Adjustable pressure heating furnace and using method thereof

Abstract

The invention relates to the technical field of semiconductor manufacturing equipment, in particular to an adjustable pressure heating furnace and a using method thereof.The adjustable pressure heating furnace comprises an inner-layer frame, an outer-layer frame and a heating wire, the inner-layer frame and the outer-layer frame are arranged in a furnace body, the heating wire is arranged between the inner-layer frame and the outer-layer frame in a surrounding mode, and a sliding groove is formed in the inner-layer frame along the side wall in a surrounding mode; the heating wire is sleeved with a plurality of ceramic rings, the ceramic rings and the clamping seats are correspondingly connected in a clamped mode, an operation through hole is formed in the side wall of the outer layer frame, and the heating wire is led out from the operation through hole. The problem that a single body of a traditional ceramic ring is damaged due to fixed installation and needs to be overall shut down for disassembly can be solved, the maintenance time is greatly shortened, and the production efficiency is improved; when the thermocouple detects that the temperature is abnormal, the electric heating wire is clamped on the limiting clamping grooves at different positions by rotating the adjusting ceramic ring, so that the distance between the electric heating wire and the kettle body is controlled, and the heating uniformity is timely and accurately regulated and controlled.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing equipment, and in particular to an adjustable pressure heating furnace and a method for using the same. Background Art

[0002] Semiconductor material preparation requires temperature control in a heating furnace. For example, the preparation of gallium nitride crystals requires two chemical reactions: a low-temperature reaction and a high-temperature reaction. Therefore, the reaction chamber of the heating furnace used to control these reactions is divided into a low-temperature zone and a high-temperature zone.

[0003] At present, the setting of heating furnaces is mainly divided into two types: vertical and horizontal. For vertical heating furnaces, when producing, the reactor needs to be hoisted from top to bottom and placed into the heating furnace. The furnace cavity of the heating furnace includes an inner frame and an outer frame, wherein the inner frame is in contact with the reactor, and the heating wire is arranged between the inner frame and the outer frame, and does not contact the inner and outer frames to avoid short circuits. In the prior art, multiple groups of high-temperature resistant and insulating ceramic rings are sheathed on the outside of the heating wire to ensure that the heating wire is arranged around and between the inner and outer frames. However, in actual use, the fixing method of the ceramic ring, the heating wire, and the kettle body is complex, and the installation accuracy is required to be high. If an independent ceramic ring is damaged and needs to be replaced, since the furnace body is provided with multiple heating zones in the longitudinal direction, the replacement of the components in the lower area requires a long shutdown and disassembly, which takes a long time to repair and reduce production efficiency. If a section of the heating wire is damaged, it also involves the problem of replacing or repairing the entire device, resulting in an increased risk of equipment scrapping and high maintenance costs. In addition, during the use of the heating wire, if there is positional offset or stress concentration caused by thermal expansion, resulting in uneven heating, it is difficult to adjust the problematic area, which leads to uneven heat distribution and affects the quality of the crystal material. Summary of the Invention

[0004] In order to solve the above technical problems, the present invention provides an adjustable pressure heating furnace and a method for using the same.

[0005] In order to achieve the above object, the technical solution adopted by the present invention is as follows: An adjustable pressure heating furnace includes a furnace body for heating a kettle body, the furnace body includes an inner frame and an outer frame, a heating wire is arranged around the inner frame and the outer frame, a slide is arranged around the side wall of the inner frame, a plurality of holders are slidably connected to the slide, a plurality of ceramic rings are sleeved on the heating wire, and the plurality of ceramic rings and the plurality of holders are respectively correspondingly connected, an operating through hole is opened on the side wall of the outer frame, and the heating wire is led out from the operating through hole to be connected to an external power supply.

[0006] The existing furnace body includes four heating temperature zones, namely the upper temperature zone, the middle-upper temperature zone, the middle-lower temperature zone and the lower temperature zone, of which one heating zone is set in the upper part, two heating zones are set in the middle-upper part, two heating zones are set in the middle-lower part, and one heating zone is set in the lower part to ensure that the temperature of each section of the kettle body can be more accurately controlled. There is a hollow setting between any two heating temperature zones for temperature leakage to ensure a certain temperature difference between different temperature zones. The temperature difference between any two adjacent heating temperature zones is about 30°. Insulating cotton attached to the inner wall of the outer frame is also provided between the heating wire and the outer frame to ensure that the heat is more fully directed to the kettle body located in the inner frame. The heating wire is made of stainless steel, which can avoid oxidation and rusting compared to the existing copper material, thereby reducing maintenance and replacement costs.

[0007] Furthermore, the ceramic ring is a movable ceramic ring with an opening in its sidewall. The width of the opening is the same as the diameter of the heating wire. The inner sidewall of the ceramic ring is also provided with a fixing groove, which is arranged opposite the opening. The opening width of the movable ceramic ring matches the diameter of the heating wire, allowing the ceramic ring to be directly inserted into or removed from the heating wire from the side. Compared with traditional closed ceramic rings that must be inserted or removed from the end of the heating wire, the open structural arrangement not only facilitates the rotation of the holder, but also facilitates the replacement of ceramic rings, solving the problem of traditional structures that require the entire ceramic ring to be disassembled to replace the lower layer or middle ceramic ring.

[0008] Furthermore, the fixing groove is arranged in a stepped structure along the inner wall of the ceramic ring, and limiting slots are arranged at equal intervals on the fixing groove, and the groove surface of the limiting slot is the same as the diameter of the heating wire. The fixing groove arranged in a stepped structure can ensure that the limiting slots at any position are at different straight-line distances from the outer wall of the ceramic ring. Based on this, when the heating wire is clamped on the limiting slots at different positions, the distance between the section of heating wire and the surface of the kettle body can be fine-tuned, thereby changing the local heat transfer efficiency and accurately solving the problem of uneven heating caused by thermal expansion, ceramic ring offset or local aging. In actual operation, if the heat transfer efficiency of this section of heating wire is low, the heating wire is placed in the fixed groove corresponding to the low thickness, so that the heating wire is closer to the kettle body. If the heat transfer efficiency of this section of heating wire is high, the heating wire is placed in the fixed groove corresponding to the high thickness, so that the heating wire is further away from the kettle body, and finally the purpose of uniform overall heat transfer efficiency is achieved.

[0009] Furthermore, multiple holders are arranged at equal intervals and fixedly connected by a connecting ring. This connecting ring securely connects all the holders into a single unit. When the connecting ring is driven to rotate, all the holders are simultaneously driven to rotate along the chute. This structural arrangement facilitates moving any ceramic ring to the access hole for maintenance or replacement, significantly improving maintenance efficiency for a longitudinally arranged furnace structure.

[0010] Furthermore, the connecting ring is equipped with a rotating lever, which corresponds to the vertical height of the operating hole. The operator controls the rotating lever through the operating hole, thereby driving the entire chuck structure. Its position is aligned with the operating hole, allowing the operator to operate through the operating hole conveniently. Without opening the furnace body or performing large-scale disassembly, the entire assembly can be precisely rotated to move the target area to the operating window, completing maintenance and replacement of damaged parts.

[0011] Furthermore, limit baffles are provided on both sides of the holder, and the outer diameter of the ceramic ring is equal to the distance between the two limit baffles. The limit baffles are used to laterally limit the inserted ceramic ring, ensuring that the ceramic ring is firmly fixed in the holder and can only rotate within its groove, thereby ensuring structural stability and adjustment accuracy.

[0012] Furthermore, a mounting seat is provided on the operating through hole, and an operating window and an installation window are provided on the mounting seat. The heating wire is guided to the outside through the installation window, and a retractable cover is provided on the operating window. The mounting seat functionally partitions and seals the operating through hole, and the installation window is specifically used to fix and guide the heating wire lead to ensure the stability and sealing of the electrical connection. The operating window is a working channel for maintenance and adjustment. The retractable cover seals the furnace cavity during non-operation, ensuring a stable temperature field in the furnace, good insulation effect, and preventing foreign matter from entering. It can be opened for operation.

[0013] Furthermore, the outer frame is equipped with thermocouples for temperature measurement, which are connected to the outside via flexible wires. The thermocouples are arranged around the inner sidewalls of the outer frame to sense the temperature at various locations within the furnace in real time, providing real-time data for determining whether the temperature is abnormal.

[0014] A method for using an adjustable pressure heating furnace comprises the following steps: S1: Assembly preparation: several ceramic rings are placed on the heating wire. Several ceramic rings are clamped to the multiple clamping seats one by one, and the fixing groove side of the ceramic ring is facing the inner frame. The heating wire is clamped in the middle section of the fixing groove. The end of the heating wire is led out through the operating through hole and connected to the power supply; S2: Replace the ceramic ring. Open the cover of the operating hole and rotate the lever to drive the connecting ring, which in turn drives all the holders to rotate along the slide slot. When any ceramic ring passes the end of the heating wire, it passes through the opening of the ceramic ring until the ceramic ring to be replaced moves to the position of the operating hole. Then, rotate the ceramic ring so that the opening side of the ceramic ring faces the inner frame, pull the ceramic ring out horizontally through the side wall opening, and replace it with a new ceramic ring. S3: Replace the heating wire, separate the end of the heating wire from the wire connected to the power supply, take a new heating wire and fix it to one end of the old heating wire, that is, connect one end of the new heating wire to one end of the old heating wire through bundling or external clamping parts, then pull one end of the old heating wire outward until the new heating wire completely enters between the inner frame and the outer frame, then separate the new heating wire from the old heating wire, connect the new heating wire to the wire connected to the power supply, and complete the replacement.

[0015] S4: Uneven heating. When the thermocouple detects abnormal temperature, the connecting ring is driven by rotating the lever to rotate the ceramic ring in the abnormal area to the operating through hole. The ceramic ring is adjusted by rotating to hold the heating wire in different limit slots according to the abnormal temperature value. The thickness of the fixed slots at different positions is different, thereby controlling the distance between the heating wire and the kettle body.

[0016] Furthermore, in the above step S1, the distance between any two of the limiting slots keeps the heating wire suspended in the air to avoid touching the inner frame or the outer frame.

[0017] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention provides a movable ceramic ring and a slide-type holder structure, which can solve the problem of traditional ceramic rings requiring entire machine shutdown and disassembly due to damage caused by fixed installation. The movable ceramic ring facilitates rotational adjustment of the heating wire and can be directly inserted or removed from the side, achieving the effect of rapid maintenance or replacement of damaged ceramic rings, significantly reducing maintenance time and improving production efficiency. 2. The present invention provides an operation through hole to facilitate the inspection and replacement of the heating wire at any position of the furnace body, thereby solving the problem of partial damage to the heating wire requiring replacement of the entire furnace body or scrapping of the furnace body, significantly reducing maintenance costs and the risk of equipment scrapping; 3. When the thermocouple of the present invention detects a temperature abnormality, the ceramic ring is rotated and adjusted so that the heating wire is stuck on the limit slots at different positions, thereby controlling the distance between the heating wire and the kettle body to solve the problem of uneven heating caused by thermal expansion or ceramic ring offset, achieve timely and precise control of heating uniformity, and ensure the quality of crystal materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 It is a partial structural schematic diagram of the present invention; Figure 3 It is a schematic diagram of the split structure of the furnace body; Figure 4 It is a structural diagram of the ceramic ring; Figure 5is a schematic structural diagram of the ceramic ring in Example 4; Figure 6 is a schematic structural diagram of the ceramic ring in Example 5; Figure identification: 1-furnace body, 2-inner frame, 3-outer frame, 4-heating wire, 5-slide groove, 6-card seat, 7-ceramic ring, 8-operating through hole, 9-opening, 10-fixing groove, 11-limiting card slot, 12-connecting ring, 13-rotating lever, 14-limiting baffle, 15-mounting seat, 1501-operating window, 1502-mounting window, 16-cover plate, 17-disc spring gasket, 18-anti-drop card. DETAILED DESCRIPTION

[0019] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with examples and drawings. The exemplary embodiments of the present invention and their descriptions are only used to explain the present invention and are not intended to limit the present invention.

[0020] Example 1, as Figure 1-Figure 4 As shown, the present invention discloses an adjustable pressure heating furnace, comprising a furnace body 1 for heating a kettle body, the furnace body 1 comprising an inner frame 2 and an outer frame 3, a heating wire 4 is arranged around the inner frame 2 and the outer frame 3, a slide groove 5 is arranged around the side wall of the inner frame 2, a plurality of holders 6 are slidably connected to the slide groove 5, a plurality of ceramic rings 7 are sleeved on the heating wire 4, and the plurality of ceramic rings 7 and the plurality of holders 6 are respectively correspondingly engaged, an operating through hole 8 is opened on the side wall of the outer frame 3, and the heating wire 4 is led out from the operating through hole 8 to be connected to an external power supply.

[0021] Specifically, the existing furnace body 1 includes four heating temperature zones, namely the upper temperature zone, the middle-upper temperature zone, the middle-lower temperature zone and the lower temperature zone, wherein one heating zone is provided at the upper part, two heating zones are provided at the middle-upper part, two heating zones are provided at the middle-lower part, and one heating zone is provided at the lower part, to ensure that the temperature of each section of the kettle body can be more accurately controlled. A hollow space is provided between any two heating temperature zones for temperature leakage to ensure a certain temperature difference between different temperature zones. The temperature difference between any two adjacent heating temperature zones is about 30°. Insulating cotton attached to the inner wall of the outer frame 3 is also provided between the heating wire 4 and the outer frame 3, thereby ensuring that heat is more fully directed to the kettle body located in the inner frame 2. The heating wire 4 is made of stainless steel, which can avoid oxidation and rusting compared to the existing copper material, thereby reducing maintenance and replacement costs.

[0022] The ceramic ring 7 is a movable ceramic ring with an opening 9 on its side wall. The width of the opening 9 is the same as the diameter of the heating wire 4. The inner side wall of the ceramic ring 7 is also provided with a fixing groove 10, and the fixing groove 10 is arranged opposite to the opening 9. Specifically, the width of the opening 9 of the movable ceramic ring matches the diameter of the heating wire 4, so that the ceramic ring 7 can be directly inserted into or removed from the heating wire 4 from the side. Compared with the traditional closed ceramic ring 7 that must be inserted or removed from the end of the heating wire 4, the structural setting of the opening 9 not only facilitates the rotation of the holder 6 (when the heating wire 4 passes through the operating through hole 8, its axis is perpendicular to the side wall of the inner frame 2, thereby ensuring that the holder 6 can rotate normally), but also facilitates the replacement of the ceramic ring 7, solving the problem that the traditional structure requires the overall disassembly of the lower or middle ceramic ring 7 when replacing it.

[0023] The fixing groove 10 is arranged in a stepped structure along the inner wall of the ceramic ring 7, and the limiting card grooves 11 are arranged at equal intervals on the fixing groove 10, and the groove surface of the limiting card groove 11 is the same as the diameter of the heating wire 4. Specifically, the fixing groove 10 arranged in a stepped structure can ensure that the limiting card groove 11 at any position has a different straight-line distance from the outer wall of the ceramic ring 7 (that is, different radial positions of the heating wire 4, different distances from the inner layer frame 2 or the kettle body). Based on this, when the heating wire 4 is clamped on the limiting card groove 11 at different positions, the distance between the heating wire 4 and the surface of the kettle body can be fine-tuned, thereby changing the local heat transfer efficiency and accurately solving the problem of uneven heating caused by thermal expansion, ceramic ring 7 offset or local aging. In actual operation, if the heat transfer efficiency of this section of the heating wire 4 is low, the heating wire 4 is placed in the fixing groove 10 corresponding to the low thickness, so that the heating wire 4 is closer to the kettle body. If the heat transfer efficiency of this section of heating wire 4 is too high, the heating wire 4 is placed in the fixing groove 10 corresponding to the high thickness, so that the heating wire 4 is further away from the kettle body, and finally the purpose of uniform overall heat transfer efficiency is achieved.

[0024] Multiple chucks 6 are arranged at equal intervals and securely connected by a connecting ring 12. Specifically, the connecting ring 12 securely connects all chucks 6 into a single unit. When the connecting ring 12 is driven to rotate, all chucks 6 (and the ceramic rings 7 and heating wires 4 they support) are simultaneously driven to rotate along the chute 5. This structural arrangement facilitates moving any ceramic ring 7 to the access hole 8 for maintenance or replacement, significantly improving maintenance efficiency for a longitudinally arranged furnace body 1.

[0025] The connecting ring 12 is equipped with a rotating lever 13, which is aligned with the vertical height of the operating hole 8. Specifically, the operator controls the rotating lever 13 through the operating hole 8, thereby driving the entire structure of the chute 6. Its position is aligned with the operating hole 8, allowing the operator to easily operate through the operating hole 8. Without opening the furnace body 1 or performing large-scale disassembly, the entire assembly can be precisely rotated to move the target area to the front of the operating window 1501, completing the inspection and replacement of damaged parts.

[0026] Limit baffles 14 are provided on both sides of the holder 6. The outer diameter of the ceramic ring 7 is equal to the distance between the two limit baffles 14. Specifically, the limit baffles 14 are used to laterally limit the inserted ceramic ring 7, ensuring that the ceramic ring 7 is firmly fixed in the holder 6, so that the ceramic ring 7 can only rotate within its groove (for adjusting the position of the heating wire 4 in the fixing groove 10 or removing and replacing it), ensuring structural stability and adjustment accuracy.

[0027] The operating through hole 8 is provided with a mounting seat 15, and the mounting seat 15 is provided with an operating window 1501 and an installation window 1502. The heating wire 4 is guided to the outside through the installation window 1502, and the operating window 1501 is provided with an openable and closable cover 16. Specifically, the mounting seat 15 performs functional zoning and sealing management on the operating through hole 8, and the installation window 1502 is dedicated to fixing and guiding the lead of the heating wire 4 to ensure the stability and sealing of the electrical connection. The operating window 1501 is a working channel for maintenance (replacing the ceramic ring 7, the heating wire 4) and adjustment (rotating the ceramic ring 7 to change the slot). The openable and closable cover 16 closes the furnace cavity during non-operation to ensure the stability of the temperature field in the furnace, good insulation effect and prevent foreign matter from entering. It can be opened for operation.

[0028] The outer frame 3 is also provided with a thermocouple for temperature measurement, which is connected to the outside via a flexible wire. Specifically, the thermocouple is arranged around the inner wall of the outer frame 3 and is used to sense the temperature at various locations within the furnace body 1 in real time, providing real-time data for determining whether the temperature is abnormal.

[0029] Example 2: Based on Example 1, this example proposes a method for using an adjustable pressure heating furnace, comprising the following steps: S1: Assembly preparation: several ceramic rings 7 are placed on the heating wire 4. Several ceramic rings 7 are respectively connected to the multiple clamping seats 6 one by one, and the fixing groove 10 side of the ceramic ring 7 is facing the inner frame, so that the heating wire 4 is clamped in the middle section of the fixing groove 10. The end of the heating wire 4 is led out through the operating through hole 8 and connected to the power supply; S2: Replace the ceramic ring 7, open the cover plate 16 of the operating through hole 8, drive the connecting ring 12 by rotating the lever 13, and then drive all the holders 6 to rotate along the slide groove 5. When any ceramic ring 7 passes the end of the heating wire 4, it passes through the opening 9 of the ceramic ring 7. When the ceramic ring 7 to be replaced moves to the position of the operating through hole 8, rotate the ceramic ring 7 so that the opening 9 of the ceramic ring 7 faces the inner frame, and pull the ceramic ring 7 out horizontally through the side wall opening 9, and replace it with a new ceramic ring 7; S3: Replace the heating wire, separate the end of the heating wire 4 from the wire connected to the power supply, take a new heating wire 4 and fix it to one end of the old heating wire 4, that is, connect one end of the new heating wire 4 to one end of the old heating wire 4 through bundling or external clamping components, then pull one end of the old heating wire 4 outward until the new heating wire 4 completely enters between the inner frame 2 and the outer frame 3, then separate the new heating wire 4 from the old heating wire 4, connect the new heating wire 4 to the wire connected to the power supply, and complete the replacement.

[0030] S4: Uneven heating. When the thermocouple detects abnormal temperature, the connecting ring 12 is driven by rotating the lever 13 to rotate the ceramic ring 7 in the abnormal area to the operating through hole 8. The ceramic ring 7 is adjusted by rotation to make the heating wire at this location be held in different limit slots 11 according to the abnormal temperature value. The thickness of the fixing slots 10 at different positions is different, thereby controlling the distance between the heating wire and the kettle body.

[0031] Example 3: Based on Example 2, this example proposes installation requirements for a method of using an adjustable pressure heating furnace.

[0032] In the above step S1, the distance between any two of the limit slots 11 keeps the heating wire 4 suspended in the air, avoiding touching the inner frame 2 or the outer frame 3. Specifically, no matter which limit slot 11 the heating wire 4 is stuck in, the spacing between the adjacent holders 6 and the ceramic rings 7 must ensure that the heating wire 4 is effectively supported and kept suspended throughout the entire process, and absolutely avoid any part of the heating wire 4 from directly contacting the metal inner frame 2 or outer frame 3. Since the heating wire 4 is conductive and the inner frame 2 will contact the kettle body, the heating wire 4 cannot contact the inner frame 2 and the outer frame 3. This prevents the heating wire 4 from contacting the frame and causing a short circuit accident, thereby ensuring the safe operation of the equipment.

[0033] Embodiment 4: Based on embodiment 1, this embodiment proposes a ceramic ring structure with a passive adaptive adjustment function.

[0034] like Figure 5As shown, any of the aforementioned limit slots 11 is also provided with a disc spring washer 17. The disc spring washer 17 is embedded in a recessed recess at the bottom of the limit slot 11. Its outer edge is secured to the bottom of the limit slot 11 (e.g., by high-temperature brazing or snap fastening), with its central arched portion slightly above the theoretical lowest point of the limit slot 11. Specifically, the stepped fixing groove 10 based on the existing ceramic ring 7 is rigid. During the heating process of the furnace body 1, the ceramic ring 7, the heating wire 4, the inner frame 2, and other materials all undergo varying degrees of thermal expansion. In particular, the thermal expansion coefficient of the heating wire 4 (stainless steel) is much greater than that of the ceramic ring 7 (alumina ceramic). This causes the heating wire 4 to become "tightened" or generate stress within the rigid slot as it elongates due to heat. These differences in material expansion can cause unexpected, minor variations in the preset spacing between the heating wire 4 and the vessel body (although the stepped groove allows for manual adjustment, it cannot respond to changes in real time). This accumulated stress can accelerate cracking of the ceramic ring 7 or deformation of the heating wire 4. When the heating wire 4 is inserted into the selected limit slot 11, the heating wire 4 will slightly compress the disc spring gasket 17 below it, causing it to slightly deform and sink. The disc spring gasket 17 provides a slight initial preload to ensure that the heating wire 4 is stably in place. When the furnace temperature rises, the heating wire 4 is significantly elongated by the heat. The expansion of the heating wire 4 will "stretch" in the limit slot 11. At this time, the compressed disc spring gasket 17 provides a controllable elastic release space. The disc spring gasket 17 passively absorbs the extra length of the heating wire 4 due to thermal expansion, significantly reducing the thermal stress applied to the ceramic ring 7 and the heating wire 4. This can utilize the stable elasticity and limited stroke of the disc spring gasket 17 at high temperatures to passively and automatically solve the stress concentration and potential position displacement problems caused by thermal expansion.

[0035] Embodiment 5: Based on embodiment 4, this embodiment proposes a ceramic ring structure with an anti-drop card.

[0036] like Figure 6 As shown, the inner side wall of the opening 9 is provided with an anti-slip card 18, and the anti-slip card 18 covers the opposite surface of the opening 9 and the limiting card slot 11, and the connection between the anti-slip card 18 and the inner wall of the ceramic ring 7 is arc-shaped. The anti-slip card 18 is connected to the low-thickness side close to the fixed groove 10. Specifically, in the process of adjusting and rotating the card holder 6, in order to prevent the heating wire 4 from falling off from the card holder 6 (slipping may occur under the tight state), the heating wire 4 can be prevented from sliding out of the opening 9. The provision of the anti-slip card 18 can prevent the heating wire 4 from accidentally sliding out and ensure that the heating wire 4 does not contact the inner frame 2. If the heating wire 4 falls off from the limiting card slot 11, the heating wire 4 can only slide out toward the lower part of the fixed groove 10, so the connecting end of the anti-slip card 18 is connected to the low-thickness side of the fixed groove 10.

[0037] Of course, the present invention may have many other embodiments. Without departing from the spirit and essence of the present invention, those skilled in the art may make various corresponding changes and modifications based on the present invention, but these corresponding changes and modifications should all fall within the scope of protection of the claims attached to the present invention.

Claims

1. An adjustable pressure heating furnace, comprising a furnace body (1) for heating a kettle body, the furnace body (1) comprising an inner frame (2) and an outer frame (3), a heating wire (4) being arranged around the inner frame (2) and the outer frame (3), characterized in that: A slide groove (5) is provided around the side wall of the inner frame (2), and a plurality of clamping seats (6) are slidably connected to the slide groove (5). A plurality of ceramic rings (7) are sleeved on the heating wire (4), and the plurality of ceramic rings (7) and the plurality of clamping seats (6) are respectively correspondingly clamped. An operation through hole (8) is provided on the side wall of the outer frame (3), and the heating wire (4) is led out from the operation through hole (8) to be connected to an external power supply.

2. The adjustable pressure heating furnace according to claim 1, characterized in that: The ceramic ring (7) is a movable ceramic ring with an opening (9) provided on its side wall. The width of the opening (9) is the same as the diameter of the heating wire (4). The inner side wall of the ceramic ring (7) is also provided with a fixing groove (10), and the fixing groove (10) is arranged opposite to the opening (9).

3. The adjustable pressure heating furnace according to claim 2, characterized in that: The fixing groove (10) is arranged in a stepped structure along the inner side wall of the ceramic ring (7), and limiting clamping grooves (11) are arranged at equal intervals on the fixing groove (10), and the groove surface of the limiting clamping groove (11) has the same diameter as the heating wire (4).

4. The adjustable pressure heating furnace according to claim 1, characterized in that: The plurality of card seats (6) are arranged at equal intervals, and the plurality of card seats (6) are fixedly connected via a connecting ring (12).

5. The adjustable pressure heating furnace according to claim 4, characterized in that: A rotating lever (13) is provided on the connecting ring (12), and the vertical height of the rotating lever (13) corresponds to that of the operating through hole (8).

6. The adjustable pressure heating furnace according to claim 1, characterized in that: Limit baffles (14) are provided on both sides of the holder (6), and the outer diameter of the ceramic ring (7) is equal to the distance between the limit baffles (14) on both sides.

7. The adjustable pressure heating furnace according to claim 1, characterized in that: The operating through hole (8) is provided with a mounting seat (15), and the mounting seat (15) is provided with an operating window (1501) and a mounting window (1502). The heating wire (4) passes through the mounting window (1502) and is led to the outside. The operating window (1501) is provided with an openable and closable cover plate (16).

8. The adjustable pressure heating furnace according to claim 1, characterized in that: The outer frame (3) is also provided with a thermocouple for measuring temperature, and the thermocouple is connected to the outside via a flexible wire.

9. A method for using the adjustable pressure heating furnace according to any one of claims 1 to 8, characterized in that: The following steps are involved: S1: Assembly preparation, several ceramic rings (7) are placed on the heating wire (4), and the several ceramic rings (7) are respectively connected to the multiple clamping seats (6) in a one-to-one correspondence, and the fixing groove (10) of the ceramic ring (7) is facing the inner frame, so that the heating wire (4) is clamped in the middle section of the fixing groove (10), and the end of the heating wire (4) is led out through the operating through hole (8) and connected to the power supply; S2: Replace the ceramic ring (7), open the cover plate (16) of the operating through hole (8), drive the connecting ring (12) by rotating the lever (13), and then drive all the card seats (6) to rotate along the slide groove (5), and any ceramic ring (7) passes through the opening (9) of the ceramic ring (7) when passing the end of the heating wire (4), until the ceramic ring (7) to be replaced moves to the position of the operating through hole (8), rotate the ceramic ring (7) so that the opening (9) of the ceramic ring (7) faces the inner frame, and pull the ceramic ring (7) out horizontally through the side wall opening (9), and replace it with a new ceramic ring (7); S3: Replace the heating wire, separate the end of the heating wire (4) from the wire connected to the power supply, take a new heating wire (4) and fix it to one end of the old heating wire (4), that is, connect one end of the new heating wire (4) to one end of the old heating wire (4) by bundling or external clamping components, then pull one end of the old heating wire (4) outward until the new heating wire (4) completely enters between the inner frame (2) and the outer frame (3), then separate the new heating wire (4) from the old heating wire (4), and connect the new heating wire (4) to the wire connected to the power supply to complete the replacement; S4: Uneven heating. When the thermocouple detects abnormal temperature, the connecting ring (12) is driven by rotating the lever (13) to rotate the ceramic ring (7) in the abnormal area to the operating through hole (8). The ceramic ring (7) is adjusted by rotating to hold the heating wire in different limit slots (11) according to the abnormal temperature value. The thickness of the fixing slots (10) at different positions is different, thereby controlling the distance between the heating wire and the kettle body.

10. The method of use according to claim 9, characterized in that: In the above step S1, the distance between any two of the limiting slots (11) allows the heating wire (4) to remain suspended in the air, avoiding contact with the inner frame (2) or the outer frame (3).

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