Erosion-resistant high-temperature oxidation-resistant coating, preparation method and application

Abstract

The invention discloses an anti-erosion high-temperature-oxidation-resistant coating, a preparation method and application, the coating comprises two main body layers, the first main body layer is a shape SMA transition layer deposited by using a magnetron sputtering technology; the second main body layer comprises an HEA alloy layer deposited by using a magnetron sputtering ion plating technology and an HEAC < x > N < 1-x > layer deposited by using an arc ion plating technology, the HEA and the HEAC < x > N < 1-x > layers are sequentially stacked from bottom to top, and x is more than 0 and less than 0.9; the multi-layer coating has the advantages of high strength and toughness, high film-substrate binding force, good surface quality and good high temperature resistance and erosion resistance. The application comprises the step of forming a plurality of laminated multi-layer coatings on a substrate by utilizing magnetron sputtering ion plating and arc ion plating technologies. The method is simple, high in efficiency, good in repeatability, good in coating surface quality and easy to realize large-area industrial production. When the material is used for resisting high temperature and erosion of engineering materials, the abrasion phenomenon of the surface of a matrix can be effectively relieved, and the use temperature and the erosion resistance are improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of surface protection manufacturing of engineering materials, and in particular relates to an erosion-resistant and high-temperature oxidation-resistant coating, and also relates to a preparation method and application of the erosion-resistant and high-temperature oxidation-resistant coating. Background Art

[0002] Erosion-oxidation failure is one of the common failure modes in the aviation field. Solid particle erosion occurs when sand and gravel are entrained by the airflow and impact the surface of the component. At the same time, as the thrust-to-weight ratio of aircraft in the aviation field gradually increases, its operating temperature also gradually increases. Therefore, the relevant components will be subjected to oxidation in a high-temperature environment while being eroded. This leads to the failure of the components in a combined environment of erosion-oxidation. Currently, titanium alloy materials are increasingly used in aviation components, but their application areas are limited due to their low surface hardness, poor friction and wear properties, poor resistance to solid particle erosion, and inability to resist high-temperature oxidation. In response to the above problems, choosing appropriate surface treatment technology can improve these properties.

[0003] Physical vapor deposition (PVD) has become a widely used surface technology for producing coatings of various materials and properties. Arc ion plating and magnetron sputtering ion plating are particularly popular in the industrial sector. Magnetron sputtering ion plating offers smooth, dense coatings, while arc ion plating is more suitable for producing nitrogen / carbide hard coatings, due to its strong bonding and high deposition rate. Therefore, the advantages of both technologies can be leveraged while mitigating their disadvantages to create multilayer composite coatings that meet application requirements.

[0004] Shape memory alloys (SMAs) are alloys that, upon heating, completely eliminate deformation incurred at lower temperatures and restore their original shape, exhibiting a "memory" effect. Therefore, these alloys are highly suitable for use as bonding layers in protective coatings on titanium alloy surfaces. Because the alloy contains a large amount of Ti, it bonds perfectly with the Ti in the substrate and the outer protective coating, forming a composite coating structure with excellent adhesion. High entropy alloys (HEAs) are alloys composed of five or more metals in equal or approximately equal amounts. Their unique alloy design concept endows them with a range of unique properties, unlike traditional alloys, such as slow diffusion, severe lattice distortion, and high-temperature stability. These properties hold great potential for application in high-temperature applications. Based on this background, the present invention proposes a method for preparing and applying an erosion-resistant oxidation coating. Summary of the Invention

[0005] The purpose of the present invention is to provide a method for preparing an erosion-resistant and high-temperature oxidation-resistant coating, which solves the problems of low surface hardness and poor wear resistance of the existing coating.

[0006] The present invention also aims to provide an anti-erosion and high-temperature oxidation-resistant coating prepared by the above-mentioned preparation method.

[0007] The present invention also aims to provide an application of the erosion-resistant and high-temperature oxidation-resistant coating.

[0008] The first technical solution adopted by the present invention is a method for preparing an erosion-resistant and high-temperature oxidation-resistant coating, which first uses magnetron sputtering technology to deposit a shape memory alloy SMA transition layer, and then deposits HEA-HEAC on the SMA transition layer. x N 1-x Composite layer, the HEA-HEAC x N 1-x The composite layer includes a high entropy alloy layer HEA and a high entropy alloy nitride carbide layer HEAC deposited sequentially from bottom to top. x N 1-x , 0 <x<0.9;HEA选自AlCoCrNiMo、AlCoCrFeNi中的任意一种。

[0009] The present invention is also characterized in that: Furthermore, the high entropy alloy layer HEA is deposited by magnetron sputtering ion plating technology, and the high entropy alloy nitride carbide layer HEAC x N 1-x Deposition is done using arc ion plating technology.

[0010] Furthermore, the total thickness of the erosion-resistant and high-temperature oxidation-resistant coating is 8-40 μm, and the thickness of the SMA transition layer is 2-5 μm; Furthermore, the high entropy alloy layer HEA and the high entropy alloy nitride carbide layer HEAC x N 1-x According to the thickness requirements, the number of cycles is set. In each cycle of coating, the thickness of the high entropy alloy layer HEA is 200-1000nm, and the thickness of the high entropy alloy nitrogen carbide layer HEAC is 200-1000nm. x N 1-x The thickness is 200-2000nm.

[0011] In each coating cycle, the thickness of the high entropy alloy layer HEA is the same as that of the high entropy alloy nitride carbide layer HEAC. x N 1-x The thickness ratio is 1:1-1:10.

[0012] Furthermore, the SMA transition layer material is selected from any one of TiNi and TiNb.

[0013] Furthermore, the SMA transition layer preparation method is: using argon as the reaction gas, TiNi or TiNb target as the target material, magnetron sputtering ion plating deposition under the conditions of gas pressure of 1-4 Pa, pulse negative bias of 60-100 V, and target current of 0.5-2 A, and the deposition time is 120-300 min.

[0014] Furthermore, the high entropy alloy layer HEA is prepared by magnetron sputtering ion plating deposition under the conditions of argon as the reaction gas, a gas pressure of 1-4 Pa, a pulsed negative bias voltage of 60-100 V, and a target current of 0.5-2 A, and the deposition time is 360-2100 min; Furthermore, the high entropy alloy nitride carbide layer HEAC x N 1-x The preparation method is as follows: using nitrogen and methane as reaction gases, arc ion plating deposition is performed under the conditions of gas pressure of 1-4 Pa, pulse negative bias voltage of 80-120 V, target current of 70-100 A, and deposition time of 360-2100 min.

[0015] Preparation mechanism of the present invention: (1) In terms of material selection: High entropy alloys have a series of unique properties different from traditional alloys, such as slow diffusion effect, severe lattice distortion effect and stability at high temperature, and have great potential for application in high temperature fields. The oxidation resistance of AlCoCrFeNi high entropy alloy has been reported. The alloy exhibits an extremely low oxidation rate (1.9×10-13g2cm-4s-1) at 1373K. High entropy alloy films with simple solid solution or amorphous structure can significantly reduce the interdiffusion rate between elements at high temperature. The study also found that HEA containing five equimolar elements has the best slow diffusion effect, and the correct amount of elements is used to minimize the atomic diffusion rate.

[0016] In the present invention, the alloy is a soft layer and the nitrogen carbide is a hard layer. The alternation of soft and hard makes the coating stronger and tougher. Erosion resistance requires high strength and toughness and a combination of a membrane base. The SMA transition layer is used to enhance the bonding strength and secondly, the shape memory alloy has excellent elasticity and plasticity. It can still recover after deformation on the surface, so that the coating will not fail quickly after erosion.

[0017] (2) In terms of the method of controlling the surface quality of the coating: magnetron sputtering and arc ion plating are used alternately for coating. The surface flatness of the magnetron sputtering coating is higher, and the advantage of arc ion plating is its high preparation efficiency, but there will be particle defects on the surface. Therefore, alternating use can reduce the growth of particles and improve the surface quality.

[0018] The second technical solution adopted by the present invention is that the erosion-resistant and high-temperature oxidation-resistant coating is prepared by the above-mentioned preparation method, comprising an SMA transition layer and a high entropy alloy layer HEA and a high entropy alloy nitrogen carbide layer HEAC deposited in sequence on the SMA transition layer. x N 1-x , 0 <x<0.9;HEA选自AlCoCrNiMo、AlCoCrFeNi中的任意一种。

[0019] Furthermore, the hardness of the coating of the present invention is 1832-2795 HV.

[0020] Furthermore, the coating film-base bonding strength of the present invention is not less than 80N.

[0021] Furthermore, the erosion rate of the coating of the present invention is 0.173-0.292 μm / g at an attack angle of 30° in a high temperature environment of 650°C.

[0022] Furthermore, the erosion rate of the coating of the present invention at an attack angle of 90° in a high temperature environment of 650°C is 0.942-1.438 μm / g.

[0023] The third technical solution adopted by the present invention is to apply an erosion-resistant and high-temperature oxidation-resistant coating, depositing the erosion-resistant and high-temperature oxidation-resistant coating on the surface of a metal substrate or an alloy substrate to improve the high-temperature and erosion-resistant performance of the substrate.

[0024] The beneficial effects of the present invention are: The present invention uses magnetron sputtering ion plating technology to deposit the film-based transition layer SMA. On the one hand, the Ti element in the shape memory alloy SMA can form a good bond with the metal matrix (especially titanium alloy). On the other hand, SMA has excellent deformation recovery ability. After being deformed by solid particles, it can return to its original shape and maintain the integrity of the coating. The HEA alloy layer is deposited by magnetron sputtering ion plating technology, and the HEAC is deposited by arc ion plating technology. x N 1-x Layer, HEA, HEAC stacked from bottom to top x N 1-x On the one hand, the coating still contains Ni elements, forming a good interface with the substrate and transition layer. On the other hand, HEA has excellent toughness and high temperature stability. x N 1-x It also has a certain hardness, and through the combination of soft and hard modes, the coating has both good toughness and high temperature resistance.

[0025] This invention utilizes a composite deposition process of magnetron sputtering ion plating and arc ion plating. Magnetron sputtering ion plating produces a fine film, but the deposition rate is slow. Arc ion plating has a high deposition rate, but inevitably forms large surface particles. Therefore, by alternating the power supply of these two technologies, grain refinement and coating densification are achieved. Furthermore, the short arc deposition process results in smaller particles, increasing the particle bombardment energy and improving interlayer bonding. By utilizing these two technologies, the coating achieves excellent surface quality and corrosion and oxidation resistance.

[0026] Applying this multilayer coating technology to the production of high-temperature erosion-resistant coatings effectively mitigates surface wear on substrates, particularly titanium alloy substrates, and increases operating temperature and erosion resistance. Engineering materials coated with this multilayer coating exhibit excellent resistance to high-temperature erosion and wear, improving operational efficiency and extending service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0028] Figure 1 This is a schematic structural diagram of the erosion-resistant and high-temperature oxidation-resistant coating of Example 1 of the present invention. DETAILED DESCRIPTION

[0029] The present invention will be further described below with reference to the accompanying drawings and examples.

[0030] To make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are described clearly and completely below. Where specific conditions are not specified in the embodiments, conventional conditions or conditions recommended by the manufacturer are used. Where the manufacturer of the reagents or instruments is not specified, all are conventional products that can be purchased commercially.

[0031] Example 1 The erosion-resistant and high-temperature oxidation-resistant coating provided by this application is Figure 1 As shown, it includes an SMA transition layer and a plurality of stacked high entropy alloy layers HEA and high entropy alloy nitride carbide layers HEAC. x N 1-x , 0 <x<0.9;HEA选自AlCoCrNiMo、AlCoCrFeNi中的任意一种;SMA过渡层材料为TiNi、TiNb 中的任意一种。

[0032] The total thickness of the erosion-resistant and high-temperature oxidation-resistant coating is 8-40μm, and the thickness of the SMA transition layer is 2-5μm; High entropy alloy layer HEA and high entropy alloy nitride carbide layer HEAC x N 1-x According to the thickness requirements, the number of cycles is set. In each cycle of coating, the thickness of the high entropy alloy layer HEA is 200-1000nm, and the thickness of the high entropy alloy nitrogen carbide layer HEAC is 200-1000nm. x N 1-x The thickness is 200-2000nm.

[0033] Example 2 The present invention first uses magnetron sputtering technology to deposit a shape memory alloy SMA transition layer, and then deposits HEA-HEAC on the SMA transition layer. x N 1-x Composite layer, HEA-HEAC x N 1-x The composite layer includes a high entropy alloy layer HEA and a high entropy alloy nitride carbide layer HEAC deposited sequentially from bottom to top. x N 1-x , 0 <x<0.9;HEA选自AlCoCrNiMo、AlCoCrFeNi中的任意一种;通过一定氮碳含量比例的氮碳化高熵合金可有效提高涂层的硬度、耐磨性和耐高温性;具体如下: Step 1: The target material of the SMA transition layer of magnetron sputtering ion plating is selected from either TiNi or TiNb.

[0034] Step 2: Multilayer structure coating deposition, including magnetron sputtering ion plating HEA and arc ion plating HEAC x N 1-x The high hardness of the surface layer provides good wear resistance. The multi-layer structure and the deformation ability of the transition layer can resist the vertical erosion of solid particles, playing a role in dispersing and consuming particle energy. Specifically, in the above double-layer structure, the hardness of the HEA layer is lower than that of the HEAC layer. x N 1-x layer, so it is preferred to form HEA-HEAC x N 1-x order.

[0035] Alternatively, the total thickness of the coating of the present application may be 8-40 μm, such as 8 μm, 10 μm, 20 μm, 30 μm, or 40 μm, or any thickness within the range of 8-40 μm, such as 15 μm, 25 μm, or 35 μm. It is worth noting that the total thickness of the multilayer coating of the present application may also be less than 8 μm or greater than 40 μm, and the aforementioned thickness range of 8-40 μm is a preferred range.

[0036] Furthermore, the thickness of the SMA transition layer in the coating can be 2-5 μm, such as 2 μm, 3 μm, 4 μm, or 5 μm, or any thickness within the range of 2-5 μm. It is worth noting that the thickness of each periodic coating can also be less than 2 μm or greater than 5 μm, and the aforementioned thickness range of 2-5 μm is a preferred range.

[0037] Furthermore, HEA-HEAC in the coating x N 1-x The thickness of the multilayer coating can be 5-35 μm, such as 5 μm, 15 μm, 25 μm, or 35 μm, or any thickness within the range of 5-35 μm. It is worth noting that the thickness of each periodic coating can also be less than 5 μm or greater than 35 μm, and the above-mentioned thickness range of 5-35 μm is a preferred range.

[0038] In some preferred embodiments, the thickness of the HEA layer in each coating cycle can be 200-1000 nm. x N 1-x The thickness of the layer may be 200-2000 nm.

[0039] In some embodiments, HEA-HEAC x N 1-x The composite layer may include 10-50 cycles of coating, and may also include 20-100 cycles of coating.

[0040] In some embodiments, in each coating cycle, the HEA layer and the HEAC layer x N 1-x The layer thickness ratio can be 1:1-1:10, such as 1:1, 1:2, 1:4, 1:6, 1:8 or 1:10, etc., or any ratio within the range of 1:1-1:10. It is worth noting that the HEA layer and the HEAC x N 1-x The layer thickness ratio may also be less than 1:1 or greater than 1:10, with the aforementioned 1:1-1:10 being a preferred range.

[0041] In the present application, by limiting the thickness of each layer, the multilayer structure is made to cooperate with each other within a suitable hardness range, which not only allows the multilayer coating to maintain good interlayer bonding, but also improves the overall strength and toughness of the coating.

[0042] In some preferred embodiments, the hardness of the coating of the present invention is 1832-2795 HV, such as 1883 HV, 2453 HV or 2739 HV.

[0043] In some preferred embodiments, the coating film-base bonding strength of the present invention is not less than 80-95N.

[0044] In some preferred embodiments, the coating of the present invention has an erosion rate of 0.173-0.292 μm / g at an attack angle of 30° in a high temperature environment of 650°C.

[0045] In some preferred embodiments, the multi-layer coating has an erosion rate of 0.942-1.438 μm / g at an attack angle of 90° in a high temperature environment of 650°C.

[0046] In summary, the present application achieves the strengthening and toughening of the coating by controlling the preparation method, structure and elements of the erosion-resistant and high-temperature oxidation coating, that is, controlling the internal stress of the coating and achieving a reasonable match between the hardness and toughness of the coating. Under the premise of a thicker coating, it also ensures that the bonding force between the coating and the substrate is above 80N, which is beneficial to improving the high-temperature erosion resistance of the substrate and effectively improving the working efficiency and service life of the substrate material.

[0047] Example 3 The present application also provides a method for preparing an erosion-resistant and high-temperature oxidation-resistant coating, comprising the following steps: a first step of preparing an SMA transition layer by magnetron sputtering ion plating; a second step of depositing a multilayer structure coating, comprising magnetron sputtering ion plating HEA and arc ion plating HEAC. x N 1-x Double-layer superimposed structure.

[0048] In the process of preparing the SMA transition layer, magnetron sputtering ion plating technology is adopted.

[0049] When preparing the SMA transition layer, the background vacuum can be 1.5×10 -3 -4.5×10 -3 Pa, the workpiece speed can be 0-3rpm.

[0050] For reference, the preparation method of the SMA transition layer includes: using argon as the reaction gas, performing magnetron sputtering ion plating under the conditions of a gas pressure of 1-4 Pa, a pulsed negative bias voltage of 60-100 V, and a target current of 0.5-2 A. The SMA layer uses a TiNi or TiNb target as the target material.

[0051] Furthermore, in some embodiments, the SMA transition layer deposition time may be 120-300 minutes.

[0052] In the preparation of HEA / HEAC x N 1-x In the multi-layer process, magnetron sputtering ion plating and arc ion plating are used alternately.

[0053] For reference, in this preparation process, argon or nitrogen / methane are used as the reaction gas, argon is used as the reaction gas when the HEA layer is plated by magnetron sputtering ion plating, and argon is used as the reaction gas when the HEAC layer is plated by arc ion plating. x N1-x The reaction gas for preparing the HEA layer is argon, the pressure is 1-4 Pa, the pulsed negative bias is 60-100 V, and the target current is 0.5-2 A. x N 1-x The reaction gas for preparing the HEA layer is argon, the pressure is 1-4 Pa, the pulsed negative bias is 60-100 V, and the target current is 0.5-2 A.

[0054] Further, in some embodiments, the HEA / HEAC x N 1-x The deposition time can be 360-2100 min. Under the deposition condition, the interlayer has strong bonding force.

[0055] The application also provides the application of the anti-erosion and high-temperature oxidation resistant coating, which can be used in anti-erosion and high-temperature oxidation.

[0056] In some embodiments, the bonding force of the composite coating is not less than 80 N, and more preferably is 81-93 N. The obtained engineering material has good anti-erosion and wear performance, and can improve the working efficiency and prolong the service life.

[0057] Example 4 When the SMA transition layer is prepared, the vacuum degree of the base can be, for example, 1.5×10 -3 The workpiece rotation speed can be 1 rpm.

[0058] The TiNi target is used as the target material, argon is used as the reaction gas, the magnetron sputtering ion plating treatment is performed for 120 min under the conditions that the pressure is 1 Pa, the negative bias is 70 V, and the target current is 0.5 A, and the thickness is 2 μm.

[0059] When the HEA / HEAC x N 1-x The vacuum degree of the base can be, for example, 1.5×10 -3 The workpiece rotation speed can be 1 rpm. The AlCoCrNiMo target is used as the target material. The argon is used as the reaction gas for preparing the HEA layer, and the magnetron sputtering ion plating treatment is performed under the conditions that the pressure is 1 Pa, the negative bias is 70 V, and the target current is 0.5 A. x N 1-x The nitrogen and methane are used as the reaction gas for preparing the HEA / HEAC

[0060] The nitrogen and methane are used as the reaction gas for preparing the HEA / HEAC x N1-x The total deposition time of the layer is 480min, with a total of 8 cycles. Each cycle is about 1μm thick, the HEA layer is deposited for 30min, and the HEAC layer is deposited for 30min. x N 1-x The layer was deposited for 30 minutes. Finally, SMA transition layer + HEA / HEAC was achieved. x N 1-x The total thickness of the multilayer is 10 μm.

[0061] The hardness of the multilayer coating is 1883HV, the bonding force is 81N, and under a high temperature environment of 650°C, the erosion rate at a 30° attack angle is 0.292μm / g, and the erosion rate at a 90° attack angle is 1.438μm / g.

[0062] Erosion wear tests were also conducted using the same titanium alloy substrate under the same erosion conditions. The results showed that at 650°C, the erosion rate was 5.673 μm / g at a 30° angle of attack and 14.739 μm / g at a 90° angle of attack. This demonstrates that the high-angle erosion resistance of the erosion-resistant coating is more than tenfold higher than that of the titanium alloy substrate, effectively improving the substrate's high-temperature erosion resistance.

[0063] Example 5 The method for preparing the erosion-resistant and high-temperature oxidation-resistant coating provided in this embodiment is as follows: When the SMA transition layer is prepared using TC11 titanium alloy as the substrate, the background vacuum degree can be, for example, 2.5×10 -3 , the workpiece speed can be 2rpm.

[0064] Using TiNb target as target material and argon as reaction gas, magnetron sputtering ion plating was carried out for 240 minutes under the conditions of gas pressure of 2 Pa, negative bias voltage of 80 V and target current of 1 A, with a thickness of 4 μm.

[0065] In the preparation of HEA / HEAC x N 1-x When the layer is used, the background vacuum degree can be, for example, 2.5×10 -3 The workpiece speed can be 2rpm. AlCoCrFeNi target is used as the target material. HEA layer argon is the reaction gas, and magnetron sputtering ion plating is carried out under the conditions of gas pressure of 2Pa, negative bias voltage of 80V and target current of 1A. x N 1-x The arc ion plating process was carried out under the conditions of nitrogen and methane as reaction gases, nitrogen and methane flow ratio of 2:1, gas pressure of 3 Pa, negative bias voltage of 90 V, and target current of 85 A.

[0066] HEA / HEAC x N 1-xThe total deposition time of the layer is 960min, with a total of 16 cycles. Each cycle is about 1μm thick, the HEA layer is deposited for 20min, and the HEAC layer is deposited for 20min. x N 1-x The layer was deposited for 40 minutes. Finally, SMA transition layer + HEA / HEAC was achieved. x N 1-x The total thickness of the multilayer is 20 μm.

[0067] The hardness of the multilayer coating is 2453HV, the bonding force is 87N, and under a high temperature environment of 650°C, the erosion rate at a 30° attack angle is 0.247μm / g, and the erosion rate at a 90° attack angle is 1.215μm / g.

[0068] Erosion wear tests were also conducted on the same titanium alloy substrate under the same erosion conditions. The results showed that at 650°C, the erosion rate was 5.382 μm / g at a 30° angle of attack and 15.193 μm / g at a 90° angle of attack. This demonstrates that the high-angle erosion resistance of the erosion-resistant coating is more than tenfold higher than that of the titanium alloy substrate, effectively improving the substrate's high-temperature erosion resistance.

[0069] Example 6 This embodiment provides an anti-erosion oxidation coating and a composite preparation method thereof: When TA3 titanium alloy is used as the matrix and the SMA transition layer is prepared, the background vacuum degree can be, for example, 3.5×10 -3 , the workpiece speed can be 3rpm.

[0070] Using TiNi target as target material and argon as reaction gas, magnetron sputtering ion plating was carried out for 360 min under the conditions of gas pressure of 3 Pa, negative bias voltage of 90 V and target current of 1.5 A, and the thickness was 6 μm.

[0071] In the preparation of HEA / HEAC x N 1-x When the layer is used, the background vacuum degree can be, for example, 3.5×10 -3 The workpiece speed can be 3rpm. AlCoCrNiMo target is used as the target material. HEA layer argon is the reaction gas, and magnetron sputtering ion plating is carried out under the conditions of gas pressure of 3Pa, negative bias voltage of 90V, and target current of 1.5A. x N 1-x The arc ion plating process was carried out under the conditions of nitrogen and methane as reaction gases, nitrogen and methane flow ratio of 3:1, gas pressure of 4 Pa, negative bias voltage of 100 V, and target current of 75 A.

[0072] HEA / HEAC x N 1-xThe total deposition time of the layer is 1440min, with a total of 24 cycles. Each cycle is about 1μm thick, the HEA layer is deposited for 40min, and the HEAC layer is deposited for 40min. x N 1-x The layer was deposited for 20 minutes. Finally, SMA transition layer + HEA / HEAC was achieved. x N 1-x The total thickness of the multilayer is 30 μm.

[0073] The hardness of the multilayer coating is 2739HV, the bonding force is 93N, and under a high temperature environment of 650°C, the erosion rate at a 30° attack angle is 0.173μm / g, and the erosion rate at a 90° attack angle is 0.942μm / g.

[0074] Erosion wear tests were also conducted using the same titanium alloy substrate under the same erosion conditions. The results showed that at 650°C, the erosion rate was 5.718 μm / g at a 30° angle of attack and 14.296 μm / g at a 90° angle of attack. This demonstrates that the high-angle erosion resistance of the erosion-resistant coating is more than tenfold higher than that of the titanium alloy substrate, effectively improving the substrate's high-temperature erosion resistance.

[0075] In summary, the composite coating prepared by the preparation method of the PVD multilayer coating provided in this application has high film-base bonding strength and good toughness, high temperature resistance and erosion resistance. Compared with the substrate, the high temperature erosion resistance of the substrate is effectively improved. In addition, the multilayer coating preparation method is simple, efficient, and reproducible, and is easy to implement large-scale industrial production, effectively improving the working efficiency and service life of the components. The above-mentioned multilayer coating preparation method is used to protect the surface of metal and alloy substrates, which can effectively alleviate the wear phenomenon on the substrate surface and improve the erosion resistance.

[0076] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A method for preparing an anti-erosion and high-temperature oxidation resistant coating, characterized in that: First, a shape memory alloy (SMA) transition layer is deposited using magnetron sputtering technology, and then a HEA-HEAC x N 1-x composite layer is deposited on the SMA transition layer. The HEA-HEAC x N 1-x composite layer includes a high entropy alloy layer (HEA) and a high entropy alloy nitride carbide layer (HEAC) deposited by laminating and depositing in sequence from bottom to top. x N 1-x , 0 < x < 0.9; HEA is selected from any one of AlCoCrNiMo and AlCoCrFeNi.

2. The method for preparing the erosion-resistant and high-temperature oxidation-resistant coating according to claim 1, characterized in that: The high entropy alloy layer HEA is deposited by magnetron sputtering ion plating technology, and the high entropy alloy nitride carbide layer HEAC is deposited by magnetron sputtering ion plating technology. x N 1-x Deposition is done using arc ion plating technology.

3. The method for preparing the erosion-resistant and high-temperature oxidation-resistant coating according to claim 2, characterized in that: The total thickness of the erosion-resistant and high-temperature oxidation-resistant coating is 8-40 μm, and the thickness of the SMA transition layer is 2-5 μm; The high entropy alloy layer HEA and the high entropy alloy nitride carbide layer HEAC x N 1-x According to the thickness requirements, the number of cycles is set. In each cycle of coating, the thickness of the high entropy alloy layer HEA is 200-1000nm, and the thickness of the high entropy alloy nitrogen carbide layer HEAC is 200-1000nm. x N 1-x The thickness is 200-2000nm.

4. The method for preparing the erosion-resistant and high-temperature oxidation-resistant coating according to claim 3, characterized in that: In each coating cycle, the thickness of the high entropy alloy layer HEA is the same as that of the high entropy alloy nitride carbide layer HEAC. x N 1-x The thickness ratio is 1:1-1:

10.

5. The method for preparing the erosion-resistant and high-temperature oxidation-resistant coating according to claim 1, wherein: The SMA transition layer material is selected from any one of TiNi and TiNb.

6. The method for preparing the erosion-resistant and high-temperature oxidation-resistant coating according to claim 2, characterized in that: The SMA transition layer preparation method comprises: using argon as the reaction gas, TiNi or TiNb target as the target material, performing magnetron sputtering ion plating deposition under the conditions of gas pressure of 1-4 Pa, pulse negative bias voltage of 60-100 V, and target current of 0.5-2 A, and the deposition time is 120-300 min.

7. The method for preparing the erosion-resistant and high-temperature oxidation-resistant coating according to claim 2, characterized in that: The high entropy alloy layer HEA preparation method is: using argon as the reaction gas, the gas pressure is 1-4 Pa, the pulse negative bias voltage is 60-100 V, the target current is 0.5-2 A, and the magnetron sputtering ion plating deposition is performed for 360-2100 min; High Entropy Alloy Nitrogen Carbide Layer HEAC x N 1-x The preparation method is as follows: using nitrogen and methane as reaction gases, arc ion plating deposition is performed under the conditions of gas pressure of 1-4 Pa, pulse negative bias voltage of 80-120 V, target current of 70-100 A, and deposition time of 360-2100 min.

8. Anti-erosion and high temperature oxidation resistant coating, characterized in that: Prepared by the preparation method according to any one of claims 1-7, comprising a SMA transition layer and a high-entropy alloy layer HEA and a high-entropy alloy nitride carbide layer HEAC that are sequentially laminated and deposited on the SMA transition layer x N 1-x , 0 < x < 0.9; HEA is selected from any one of AlCoCrNiMo and AlCoCrFeNi.

9. Application of erosion-resistant and high-temperature oxidation-resistant coating, characterized in that: The anti-erosion and high-temperature oxidation coating is deposited on the surface of a metal substrate or an alloy substrate to improve the high-temperature and anti-erosion performance of the substrate.

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