Average furnace feeding control method and system for burn-in board

Abstract

The invention discloses a burn-in board average furnace entering control method and a burn-in board average furnace entering control system. The serious problems of asynchronous test progress, overtime waiting, test interruption, even equipment downtime and the like caused by unbalanced test tasks are solved. By introducing a dynamic allocation algorithm and load balancing control, an arrangement scheme can be automatically generated, board position distribution can be monitored in real time, it is ensured that task loads of all test areas are balanced as much as possible, and test time difference and test interruption caused by uneven board positions are avoided. In addition, an early warning mechanism is automatically triggered when the load is not uniform, test timeout and process interruption are prevented, and the risks of equipment alarm and downtime are greatly reduced. Through a resource allocation strategy of least cavity priority, the device utilization rate is improved to the maximum extent, device idle and energy consumption are reduced, efficient and stable operation of the test process is ensured, the reliability and productivity of the test device are improved, and it can be ensured that an aging test task is smoothly completed in a complex production environment.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of semiconductor testing, and particularly relates to a burn-in board average loading control method and system. BACKGROUND

[0002] In the reliability verification process of semiconductor devices, burn-in test (also known as programming test) as an important link to evaluate the stability and reliability of chips plays a key role in ensuring product quality. It simulates the long-term running environment of the chip by applying stress to the chip under certain temperature and voltage conditions to screen out early failure products and improve the stability of the overall product. With the continuous improvement of integrated circuit packaging density and the continuous rise of chip function complexity, burn-in test puts higher requirements on the precision control and production scheduling of the equipment.

[0003] H5620 burn-in machine as a widely used burn-in test equipment, its design structure includes two heat treatment cavities (Chamber), each cavity is divided into upper and lower two test areas (Site), each Site can accommodate up to 12 burn-in boards (BIB), the maximum capacity of the whole machine is 48 BIB. Burn-in board is mainly used to carry chips and establish electrical connection between chips and test platform, to ensure that the chip can stably and accurately receive test signals under the stress conditions of set high temperature and high voltage.

[0004] However, in the current process implementation, H5620 burn-in machine does not have the function of automatically identifying the placement position and quantity of burn-in boards. When some batches of IC products only need to be tested in small quantities, for example, a batch of chips can only load 15 burn-in boards, the operator often directly pushes them from the trolley in order into the burn-in machine, resulting in that the lower Site loads 12 boards and the upper Site loads only 3 boards. This serious uneven distribution of burn-in boards between the upper and lower Sites is common in actual application, which can easily cause various problems.

[0005] Firstly, the uneven distribution of test tasks between Sites will cause differences in test completion time. For example, the upper Site loads less and takes significantly less time to complete the test than the lower Site. After the test task of the upper Site is completed, it needs to wait for the lower Site to complete synchronously before being unloaded. This waiting mechanism causes the test resources of the burn-in machine to be idle, reducing the overall utilization rate of the equipment. Secondly, in the case of asynchronous test progress between upper and lower Sites, the waiting timeout threshold set by the test software may be triggered, thereby interrupting the entire burn-in process and causing test failure. In addition, the interruption of the test process may also trigger an alarm of the equipment, and even cause the H5620 machine to appear downtime, directly affecting the stable operation of the production line, and then having a negative impact on the delivery cycle and product quality.

[0006] Therefore, the existing aging board furnace operation lacks distribution planning and balanced inspection mechanism, which has been difficult to meet the production requirements of modern semiconductor manufacturing for high efficiency and low failure rate. In order to improve the aging test efficiency, reduce the idle time of the equipment, and avoid the abnormal shutdown caused by unbalanced test, a solution for realizing the distribution planning and balanced inspection of the aging board into the furnace is urgently needed. SUMMARY

[0007] To solve the above technical problems, the present application provides an aging board average furnace control method and system.

[0008] The technical scheme provided by the present application is as follows:

[0009] An aging board average furnace control method, comprising the following steps:

[0010] Obtaining the number H of aging boards of a batch to be tested;

[0011] Based on the balanced distribution strategy, generating balanced arrangement information of the aging boards;

[0012] Placing the aging boards at the corresponding positions of the aging test machine according to the distribution arrangement information, and then performing batch test;

[0013] The aging test machine comprises M heat treatment cavities, each heat treatment cavity is divided into N test areas, and each test area comprises Q aging board slots; the balanced arrangement information is used to indicate the arrangement position of the aging boards; and the balanced distribution strategy is:

[0014] If it is a small batch of aging board test situation, that is, H≤Q, a single test area in a single heat treatment cavity is selected as a target test area, and H aging boards are sequentially filled into the target test area;

[0015] If it is a medium batch of aging board test situation, that is, Q<H≤N·Q, a single heat treatment cavity is selected as a target cavity, and H aging boards are evenly distributed to all test areas contained in the target cavity;

[0016] If it is a large batch of aging board test situation, that is, H>N·Q, the least heat treatment cavities are used preferentially, and the aging boards are evenly distributed to each test area of these cavities, and only when the number of aging boards reaches the number that all heat treatment cavities must be used, the test areas contained in all cavities are evenly distributed.

[0017] Further, for the medium batch of aging board test situation, a load balancing target function is defined:

[0018]

[0019] Minimize the objective function F to make the aging boards evenly distributed in each test area of the target chamber; the allocation scheme adopts the integer mean down rounding and padding method:

[0020]

[0021] wherein P j represents the number of aging boards allocated to the jth test area, represents the down rounding, and mod is the remainder operation.

[0022] Further, for the case of a large number of aging board tests:

[0023] First, determine the minimum number of heat treatment chambers Num min , represents the up rounding.

[0024] Then, determine the number of aging boards that should be allocated to each chamber in Num min chambers:

[0025]

[0026] wherein V i represents the number of aging boards allocated to the ith chamber, represents the down rounding, and mod is the remainder operation.

[0027] Finally, determine the number of aging boards allocated to each test area in each chamber:

[0028]

[0029] wherein P i,j represents the number of aging boards allocated to the jth test area of the ith chamber.

[0030] Further, if only part of the aging test machine chambers, i.e., Num min <M, are to be used, select Num min chambers from the M chambers as target chambers by the following chamber selection strategy, and evenly distribute the aging boards to be tested into the target chambers:

[0031] S1, define the candidate chamber set as:

[0032] C free ={Chamber k |1≤k≤M}

[0033] S2, calculate the health score of each chamber in the candidate chamber set:

[0034]

[0035] S3, sort all candidate chambers according to health score from high to low to obtain a priority list;

[0036] S4, select the first Num min chambers from the priority list as target chambers;

[0037] Wherein, C free is a candidate chamber set, Score k represents the health score of the kth chamber Chamber k , w1, w2, w3 and w4 are weights, and w1+w2+w3+w4=1; T k , R k , X k , I k respectively represent the average temperature rise deviation, historical failure rate, recent maintenance frequency, and idle time length of the kth chamber, T max , X max , I max are the maximum temperature rise deviation, the maximum maintenance frequency, and the maximum idle time length, respectively; the average temperature rise deviation is the average deviation of the actual thermal curve of the chamber from the target thermal curve, the historical failure rate is the proportion of the number of failures within a set number of tasks, the recent maintenance frequency is the number of maintenance experienced by the chamber within a set time period, and the idle time length is the idle time of the chamber after the last use.

[0038] Further, before the batch test is performed, the positions and quantities of the aging boards in the aging test machine are confirmed to verify whether the aging boards to be tested have been accurately arranged according to the balanced arrangement information. If there is a deviation, an alarm is prompted.

[0039] Further, a board position detection module for detecting whether an aging board is inserted is added to each aging board slot position in the aging test machine. The state information of each aging board slot is obtained through the board position detection module, and is classified and counted according to chambers and test areas to obtain the number of aging boards actually inserted in each chamber test area. Then, the balanced arrangement information is compared. If they are consistent with each other, the batch test is allowed to start. Otherwise, an alarm is prompted to remind the staff to adjust the aging board arrangement.

[0040] An aging board average loading control system based on the above method, comprising:

[0041] Arrangement and distribution module: based on the number of aging boards to be tested, the balanced arrangement information for indicating the arrangement of the aging boards is automatically calculated and generated according to the balanced distribution strategy;

[0042] Board position detection module: installed at each aging board slot position in the aging test machine, for detecting whether an aging board is inserted;

[0043] Data acquisition and processing module: This module collects the original signal from the board position detection module in real time, extracts the effective slot state information, and classifies and counts according to the cavity test area, obtains the number of aging boards inserted in each cavity test area, and compares the actual arrangement information with the balanced arrangement information. If they are inconsistent, the pre-warning prompt module will alarm and prompt;

[0044] Pre-warning prompt module: When the actual arrangement of the aging board is detected to be inconsistent with the balanced arrangement information, this module will trigger an audible and visual alarm or an interface pop-up prompt to remind the operator to adjust the board position distribution;

[0045] Human-machine interface module: Through a touch screen, upper computer software or integrated into the aging test machine control panel, an operation interface for displaying information is provided, including balanced arrangement information, actual arrangement information and pre-warning prompt information.

[0046] Further, it further includes a board position map generation module, which generates a board position distribution map according to the actual arrangement information processed by the data acquisition and processing module; the board position distribution map displays the occupation state of each aging board slot in the form of a matrix or a graph, so that the operator can intuitively understand the actual distribution of the current aging board in the aging test machine.

[0047] Further, it further includes a data recording and tracing module, which is used for recording the number of aging boards, aging board distribution map, time stamp and batch number information for each test, forming a test history, and supporting data query and historical data export.

[0048] Preferably, the board position detection module adopts an infrared photoelectric sensor or a contact limit switch.

[0049] Compared with the prior art, the application provides an intelligent aging board distribution and control method, which solves the problems of test progress asynchronization, waiting timeout, test interruption and even device downtime caused by uneven test tasks between Sites in the prior art. By introducing a dynamic distribution algorithm and load balancing control, the system can monitor and adjust the board position distribution of the upper and lower Sites in real time, ensure that the task load of each test area is as balanced as possible, and avoid test time differences and test interruptions caused by uneven board positions. In addition, the system automatically triggers the early warning mechanism when the load of each Site is uneven through intelligent sensing and optimization algorithm, prevents test timeout and process interruption, and greatly reduces the risk of device alarm and downtime. Through the resource allocation strategy of minimum cavity priority, the scheme maximizes the utilization of the device, reduces the idle and energy consumption of the device, and ensures the efficient and stable operation of the test process. The introduction of the system not only avoids unstable factors in the production process of the production line, but also improves the reliability and productivity of the test device, has significant advantages, and can ensure the smooth completion of the aging test task in a complex production environment. BRIEF DESCRIPTION OF DRAWINGS

[0050] The accompanying drawings are included to provide a further understanding of the application, and constitute a part of the specification, which together with the embodiments of the application, serve to explain the application, and do not constitute a limitation on the application.

[0051] Figure 1 is a control method framework schematic diagram provided by an embodiment of the application;

[0052] Figure 2 is a control system composition schematic diagram provided by an embodiment of the application. DETAILED DESCRIPTION

[0053] In order to make the purpose, technical scheme and advantages of the embodiments of the application more clear, the technical scheme in the embodiments of the application will be described clearly and completely below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are part of the embodiments of the application, rather than all the embodiments of the application. Based on the embodiments in the application, other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the application.

[0054] Embodiment one

[0055] With the increasing demand for chip reliability verification, aging test equipment gradually develops in the direction of multi-cavity, multi-region and high capacity. For the new generation of high concurrency aging platform, the embodiment provides an aging board average furnace entry control method suitable for multi-cavity, multi-test region and multi-slot structure. As shown in Figure 1As shown, the method can optimally distribute any number of aging boards under the premise of meeting the structural layering constraints, thereby achieving dynamic configuration of aging test resources, spatial balancing of test load, and synchronous control of test timing.

[0056] Suppose the total number of aging boards to be tested in a batch is H, the aging test machine is composed of M heat treatment chambers (Chamber), each heat treatment chamber is divided into N test regions (Site), and each test region contains Q aging board slots (Slot). The aging board distribution strategy can be divided into three typical scheduling scenarios:

[0057] Scenario 1: H≤Q

[0058] This is a small batch of aging board test scenario. To avoid energy consumption redundancy and uneven thermal field caused by cross-site or cross-chamber, the idle single test region Site i,j (the jth test region under the ith chamber) is selected as the target test region. Through the slot linear filling strategy, H aging boards are filled in sequence to ensure that all aging boards are located in the same region.

[0059] The filling strategy is defined as follows:

[0060]

[0061] On the basis of ensuring the idle of test region resources, the test region with stable temperature rise and low failure rate is preferentially selected, and the historical data is combined for region optimization.

[0062] Scenario 2: Q<H≤N·Q

[0063] This is a medium batch of aging board scheduling scenario, which needs to be evenly distributed in multiple test regions in the same chamber. First, select a chamber with the lowest current resource utilization, and evenly divide all aging boards among the N test regions it contains.

[0064] Define the load balancing objective function:

[0065]

[0066] Where P j represents the number of aging boards allocated to the jth test region. The goal is to minimize F, i.e., to make the aging boards evenly distributed in each test region of the chamber. The allocation scheme can use the integer mean down rounding and padding method:

[0067]

[0068] Each test region is filled with slots in linear order to avoid signal interference caused by slot jumping.

[0069] Scenario 3: H>N·Q

[0070] This is the case of a large number of aging boards entering the furnace, which requires joint distribution in multiple cavities and multiple test areas. For this purpose, a minimum cavity priority strategy is designed to preferentially use the least number of cavities to evenly distribute the aging boards to each test area in these cavities. Only when the number of aging boards is large enough to use all the cavities, uniform distribution is performed in all cavities and their corresponding test areas. In the case of underloaded cavities, a reasonable load balancing mechanism is used to ensure that the aging boards are evenly distributed in the test areas of available cavities.

[0071] Specifically, the following steps can be included:

[0072] (1) Determine the number of required cavities

[0073] According to the ratio of the number of aging boards H to the capacity of each cavity test area N·Q, calculate how many cavities are needed to accommodate all aging boards:

[0074]

[0075] Where Num min represents the minimum number of cavities required, represents the ceiling function.

[0076] (2) Average distribution among cavities

[0077] Determine the number of aging boards distributed in each cavity among Num min cavities:

[0078]

[0079] Where V i represents the number of aging boards distributed in the i-th cavity.

[0080] (3) Average distribution among test areas

[0081] For each cavity, determine the number of aging boards distributed in each test area in the cavity:

[0082]

[0083] Where P i,j represents the number of aging boards distributed in the j-th test area of the i-th cavity.

[0084] Finally, the order slot method is used inside each test area:

[0085]

[0086] The burn-in board distribution strategy described above, encompassing three scenarios, can dynamically select the optimal resource allocation method based on the number of burn-in boards, achieving a smooth transition from a single test area to global allocation across multiple chambers. Its greatest advantage lies in its integration of hierarchical modeling and the principle of minimum resource utilization. By introducing a load balancing function and a compensation scheduling algorithm, it ensures uniform distribution of burn-in boards across test areas while effectively reducing the idle rate and energy consumption burden of chamber resources, achieving the coordinated optimization of test efficiency, equipment stability, and energy utilization.

[0087] For example, for an H5620 burn-in machine with two thermal treatment chambers, each chamber contains two test areas, and each treatment area has 12 burn-in board slots. The above three scheduling scenarios can be simplified as follows:

[0088] If the number of aging boards to be tested H≤12, which is within the tolerance of a single test area, a heat treatment chamber is selected and all aging boards are allocated to one of the test areas of the heat treatment chamber.

[0089] If the number of aging boards to be tested is 12 <H≤24,则将老化板平均分配在单个腔体的两个测试区域内,比如15块老化板,可将8块放在下层Site,7块放在同一腔体的上层Site。

[0090] If the number of aging boards to be tested H>24 exceeds the tolerance of a single chamber and all cavities of the machine need to be used, all aging boards will be evenly distributed among the four test areas in two chambers.

[0091] For the case where only part of the machine cavity is used, that is, Num min <M,可以对当前机台所有腔体进行优先级排序,再执行负载填充。为此,设计一种基于多指标评分模型的腔体优选策略。

[0092] The candidate cavity set is defined as:

[0093] C free ={Chamber k |1≤k≤M}

[0094] Design a comprehensive health score function Score for each cavity k , scoring dimensions include but are not limited to:

[0095] Average temperature rise deviation T: average deviation from the target thermal curve (°C);

[0096] Historical failure rate R: the percentage of failures in the last N aging tasks;

[0097] Recent maintenance times X: the number of maintenance times the chamber has undergone in the last 30 days;

[0098] Idle time I: the idle time after the last use (min).

[0099] The health score of each cavity is calculated as follows:

[0100]

[0101] where w1, w2, w3 and w4 are the weights of each score dimension, and w1+w2+w3+w4=1, the weights can be adjusted according to the situation, such as w1 is increased if the temperature control is more sensitive. max , X max , I max are the maximum values of temperature rise deviation, maintenance frequency and idle time respectively, which are used for variable normalization to ensure that the score is in the interval [0, 1].

[0102] According to the health score from high to low, all candidate cavities are sorted to obtain a priority list, and finally the top Num min cavities are selected from the priority list as the target cavities for this time, and the aging boards to be tested are distributed in these target cavities.

[0103] In actual aging test, first, the number of aging boards to be tested is obtained, then based on the above aging board distribution strategy, the balanced arrangement information of the aging boards to be tested (how many aging boards are inserted into which test area of which cavity) is generated, then the staff places the specified number of aging boards at the specified location according to the balanced arrangement information, and finally the batch test is performed. Before the batch test, it is necessary to confirm the position and number of the aging boards in the aging machine to verify whether the staff has arranged the aging boards to be tested accurately according to the balanced arrangement information. However, the existing H5620 aging machine cannot automatically detect and record the up-down slot distribution of the aging boards, nor does it have slot identification function.

[0104] Therefore, the present embodiment adds a board position detection module, which is installed at each aging board slot position (Slot) in the H5620 aging machine. Each slot corresponds to a detection unit, preferably an infrared photoelectric sensor or a contact limit switch, which is used to detect whether the aging board is inserted. The detection signal is uniformly connected to the IO acquisition board or the micro control unit (MCU) for judging the state of each slot (with board / no board). By collecting the original signal from the board position detection module in real time and performing preliminary logic processing, the effective slot state information is extracted and classified and counted according to the cavity test area to obtain the number of aging boards inserted in each cavity test area. Finally, the statistical information obtained based on the board position detection is compared with the balanced arrangement information. If they are consistent with each other, the batch test is allowed, otherwise an alarm is prompted to remind the staff to adjust the aging board arrangement.

[0105] Embodiment Two

[0106] Based on the above method, the embodiment provides an aging board average furnace control system, as shown in the figure, which mainly includes arrangement and distribution module, board position detection module, data acquisition and processing module, board position map generation module, early warning prompt module and man-machine interface module. The modules interact and control each other through bus or local area network to build an intelligent furnace management system integrating detection, control, visualization and traceability. Figure 2

[0107] 1. Arrangement and distribution module

[0108] Based on the total number of current furnace aging boards, the module automatically calculates the ideal distribution scheme according to the method strategy described in Embodiment One, generates balanced arrangement information of the aging boards to be tested, and guides the test staff to arrange the aging boards.

[0109] 2. Board position detection module

[0110] The module is installed at each aging board slot position in the aging test equipment. Each slot corresponds to a detection unit, preferably an infrared photoelectric sensor or a contact limit switch, which is used to detect whether the aging board is inserted. The detection signal is connected to the IO acquisition board or the micro control unit (MCU) for judging the state of each slot (with board / no board).

[0111] 3. Data acquisition and processing module

[0112] The module collects the original signals from the board position detection module in real time and performs preliminary logical processing to extract valid slot state information. The information is classified and counted according to the test area of the cavity to obtain the number of aging boards inserted in each test area. The statistical information is compared with the balanced arrangement information, and if they are inconsistent, the early warning prompt module will alarm and remind.

[0113] 4. Board position map generation module

[0114] The module receives the processed slot state data and generates a board position distribution map of the whole machine. The board position map displays the occupancy state of each slot in matrix or graphical form, which is convenient for the operator to intuitively understand the actual distribution of the aging board in the aging test equipment.

[0115] 5. Early warning prompt module

[0116] When the actual arrangement of the aging board (based on the statistical information obtained by the board position detection) is inconsistent with the balanced arrangement information, the module will trigger an audible and visual alarm or an interface pop-up prompt to remind the operator to adjust the board position distribution to prevent subsequent test failure or machine downtime. ​

[0117] 6. Human-machine interface module

[0118] An operation interface is provided through a touch screen, host computer software or integration in the control panel of the aging machine, for displaying board position map, distribution statistical information, early warning prompt information, historical record query and the like, to support real-time monitoring and adjustment by an operator.

[0119] 7. Data recording and tracing module

[0120] The module records information such as the number of aging boards for each furnace entry, slot distribution map, time stamp, batch number and the like, forms an entry history, can be connected with a MES system to realize product life cycle tracing. Meanwhile, it supports export of historical data for subsequent analysis and optimization.

[0121] The above system or product can execute the aging board average furnace entry control method described in Embodiment One, has the corresponding functional modules and beneficial effects of the method, and technical details not described in detail in this embodiment can be referred to the aging board average furnace entry control method provided in Embodiment One of the present application.

[0122] Through the description of the above embodiments, those skilled in the art can clearly understand that each embodiment can be realized by means of software plus a general hardware platform, and of course, it can also be realized by hardware. Based on such understanding, the above technical solutions or the part that contributes to the related art can be embodied in the form of a software product, which can be stored in a computer readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes a plurality of instructions to cause a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the method described in each embodiment or some part of the embodiment.

[0123] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; under the idea of the present application, the technical features in the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other changes of different aspects of the present application as described above. In order to be brief, they are not provided in detail; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A method for controlling the average number of aging boards entering the furnace, characterized in that: It includes the following steps: Obtain the number H of aging boards in the batch to be tested; Generate the balanced arrangement information of the aging boards based on the balanced distribution strategy; Place the aging boards at the corresponding positions of the aging test machine according to the distribution arrangement information and then conduct batch opening tests; The aging test machine consists of M heat treatment cavities, each heat treatment cavity is divided into N test areas, and each test area contains Q aging board slots; the balanced arrangement information is used to indicate the arrangement positions of the aging boards; the balanced distribution strategy is as follows: If it is a small batch aging board test situation, that is, H≤Q, select a single test area in a single heat treatment cavity as the target test area, and fill the H aging boards into the target test area in sequence; If it is a medium batch aging board test situation, that is, Q<H≤N·Q, select a single heat treatment cavity as the target cavity, and evenly distribute the H aging boards to all test areas included in the target cavity; If it is a large batch aging board test situation, that is, H>N·Q, preferentially use the fewest heat treatment cavities, evenly distribute the aging boards to the test areas of these cavities, and only when the number of aging boards reaches the point where all heat treatment cavities must be used, evenly distribute them in the test areas included in all cavities.

2. A method for controlling the average number of aging boards entering the furnace according to claim 1, characterized in that: For the medium batch aging board test situation, define the load balancing objective function: Minimize the objective function F to make the distribution of aging boards in each test area of the target cavity balanced; the distribution plan adopts the method of rounding down the integer average and filling; Among them, P j represents the number of aging boards assigned to the jth test area, Indicates rounding down, and mod is the remainder operation.

3. The method for controlling the average number of aging boards entering the furnace according to claim 1, wherein: First, determine the minimum number of heat treatment chambers required Num min , Indicates rounding up; Then, determine Num min The number of aging boards that should be allocated to each cavity in a cavity: Among them, V i is the number of aging boards assigned to the i-th cavity, Indicates rounding down, mod is the remainder operation; For the large batch aging board test situation: Among them, P i,j Indicates the number of burn-in boards assigned to the j-th test area of ​​the i-th cavity.

4. A method for controlling the average number of aging boards entering the furnace as claimed in claim 3, characterized in that: If only some of the cavities of the aging test machine are to be utilized, i.e., Num min <M, then Num min cavities are selected as the target cavities from the M cavities through the following cavity optimization strategy, and the aging boards to be tested are evenly distributed into the target cavities: Finally, determine the number of aging boards allocated to each test area in each cavity: C free ={Chamber k |1≤k≤M} S1. Define the candidate cavity set as: S2. Calculate the health score of each cavity in the candidate cavity set; S4. Select the first Num from the priority list min A cavity is used as the target cavity; Among them, C free is the candidate cavity set, Score k Indicates the kth cavity Chamber k The health score of T, w1, w2, w3 and w4 are weights, and w1+w2+w3+w4=1; k 、R k 、X k , I k They represent the average temperature rise deviation, historical failure rate, number of recent maintenance times, and idle time of the kth cavity, respectively. max 、X max , I max They are the maximum temperature rise deviation, the maximum number of maintenance times, and the maximum idle time respectively; the average temperature rise deviation is the average deviation between the actual thermal curve of the cavity and the target thermal curve, the historical failure rate is the proportion of failures within the set number of tasks, the recent maintenance times is the number of maintenance times the cavity has experienced within the set time period, and the idle time is the idle time since the cavity was last used.

5. The method for controlling the average number of aging boards entering the furnace according to claim 1, wherein: S3. Sort all candidate cavities according to the health score from high to low to obtain a priority list; 6. A method for controlling the average number of aging boards entering the furnace as claimed in claim 5, characterized in that: Before conducting the batch opening test, confirm the positions and quantities of the aging boards in the aging test machine to verify whether the aging boards to be tested are accurately arranged according to the balanced arrangement information. If there are deviations, an alarm prompt will be given. Add a board position detection module for detecting whether an aging board is inserted at each aging board slot position in the aging test machine. Obtain the status information of each aging board slot through the board position detection module, and classify and count them according to the cavity and test area to obtain the actual number of aging boards inserted in each test area of each cavity; 7. A control system for averaging the number of aging boards entering the furnace based on the method according to any one of claims 1 to 6, characterized in that: Then compare it with the balanced arrangement information. If they are consistent, batch opening tests are allowed; otherwise, an alarm prompt is given to remind the staff to readjust the arrangement of the aging boards. It includes: Arrangement distribution module: This module automatically calculates and generates balanced arrangement information for indicating the arrangement of aging boards based on the number of aging boards in the batch to be tested according to the balanced distribution strategy; Board position detection module: This module is installed at each aging board slot position in the aging test machine and is used to detect whether an aging board is inserted; Data acquisition and processing module: This module collects the original signal from the board position detection module in real time, extracts valid slot status information, and classifies and counts it by cavity test area to obtain the number of aging boards inserted in each cavity test area. It also compares the actual arrangement information with the balanced arrangement information. If there is any inconsistency, the early warning prompt module will issue an alarm. Early warning module: When it detects that the actual layout of the aging boards is inconsistent with the balanced layout information, the module will trigger an audible and visual alarm or a pop-up window prompt to remind the operator to readjust the board position distribution; Human-machine interface module: provides an operating interface for displaying information through a touch screen, host computer software or integration into the aging test machine control panel. The displayed information includes balanced arrangement information, actual arrangement information, and early warning prompt information.

8. The average furnace feeding control system for aging boards according to claim 7, characterized in that: It also includes a board location map generation module, which generates a board location distribution map based on the actual layout information obtained by the data acquisition and processing module; the board location distribution map displays the occupancy status of each aging board slot in the form of a matrix or graph, which makes it easy for operators to intuitively understand the actual distribution of the current aging board in the aging test machine.

9. The average furnace feeding control system for aging boards according to claim 7, characterized in that: It also includes a data recording and tracing module, which is used to record the number of aging boards, aging board distribution map, timestamp, and batch number information for each test to form a furnace test history, and supports data query and historical data export.

10. The average furnace feeding control system for aging boards according to claim 7, characterized in that: The board position detection module adopts an infrared photoelectric sensor or a contact limit switch.

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