A dynamic probe alignment test structure

Abstract

The application discloses a dynamic probe alignment testing structure, aiming to provide a dynamic probe alignment testing structure with simple structure, product-implementation multiple groups of probes independent dynamic adjustment and higher needle precision. The application comprises a support frame, a pushing-out module, a jacking and side pushing module, a probe module and a clamping jaw module, the support frame is connected with the movable end of the pushing-out module, the jacking and side pushing module is arranged at the bottom of the support frame, the probe module is arranged at one side of the top of the support frame, the clamping jaw module is arranged at the movable end of the jacking and side pushing module, and the jacking and side pushing module drives the clamping jaw module to cooperate with the probe module. The application is applied to the technical field of probe positioning.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of probe positioning, and particularly relates to a dynamic probe alignment test structure. BACKGROUND

[0002] In the field of semiconductor testing, a probe card is a key component for connecting a chip tester and a chip, and its core function is to transmit test signals by contacting the chip pad with a probe. The traditional probe card adopts a fixed point probe layout, that is, the position of the probe is determined during manufacturing and cannot be dynamically adjusted. Electromagnetic drive probes rely on the magnetic field generated by the current through the coil to drive the probe to move. In high-frequency testing, electromagnetic noise will be coupled into the measured signal, resulting in test errors (such as EVM deterioration and noise floor lifting). Electromagnetic drive requires space to arrange coils and magnets, making it difficult to achieve a probe spacing of less than 0.3 mm, which cannot meet the testing needs of high-density pad chips. Moreover, electromagnetic drive requires continuous current to maintain the probe position, and the power consumption of 100 probes working simultaneously is too large, causing heat dissipation problems. Due to the inherent limitations of its physical driving principle and structural design: physical limitations of electromagnetic drive, the magnetic field strength decays with distance: the electromagnetic force decreases sharply with the increase of the moving distance of the probe, resulting in insufficient driving force after more than 50 μm; dependence on spring return: electromagnetic drive usually adopts a spring return mechanism, and high-stiffness springs limit displacement (<30 μm); low-stiffness springs allow larger displacement, but are prone to oscillation.

[0003] For example, the Chinese patent with the application number "202322979523.2" discloses a probe adjusting assembly and a probe station. The probe adjusting assembly is applied to the probe station, and the probe adjusting assembly is connected to the probe through a probe arm. The probe adjusting assembly includes a base, a moving assembly, a first guide rail assembly, and a first elastic assembly. The moving assembly is carried on the base and can move relative to the base along a first direction. The moving assembly is used to connect the probe arm of the probe station. The first guide rail assembly includes a first guide rail and a second guide rail that are slidingly connected. The first guide rail is fixed to the base, and the second guide rail is fixed to the moving assembly and can slide relative to the first guide rail along the first direction. The first elastic assembly has a number of at least two. The first elastic assembly includes a first fixed column, a first elastic piece, and a second fixed column that are connected in sequence. The first fixed column is connected to the base, and the second fixed column is connected to the moving assembly. The first elastic piece extends along the first direction. This application realizes the movement of the probe station through a plurality of elastic pieces and sliding rails, thereby achieving the function of adjusting and positioning. However, it cannot independently adjust the spacing between each group of probes. If a dynamic probe alignment test structure with simple structure, product implementation of multiple independent dynamic adjustments of probes, and higher needle precision can be designed, the above problems can be solved. SUMMARY

[0004] The technical problems to be solved by the present application are to overcome the shortcomings of the prior art, and to provide a dynamic probe alignment test structure with simple structure, multiple groups of probes that can be independently dynamically adjusted, and higher needle precision.

[0005] The technical scheme adopted by the present application is: the present application comprises a support frame, a pushing-out module, a jacking and side-pushing module, a probe module and a clamping jaw module, the support frame is connected with the movable end of the pushing-out module, the jacking and side-pushing module is arranged at the bottom of the support frame, the probe module is arranged at one side of the top of the support frame, the clamping jaw module is arranged at the movable end of the jacking and side-pushing module, and the jacking and side-pushing module drives the clamping jaw module to cooperate with the probe module.

[0006] Further, the probe module comprises a probe bottom plate, a plurality of sliding shafts, a plurality of horizontal shift tabs and a plurality of probes, the probe bottom plate is arranged at one side of the top of the support frame, a plurality of the sliding shafts are arranged on the upper end of the probe bottom plate, a plurality of the horizontal shift tabs are in sliding cooperation with a plurality of the sliding shafts, a plurality of the probes are connected with the end portions of a plurality of the horizontal shift tabs, the probe bottom plate is provided with a through groove, and the clamping jaw end of the clamping jaw module cooperates with a plurality of the horizontal shift tabs through the through groove.

[0007] Further, the jacking and side-pushing module comprises a jacking module, a jacking frame, a side-pushing module and a clamping jaw module, the jacking module is arranged at the bottom of the support frame, and the side-pushing module is connected with the movable end of the jacking module through the jacking frame.

[0008] Further, the clamping jaw module comprises a clamping jaw sliding block, a clamping plate base, a clamping plate and a micro air cylinder, the clamping jaw sliding block is connected with the outer side of the jacking frame through a linear guide rail, the movable end of the side-pushing module cooperates with the clamping jaw sliding block, the clamping jaw clamping plate base is arranged at one side of the clamping jaw sliding block, the clamping plate is floatingly connected with the clamping plate base through a floating spring, and the micro air cylinder is arranged in the clamping jaw sliding block and drives the clamping plate to cooperate with the clamping plate base.

[0009] Further, a plurality of downward pressing positioning modules are arranged at the top of the support frame, the downward pressing positioning module comprises a rotating motor, a lead screw, a lead screw sliding block and a cylinder downward pressing module, the lead screw is connected with the movable end of the rotating motor, the lead screw sliding block cooperates with the lead screw, and the cylinder downward pressing module is connected with the lower end of the lead screw sliding block, and a plurality of groups of the cylinder downward pressing modules cooperate with the upper ends of a plurality of corresponding horizontal shift tabs.

[0010] Further, the under-cylinder pressing module comprises a pressing support base, a pressing block and a pressing diaphragm cylinder, the pressing support base is arranged at the lower end of the screw sliding block, the pressing block is floatingly connected with the lower end surface of the pressing support base, and the pressing diaphragm cylinder is arranged at the lower end surface of the pressing support base and drives the pressing block to cooperate with the upper ends of the plurality of transverse shifting pieces.

[0011] Further, the upper end of the pressing support base is provided with a micro air pipe joint matched with the pressing diaphragm cylinder.

[0012] Further, the end of the transverse shifting piece is provided with a ceramic piece.

[0013] Further, one side of the jacking frame is provided with a sensor, and one side of the clamping jaw sliding block is provided with a sensing baffle matched with the sensor.

[0014] Further, the jacking frame is provided with a reading head.

[0015] The beneficial effects of the present application are: the present application adopts mechanical driving, does not need electromagnetic field, eliminates EMI interference from the source, supports 0.15mm ultra-fine pitch, adapts to high-density layout, mechanical driving only consumes power during adjustment, static power consumption is close to zero, overall power consumption is reduced by 80%, and mechanical clamping jaw is used to drive metal parts to realize probe displacement, each probe is fixed on a micro metal sliding block, the sliding block is grabbed by high-precision clamping jaw, and the probe is driven by a linear motor to move and position. The displacement range is determined by the stroke of the linear motor, and >100μm adjustment can be easily realized. The structure is simple, and the applicability is strong. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a perspective view of the present application;

[0017] Figure 2 is a perspective view of another view of the present application;

[0018] Figure 3 is a perspective view of the jacking and side pushing module;

[0019] Figure 4 is a perspective view of the clamping jaw module;

[0020] Figure 5 is a perspective view of the clamping plate;

[0021] Figure 6 is a perspective view of the probe module;

[0022] Figure 7 is a perspective view of another view of the probe module;

[0023] Figure 8is a perspective view of the lower pressing positioning module;

[0024] Figure 9 is a perspective view of the cylinder lower pressing module. DETAILED DESCRIPTION

[0025] As Figures 1 to 9 shown, in this embodiment, the present application comprises a support frame 1, a pushing-out module 2, a jacking and side pushing module 3, a probe module 4, and a clamping jaw module 5, the support frame 1 is connected with the movable end of the pushing-out module 2, the jacking and side pushing module 3 is arranged at the bottom of the support frame 1, the probe module 4 is arranged at one side of the top of the support frame 1, the clamping jaw module 5 is arranged at the movable end of the jacking and side pushing module 3, and the jacking and side pushing module 3 drives the clamping jaw module 5 to cooperate with the probe module 4. As can be seen, the present application adopts mechanical driving, does not need electromagnetic field, eliminates EMI interference from the source, supports 0.15mm ultra-fine pitch, adapts to high-density layout, the mechanical driving only consumes power when adjusting, the static power consumption is close to zero, the overall power consumption is reduced by 80%, and the probe displacement is realized by driving the metal parts by the mechanical clamping jaw, each probe is fixed on a micro metal slider, the slider is grabbed by high-precision clamping jaws, and the probe is driven by a linear motor to move and position. The displacement range is determined by the stroke of the linear motor, and >100μm adjustment can be easily realized. The structure is simple and has strong applicability.

[0026] As Figure 4 and Figure 5 shown, in this embodiment, the probe module 4 comprises a probe bottom plate 41, a plurality of sliding shafts 42, a plurality of transverse moving tabs 43, and a plurality of probes 44, the probe bottom plate 41 is arranged at one side of the top of the support frame 1, the plurality of sliding shafts 42 are arranged at the upper end of the probe bottom plate 41, the plurality of transverse moving tabs 43 are in sliding cooperation with the plurality of sliding shafts 42, and the plurality of probes 44 are connected with the end portions of the corresponding transverse moving tabs 43, the probe bottom plate 41 is provided with a through groove 45, and the clamping jaw end of the clamping jaw module 5 is in cooperation with the plurality of transverse moving tabs 43 through the through groove 45. As can be seen, the movement of the transverse moving tab 43 is realized by the clamping jaw module 5 below, a plurality of groups of the transverse moving tabs 43 are arranged in stack and in sliding cooperation with the sliding shafts 42, the independent adjustment of each group of the transverse moving tabs 43 can be realized, so that the gap of the plurality of probes 44 is adjusted, and the positioning effect is achieved.

[0027] As Figure 3As shown, in this embodiment, the lifting and pushing module 3 includes a lifting module 31, a lifting frame 32, a pushing module 33, and a gripper module 34. The lifting module 31 is disposed at the bottom of the support frame 1, and the pushing module 33 is connected to the movable end of the lifting module 31 through the lifting frame 32. Therefore, the lifting module 31 adjusts the gripper module 34 to achieve lifting and lowering, and it engages with the transverse sliding plate 43 for gripping. The pushing module 33 drives the gripper module 34 to align with the corresponding probe 44.

[0028] like Figure 4 As shown, in this embodiment, the gripper module 5 includes a gripper sliding block 51, a clamping plate base 52, a clamping plate 53, and a micro cylinder 54. The gripper sliding block 51 is connected to the outer side of the lifting frame 32 via a linear guide rail 55. The movable end of the side push module 33 cooperates with the gripper sliding block 51. The clamping plate base 52 is disposed on one side of the gripper sliding block 51. The clamping plate 53 is floatingly connected to the clamping plate base 52 via a floating spring 56. The micro cylinder 54 is disposed on the gripper sliding block 51 and drives the clamping plate 53 to cooperate with the clamping plate base 52. Therefore, the micro cylinder 54 drives the clamping plate 53 to cooperate with the clamping plate base 52, achieving a clamping or releasing effect, thereby realizing the gripping and movement of the transverse sliding lever 43.

[0029] like Figure 1 and Figure 8 As shown, in this embodiment, the top of the support frame 1 is provided with several pressing and positioning modules 6. Each pressing and positioning module 6 includes a rotary motor 61, a lead screw 62, a lead screw sliding block 63, and a cylinder pressing module 64. The lead screw 62 is connected to the movable end of the rotary motor 61, the lead screw sliding block 63 cooperates with the lead screw 62, and the cylinder pressing module 64 is connected to the lower end of the lead screw sliding block 63. Several sets of cylinder pressing modules 64 cooperate with the upper ends of several corresponding transverse shifting tabs 43. Thus, the rotary motor 61 drives the lead screw 62 to rotate, causing the lead screw sliding block 63 to move laterally, and drives the cylinder pressing module 64 to achieve precise positioning and pressing with the several transverse shifting tabs 43 on the probe base plate 41.

[0030] like Figure 9As shown in the embodiment, the cylinder down module 64 comprises a down support seat 641, a down block 642 and a down film cylinder 643. The down support seat 641 is arranged at the lower end of the screw sliding block 63. The down block 642 is in floating connection with the lower end surface of the down support seat 641. The down film cylinder 643 is arranged at the lower end surface of the down support seat 641 and drives the down block 642 to cooperate with the upper ends of the plurality of horizontal moving pushers 43. Thus, the movable end of the down film cylinder 643 extends to drive the down block 642 to press down, so that the horizontal moving pusher 43 which has completed the clamping adjustment realizes the pressing and positioning.

[0031] As shown in the embodiment, the down support seat 641 is provided with a micro air pipe joint 7 at the upper end. The micro air pipe joint 7 cooperates with the down film cylinder 643. Thus, the micro air pipe joint 7 realizes the air pressure adjustment, so that the down film cylinder 643 realizes the pressing down or resetting. Figure 9 As shown in the embodiment, the horizontal moving pusher 43 is provided with a ceramic sheet 8 at the end. Thus, the probe 44 is pasted on the ceramic sheet 8 through UV glue. The ceramic sheet 8 is pasted on the corresponding horizontal moving pusher 43 through UV glue. The displacement of the horizontal moving pusher 43 drives the displacement of the probe 44.

[0032] Figure 6 As shown in the embodiment, the top lifting frame 32 is provided with a sensor 9 at one side. The clamping jaw sliding block 51 is provided with a sensing baffle 10 at one side. The sensing baffle 10 cooperates with the sensor 9 in sensing. Thus, the sensor 9 can sense the horizontal displacement of the top lifting side pushing module 3. In cooperation with the external visual positioning system, the alignment accuracy is higher.

[0033] As shown in the embodiment, the top lifting frame 32 is provided with a reading head 11. Thus, the reading head 11 can realize the recording of the positioning times. Figure 3

[0034] As shown in the embodiment, the top lifting frame 32 is provided with a reading head 11. Thus, the reading head 11 can realize the recording of the positioning times. Figure 3

[0035] ​​​The working principle of the present application: before the equipment starts, the initial state action, the clamping jaw module 34 drives the leftmost horizontal shift of the shift piece 43 to move all the horizontal shift of the shift piece 43 to the right for storage, selects the Pad point to be tested in the operation interface, takes a picture of the product Pad point position and the front probe position through the upper camera, calculates the distance that several probes 44 need to move, the clamping jaw module 34 drives the first group of horizontal shift of the shift piece 43 to move to the position of the first Pad point of the product, the screw sliding block 63 drives the horizontal shift of the cylinder down pressure module 64, the down pressure film cylinder 643 is ventilated to drive the down pressure block 642 to down pressure, so that the first group of horizontal shift of the shift piece 43 realizes positioning, the clamping jaw module 34 resets and moves to the lower end of the second group of horizontal shift of the shift piece 43, repeats the above steps to realize the positioning of the second group of horizontal shift of the shift piece 43, the down pressure block 642 down pressure again to the positioning of the two groups of horizontal shift of the shift piece 43, after the positioning of several groups of probes 44 and product Pad points is completed, the external lifting mechanism drives the product to rise and connect, realizes the independent dynamic positioning of multiple probes.

[0036] Although the embodiments of the present application are described in actual schemes, but does not constitute the limitation to the meaning of the present application, for the person skilled in the art, according to the modification of the embodiments thereof and the combination with other schemes in the present application are obvious.

Claims

1. A dynamic probe alignment test structure, comprising a support frame (1), a push-out module (2), a jacking and pushing module (3), a probe module (4) and a clamping jaw module (5), characterized in that: The support frame (1) is connected with the movable end of the pushing-out module (2), the jacking and side pushing module (3) is arranged at the bottom of the support frame (1), the probe module (4) is arranged at one side of the top of the support frame (1), the clamping jaw module (5) is arranged at the movable end of the jacking and side pushing module (3), the jacking and side pushing module (3) drives the clamping jaw module (5) to cooperate with the probe module (4); the probe module (4) comprises a probe bottom plate (41), a plurality of sliding shafts (42), a plurality of horizontal moving push plates (43) and a plurality of probes (44), the probe bottom plate (41) is arranged at one side of the top of the support frame (1), a plurality of the sliding shafts (42) are arranged at the upper end of the probe bottom plate (41), a plurality of the horizontal moving push plates (43) are in sliding cooperation with a plurality of the sliding shafts (42), a plurality of the probes (44) are connected with the end portions of a plurality of the horizontal moving push plates (43) corresponding thereto, the probe bottom plate (41) is provided with a through groove (45), and the clamping jaw end of the clamping jaw module (5) is matched with a plurality of the horizontal moving push plates (43) through the through groove (45). The jacking and side pushing module (3) comprises a jacking module (31), a jacking frame (32), a side pushing module (33) and a clamping jaw module (34), the jacking module (31) is arranged at the bottom of the support frame (1), and the side pushing module (33) is connected with the movable end of the jacking module (31) through the jacking frame (32).

2. The dynamic probe alignment test structure of claim 1, wherein: The clamping jaw module (5) comprises a clamping jaw sliding block (51), a clamping plate base (52), a clamping plate (53) and a micro air cylinder (54), the clamping jaw sliding block (51) is connected with the outer side of the jacking frame (32) through a linear guide rail (55), the movable end of the side pushing module (33) is matched with the clamping jaw sliding block (51), the clamping plate base (52) is arranged at one side of the clamping jaw sliding block (51), the clamping plate (53) is floatingly connected with the clamping plate base (52) through a floating spring (56), and the micro air cylinder (54) is arranged in the clamping jaw sliding block (51) and drives the clamping plate (53) to cooperate with the clamping plate base (52).

3. The structure of claim 1, wherein: A plurality of downward pressing positioning modules (6) are arranged at the top of the support frame (1), the downward pressing positioning module (6) comprises a rotating motor (61), a lead screw (62), a lead screw sliding block (63) and a cylinder downward pressing module (64), the lead screw (62) is connected with the movable end of the rotating motor (61), the lead screw sliding block (63) is matched with the lead screw (62), the cylinder downward pressing module (64) is connected with the lower end of the lead screw sliding block (63), and a plurality of groups of the cylinder downward pressing module (64) are matched with a plurality of the horizontal moving push plates (43) corresponding thereto.

4. The dynamic probe positioning test structure of claim 3, wherein: The under-cylinder pressing module (64) comprises a pressing support base (641), a pressing block (642) and a pressing diaphragm cylinder (643), the pressing support base (641) is arranged at the lower end of the screw sliding block (63), the pressing block (642) is in floating connection with the lower end surface of the pressing support base (641), and the pressing diaphragm cylinder (643) is arranged at the lower end surface of the pressing support base (641) and drives the pressing block (642) to cooperate with the upper ends of the transverse shifting tabs (43).

5. The dynamic probe alignment test structure of claim 4, wherein: A micro air pipe joint (7) is arranged at the upper end of the pressing support base (641) and cooperates with the pressing diaphragm cylinder (643).

6. The structure of claim 1, wherein: A ceramic piece (8) is arranged at the end of the transverse shifting tab (43).

7. The structure of claim 2, wherein: A sensor (9) is arranged at one side of the jacking frame (32), an inductive baffle (10) is arranged at one side of the clamping jaw sliding block (51), and the inductive baffle (10) inductively cooperates with the sensor (9).

8. The structure of claim 2, wherein: The jacking frame (32) is provided with a reading head (11).

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