Optical attenuation sheet and manufacturing method and manufacturing device thereof

Abstract

The invention relates to an optical attenuation sheet and a manufacturing method and device thereof, and the method comprises the steps: providing indium tin oxide conductive glass which comprises a glass substrate and an indium tin oxide thin film attached to the surface of the glass substrate; according to the method, the indium tin oxide conductive glass is subjected to electrochemical modification, so that the surface of the indium tin oxide thin film of the indium tin oxide conductive glass is reduced to form an indium thin film, and the indium tin oxide conductive glass subjected to electrochemical modification is the optical attenuation sheet, so that the method for manufacturing the optical attenuation sheet by adopting an electrochemical in-situ reduction strategy is provided. According to the method, the intrinsic conduction characteristic of the indium tin oxide substrate is utilized, a traditional vacuum magnetron sputtering coating process is simplified into liquid-phase electrochemical treatment, the operation process is simplified, the surface of the indium tin oxide film can be controllably converted into the metal indium micro-nano structure under the normal pressure condition, and therefore the manufacturing cost and energy consumption of the optical attenuation piece can be reduced, and the optical attenuation piece can be manufactured. And the manufacturing efficiency of the optical attenuation sheet can be improved.

Description

Technical Field

[0001] The present application relates to the field of optical manufacturing technology, and in particular to an optical attenuation sheet and a manufacturing method and a manufacturing device thereof. Background Art

[0002] Optical attenuators, also known as density filters, are optical components that utilize the material's absorption, reflection, or scattering of light, along with the filter's structural design, to uniformly and proportionally attenuate the intensity of light passing through their surface without altering the beam's shape. As a fundamental optical component with unique properties, they play a role in optical experiments similar to a resistor in a circuit, and are widely used in photography, optical measurement, laser processing, and fiber-optic communications. Advances in materials technology have led to the development of various types of optical attenuators to meet diverse application needs, including metal films, dielectric films, colored glass, crystals, filters, and other inorganic and organic materials. Metal films are one of the most commonly used materials for optical attenuators. By depositing a thin metal film on a transparent substrate, they absorb and reflect light, thereby attenuating light intensity. Compared to other materials, metal film attenuators offer excellent optical performance and stability, are suitable for harsh environments, and have a wide wavelength adjustment range. Furthermore, their relatively simple manufacturing process and low cost make them promising market prospects in practical applications.

[0003] The manufacturing of existing metal thin film optical attenuation films generally adopts methods such as physical or chemical vapor deposition, electron beam vacuum evaporation coating and magnetron sputtering coating. The metal target is heated or bombarded with high-energy particles to evaporate the metal atoms and sputter them onto the transparent base material. By adjusting parameters such as temperature, sputtering power, vacuum degree, and deposition time, the thickness of the metal film is controlled to achieve different light intensity attenuation.

[0004] However, the existing manufacturing method of metal thin film optical attenuation sheet has many disadvantages: on the one hand, the existing manufacturing method of metal thin film optical attenuation sheet requires expensive instruments and equipment to maintain a high temperature, high pressure and high vacuum environment, which is costly and energy-intensive; on the other hand, the existing manufacturing method of metal thin film optical attenuation sheet has a complex operation process involving multiple steps and the selection, adjustment and control of process parameters during actual manufacturing, resulting in long processing time and placing high demands on the user's technical level. Summary of the Invention

[0005] The purpose of the present application is to provide an optical attenuation sheet and a manufacturing method and a manufacturing device thereof, so as to solve the problems of high cost, high energy consumption and complicated operation process in the existing manufacturing method of metal thin film optical attenuation sheets.

[0006] An embodiment of the present application provides a method for manufacturing an optical attenuation sheet, which includes: providing indium tin oxide conductive glass, the indium tin oxide conductive glass including a glass substrate and an indium tin oxide thin film attached to the surface of the glass substrate; electrochemically modifying the indium tin oxide conductive glass so that the surface of the indium tin oxide thin film of the indium tin oxide conductive glass is reduced to form an indium thin film, and the indium tin oxide conductive glass after the electrochemical modification is the optical attenuation sheet.

[0007] The indium tin oxide conductive glass is electrochemically modified so that the surface of the indium tin oxide film of the indium tin oxide conductive glass is reduced to form an indium film, comprising: electrically connecting the indium tin oxide conductive glass and an auxiliary electrode to the negative electrode and the positive electrode of an external power supply, respectively, and immersing the indium tin oxide conductive glass and the auxiliary electrode in an alkaline electrolyte to form an electrochemical reaction cell; and electrochemically modifying the indium tin oxide conductive glass by turning on the external power supply so that the surface of the indium tin oxide film of the indium tin oxide conductive glass is reduced to form an indium film.

[0008] The electrochemical modification of the indium tin oxide conductive glass by turning on an external power supply includes: electrochemically modifying the indium tin oxide conductive glass at a current immersion depth by turning on the external power supply; detecting the transmittance of the indium tin oxide conductive glass during the electrochemical modification process at the current immersion depth to obtain a detection result of the current immersion depth; and determining that the electrochemical modification of the indium tin oxide conductive glass at the current immersion depth is completed when the detection result of the current immersion depth indicates that the transmittance of the indium tin oxide conductive glass during the electrochemical modification process at the current immersion depth meets a preset condition of the current immersion depth; adjusting the immersion depth of the indium tin oxide conductive glass after the electrochemical modification at the current immersion depth in the alkaline electrolyte to a next immersion depth, and returning to the step of performing the electrochemical modification of the indium tin oxide conductive glass at the current immersion depth by turning on the external power supply.

[0009] The manufacturing method of the optical attenuation sheet further includes: adjusting the voltage on the indium tin oxide conductive glass and the auxiliary electrode during the electrochemical modification process.

[0010] An embodiment of the present application further provides an optical attenuation sheet, which is manufactured using any of the above-mentioned methods for manufacturing an optical attenuation sheet.

[0011] An embodiment of the present application also provides a manufacturing device for an optical attenuation sheet, which includes: an electrochemical reaction cell, the electrochemical reaction cell including a reaction cell container, an alkaline electrolyte, an auxiliary electrode, indium tin oxide conductive glass and an external power supply, wherein the alkaline electrolyte is contained in the reaction cell container, the indium tin oxide conductive glass and the auxiliary electrode are electrically connected to the negative electrode and the positive electrode of the external power supply, respectively, and the indium tin oxide conductive glass and the auxiliary electrode are immersed in the alkaline electrolyte; a controller is used to electrochemically modify the indium tin oxide conductive glass by turning on the external power supply, so that the surface of the indium tin oxide film of the indium tin oxide conductive glass is reduced to form an indium film, and the indium tin oxide conductive glass after the electrochemical modification is completed is the optical attenuation sheet.

[0012] The manufacturing device of the optical attenuation sheet further includes a displacement stage for adjusting the immersion depth of the indium tin oxide conductive glass in the alkaline electrolyte.

[0013] Among them, the manufacturing device of the optical attenuation sheet also includes: a detection light path component, which is used to detect the transmittance of the indium tin oxide conductive glass during the electrochemical modification process and obtain a detection result; the controller is also used to: when the detection result transmitted by the detection light path component indicates that the transmittance of the indium tin oxide conductive glass during the electrochemical modification process meets a preset condition, determine that the electrochemical modification of the indium tin oxide conductive glass is completed.

[0014] The detection optical path component includes a laser light source, a beam splitting cube, a power meter and a CCD camera, wherein the laser light source is located on the first side of the indium tin oxide conductive glass during the electrochemical modification process, the beam splitting cube, the power meter and the CCD camera are located on the second side of the indium tin oxide conductive glass during the electrochemical modification process, and the second side of the indium tin oxide conductive glass during the electrochemical modification process is opposite to the first side of the indium tin oxide conductive glass during the electrochemical modification process; and the laser light emitted by the laser light source is attenuated by the indium tin oxide conductive glass during the electrochemical modification process and then divided into two paths through the beam splitting cube, one of which reaches the power meter and the other reaches the CCD camera.

[0015] The manufacturing device of the optical attenuation sheet further includes: a voltage control module for adjusting the voltage on the indium tin oxide conductive glass and the auxiliary electrode during the electrochemical modification process.

[0016] The optical attenuation sheet and its manufacturing method and manufacturing device provided in the present application are provided by providing indium tin oxide conductive glass, which includes a glass substrate and an indium tin oxide film attached to the surface of the glass substrate. The indium tin oxide conductive glass is then electrochemically modified so that the surface of the indium tin oxide film of the indium tin oxide conductive glass is reduced to form an indium film. The indium tin oxide conductive glass after the electrochemical modification is the optical attenuation sheet, thereby providing a method for manufacturing the optical attenuation sheet using an electrochemical in-situ reduction strategy. The method utilizes the intrinsic conductive properties of the indium tin oxide substrate to simplify the traditional vacuum magnetron sputtering coating process into a liquid-phase electrochemical treatment, simplifying the operating process and achieving controllable conversion of the indium tin oxide film surface into a metallic indium micro-nanostructure under normal pressure conditions, thereby reducing the manufacturing cost and energy consumption of the optical attenuation sheet and improving the manufacturing efficiency of the optical attenuation sheet. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The following detailed description of the specific embodiments of the present application in conjunction with the accompanying drawings will make the technical solutions and other beneficial effects of the present application apparent.

[0018] Figure 1 Schematic diagram of the structure of the manufacturing device of the optical attenuation sheet provided in the embodiment of the present application; Figure 2 This is a schematic diagram of the operation of electrochemically modifying indium tin oxide conductive glass provided in an embodiment of the present application; Figure 3 are optical images of Sample 1, Sample 2, and Sample 3 provided in the Examples of this application; Figure 4 1 is a transmittance curve diagram of Sample 1, Sample 2 and Sample 3 provided in the examples of the present application under the visible spectrum; Figure 5 : This is a graph of the incident Gaussian laser provided in the embodiment of the present application and its intensity after attenuation after passing through sample 1, sample 2, and sample 3 respectively; Figure 6 : is a cross-sectional diagram of the incident Gaussian laser and its light intensity after attenuation after passing through sample 1, sample 2, and sample 3, respectively, provided in an embodiment of the present application; Figure 7 Schematic diagram of the structure of the optical attenuation sheet provided in an embodiment of the present application; Figure 8 This is a schematic diagram of the operation of detecting the transmittance of indium tin oxide conductive glass during the electrochemical modification process provided by an embodiment of the present application; Figure 9 Schematic diagram of the manufacturing process of the optical attenuation sheet provided in the embodiment of the present application. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the embodiments described are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making creative efforts are within the scope of protection of this application.

[0020] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the said features. In the description of the present application, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0021] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections, electrical connections, or mutual communication; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to internal communication between two components or the interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0022] In this application, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0023] The disclosure below provides many different embodiments or examples for realizing different structures of the present application. In order to simplify the disclosure of the present application, the components and settings of specific examples are described below. Of course, they are merely examples and are not intended to limit the present application. In addition, the present application may repeat reference numbers and / or reference letters in different examples, and such repetition is for the purpose of simplicity and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present application provides examples of various specific processes and materials, but those of ordinary skill in the art will appreciate the application of other processes and / or the use of other materials.

[0024] The following is a detailed description with reference to specific embodiments. It should be noted that the serial numbers of the following embodiments are not intended to limit the preferred order of the embodiments.

[0025] See also Figure 1 , Figure 1 This is a schematic diagram of the structure of the manufacturing device of the optical attenuation sheet provided in the embodiment of the present application. Figure 1 As shown, the manufacturing device of the optical attenuation sheet includes an electrochemical reaction cell and a controller. Specifically, the electrochemical reaction cell includes a reaction cell container 10, an alkaline electrolyte 20, an auxiliary electrode 30, an indium tin oxide conductive glass 40, and an external power supply 50. The alkaline electrolyte 20 is contained in the reaction cell container 10, the indium tin oxide conductive glass 40 and the auxiliary electrode 30 are electrically connected to the negative electrode 52 and the positive electrode 51 of the external power supply 50, respectively, and the indium tin oxide conductive glass 40 and the auxiliary electrode 30 are immersed in the alkaline electrolyte 20. In addition, the controller is used to electrochemically modify the indium tin oxide conductive glass 40 by turning on the external power supply 50, so that the surface of the indium tin oxide film 42 of the indium tin oxide conductive glass 40 is reduced to form an indium film 43 (such as Figure 2 As shown in FIG), the indium tin oxide conductive glass 2 after electrochemical modification is the optical attenuation sheet 2 (as shown in FIG). Figure 2 shown).

[0026] The alkaline electrolyte 20 may be a potassium hydroxide solution, for example, a potassium hydroxide solution with a concentration of 10%, and the auxiliary electrode 30 may be a noble metal electrode, for example, a platinum electrode.

[0027] Specifically, the electrochemical reaction cell may further include an electrode clamp (not shown in the figure), which is used to clamp the auxiliary electrode 30 and immerse the auxiliary electrode 30 in the alkaline electrolyte 20 in the reaction cell container 10. For example, Figure 1 As shown, in the electrochemical reaction cell, the auxiliary electrode 30 can be completely immersed in the alkaline electrolyte 20 in the reaction cell container 10 .

[0028] In the electrochemical reaction cell, since the ITO conductive glass 40 and the auxiliary electrode 30 are connected to the negative and positive electrodes of the external power supply 50 as the cathode and anode, respectively, when the external power supply 50 is turned on, an electro-reduction reaction and an electro-oxidation reaction occur on the ITO conductive glass 40 and the auxiliary electrode 30, respectively, so that the surface of the ITO film 42 of the ITO conductive glass 40 is reduced to form an indium film 43.

[0029] Specifically, when the external power supply 50 is turned on, an oxidation reaction occurs on the surface of the auxiliary electrode 30 under positive bias, causing the OH in the solution to - It loses electrons and is oxidized to O2 (oxygen) and generates a large number of microbubbles on the surface of the auxiliary electrode 30. A reduction reaction occurs on the surface of the ITO (indium tin oxide) film 42 under the negative bias, causing its component In2O3 to be reduced to In (indium) and attached to the surface of the indium tin oxide conductive glass 40, forming a nanometer-thick metal film (i.e., indium film 43).

[0030] It should be noted that because the indium film 43 has strong light reflection and absorption properties, even a very thin indium film 43 can still significantly affect light intensity transmittance. Furthermore, in actual operation, the thickness of the formed indium film 43 can be accurately controlled by adjusting the electrochemical reaction time (i.e., the electrochemical modification time), thereby achieving controllable adjustment of the transmittance of the resulting ITO optical attenuation sheet.

[0031] In some examples, optical images (i.e., photographs) of the indium tin oxide conductive glass 40 that has not been electrochemically modified (i.e., sample 1), the indium tin oxide conductive glass 40 that has been electrochemically modified for 30 seconds (i.e., sample 2), and the indium tin oxide conductive glass 40 that has been electrochemically modified for 60 seconds (i.e., sample 3) can be shown as follows: Figure 3 As shown, and by Figure 3 It can be seen that the surface of the indium tin oxide conductive glass 40 that has not been electrochemically modified is a transparent indium tin oxide film. After 30 seconds of electrochemical modification, a dark metal indium nanofilm is formed on the surface of the indium tin oxide conductive glass 40, which reduces the optical transmittance. After 60 seconds of electrochemical modification, the thickness of the metal indium layer on the surface of the indium tin oxide conductive glass 40 increases, which further reduces the optical transmittance.

[0032] Specifically, the transmittance curves of the indium tin oxide conductive glass 40 that has not been electrochemically modified (i.e., sample 1), the indium tin oxide conductive glass 40 that has been electrochemically modified for 30 seconds (i.e., sample 2), and the indium tin oxide conductive glass 40 that has been electrochemically modified for 60 seconds (i.e., sample 3) under the visible spectrum can be shown as follows: Figure 4 As shown, and by Figure 4It can be seen that as the electrochemical reaction time increases, the transmittance of the ITO conductive glass 40 that has not been electrochemically modified, the ITO conductive glass 40 that has been electrochemically modified for 30 seconds, and the ITO conductive glass 40 that has been electrochemically modified for 60 seconds decreases.

[0033] In addition, by conducting an attenuation experiment based on Gaussian beam on the optical attenuation sheet 2 prepared in the embodiment of the present application, the quality of the incident Gaussian laser and the beam after attenuation after passing through samples 1 to 3 can be as follows: Figure 5 As shown, the incident Gaussian laser and its intensity cross section after attenuation after passing through sample 1, sample 2 and sample 3 can be obtained as Figure 6 As shown. And, by Figure 5 and Figure 6 It can be seen that the indium tin oxide conductive glass 40 after electrochemical modification can attenuate the incident Gaussian laser light intensity without changing the shape of the Gaussian beam, which further indicates that the optical attenuation plate 2 prepared in the embodiment of the present application has a low optical element roughness, can effectively attenuate the power of the incident light beam without changing the shape of the incident light beam, and has a low optical surface roughness.

[0034] In this embodiment, if Figure 2 As shown, an ITO conductive glass 40 (i.e., an ITO conductive glass 40 that has not undergone electrochemical modification) may include a glass substrate 41 and an ITO film 42 attached to the surface of the glass substrate 41. An ITO conductive glass 2 that has undergone electrochemical modification (i.e., an optical attenuation sheet 2) may include a glass substrate 41, an ITO film 42' attached to the surface of the glass substrate 41, and an indium film 43 attached to the surface of the ITO film 42'. It should be understood that the indium film 43 included in the optical attenuation sheet 2 is formed by reducing the surface of the ITO film 42 of the ITO conductive glass 40. The ITO film 42 included in the optical attenuation sheet 2 is the unreduced ITO film 42' remaining in the ITO conductive glass 40. The glass substrate 41 included in the optical attenuation sheet 2 is the glass substrate 41 of the ITO conductive glass 40.

[0035] Specifically, the glass substrate 41 may be a silicon dioxide (SiO2) glass substrate, the indium tin oxide thin film 42 of the indium tin oxide conductive glass 40 may be formed on the surface of the glass substrate 41 by a thin film deposition process, and the thickness of the indium thin film 43 included in the optical attenuation sheet 2 may be nanometer-level.

[0036] In some embodiments, as Figure 1As shown, the immersion depth of the ITO conductive glass 40 in the alkaline electrolyte 20 can be adjustable. Thus, by adjusting the immersion depth of the ITO conductive glass 40 in the alkaline electrolyte 20, the area of ​​the ITO conductive glass 40 immersed in the alkaline electrolyte 20 can be adjusted, and the processing time of each area of ​​the ITO conductive glass 40 during the electrochemical modification process (i.e., the electrochemical modification time) can also be adjusted. For example, during the electrochemical modification process of the ITO conductive glass 40, by gradually increasing the immersion depth of the ITO conductive glass 40 in the alkaline electrolyte 20, the ITO conductive glass 40 can be moved from bottom to top (i.e., from top to bottom). Figure 7 The processing time of the multiple regions distributed in sequence (in the Z direction) is gradually reduced, so that after the electrochemical modification of the indium tin oxide conductive glass 40 is completed, an optical attenuation sheet 2 (such as the first region C1, the second region C2 and the third region C3) with multiple regions with different transmittances can be obtained. Figure 7 As shown), the transmittance of the first region C1 is lower than that of the second region C2, and the transmittance of the second region C2 is lower than that of the third region C3.

[0037] And, as Figure 1 As shown, in order to adjust the immersion depth of the ITO conductive glass 40 in the alkaline electrolyte 20, the manufacturing device of the optical attenuation sheet may further include a displacement stage 60, which is used to adjust the immersion depth of the ITO conductive glass 40 in the alkaline electrolyte 20. Specifically, Figure 1 As shown, the translation stage 60 can hold the ITO conductive glass 40 and drive the ITO conductive glass 40 to move vertically. For example, the translation stage 60 can be a Z-axis translation stage that can move vertically, thereby driving the ITO conductive glass 40 to move vertically, thereby adjusting the immersion depth of the ITO conductive glass 40 in the alkaline electrolyte 20.

[0038] In some examples, the translation stage 60 can be connected to the controller, and the controller can control the translation stage 60 to move the ITO conductive glass 40 vertically. Furthermore, in a specific implementation, the controller can coordinately control the vertical movement of the translation stage 60 and the voltage level and on / off state of the external power supply 50 under the control of a computer.

[0039] In some embodiments, as Figure 1As shown, the voltage on the indium tin oxide conductive glass 40 and the auxiliary electrode 30 during the electrochemical modification process can be adjustable. Therefore, by adjusting the voltage on the indium tin oxide conductive glass 40 and the auxiliary electrode 30 during the electrochemical modification process, the electrochemical reaction rate can be controlled so that the surface of the indium tin oxide film 42 of the indium tin oxide conductive glass 40 is reduced to form a uniform and dense indium film 43, thereby ensuring that the indium tin oxide conductive glass 2 after the electrochemical modification has better conductivity and strength attenuation uniformity, while avoiding the generation of bubbles on the surface of the indium tin oxide film 42 due to electrolysis of water.

[0040] Furthermore, in order to achieve adjustable voltage on the indium tin oxide conductive glass 40 and the auxiliary electrode 30 during the electrochemical modification process, the manufacturing device of the above-mentioned optical attenuation sheet may further include a voltage control module, which is used to adjust the voltage on the indium tin oxide conductive glass 40 and the auxiliary electrode 30 during the electrochemical modification process.

[0041] Specifically, the voltage control module can automatically adjust the voltage applied by the external power supply 50 to the indium tin oxide conductive glass 40 and the auxiliary electrode 30 during the electrochemical modification process. For example, the voltage applied by the external power supply 50 to the indium tin oxide conductive glass 40 and the auxiliary electrode 30 during the electrochemical modification process can be adjusted to a first preset voltage and a second preset voltage, respectively. The first preset voltage and the second preset voltage can be specifically set according to actual needs, so as to control the electrochemical reaction rate on the indium tin oxide conductive glass 40 and the auxiliary electrode 30 during the electrochemical modification process within a desired range.

[0042] In some embodiments, the optical attenuation sheet manufacturing apparatus may further include a detection optical path assembly configured to detect the transmittance of the indium tin oxide conductive glass 40 during the electrochemical modification process and obtain a detection result. Furthermore, the controller may be configured to determine that the electrochemical modification of the indium tin oxide conductive glass 40 is complete when the detection result transmitted by the detection optical path assembly indicates that the transmittance of the indium tin oxide conductive glass 40 during the electrochemical modification process satisfies a preset condition. For example, detecting the transmittance of the indium tin oxide conductive glass 40 during the electrochemical modification process may specifically include testing the attenuation performance of the indium tin oxide conductive glass 40 during the electrochemical modification process.

[0043] Specifically, the detection optical path assembly can be communicatively connected to the controller. After detecting the transmittance of the indium tin oxide conductive glass 40 during the electrochemical modification process, the detection optical path assembly can transmit the detection results to the controller. Furthermore, based on the detection results transmitted by the detection optical path assembly, the controller can provide feedback and adjust the voltages across the indium tin oxide conductive glass 40 and the auxiliary electrode 30 during the electrochemical modification process, as well as the immersion depth of the indium tin oxide conductive glass 40 in the alkaline electrolyte 20 during the electrochemical modification process.

[0044] Moreover, in a specific implementation, the controller can be integrated into a computer, and the detection optical path component can measure the changes in the power and light field intensity distribution before and after the laser passes through the indium tin oxide conductive glass 40 during the electrochemical modification process, and upload the measurement results to the computer for analysis and calculation using an algorithm, and control the processing and manufacturing process based on the feedback of the calculation results.

[0045] In some specific embodiments, Figure 8 As shown, the above-mentioned detection optical path component may include a laser light source 101, a beam splitting cube 102, a power meter 103 and a CCD camera 104, wherein the laser light source 101 is located on a first side of the indium tin oxide conductive glass 40 during the electrochemical modification process, the beam splitting cube 102, the power meter 103 and the CCD camera 104 are located on a second side of the indium tin oxide conductive glass during the electrochemical modification process, and the second side of the indium tin oxide conductive glass during the electrochemical modification process is opposite to the first side of the indium tin oxide conductive glass during the electrochemical modification process. For example, they can be respectively Figure 4 The right and left sides of the indium tin oxide conductive glass 40 during the electrochemical modification process are shown. Furthermore, the laser light L0 emitted by the laser light source 101 is attenuated by the indium tin oxide conductive glass 40 during the electrochemical modification process and then split into two paths via the beam splitter cube 102. One path reaches the power meter 103, and the other reaches the CCD camera 104. The power meter 103 can measure the power of the attenuated laser light L11 reaching it and transmit the measurement results to a computer. The CCD camera 104 can measure the optical field intensity distribution of the attenuated laser light L12 reaching it and transmit the measurement results to a computer. Furthermore, the computer can use an algorithm to analyze and calculate the changes in the power and light field intensity distribution of the laser light L0 emitted by the laser light source 101 before and after it passes through the indium tin oxide conductive glass 40 during the electrochemical modification process, and feedback control the up and down movement of the above-mentioned translation stage 60 and the voltage applied to the indium tin oxide conductive glass 40 and the auxiliary electrode 30 during the above-mentioned electrochemical modification process based on the calculation results, thereby achieving feedback adjustment of the voltage on the indium tin oxide conductive glass 40 and the auxiliary electrode 30 during the above-mentioned electrochemical modification process and the immersion depth of the indium tin oxide conductive glass 40 in the alkaline electrolyte 20 during the above-mentioned electrochemical modification process based on the detection results.

[0046] As can be seen from the above, the manufacturing device for the optical attenuation sheet provided in this embodiment includes a chemical reaction cell and a controller, wherein the electrochemical reaction cell includes a reaction cell container, an alkaline electrolyte, an auxiliary electrode, indium tin oxide conductive glass, and an external power supply. The alkaline electrolyte is contained in the reaction cell container, the indium tin oxide conductive glass and the auxiliary electrode are electrically connected to the negative and positive electrodes of the external power supply, respectively, and the indium tin oxide conductive glass and the auxiliary electrode are immersed in the alkaline electrolyte. The controller is used to electrochemically modify the indium tin oxide conductive glass by turning on the external power supply, so that the surface of the indium tin oxide film of the indium tin oxide conductive glass is reduced to form an indium film. The indium tin oxide conductive glass after the electrochemical modification is the optical attenuation sheet, thereby providing a processing and manufacturing system for indium tin oxide conductive optical attenuation sheet based on electrochemical reaction surface modification. Because the optical attenuation sheet is manufactured based on the principle of electrochemical reaction, a nanometer-thick metal film can be processed on the surface of the transparent glass without the use of expensive vacuum coating equipment to achieve intensity attenuation of the incident light. The system has the advantages of low cost, high speed, simple operation, and suitability for large-scale manufacturing.

[0047] Please refer to Figure 9 , Figure 9 The process diagram of the manufacturing method of the optical attenuation sheet provided in the embodiment of the present application is shown. The manufacturing method of the optical attenuation sheet can be applied to the manufacturing device of the optical attenuation sheet described in any of the above embodiments (such as Figure 1 and Figure 8 As shown), the specific structure of the manufacturing device of the optical attenuation sheet has been described in detail in the above embodiment, so it will not be repeated here.

[0048] like Figure 9 As shown, the specific process of the manufacturing method of the optical attenuation sheet can be as follows: Step S11. Provide an indium tin oxide conductive glass 40, which includes a glass substrate 41 and an indium tin oxide thin film 42 attached to the surface of the glass substrate 41 (eg, Figure 2 shown).

[0049] Step S12. Electrochemically modify the indium tin oxide conductive glass 40 so that the surface of the indium tin oxide film 42 of the indium tin oxide conductive glass 40 is reduced to form an indium film 43. The indium tin oxide conductive glass 2 after the electrochemical modification is the optical attenuation sheet 2 (such as Figure 2 shown).

[0050] It should be noted that the electrochemical surface modification used in this embodiment to reduce the indium tin oxide (ITO) film to metallic indium effectively reduces reliance on expensive coating equipment. This allows the manufacture of variable-transmittance ITO glass without the need for high temperatures, high pressures, and high vacuum environments, resulting in low cost, high speed, simple operation, and suitability for large-scale manufacturing. Therefore, the optical attenuation sheet manufacturing method provided in this embodiment of the application can address the technical issues of existing metal film optical attenuation sheet manufacturing, such as high equipment costs, long processing times, complex process flows, and numerous operational steps and parameter controls.

[0051] Furthermore, in practice, by adjusting the electrochemical reaction time (i.e., the electrochemical modification time), the thickness of the formed indium film 43 can be controlled. This allows for flexible adjustment of the transmittance of the electrochemically modified indium tin oxide conductive glass 2, enabling the manufacture of a variable-transmittance ITO optical attenuation sheet. Specifically, a longer electrochemical modification time increases the thickness of the formed indium film 43, thereby reducing the transmittance of the electrochemically modified indium tin oxide conductive glass 2.

[0052] In some embodiments, the above step S12 may include: Step S121. The indium tin oxide conductive glass 40 and the auxiliary electrode 30 are electrically connected to the negative electrode 52 and the positive electrode 51 of the external power supply 50, and the indium tin oxide conductive glass 40 and the auxiliary electrode 30 are immersed in the alkaline electrolyte 20 to form an electrochemical reaction cell (such as Figure 1 shown).

[0053] Step S122. By turning on the external power supply 50, the indium tin oxide conductive glass 40 is electrochemically modified so that the surface of the indium tin oxide film 42 of the indium tin oxide conductive glass 40 is reduced to form an indium film 43. The indium tin oxide conductive glass 2 after the electrochemical modification is the optical attenuation sheet 2 (such as Figure 1 and Figure 2 shown).

[0054] The auxiliary electrode 30 may be a noble metal electrode, such as a platinum electrode. The alkaline electrolyte 20 may be a potassium hydroxide solution, such as a potassium hydroxide solution with a concentration of 10%.

[0055] It can be understood that in the electrochemical reaction cell, since the indium tin oxide conductive glass 40 and the auxiliary electrode 30 are connected to the negative electrode and the positive electrode of the external power supply 50 as the cathode and the anode, respectively, when the external power supply 50 is in the on state, an electro-reduction reaction and an electro-oxidation reaction will occur on the indium tin oxide conductive glass 40 and the auxiliary electrode 30, respectively, so that the surface of the indium tin oxide film 42 of the indium tin oxide conductive glass 40 is reduced to form an indium film 43.

[0056] Specifically, after forming the above-mentioned electrochemical reaction cell, the above-mentioned optical attenuation film manufacturing device can control the external power supply 50 to be turned on through the controller included therein, so that an electro-reduction reaction and an electro-oxidation reaction begin to occur on the indium tin oxide conductive glass 40 and the auxiliary electrode 30, respectively, thereby achieving electrochemical modification of the indium tin oxide conductive glass 40, so that the surface of the indium tin oxide film 42 of the indium tin oxide conductive glass 40 is reduced to form an indium film 43.

[0057] Specifically, if Figure 1 As shown, in the electrochemical reaction cell, the auxiliary electrode 30 can be completely immersed in the alkaline electrolyte 20, and the immersion depth of the ITO conductive glass 40 in the alkaline electrolyte 20 can be adjustable, for example, it can be controlled by a displacement stage 60 connected thereto.

[0058] Furthermore, in a specific implementation, the translation stage 60 can clamp the ITO conductive glass 40 and drive the ITO conductive glass 40 to move in the up and down directions. During the up and down movement of the ITO conductive glass 40, the area of ​​the ITO conductive glass 40 immersed in the alkaline electrolyte 20 and the processing time of each area thereof (i.e., the electrochemical modification time) will change.

[0059] In some embodiments, before step S12, the method for manufacturing the optical attenuation sheet may further include: cleaning the ITO conductive glass 40. The cleaning of the ITO conductive glass 40 may include: ultrasonic cleaning with a toluene solvent for 10 to 20 minutes to remove grease and dust from the surface of the ITO conductive glass 40; then, ultrasonic cleaning with an acetone solvent for 10 to 15 minutes to remove residual grease from the surface of the ITO conductive glass 40 and dissolve the toluene; then, ultrasonic cleaning with an ethanol solvent for 10 to 20 minutes to remove residual acetone from the surface of the ITO conductive glass 40; and finally, ultrasonic cleaning with deionized water for 20 to 30 minutes to remove residual ethanol from the surface of the ITO conductive glass 40, followed by drying with a nitrogen gun.

[0060] It can be understood that by first cleaning the indium tin oxide conductive glass 40 and then electrochemically modifying the cleaned indium tin oxide conductive glass 40, the surface of the indium tin oxide film 42 of the indium tin oxide conductive glass 40 is helped to be reduced to form a more uniform and denser indium film 43, thereby further improving the attenuation performance of the optical attenuation sheet.

[0061] In some embodiments, the method for manufacturing the optical attenuation sheet may further include: Step S13. Perform a transmittance test on the indium tin oxide conductive glass 40 during the electrochemical modification process to obtain a test result. When the test result indicates that the transmittance of the indium tin oxide conductive glass 40 during the electrochemical modification process meets a preset condition, it is determined that the electrochemical modification of the indium tin oxide conductive glass 40 is completed.

[0062] Specifically, when the detection result indicates that the transmittance of the ITO conductive glass 40 during the electrochemical modification process does not meet the preset condition, the above step S13 is repeated until the obtained detection result indicates that the transmittance of the ITO conductive glass during the electrochemical modification process meets the preset condition.

[0063] The transmittance detection of the indium tin oxide conductive glass during the electrochemical modification process may include: measuring the power and light field intensity distribution changes of the laser before and after passing through the indium tin oxide conductive glass during the electrochemical modification process.

[0064] In some specific embodiments, the manufacturing device of the optical attenuation sheet can detect the transmittance of the indium tin oxide conductive glass during the electrochemical modification process through the detection optical path component included therein. Specifically, Figure 8 As shown, the above-mentioned detection optical path component may include a laser light source 101, a beam splitting cube 102, a power meter 103 and a CCD camera 104, wherein the laser light source 101 is located on a first side of the indium tin oxide conductive glass 40 during the electrochemical modification process, the beam splitting cube 102, the power meter 103 and the CCD camera 104 are located on a second side of the indium tin oxide conductive glass during the electrochemical modification process, and the second side of the indium tin oxide conductive glass during the electrochemical modification process is opposite to the first side of the indium tin oxide conductive glass during the electrochemical modification process. For example, they can be respectively Figure 4 The right and left sides of the indium tin oxide conductive glass 40 during the electrochemical modification process are shown. Furthermore, the laser light L0 emitted by the laser light source 101 is attenuated by the indium tin oxide conductive glass 40 during the electrochemical modification process and then split into two paths via the beam splitter cube 102. One path reaches the power meter 103, and the other reaches the CCD camera 104. The power meter 103 can measure the power of the attenuated laser light L11 reaching it, and the CCD camera 104 can measure the light field intensity distribution of the attenuated laser light L12 reaching it.

[0065] In some embodiments, the electrochemical modification may include electrochemical modifications at multiple different immersion depths, and the electrochemical modification of the indium tin oxide conductive glass 40 may include: Step S1-1. By turning on an external power supply, the indium tin oxide conductive glass is electrochemically modified at a current immersion depth.

[0066] Step S1-2. Performing a transmittance test on the indium tin oxide conductive glass during the electrochemical modification process at the current immersion depth to obtain a test result of the current immersion depth, and determining that the electrochemical modification of the indium tin oxide conductive glass at the current immersion depth is completed when the test result of the current immersion depth indicates that the transmittance of the indium tin oxide conductive glass during the electrochemical modification process at the current immersion depth meets a preset condition of the current immersion depth.

[0067] Step S1-3. Adjust the immersion depth of the indium tin oxide conductive glass after the electrochemical modification at the current immersion depth in the alkaline electrolyte to the next immersion depth, and return to execute the above step S1-1.

[0068] Thus, after executing the above step S1-3, the above step S1-1 and the above step S1-2 can be returned to be executed in sequence to form a cycle, and each cycle can complete the electrochemical modification of one immersion depth of the ITO conductive glass 40. When the electrochemical modification of all immersion depths of the ITO conductive glass 40 is completed, the cycle ends, and an optical attenuation sheet 2 (such as the first region C1, the second region C2 and the third region C3) having multiple regions with different transmittances can be obtained. Figure 7 shown).

[0069] It should be noted that this embodiment achieves the fabrication of an optical attenuation sheet having a specific transmittance distribution by simultaneously adjusting the immersion depth of the ITO conductive glass 40 in the alkaline electrolyte 20 during the electrochemical modification process. Furthermore, this embodiment simultaneously monitors the transmittance of the ITO conductive glass 40 during the electrochemical modification process in real time. This allows for feedback adjustment of the ITO glass immersion depth based on the monitoring results, thereby ensuring that the transmittance of each region of the resulting optical attenuation sheet 2 meets the desired transmittance requirements.

[0070] In some embodiments, the method for manufacturing the optical attenuation sheet may further include: Step S14. Regulating the voltage on the ITO conductive glass 40 and the auxiliary electrode 30 during the electrochemical modification process (eg Figure 1 shown).

[0071] It should be noted that, in this embodiment, by simultaneously adjusting the voltages on the indium tin oxide conductive glass 40 and the auxiliary electrode 30 during the electrochemical modification process of the indium tin oxide conductive glass 40, the electrochemical reaction rate can be controlled, so that the surface of the indium tin oxide film 42 of the indium tin oxide conductive glass 40 is reduced to form a uniform and dense indium film 43, thereby ensuring that the indium tin oxide conductive glass 2 after the electrochemical modification has better conductivity and strength attenuation uniformity, and avoiding the generation of bubbles on the surface of the indium tin oxide film 42 due to electrolysis of water.

[0072] Specifically, if Figure 1 As shown, the aforementioned optical attenuation sheet manufacturing apparatus can adjust the voltages applied to the indium tin oxide conductive glass 40 and the auxiliary electrode 30 during the electrochemical modification process via the voltage control module included therein. Furthermore, in a specific implementation, the voltages applied to the indium tin oxide conductive glass 40 and the auxiliary electrode 30 by the external power supply 50 during the electrochemical modification process can be adjusted to a first preset voltage and a second preset voltage, respectively. The first preset voltage and the second preset voltage can be set based on actual needs, so long as the electrochemical reaction rates on the indium tin oxide conductive glass 40 and the auxiliary electrode 30 during the electrochemical modification process are controlled within a desired range.

[0073] As can be seen from the above, the manufacturing method of the optical attenuation sheet provided in this embodiment provides indium tin oxide conductive glass, which includes a glass substrate and an indium tin oxide thin film attached to the surface of the glass substrate, and then electrochemically modifies the indium tin oxide conductive glass so that the surface of the indium tin oxide thin film of the indium tin oxide conductive glass is reduced to form an indium thin film. The indium tin oxide conductive glass after the electrochemical modification is an optical attenuation sheet, thereby providing an indium tin oxide conductive optical attenuation sheet processing and manufacturing system based on electrochemical reaction surface modification. Since the optical attenuation sheet is manufactured based on the principle of electrochemical reaction, there is no need to use expensive vacuum coating equipment to process a nanometer-thick metal film on the surface of the transparent glass to achieve intensity attenuation of the incident light. It has the advantages of low cost, fast speed, simple operation, and suitability for large-scale manufacturing. Therefore, it can reduce the manufacturing cost and energy consumption of the optical attenuation sheet and improve the manufacturing efficiency of the optical attenuation sheet.

[0074] In order to better implement the manufacturing method of the optical attenuation sheet provided in the embodiment of the present application, the embodiment of the present application further provides an optical attenuation sheet, which is manufactured using the manufacturing method of the optical attenuation sheet provided in any of the above embodiments.

[0075] Specifically, if Figure 2 As shown, the optical attenuation sheet 2 is obtained by electrochemically modifying the indium tin oxide conductive glass 40 .

[0076] Furthermore, it should be noted that the optical attenuation sheet in the embodiment of the present application is manufactured by adopting the manufacturing method of the optical attenuation sheet provided by any of the above embodiments, and therefore has all the same beneficial effects, which will not be described in detail in this embodiment.

[0077] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0078] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements, and improvements made within the spirit and principles of the present application shall be included in the scope of protection of the present application. The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements, and improvements made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A method for manufacturing an optical attenuation sheet, characterized in that: include: Providing indium tin oxide conductive glass, the indium tin oxide conductive glass comprising a glass substrate and an indium tin oxide thin film attached to a surface of the glass substrate; The indium tin oxide conductive glass is electrochemically modified so that the surface of the indium tin oxide film of the indium tin oxide conductive glass is reduced to form an indium film. The indium tin oxide conductive glass after the electrochemical modification is an optical attenuation sheet.

2. The method for manufacturing an optical attenuation sheet according to claim 1, wherein: The electrochemically modifying the indium tin oxide conductive glass so that the surface of the indium tin oxide film of the indium tin oxide conductive glass is reduced to form an indium film comprises: The indium tin oxide conductive glass and the auxiliary electrode are electrically connected to the negative electrode and the positive electrode of an external power supply, respectively, and the indium tin oxide conductive glass and the auxiliary electrode are immersed in an alkaline electrolyte to form an electrochemical reaction cell; By turning on the external power supply, the indium tin oxide conductive glass is electrochemically modified so that the surface of the indium tin oxide film of the indium tin oxide conductive glass is reduced to form an indium film.

3. The method for manufacturing an optical attenuation sheet according to claim 2, wherein: The electrochemical modification of the indium tin oxide conductive glass by turning on the external power supply includes: By turning on the external power supply, electrochemically modifying the indium tin oxide conductive glass at a current immersion depth; performing transmittance detection on the indium tin oxide conductive glass during the electrochemical modification process at the current immersion depth to obtain a detection result of the current immersion depth, and determining that the electrochemical modification of the indium tin oxide conductive glass at the current immersion depth is completed when the detection result of the current immersion depth indicates that the transmittance of the indium tin oxide conductive glass during the electrochemical modification process at the current immersion depth meets a preset condition of the current immersion depth; The immersion depth of the indium tin oxide conductive glass in the alkaline electrolyte after the electrochemical modification at the current immersion depth is adjusted to the next immersion depth, and the step of electrochemically modifying the indium tin oxide conductive glass at the current immersion depth by turning on the external power supply is returned to be executed.

4. The method for manufacturing an optical attenuation sheet according to claim 2, wherein: The method for manufacturing the optical attenuation sheet further includes: The voltages on the indium tin oxide conductive glass and the auxiliary electrode are adjusted during the electrochemical modification process.

5. An optical attenuation sheet, characterized in that: The optical attenuation sheet is manufactured by the manufacturing method of any one of claims 1 to 4.

6. A manufacturing device for an optical attenuation sheet, characterized in that: include: An electrochemical reaction cell, comprising a reaction cell container, an alkaline electrolyte, an auxiliary electrode, an indium tin oxide conductive glass, and an external power supply, wherein the alkaline electrolyte is contained in the reaction cell container, the indium tin oxide conductive glass and the auxiliary electrode are electrically connected to the negative electrode and the positive electrode of the external power supply, respectively, and the indium tin oxide conductive glass and the auxiliary electrode are immersed in the alkaline electrolyte; The controller is used to electrochemically modify the indium tin oxide conductive glass by turning on the external power supply, so that the surface of the indium tin oxide film of the indium tin oxide conductive glass is reduced to form an indium film. The indium tin oxide conductive glass after the electrochemical modification is an optical attenuation sheet.

7. The manufacturing device of the optical attenuation sheet according to claim 6, characterized in that: The manufacturing device of the optical attenuation sheet further comprises: The displacement stage is used to adjust the immersion depth of the indium tin oxide conductive glass in the alkaline electrolyte.

8. The manufacturing device of the optical attenuation sheet according to claim 6, characterized in that: The manufacturing device of the optical attenuation sheet further comprises: A detection optical path component is used to detect the transmittance of the indium tin oxide conductive glass during the electrochemical modification process to obtain a detection result; The controller is further configured to determine that the electrochemical modification of the indium tin oxide conductive glass is completed when the detection result transmitted by the detection optical path component indicates that the transmittance of the indium tin oxide conductive glass during the electrochemical modification process meets a preset condition.

9. The manufacturing device of the optical attenuation sheet according to claim 8, characterized in that: The detection optical path assembly includes a laser light source, a beam splitting cube, a power meter, and a CCD camera, wherein the laser light source is located on a first side of the indium tin oxide conductive glass during the electrochemical modification process, the beam splitting cube, the power meter, and the CCD camera are located on a second side of the indium tin oxide conductive glass during the electrochemical modification process, and the second side of the indium tin oxide conductive glass during the electrochemical modification process is opposite to the first side of the indium tin oxide conductive glass during the electrochemical modification process; Furthermore, the laser light emitted by the laser light source is attenuated by the indium tin oxide conductive glass during the electrochemical modification process and then split into two paths via the beam splitter cube, one of which reaches the power meter and the other reaches the CCD camera.

10. The manufacturing device of the optical attenuation sheet according to claim 6, characterized in that: The manufacturing device of the optical attenuation sheet further comprises: A voltage control module is used to adjust the voltage on the indium tin oxide conductive glass and the auxiliary electrode during the electrochemical modification process.

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