Visual inspection conveying device for semiconductor substrate production

Abstract

The invention relates to the technical field of semiconductor substrate conveying devices, in particular to a visual inspection conveying device for semiconductor substrate production, which comprises a main body mechanism, the main body mechanism comprises a rack, the outer surface of the rack is in transmission connection with a conveying chain plate, and two protection plates are fixedly mounted on the inner wall of the rack; a chain plate cleaning mechanism is arranged above the rack; the chain plate cleaning mechanism comprises a chain plate cleaning unit, the chain plate cleaning mechanism further comprises a cleaning wastewater recycling unit, the purpose of cleaning the inner ring and the outer ring of the conveying chain plate can be achieved through the chain plate cleaning unit, and through a single-head spray head and a double-head spray head, the double-head spray head can stretch out and draw back to adjust the distance between the double-head spray head and the conveying chain plate; the single-head spray head can rotate through the double-shaft independent motor, on the basis, the single-head spray head and the double-head spray head can move in the left-right direction, the effect of comprehensively cleaning the inner ring and the outer ring of the conveying chain plate is achieved, and the sprayed liquid is further matched with the cleaning roller.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor substrate conveying device, in particular to a visual detection semiconductor substrate production conveying device. BACKGROUND

[0002] The semiconductor substrate is the basis of semiconductor device manufacturing, and is a base material for carrying semiconductor device manufacturing, providing physical support and electrical connection. It plays a key role in semiconductor performance. The semiconductor substrate will be heat treated during production, and further ultrasonic cleaning will be performed. Visual detection is usually used between the heat treatment and the ultrasonic cleaning machine. Visual detection can qualitatively or even quantitatively evaluate the distribution and types of pollutants, providing a basis for parameter setting of the ultrasonic cleaning machine, ensuring cleaning specificity, and improving the cleanliness of the cleaned substrate. The conveying device between the heat treated semiconductor substrate and the ultrasonic cleaning machine needs to consider high temperature cooling and cleanliness maintenance, and a high temperature chain plate conveyor is used.

[0003] Semiconductor substrate manufacturing has some requirements for environmental cleanliness. During the conveying process, the cleanliness of the chain plate conveyor itself directly affects the quality of the semiconductor substrate after heat treatment. The gaps and grooves on the surface of the chain plate conveyor are easy to accumulate impurities and dust. The existing chain plate conveyor is not convenient for automatic cleaning of the chain plate, which requires manual cleaning time to determine the cleanliness of the chain plate conveyor, which is a waste of manpower, and the cleaning is not convenient, affecting the effect of ultrasonic cleaning and the yield of the substrate.

[0004] Therefore, the present application provides a visual detection semiconductor substrate production conveying device. SUMMARY

[0005] To solve the problem of the existing chain plate conveyor which is not convenient for automatic cleaning of the chain plate, resulting in the need for manual cleaning time to determine the cleanliness of the chain plate conveyor, the present application provides a visual detection semiconductor substrate production conveying device, which includes a main body mechanism, the main body mechanism includes a rack, the outer surface of the rack is drivingly connected with a conveying chain plate, two protective plates are fixedly installed on the inner wall of the rack, and a chain plate cleaning mechanism is arranged above the rack.

[0006] Since the conveying chain plate has an outer ring and an inner ring, and has a certain length, in order to move and clean on the conveying chain plate, the present application adopts a cleaning wastewater recycling unit for mobile cleaning.

[0007] The chain plate cleaning mechanism comprises a chain plate cleaning unit, and further comprises a cleaning wastewater recovery unit, the chain plate cleaning unit comprises a support frame, the back surface of the support frame is fixedly connected with the front surface of the rack, the left side surface of the support frame is fixedly installed with a driving motor, the output end of the driving motor is fixedly installed with a lead screw, the outer surface of the lead screw is rotationally connected with the inner wall of the support frame, the outer surface of the lead screw is threadedly connected with a matched nut, the outer surface of the matched nut is fixedly installed with a moving block, the outer surface of the moving block is in contact with the inner wall of the support frame, and the upper surface and the bottom surface of the moving block are fixedly installed with installation housings.

[0008] On this basis, after moving on the conveying chain plate, in order to comprehensively clean the inner and outer rings of the conveying chain plate;

[0009] As a further improvement of the technical solution, the front surface of the moving block is fixedly installed with a small water pump, the input pipe of the small water pump is fixedly communicated with a water inlet hose, the output pipe of the small water pump is fixedly communicated with an L-shaped pipe, the L-shaped pipe is fixedly installed in the inner wall of the installation housing, a plurality of same recovery pipes are fixedly communicated in the inner part of the L-shaped pipe, the inner part of each recovery pipe is slidably communicated with an expansion pipe, the inner part of each expansion pipe is fixedly communicated with a double-head nozzle, the right side surface of each installation housing is fixedly installed with an electric push rod, the expansion end of each electric push rod is fixedly installed with a connecting plate, the inner wall of each connecting plate is fixedly connected with the outer surface of the expansion pipe, the inner part of the L-shaped pipe is fixedly communicated with a bend pipe, the inner part of the bend pipe is fixedly communicated with an L-shaped pipe, the inner wall of the L-shaped pipe is rotationally connected with a rotating pipe, a plurality of same single-head nozzles are fixedly communicated in the inner part of the rotating pipe, and a double-shaft independent motor is fixedly installed at the rear end of the rotating pipe.

[0010] Due to the existence of gaps and grooves on the surface of the conveying chain plate, in order to deeply and comprehensively clean the gaps and grooves of the conveying chain plate;

[0011] As a further improvement of the technical solution, the lower part of the rotating pipe is provided with two cleaning rollers, and the conveying chain plate is located between the cleaning rollers, one end of each cleaning roller is fixedly installed with a connecting shaft, the outer surface of one of the connecting shafts and the output end of the double-shaft independent motor are fixedly installed with a single-groove pulley, the outer surface of the other connecting shaft is fixedly installed with a double-groove pulley, the outer surface of each single-groove pulley is transmissionally connected with a synchronous belt, the inner ring of each synchronous belt is transmissionally connected with the outer surface of the double-groove pulley, and the outer surfaces of the two connecting shafts are commonly rotationally connected with a shaft seat sliding plate, the back surface of the rack is provided with a moving opening, and the outer surface of the shaft seat sliding plate is slidably connected with the inner part of the moving opening.

[0012] Since the rotating pipe needs a supporting component, in order to support the stable rotation of the rotating pipe and the L-shaped pipe;

[0013] As a further improvement of the present technical solution, a fixing plate is clamped on the outer surface of the L-shaped tube, and the outer surface of the rotating tube is rotatably connected to the inner wall of the fixing plate.

[0014] On this basis, the rotating tube needs to rotate inside the L-shaped tube to reduce the possibility of leakage when the rotating tube and the L-shaped tube are matched;

[0015] As a further improvement of the technical solution, a sealing swivel is fixedly mounted on the outer surface of the rotating tube, and the outer surface of the sealing swivel is rotatably connected to the inner wall of the L-shaped tube.

[0016] After the conveyor chain is cleaned with water, the surface of the conveyor chain is relatively moist and easily absorbs dust, etc., so the surface of the conveyor chain is kept dry;

[0017] As a further improvement of the present technical solution, a sealing cover is fixedly mounted on the upper surface of the frame, and a plurality of identical drying fans are fixedly mounted on the inner top wall of the sealing cover.

[0018] In another solution, since it is necessary to provide cleaning liquid for the chain plate cleaning unit, the waste liquid after cleaning also needs to be recycled and reused. In order to provide cleaning liquid and recycle waste liquid;

[0019] As a further improvement of the present technical solution, the cleaning wastewater recovery unit includes a liquid container, the bottom surface of the liquid container is fixedly connected to the inner wall of the frame, the interior of the liquid container is fixedly connected to a drain pipe, the interior of the drain pipe is fixedly connected to the interior of the water inlet hose, the inner wall of the liquid container is fixedly installed with an inclined guide plate, the interior of the liquid container is slidably connected to a mobile container, the interior of the mobile container is connected to the interior of the drain pipe, the inner wall of the mobile container is fixedly installed with a water inlet filter, the inner wall of the mobile container is fixedly installed with a filter membrane, and the inner wall of the liquid container is rotatably connected to two closed side covers.

[0020] In order to close the side cover and the sealing cover to form a closed state, the conveyor chain plate can be cleaned in a sealed space;

[0021] As a further improvement of the present technical solution, a magnet plate is fixedly mounted on the upper surface of each of the closed side covers, and two adsorption iron plates are fixedly mounted on the bottom surface of the sealing cover.

[0022] On this basis, since it is necessary to seal the sealing cover and liquid container to prevent dust from entering the sealed space;

[0023] As a further improvement of the present technical solution, two telescopic shields are fixedly installed on the inner wall of the sealing cover, the inner wall of the movable port and the inner wall of the liquid container, and the outer surface of each mounting shell and the outer surface of the bent pipe are fixedly connected to the inner wall of the telescopic shield.

[0024] Compared with the prior art, the present application has the following advantages:

[0025] 1. In the conveying device for visual detection of semiconductor substrate production, the chain plate cleaning unit can clean the inner and outer rings of the conveying chain plate. The double-head spray head can be extended and retracted to adjust the distance from the conveying chain plate, and the single-head spray head can be rotated by a double-shaft independent motor. On this basis, both the single-head spray head and the double-head spray head can move left and right to clean the inner and outer rings of the conveying chain plate comprehensively. Further, the spraying liquid cooperates with the cleaning roller to achieve deep cleaning of the gaps and grooves of the conveying chain plate, saving cleaning time and labor.

[0026] 2. In the conveying device for visual detection of semiconductor substrate production, the cleaning wastewater recovery unit can provide liquid for the chain plate cleaning unit and recover wastewater. The wastewater is collected by the movable container at the bottom of the conveying chain plate, and the impurities in the wastewater are filtered by the filter membrane and the water inlet filter screen, etc. to provide clean water for the chain plate cleaning unit and ensure the cleaning effect of the chain plate cleaning unit on the conveying chain plate. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall structure of the present application;

[0028] Figure 2 It is a split schematic diagram of the rack of the present application;

[0029] Figure 3 It is a schematic diagram of the structure of the mounting shell of the present application;

[0030] Figure 4 It is a schematic diagram of the structure of the L-shaped pipe of the present application;

[0031] Figure 5 It is a schematic diagram of the structure of the moving port of the present application;

[0032] Figure 6 It is a schematic diagram of the structure of the cleaning roller of the present application;

[0033] Figure 7 It is a schematic diagram of the structure of the connecting plate of the present application;

[0034] Figure 8 It is a schematic diagram of the structure of the rotating pipe of the present application;

[0035] Figure 9 It is a sectional view of the shaft seat sliding plate of the present application;

[0036] Figure 10 It is a sectional view of the liquid container and the inclined guide plate of the present application;

[0037] Figure 11 The figure is a flip schematic diagram of the sealing cover of the present application.

[0038] The meanings of the various reference numerals in the figures are as follows:

[0039] 1, main mechanism; 11, rack; 12, conveying chain plate; 13, guard plate; 2, chain plate cleaning mechanism;

[0040] 21, chain plate cleaning unit; 2101, support frame; 2102, lead screw; 2103, drive motor; 2104, moving block; 2105, water inlet hose; 2106, mounting shell; 2107, L-shaped pipe; 2108, elbow; 2109, matching nut; 2110, small water pump; 2111, moving port; 2112, shaft seat sliding plate; 2113, double-shaft independent motor; 2114, connecting shaft; 2115, cleaning roller; 2116, rotating pipe; 2117, L-shaped pipe; 2118, fixing plate; 2119, electric push rod; 2120, connecting plate; 2121, telescopic pipe; 2122, recovery pipe; 2123, double-head spray head; 2124, single-head spray head; 2125, sealing rotary ring; 2126, synchronous belt; 2127, double-groove pulley; 2128, single-groove pulley; 2129, sealing cover; 2130, drying fan;

[0041] 22, cleaning wastewater recovery unit; 2201, liquid container; 2202, liquid discharge pipe; 2203, magnet plate; 2204, closed side cover; 2205, moving container; 2206, water inlet filter screen; 2207, filter membrane; 2208, inclined guide plate; 2209, adsorbing iron plate; 2210, telescopic cover. DETAILED DESCRIPTION

[0042] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0043] The existing chain plate conveyor is inconvenient for automatic cleaning of the chain plate, so that the cleaning degree of the chain plate conveyor needs to be determined according to the manual cleaning time for cleaning of magazines or dust, which is relatively wasteful in manpower and inconvenient for cleaning.

[0044] Therefore, the present application provides a visual detection semiconductor substrate production conveying device, as shown in Figure 1 which comprises a main mechanism 1, the main mechanism 1 comprises a rack 11, the outer surface of the rack 11 is drivingly connected with a conveying chain plate 12, the inner wall of the rack 11 is fixedly installed with two guard plates 13, and the upper portion of the rack 11 is provided with a chain plate cleaning mechanism 2.

[0045] Specific chain plate cleaning unit 21, see Figures 1-5 As shown, for full cleaning conveying chain plate 12, in the conveying chain plate 12 stationary state, need to be able to move cleaning, meet the length of conveying chain plate 12, first to have the function of movement, chain plate cleaning mechanism 2 includes chain plate cleaning unit 21, chain plate cleaning mechanism 2 also includes cleaning waste water recycling unit 22, chain plate cleaning unit 21 includes support frame 2101, the back of support frame 2101 and the front of rack 11 is fixedly connected, the left side of support frame 2101 is fixedly installed with drive motor 2103, the output end of drive motor 2103 is fixedly installed with lead screw 2102, the outer surface of lead screw 2102 is rotatably connected with the inner wall of support frame 2101, the outer surface of lead screw 2102 is threadedly connected with the matched nut 2109, the outer surface of matched nut 2109 is fixedly installed with moving block 2104, the outer surface of moving block 2104 is in contact with the inner wall of support frame 2101, the upper surface and bottom surface of moving block 2104 are fixedly installed with installation shell 2106.

[0046] When working, start drive motor 2103, drive motor 2103 drives lead screw 2102 to rotate, lead screw 2102 drives matched nut 2109 to move linearly, and then drives moving block 2104 to move, and moving block 2104 moves left and right to change the cleaning position on the surface of conveying chain plate 12.

[0047] Further, see Figures 6-9As shown, on the basis of being able to change the cleaning position, the inner and outer rings of the conveying chain plate 12 need to be cleaned comprehensively to ensure the cleanliness of the conveying chain plate 12, the front surface of the moving block 2104 is fixedly installed with a small water pump 2110, the input pipe of the small water pump 2110 is fixedly communicated with a water inlet hose 2105, the output pipe of the small water pump 2110 is fixedly communicated with a return bend 2107, the return bend 2107 is fixedly installed on the inner wall of a mounting shell 2106, the inside of the return bend 2107 is fixedly communicated with a plurality of same recovery pipes 2122, the inside of each recovery pipe 2122 is slidingly communicated with an extension pipe 2121, the inside of each extension pipe 2121 is fixedly communicated with a double-head spray head 2123, the right side surface of each mounting shell 2106 is fixedly installed with an electric push rod 2119, the extension end of each electric push rod 2119 is fixedly installed with a connecting plate 2120, the inner wall of each connecting plate 2120 is fixedly connected with the outer surface of the extension pipe 2121, the inside of the return bend 2107 is fixedly communicated with a bend pipe 2108, the inside of the bend pipe 2108 is fixedly communicated with an L-shaped pipe 2117, the inner wall of the L-shaped pipe 2117 is rotatably connected with a rotating pipe 2116, the inside of the rotating pipe 2116 is fixedly communicated with a plurality of same single-head spray heads 2124, the rear end of the rotating pipe 2116 is fixedly installed with a double-shaft independent motor 2113.

[0048] When working, the small water pump 2110 is started to pump the cleaning liquid into the return bend 2107, the liquid in the return bend 2107 is first supplied to the recovery pipe 2122, and then input into the extension pipe 2121 through the recovery pipe 2122, and sprayed out through the double-head spray head 2123, the double-head spray head 2123 is located at the outer ring of the conveying chain plate 12, and the double-head spray head 2123 cleans the conveying chain plate 12 from above and below, when the distance between the double-head spray head 2123 and the conveying chain plate 12 is large, the electric push rod 2119 can be started to drive the extension pipe 2121 through the connecting plate 2120, the extension pipe 2121 is recovered into the recovery pipe 2122 or extended out of the recovery pipe 2122, the cleaning distance is adjusted, as the liquid flows in the return bend 2107, the liquid enters the L-shaped pipe 2117 through the bend pipe 2108, enters the rotating pipe 2116 through the L-shaped pipe 2117, and is finally sprayed out through the single-head spray head 2124, the liquid sprayed out by the single-head spray head 2124 cleans the inner ring of the conveying chain plate 12, in order to facilitate cleaning the upper and lower sides of the curved part or the inner ring of the conveying chain plate 12, the double-shaft independent motor 2113 can be started to drive the rotating pipe 2116 to rotate and drive the single-head spray head 2124 to clean the conveying chain plate 12 in a rotating manner.

[0049] Further, referring to Figure 6 , Figure 9 and Figure 11As shown, in the process of cleaning the conveying chain plate 12, in order to clean the gap or groove of the conveying chain plate 12, the lower part of the rotating pipe 2116 is provided with two cleaning rollers 2115, and the conveying chain plate 12 is located between the cleaning rollers 2115, one end of each cleaning roller 2115 is fixedly installed with a connecting shaft 2114, the outer surface of one of the connecting shafts 2114 and the output end of the double-shaft independent motor 2113 are fixedly installed with a single-groove pulley 2128, and the outer surface of the other connecting shaft 2114 is fixedly installed with a double-groove pulley 2127, the outer surface of each single-groove pulley 2128 is drivingly connected with a synchronous belt 2126, the inner ring of each synchronous belt 2126 is drivingly connected with the outer surface of the double-groove pulley 2127, and the outer surfaces of the two connecting shafts 2114 are commonly rotatably connected with an axle seat sliding plate 2112. The back surface of the rack 11 is provided with a moving opening 2111, and the outer surface of the axle seat sliding plate 2112 is slidingly connected with the inside of the moving opening 2111.

[0050] When working, the double-shaft independent motor 2113 is started, the other shaft is synchronously driven through the single-groove pulley 2128, the double-groove pulley 2127 and the synchronous belt 2126, the connecting shaft 2114 is driven to rotate, the cleaning roller 2115 is driven to rotate by the connecting shaft 2114, and the gap and the groove of the conveying chain plate 12 are cleaned by the cleaning roller 2115 cooperating with the cleaning liquid.

[0051] The outer surface of the L-shaped pipe 2117 is clamped with a fixed plate 2118, and the outer surface of the rotating pipe 2116 is rotatably connected with the inner wall of the fixed plate 2118. By the fixed plate 2118, the stability of the L-shaped pipe 2117 is ensured, and the stable rotation of the rotating pipe 2116 is supported. The L-shaped pipe 2117 and the rotating pipe 2116 are supported.

[0052] The outer surface of the rotating pipe 2116 is fixedly installed with a sealing rotary ring 2125, and the outer surface of the sealing rotary ring 2125 is rotatably connected with the inner wall of the L-shaped pipe 2117. By the sealing rotary ring 2125, the rotating pipe 2116 and the L-shaped pipe 2117 are used to convey liquid. In order to avoid leakage at the connection, the sealing rotary ring 2125 plays a role in sealing the connection, and can support the rotating pipe 2116 to rotate.

[0053] The upper surface of the rack 11 is fixedly installed with a sealing cover 2129, and the inner top wall of the sealing cover 2129 is fixedly installed with a plurality of same drying fans 2130. By the sealing cover 2129 and the drying fans 2130, the sealing cover 2129 seals the conveying chain plate 12, reduces the possibility of dust entering the conveying chain plate 12, and dries the conveying chain plate 12 by the drying fans 2130 after the conveying chain plate 12 is cleaned by liquid, which can prevent dust from adhering to the conveying chain plate 12 to a certain extent.

[0054] In addition, the specific cleaning waste water recovery unit 22 is shown in the followingFigures 10-11 As shown, in order to provide cleaning liquid for the chain cleaning unit 21, and prevent the splashing of waste water or debris from being randomly discharged after cleaning the conveying chain plate 12, the cleaning waste water recovery unit 22 comprises a liquid container 2201, the bottom surface of the liquid container 2201 is fixedly connected with the inner wall of the rack 11, a liquid discharge pipe 2202 is fixedly communicated in the liquid container 2201, the inside of the liquid discharge pipe 2202 is fixedly communicated with the inside of the water inlet hose 2105, an inclined guide plate 2208 is fixedly installed on the inner wall of the liquid container 2201, a movable container 2205 is slidingly connected in the liquid container 2201, the inside of the movable container 2205 is communicated with the inside of the liquid discharge pipe 2202, a water inlet filter screen 2206 is fixedly installed on the inner wall of the movable container 2205, a filter membrane 2207 is fixedly installed on the inner wall of the movable container 2205, and two closed side covers 2204 are rotatably connected with the inner wall of the liquid container 2201.

[0055] In operation, the waste water after cleaning will flow downward through the conveying chain plate 12, first discharged on the inclined guide plate 2208, the inclined guide plate 2208 guides the waste water into the movable container 2205, as the waste water accumulates, the waste water will first pass through the filter membrane 2207 for filtration, the filter membrane 2207 can adopt a membrane material with high corrosion resistance, high precision filtration and anti-pollution ability, the waste water filtered through the filter membrane 2207 will finally pass through the water inlet filter screen 2206 for further filtration of the debris in the waste water, and the relatively clean water will be input to the other side of the water inlet filter screen 2206, and provided to the chain cleaning unit 21 through the liquid discharge pipe 2202, when it is necessary to replace or clean the filter membrane 2207 and the water inlet filter screen 2206, the movable container 2205 can be directly extracted from the liquid container 2201, and during the cleaning process of the conveying chain plate 12, the closed side cover 2204 can be rotated to form a sealed space with the sealing cover 2129, further preventing dust from entering.

[0056] Each of the upper surfaces of the closed side covers 2204 is fixedly installed with a magnet plate 2203, and the bottom surface of the sealing cover 2129 is fixedly installed with two adsorption iron plates 2209, the closed side cover 2204 can be fixed on the sealing cover 2129 through the cooperation of the magnet plate 2203 and the adsorption iron plate 2209;

[0057] The inner wall of the sealing cover 2129, the inner wall of the moving port 2111 and the inner wall of the liquid container 2201 are fixedly installed with two telescopic covers 2210, the outer surface of each installation shell 2106 and the outer surface of the elbow pipe 2108 are fixedly connected with the inner wall of the telescopic cover 2210, through the telescopic cover 2210, the sealing cover 2129 and the moving port 2111 and other parts, due to the existence of the transmission space, the sealing cover 2129 part and the moving port 2111 exist exposed parts, the telescopic cover 2210 can seal it, and can be telescopic with the moving device, ensure the normal movement of the moving device at the sealing cover 2129 and the moving port 2111 and other places.

[0058] To sum up, the chain plate cleaning unit 21 and the cleaning waste water recycling unit 22 cooperate to comprehensively clean the conveying chain plate 12, which is convenient, and effectively solves the problem that the existing chain plate conveyor is not convenient for automatic cleaning of the chain plate, and the cleaning degree of the chain plate conveyor needs to be determined according to the manual cleaning time.

[0059] Working principle: when conveying semiconductor substrates, the semiconductor substrates enter the conveying chain plate 12 after heat treatment and visual inspection, and are conveyed to the ultrasonic cleaning part by the conveying chain plate 12. Due to the working environment and the heat treatment of the semiconductor substrates, debris or dust will accumulate on the conveying chain plate 12. To maintain the cleanliness of the conveying chain plate 12, a small water pump 2110 can be started. The small water pump 2110 pumps out liquid and supplies it to the L-shaped pipe 2107. The outer circle of the conveying chain plate 12 is further cleaned by the double-head spray head 2123, and the inner circle of the conveying chain plate 12 is cleaned by the single-head spray head 2124. The single-head spray head 2124 can rotate during use. During the cleaning process of the single-head spray head 2124 and the double-head spray head 2123, the rotating cleaning roller 2115 is used to clean the grooves of the conveying chain plate 12. The waste liquid generated during cleaning is collected in the movable container 2205, and the relatively clean water is stored in the movable container 2205 after being filtered by the filter membrane 2207. The liquid is further used to clean the conveying chain plate 12.

[0060] It should be noted that in this document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0061] While embodiments of the application have been shown and described, it is to be understood that the application is not limited to the details of the embodiments described, since numerous changes, modifications, substitutions and variations can be made thereto without departing from the spirit and scope of the application as defined by the appended claims and their equivalents.

Claims

1. A conveying device for semiconductor substrate production with visual inspection, comprising a main body mechanism (1), characterized in that: The main body mechanism (1) comprises a frame (11), the outer surface of the frame (11) is connected to a conveying chain plate (12) in a transmission manner, two protective plates (13) are fixedly mounted on the inner wall of the frame (11), and a chain plate cleaning mechanism (2) is provided above the frame (11); The chain plate cleaning mechanism (2) comprises a chain plate cleaning unit (21), the chain plate cleaning mechanism (2) further comprises a cleaning wastewater recovery unit (22), the chain plate cleaning unit (21) comprises a support frame (2101), the back of the support frame (2101) is fixedly connected to the front of the frame (11), a driving motor (2103) is fixedly mounted on the left side of the support frame (2101), and a lead screw (2103) is fixedly mounted on the output end of the driving motor (2103). 2) The outer surface of the lead screw (2102) is rotatably connected to the inner wall of the support frame (2101), the outer surface of the lead screw (2102) is threadedly connected to a matching nut (2109), the outer surface of the matching nut (2109) is fixedly mounted with a moving block (2104), the outer surface of the moving block (2104) is in contact with the inner wall of the support frame (2101), and the upper surface and bottom surface of the moving block (2104) are fixedly mounted with a mounting housing (2106); A small water pump (2110) is fixedly installed on the front of the moving block (2104); the input pipe of the small water pump (2110) is fixedly connected to a water inlet hose (2105); the output pipe of the small water pump (2110) is fixedly connected to a circular pipe (2107); the circular pipe (2107) is fixedly installed on the inner wall of the mounting shell (2106); the interior of the circular pipe (2107) is fixedly connected to a plurality of identical recovery pipes (2122); the interior of each recovery pipe (2122) is slidably connected to a telescopic pipe (2121); the interior of each telescopic pipe (2121) is fixedly connected to a double-headed nozzle (2123).

2. The semiconductor substrate production conveying device for visual inspection according to claim 1, characterized in that: An electric push rod (2119) is fixedly installed on the right side of each mounting shell (2106), a connecting plate (2120) is fixedly installed on the telescopic end of each electric push rod (2119), the inner wall of each connecting plate (2120) is fixedly connected to the outer surface of the telescopic tube (2121), the interior of the circular tube (2107) is fixedly connected to a curved tube (2108), the interior of the curved tube (2108) is fixedly connected to an L-shaped tube (2117), the inner wall of the L-shaped tube (2117) is rotatably connected to a rotating tube (2116), the interior of the rotating tube (2116) is fixedly connected to a plurality of identical single-head nozzles (2124), and the rear end of the rotating tube (2116) is fixedly installed with a dual-axis independent motor (2113).

3. The semiconductor substrate production conveying device for visual inspection according to claim 2, characterized in that: Two cleaning rollers (2115) are provided below the rotating tube (2116), and the conveying chain plate (12) is located between the cleaning rollers (2115). A connecting shaft (2114) is fixedly installed at one end of each cleaning roller (2115), and a single-groove pulley (2128) is fixedly installed on the outer surface of one of the connecting shafts (2114) and the output end of the dual-axis independent motor (2113), and a double-groove pulley (2128) is fixedly installed on the outer surface of the other connecting shaft (2114). 27), the outer surface of each single-groove pulley (2128) is transmission-connected with a synchronous belt (2126), the inner ring of each synchronous belt (2126) is transmission-connected with the outer surface of the double-groove pulley (2127), the outer surfaces of the two connecting shafts (2114) are rotationally connected with an axle seat slide (2112), the back side of the frame (11) is provided with a movable opening (2111), and the outer surface of the axle seat slide (2112) is slidingly connected with the inside of the movable opening (2111).

4. The conveying device for semiconductor substrate production with visual inspection according to claim 2, wherein: The outer surface of the L-shaped tube (2117) is clamped with a fixed plate (2118), and the outer surface of the rotating tube (2116) is rotatably connected to the inner wall of the fixed plate (2118).

5. The conveying device for semiconductor substrate production with visual inspection according to claim 2, characterized in that: A sealing swivel (2125) is fixedly mounted on the outer surface of the rotating tube (2116), and the outer surface of the sealing swivel (2125) is rotatably connected to the inner wall of the L-shaped tube (2117).

6. The conveying device for semiconductor substrate production with visual inspection according to claim 5, characterized in that: A sealing cover (2129) is fixedly mounted on the upper surface of the frame (11), and a plurality of identical drying fans (2130) are fixedly mounted on the inner top wall of the sealing cover (2129).

7. The conveying device for semiconductor substrate production with visual inspection according to claim 6, characterized in that: The cleaning wastewater recovery unit (22) comprises a liquid container (2201), the bottom surface of the liquid container (2201) is fixedly connected to the inner wall of the frame (11), the interior of the liquid container (2201) is fixedly connected to a drainage pipe (2202), the interior of the drainage pipe (2202) is fixedly connected to the interior of the water inlet hose (2105), an inclined guide plate (2208) is fixedly installed on the inner wall of the liquid container (2201), the interior of the liquid container (2201) is slidably connected to a mobile container (2205), the interior of the mobile container (2205) is connected to the interior of the drainage pipe (2202), a water inlet filter (2206) is fixedly installed on the inner wall of the mobile container (2205), a filter membrane (2207) is fixedly installed on the inner wall of the mobile container (2205), and the inner wall of the liquid container (2201) is rotatably connected to two closed side covers (2204).

8. The conveying device for semiconductor substrate production with visual inspection according to claim 7, characterized in that: A magnet plate (2203) is fixedly mounted on the upper surface of each closed side cover (2204), and two adsorption iron plates (2209) are fixedly mounted on the bottom surface of the sealing cover (2129).

9. The conveying device for semiconductor substrate production with visual inspection according to claim 8, characterized in that: Two telescopic shields (2210) are fixedly mounted on the inner wall of the sealing cover (2129), the inner wall of the movable port (2111), and the inner wall of the liquid container (2201), and the outer surface of each mounting shell (2106) and the outer surface of the curved pipe (2108) are fixedly connected to the inner wall of the telescopic shield (2210).

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