Anti-sticking device for magnetron sputtering coating shield workpiece frame and magnetron sputtering coating equipment

Abstract

The application discloses a kind of for magnetron sputtering coating shielding workpiece frame and magnetron sputtering coating equipment.The device for preventing from being painted includes the frame of forming coating window, the frame is multi-section structure, by a plurality of connection sections sequentially spliced into, the connection section includes straight section and corner section, the corner section is arranged between two adjacent straight sections, and the two straight sections are first straight section and second straight section respectively, the extension direction of the first straight section and the second straight section is different, the corner section is adjustable in the frame width direction relative to the first straight section, and / or, the corner section is adjustable in the frame width direction relative to the second straight section.The application can be by adjusting the relative position of corner section, to expose more area of workpiece frame, so that workpiece corner portion can be fully sputtered, to improve coating uniformity.

Description

Technical Field

[0001] This application relates to the field of magnetron sputtering coating equipment technology, and in particular to an anti-attachment device for shielding workpiece holders in magnetron sputtering coating and magnetron sputtering coating equipment. Background Technology

[0002] Magnetron sputtering is a type of physical vapor deposition (PVD) widely used in the coating field. The specific operation involves applying an electric field to ionize the gas in a vacuum chamber. The ionized particles move under the influence of the electric or magnetic field and bombard the target material, causing sputtering on the surface of the target material. The sputtered target particles not only deposit on the surface of the workpiece, but also sputter onto the workpiece holder and the inner wall of the vacuum chamber, resulting in contamination of the non-coating area. Therefore, anti-fouling devices are usually installed in the sputtering area of ​​the target material to shield the non-coating area.

[0003] Existing anti-sputtering devices include anti-sputtering frames. Because the anti-sputtering frame presses against the edge of the workpiece, the edge of the workpiece is affected by the shadow effect of the anti-sputtering frame, resulting in poor coating uniformity. The conventional solution is to design the edge area where the anti-sputtering frame and the workpiece holder contact each other as a slope to reduce the edge effect. However, the effect is limited, especially at the edge corners. Compared with other areas, the sputtering effect in this area is further weakened, resulting in even worse coating uniformity. This affects the use of the workpiece and cannot meet the requirements of high-end panel manufacturing. Summary of the Invention

[0004] In view of the problems of the prior art, this application provides an anti-sticking device for shielding workpiece holders for magnetron sputtering coating, so as to improve the coating uniformity at the corners of the workpiece.

[0005] An anti-collision device for shielding a workpiece holder in magnetron sputtering coating is disclosed. The anti-collision device includes a frame forming a coating window. The frame has a multi-segment structure, which is composed of multiple connecting segments spliced ​​together sequentially. Each connecting segment includes a straight segment and a corner segment. The corner segment is disposed between two adjacent straight segments, which are a first straight segment and a second straight segment, respectively. The first straight segment and the second straight segment extend in different directions. The position of the corner segment relative to the first straight segment in the width direction of the frame is adjustable, and / or the position of the corner segment relative to the second straight segment in the width direction of the frame is adjustable.

[0006] Several alternative methods are provided below, but they are not intended as additional limitations on the overall solution above. They are merely further additions or optimizations. Provided there are no technical or logical contradictions, each alternative method can be combined individually with respect to the overall solution above, or multiple alternative methods can be combined with each other.

[0007] Optionally, the corner segment has a first end face, and the straight segment has a second end face opposite to the first end face. One of the first end face and the second end face is provided with a protruding insertion portion, and the other is provided with an insertion groove that adapts to the insertion portion.

[0008] Optionally, the width of the insertion slot is greater than the width of the insertion part, so that the corner segment can be displaced in the width direction of the frame.

[0009] Optionally, the insertion slot has a limiting portion that limits the displacement stroke of the insertion portion.

[0010] Optionally, the anti-collision device includes a support member, and the straight segment and the corner segment are mounted on the support member.

[0011] Optionally, the support member is provided with fasteners, and the corner segment is provided with a waist-shaped hole that mates with the fasteners. The position of the corner segment in the width direction of the frame can be adjusted by adjusting the position of the fasteners in the waist-shaped holes.

[0012] Optionally, the frame is provided with a positioning groove for positioning the workpiece holder on the side facing the workpiece holder.

[0013] Optionally, the corner segment has a first end face, and the straight segment has a second end face opposite to the first end face. One of the first end face and the second end face is provided with a protruding insertion part, and the other is provided with an insertion groove that adapts to the insertion part. The insertion groove is formed at the bottom of the positioning groove where the connecting segment is located.

[0014] Optionally, the frame has a main body area extending in a straight line and a corner area arranged between two adjacent main body areas. The edge of the coating window is provided with an anti-sticking surface. The anti-sticking surface has a connecting portion that gradually slopes downward from the outside to the inside near the inner edge of the frame. The width of the connecting portion in the corner area is smaller than the width of the connecting portion in the main body area, so as to expose more area of ​​the workpiece holder in the corner area.

[0015] This application also provides a magnetron sputtering coating apparatus, including a vacuum chamber and the aforementioned anti-sputtering device disposed within the vacuum chamber.

[0016] Compared to existing technologies, this application can improve coating uniformity by adjusting the relative position of the corner segments to expose more areas of the workpiece holder, allowing the corners of the workpiece to be fully sputtered. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the magnetron sputtering coating equipment and sputtering process described in this application;

[0018] Figure 2This is a schematic diagram of the frame of the anti-collision device in this application;

[0019] Figure 3 This is a schematic diagram illustrating the interaction between straight segments and corner segments in this application;

[0020] Figure 4 This is a schematic diagram showing the displacement of the corner segment relative to the first straight segment in the width direction in this application;

[0021] Figure 5 This is a schematic diagram illustrating the cooperation between the frame and the positioning device in this application;

[0022] Figure 6 This is a schematic diagram of the structure on the back of the frame in this application;

[0023] Figure 7 This is a schematic diagram illustrating the fit between the frame and the clamping element in this application;

[0024] Figure 8 This is a partial schematic diagram of the corner segment and the first straight segment in this application;

[0025] Figure 9 This is a partial view of the back of the corner segment and the first straight segment in this application;

[0026] Figure 10 This is a schematic diagram of the insertion and mating of the corner segment and the first straight segment in this application;

[0027] Figure 11 This is a schematic diagram of the frame of another anti-collision device of this application;

[0028] Figure 12 for Figure 11 A partial view;

[0029] Figure 13 This is a schematic diagram showing the fit between the frame, clamping components, and the workpiece.

[0030] Figure 14 for Figure 13 A partial schematic diagram;

[0031] Figure 15 This is a schematic diagram of another magnetron sputtering coating device and sputtering principle in this application;

[0032] Figure 16 This is a schematic diagram of the connecting part in this application.

[0033] 100. Anti-collision device; 110. Frame; 111. Coated window; 112. Main body area; 113. Corner area; 114. Positioning groove; 115. Connecting part; 115a. First connecting part; 115b. Second connecting part; 116. Protrusion; 120. Straight segment; 121. First straight segment; 122. Second straight segment; 123. Second end face; 124. First insertion part; 125. Second insertion part; 130. Corner segment; 131. First end face Surface; 132, First insertion groove; 133, Limiting part; 134, Waist-shaped hole; 135, Second insertion groove; 200, Vacuum chamber; 300, Target material; 400, Positioning device; 411, Clamping part; 500, Workpiece; 510, Middle area; 520, Edge area; 521, Corner; W, Width direction; W1, Width of the first connecting part in the corner area; W2, Width of the second connecting part in the main body area; L1, Effective sputtering area; L2, Effective sputtering area. Detailed Implementation

[0034] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0035] It should be noted that when a component is said to be "connected" to another component, it can be directly connected to the other component or it can be connected to a component in between. When a component is said to be "set on" another component, it can be directly set on the other component or it may be set to a component in between.

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0037] See Figure 1This application provides a magnetron sputtering coating apparatus, including a vacuum chamber 200, a target material 300, and an anti-attachment device 100. The vacuum chamber 200 has a corresponding sputtering area for the target material 300. The anti-attachment device 100 is disposed within the vacuum chamber 200 to shield the workpiece holder and the non-coating area of ​​the vacuum chamber 200 within the sputtering area. The workpiece holder is used to support the workpiece 500 (such as a glass substrate) and has a positioning device 400 for fixing the workpiece 500. The positioning device 400 includes a clamping member 411 that mates with the edge of the workpiece 500. The conventional clamping member 411 is a clamping block.

[0038] Typically, the anti-sputtering device 100 includes a frame 110 forming a coating window 111. The frame 110 can be a rectangular structure, and the shape of the coating window 111 is commonly rectangular, with its size adapted to the size of the workpiece 500. The area of ​​the workpiece 500 exposed by the coating window 111 is the coating area. The frame 110 has a front side facing the target 300 and being sputtered, and a back side that mates with the workpiece holder. The inner edge of the frame 110 connects with the workpiece holder and has an anti-sputtering surface that gradually slopes downward from the outside to the inside, which can reduce the edge effect of the frame 110 on the workpiece 500 and improve the coating uniformity of the workpiece 500. The frame 110 and the workpiece holder are usually clearance-fitted to avoid contact between them and the generation of metal dust that would affect the cleanliness of the vacuum chamber.

[0039] Figure 1 In the diagram, L1 represents the effective sputtering area of ​​the target material 300 on the workpiece 500 after passing through the anti-sputtering device 100 and the clamping member 411. The two ends of the target material 300 have a certain margin, which is intended to provide more buffer space for the sputtering of target particles, thereby eliminating the problem of uneven coating caused by particle scattering to a certain extent and ensuring the quality of the effective coating area.

[0040] See Figures 2-4 In the illustrated embodiment, the frame 110 has a multi-segment structure, which is composed of multiple connecting segments spliced ​​together sequentially. The connecting segments include straight segments 120 and corner segments 130. The corner segment 130 is positioned between two adjacent straight segments 120, namely a first straight segment 121 and a second straight segment 122, with the first straight segment 121 and the second straight segment 122 extending in different directions. In this embodiment, the position of the corner segment 130 relative to the straight segments 120 in the width direction W is adjustable, specifically in the following situations:

[0041] (1) Figure 4 In the middle, the position of the corner segment 130 relative to the first straight segment 121 in the width direction of the frame 110 is adjustable;

[0042] (2) The position of the corner segment 130 relative to the second straight segment 122 on the width of the frame 110 is adjustable;

[0043] (3) The position of the corner segment 130 relative to the first straight segment 121 and the second straight segment 122 in the width direction of the frame 110 is adjustable.

[0044] Figures 3 to 5 In this application, by adjusting the position of the corner segment 130 relative to the straight segment 120 in the width direction of the frame 110, more of the workpiece holder corner area can be exposed, allowing the corner of the workpiece 500 to be fully sputtered like other areas, thereby improving the overall coating uniformity of the workpiece 500. However, it should be noted that in actual processes, the adjustment range should retain the function of the frame 110 in shielding the workpiece holder, with the sole purpose of ensuring that the corner of the workpiece 500 is fully sputtered.

[0045] See Figure 6 , 7 In the illustrated embodiment, the back of the frame 110 is provided with a positioning groove 114, the opening of which faces the workpiece holder and is used to cooperate with the workpiece holder for positioning. Specifically, each connecting section is provided with a positioning groove 114, and after splicing, the bottom of all positioning grooves 114 transitions smoothly to avoid contact with the workpiece holder and the generation of metal dust.

[0046] See Figures 8-10 The embodiment shown provides a specific splicing method for corner segment 130 and straight segment 120. Corner segment 130 has a first end face 131, and straight segment 120 has a second end face 123 opposite to the first end face 131. One of the first end face 131 and the second end face 123 is provided with a protruding first insertion part 124, and the other is provided with a first insertion groove 132 adapted to the first insertion part 124. The corner segment 130 and straight segment 120 are connected by internal insertion of the first end face 131 and the second end face 123.

[0047] In this embodiment, the corner segment 130 and the straight segment 120 are connected by a plug-in method, which makes the surfaces of the corner segment 130 and the straight segment 120 parallel. This not only avoids the formation of a boss surface that affects the diffusion of sputtered particles to the workpiece 500 due to splicing, but also has the effect of preventing plating wrapping.

[0048] Specifically, the first end face 131 is provided with a first insertion groove 132, and the second end face 123 is provided with a first insertion part 124. Further, the first insertion groove 132 is formed at the bottom of the positioning groove 114 where the corner segment 130 is located, and the first insertion part 124 is provided at the bottom of the positioning groove 114 where the straight segment 120 is located.

[0049] To ensure that the corner segment 130 is adjustable in the width direction relative to the straight segment 120, the width of the first insertion slot 132 must be greater than the width of the first insertion part 124, so that the corner segment 130 can be displaced in the width direction of the frame 110.

[0050] Furthermore, the first insertion groove 132 has a limiting part 133. Specifically, two limiting parts 133 are formed by protruding above the bottom of the groove on both sides of the first insertion groove 132 in the width direction. The distance between the two limiting parts 133 in the width direction is the width dimension of the first insertion groove 132. The displacement stroke of the first insertion part 124 in the first insertion groove 132 is limited by this distance.

[0051] See Figure 9 , 10 In the illustrated embodiment, the second end face 123 is provided with two second insertion portions 125, which are higher than the bottom of the positioning groove 114 where the straight segment 120 is located, and in the width direction, the first insertion portion 124 is located between the two second insertion portions 125; correspondingly, the first end face 131 is provided with two second insertion grooves 135, which are adapted to the two second insertion portions 125 respectively. The tops of the two second insertion grooves 135 are flush with the top of the positioning groove 114 where the corner segment 130 is located, and their bottoms are higher than the bottom of the positioning groove 114 where the corner segment 130 is located.

[0052] Typically, the anti-collision device 100 includes a support member, with each connecting segment fixedly installed on the support member and forming a frame 110. Common support members are the inner wall of the vacuum chamber 200 or a water-cooled plate fixed to the inner wall of the vacuum chamber 200. The straight segment 120 can be composed of multiple unit straight segments spliced ​​together, and the splicing method can be the same as that used for the corner segment 130 and the straight segment 120, i.e., a plug-in method.

[0053] The support is equipped with fasteners for mounting the straight section 120 and the corner section 130. The corner section 130 has a waist-shaped hole 134 that mates with the fastener. The length of the waist-shaped hole 134 is along the width direction of the corner section 130. Therefore, the position of the corner section 130 in the width direction of the frame 110 can be adjusted by adjusting the position of the fastener in the waist-shaped hole 134.

[0054] Furthermore, the length of the oblong hole 134 should be greater than the width difference between the first insertion groove 132 and the first insertion portion 124 to ensure effective displacement of the corner segment 130 relative to the straight segment 120 in the width direction. Specifically, the width difference between the first insertion groove 132 and the first insertion portion 124 is 1~5mm, and the difference between the length of the oblong hole 134 and this width difference is 2~3mm, so that although the clamping member 411 exposes more area, it is still shielded by the frame 110. These exposed areas allow the corners of the workpiece to obtain sufficient sputtering conditions.

[0055] The outer edges of the straight segment 120 and the corner segment 130 are fixed with fasteners on the support. Specifically, the outer edge of the straight segment 120 is provided with fixing holes, and the corner segment 130 is provided with oblong holes 134. During installation, the straight segment 120 is first fixed in the corresponding position on the support by engaging the fasteners through the fixing holes; then the corner segment 130 is spliced ​​with the straight segment 120, and the oblong holes 134 engage with the fasteners. By adjusting the position of the fasteners in the oblong holes 134, the corner segment 130 is adjusted to the predetermined position and fixed.

[0056] See Figure 11 , 12 In another embodiment shown, the frame 110 has a main body area 112 and a corner area 113. The main body area 112 extends in a straight line, and the corner area 113 is arranged between two adjacent main body areas 112. The edge of the coating window 111 is provided with an anti-sticking surface. The anti-sticking surface has a connecting portion 115 that gradually slopes downward from the outside to the inside near the inner edge of the frame 110. The connecting portion 115 includes a first connecting portion 115a located in the main body area 112 and a second connecting portion 115b located in the corner area 113. The width W2 of the second connecting portion 115b in the corner area 113 is smaller than the width W1 of the first connecting portion 115a in the main body area 112, thereby exposing more area of ​​the workpiece holder in the corner area 113, thereby enabling the workpiece 500 to have a wider effective sputtering area L2 corresponding to the target material 300.

[0057] Figures 13-15 The effect of the frame 110, clamping member 411 and workpiece 500 is shown. The corner area 113 exposes more area of ​​clamping member 411, which helps to reduce the edge effect of the corner area 113, so that the corner 521 of workpiece 500 can also be fully sputtered, increasing the coating thickness at the edge of workpiece 500 and reducing the difference with the middle area 510. The difference includes film thickness and performance.

[0058] Specifically, the clamping component 411 has an inclined portion that connects with the workpiece 500. The inclined portion also gradually descends from the outside to the inside, and the inclined angle is the same as that of the connecting portion 115. The inclined angle α is generally 30~60°. The difference between the width W1 and the width W2 is 1~5mm, which can significantly improve the lifting effect, but it should not exceed this range, otherwise there is a risk that the clamping component 411 will be sputtered by the target material.

[0059] See Figure 16In the illustrated embodiment, the protective surface is provided with multiple sets of protrusions arranged in an array. Each set contains multiple protrusions 116 spaced apart. The protrusions 116 can be trapezoidal blocks with narrowed lateral widths, and their surfaces are specially treated, such as through patterning or sandblasting, to give them a certain roughness and adsorption capacity, so as to better capture sputtered particles. The beveled surface of the protrusions 116 helps to reduce material accumulation at the edge of the coating window, avoiding problems such as particle contamination. The arrangement of the protrusions 116 helps to improve the adsorption capacity of the protective surface for target material 300 particles, preventing particle detachment and dust contamination of the vacuum chamber 200.

[0060] Based on the actual process conditions, this application sets the width difference of the connecting part 115 in the main body area 112 and the corner area 113. Combined with the adjustment of the relative position of the corner section 130, more areas of the workpiece holder can be exposed, so that the corner 521 of the workpiece 500 can be fully sputtered, thereby improving the overall coating uniformity of the workpiece 500.

[0061] The following test examples, using specific magnetron sputtering coating processes, test the effects of existing anti-attachment devices (Comparative Example 1) and the anti-attachment devices of this application (Examples 1-8) on sputtering coating under the same magnetron sputtering coating conditions. Examples 1-4 are test examples where the displacement of the corner segment 130 relative to the straight segment 120 in the width direction is adjusted individually; Examples 5-8 are test examples where the displacement of the corner segment 130 relative to the straight segment 120 in the width direction is adjusted, combined with test examples of different widths of the connecting portion 115 in the main body area 112 and the corner area 113.

[0062] This application is used for coating large-size workpieces, with the substrate measuring 2250 mm wide × 2600 mm long. The core parameters for the magnetron sputtering coating process are set as follows:

[0063] (1) The initial vacuum level of the cavity reaches 5×10 -4 After introducing argon gas as the working gas, the cavity pressure stabilized at 2.20 × 10 Pa. -1 Pa;

[0064] (2) The target material used is an aluminum (AL) cylindrical target material with a length of 2692mm × diameter of 167mm and a service life (target life) of 30000 kWh based on sputtering power consumption.

[0065] (3) The target-substrate distance (spacing between the target and the substrate) is set to 180 mm, and the magnetic field scanning angle is controlled within ±20° to optimize the sputtering uniformity of the target material; in terms of film deposition efficiency, the film deposition rate is 42.96 Å / s (i.e. 4.296 nm / s).

[0066] According to standard ASTM F390 (Standard Test Method for Sheet Resistance of Thin Semiconductor Films), the sheet resistivity R of each region of each group of substrates after coating was tested. s Typically, the sheet resistivity R s The smaller the value, the greater the film thickness.

[0067] According to standard ISO 14707: Test for thickness uniformity of sputtered thin films, the uniformity of the coating thickness of each substrate is tested. ΔU% is a uniformity index calculated based on the electrical signal (such as voltage U) corresponding to the film thickness. It primarily reflects the degree of thickness difference in different regions of the film and is often used in scenarios where the film thickness cannot be directly measured (such as nanoscale thin films) but can be indirectly characterized by electrical signals. The smaller the ΔU% is, the better the uniformity of the coating on the entire substrate.

[0068] Table 1 Test Results

[0069]

[0070] The technical features of the embodiments described above can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered to be within the scope of this specification. When technical features of different embodiments are embodied in the same drawing, it can be regarded as the drawing also disclosing examples of combinations of the various embodiments involved.

[0071] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this application should be determined by the appended claims.

Claims

1. An anti-collision device for a workpiece holder used in magnetron sputtering coating, the anti-collision device comprising a frame forming a coating window, the frame being a multi-segment structure composed of multiple connecting segments sequentially spliced ​​together, each connecting segment comprising a straight segment and a corner segment, the corner segment being disposed between two adjacent straight segments, the two straight segments being a first straight segment and a second straight segment, the first straight segment and the second straight segment extending in different directions, characterized in that... The corner segment is adjustable in position relative to the first straight segment in the frame width direction, and / or the corner segment is adjustable in position relative to the second straight segment in the frame width direction; The corner segment has a first end face, and the straight segment has a second end face opposite to the first end face. One of the first end face and the second end face is provided with a protruding insertion part, and the other is provided with an insertion groove that adapts to the insertion part. The width of the insertion slot is greater than the width of the insertion part, so that the corner segment can be displaced in the width direction of the frame; The anti-collision device includes a support member, and the straight segment and the corner segment are installed on the support member; The support member is provided with fasteners, and the corner section is provided with a waist-shaped hole that mates with the fasteners. The position of the corner section in the width direction of the frame can be adjusted by adjusting the position of the fasteners in the waist-shaped holes. The frame has a main body area extending in a straight line and a corner area arranged between two adjacent main body areas. The edge of the coating window is provided with an anti-sticking surface. The anti-sticking surface has a connecting part that gradually slopes downward from the outside to the inside near the inner edge of the frame. The width of the connecting part in the corner area is smaller than the width of the connecting part in the main body area, so as to expose more area of ​​the workpiece holder in the corner area.

2. The anti-collision device according to claim 1, characterized in that, The insertion slot has a limiting portion that limits the displacement stroke of the insertion part.

3. The anti-collision device according to claim 1, characterized in that, The frame has a positioning groove for positioning the workpiece rack on the side facing the workpiece rack.

4. The anti-collision device according to claim 3, characterized in that, The insertion slot is formed at the bottom of the positioning slot where the connecting section is located.

5. A magnetron sputtering coating equipment, characterized in that, It includes a vacuum chamber and an anti-sticking device as described in any one of claims 1 to 4 disposed within the vacuum chamber.

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