Molecular pump water cooling device, manufacturing method thereof and molecular pump

Abstract

The invention discloses a molecular pump water cooling device, a manufacturing method thereof and a molecular pump. The molecular pump water-cooling device comprises a water-cooling seat and a water-cooling cover, wherein one side of the water-cooling seat is provided with an annular cooling surface attached to a to-be-cooled surface of a molecular pump; and the water cooling pipe is arranged in the water cooling seat, and the water cooling pipe is of an annular structure which is concentric with the annular cooling surface. Wherein the annular cooling surface is divided into an outer side annular surface and an inner side annular surface at equal intervals in the radial direction, and the diameter size value of the center circle of the water-cooled pipe is set to be within a preset range, so that the water-cooled pipe is constructed to be located on the outer side annular surface and close to the inner side annular surface. According to the molecular pump water cooling device, the refrigeration effect can be improved, the damage rate can be reduced, and the function stability can be provided.

Description

Technical Field

[0001] The embodiments of the present invention relate to the technical field of pump cooling, and more specifically, to a molecular pump water cooling device, a manufacturing method thereof, and a molecular pump. Background Art

[0002] Magnetic levitation molecular pumps are highly sought after for their efficient and pollution-free pumping performance and are widely used in environmentally demanding applications such as semiconductor manufacturing and vacuum coating. To ensure stable operation and extend the service life of magnetic levitation molecular pumps, precise control of the pump body temperature is crucial. Currently, magnetic levitation molecular pumps generally use a water cooling device in conjunction with a heating system to achieve precise temperature control of the pump body. As the core component of the cooling system, the water cooling device's main function is to quickly activate the cooling mechanism when the pump body temperature exceeds a set threshold, removing heat from the pump body through circulating coolant, thereby achieving rapid cooling.

[0003] However, in actual application, the water cooling devices in the existing technology are often affected by problems such as slow cooling process and frequent water leakage, which not only directly threatens the electrical safety of the equipment, but also may cause pollution to the surrounding environment, increase maintenance costs and downtime.

[0004] Therefore, those skilled in the art are in urgent need of seeking a molecular pump water cooling device and a manufacturing method thereof, and a molecular pump to improve its refrigeration effect, reduce its damage rate, and provide its functional stability. Summary of the Invention

[0005] In order to solve one or more of the technical problems mentioned above, the present invention provides a molecular pump water cooling device and a manufacturing method thereof, and a molecular pump.

[0006] According to a first aspect of the present invention, a molecular pump water cooling device is provided. The molecular pump water cooling device comprises: a water cooling seat having an annular cooling surface formed on one side thereof for contacting with a surface to be cooled of the molecular pump; and a water cooling tube disposed within the water cooling seat, the water cooling tube being an annular structure concentrically disposed with the annular cooling surface. The annular cooling surface is equidistantly divided into an outer annular surface and an inner annular surface along the radial direction, and the central diameter of the water cooling tube is set within a predetermined range so that the water cooling tube is located on the outer annular surface while being close to the inner annular surface.

[0007] In some embodiments, the diameter of the cross-sectional circle of the water-cooling tube is A, the distance between the center of the cross-sectional circle of the water-cooling tube and the annular cooling surface is L, L = 1.3xA, the width of the annular cooling surface is B, and the radial distance between the center of the cross-sectional circle of the water-cooling tube and the inner side edge of the annular cooling surface ranges from 0.55B to 0.7B.

[0008] In some embodiments, the inner diameter of the annular cooling surface ranges from 236 mm to 242 mm, the outer diameter of the annular cooling surface ranges from 315 mm to 325 mm, and the central diameter of the water-cooling pipe ranges from 287 mm to 293 mm.

[0009] In some embodiments, a water pipe joint is also included, on which a water inlet joint and a water outlet joint are provided. The water inlet joint and the water outlet joint are respectively connected to the two ends of the water cooling pipe and welded and fixed, wherein the water cooling pipe and the water pipe joint are made of the same metal material.

[0010] In some embodiments, the water cooling pipe and the water pipe joint are made of stainless steel.

[0011] According to a second aspect of the present invention, a method for manufacturing the molecular pump water cooling device is provided. The method comprises the following steps: Step 1, providing a water cooling seat and a water cooling tube; Step 2, obtaining a range of diameters of the center circle of the water cooling tube through simulation analysis.

[0012] In some embodiments, the simulation analysis steps include: selecting water-cooling pipes with different center circle diameters; setting simulation parameters of the water-cooling seat and the water-cooling pipe; transient analysis; and comparing results with different center circle diameters to obtain the position of the water-cooling pipe.

[0013] In some embodiments, the water cooling seat and the water cooling pipe are fixed into an integral structure through an integral casting process.

[0014] In some embodiments, the manufacturing method further includes providing a water pipe joint made of the same metal material as the water cooling pipe, and fixing the water cooling pipe and the water pipe joint together by argon arc welding.

[0015] According to a third aspect of the present invention, a molecular pump is provided, which includes the molecular pump water cooling device described above.

[0016] By using the molecular pump water cooling device provided above, compared to the prior art, this application integrates multiple annular cooling surfaces of different heights into a unified plane, ensuring that the entire plane can closely fit the surface of the pump body when it is attached to the pump body. This design significantly increases the contact area of ​​the tight fit, effectively improving the heat transfer efficiency, thereby enhancing the cooling effect of the water cooling seat. In addition, placing the water cooling tube on the annular cooling surface of the overall plane further improves the effective cooling performance of the water cooling seat. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and other objects, features and advantages of the exemplary embodiments of the present invention will become readily understood by reading the following detailed description with reference to the accompanying drawings. In the accompanying drawings, several embodiments of the present invention are shown in an illustrative and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0018] Figure 1 A schematic cross-sectional view of the structure of a molecular pump water cooling device according to an embodiment of the present invention;

[0019] Figure 2 for Figure 1 A schematic diagram of the top view of the molecular pump water cooling device shown;

[0020] Figure 3 A schematic diagram of the connection between the molecular pump water cooling device and the molecular pump according to an embodiment of the present invention;

[0021] Figure 4 It is a schematic diagram of the connection between the molecular pump water cooling device and the molecular pump in the prior art;

[0022] Figure 5 It is a schematic cross-sectional view of the structure of a molecular pump water cooling device in the prior art;

[0023] Figure 6 A flow chart of a method for manufacturing a molecular pump water cooling device according to an embodiment of the present invention;

[0024] Figures 7a to 7c for Figure 2 The simulation results of the annular cooling surface are shown, with screenshots of the results for three different diameters compared;

[0025] Figures 8a to 8c for Figure 1 The simulation results of the structural cross-section of the water cooling seat are shown, which shows the comparison of the result screenshots of three different diameters. DETAILED DESCRIPTION

[0026] The following will be combined with the accompanying drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the embodiments described are part of the embodiments of the present disclosure, not all of them. Based on the embodiments of the present disclosure, all other embodiments obtained by those skilled in the art without making any creative efforts shall fall within the scope of protection of the present disclosure.

[0027] Figure 1 and Figure 2 The structure of a molecular pump water cooling device 100 according to an embodiment of the present invention is shown. Figure 3 FIG1 shows a connection diagram of a molecular pump water cooling device 100 and a molecular pump 200 according to an embodiment of the present invention. Figures 1 to 3As shown, the molecular pump water cooling device 100 includes: a water cooling seat 1, one side of which is formed with an annular cooling surface 11 for being arranged in contact with the surface to be cooled of the molecular pump 200; and a water cooling tube 2, which is arranged in the water cooling seat 1 and is constructed as an annular structure arranged concentrically with the annular cooling surface 11. The annular cooling surface 11 is divided into an outer annular surface 111 and an inner annular surface 112 at equal intervals along the radial direction. The center circle diameter D3 of the water cooling tube 2 is set to a preset range so that the water cooling tube 2 is configured to be located on the outer annular surface 111 and close to the inner annular surface 112.

[0028] When the molecular pump water cooling device 100 according to the embodiment of the present invention is used, the molecular pump water cooling device 100 is fixed to the molecular pump 200 pump body. Under normal conditions, the surface to be cooled of the molecular pump 200 pump body is an annular surface, and the annular cooling surface 11 is fitted with the surface to be cooled of the molecular pump 200 pump body. The connection between the annular cooling surface 11 and the molecular pump 200 pump body is tightly fitted to provide a better cooling effect. In this application, the size value of the center circle diameter D3 of the water-cooling tube 2 is set to a preset range, so that the water-cooling tube 2 can be located at the outer annular surface 111 and close to the inner annular surface 112 (combined with Figure 3 As shown). Through simulation, it is found that at the same position from the annular cooling surface 11, the water-cooling tube 2 is located at this position due to the preset center circle diameter D3, and can provide a maximum cooling effect to the annular cooling surface 11. This maximum cooling effect can be transmitted to the pump body of the molecular pump 200 through the annular cooling surface 11, thereby providing an optimal cooling effect to the pump body of the molecular pump 200.

[0029] Figure 4 The figure shows the connection between the molecular pump water cooling device 300 and the molecular pump 200 in the prior art. Figure 5 The structure of the molecular pump water cooling device 300 in the prior art is shown. Figure 4 and Figure 5 As shown, the water-cooling seat 300 in the prior art usually includes a plurality of annular cooling surfaces 301 of different heights. When the plurality of annular cooling surfaces 301 of different heights come into contact with the pump body, it is difficult to ensure that each annular cooling surface 301 is in a tightly fitted state with the pump body. In the present application, on the one hand, by integrating a plurality of annular cooling surfaces 11 of different heights into a unified plane, it is ensured that the entire plane can be tightly fitted to the surface of the pump body when fitted and fixed to the pump body. This design significantly increases the tightly fitted contact area, effectively improves the heat conduction efficiency, and thus enhances the cooling effect of the water-cooling seat 1. On the other hand, the plurality of annular cooling surfaces 301 of different heights will also affect the setting position of the water-cooling tube 2 in the water-cooling seat 1, and the setting of the position of the water-cooling tube 2 can directly affect the cooling effect. In the present application, the water-cooling tube 2 is placed on the annular cooling surface 11 of the overall plane, which further improves the effective cooling performance of the water-cooling seat 1.

[0030] Please refer to Figure 1 In some embodiments, the diameter of the cross-sectional circle of the water-cooling tube 2 is A, the distance between the center of the cross-sectional circle of the water-cooling tube 2 and the annular cooling surface 11 is L, L=1.3xA, the width of the annular cooling surface 11 is B, and the radial distance C between the center of the cross-sectional circle of the water-cooling tube 2 and the inner side edge of the annular cooling surface 11 ranges from 0.55B to 0.7B.

[0031] In the present application, the location of the water-cooling tube 2 is further limited, which defines the positional relationship between the water-cooling tube 2 and the annular cooling surface 11. Through simulation verification, it can be seen that, through the above calculation method, the location of the water-cooling tube 2 in the water-cooling seat 1 can achieve the optimal cooling effect, thereby making the molecular pump water cooling device 100 of the embodiment of the present invention have better cooling effect and wider applicability.

[0032] In some embodiments, the inner diameter D1 of the annular cooling surface 11 ranges from 236 mm to 242 mm, the outer diameter D2 of the annular cooling surface 11 ranges from 315 mm to 325 mm, and the central diameter D3 of the water-cooling pipe 2 ranges from 287 mm to 293 mm, preferably 290 mm.

[0033] In the present application, the optimal value of the center circle diameter D3 of the water-cooling tube 2 is obtained in combination with the design dimensions of the water-cooling seat 1 in the prior art, so as to improve the cooling effect of the water-cooling seat 1 in the prior art.

[0034] In some embodiments, a water pipe joint (not shown in the figure) is also included, and a water inlet joint and a water outlet joint are provided on the water pipe joint. The water inlet joint and the water outlet joint are respectively connected to the two ends of the water cooling pipe 2 and welded and fixed, wherein the water cooling pipe 2 and the water pipe joint are made of the same metal material.

[0035] In this application, the water pipe joint and the water cooling pipe 2 are fixed together by welding. In this way, the same metal material is selected for the two. During the welding process, due to the same properties of the two, the stability after welding is better, so that the water cooling pipe 2 and the water pipe joint are not easily damaged after being connected, causing liquid leakage.

[0036] In some embodiments, the water-cooling tube 2 and the water pipe connector can be made of stainless steel, preferably 306 stainless steel. This configuration improves the connection strength and stability between the water-cooling tube 2 and the water pipe structure. Furthermore, stainless steel's enhanced corrosion resistance makes the molecular pump water cooling device 100 of the present invention more suitable for use in highly corrosive environments.

[0037] Figure 6The flow chart of a manufacturing method 400 for a molecular pump water cooling device 100 according to an embodiment of the present invention is shown. The manufacturing method 400 includes the following steps: Step 1 S1, providing a water cooling seat 1 and a water cooling tube 2; Step 2 S2, obtaining a range of the center circle diameter of the water cooling tube 2 through simulation analysis.

[0038] In some embodiments, the simulation analysis steps include: selecting water-cooling tubes 2 with different center circle diameters; setting simulation parameters of the water-cooling seat 1 and the water-cooling tube 2; transient analysis; and comparing results with different center circle diameters to obtain the position of the water-cooling tube 2.

[0039] In this application, the purpose of this simulation is to analyze the influence of the position of the water-cooling pipe 2 on the heat dissipation capacity of the water-cooling seat 1 by comparing the temperature distribution of the water-cooling seat 1 when the center circle of the water-cooling pipe 2 has different diameters.

[0040] The specific process of simulation analysis is as follows:

[0041] Based on the prior art molecular pump water cooling device 100, water-cooling tubes 2 with different center diameters D3 were selected. In the prior art, the inner diameter D1 of the annular cooling surface 11 ranges from 239 mm to 320 mm, while the outer diameter D2 of the annular cooling surface 11 ranges from 320 mm. The center diameter D3 of the water-cooling tube 2 is φ304 mm. In this simulation analysis, three different diameters, φ304, φ290, and φ280, were selected for comparative analysis. The following is the analysis process and results:

[0042] Boundary Conditions and Meshing: 6061 was selected as the casting material for the water-cooling tube 2 and the water pipe joint. The fluid domain inlet of the water pipe joint had an inlet volume flow rate of 3 L / min, the outlet was at ambient pressure, the inlet water temperature was 20.5°C, and the initial temperature of the solid (referring to the water-cooling block 1) was 70°C. A transient analysis was performed with a duration of 10 seconds. The total number of meshes after meshing was 252,685: 85,202 for the fluid (the two water-cooling tubes), 167,483 for the solid (the water-cooling block 1), 36,471 for the contact (annular cooling surface 11), and 0 for the irregular and clipped meshes.

[0043] Figures 7a to 7c Shown Figure 2 The simulation results of the annular cooling surface 11 are shown, with screenshots of the results for three different diameters being shown. Figures 8a to 8c Shown Figure 1 The simulation results of the cross-sectional view of the water cooling seat 1 are shown, which shows the result screenshots of three different diameters. Figures 7a to 7c 、 Figures 8a to 8c The screenshots of the results show the simulation results for diameters of φ304, φ280, and φ290 from top to bottom.

[0044] like Figures 7a to 7c 、 Figures 8a to 8c As shown in the simulation results analysis, the same cross-sectional views and display color levels were selected for the three analysis results with diameters of φ304, φ290, and φ280. A comparison of the probes reveals that the temperature corresponding to the displayed colors in the three analysis results is essentially the same, as the difference between the lowest and highest temperatures is minimal. Therefore, only the vertical comparison of the three temperature distributions is required.

[0045] (1) Figures 7a to 7c Cross-section comparison in:

[0046] Combine Figure 2 、 7a to Figure 7c As shown, through 7a to Figure 7c Comparison of cross-sectional views in φ304( Figure 7a )'s direct cooling position is concentrated in the outer ring position ( Figure 2 113) shown in the figure, φ280( Figure 7b )'s direct cooling position is concentrated on the inner side ( Figure 2 111) shown in the figure, φ290( Figure 7c )'s direct cooling position completely covers the positions 111 and 112 ( Figure 2 The annular cooling surface 11 shown in the figure has a higher temperature at the outer ring ( Figure 2 113 shown). Figure 7c The temperature distribution of φ290 shown is more in line with the design requirements.

[0047] (2) Figures 8a to 8c Screenshot comparison:

[0048] Combine Figure 1 、 Figure 2 as well as Figures 8a to 8c As shown, through Figures 8a to 8c The comparison of the cross-sectional diagrams of 7a to 7b shows that the results are basically the same as those of 7a to 7b. Figure 7c The results of the cross-sectional view are consistent. Figure 8a )'s direct cooling position is concentrated in the outer ring position ( Figure 2 113) shown in the figure, φ280( Figure 8b )'s direct cooling position is concentrated on the inner side ( Figure 2 111) shown in the figure, φ290( Figure 8c )'s direct cooling position completely covers the positions 111 and 112 (annular cooling surface 11), and the position with higher temperature is the position of the outer ring ( Figure 2 113 shown). Figure 8c The temperature distribution of φ290 shown is more in line with the design requirements.

[0049] Therefore, based on the center circle diameter D3 size of the water cooling pipe 2 in the prior art, it is preferred to use Figure 7c and Figure 8c The φ290 shown can achieve better cooling effect.

[0050] Combined with the simulation data, further, in order to be applicable to annular cooling surfaces 11 of different sizes, so that the molecular pump water cooling device 100 of the embodiment of the present invention has wider applicability, the position of the water cooling tube 2 can be calculated by the following method. When the position of the water cooling tube 2 is determined, the diameter D3 of its center circle can be determined.

[0051] The diameter of the cross-sectional circle of the water-cooling tube 2 is A, the distance between the center of the cross-sectional circle of the water-cooling tube 2 and the annular cooling surface 11 is L, L=1.3xA, the width of the annular cooling surface is B, and the radial distance between the center of the cross-sectional circle of the water-cooling tube 2 and the inner side edge of the annular cooling surface ranges from 0.55B to 0.7B.

[0052] In some embodiments, the water-cooling seat 1 and the water-cooling pipe 2 can be fixed into an integral structure by integral casting.

[0053] In the prior art, the water-cooling tube 2 is usually fixed in the form of resin potting. The thermal conductivity of the resin is poor, which can easily affect the cooling effect of the water-cooling tube 2. In addition, the resin is weak in strength, which can easily lead to water leakage during use. In the present application, the water-cooling seat 1 and the water-cooling tube 2 are cast as a whole. In this way, the water-cooling tube 2 and the water pipe joint are fixed and cast together with the water-cooling seat 1 as a whole, which enhances the overall thermal conductivity of the water-cooling seat 1 and improves the structural strength. At the same time, in actual application, the manufacturing cost is reduced from the original 2,100 yuan / piece to 420 yuan / piece, thereby reducing the manufacturing cost.

[0054] In some embodiments, the manufacturing method 400 further includes providing a water pipe joint made of the same metal material as the water cooling pipe 2 , and fixing the water cooling pipe 2 and the water pipe joint together by argon arc welding.

[0055] In this application, the material of the water-cooling pipe 2 and the water pipe joint can be selected from 306 stainless steel. After being fixed by argon arc welding, the welding strength can be effectively increased, and the overall corrosion resistance of the water-cooling pipe 2 and the water pipe joint can be enhanced.

[0056] According to a third aspect of the present invention, a molecular pump 200 is provided. The molecular pump 200 includes the molecular pump water cooling device 100 described above.

[0057] In the above description of this application, unless otherwise expressly specified or limited, terms such as "fixed," "mounted," "connected," or "connected" should be understood in a broad sense. For example, with respect to the term "connected," it can mean a fixed connection, a detachable connection, or an integral connection; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean internal communication between two elements or an interaction between two elements. Therefore, unless otherwise expressly specified in this application, those skilled in the art can understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0058] According to the above description of the present application, those skilled in the art may also understand that the terms used below, such as "up", "down", "front", "back", "left", "right", "length", "width", "thickness", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential", "center", "longitudinal", "lateral", "clockwise" or "counterclockwise", etc., which indicate orientation or positional relationships, are based on the orientation or positional relationships shown in the drawings of the present application, and are only for the purpose of facilitating the explanation of the scheme of the present invention and simplifying the description, rather than explicitly or implicitly indicating that the devices or elements involved must have the specific orientation, be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms cannot be understood or interpreted as limitations on the scheme of the present invention.

[0059] In addition, the terms "first" or "second" used in this application to refer to numbers or ordinal numbers are used for descriptive purposes only and should not be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this application, the meaning of "plurality" is at least two, such as two, three or more, etc., unless otherwise clearly and specifically defined.

[0060] Although a number of embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Those skilled in the art may devise numerous modifications, variations, and alternatives without departing from the concept and spirit of the present invention. It should be understood that in practicing the present invention, various alternatives to the embodiments of the present invention described herein may be employed. The appended claims are intended to define the scope of the present invention and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A molecular pump water cooling device, characterized in that: include: A water cooling seat, one side of which is formed with an annular cooling surface for being fitted with the surface to be cooled of the molecular pump; and, a water cooling pipe disposed in the water cooling seat, wherein the water cooling pipe is constructed as an annular structure concentrically disposed with the annular cooling surface; The annular cooling surface is divided into an outer annular surface and an inner annular surface at equal distances along the radial direction, and the center circle diameter value of the water cooling tube is set to a preset range so that the water cooling tube is constructed to be located on the outer annular surface and close to the inner annular surface.

2. The molecular pump water cooling device according to claim 1, characterized in that: The diameter of the cross-sectional circle of the water-cooling tube is A, the distance between the center of the cross-sectional circle of the water-cooling tube and the annular cooling surface is L, L=1.3xA, the width of the annular cooling surface is B, and the radial distance between the center of the cross-sectional circle of the water-cooling tube and the inner side edge of the annular cooling surface ranges from 0.55B to 0.7B.

3. The molecular pump water cooling device according to claim 1, characterized in that: The inner diameter of the annular cooling surface ranges from 236 mm to 242 mm, the outer diameter of the annular cooling surface ranges from 315 mm to 325 mm, and the central diameter of the water-cooling pipe ranges from 287 mm to 293 mm.

4. The molecular pump water cooling device according to any one of claims 1 to 3, characterized in that: It also includes a water pipe joint, which is provided with a water inlet joint and a water outlet joint. The water inlet joint and the water outlet joint are respectively connected to the two ends of the water cooling pipe and welded and fixed. The water cooling pipe and the water pipe joint are made of the same metal material.

5. The molecular pump water cooling device according to claim 4, characterized in that: The water cooling pipe and the water pipe joint are made of stainless steel.

6. A method for manufacturing a molecular pump water cooling device according to any one of claims 1 to 5, characterized in that: The steps of the manufacturing method include: Step 1: providing the water cooling seat and the water cooling pipe; Step 2: Obtain the center circle diameter size range of the water-cooling pipe through simulation analysis.

7. The manufacturing method according to claim 6, characterized in that The steps of the simulation analysis include: Select water-cooling tubes with different center circle diameters; Set the simulation parameters of the water cooling seat and water cooling pipe; transient analysis; Compare the results of different center circle diameters to obtain the position of the water cooling pipe.

8. The manufacturing method according to claim 6 or 7, characterized in that: The water-cooling seat and the water-cooling pipe are fixed into an integrated structure through an integral casting process.

9. The manufacturing method according to claim 6 or 7, characterized in that: The manufacturing method further includes providing a water pipe joint made of the same metal material as the water cooling pipe, and fixing the water cooling pipe and the water pipe joint together by argon arc welding.

10. A molecular pump, characterized in that: It comprises the molecular pump water cooling device according to any one of claims 1 to 5.

Images