Probe cleaning device

Abstract

The invention provides a probe cleaning device comprising a probe card comprising a first surface and a second surface opposite to the first surface; the first through hole penetrates through the needle clamp; the probe is coupled to the first surface of the probe card; the air blowing unit is adjacent to the second surface of the needle clamp and comprises a pipeline, and one end of the pipeline is provided with a horn-mouth-shaped air outlet; wherein the air blowing unit blows out air through the air outlet, and the air at least flows through the first through hole and then cleans the probe. According to the technical scheme, the cleaning effect of the probe can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a probe cleaning device. Background Art

[0002] In semiconductor testing, the probe serves as a precise bridge connecting the test equipment and the chip pad. Its cleanliness directly determines the accuracy and reliability of the test results and the service life of the probe itself.

[0003] However, in the conventional probe cleaning process, there is a problem of poor cleaning effect. Therefore, how to provide a technical solution to clean the probe to improve the cleaning effect has become a problem to be solved urgently by those skilled in the art. Summary of the Invention

[0004] The technical problem solved by the present invention is to improve the cleanliness of the probe by providing a probe cleaning device.

[0005] In order to solve the above problems, an embodiment of the present invention provides a probe cleaning device, including: a needle card, including: a first surface and a second surface opposite to the first surface; a first through hole, passing through the needle card; a probe, coupled to the first surface of the needle card; an air blowing unit, adjacent to the second surface of the needle card, including: a pipe, one end of the pipe having a trumpet-shaped air outlet; wherein, the air blowing unit blows out gas through the air outlet, and the gas cleans the probe after flowing through at least the first through hole.

[0006] Optionally, the blowing unit further includes: an air supply subunit; an air valve, one end of the air valve is connected to the other end of the pipeline, and the other end of the air valve is connected to the air supply subunit; and a fixing subunit for fixing the blowing unit.

[0007] Optionally, the probe cleaning device further includes: a mounting plate coupled to the first surface of the needle card and having a plurality of second through holes, wherein the projections of the plurality of second through holes on the needle card are located within the first through hole; a probe located on the mounting plate, wherein the projection of the probe on the needle card is located within the first through hole; wherein the gas blown out by the blowing unit through the air outlet flows through the first through hole and the second through hole in sequence to clean the probe.

[0008] Optionally, the mounting plate further includes: a rotating shaft, parallel to the surface of the mounting plate and passing through the mounting plate, wherein both ends of the rotating shaft are rotatably fixed to the needle card so that the mounting plate and the needle card can swing relative to each other via the rotating shaft; a plurality of third through holes, passing through the surface of the mounting plate, whose projections on the needle card are located within the first through holes, wherein the probe is installed in the third through holes.

[0009] Optionally, the probe cleaning device further includes: a first annular light source, arranged in the third through hole and surrounding the probe, the direction of light emitted by the first annular light source is parallel to the axial direction of the probe, wherein the inner diameter of the first annular light source is larger than the outer diameter of the probe; a second annular light source, arranged on the mounting plate outside the third through hole, the direction of light emitted by the second annular light source is perpendicular to the surface of the mounting plate.

[0010] Optionally, the probe cleaning device further includes: a point emitter, which is arranged on the mounting plate.

[0011] Optionally, the probe cleaning device further includes: a carrier, including: a strip receiver, arranged opposite to the point transmitter, for monitoring the amplitude of the swing of the mounting plate.

[0012] Optionally, the carrier further includes: a first detection light source, arranged opposite to the first annular light source, for determining whether the deviation between the center of the first annular light source and the center of the first detection light source is within a first preset deviation range, so as to confirm whether the angle between the probe and the carrier is within the first preset angle range; a second detection light source, arranged opposite to the second annular light source, for determining whether the deviation between the center of the second annular light source and the center of the second detection light source is within a second preset deviation range, so as to confirm whether the angle between the mounting plate and the carrier is within the second preset angle range.

[0013] Optionally, the probe cleaning device further includes: a detection unit for detecting the cleanliness of the probe, including: an image collector for capturing the morphology of the probe tip to confirm the cleanliness of the probe.

[0014] Optionally, the probe cleaning device further includes: a polishing unit for polishing the probe, comprising a motor and sandpaper.

[0015] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:

[0016] The probe cleaning device provided in the present application includes: a needle card, a first through-hole extending through the needle card, and a probe coupled to the needle card; an air blowing unit including: a pipe, one end of which has a bell-shaped air outlet; wherein the air blowing unit blows out gas through the air outlet, and the gas cleans the probe after flowing through at least the first through-hole. By configuring one end of the pipe as a bell-shaped air outlet and blowing gas out through the bell-shaped air outlet, a Bernoulli phenomenon is generated, which evenly disperses the airflow to the probe area to be cleaned, thereby improving the cleaning effect of the probe. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without any creative work.

[0018] Figures 1 to 13 It is a schematic structural diagram of the probe cleaning device according to an embodiment of the present application. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0020] BACKGROUND OF THE INVENTION During the cleaning process of the probe, there is a problem of poor cleaning effect. The reasons for the poor cleaning effect are analyzed below.

[0021] The existing probe cleaning process uses a handheld air gun to blow the probe tip. After each blow, the cleaned probe needs to be examined under a microscope. If foreign matter is still found on the probe, the probe tip needs to be blown again. After blowing, the cleaned probe is continued to be examined under a microscope. The above steps are repeated continuously, resulting in the following problems:

[0022] First, the cleaning effect is poor.

[0023] During the cleaning process, there is a risk that one or more probes are not completely cleaned, for example, foreign matter on the probe other than the probe tip, and uneven purge gas, etc., resulting in poor cleaning effect.

[0024] Second, the cleaning efficiency is low.

[0025] The cleaning efficiency is low due to repeated manual purging and inspection.

[0026] The foreign matter includes dirt continuously accumulated on the probe tip during testing and / or debris in the process environment. The foreign matter is attached to the probe surface, including the probe tip.

[0027] In view of the above technical problems, an embodiment of the present invention provides a probe cleaning device, which can improve the effect of probe cleaning.

[0028] In an embodiment of the present application, the probe cleaning device includes: a needle card, including: a first surface and a second surface opposite to the first surface; a first through hole, passing through the needle card; a probe, coupled to the first surface of the needle card; an air blowing unit, adjacent to the second surface of the needle card, including: a pipe, one end of the pipe having a trumpet-shaped air outlet; wherein, the air blowing unit blows out gas through the air outlet, and the gas cleans the probe after flowing through at least the first through hole.

[0029] In the embodiment of the present application, one end of the pipe is set as a trumpet-shaped air outlet, and gas is blown out through the trumpet-shaped air outlet to form a Bernoulli phenomenon, so that the airflow is evenly dispersed to the probe area to be cleaned, thereby improving the cleaning effect of the probe.

[0030] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Unless there is a conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0031] refer to Figures 1 to 13 , is a schematic structural diagram of the probe cleaning device according to an embodiment of the present application.

[0032] refer to Figure 1 and Figure 2 ,in, Figure 1 This is a schematic diagram of the overall structure of the probe cleaning device according to an embodiment of the present application; Figure 2 It is a structural diagram of the needle card of an embodiment of the present application; the probe cleaning device includes: a needle card 100, and the needle card 100 is used to provide an installation base for the installation plate 101.

[0033] The material of the needle card 100 includes: rubber material (such as natural rubber, silicone rubber, etc.) or plastic material (such as polycarbonate, electro-propylene, acrylic, etc.); the shape of the needle card 100 includes: one or more of a cube, a circular cylinder, an elliptical cylinder and a prism; in this embodiment, the material of the needle card 100 is plastic, and the shape of the needle card 100 is a cube.

[0034] The needle card 100 includes a first surface 102 and a second surface 103 opposite to the first surface 102 . It can also be understood that the first surface 102 is the back surface and the second surface 103 is the front surface.

[0035] The first surface 102 of the needle card 100 is mainly used to carry the probe and the mounting plate 101; the second surface 103 is used to arrange components (not shown) and connecting wires (not shown), etc., and the components and connecting wires are coupled to the probe.

[0036] Continue to refer Figure 1 and Figure 2 The probe cleaning device includes: a first through hole 104 passing through the needle card 100.

[0037] The first through hole 104 is used to provide a flow path for the gas for cleaning the probe.

[0038] The shape of the first through hole 104 includes one or more of a circle, an ellipse, a rectangle, a square, a triangle and a polygon. In this embodiment, the shape of the first through hole 104 is a rectangle.

[0039] In this embodiment, the first through hole 104 passes through the needle card 100 .

[0040] The length L of the first through hole 104 is at least the length C of the probe (e.g. Figure 7 In this embodiment, the length L of the first through hole 104 is 2.5 times the length C of the probe, and the width W of the first through hole 104 is set according to actual needs. When the probe is perpendicular to the surface of the mounting plate, it is sufficient as long as all the probe ends are exposed, which is conducive to cleaning foreign matter from the needle tip to the probe end, thereby improving the cleaning effect.

[0041] When the length direction of the probe is parallel to the surface of the mounting plate 101 , the first through hole 104 exposes the entirety of each probe. That is, the size of the first through hole 104 is sufficient to expose the entirety of all probes to be cleaned.

[0042] It should be noted that for the sake of clarity, Figure 1 Except for the probe and the bell-mouth-shaped air outlet, all other figures are illustrated in plan view, which does not limit the present application.

[0043] Continue to refer Figure 1 The probe cleaning device includes: a probe coupled to the first surface 102 of the needle card 100.

[0044] The probe is used to transmit a test signal when testing wafer performance, and the needle tip of the probe contacts the test terminal on the wafer.

[0045] The probe material includes one or more of ruthenium, nickel, platinum, gold, tungsten, molybdenum, and beryllium copper. The appropriate probe material is selected based on the test environment. Ruthenium is used in this embodiment because it has excellent wear resistance and electrical conductivity and is suitable for high-frequency testing.

[0046] The shape of the probe includes: a cylinder and / or a cone. In this embodiment, the shape of the probe is a cone, the tip of one end of the cone faces the wafer surface, and the other end of the cone away from the probe tip is called the probe end.

[0047] The number of the probes can be selected according to actual needs. In this embodiment, the number of the probes is 6, namely probe 105a, probe 105b, probe 105c, probe 105d, probe 105e and probe 105f.

[0048] The probes can be arranged in a regular pattern, such as a matrix arrangement, or in a random arrangement. In this embodiment, the probes are arranged in a regular pattern with 2 rows in the second direction F2 and 3 columns in the first direction F3. The first direction F1 is perpendicular to the second direction F2, which has the following beneficial effects: when testing the performance of the wafer, the force on each probe is uniform, so as to better delay the wear of the probe and extend the service life of the probe.

[0049] The probe is coupled to the first surface 102 of the needle card 100 . In this embodiment, the probe is mounted on the mounting plate 101 , and the mounting plate 101 is disposed on the first surface 102 of the needle card 100 .

[0050] Continue to refer Figure 1 The probe cleaning device includes: a blowing unit adjacent to the second surface 103 of the needle card 100.

[0051] The air blowing unit is used to clean the probe.

[0052] The blowing unit is adjacent to the second surface 103 of the needle card 100. In this embodiment, the blowing unit is located above the second surface 103 of the probe and has a certain distance from the probe. This distance is set according to actual needs and is not intended to limit this application.

[0053] The air blowing unit includes: a pipeline 106, an air supply subunit, an air valve 107 and a fixing subunit.

[0054] The gas supply subunit is used to provide the gas required for cleaning.

[0055] The gas includes one or more of nitrogen, hydrogen, helium, neon and argon. In this embodiment, the gas is nitrogen.

[0056] The pipe 106 is used to transmit the gas required for cleaning. One end of the pipe 106 has a bell-shaped gas outlet 108 . The gas outlet 108 is arranged opposite to the first through hole 104 on the needle card 100 .

[0057] The gas valve 107 is used to control the flow rate and flow velocity of the gas to improve the cleaning effect of the probe.

[0058] The fixing subunit is used to fix the blowing unit.

[0059] The gas supply subunit includes at least: a gas tank 109 for storing the gas required for cleaning; a compressor (not shown) for providing the power required for gas flow, increasing the flow rate of the gas to clean foreign matter on the probe, thereby improving the probe cleaning effect; a safety valve 110 for closing the gas supply to the gas tank 109 when the pressure in the gas tank 109 reaches the target value.

[0060] refer to Figure 3 , combined with Figure 1 ,in, Figure 3 Schematic diagram of the positional relationship between the projections of the first through hole and the bell-shaped air outlet on the first surface of the needle clamp.

[0061] Along the direction perpendicular to the surface of the needle card 100, the projection Y1 of the first through hole 104 on the first surface 102 of the needle card 100 is located within the projection Y2 of the air outlet 108 on the first surface 102 of the needle card 100, that is, the area of ​​the air outlet 108 is larger than the area of ​​the first through hole 104, and the edge of the first through hole 104 is located within the edge range of the air outlet 108, which is used to reduce the probability of foreign matter in the process environment being brought to the probe area by the gas, thereby reducing the contamination of the probe by foreign matter.

[0062] In this embodiment, the air outlet 108 is in a bell-mouth shape, which can evenly distribute the airflow. Because the bell-mouth structure can reduce turbulence and eddy currents, the airflow is evenly dispersed to the probe area to be cleaned, thereby improving the cleaning effect of the probe.

[0063] In this embodiment, the expansion angle D of the bell mouth (such as Figure 1 The expansion angle is usually controlled between 6 and 12 degrees. Too large an expansion angle will cause airflow separation, which will increase energy loss.

[0064] One end P1 of the gas valve 107 is connected to the other end P2 of the pipe 106, and the other end P3 of the gas valve 107 is connected to the gas tank 109 of the gas supply subunit. The gas blowing unit blows gas through the gas outlet 108, and the gas flows through at least the first through hole 104 to clean the probe. In this embodiment, the gas provided by the gas tank 109 of the gas supply subunit flows through the gas valve 107 and the pipe 106 in sequence to the gas outlet 108 of the pipe 106, and is blown out through the bell-shaped gas outlet 108. The gas flows through the first through hole 104 to clean the probe.

[0065] Continue to refer Figure 1 The fixed subunit includes a base 111 and bolts 112; in this embodiment, the air supply subunit is fixed on the base 111, and the base 111 is fixed to the ground by bolts 112.

[0066] refer to Figure 4 , combined with Figure 1 ,in, Figure 4 It is a top view of the structural schematic diagram of the mounting plate in the embodiment of the present application; the probe cleaning device includes: a mounting plate 101.

[0067] The mounting plate 101 is used to mount the probe.

[0068] The material of the mounting plate 101 includes: rubber material (such as natural rubber, silicone rubber, etc.) or plastic material (such as polycarbonate, polypropylene, acrylic, etc.); the shape of the mounting plate 101 includes: one or more of a cube, a circular cylinder, an elliptical cylinder and a prism; in this embodiment, the material of the mounting plate 101 is plastic, and the shape of the mounting plate 101 is a cube.

[0069] The mounting plate 101 is coupled to the first surface 102 of the needle card 100 and has a plurality of second through holes 113 , wherein projections of the plurality of second through holes 113 on the needle card 100 are located within the first through holes 104 ;

[0070] The shape of the second through hole 113 includes one or more of a circle, an ellipse, a square, a triangle, a polygon and an irregular shape. In this embodiment, the shape of the second through hole 113 is an irregular shape, such as a rectangle with missing corners.

[0071] The second through hole 113 is used to increase the contact area between the gas required for cleaning and the probe, thereby improving the cleaning effect of the probe.

[0072] The projection of the second through hole 113 on the needle card 100 is located inside the first through hole 104, that is, along the direction perpendicular to the surface of the needle card 100, all the second through holes 113 on the mounting plate 101 can be seen from inside the first through hole 104, so that the probe is exposed under the first through hole 104. The blowing unit can fully clean the probe to increase the contact area between the gas required for cleaning and the probe, thereby improving the cleaning effect of the probe.

[0073] It should be noted that when testing wafer performance, the probe is perpendicular to the wafer surface along a direction parallel to the probe length, and is also perpendicular to the surface of the mounting plate 101 and the first surface 102 and the second surface 103 of the needle card 100.

[0074] In this embodiment, the gas blown out by the blowing unit through the bell-shaped gas outlet 108 flows through the first through hole 104 and the second through hole 113 in sequence to clean the probe.

[0075] In this embodiment, the center of the mounting plate 101 coincides with the center of the first through hole 104 .

[0076] In this embodiment, the probe is located on the mounting plate 101 , and the projection of the probe on the needle card 100 is located in the first through hole 104 . The mounting plate 101 is mounted on the first surface 102 of the needle card 100 .

[0077] In this embodiment, the second through holes 113 are connected by a connecting bar LJT. The connecting bar LJT is integrally formed with the mounting plate 101 . The width of the connecting bar LJT along the first direction F1 and the second direction F2 is set according to actual needs.

[0078] refer to Figure 5 and Figure 6 , combined with Figure 1 ,in, Figure 5 This is a top view of a schematic diagram of the principle of the rotating shaft driving the mounting plate to swing according to the embodiment of the present application. Figure 6 It is a schematic projection diagram of the probe 105a in the third through hole 118a according to an embodiment of the present application; the mounting plate 101 further includes: a rotating shaft 114.

[0079] The rotating shaft 114 drives the mounting plate 101 to rotate when the cleaning device cleans the probe. The rotating mounting plate 101 drives the probe mounted on the mounting plate 101 to rotate. The rotation refers to the mounting plate 101 swinging back and forth around the rotating shaft 114. Figure 5 The swinging back and forth between the directions F3 and F4 has the following beneficial effects:

[0080] First, every position of the probe can be cleaned by the gas.

[0081] The rotating mounting plate 101 not only allows the gas to clean the needle tip of the probe, but also cleans the contact area between the probe and the mounting plate 101, and the area between the needle tip and the end of the probe. At the same time, it can also clean and remove foreign matter between adjacent probes, thereby improving the cleaning effect of the probe.

[0082] Second, increase the force of the gas cleaning probe.

[0083] The gas cleans the probe in a direction perpendicular to the surface of the mounting plate 101. There is a certain angle between the rotating mounting plate 101 and the gas, which can increase the force of the gas hitting the probe, so that foreign matter is peeled off from the probe, thereby improving the cleaning effect of the probe. That is, the gas blows toward the probe in a direction perpendicular to the surface of the mounting plate 101. Driven by the rotating shaft 114, the mounting plate 101 moves in a direction opposite to the gas flow to increase the force of the gas hitting the probe.

[0084] Third, foreign matter is thrown off the probe to further improve the cleaning effect of the probe.

[0085] In this embodiment, the rotating shaft 114 is parallel to the surface of the mounting plate 101 and passes through the mounting plate 101 .

[0086] Both ends of the rotating shaft 114 are rotatably fixed on the first surface 102 of the needle card 100, so that the mounting plate 101 swings relative to the needle card 100 via the rotating shaft 114. After cleaning is completed, the rotating shaft 114 fixes the mounting plate 101 on the first surface 102 of the needle card 100.

[0087] The rotating shaft 114 extends along the second direction F2. In this embodiment, the rotating shaft 114 drives the mounting plate 101 to swing along the left and right directions to increase the force of the gas cleaning probe, thereby improving the cleaning effect of the probe; in other embodiments, the rotating shaft 114 extends along the first direction F1, and the rotating shaft 114 drives the mounting plate 101 to swing along the front and back directions.

[0088] The material of the rotating shaft 114 includes: rubber material (such as natural rubber, silicone rubber, etc.) or plastic material (such as polycarbonate, polypropylene, acrylic, etc.); the shape of the rotating shaft 114 includes: circular cylinder and elliptical cylinder; in this embodiment, the material of the rotating shaft 114 is plastic, and the shape of the rotating shaft 114 is a circular cylinder.

[0089] The rotating shaft 114 can be integrally formed with the mounting plate 101 or independently formed. The rotating shaft 114 is mounted on the mounting plate 101 by an installation method.

[0090] In this embodiment, the needle card 100 has a first clamping jaw 115a and a second clamping jaw 115b that are relatively arranged. One end of the rotating shaft 114 is rotatably fixed to the first clamping jaw 115a, and the other end of the rotating shaft 114 is rotatably fixed to the second clamping jaw 115b. That is, when the rotating shaft 114 drives the installation to swing, the opening angle of the first clamping jaw 115a is adjusted so that the first clamping jaw 115a holds one end of the rotating shaft 114, and the rotating shaft 114 is rotatable on the first clamping jaw 115a; at the same time, the opening angle of the second clamping jaw 115b is adjusted so that the second clamping jaw 115b holds the rotating shaft 114. The other end of the rotating shaft 114, and the rotating shaft 114 is rotatable on the second clamping jaw 115b, and the opening angle of the first clamping jaw 115a is equal to the opening angle of the second clamping jaw 115b; when the blowing unit finishes cleaning the probe, the rotating shaft 114 is fixed on the first clamping jaw 115a and the second clamping jaw 115b, that is, one end of the rotating shaft 114 is gripped and fixed by the first clamping jaw 115a, and the other end of the rotating shaft 114 is gripped and fixed by the second clamping jaw 115b, so that the rotating shaft 114 is fixed to the needle card 100, that is, the mounting plate 101 is fixed to the needle card 100.

[0091] The shape of the cross section of the first clamping jaw 115a along the normal direction parallel to the surface of the needle card 100 and along the first direction F1 includes one or more of O-shape, U-shape and C-shape. The shape of the cross section of the second clamping jaw 115b along the normal direction parallel to the surface of the needle card 100 and along the first direction F1 includes one or more of O-shape, U-shape and C-shape. In this embodiment, the shape of the cross section of the first clamping jaw 115a along the normal direction parallel to the surface of the needle card 100 and along the first direction F1 is O-shaped, and the shape of the cross section of the second clamping jaw 115b along the normal direction parallel to the surface of the needle card 100 and along the first direction F1 is O-shaped. It should be noted that the shapes of the first clamping jaw and the second clamping jaw can be selected appropriately according to the shape of the rotating shaft 114, and this does not limit the present application.

[0092] It should be noted that at the position where the first clamp 115a and the second clamp 115b grip and fix the rotating shaft, the first clamp 115a, the second clamp 115b and the rotating shaft 114 are designed with multiple protrusions, which reduce the risk of sliding between the rotating shaft 114 and the first clamp 115a and the second clamp 115b when the probe tests the wafer performance.

[0093] In this embodiment, the release, clamping and fixing of the first clamping jaw 105a and the second clamping jaw 105b are controlled by a power system.

[0094] In this embodiment, the rotating shaft 114 and the mounting plate 101 are relatively fixed, which reduces relative sliding between the mounting plate 101 and the rotating shaft 114 when cleaning the probe, thereby improving the cleaning effect of the probe.

[0095] The probe cleaning device further includes a power system, which is connected to the rotating shaft 114 to drive the rotating shaft 114 to swing and improve the probe cleaning effect. The power system includes a first motor 116, which is connected to the end of the first rotating shaft 114. The two ends of the first rotating shaft 114 can be connected to the first motor 116 respectively, or only one end of the first rotating shaft 114 can be connected to the first motor 116, which does not limit this application; in this application, the two ends of the first rotating shaft 114 are each connected to the first motor 116, and the first motor 116 can drive the rotating shaft 114 to rotate, and can also cooperate with the first clamp 115a and the second clamp 115b to fix the rotating shaft 114.

[0096] Continue to refer Figure 4 The mounting plate 101 is further provided with a plurality of third through holes that pass through the surface of the mounting plate 101 .

[0097] The third through hole is used for installing the probe and the first annular light source.

[0098] The shape of the third through hole includes one or more of a circle, an ellipse, a square, a triangle and a polygon. In this embodiment, the shape of the third through hole is a circle.

[0099] The shape of the third through hole matches the shape of the probe, so that the probe can be easily installed on the mounting plate 101 .

[0100] In this embodiment, multiple third through holes pass through the surface of the mounting plate 101, and their projections on the needle card 100 are located within the first through hole 104. That is, along a direction perpendicular to the surface of the needle card 100, all the third through holes of the mounting plate 101 can be seen from the first through hole 104, so that all the probes of the mounting plate 101 are exposed to the gas atmosphere, thereby improving the cleaning effect of the probes.

[0101] The probe is located on the mounting plate 101, that is, the probe is installed in the third through hole. In this embodiment, the end of the probe is fixedly connected to the third through hole, and the connection method includes: threaded connection; in other embodiments, the probe is connected to the third through hole by plugging.

[0102] In this embodiment, a probe is installed corresponding to each third through hole; the projection of the probe on the needle card 100 is located in the first through hole 104, so that the probe is perpendicular to the surface of the mounting plate 101, and the force on each probe is uniform when testing the wafer performance, so as to better delay the wear of the probe and extend the service life of the probe.

[0103] In this embodiment, the mounting plate 101 has six third through holes, namely, third through hole 118a, third through hole 118b, third through hole 118c, third through hole 118d, third through hole 118e, and third through hole 118f. The projection of each third through hole on the needle card 100 is located within the first through hole 104, so that the first through hole 104 exposes all probes.

[0104] Regarding the arrangement of the third through holes, reference may be made to the arrangement of the aforementioned probes, which will not be described in detail here.

[0105] In this embodiment, the probe 105a is installed in the third through hole 118a, the probe 105b is installed in the third through hole 118b, the probe 105c is installed in the third through hole 118c, the probe 105d is installed in the third through hole 118d, and the probe 105f is installed in the third through hole 118e; continue to refer to Figure 6 , along the normal direction parallel to the mounting plate 101, the probe 105a is projected into the third through hole 118a, as shown in FIG. Figure 6 As shown, the probe 105a is installed in the third through hole 118a, which is a schematic projection diagram of the probe 105a and the third through hole 118a on the mounting plate.

[0106] refer to Figure 7 and Figure 8 , combined with Figure 1 and Figure 4 ,in, Figure 7 is a diagram showing the positional relationship between the probe 105a, the first annular light source 119a, and the third through hole 118a according to an embodiment of the present application; Figure 8 This is a measurement diagram of the first preset angle range of an embodiment of the present application; the probe cleaning device includes: a first annular light source.

[0107] The first annular light source has the following beneficial effects:

[0108] First, it is used in conjunction with the first detection light source to determine whether the probe is perpendicular to the carrier 120;

[0109] Second, combined with the second ring light source, it can determine whether the probe is distorted;

[0110] Third, determine whether the foreign matter at the probe tip exceeds the probe diameter;

[0111] Fourth, determine whether there are any foreign objects in other positions of the probe except the needle tip.

[0112] The type of the first annular light source includes: one or more of an incandescent lamp, an LED lamp, a halogen lamp and a fluorescent lamp. In this embodiment, the type of the first annular light source is an LED lamp.

[0113] The pattern formed by the first annular light source includes one or more of a circular ring, a square ring, an elliptical ring, a triangular ring, and a polygonal ring. In this embodiment, the pattern formed by the first annular light source is a circular ring.

[0114] The first annular light source is disposed in the third through hole and surrounds the probe (eg Figure 7 As shown), in this embodiment, the first annular light source is arranged and fixed in the third through hole and surrounds the end of the probe, and one first annular light source is corresponding to one probe, that is, the first annular light sources correspond one-to-one to the probes, and the first annular light sources correspond one-to-one to the third through holes.

[0115] The first annular light source is a circular plane light source. The direction of the light emitted by the first annular light source is parallel to the axial direction of the probe, and the direction of the light emitted by the first annular light source is perpendicular to the surface of the mounting plate 101. On the one hand, it is used to determine whether there is foreign matter on the probe, and on the other hand, it is used to determine whether the probe is bent, because foreign matter on the probe and / or the probe is bent will block the light emitted by the first annular light source from irradiating the first detection light source on the carrier 120.

[0116] In this embodiment, the inner diameter of the first annular light source is larger than the outer diameter of the probe, that is, there is a gap J between the probe and the corresponding first annular light source, so that the gas used to clean the probe passes through the gap J to clean the probe, especially to clean foreign matter located on the probe and / or on the mounting plate 101 near the end of the probe, thereby improving the cleaning effect.

[0117] The size of the gap J between the first annular light source and the probe can be set according to actual needs and is not intended to limit the present application.

[0118] In this embodiment, the number of the first annular light sources is 6, namely the first annular light source 119a, the first annular light source 119b, the first annular light source 119c, the first annular light source 119d, the first annular light source 119e, and the first annular light source 119f, which are evenly distributed on the mounting plate 101, and the present application is not limited thereto.

[0119] Continue to refer Figure 1 and Figure 4, the probe cleaning device includes: a second annular light source.

[0120] The second annular light source has the following beneficial effects:

[0121] First, in cooperation with the second detection light source, it is confirmed whether the angle between the mounting plate 101 and the carrier 120 is within a second preset angle range.

[0122] Second, in conjunction with the second annular light source, it is determined whether the probe is distorted.

[0123] The type of the second annular light source includes: one or more of an incandescent lamp, an LED lamp, a halogen lamp and a fluorescent lamp. In this embodiment, the type of the second annular light source is an LED lamp.

[0124] The pattern formed by the second annular light source includes one or more of a circular ring, a square ring, an elliptical ring, a triangular ring, and a polygonal ring. In this embodiment, the pattern formed by the second annular light source is a circular ring.

[0125] In this embodiment, the second annular light source is arranged on the mounting plate 101 outside the third through hole, for example, on the edge of the mounting plate 101; the second annular light source can be arranged on the mounting plate 101 according to actual needs, and this is not a limitation of the present application.

[0126] In this embodiment, the second annular light source is a circular planar light source, and the direction of light emitted by the second annular light source is perpendicular to the surface of the mounting plate 101, and is used to cooperate with the second detection light source to confirm whether the angle between the mounting plate 101 and the carrier 120 is within the second preset angle range.

[0127] In this embodiment, the number of the second annular light sources is four, namely, a second annular light source 130a, a second annular light source 130b, a second annular light source 1130c, and a second annular light source 130d, which are evenly distributed on the mounting plate 101, and the present application is not limited thereto.

[0128] Continue to refer Figure 1 The probe cleaning device includes: a carrier 120.

[0129] The carrier 120 is used to carry the wafer and clean the probe.

[0130] The material of the carrier 120 includes: rubber material (such as natural rubber, silicone rubber, etc.) or plastic material (such as polycarbonate, polypropylene, acrylic, etc.); the shape of the carrier 120 includes: one or more of a cube, a circular cylinder, an elliptical cylinder and a prism; in this embodiment, the material of the carrier 120 is plastic, and the shape of the carrier 120 is a cube.

[0131] refer to Figure 9 , combined with Figure 1 and Figure 8 ,in, Figure 9 Schematic diagram of the positional relationship between the first detection light source 121a and the first annular light source projection 117a in an embodiment of the present application. The stage 120 includes a first detection light source. The first detection light source is used to determine whether the deviation between the center of the first annular light source and the center of the first detection light source is within a first preset deviation range, thereby confirming whether the angle between the probe and the stage 120 is within the first preset angle range. In this embodiment, the first preset angle range is greater than or equal to 85 degrees and less than or equal to 95 degrees.

[0132] The pattern formed by the first detection light source includes one or more of a circle, an ellipse, annulus, square, triangle and polygon. In this embodiment, the pattern formed by the first detection light source is a circle, such as a circle A1. The pattern projected by the first annular light source from the mounting plate 101 to the carrier 120 is a circular ring A2. The diameter of the circle A1 is smaller than the inner ring diameter of the circular ring A2. By calculating the coordinates of the center of the circle A1 and the center coordinates of the circular ring A2, it is determined whether the deviation between the center of the first annular light source and the center of the first detection light source is within the first preset deviation range, so as to confirm whether the angle between the probe and the carrier 120 is within the first preset angle range. If the deviation between the center of the first annular light source and the center of the first detection light source exceeds the first preset deviation range, it is necessary to adjust the positional relationship between the probe and the carrier 120 so that the angle between the probe and the carrier 120 is within the first preset angle range, thereby improving the accuracy of wafer testing.

[0133] In this embodiment, the first detection light source is arranged opposite to the first annular light source so that the deviation between the center of the first annular light source and the center of the first detection light source is within a first preset deviation range; the first detection light source includes: a first detection light source 121a, a first detection light source 121b, a first detection light source 121c, a first detection light source 121d, a first detection light source 121e, and a first detection light source 121f, the first detection light source 121a is arranged opposite to the first annular light source 119a, the first detection light source 121b is arranged opposite to the first annular light source 119b, the first detection light source 121c is arranged opposite to the first annular light source 119c, the first detection light source 121d is arranged opposite to the first annular light source 119d, the first detection light source 121e is arranged opposite to the first annular light source 119e, and the first detection light source 121f is arranged opposite to the first annular light source 119f.

[0134] In this embodiment, one first annular light source corresponds to one first detection light source, that is, the first detection light sources correspond one-to-one to the first annular light sources.

[0135] In this embodiment, the projection of the first annular light source 119a on the carrier 120 is the first annular light source projection 117a, corresponding to the first detection light source 121a; the projection of the first annular light source 119b on the carrier 120 is the first annular light source projection 117b, corresponding to the first detection light source 121b; the projection of the first annular light source 119c on the carrier 120 is the first annular light source projection 117c, corresponding to the first detection light source 121c; the projection of the first annular light source 119d on the carrier 120 is the first annular light source projection 117d, corresponding to the first detection light source 121d; the projection of the first annular light source 119e on the carrier 120 is the first annular light source projection 117e, corresponding to the first detection light source 121e; the projection of the first annular light source 119f on the carrier 120 is the first annular light source projection 117f, corresponding to the first detection light source 121f.

[0136] like Figure 9 As shown, the positional relationship between the projection of the first ring light source 119a on the carrier 120, the projection of the first ring light source 117a, and the first detection light source 121a can be deduced accordingly. The positional relationship between the projection of the remaining first ring light sources on the carrier 120, the projection of the first ring light source, and the first detection light source can be deduced accordingly.

[0137] refer to Figure 10 and Figure 11 , combined with Figure 1 ,in, Figure 10 This is a measurement diagram of the second preset angle range in the embodiment of the present application; Figure 11 It is a schematic diagram of the positional relationship between the second detection light source 132a and the second annular light source projection 131a in an embodiment of the present application; the carrier 120 includes: a second detection light source.

[0138] The second detection light source is used to determine whether the deviation between the center of the second ring light source and the center of the second detection light source is within a second preset deviation range, so as to confirm whether the angle between the mounting plate 101 and the carrier 120 is within a second preset angle range. In this embodiment, the second preset angle range is greater than or equal to 85 degrees and less than or equal to 95 degrees.

[0139] The pattern formed by the second detection light source includes: one or more of a circle, an ellipse, a ring, a square, a triangle and a polygon. In this embodiment, the pattern formed by the second detection light source is a circle, such as circle B1; the pattern projected by the second ring light source from the mounting to the carrier 120 is a ring B2, and the diameter of the circle B1 is smaller than the inner ring diameter of the ring B2. By calculating the circular coordinates of the circle B1 and the center coordinates of the ring B2, it is determined whether the deviation between the center of the second ring light source and the center of the second detection light source is within the second preset deviation range, so as to confirm whether the angle between the mounting plate 101 and the carrier 120 is within the second preset angle range. If the deviation between the center of the second ring light source and the center of the second detection light source exceeds the first preset deviation range, it is necessary to adjust the positional relationship between the mounting plate 101 and the carrier 120 so that the angle between the mounting plate 101 and the carrier 120 is within the second preset angle range, thereby improving the accuracy of wafer testing.

[0140] In this embodiment, the second detection light source is arranged opposite to the second annular light source so that the deviation between the center of the second annular light source and the center of the second detection light source is within a second preset deviation range; in this embodiment, one second annular light source corresponds to one second detection light source, that is, the second detection light sources correspond one-to-one to the second annular light source, and the number of second detection units is 4; the second detection light source includes: a second detection light source 132a, a second detection light source 132b, a second detection light source 132c, and a second detection light source 132d, the second detection light source 132a is arranged opposite to the second annular light source 130a, the second detection light source 132b is arranged opposite to the second annular light source 130b, the second detection light source 132c is arranged opposite to the second annular light source 130c, and the second detection light source 132d is arranged opposite to the second annular light source 130d.

[0141] It should be noted that before confirming whether the angle between the probe and the carrier 120 is within the first preset angle range, it is first necessary to confirm whether the angle between the mounting plate 101 and the carrier 120 is within the second preset angle range, so as to facilitate judgment on whether there is foreign matter on the probe and / or whether the probe is bent.

[0142] In this embodiment, the projection of the second annular light source 130a on the carrier 120 is a second annular light source projection 131a, corresponding to the second detection light source 132a; the projection of the second annular light source 130b on the carrier 120 is a second annular light source projection 131b, corresponding to the second detection light source 132b; the projection of the second annular light source 130c on the carrier 120 is a second annular light source projection 131c, corresponding to the second detection light source 132c; the projection of the second annular light source 130d on the carrier 120 is a second annular light source projection 131d, corresponding to the second detection light source 132d.

[0143] like Figure 11 As shown, the projection of the second annular light source 130a on the carrier 120 is the second annular light source projection 131a, and its positional relationship with the second detection light source 132a. Based on this, the positional relationship between the projections of the remaining second annular light sources on the carrier 120 and the second detection light source can be deduced.

[0144] Continue to refer Figure 8 and Figure 10 The probe cleaning device includes: a scanning subunit 122, a calculation subunit 123, a first optical sensor 124a and a second optical sensor 124b.

[0145] In this embodiment, the first optical sensor 124 a and the second optical sensor 124 b are both coupled to the computing sub-unit 123 .

[0146] In this embodiment, the scanning subunit 122, the calculating subunit 123, the first optical sensor 124a and the second optical sensor 124b are used to obtain the brightness difference of the edge of the graphic (ie, the grayscale gradient change) to capture the edge coordinates of the graphic.

[0147] The first optical sensor 124a is coupled to the calculation subunit 123. With the center of the carrier 120 as a reference point, the scanning subunit 122 controls the first optical sensor 124a to move along the edge of the circle A1 and along the outer edge or inner edge of the ring A2 to obtain the coordinate points on the edge of the circle A1 and the coordinate points on the outer edge or inner edge of the ring A2. The calculation subunit 123 calculates the center coordinate A10 of the circle A1 and the center coordinate A20 of the ring A2 based on the coordinate points on the edge of the circle A1 and the coordinate points on the outer edge or inner edge of the ring A2. The calculation subunit 123 determines whether the deviation between the center of the first ring light source and the center of the first detection light source is within the first preset deviation range through the center coordinate A10 and the center coordinate A20, as well as the vertical distance between each probe and the carrier 120, to confirm whether the angle between the probe and the carrier 120 is within the first preset angle range.

[0148] Each probe corresponds to the first optical sensor 124 a one-to-one, that is, each probe corresponds to one first optical sensor 124 a.

[0149] For the sake of clarity and brevity of the attached drawings, Figure 8 As shown, only the first optical sensor 124a corresponding to the probe 105a is shown.

[0150] The second light sensor is coupled to the calculation subunit 123. With the center of the carrier 120 as a reference point, the scanning subunit 122 controls the second light sensor to move along the edge of the circle B1 and along the outer edge or inner edge of the ring-shaped circle B2 to obtain the coordinate points on the edge of the circle B1 and the coordinate points on the outer edge or inner edge of the ring-shaped circle B2. The calculation subunit 123 calculates the center coordinates B10 of the circle B1 and the center coordinates B20 of the ring-shaped circle B2 based on the coordinate points on the edge of the circle B1 and the coordinate points on the outer edge or inner edge of the ring-shaped circle B2. The calculation subunit 123 determines whether the deviation between the center of the second ring-shaped light source and the center of the second detection light source is within the second preset deviation range through the center coordinates B10 and B20, as well as the vertical distance between the mounting plate 101 and the carrier 120, to confirm whether the angle between the probe and the carrier 120 is within the second preset angle range.

[0151] The second detection light sources of the mounting plate 101 correspond one-to-one to the second optical sensors 124 b , that is, each second detection light source corresponds to one second optical sensor 124 b .

[0152] For the sake of clarity and brevity of the attached drawings, Figure 10As shown, only the second optical sensor 124b corresponding to the second detection light source 130b is shown.

[0153] In this embodiment, the first detection light source and the second detection light source are movably fixed on the carrier 120 , that is, the first detection light source and the second detection light source can be movable relative to the carrier 120 or fixed on the carrier 120 .

[0154] It should be noted that when the first annular light source and the second annular light source are selected, the edges of the projections of the first annular light source and the second annular light source on the carrier are easily captured by the first optical sensor and the second optical sensor; when the first detection light source and the second detection light source are selected, the edges of the first detection light source and the second detection light source on the carrier are easily captured by the first optical sensor and the second optical sensor.

[0155] It should be noted that the distance between the mounting plate 101 and the carrier 120 can be set according to actual needs, for example, to facilitate the movement of the first optical sensor and the second optical sensor along the edges of the corresponding first annular light source projection, second annular light source projection, first detection light source and second detection light source.

[0156] The number of the first optical sensors and the second optical sensors can be selected according to actual needs.

[0157] In this embodiment, the calculation subunit 123 includes a central processing unit, a memory, and a numerical comparator; the central processing unit is used for processing data, the memory is used for storing processed data, and the numerical comparator is used for comparing the numerical values ​​of coordinates.

[0158] In this embodiment, the scanning subunit 122 includes: a sensor power motor, and a cable connecting the scanning subunit 122 and the first optical sensor 124a and the second optical sensor 124b; the sensor power motor drives the first optical sensor 124a and the first optical sensor 124b to move, and each first optical sensor 124a independently corresponds to a sensor power motor, and each second optical sensor 124b independently corresponds to a sensor power motor, and the first optical sensor 124a and the second optical sensor 124b do not share the same sensor power motor.

[0159] refer to Figure 12 , combined with Figure 1 and Figure 5 ,in, Figure 12 This is a schematic diagram of the embodiment of the present application in which the rotating shaft drives the mounting plate to swing; the probe cleaning device includes: a point emitter 125.

[0160] The point transmitter 125 cooperates with the strip receiver 126 to monitor the swing amplitude of the mounting plate 101 .

[0161] The point transmitter 125 refers to a transmitter whose signal is transmitted in a straight line to the strip-shaped receiver 126 and is received by the strip-shaped receiver 126 .

[0162] The type of the point emitter 125 includes: one or more of an infrared light emitter, an ultraviolet light emitter, a microwave emitter, a particle emitter and a sound wave emitter. In this embodiment, the type of the point emitter 125 is an infrared emitter.

[0163] In this embodiment, the point emitter 125 is disposed at the center of the surface of the mounting plate 101. In other embodiments, the point emitter 125 can be disposed at any position on the mounting plate 101 according to actual needs.

[0164] In this embodiment, the number of the point emitter 125 is one. In other embodiments, the number of the point emitters 125 can be set on the mounting plate 101 according to actual needs.

[0165] Continue to refer Figure 1 and Figure 12 The probe cleaning device includes a strip-shaped receiver 126 .

[0166] The strip-shaped receiver 126 cooperates with the point transmitter 125 to monitor the swing amplitude of the mounting plate 101 .

[0167] In this embodiment, the bar-shaped receiver 126 is disposed on the carrier 120 and is opposite to the point emitter 125 .

[0168] The bar-shaped receiver 126 refers to a receiver that is in the shape of a bar. A plurality of sub-receivers are evenly arranged on the bar-shaped receiver 126 , and the distance between each sub-receiver can be set according to actual needs.

[0169] The strip receiver 126 includes one or more of an infrared strip receiver, an ultraviolet strip receiver, a microwave strip receiver, a particle strip receiver, and an acoustic wave strip receiver. In this embodiment, the strip receiver 126 is an infrared strip receiver.

[0170] In this embodiment, the strip-shaped receiver 126 is arranged on the carrier 120 along an axial direction perpendicular to the rotating shaft 114, that is, it extends along the first direction F1. The number of the strip-shaped receivers 126 corresponds to the number of the point emitters 125. In this embodiment, the number of the strip-shaped receivers 126 is 1, and the strip-shaped receiver 126 includes multiple sub-receivers. The point emitters 125 correspond to multiple sub-receivers. For the sake of simplicity and clarity of the drawings, only sub-receivers 126a and sub-receivers 126b are shown in this embodiment.

[0171] Before cleaning the probe, the point emitter 125 is opposite to the sub-receiver at the center of the shape receiver, and the signal emitted by the point emitter 125 is perpendicular to the surface of the carrier 120 .

[0172] Continue to refer Figure 1 、 Figure 5 and Figure 12 During the cleaning process of the probe, the rotating shaft 114 drives the mounting plate 101 to swing along the first direction F1. The swing range of the mounting plate 101 in the first direction F1 is the fan-shaped area from the time when the signal emitted by the point transmitter 125 is received by the sub-receiver 126a at one end of the first strip receiver 126 to the time when the signal is received by the sub-receiver 126b at the other end of the first strip receiver 126. The tip of the probe moves along the arc SX (as shown in FIG. Figure 12 When the signal emitted by the point transmitter 125 is received by the sub-receiver 126a at one end of the first bar receiver 126, the first motor 116 drives the shaft 114 along the direction F3 (as shown in FIG. Figure 5 When the signal emitted by the point transmitter 125 is received by the sub-receiver 126b at the other end of the first bar receiver 126, the first motor 116 drives the shaft 114 along the direction F4 (as shown). Figure 5 shown) movement.

[0173] It should be noted that the swing amplitude of the mounting plate and the distance between the sub-receivers 126a and 126b can be adjusted by the point emitter 125 and the strip receiver 126, so that the mounting plate can swing with a large amplitude, so that the probe is fully exposed to the blowing unit, thereby improving the cleaning effect of the probe.

[0174] It should be noted that the swing speed of the rotating shaft 114 can be adjusted by the first motor 116 to adjust the swing speed of the mounting plate and improve the cleaning effect of the probe.

[0175] Continue to refer Figure 1 The probe cleaning device includes: a detection unit.

[0176] The detection unit is used to detect the cleanliness of the probe, that is, the cleaning effect.

[0177] The detection unit includes: an image collector 133 for collecting the morphology of the probe tip to confirm the cleanliness of the probe;

[0178] The detection unit also includes: a light source (not shown) for emitting light to the cleaned probe; an optical lens for collecting light reflected by the probe tip and focusing it onto an image sensor; the optical lens is usually composed of multiple lenses, such as a convex lens and a concave lens, to correct aberrations such as chromatic aberration, distortion, etc.; a filter for selectively allowing light of a specific wavelength band to pass through and blocking unnecessary light; the types of filters include: an infrared cutoff filter for blocking infrared light to prevent it from interfering with visible light imaging; a bandpass filter for allowing only light of a specific wavelength range (such as red light, green light, blue light or a specific fluorescent wavelength) to pass through, for enhancing contrast or performing spectral analysis; a neutral density filter for uniformly attenuating the light intensity of all wavelengths, for using a large aperture or long exposure under strong light; a polarization filter for allowing only light of a specific polarization direction to pass through, for eliminating reflections, enhancing sky colors, etc.; the filter can be selected according to actual needs. In this embodiment, the filter is a bandpass filter. The image sensor (not shown) is responsible for converting the light signal (photon) focused on its surface into an electrical signal (electron), that is, performing photoelectric conversion, converting the light intensity distribution into a corresponding charge distribution diagram; the types of image sensors include: Charge-Coupled Device (CCD), which transfers the charge generated by the pixels row by row / column by row through charge coupling to an output amplifier for conversion, and has the advantages of high sensitivity, low noise, and high fill factor. The image signal processor (not shown) performs a series of complex processing on the raw electrical signal output by the image sensor, converting it into a high-quality, visual digital image and presenting it on the display. The detection unit also includes: a display (not shown), which is connected to the image collector 133 and is used to display the shape of the probe tip captured by the image collector 133 to facilitate confirmation of the cleaning effect of the probe.

[0179] The image collector 133 is disposed on the stage 120 and is disposed opposite to the probe tip. In this embodiment, the image collector 133 is movably fixed to the stage 120, that is, the image collector 133 can be movable relative to the stage 120 or fixed to the stage 120.

[0180] refer to Figure 13 , is a structural diagram of the polishing unit of an embodiment of the present application; the probe cleaning device includes: a polishing unit.

[0181] The polishing unit is used to polish the probe.

[0182] The polishing unit includes a polishing motor 127 and sandpaper 128. The sandpaper 128 is fixed on the surface of the circular wheel 129. The circular wheel 129 is fixedly connected to the polishing motor 127. When the detection unit detects that the probe tip has foreign matter, such as stubborn foreign matter attached to the probe position, the probe with foreign matter after cleaning is removed from the mounting plate 101, and the polishing motor 127 drives the circular wheel 129 to rotate. The probe with foreign matter rubs against the sandpaper 128 on the rotating circular wheel 129 to remove the foreign matter on the probe and improve the cleaning effect. For example, when the detection unit detects that the probe tip has become coarser, it is used to polish the probe tip.

[0183] The embodiment of the present application further provides a computer-readable storage medium having a computer program stored thereon, wherein when the computer program is run by a computer, the process of cleaning the probe by the above-mentioned probe cleaning device is executed. The storage medium may include a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk, etc. The storage medium may also include a non-volatile memory or a non-transitory memory, etc.

[0184] An embodiment of the present application further provides a terminal including a memory and a processor, wherein the memory stores a computer program that can be run on the processor, and when the processor runs the computer program, the process of cleaning the probe by the above-mentioned probe cleaning device is executed.

[0185] It should also be understood that the memory in the embodiments of the present application can be a volatile memory or a non-volatile memory, or can include both volatile and non-volatile memories. Among them, the non-volatile memory can be a ROM, a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), or a flash memory. The volatile memory can be a random access memory (RAM), which is used as an external cache. By way of example but not limitation, many forms of RAM are available, such as static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous link dynamic random access memory (SLDRAM), and direct rambus RAM (DR RAM).

[0186] An embodiment of the present application further provides a computer program product, including a computer program / instruction, which, when executed by a processor, implements the process of cleaning the probe by the above-mentioned probe cleaning device.

[0187] It should be understood that in the embodiments of the present application, the processor may be a central processing unit (CPU), or may be other general-purpose processors, digital signal processors (DSP), application-specific integrated circuits (ASIC), field programmable gate arrays (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. A general-purpose processor may be a microprocessor or any conventional processor.

[0188] The above embodiments can be implemented in whole or in part by software, hardware, firmware or any other combination. When implemented using software, the above embodiments can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions or computer programs. When the computer instructions or computer program are loaded or executed on a computer, the process or function described in the embodiment of the present application is generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer program can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer program can be transmitted from one website, computer, server or data center to another website, computer, server or data center by wired or wireless means.

[0189] It should be understood that the term "and / or" in this article is only a description of the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can represent three situations: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article indicates that the previous and next associated objects are in an "or" relationship. The "multiple" appearing in the embodiments of this application refers to two or more. The first, second, etc. descriptions appearing in the embodiments of this application are only for illustration and distinction of the described objects. There is no order, nor does it represent a special limitation on the number of devices in the embodiments of this application, and cannot constitute any limitation on the embodiments of this application.

[0190] Although the present invention has been disclosed above in terms of preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art may make possible changes and modifications to the technical solutions of the present invention by using the methods and technical contents disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solutions of the present invention shall fall within the scope of protection of the technical solutions of the present invention.

Claims

1. A probe cleaning device, characterized in that: include: The needle card comprises: a first surface and a second surface opposite to the first surface; a first through hole, passing through the needle card; A probe, coupled to the first surface of the needle card; The blowing unit, adjacent to the second side of the needle card, comprises: A pipe, one end of which has a bell-shaped air outlet; The blowing unit blows out gas through the gas outlet, and the gas cleans the probe after flowing through at least the first through hole.

2. The probe cleaning device according to claim 1, wherein The blowing unit further comprises: Air supply subunit; an air valve, one end of the air valve being connected to the other end of the pipeline, and the other end of the air valve being connected to the air supply subunit; The fixing subunit is used to fix the blowing unit.

3. The probe cleaning device according to claim 1, wherein: Also includes: a mounting plate coupled to the first surface of the needle card and having a plurality of second through holes, wherein projections of the plurality of second through holes on the needle card are located within the first through holes; A probe is located on the mounting plate, and a projection of the probe on the needle card is located within the first through hole; The gas blown out by the blowing unit through the gas outlet flows through the first through hole and the second through hole in sequence to clean the probe.

4. The probe cleaning device according to claim 3, wherein: The mounting plate further comprises: a rotating shaft, parallel to the surface of the mounting plate and passing through the mounting plate, wherein both ends of the rotating shaft are rotatably fixed to the needle clamp, so that the mounting plate and the needle clamp can swing relative to each other via the rotating shaft; A plurality of third through holes pass through the surface of the mounting plate, and the projections on the needle card are located within the first through holes. Wherein, the probe is installed in the third through hole.

5. The probe cleaning device according to claim 4, wherein: Also includes: a first annular light source, disposed in the third through hole and surrounding the probe, wherein the direction of light emitted by the first annular light source is parallel to the axial direction of the probe, wherein the inner diameter of the first annular light source is larger than the outer diameter of the probe; The second annular light source is arranged on the mounting plate outside the third through hole, and the direction of light emitted by the second annular light source is perpendicular to the surface of the mounting plate.

6. The probe cleaning device according to claim 5, wherein: Also includes: The point emitter is arranged on the mounting plate.

7. The probe cleaning device according to claim 6, wherein: Also includes: The carrier includes a strip-shaped receiver arranged opposite to the point transmitter and used for monitoring the swing amplitude of the mounting plate.

8. The probe cleaning device according to claim 7, wherein: The carrier further includes: a first detection light source, arranged opposite to the first annular light source, for determining whether a deviation between a center of the first annular light source and a center of the first detection light source is within a first preset deviation range, so as to confirm whether an angle between the probe and the carrier is within the first preset angle range; A second detection light source is arranged opposite to the second annular light source, and is used to determine whether the deviation between the center of the second annular light source and the center of the second detection light source is within a second preset deviation range, so as to confirm whether the angle between the mounting plate and the carrier is within the second preset angle range.

9. The probe cleaning device according to claim 1, wherein: Also includes: A detection unit, used to detect the cleanliness of the probe, comprising: An image collector is used to collect the morphology of the probe tip to confirm the cleanliness of the probe.

10. The probe cleaning device according to claim 1, wherein: Also includes: The grinding unit is used for grinding the probe, and comprises a motor and sandpaper.

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