Gap detection method and system

Abstract

The invention provides a gap detection method and system, and relates to the technical field of measurement. The gap is a space between internal parts of the stator of the dry vacuum pump, and the method comprises the following steps: covering at least one surface forming the gap with an easy-to-wear coating; wherein the abrasion-prone coating does not interfere with movement of the rotor and the stator and can generate thickness abrasion during movement; driving the rotor to rotate relative to the stator until the easily-abraded coating is not abraded any more; and obtaining the residual thickness of the easy-to-wear coating after rotation is stopped so as to obtain a gap value. According to the embodiment of the invention, the dynamic gap between the internal parts of the stator of the dry vacuum pump is represented by arranging the wear-resistant coating, so that the dynamic gap which is difficult to measure of a measured object is converted into the coating thickness which is easy to measure, and accurate measurement of the size of the dynamic gap is realized with relatively low cost.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of measurement, and in particular, to a gap detection method and system. BACKGROUND

[0002] A dry vacuum pump (such as a claw pump or a Roots pump) is a vacuum obtaining device widely used in the fields of semiconductor manufacturing, vacuum coating, and panel processing. Under the operating state of the dry vacuum pump, dynamic gaps exist between the internal components. In the related art, the dynamic gap is usually measured based on a sensor. However, the sensor has a high equipment cost, and is affected by temperature, vibration, and the like generated during the operation of the dry vacuum pump, resulting in low accuracy of the measurement result output by the sensor. SUMMARY

[0003] To overcome the problems in the related art, the present disclosure provides a gap detection method and system.

[0004] According to a first aspect of an embodiment of the present disclosure, a gap detection method is provided, the gap being a space between internal components of a stator of a dry vacuum pump, and the method comprising:

[0005] covering an easily-abradable coating on at least one surface forming the gap; wherein the easily-abradable coating does not interfere with the movement of the rotor and the stator and can be abraded in thickness when moving;

[0006] driving the rotor to rotate relative to the stator until the easily-abradable coating is no longer abraded;

[0007] obtaining a remaining thickness of the easily-abradable coating after stopping the rotation to obtain a gap value.

[0008] In some embodiments, the components forming the gap are the stator and the rotor.

[0009] In some embodiments, the rotor comprises a rotor shaft and a rotor blade arranged on the rotor shaft, and the stator comprises a housing accommodating the rotor blade;

[0010] The step of covering the easily-abradable coating on at least one surface forming the gap comprises:

[0011] uniformly covering the easily-abradable coating of a preset thickness on a side surface of the housing parallel to the rotor shaft and close to the rotor blade; and / or

[0012] uniformly covering the easily-abradable coating of a preset thickness on a side surface of the rotor blade parallel to the rotor shaft.

[0013] In some embodiments, the rotor blade on the rotor shaft is multi-stage, and the stator further comprises a transverse wall for dividing the internal space of the housing to accommodate the rotor blades of each stage, respectively.

[0014] The step of covering the at least one surface forming the gap with the abradable coating further comprises:

[0015] uniformly covering a side of the rotor plate perpendicular to the rotation axis with the abradable coating of a preset thickness; and / or

[0016] uniformly covering a side of the rotor plate perpendicular to the rotation axis with the abradable coating of a preset thickness.

[0017] In some embodiments, the component forming the gap is a first rotor and a second rotor located in the same stator cavity.

[0018] In some embodiments, the first rotor and the second rotor are arranged in parallel and spaced apart, each of the first rotor and the second rotor comprises a rotation axis and a rotor plate arranged on the rotation axis, and the stator comprises a housing accommodating the first rotor and the second rotor;

[0019] The step of covering the at least one surface forming the gap with the abradable coating comprises:

[0020] uniformly covering a side of the first rotor or the second rotor parallel to the rotation axis and opposite to the other rotor with the abradable coating of a preset thickness;

[0021] uniformly covering a side of the first rotor and the second rotor parallel to the rotation axis and opposite to the other rotor with the abradable coating of a preset thickness.

[0022] In some embodiments, the step of obtaining the gap value by measuring the remaining thickness of the abradable coating after the rotation is stopped comprises:

[0023] measuring the remaining thickness of a plurality of preset points on the abradable coating;

[0024] taking the average of the remaining thickness of the plurality of preset points as the gap value.

[0025] In some embodiments, the abradable coating forms a powder-like wear product during the wear process, and the step of driving the rotor to rotate relative to the stator until the abradable coating is no longer worn comprises:

[0026] driving the rotor to rotate relative to the stator until the powder-like wear product is no longer discharged from the dry vacuum pump.

[0027] In some embodiments, the abradable coating comprises at least one metal oxide.

[0028] According to a second aspect of the embodiments of the present disclosure, a dry vacuum pump dynamic gap detection system is provided, which is applied to a dry vacuum pump, the dry vacuum pump comprising a stator and a rotor, and a gap existing between the stator and the rotor.

[0029] The system comprises:

[0030] a covering module configured to cover the easily-abradable coating on the stator side or the rotor side for forming the gap;

[0031] a driving module configured to control the relative rotation of the stator and the rotor to cause the easily-abradable coating to be abraded;

[0032] an acquisition module configured to determine the size of the dynamic gap between the stator and the rotor according to the thickness of the abraded area of the easily-abradable coating.

[0033] The technical solution provided by the embodiments of the present disclosure can have the following beneficial effects:

[0034] The embodiments of the present disclosure can be used to measure the gap between the internal components of the stator of a dry vacuum pump. Specifically, the easily-abradable coating can be first covered on at least one surface forming the gap, and the easily-abradable coating does not interfere with the movement of the rotor and the stator and can be abraded in thickness when moving. Then, the rotor can be driven to rotate relative to the stator until the easily-abradable coating is no longer abraded. The gap value can be obtained by acquiring the remaining thickness of the easily-abradable coating after stopping rotation. The embodiments of the present disclosure represent the dynamic gap between the internal components of the stator of the dry vacuum pump by setting the easily-abradable coating, thereby converting the measurement object from the difficult-to-measure dynamic gap to the easily-measured coating thickness, so as to realize accurate measurement of the size of the dynamic gap at a lower cost, provide accurate data support for pump parameter design, and help to improve the stability of the pump and improve the performance of the pump. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 A flowchart of a gap detection method in an embodiment of the present disclosure is shown.

[0036] Figure 2 A schematic diagram of a covering position of an easily-abradable coating in an embodiment of the present disclosure is shown.

[0037] Figure 3 A schematic diagram of a covering thickness of an easily-abradable coating in an embodiment of the present disclosure is shown.

[0038] Figure 4 A schematic diagram of a remaining thickness of an easily-abradable coating in an embodiment of the present disclosure is shown.

[0039] Figure 5 A schematic diagram of the structure of a claw pump covered with an easily-abradable coating in an embodiment of the present disclosure is shown.

[0040] Figure 6 A schematic diagram of the implementation process of a gap detection method in an embodiment of the present disclosure is shown.

[0041] Figure 7An architecture schematic of a gap detection system in an embodiment of the present disclosure is shown.

[0042] Reference signs:

[0043] 100 - Dry vacuum pump; 200 - Stator; 201 - Transverse wall; 300 - Rotor; 301 - Rotor blade; 400 - Erosion resistant coating. DETAILED DESCRIPTION

[0044] The exemplary embodiments are described herein with reference to the accompanying drawings, in which examples are shown. The description below concerns the drawings, where the same numbers in different drawings represent the same or similar elements unless otherwise represented. The implementations described in the following exemplary embodiments do not represent all implementations consistent with the present disclosure. Instead, they are merely examples of apparatuses and methods consistent with some aspects of the present disclosure as detailed in the appended claims.

[0045] The terminology used in this disclosure is for the purpose of describing particular embodiments only and is not intended to be limiting of the present disclosure. As used in this disclosure and the appended claims, the singular forms "a," "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will also be understood that the term "and / or" as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items.

[0046] In addition, the terms "first", "second", etc. are used only to distinguish descriptions, and cannot be understood as indicating or implying relative importance.

[0047] For the convenience of understanding, first, several terms related to the present disclosure are explained as follows:

[0048] Dry vacuum pump, full name dry vacuum pump, is a kind of vacuum pump that does not use oil or other liquid as working medium, completely relying on mechanical structure to realize gas compression and discharge. Its core feature is "oil-free operation", there is no any lubricating oil in the pump cavity, the sealing cavity is formed by the precise fit of the rotor, and the volume is periodically changed to remove gas.

[0049] Stator, the external stationary part of the dry vacuum pump, is a cylindrical structure that can surround the rotor. The role of the stator is to provide support for the rotation of the rotor and guide the flow of gas through its internal channels or spaces. The stator has a sealing design to ensure that gas does not leak.

[0050] Rotor, the rotating part of the dry vacuum pump, is composed of multiple rotor blades installed inside the stator. The main role of the rotor is to compress and discharge gas from the intake end through rotation, and the rotor design of the dry vacuum pump can create a high-efficiency vacuum environment.

[0051] Exemplarily, the rotor in the dry vacuum pump can have multi-stage rotor blades, and the stator interior can be provided with multi-stage transverse walls for surrounding the multi-stage rotor blades. Each stage of rotor blades and transverse walls can complete a certain gas compression or conveying process alone, and the multiple stages of rotor blades and transverse walls cascaded together can form higher compression capacity. For example, in the multi-stage dry vacuum pump, each stage of rotor blades and transverse walls can further compress the gas step by step until the required final vacuum degree is reached.

[0052] Exemplarily, in the dry vacuum pump shutdown state, there is a static gap between the rotor and the stator, while in the dry vacuum pump running state, the gap between the rotor and the stator becomes a dynamic gap. Influenced by the structure, temperature and vibration of the dry vacuum pump, the value of the dynamic gap can be different from that of the static gap.

[0053] The dynamic gap has an important influence on the performance of the pump. If the dynamic gap is too small, it can easily cause friction, wear and even jamming between the stator and the rotor, affecting the normal operation of the equipment. If the dynamic gap is too large, it can reduce the pumping efficiency of the dry vacuum pump and increase the energy consumption. Therefore, accurately measuring the dynamic gap of the dry vacuum pump is of great significance for optimizing the design of the dry vacuum pump and improving the performance and reliability of the dry vacuum pump.

[0054] In the related art, the measurement of the dynamic gap of the dry vacuum pump is usually performed by a non-contact measurement method (such as laser measurement). However, this method has high equipment cost and high measurement difficulty, and the measurement accuracy can be affected by temperature, vibration, structure of the dry vacuum pump and other factors, making it difficult to accurately obtain the dynamic gap data of the dry vacuum pump.

[0055] Therefore, the embodiments of the present disclosure represent the dynamic gap between the stator and the rotor by setting an easy-to-abrade coating, thereby converting the measurement object from the difficult-to-measure dynamic gap to the easy-to-measure coating thickness, so as to accurately measure the size of the dynamic gap at a lower cost.

[0056] Next, exemplary embodiments of the present disclosure will be described in detail.

[0057] First, the gap detection method provided in the embodiments of the present disclosure is used to detect the space between the internal components of the stator of the dry vacuum pump. For example, it can be the gap between the stator and the rotor, or the gap between multiple rotors in the stator cavity, or it can be used to detect multiple gaps at the same time.

[0058] In addition, those skilled in the art can know that, according to actual needs, the method provided in the embodiments of the present disclosure can be applied to various types of dry vacuum pumps such as claw pumps, screw pumps, scroll pumps and Roots pumps, and the embodiments of the present disclosure do not limit the types of dry vacuum pumps.

[0059] Figure 1 A schematic diagram of a gap detection method according to an embodiment of the present disclosure is shown. Figure 1 As shown, the gap detection method provided in the embodiment of the present disclosure includes the following steps.

[0060] S101, covering at least one surface forming the gap with a wear-resistant coating.

[0061] It's understandable that the purpose of applying a wear-resistant coating is to quantify the difficult-to-measure dynamic clearances between stator components by measuring the thickness of the wear-resistant coating. This purpose can be achieved by applying the wear-resistant coating to any surface forming the clearances. For example, when quantifying the dynamic clearance between the stator and rotor using a wear-resistant coating, the wear-resistant coating can be applied to the stator, the rotor, or both.

[0062] In some embodiments, the wearable coating does not interfere with the movement of the rotor and stator, and can wear through its thickness during movement. Specifically, on the one hand, the thickness of the wearable coating can be less than or equal to the static gap size defined by the components at the locations it covers, thereby ensuring that the wearable coating does not interfere with the assembly and movement of the components in the dry vacuum pump. On the other hand, the thickness of the wearable coating can be as close as possible to the static gap size defined by the components at the locations it covers, allowing the wearable coating to wear as the gap decreases during movement, thereby representing the dynamic gap size between the components.

[0063] S102, driving the rotor to rotate relative to the stator until the wear-resistant coating is no longer worn.

[0064] In some embodiments, a dry vacuum pump can be operated according to set operating parameters to cause the rotor and stator to rotate relative to each other. During operation of the dry vacuum pump, the rotor in the dry vacuum pump will rotate at high speed. During high-speed rotation, the rotor may experience axial and / or radial displacement due to the vibration characteristics of the bearing itself, as well as factors such as thermal expansion, deflection, stress deformation, and load of the rotor. This displacement may cause the dynamic clearance between the rotor and stator to decrease relative to the static clearance, and may also cause the dynamic clearance between the rotors in the same stator cavity to decrease relative to the static clearance, thereby causing the wear-resistant coating to wear as the rotor and stator rotate relative to each other.

[0065] In some embodiments, a preset operating time of the dry vacuum pump can be configured so that the dry vacuum pump operates for a sufficient period of time to ensure that the wearable coating is fully worn. That is, it is determined that after the dry vacuum pump operates for the preset operating time, the wearable coating covering the dry vacuum pump no longer wears out.

[0066] In some embodiments, the abradable coating may form powdery wear products during wear. These powdery wear products are discharged from the exhaust port of the dry vacuum pump as the dry vacuum pump operates. Therefore, by monitoring the discharge of the powdery wear products, it is possible to determine whether the abradable coating is still in the wear process.

[0067] That is, the rotor can be driven to rotate relative to the stator until powdered wear products are no longer discharged from the dry vacuum pump to determine that the abradable coating is no longer worn.

[0068] It's understandable that the particle size of the wear coating is closely related to the accuracy of the dynamic gap size represented by the wear coating. By selecting appropriate materials to ensure that the wear coating falls off in powder form after friction, rather than falling off in large pieces or chunks, the accuracy of the obtained gap value can be improved.

[0069] For example, the wear-resistant coating may include at least one metal oxide, such as aluminum oxide, titanium oxide, or potassium oxide. This type of wear-resistant coating is applied to the component surface in the form of a slurry and forms a solidified coating after drying. By pre-polishing the solidified coating, a wear-resistant coating that meets assembly dimensional requirements can be obtained.

[0070] S103, obtaining the remaining thickness of the easily-worn coating after the rotation stops to obtain a gap value.

[0071] In some embodiments, after the dry vacuum pump stops running, the gap value can be obtained by measuring the remaining thickness of the abradable coating after wear. The gap value is the dynamic gap size between the component covered with the abradable coating and its adjacent component.

[0072] For example, after the dry vacuum pump stops operating, the parts of the dry vacuum pump covered with the wearable coating can be disassembled. The worn areas of the wearable coating can then be measured using high-precision measuring equipment (such as a three-dimensional coordinate measuring machine or a high-precision thickness gauge) to obtain the remaining thickness of the worn areas of the wearable coating. This remaining thickness can then be used to characterize the aforementioned clearance value.

[0073] For example, for a wearable coating covering the same location, wear may be uneven. For example, the remaining thickness of the wearable coating may be inconsistent, or even unworn in some areas. In this case, the remaining thickness of the wearable coating can be measured at multiple predetermined locations, and the average of these remaining thicknesses can be used as the gap value.

[0074] Combination of the above Figure 1 The basic concept of measuring the dynamic gap in the embodiment of the present disclosure has been described. Next, the covering position of the wear-resistant coating in the stator will be described in detail.

[0075] In some embodiments, the components forming the gap can be the stator and the rotor, and the abradable coating can be used to characterize the radial gap and / or the axial gap between the stator and the rotor.

[0076] For example, referring to Figure 2 , the rotor 300 can include a rotor shaft and rotor blades 301 arranged on the rotor shaft, and the stator 200 can include a housing accommodating the rotor blades 301.

[0077] As shown in A of Figure 2 , when covering the abradable coating 400, the abradable coating 400 can be uniformly covered on the side of the housing parallel to the rotor shaft and close to the rotor blades 301 with a preset thickness, the abradable coating 400 can be uniformly covered on the side of the rotor blades 301 parallel to the rotor shaft with a preset thickness, or the abradable coating 400 can be uniformly covered on the side of the housing parallel to the rotor shaft and close to the rotor blades 301 and the side of the rotor blades 301 parallel to the rotor shaft with a preset thickness.

[0078] By arranging the abradable coating 400 in the above manner, the radial minimum gap value between the housing and the rotor blades 301 during the operation of the dry vacuum pump can be characterized by the remaining thickness of the abradable coating 400.

[0079] For example, referring to Figure 2 , the rotor blades 301 on the rotor shaft are multi-stage, and the stator 200 further includes a transverse wall 201 for dividing the internal space of the housing to accommodate the rotor blades 301 of each stage respectively.

[0080] As shown in B of Figure 2 , when covering the abradable coating 400, the abradable coating 400 can be uniformly covered on the side of the transverse wall 201 perpendicular to the rotor shaft with a preset thickness, the abradable coating 400 can be uniformly covered on the side of the rotor blades 301 perpendicular to the rotor shaft with a preset thickness, or the abradable coating 400 can be uniformly covered on the side of the transverse wall 201 perpendicular to the rotor shaft and the side of the rotor blades 301 perpendicular to the rotor shaft with a preset thickness.

[0081] By arranging the abradable coating 400 in the above manner, the axial minimum gap value between the transverse wall 201 and the rotor blades 301 during the operation of the dry vacuum pump can be characterized by the remaining thickness of the abradable coating 400.

[0082] For example, referring to Figure 2The main reason for the rotor 300 to displace in the axial direction is that the shaft of the rotor 300 is connected to the bearing fixed to the bearing seat at one end, and the bearing connected at the other end is elastically connected to the bearing seat. That is, the shaft is abutted to the fixed bearing at the other end by the axial elastic force generated by the compression of the elastic member. The purpose of such design in the dry vacuum pump is to adjust the static axial gap between the rotor 300 and the stator 200 by changing the compression amount of the elastic member. This results in a certain degree of freedom of the shaft in the axial direction, so that the rotor 300 can displace in the axial direction during rotation.

[0083] Exemplarily, since each stage of the rotor plate 301 has two side surfaces perpendicular to the shaft, when the easy-to-wear coating 400 is selected to be covered on the rotor plate 301, the easy-to-wear coating 400 can be covered on the side of the rotor plate 301 close to the inlet end of the dry vacuum pump. Correspondingly, when the easy-to-wear coating 400 is selected to be covered on the side surface of the lateral wall 201, the easy-to-wear coating 400 can be covered on the side of the lateral wall 201 close to the inlet end of the dry vacuum pump.

[0084] It can be understood that the end of the shaft elastically connected to the bearing seat through the bearing is the end close to the inlet end of the dry vacuum pump. Therefore, during the rotation of the rotor 300, the maximum value of the axial displacement of the rotor 300 is directed to the inlet end of the dry vacuum pump. Therefore, in order to represent the dynamic gap change of the stator 200 and the rotor 300 in this direction, the easy-to-wear coating 400 can be arranged on the side of the lateral wall 201 and the rotor plate 301 close to the inlet end for enclosing the gap.

[0085] In addition, in the structural design of the dry vacuum pump itself, the static gap between the lateral wall 201 and the rotor plate 301 is larger close to the inlet end. Therefore, by covering the easy-to-wear coating 400 on the side close to the inlet end, the easy-to-wear coating 400 can also be provided with a larger initial thickness, which facilitates the measurement of the thickness of the easy-to-wear coating 400.

[0086] This is also why the end of the shaft elastically connected to the bearing seat through the bearing is the end close to the inlet end of the dry vacuum pump. Since the static gap between the lateral wall 201 and the rotor plate 301 is smaller close to the exhaust end, if the end of the shaft elastically connected to the bearing seat through the bearing is arranged at the end close to the exhaust end, the dynamic displacement directed to the exhaust end can cause the exhaust end to be blocked, so that the dry vacuum pump cannot work normally.

[0087] In some embodiments, the covering thickness of the abradable coating 400 between each stage of the lateral wall 201 and the rotor blade 301 decreases in a direction from the gas inlet end to the gas outlet end of the dry vacuum pump. As previously mentioned, since the static clearance between each stage of the rotor blade 301 and the housing decreases, the covering thickness of the abradable coating 400 can be adapted to decrease in order to meet the assembly requirements between the stator 200 and the rotor 300 in the dry vacuum pump.

[0088] In addition, please refer to Figure 3 and Figure 4 From the perspective of the fitting relationship between the stator 200 and the rotor 300, after measuring the size of the dynamic clearance of one side of the rotor blade 301 perpendicular to the rotation axis, the size of the dynamic clearance of the other side can be obtained by calculation.

[0089] First, please refer to Figure 3 In the dry vacuum pump after assembly, the size of the static clearance between each stage of the rotor blade 301 and the lateral wall 201 is known, and the thickness of the coating can also be measured in advance. For example, Figure 3 X1 in the above formula is the size of the static clearance between the left side of the rotor blade 301 and the left side of the lateral wall 201 (the right side is the same, not shown in the figure), and X2 is the thickness of the coating. In order to meet the assembly requirements, X2 < X1.

[0090] Please further refer to Figure 4 After the abradable coating 400 is worn, the remaining thickness X4 of the abradable coating 400 can be measured. The thickness X3 worn away can be obtained by the difference between X2 and X4. Then, the dynamic clearance size between the left side of the rotor blade 301 and the left side of the lateral wall 201 can be represented by X4, and the dynamic clearance size between the right side of the rotor blade 301 and the right side of the lateral wall 201 is the sum of the static clearance size of the right side of the rotor blade 301 and X3.

[0091] In some embodiments, the components forming the gap can be a first rotor 300 and a second rotor 300 located in the same stator 200 cavity, and the abradable coating 400 can be used to characterize the gap between the rotors 300. Please refer to Figure 5 , Figure 5 The claw pump is taken as an example to exemplarily illustrate the structural relationship between the first rotor 300 and the second rotor 300 in the dry vacuum pump and the covering position of the abradable coating 400.

[0092] Specifically, the first rotor 300 and the second rotor 300 can be arranged in parallel and spaced apart, the first rotor 300 and the second rotor 300 each include a rotation axis and a rotor blade 301 arranged on the rotation axis, and the stator 200 includes a housing accommodating the first rotor 300 and the second rotor 300.

[0093] During the operation of the claw pump, there is a certain gap between each rotor 300 and between the rotor 300 and the shell, so that the claw pump can operate without lubricating oil and can operate without friction.

[0094] Exemplarily, when the easy-wear coating 400 is covered, the easy-wear coating 400 can be evenly covered on the side of the first rotor 300 or the second rotor 300 parallel to the rotation axis and opposite to the other rotor 300 with a preset thickness, or the easy-wear coating 400 can be evenly covered on the side of the first rotor 300 and the second rotor 300 parallel to the rotation axis and opposite to the other rotor 300 with a preset thickness.

[0095] That is, the easy-wear coating 400 can be covered on the side of the rotor sheet 301 parallel to the rotation axis. After the easy-wear coating 400 is covered, the first rotor 300 and the second rotor 300 rotate synchronously during the operation of the claw pump, so that the easy-wear coating 400 is worn, so that the remaining thickness of the easy-wear coating 400 can represent the minimum gap value between the rotor sheets 301 of the first rotor 300 and the second rotor 300 during the operation of the dry vacuum pump.

[0096] It can be understood that the above describes various covering modes of the easy-wear coating 400. Figures 2 to 5 According to different covering positions, the remaining thickness of the easy-wear coating 400 can be used to represent the axial gap value between the stator 200 and the rotor 300, can be used to represent the radial gap value between the stator 200 and the rotor 300, and can be used to represent the radial gap value between the rotor 300 and the rotor 300. According to actual needs, the above covering modes can be used alone or in combination, and the present disclosure does not limit this.

[0097] For the sake of understanding, the following will be combined Figure 6 To measure the axial gap value between the stator 200 and the rotor 300 as an example, the complete implementation process of the embodiment of the present disclosure will be described.

[0098] Please refer to Figure 6 The rotor 300 in the dry vacuum pump 100 includes a rotation axis and a plurality of levels of rotor sheets 301 arranged on the rotation axis, and the stator 200 in the dry vacuum pump 100 includes a plurality of levels of transverse walls 201 corresponding to the plurality of levels of rotor sheets 301. The embodiment of the present disclosure expects to measure the axial gap between the stator 200 and the rotor 300, i.e., the axial gap between each level of transverse wall 201 and the rotor sheet 301. Since the dynamic gap between each level of rotor sheet 301 and the shell can be different, during the measurement process, the dynamic gap of each level needs to be measured separately.

[0099] Therefore, when coating the wear-resistant coating 400, it is necessary to cover the gap between each stage of the rotor plate 301 and the transverse wall 201 with the wear-resistant coating 400 on the side of the rotor plate 301 and / or the transverse wall 201 that is perpendicular to the rotating shaft. For example, the wear-resistant coating 400 can be covered on the partial area of ​​the rotor plate 301 of each stage that is used to form the gap, and the wear-resistant coating 400 can be covered on the partial area of ​​the housing of each stage that is used to form the gap. Figure 6 In this way), the wear-resistant coating 400 can also be applied to some levels of rotor sheets 301 and the remaining levels of shells, or the wear-resistant coating 400 can be applied to both the rotor sheets 301 and the transverse walls 201 of the same level at the same time. The embodiments of the present disclosure are not limited to this.

[0100] After the wear-resistant coating 400 is applied, the stator 200 and rotor 300 can be driven to rotate relative to each other until the wear-resistant coating 400 no longer wears. Subsequently, the dynamic clearance between each rotor plate 301 and the transverse wall 201 can be determined based on the remaining thickness of the wear-resistant coating 400 in the gap at each stage. Specifically, the remaining thickness of the wear-resistant coating 400 at multiple predetermined points in each gap can be measured. The average of these remaining thicknesses is then used as the dynamic clearance between the rotor plate 301 and the transverse wall 201 at that stage.

[0101] Based on the same inventive concept, the present disclosure also provides a gap detection system, such as the following embodiment. Since the principle of solving the problem in the system embodiment is similar to that in the above method embodiment, the implementation of the system embodiment can refer to the implementation of the above method embodiment, and the repeated parts will not be repeated.

[0102] Figure 7 A schematic structural diagram of a gap detection system according to an embodiment of the present disclosure is shown. Figure 7 As shown, the gap detection system 700 includes: a covering module 701 , a driving module 702 and an acquiring module 703 .

[0103] The covering module 701 is used to cover at least one surface forming the gap with a wear-resistant coating, wherein the wear-resistant coating does not interfere with the movement of the rotor and the stator and can be worn away during movement.

[0104] The driving module 702 is used to drive the rotor to rotate relative to the stator until the wear-resistant coating is no longer worn.

[0105] The acquisition module 703 is used to acquire the remaining thickness of the easily-worn coating after the rotation stops to obtain a gap value.

[0106] In some embodiments, the covering module 701 can be a coating machine, a spray gun, etc.

[0107] The driving module 702 can be a processor, a single-chip microcomputer, a microcontroller, etc., which can issue instructions to the dry vacuum pump and make the dry vacuum pump run according to the set working parameters.

[0108] The acquisition module 703 can be a three-coordinate measuring instrument, a high-precision thickness gauge, etc.

[0109] In some embodiments, the components forming the gap are a stator and a rotor.

[0110] In some embodiments, the rotor includes a rotating shaft and rotor blades arranged on the rotating shaft, and the stator includes a housing accommodating the rotor blades. The covering module 701 is specifically configured to uniformly cover the easy-to-wear coating layer of a preset thickness on the side of the housing parallel to the rotating shaft and close to the rotor blades; and / or uniformly cover the easy-to-wear coating layer of a preset thickness on the side of the rotor blades parallel to the rotating shaft.

[0111] In some embodiments, the rotor blades on the rotating shaft are multi-stage, and the stator further includes a transverse wall for dividing the internal space of the housing to accommodate the rotor blades of each stage respectively. The covering module 701 is specifically configured to uniformly cover the easy-to-wear coating layer of a preset thickness on the side of the transverse wall perpendicular to the rotating shaft; and / or uniformly cover the easy-to-wear coating layer of a preset thickness on the side of the rotor blades perpendicular to the rotating shaft.

[0112] In some embodiments, the components forming the gap are a first rotor and a second rotor located in the same stator cavity.

[0113] In some embodiments, the first rotor and the second rotor are arranged in parallel and at intervals, and each of the first rotor and the second rotor includes a rotating shaft and rotor blades arranged on the rotating shaft, and the stator includes a housing accommodating the first rotor and the second rotor. The covering module 701 is specifically configured to uniformly cover the easy-to-wear coating layer of a preset thickness on the side of the first rotor or the second rotor parallel to the rotating shaft and opposite to the other rotor; and uniformly cover the easy-to-wear coating layer of a preset thickness on the side of the first rotor and the second rotor parallel to the rotating shaft and opposite to the other rotor.

[0114] In some embodiments, the acquisition module 703 is configured to measure the residual thickness of a plurality of preset points on the easy-to-wear coating layer. The average of the residual thicknesses of the plurality of preset points is taken as the gap value.

[0115] In some embodiments, the easy-to-wear coating layer forms a powder-like wear product during the wear process. The driving module 702 is specifically configured to drive the rotor to rotate relative to the stator until the powder-like wear product is no longer discharged from the dry vacuum pump.

[0116] In some embodiments, the easy-to-wear coating layer includes at least one metal oxide.

[0117] The embodiments of the present disclosure are described in detail above with reference to the drawings, but the present disclosure is not limited to the specific details of the above-described embodiments. Various simple modifications can be made to the technical solutions of the present disclosure within the technical concept of the present disclosure, and these simple modifications all belong to the protection scope of the present disclosure.

[0118] In addition, any combination of various different embodiments of the present disclosure can also be made, as long as it does not deviate from the idea of the present disclosure, it should also be considered as disclosed by the present disclosure.

Claims

1. A gap detection method, characterized in that: The gap is the space between the internal components of the dry vacuum pump stator, and the method includes: A wear-resistant coating is covered on at least one surface forming the gap; wherein the wear-resistant coating does not interfere with the movement of the rotor and the stator and can cause thickness wear during movement; driving the rotor to rotate relative to the stator until the wear-resistant coating is no longer worn; The remaining thickness of the easily-worn coating after the rotation stops is obtained to obtain the gap value.

2. The gap detection method according to claim 1, characterized in that: The components forming the gap are the stator and the rotor.

3. The gap detection method according to claim 2, characterized in that: The rotor includes a rotating shaft and a rotor sheet disposed on the rotating shaft, and the stator includes a housing for accommodating the rotor sheet; The step of covering at least one surface forming the gap with a wear-resistant coating comprises: Uniformly covering the side of the housing parallel to the rotating shaft and close to the rotor plate with a wear-resistant coating of a preset thickness; and / or The side surface of the rotor plate parallel to the rotating shaft is evenly covered with a wear-resistant coating of a preset thickness.

4. The gap detection method according to claim 3, characterized in that: The rotor plates on the rotating shaft are multi-stage, and the stator further includes a transverse wall for dividing the internal space of the housing to respectively accommodate the rotor plates of each stage; The step of covering at least one surface forming the gap with a wear-resistant coating further comprises: The side of the transverse wall perpendicular to the rotating shaft is evenly covered with a wear-resistant coating of a preset thickness; and / or The side of the rotor sheet perpendicular to the rotating shaft is evenly covered with a wear-resistant coating of a preset thickness.

5. The gap detection method according to claim 1, characterized in that: The components forming the gap are a first rotor and a second rotor located in the same stator cavity.

6. The gap detection method according to claim 5, characterized in that: The first rotor and the second rotor are arranged in parallel and spaced apart, each of the first rotor and the second rotor comprises a rotating shaft and a rotor sheet arranged on the rotating shaft, and the stator comprises a housing for accommodating the first rotor and the second rotor; The step of covering at least one surface forming the gap with a wear-resistant coating comprises: Uniformly covering a side of the first rotor or the second rotor that is parallel to the rotation axis and opposite to the other rotor with a wear-resistant coating of a preset thickness; Sides of the first rotor and the second rotor that are parallel to the rotation axis and opposite to the other rotor are evenly covered with a wear-resistant coating of a preset thickness.

7. The gap detection method according to claim 1, characterized in that: The step of obtaining the remaining thickness of the wear-resistant coating after stopping rotation to obtain the gap value includes: measuring the remaining thickness of a plurality of preset points on the wear-resistant coating; The average value of the remaining thickness at the plurality of preset points is used as the gap value.

8. The gap detection method according to claim 1, characterized in that: The wear-resistant coating forms powdered wear products during the wear process, and the step of driving the rotor to rotate relative to the stator until the wear-resistant coating is no longer worn comprises: The rotor is driven to rotate relative to the stator until the powdered wear products are no longer discharged from the dry vacuum pump.

9. The gap detection method according to claim 1 or 8, characterized in that: The wear-resistant coating includes at least one metal oxide.

10. A gap detection system, characterized in that: The gap is the space between the internal components of the dry vacuum pump stator; The system comprises: a covering module, configured to cover at least one surface forming the gap with a wear-resistant coating; wherein the wear-resistant coating does not interfere with the movement of the rotor and the stator and can be subjected to thickness wear during movement; a driving module, configured to drive the rotor to rotate relative to the stator until the wear-prone coating is no longer worn; The acquisition module is used to acquire the remaining thickness of the wear-resistant coating after the rotation stops to obtain the gap value.

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