Insulation protection structure for probe card

Abstract

The utility model discloses an insulation protection structure for a probe card. The insulation protection structure comprises a probe main body and a jack arranged in the probe main body. When the insulation protection structure for the probe card is used, the probe body is installed inside a socket, when an integrated circuit needs to be detected, the probe head is in contact with the integrated circuit, when the probe head is in contact with the integrated circuit, the contact tightness of the probe head and the integrated circuit can be enhanced due to the fact that the probe head is extruded by the spring, and meanwhile, the probe head is prevented from being damaged. In the moving process of the probe head, limiting clamping blocks on the left side and the right side of a first connecting plate can move in limiting clamping grooves in the inner wall of an insertion hole, so that the limiting effect on the probe head is achieved, and then whether an integrated circuit is qualified or not is judged by transmitting certain current and frequency; the contact tightness of the probe and the integrated circuit is enhanced, and the poor contact of the probe head and the integrated circuit is prevented from influencing the detection quality.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor testing technology, specifically relating to an insulating protection structure for probe cards. Background Technology

[0002] A probe is a tool used for specific detection or operation, typically with a long, thin shape and a pointed tip. Probes are widely used in many fields, including biology, medicine, electronics, physics, and chemical research. Insulation protection structures for probe cards generally refer to the insulating materials or structures used in probe cards to protect probes and other components from damage and ensure the accuracy and reliability of testing. Existing insulation protection structures for probe cards mainly consist of components such as the probe body, insulating sleeve, and probe tip. Poor contact between the probe tip and the integrated circuit during use can affect the quality of the detection, therefore, an insulation protection structure for probe cards is essential. Utility Model Content

[0003] The purpose of this invention is to provide an insulating protective structure for probe cards, so as to solve the problem mentioned in the background art that poor contact between the probe tip and the integrated circuit will affect the quality of detection when using the existing insulating protective structure for probe cards.

[0004] To achieve the above objectives, this utility model provides the following technical solution: an insulating protective structure for probe cards, comprising...

[0005] The probe body and the insertion hole located inside the probe body;

[0006] A second connecting plate is installed at the bottom of the socket, and a fixing tube is installed at the upper end of the second connecting plate;

[0007] A spring is installed inside the fixed tube, and a telescopic column is connected inside the fixed tube and at the upper end of the spring. A first connecting plate is located at the upper end of the telescopic column.

[0008] A probe head is connected to the upper end of the first connecting plate and located inside the socket, and an insulating sleeve is installed inside the socket and located outside the probe head.

[0009] A limiting slot is provided on the inner wall of the socket and on the left and right sides of the socket. A limiting block is connected inside the limiting slot and on the left and right sides of the first connecting plate.

[0010] The fixed tube, spring, and telescopic column enhance the tightness of the contact between the probe and the integrated circuit, while the limiting block and limiting slot enhance the stability of the probe movement.

[0011] Preferably, the telescopic column and the first connecting plate, and the fixing pipe and the second connecting plate are an integral structure, and the first connecting plate, the second connecting plate, the fixing pipe and the telescopic column are all made of semiconductor material.

[0012] Preferably, the fixing tube is a hollow cylindrical structure, and the telescopic column is a solid cylindrical structure.

[0013] Preferably, the inner diameter of the fixed tube is equal to the outer diameter of the telescopic column, and the telescopic column and the fixed tube are connected by a plug-in connection.

[0014] Preferably, the telescopic column and the fixed tube are connected by a spring. The use of the fixed tube and the telescopic column together enhances the stability of the telescopic column connection and the ease of movement.

[0015] Preferably, grooves are provided on the left and right sides of the outer wall of the probe head, and protrusions are connected inside the grooves and located on the inner wall of the insulating sleeve.

[0016] Preferably, the insulating sleeve and the probe head are connected by a sleeve connection, and the protrusion and the groove are connected by a snap-fit ​​connection.

[0017] Preferably, both the insulating sleeve and the protrusion are made of insulating rubber material. The use of the protrusion, groove, sleeve and snap-fit ​​together enhances the stability of the insulating sleeve installation.

[0018] Compared with the prior art, the present invention provides an insulating protective structure for probe cards, which has the following beneficial effects:

[0019] This invention improves an insulating protective structure for probe cards. When using this structure, the probe body is first installed inside the socket. When testing an integrated circuit, the probe head contacts the integrated circuit. During contact, the spring compression strengthens the tightness of the contact. Simultaneously, as the probe head moves, the limiting blocks on both sides of the first connecting plate move within the limiting slots on the inner wall of the socket, thus restricting the probe head. A certain current and frequency are then transmitted to determine if the integrated circuit is qualified. The use of a fixing tube, spring, and telescopic column enhances the tightness of the contact between the probe and the integrated circuit, preventing poor contact from affecting the testing quality. The limiting blocks and limiting slots also improve the stability of the probe movement. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of the insulating protection structure for the probe card of this utility model.

[0021] Figure 2 This is a schematic diagram of the internal structure of the probe card insulation protection structure of this utility model, viewed from the front.

[0022] Figure 3 This is an enlarged structural schematic diagram of the insulating protective structure spring for the probe card of this utility model.

[0023] Figure 4 This is an enlarged structural diagram of the protrusions and grooves of the insulating protective structure for the probe card of this utility model.

[0024] In the figure: 1. Probe body; 2. Insulating sleeve; 3. Probe head; 4. First connecting plate; 5. Fixing tube; 6. Insertion hole; 7. Second connecting plate; 8. Spring; 9. Telescopic column; 10. Restricting slot; 11. Protrusion; 12. Restricting block; 13. Groove. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] This utility model provides, for example Figure 1-4 The probe card insulation protection structure shown includes a probe body 1 and an insertion hole 6 located inside the probe body 1; a second connecting plate 7 is installed at the bottom of the insertion hole 6, and a fixing tube 5 is installed at the upper end of the second connecting plate 7; a spring 8 is installed inside the fixing tube 5, and a telescopic post 9 is connected inside the fixing tube 5 and above the spring 8; a first connecting plate 4 is located at the upper end of the telescopic post 9; a probe head 3 is connected to the upper end of the first connecting plate 4 and inside the insertion hole 6, and an insulating sleeve 2 is installed inside the insertion hole 6 and outside the probe head 3; a limiting slot 10 is provided on the inner wall of the insertion hole 6 and on the left and right sides of the insertion hole 6, and a limiting block 12 is connected inside the limiting slot 10 and on the left and right sides of the first connecting plate 4; the fixing tube 5, spring 8 and telescopic post 9 enhance the tightness of the contact between the probe and the integrated circuit, while the limiting block 12 and limiting slot 10 enhance the stability of the probe movement.

[0027] like Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, in order to enhance the tightness of the contact between the probe and the integrated circuit, when using the probe card with an insulating protective structure, the probe body 1 is first installed inside the socket. When the integrated circuit needs to be tested, the probe head 3 makes contact with the integrated circuit. When the probe head 3 contacts the integrated circuit, the spring 8 squeezes the probe head 3, which strengthens the tightness of the contact with the integrated circuit. At the same time, during the movement of the probe head 3, the limiting blocks 12 on the left and right sides of the first connecting plate 4 will move in the limiting slots 10 on the inner wall of the socket 6, thereby limiting the probe head 3. Then, by transmitting a certain current and frequency, it is determined whether the integrated circuit is qualified. The setting of the fixing tube 5, the spring 8 and the telescopic column 9 strengthens the tightness of the contact between the probe and the integrated circuit, and avoids the poor contact between the probe head 3 and the integrated circuit affecting the quality of the test. The setting of the limiting blocks 12 and the limiting slots 10 enhances the stability of the probe movement.

[0028] The telescopic column 9, the first connecting plate 4, the fixing tube 5, and the second connecting plate 7 are integrated into one structure. The first connecting plate 4, the second connecting plate 7, the fixing tube 5, and the telescopic column 9 are all made of semiconductor material. The fixing tube 5 is a hollow cylindrical structure, and the telescopic column 9 is a solid cylindrical structure. The inner diameter of the fixing tube 5 is equal to the outer diameter of the telescopic column 9. The telescopic column 9 and the fixing tube 5 are connected by a plug-in connection. The telescopic column 9 and the fixing tube 5 are connected by a spring 8. The use of the fixing tube 5 and the telescopic column 9 together enhances the stability of the plug-in connection of the telescopic column 9 and the ease of movement.

[0029] like Figure 2 , Figure 3 and Figure 4 As shown, to enhance the stability and ease of movement of the telescopic post 9 during insertion, when using the probe card with an insulating protective structure, the second connecting plate 7 is first installed at the bottom of the insertion hole 6, then the fixing tube 5 is installed at the top of the second connecting plate 7, then one end of the spring 8 is glued to the bottom of the fixing tube 5, then the other end of the spring 8 is glued to the bottom of the telescopic post 9, then the telescopic post 9 is inserted into the interior of the fixing tube 5, and then the first connecting plate 4 is installed at the top of the telescopic post 9. When testing the integrated circuit, the probe head 3 contacts the integrated circuit. When the probe head 3 contacts the integrated circuit, the spring 8 compresses the probe head 3, which in turn drives the probe head 3 to contact the integrated circuit through the telescopic post 9, thereby enhancing the tightness of the contact between the probe head 3 and the integrated circuit. Through the combined use of the fixing tube 5 and the telescopic post 9, the stability and ease of movement of the telescopic post 9 during insertion are enhanced.

[0030] The probe head 3 has grooves 13 on both sides of its outer wall. Inside the grooves 13, at the position of the inner wall of the insulating sleeve 2, there are protrusions 11. The insulating sleeve 2 and the probe head 3 are connected by a sleeve connection, and the protrusions 11 and the grooves 13 are connected by a snap-fit ​​connection. Both the insulating sleeve 2 and the protrusions 11 are made of insulating rubber material. The use of the protrusions 11, grooves 13, sleeve connection and snap-fit ​​connection enhances the stability of the installation of the insulating sleeve 2.

[0031] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, in order to enhance the stability of the installation of the insulating sleeve 2, when using the probe clip insulation protection structure, the insulating sleeve 2 is first sleeved on the outside of the probe head 3, and then the insulating sleeve 2 is pulled down so that the protrusion 11 on the inner wall of the insulating sleeve 2 is inserted into the groove 13 on the outer wall of the probe head 3, thereby making the insulating sleeve 2 installed on the outside of the probe head 3. Through the combined use of the protrusion 11, the groove 13, the sleeve and the snap, the stability of the installation of the insulating sleeve 2 is enhanced.

[0032] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An insulating protective structure for a probe card, characterized in that: include The probe body (1) and the insertion hole (6) located inside the probe body (1); A second connecting plate (7) is installed at the bottom of the socket (6), and a fixing tube (5) is installed at the upper end of the second connecting plate (7). A spring (8) is installed inside the fixed tube (5), and a telescopic column (9) is connected inside the fixed tube (5) and at the upper end of the spring (8). A first connecting plate (4) is located at the upper end of the telescopic column (9). A probe head (3) is connected to the upper end of the first connecting plate (4) and located inside the socket (6), and an insulating sleeve (2) is installed inside the socket (6) and located outside the probe head (3). A limiting slot (10) is provided on the inner wall of the socket (6) and at the left and right sides of the socket (6). A limiting block (12) is connected inside the limiting slot (10) and at the left and right sides of the first connecting plate (4). The fixed tube (5), spring (8) and telescopic column (9) enhance the tightness of the contact between the probe and the integrated circuit, while the limiting block (12) and limiting slot (10) enhance the stability of the probe movement.

2. The insulating protection structure for a probe card according to claim 1, characterized in that: The telescopic column (9) and the first connecting plate (4), the fixing tube (5) and the second connecting plate (7) are an integral structure. The first connecting plate (4), the second connecting plate (7), the fixing tube (5) and the telescopic column (9) are all made of semiconductor materials.

3. The insulating protection structure for a probe card according to claim 2, characterized in that: The fixed tube (5) is a hollow cylindrical structure, and the telescopic column (9) is a solid cylindrical structure.

4. The insulating protection structure for a probe card according to claim 3, characterized in that: The inner diameter of the fixed tube (5) is equal to the outer diameter of the telescopic column (9), and the telescopic column (9) and the fixed tube (5) are connected by plugging.

5. The insulating protection structure for a probe card according to claim 4, characterized in that: The telescopic column (9) and the fixed tube (5) are connected by a spring (8). The use of the fixed tube (5) and the telescopic column (9) together enhances the stability of the telescopic column (9) insertion and the ease of movement.

6. The insulating protection structure for a probe card according to claim 1, characterized in that: The probe head (3) has grooves (13) on the left and right sides of its outer wall, and protrusions (11) are connected inside the grooves (13) and on the inner wall of the insulating sleeve (2).

7. The insulating protection structure for a probe card according to claim 6, characterized in that: The insulating sleeve (2) and the probe head (3) are connected by a sleeve connection, and the protrusion (11) and the groove (13) are connected by a snap-fit ​​connection.

8. The insulating protection structure for a probe card according to claim 7, characterized in that: Both the insulating sleeve (2) and the protrusion (11) are made of insulating rubber material. The stability of the installation of the insulating sleeve (2) is enhanced by the combined use of the protrusion (11), the groove (13), the sleeve and the snap.

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