0068] The above-described embodiments are only preferred solutions of the present invention and are not intended to limit the present invention in any form. Other variations and modifications are possible without exceeding the technical solutions described in the claims.

Claims

1. A ceramic radio frequency connector processing jig for etching equipment, characterized in that: The jig body includes a base plate and a pressure plate installed on a dividing chuck. The pressure plate is arranged to be lifted and lowered. The base plate is connected to a support plate and a dividing swivel seat. The semi-finished ceramic RF connector is clamped between the base plate and the pressure plate. The semi-finished ceramic RF connector is positioned against the support plate.

2. The ceramic radio frequency connector processing jig for etching equipment according to claim 1 is characterized in that: The pressure plate is connected to the guide rod, and a laterally extending connecting part is set on the upper part of the support plate. The guide rod and the connecting part are movably plug-in connected. A return spring is installed between the connecting part and the guide rod. The connecting part is connected to a push screw, which presses on the pressure plate and can push the pressure plate to move.

3. The ceramic radio frequency connector processing jig for etching equipment according to claim 1, characterized in that: A mounting cavity is provided on the indexing chuck, the fixture body is provided in the mounting cavity, and the front portion of the mounting cavity is open.

4. The ceramic radio frequency connector processing jig for etching equipment according to claim 1, characterized in that: The indexing rotary seat comprises a connecting seat and a rotating column. The rotating column is rotatably mounted on the indexing chuck. The connecting seat is tightly connected to the rotating seat. The base plate is tightly connected to the connecting seat.

5. The ceramic radio frequency connector processing jig for etching equipment according to claim 4, characterized in that: A mounting hole is provided on the indexing chuck, the rotating column is rotatably connected to the mounting hole, the end of the rotating column is connected to a limit head, the limit head is limited at one end of the mounting hole, and the connecting seat is limited at the other end of the mounting hole.

6. The ceramic radio frequency connector processing jig for etching equipment according to claim 1, characterized in that: The edge of the bottom plate is turned down to form a protective flange, and the protective flange is covered on the upper part of the indexing swivel seat.

7. The ceramic radio frequency connector processing jig for etching equipment according to claim 1, characterized in that: The support plate is connected to the side adjustment plate that moves in the X direction, and a positioning strip that moves in the Y direction is set on the side adjustment plate. The side adjustment plate, the side adjustment plate and the positioning strip are respectively positioned against the two side surfaces of the ceramic RF connector semi-finished product.

8. The ceramic radio frequency connector processing jig for etching equipment according to claim 1, characterized in that: A lower adjustment plate with a lifting arrangement is installed on the bottom plate, and a semi-finished ceramic radio frequency connector is clamped between the pressing plate and the lower adjustment plate.

9. A ceramic radio frequency connector processing jig for etching equipment according to any one of claims 1 to 8, characterized in that: A centering mechanism is installed on the dividing chuck, and the centering mechanism includes a centering ring and an adjusting ring. Several centering blocks that are arranged to move radially are evenly distributed circumferentially on the centering ring. The adjusting ring is rotatably connected to the centering ring. A pushing bar corresponding to the centering block is arranged on the adjusting ring. The edge of the pushing bar is arranged gradually close to the center of the circle along the circumferential direction. The edge of the pushing bar abuts against the centering block and pushes the centering block to move radially to clamp and center the ceramic RF connector semi-finished product.

10. A method for processing a ceramic radio frequency connector for etching equipment, characterized in that: Using the ceramic RF connector processing jig for etching equipment according to any one of claims 1 to 9, the T-shaped ceramic RF connector semi-finished product is clamped between the base plate and the pressure plate, the indexing swivel is rotated, and the position of the ceramic RF connector semi-finished product is adjusted so that each end of the ceramic RF connector semi-finished product is coaxial with the indexing chuck; then the indexing chuck is clamped onto the machine tool to process the ceramic RF connector semi-finished product, and the indexing swivel is rotated to realize the processing of each end of the ceramic RF connector semi-finished product.

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