Etching machine vacuum transmission system and control method

Abstract

The invention provides an etching machine table vacuum transmission system and a control method, the etching machine table vacuum transmission system comprises a locking module, an atmosphere end transmission module and a vacuum transmission module, the atmosphere end transmission module is connected with the locking module through an outer gate, and the vacuum transmission module is connected with the locking module through an inner gate; the vacuum module comprises an air extracting device, an air extracting pipeline and at least one one-way control device, the air extracting device is connected with the locking module and the vacuum conveying module through the air extracting pipeline, and the one-way control device is arranged on the air extracting pipeline and controls air to flow to the air extracting device only from the locking module and / or the vacuum conveying module; and the control module is electrically connected with the modules, and when the product is conveyed to the locking module from the vacuum conveying module, the control module confirms that the inner gate and the outer gate are closed at a preset time node before the process is finished, and controls the air extractor to vacuumize the locking module to a preset pressure value, and then the inner gate is directly opened. And the vacuumizing operation is synchronous with the time sequence of the technological process, so that the waiting time of the transmission process is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, and in particular to an etching machine vacuum transmission system and a control method. BACKGROUND

[0002] In the etching machine, the cavity for realizing the conversion between vacuum and atmosphere is called a lock module. The lock module is isolated from the external area by two gates, one end is connected to the atmospheric end transmission module, and the other end is connected to the vacuum transmission module. The specific working process is as follows: the product is first transmitted to the lock module by the atmospheric end transmission module, and after pressure conversion by the lock module, it is transmitted into the vacuum transmission module, and finally into the process cavity for process processing.

[0003] In the existing transmission process, there are places that can be optimized and improved: because the lock module and the vacuum transmission module share the same pumping device, when the pumping device is damaged, if the lock module is in an atmospheric state and the inner gate is not closed at this time, the gas in the atmospheric environment will flow into the vacuum transmission module, causing the pressure value of the vacuum transmission module to be abnormal, and thus causing the cavity dust content to be high, which adversely affects the processing environment of the process cavity. To avoid such situations, the current measure is that the inner gate only performs the opening operation when the product arrives, which increases the waiting time during the transmission process and affects the operation efficiency of the equipment. SUMMARY

[0004] To solve all or part of the problems of the prior art, the present application provides an etching machine vacuum transmission system and a control method, which constructs a gas one-way flow isolation mechanism by setting a one-way control device in the pumping pipeline, and realizes the time sequence synchronization strategy of vacuum pumping operation and process by using a control module, thereby reducing the waiting time of the transmission process.

[0005] To achieve the above purpose, the present application provides the following technical solutions: An etching machine vacuum transmission system, comprising: a lock module, an atmospheric end transmission module and a vacuum transmission module, the atmospheric end transmission module is connected to the lock module through an outer gate, and the vacuum transmission module is connected to the lock module through an inner gate; a vacuum module, comprising a pumping device, a pumping pipeline and at least one one-way control device, the pumping device is connected to the lock module and the vacuum transmission module through the pumping pipeline, and the one-way control device is arranged on the pumping pipeline to control the gas to flow only from the lock module and / or the vacuum transmission module to the pumping device; A control module is electrically connected with the above modules, and when the product is transmitted from the vacuum transmission module to the lockout module, the control module confirms that the inner gate and the outer gate are closed at a preset time node before the end of the process, and opens the inner gate after the control module controls the air exhaust device to exhaust the lockout module to a preset pressure value.

[0006] The air exhaust pipeline comprises a main pipeline, a first branch pipeline and a second branch pipeline, one end of the main pipeline is connected with the air exhaust device, the other end is connected with the lockout module through the first branch pipeline and connected with the vacuum transmission module through the second branch pipeline, and the one-way control device is a check valve and arranged on the first branch pipeline and the second branch pipeline.

[0007] The air exhaust pipeline comprises a main pipeline, a first branch pipeline and a second branch pipeline, one end of the main pipeline is connected with the air exhaust device, the other end is connected with the lockout module through the first branch pipeline and connected with the vacuum transmission module through the second branch pipeline, and the one-way control device is a check valve and arranged on the first branch pipeline and the second branch pipeline.

[0008] The air exhaust pipeline comprises a main pipeline, a first branch pipeline and a second branch pipeline, one end of the main pipeline is connected with the air exhaust device, the other end is connected with the lockout module through the first branch pipeline and connected with the vacuum transmission module through the second branch pipeline, and the one-way control device is a check valve and arranged on the first branch pipeline and the second branch pipeline.

[0009] The one-way control device is an electromagnetic valve or a multi-channel check valve.

[0010] The application also provides a control method of the vacuum transmission system of the etching machine, which is implemented by using the system, and when the product is transmitted from the vacuum transmission module to the lockout module, the following steps are performed at a preset time before the end of the process: S1. The control module confirms that the inner gate and the outer gate are in the closed state; S2. The air exhaust device is started, the one-way control device for controlling the gas flow direction of the lockout module is in the conductive state, the lockout module is vacuumized, and the process is stopped when the preset pressure value is reached; S3. The inner gate is opened, and the one-way control device for controlling the gas flow direction of the lockout module is in the closed state; S4. After the product ends the process, the product is transmitted from the vacuum transmission module to the lockout module.

[0011] The preset time is 8-12 seconds.

[0012] After the inner gate is opened, the lockout module and the vacuum transmission module are in communication with each other, and the product is transmitted.

[0013] Gas continues to flow in the vacuum transfer module to maintain a set pressure value; when the locking module is in an idle state, steps S2 and S3 are performed in sequence to connect the locking module and the vacuum transfer module to each other.

[0014] The idle state is a period of time during which no product transfer operation is performed.

[0015] The present invention has at least the following beneficial effects: 1) A one-way gas flow control system is constructed by installing a parallel branch structure or independent dual pipelines in the exhaust pipeline and configuring a one-way control device. When the exhaust device is abnormal, the one-way control device can effectively block the reverse inflow of atmospheric gas into the vacuum transfer module or the locking module, avoiding the problem of increased cavity dust content due to abnormal pressure values. Compared with the risks of modules sharing exhaust devices in the prior art, this invention achieves independent isolation of the pressure environment of each module through innovative pipeline structure and one-way control design, ensuring the stability of the system under abnormal operating conditions from a hardware level.

[0016] 2) The control module preemptively initiates the vacuum pumping operation of the locking module at a preset time point before the end of the process in the process chamber, synchronizing the vacuum pumping process with the process. This timing design dynamically reserves operational margins, reducing the unnecessary time lost waiting for pressure conversion in traditional solutions. This allows the locking module to reach the preset pressure value that matches the vacuum transfer module before product transfer, allowing the internal gate to be opened directly without waiting for pressure equilibrium. This achieves efficient coordination between vacuum environment preparation and process flow, significantly improving the overall production cycle of the etching tool.

[0017] 3) A vacuum pumping strategy designed for the locking module's idle state ensures that the module maintains a preset vacuum environment and maintains gas flow during idle periods. On the one hand, the continuous flow of gas effectively removes impurities such as dust from the cavity, preventing dust accumulation caused by long-term static conditions. On the other hand, the vacuum transfer module continuously maintains a set pressure value through a vacuum device during the transfer process, further controlling the dust content in the cavity. This mechanism improves the cleanliness of the transfer channel from the dual dimensions of "pre-cleaning" and "dynamic maintenance", significantly reducing product defects caused by dust contamination, thereby improving process yield and equipment reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the specific embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Fig. 1 A first perspective view of a vacuum transmission system of an etching machine according to an embodiment of the present application.

[0020] Fig. 2 A second perspective view of a vacuum transmission system of an etching machine according to an embodiment of the present application.

[0021] Fig. 3 A top view of a vacuum transmission system of an etching machine according to an embodiment of the present application.

[0022] Fig. 4 A structure diagram of a vacuum transmission system of an etching machine according to an embodiment of the present application.

[0023] Reference signs: 1, locking module; 2, vacuum transmission module; 3, outer gate; 4, inner gate; 5, vacuum module; 501, air extraction device; 502, one-way control device; 503, main pipeline; 504, first branch pipeline; 505, second branch pipeline; 6, atmospheric end transmission module; 7, process cavity. DETAILED DESCRIPTION

[0024] The technical solutions in the specific embodiments of the present application will be described clearly and completely below. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0025] In the embodiments of the present application, reference is made to the following description of the drawings. Figs. 1 to 4As shown, an etching machine vacuum transmission system is provided, which comprises a lock module 1 connected with an atmospheric end transfer module 6 through an outer gate 3 and connected with a vacuum transfer module 2 through an inner gate 4 to form a pressure conversion channel between the atmospheric environment and the vacuum environment. The vacuum module 5 comprises a gas extraction device 501, a gas extraction pipeline and at least one one-way control device 502. The gas extraction device 501 is communicated with the lock module 1 and the vacuum transfer module 2 through the gas extraction pipeline, and the one-way control device 502 is arranged on the gas extraction pipeline to control the one-way flow of gas, allowing gas to flow only from the lock module 1 and / or the vacuum transfer module 2 to the gas extraction device 501, thereby preventing external gas from flowing in the reverse direction when the gas extraction device 501 fails. The control module is electrically connected with each of the above modules, and the control logic thereof is as follows: when the product needs to be transferred from the vacuum transfer module 2 to the lock module 1, the control module first confirms that the inner gate 4 and the outer gate 3 are both in the closed state at a preset time node before the process of the process chamber 7 is completed, and then controls the gas extraction device 501 to perform a vacuum extraction operation on the lock module 1 until the pressure in the lock module 1 reaches a preset pressure value, and then triggers the opening operation of the inner gate 4. By synchronizing the vacuum extraction process of the lock module 1 with the process of the process chamber 7, the unnecessary time loss caused by waiting for pressure conversion in the prior art is avoided, and efficient transmission of the product in a predetermined vacuum environment is realized.

[0026] In the present embodiment, the gas extraction pipeline comprises a main pipeline 503, a first branch pipeline 504 and a second branch pipeline 505. One end of the main pipeline 503 is connected with the gas extraction device 501, and the other end is divided into two branches, wherein the first branch pipeline 504 is communicated to the lock module 1, and the second branch pipeline 505 is communicated to the vacuum transfer module 2 to form a parallel gas extraction channel. A check valve is arranged on each of the first branch pipeline 504 and the second branch pipeline 505 as the one-way control device 502, and the valve port direction of each check valve is towards the side of the gas extraction device 501 to control the gas to flow only from the lock module 1 and the vacuum transfer module 2 through the branch pipelines to the main pipeline 503 and into the gas extraction device 501, effectively preventing external gas from flowing in the reverse direction through the pipeline into the vacuum transfer module 2 or the lock module 1 when the gas extraction device 501 is abnormal, and ensuring the independence and stability of the pressure environment of each module.

[0027] In other specific embodiments, the gas extraction pipeline has various forms. In one embodiment, the gas extraction pipeline can adopt a first pipeline and a second pipeline which are independent of each other. The two ends of the first pipeline are connected with the lock module 1 and the gas extraction device 501 respectively, and the two ends of the second pipeline are connected with the vacuum transfer module 2 and the gas extraction device 501 respectively, and a one-way control device 502 is arranged on each of the first pipeline and the second pipeline. The independent pipeline structure can make the lock module 1 and the vacuum transfer module 2 not interfere with each other during the gas extraction process, effectively avoid the influence of the gas flow of one module on the other module, and thus ensure the stability and reliability of the system. In another embodiment, the gas extraction pipeline can also be provided in the form of a main pipeline 503, a first branch pipeline 504 and a second branch pipeline 505. One end of the main pipeline 503 is connected with the gas extraction device 501, and the other end is connected with the lock module 1 through the first branch pipeline 504 and connected with the vacuum transfer module 2 through the second branch pipeline 505. At this time, the one-way control device 502 is arranged at the connection points of the main pipeline 503 with the first branch pipeline 504 and the second branch pipeline 505. The one-way control device 502 can be an electromagnetic valve or a multi-channel check valve. When an electromagnetic valve is used, the gas flow direction can be flexibly adjusted and controlled through precise circuit control. If a multi-channel check valve is used, the mechanical structure characteristics of the multi-channel check valve can be used to ensure that the gas can only flow in the predetermined direction, i.e. from the lock module 1 and the vacuum transfer module 2 to the gas extraction device 501, prevent backflow of the gas, and ensure normal operation of the system. This setting method can meet the gas extraction demand, and can also select a suitable one-way control device 502 according to the actual application scene and demand, thereby improving the applicability and operability of the system.

[0028] The application further provides a control method of the vacuum transmission system of the etching machine. The method is based on the vacuum transmission system of the etching machine described above. When the product needs to be transferred from the vacuum transfer module 2 to the lock module 1, at a preset time before the end of the process, the system will be executed in the following order: S1: The control module first confirms the state of the inner gate 4 and the outer gate 3 in the system, and ensures that the inner gate 4 and the outer gate 3 are in the closed state. This operation is the basis for the subsequent steps, which can effectively prevent gas leakage and other situations during the vacuum extraction process, and ensure the independence and stability of the pressure environment in the lock module 1.

[0029] S2: After confirming that the inner and outer gates are closed correctly, the control module starts the air extraction device 501. At this time, the one-way control device 502 that controls the gas flow direction of the blocking module 1 is triggered and is in the on state, and the air extraction device 501 performs the vacuum extraction operation on the blocking module 1 through the air extraction pipeline. During the air extraction process, the system monitors the pressure value in the blocking module 1 in real time, and when the pressure value reaches the preset value, the control module timely controls the air extraction device 501 to stop working, so as to avoid the situation of excessive air extraction or not reaching the predetermined vacuum degree.

[0030] S3: After the blocking module 1 reaches the preset pressure value, the control module sends an instruction to open the inner gate 4, and at the same time, the one-way control device 502 that controls the gas flow direction of the blocking module 1 is in the closed state. In this way, it can be prevented that during the product transmission process, external gas flows into the blocking module 1 in the reverse direction through the one-way control device 502, so as to maintain the stability of the vacuum environment in the blocking module 1.

[0031] S4: After the product completes the process in the vacuum conveying module 2, the system stably transmits the product from the vacuum conveying module 2 into the blocking module 1 that has reached the preset pressure value, so as to prepare for the subsequent further processing or transmission.

[0032] Through the above control method, efficient and stable transmission of the product in the etching machine vacuum transmission system can be realized, and the process quality of the product and the normal operation of the equipment can be avoided due to pressure abnormalities or gas backflow and other problems.

[0033] Specifically, the preset time is exemplarily set to 8-12 seconds, and this time interval can be dynamically adjusted according to the actual process cycle of the process cavity 7, so as to realize the accurate timing connection of the vacuum extraction operation and the process. By reasonably covering the vacuum extraction time and reserving operation margin, the response time (about 2-3 seconds) of subsequent confirmation of the pressure value of the blocking module 1 and triggering of the opening operation of the inner gate 4 can be effectively reduced, and additional waiting caused by pressure monitoring and execution mechanism action can be avoided. The optimization setting of this time parameter not only ensures that the blocking module 1 reaches the preset vacuum degree before the product transmission, but also compresses the unnecessary time consumption through the timing overlap design, so that the vacuum extraction process and the process cycle form efficient cooperation, and the overall transmission efficiency of the system is further improved. The preset pressure value matches the working pressure of the vacuum conveying module 2, so as to ensure the consistency of the pressure environment when the two are connected.

[0034] When the inner gate 4 is opened, the blocking module 1 and the vacuum transfer module 2 are connected to each other through the inner gate 4, thereby forming a product transmission channel. During the product transmission process, the vacuum transfer module 2 will continuously use the air extraction device 501 to maintain the set pressure value. This operation is of great significance, on the one hand, it can ensure the stability of the pressure environment and provide stable physical conditions for product transmission; on the other hand, it can effectively control the dust content in the cavity and prevent dust from polluting the product, thereby ensuring the process quality of the product.

[0035] When the blocking module 1 is in an idle state, that is, during the period when the product is not transmitted in or out, the control method adopts a pre-vacuum strategy. Specifically, steps S2 and S3 are executed in sequence. In step S2, the air extraction device 501 is started, and the one-way control device 502 that controls the gas flow direction of the blocking module 1 is in the on state, and the blocking module 1 is vacuumized until the pressure in the blocking module 1 reaches the preset pressure value, and then stopped. Then step S3 is executed, the one-way control device 502 is closed and the inner gate 4 is opened, so that the blocking module 1 and the vacuum transfer module 2 remain in a connected state. By using this strategy, it can be ensured that the blocking module 1 always maintains a preset vacuum environment during the idle period. This is because if the blocking module 1 is in a static state for a long time, pressure fluctuations may occur, and the pre-vacuum strategy can avoid this situation. And after the blocking module 1 and the vacuum transfer module 2 are connected, the gas flow in the blocking module 1 can be maintained. The flow of gas helps to remove impurities such as dust in the blocking module 1, thereby increasing the cleanliness of the cavity of the blocking module 1, providing a cleaner and more stable environment for the subsequent product transmission, and further improving the reliability of the entire etching machine vacuum transmission system and the yield of the product process.

[0036] It should be noted that for those skilled in the art, without departing from the principles of the present application, the present application can be improved and modified in several ways, and these improvements and modifications also fall within the scope of the claims of the present application.

Claims

1. A vacuum transmission system for an etching machine, characterized in that: include: A locking module, an atmospheric end transmission module, and a vacuum transmission module, wherein the atmospheric end transmission module is connected to the locking module via an outer gate, and the vacuum transmission module is connected to the locking module via an inner gate; A vacuum module comprising an exhaust device, an exhaust pipeline, and at least one one-way control device, wherein the exhaust device is connected to the locking module and the vacuum transfer module via the exhaust pipeline, and the one-way control device is arranged on the exhaust pipeline to control gas to flow only from the locking module and / or the vacuum transfer module to the exhaust device; The control module is electrically connected to the above-mentioned modules. When the product is transferred from the vacuum transfer module to the locking module, the control module confirms that the inner and outer gates are closed at a preset time node before the end of the process, controls the vacuum device to vacuum the locking module to a preset pressure value, and then opens the inner gate.

2. The system according to claim 1, wherein: The exhaust pipeline includes a main line, a first branch line and a second branch line. One end of the main line is connected to the exhaust device, and the other end is connected to the locking module through the first branch line, and is connected to the vacuum transfer module through the second branch line. The one-way control device is a check valve, which is respectively arranged on the first branch line and the second branch line.

3. The system according to claim 1, wherein: The exhaust pipeline includes a first pipeline and a second pipeline that are independent of each other, each of which is provided with the one-way control device. The two ends of the first pipeline are respectively connected to the locking module and the exhaust device, and the two ends of the second pipeline are respectively connected to the vacuum transmission module and the exhaust device.

4. The system according to claim 1, wherein: The exhaust pipeline includes a main line, a first branch line and a second branch line. One end of the main line is connected to the exhaust device, and the other end is connected to the locking module through the first branch line, and is connected to the vacuum transfer module through the second branch line. The one-way control device is arranged at the connection point between the main line and the first branch line and the second branch line.

5. The system according to claim 4, characterized in that The one-way control device is a solenoid valve or a multi-channel check valve.

6. A control method for a vacuum transmission system of an etching machine, characterized in that: When the product is transferred from the vacuum transfer module to the locking module, the following steps are performed at a preset time before the end of the process: S1. The control module confirms that the inner gate and the outer gate are both in the closed state; S2. Start the exhaust device to control the gas flow direction of the locking module, the one-way control device is in the on state, the locking module is vacuumed and stops after reaching the preset pressure value; S3. Open the inner gate to control the one-way control device of the gas flow direction of the locking module in the closed state; S4. After the product has completed the process, the product is transferred from the vacuum transfer module to the locking module.

7. The method according to claim 6, characterized in that The preset time is 8-12 seconds.

8. The method according to claim 6, characterized in that In step S3, after the inner gate is opened, the locking module and the vacuum transfer module are connected to each other, waiting for the product to be introduced.

9. The method according to claim 6, characterized in that Gas continues to flow in the vacuum transfer module to maintain a set pressure value; when the locking module is in an idle state, steps S2 and S3 are performed in sequence to connect the locking module and the vacuum transfer module to each other.

10. The method according to claim 9, characterized in that The idle state is a period of time during which no product transfer operation is performed.

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