Combined stray light limiting device of vacuum cavity
By setting up a light-blocking part and a gas channel in the vacuum chamber, the problem of stray light interfering with the main light source is solved, achieving higher measurement accuracy and stability, and making it suitable for semiconductor testing equipment.
Patent Information
- Application Number
- CN202511053166.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-29
- Publication Date
- 2025-10-17
AI Technical Summary
In semiconductor testing equipment, stray light interferes with the precise alignment of the main light source and the stability of the test, resulting in a decrease in measurement accuracy and stability.
A combined stray light limiting device for a vacuum chamber was designed, including a light-blocking part and a gas channel. The light-blocking part blocks the light emitted by the testing instruments and driving equipment, and the matte surface treatment reduces light reflection and ensures gas flow.
It effectively reduces the interference of stray light on the main light source, improves measurement accuracy and stability, and meets the needs of precision optical testing.
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Figure CN120802492A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of semiconductor testing, in particular to a combined stray light limiting device in a vacuum chamber. BACKGROUND
[0002] In a semiconductor testing device, in addition to achieving a clean vacuum environment, it is also required to limit the interference of all-around stray light on the vacuum chamber during the light path testing process. However, the vacuum environment testing instrument matched with the vacuum chamber, such as a hot cathode ion gauge and a QMS mass spectrometer, will form stray light through direct emission or reflection of the inner wall of the vacuum chamber when the filament is emitting light, which will seriously interfere with the accurate alignment and testing of the main light source, resulting in the deterioration of the measurement accuracy, the decline of the measurement stability, and the influence on the final testing result. SUMMARY
[0003] The purpose of the present application is to provide a combined stray light limiting device in a vacuum chamber to solve the problems existing in the prior art and reduce the interference of stray light on the accurate alignment and testing stability of the main light source.
[0004] To achieve the above-mentioned purpose, the present application provides the following solutions:
[0005] The present application provides a combined stray light limiting device in a vacuum chamber, which comprises a vacuum chamber and a first light blocking part. The vacuum chamber is provided with a first interface for connecting a testing device. The first light blocking part is arranged in the first interface and is used for covering the light emitting position of the testing instrument. A gas passage capable of allowing gas to pass through is arranged on the outer wall of the first light blocking part.
[0006] Preferably, the first light blocking part is arranged as a light blocking cover, and a first light absorbing structure is arranged inside the light blocking cover.
[0007] Preferably, the vacuum chamber is further provided with a second interface for connecting a light source mechanism. A second light blocking part is arranged in the second interface, and a light passing hole for allowing the light source to pass through is arranged in the second light blocking part.
[0008] Preferably, the second light blocking part is arranged as a light limiting sheet, and the light limiting sheet is detachably arranged in the second interface.
[0009] Preferably, the vacuum chamber is further provided with a third interface for connecting a driving device. A diaphragm is arranged in the vacuum chamber, and different diameter light beam holes are arranged on the diaphragm. The diaphragm is used for being connected with the driving device and can be driven to move by the driving device, so that different light beam holes are opposite to the light passing hole.
[0010] Preferably, a third light blocking part is further arranged, which is used for covering the light emitting position of the driving device.
[0011] Preferably, the third light blocking portion is configured as a light shielding plate, and a first light absorbing layer is provided on an inner wall of the light shielding plate.
[0012] Preferably, the vacuum chamber is further provided with a fourth interface for connecting to an observation window, and the fourth interface and the observation window cover are provided with a fourth light blocking portion.
[0013] Preferably, the fourth light blocking portion is provided as a shielding cover, and the shielding cover is detachably provided outside the fourth interface and the observation window; and a second light absorbing layer is provided on the inner wall of the shielding cover.
[0014] Preferably, the inner wall surface of the vacuum chamber is configured to be a matte surface.
[0015] Compared with the prior art, the present invention has achieved the following technical effects:
[0016] The combined stray light limiting device in a vacuum chamber provided by the present invention has a first light-blocking portion. When a test instrument, such as a hot cathode ionization gauge or a QMS mass spectrometer, is connected to a first interface of the vacuum chamber, the first light-blocking portion can shield the light-emitting filament of the test instrument, thereby preventing light generated by the filament from interfering with the vacuum chamber and affecting the precise alignment of the main light source and the stability of the test. Furthermore, by providing a gas channel on the first light-blocking portion, when the light-emitting filament of the test instrument is fully surrounded and shielded from light, the gas channel can ensure gas circulation and will not affect the operation of the test instrument. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0018] Figure 1 This is an axial schematic diagram of a combined stray light limiting device in a vacuum chamber provided in Example 1 of the present invention;
[0019] Figure 2 for Figure 1 A schematic diagram of a partial cross-sectional structure of a combined stray light limiting device in a vacuum cavity as viewed from the front;
[0020] Figure 3 for Figure 1 A schematic diagram of a partial cross-sectional structure of a combined stray light limiting device in a vacuum chamber as viewed from the left;
[0021] Figure 4 for Figure 1A schematic view of a partial sectional structure of the combined stray light limiting device in the vacuum cavity from the top view is provided.
[0022] Figure 5 A schematic view of the structure of the fourth light blocking part provided for the first embodiment of the present application is provided.
[0023] In the figure: 1-vacuum chamber; 11-first interface; 12-second interface; 13-third interface; 14-fourth interface; 2-test instrument; 3-first light blocking part; 31-gas passage; 4-second light blocking part; 5-diaphragm; 6-third light blocking part; 7-fourth light blocking part. DETAILED DESCRIPTION
[0024] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.
[0025] The purpose of the present application is to provide a combined stray light limiting device in a vacuum cavity to solve the problems existing in the prior art and reduce the interference of stray light on the accurate alignment and test stability of the main light source.
[0026] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the present application will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0027] Embodiment one
[0028] The present embodiment provides a combined stray light limiting device in a vacuum cavity, please refer to Figure 1-Figure 4 , which comprises a vacuum chamber 1 and a first light blocking part 3: the vacuum chamber 1 is provided with a first interface 11 for connecting a test instrument 2; the first light blocking part 3 is arranged in the first interface 11, the first light blocking part 3 is used to cover the light emitting position of the test instrument 2; and the outer wall of the first light blocking part 3 is provided with a gas passage 31 capable of passing gas.
[0029] By setting the first light blocking part 3, when the test instrument 2 such as a hot cathode ionization gauge or a QMS mass spectrometer is accessed in the first interface 11 of the vacuum chamber 1, the first light blocking part 3 can shield the light emitting filament of the test instrument 2, avoid the light generated by the filament work from causing interference in the vacuum chamber 1, and affect the accurate alignment of the main light source and the stability of the test; and by setting the gas passage 31 on the first light blocking part 3, when the light emitting filament of the test instrument 2 is fully surrounded by the light blocking, the gas passage 31 can meet the gas flow, and will not affect the work of the test instrument 2; because the hot cathode ionization gauge is used to calculate the pressure value by measuring the ion current intensity generated by the collision between electrons and gas molecules, so the gas flow needs to be maintained through the gas passage 31, and the QMS mass spectrometer needs to introduce the measured gas into the ion source, and the QMS can distinguish different mass-to-charge ratio ion particles and measure them respectively, and different mass-to-charge ratio ions will show a spectrum peak at the corresponding position when passing through the quadrupole field, and the intensity of the spectrum peak is related to the number of ions, so the gas flow needs to be maintained through the gas passage 31.
[0030] In an optional solution of the embodiment, preferably, the first light blocking part 3 is set as a light blocking cover, and a first light absorbing structure is arranged inside the light blocking cover.
[0031] The light blocking cover itself can be arranged as a detachable structure such as a buckling interface, so as to be assembled and covered at the light emitting position of the test instrument 2, and the first light absorbing structure can be arranged as a light absorbing labyrinth structure, and cooperates with the light absorbing layer such as a black light absorbing film arranged on the inner wall to reduce the reflection and propagation of light; the film material is selected as PTFE film, i.e. polytetrafluoroethylene dispersion resin material, which is friendly to the vacuum environment and has little influence.
[0032] In an optional solution of the embodiment, preferably, the vacuum chamber 1 is further provided with a second interface 12 for connecting a light source mechanism; and a second light blocking part 4 is arranged in the second interface 12, and a light passing hole for allowing the light source to pass through is arranged in the middle of the second light blocking part 4.
[0033] By arranging the second light blocking part 4, the light source can pass through the light passing hole arranged in the middle to irradiate into the vacuum chamber 1, and the remaining part outside the light passing hole can reduce the scattering of light entering the chamber.
[0034] In an optional solution of the embodiment, preferably, the second light blocking part 4 is set as a light limiting sheet, and the light limiting sheet is detachably arranged in the second interface 12.
[0035] The light limiting sheet is coaxially arranged with the second joint 12, and is detachably connected in the second interface 12 through a clamping mode, and can be replaced as needed; the material of the light limiting sheet is selected as a conventional non-transparent material.
[0036] In addition, the vacuum chamber 1 is provided with an interface for light source emission on the side opposite to the second interface 12.
[0037] In an optional solution of the embodiment, preferably, the vacuum chamber 1 is further provided with a third interface 13 for connecting a driving device, and the vacuum chamber 1 is provided with a diaphragm 5, the diaphragm 5 is provided with beam holes with different diameters, and the diaphragm 5 is connected with the driving device and can be driven to move by the driving device so that different beam holes are opposite to the light hole.
[0038] In the embodiment, the beam holes provided on the diaphragm 5 facilitate light path constraint and adjustment, and by providing beam holes with different diameters on the diaphragm 5 and cooperating with the driving of the driving device, different beam holes are opposite to the light hole to meet different light path constraint and adjustment requirements.
[0039] In an optional solution of the embodiment, preferably, the combined stray light limiting device in the vacuum chamber provided by the embodiment further comprises a third light blocking part 6, and the third light blocking part 6 is used to cover the light emitting position of the driving device.
[0040] In the embodiment, the grating ruler or reading head matched with the precision motion module of the driving device can emit signal light during work, so the third light blocking part 6 is provided to shield the light emitting position, avoid the light generated during work from interfering with the vacuum chamber 1, and affect the accurate alignment and test stability of the main light source.
[0041] In an optional solution of the embodiment, preferably, the third light blocking part 6 is provided as a light shield plate, and the inner wall of the light shield plate is provided with a first light absorbing layer.
[0042] In the embodiment, the light shield plate can be provided as a semi-closed box type structure, and can be fixed by buckling or bolt connection according to the shell structure of the driving device; the first light absorbing layer is provided as a black light absorbing film, which reduces the reflection and propagation of light; the film material is selected as PTFE film, i.e. polytetrafluoroethylene dispersion resin material, which is friendly to the vacuum environment and has little influence.
[0043] In an optional solution of the embodiment, preferably, the vacuum chamber 1 is further provided with a fourth interface 14 for connecting an observation window, and the fourth interface 14 and the observation window are provided with a fourth light blocking part 7.
[0044] In the embodiment, the fourth interface 14 is provided to cooperate with the observation window for observation; similarly, in order to avoid unnecessary light from the outside passing through the observation window into the vacuum chamber 1 to form stray light, the fourth light blocking part 7 is provided to shield the fourth interface 14 and the observation window in a non-observation state.
[0045] In an optional solution of the embodiment, preferably, the fourth light shielding part 7 is provided as a shielding cover, which is detachably arranged outside the fourth interface 14 and the observation window; and the inner wall of the shielding cover is provided with a second light absorbing layer.
[0046] The shielding cover can fully enclose the fourth interface 14 and the observation window, is provided in a cylindrical shape, coaxially arranged outside the fourth interface 14 and the observation window, and the second light absorbing layer is provided as a black light absorbing film, thereby reducing the reflection and propagation of light; in addition, the shielding cover can be provided with a plurality of connecting grooves in the circumferential direction of the open end, as shown in Figure 5 correspondingly, one or more connecting protrusions can be arranged outside the fourth interface 14, so that each connecting protrusion cooperates with the corresponding connecting groove, thereby improving the setting stability of the shielding cover; further, one or more connecting grooves can be provided as L-shaped grooves, and after the connecting protrusion cooperates with the L-shaped groove, the connecting protrusion is rotated to cooperate with the bent root portion of the L-shaped groove, thereby further improving the stability and preventing the shielding cover from accidentally falling off.
[0047] Further, a handle can be arranged outside the shielding cover, thereby facilitating operation.
[0048] In an optional solution of the embodiment, preferably, the inner wall surface of the vacuum chamber 1 is provided as a matte surface.
[0049] The matte surface is provided by a different electrochemical polishing process from the inner wall of a general vacuum chamber, and the matte treatment of the inner wall can effectively suppress the emission of light.
[0050] The combined stray light limiting device in the vacuum chamber provided by the embodiment effectively shields and limits the stray light from the inside and outside of the vacuum chamber, reduces the interference of stray light with the accurate alignment and testing of the main light source, improves the measurement accuracy and measurement stability, and can meet the use of precision optical testing equipment.
[0051] The principles and implementation manners of the present application are described by using specific examples in the present application; the above description of the embodiments is only used to help understand the method of the present application and its core idea; meanwhile, for those skilled in the art, according to the idea of the present application, the specific implementation manners and application ranges will be changed. In conclusion, the content of the present description should not be understood as a limitation of the present application.
Claims
1. A combined stray light limiting device in a vacuum chamber, characterized by: include: A vacuum chamber (1), wherein the vacuum chamber (1) is provided with a first interface (11) for connecting a testing instrument (2); A first light shielding portion (3) is provided in the first interface (11), and the first light shielding portion (3) is used to cover the light-emitting portion of the test instrument (2); and a gas passage (31) capable of allowing gas to pass through is provided on the outer wall of the first light shielding portion (3).
2. The combined stray light limiting device in a vacuum chamber according to claim 1, characterized in that: The first light-blocking portion (3) is configured as a light-blocking cover, and a first light-absorbing structure is provided inside the light-blocking cover.
3. The combined stray light limiting device in a vacuum chamber according to claim 2, characterized in that: The vacuum chamber (1) is also provided with a second interface (12) for connecting to a light source mechanism; a second light blocking portion (4) is provided in the second interface (12), and a light hole for allowing the light source to pass through is provided in the middle of the second light blocking portion (4).
4. The combined stray light limiting device in a vacuum chamber according to claim 3, characterized in that: The second light blocking portion (4) is configured as a light limiting plate, and the light limiting plate is detachably disposed in the second interface (12).
5. The combined stray light limiting device in a vacuum chamber according to claim 3, characterized in that: The vacuum chamber (1) is further provided with a third interface (13) for connecting to a driving device. An aperture (5) is provided in the vacuum chamber (1). The aperture (5) is provided with light beam holes of different diameters. The aperture (5) is used to connect to the driving device and can be driven to move by the driving device so that different light beam holes are opposite to the light-through hole.
6. The combined stray light limiting device in a vacuum chamber according to claim 5, characterized in that: It also includes a third light shielding portion (6), which is used to cover the light-emitting portion of the driving device.
7. The combined stray light limiting device in a vacuum chamber according to claim 6, characterized in that: The third light blocking portion (6) is configured as a light shielding plate, and the inner wall of the light shielding plate is provided with a first light absorbing layer.
8. The combined stray light limiting device in a vacuum chamber according to claim 1, characterized in that: The vacuum chamber (1) is also provided with a fourth interface (14) for connecting to an observation window, and the fourth interface (14) and the observation window cover are provided with a fourth light-blocking portion (7).
9. The combined stray light limiting device in a vacuum chamber according to claim 8, characterized in that: The fourth light-blocking portion (7) is configured as a shielding cover, which is detachably mounted outside the fourth interface (14) and the observation window; and a second light-absorbing layer is provided on the inner wall of the shielding cover.
10. The combined stray light limiting device in a vacuum chamber according to claim 1, characterized in that: The inner wall surface of the vacuum chamber (1) is configured as a matte surface.