Reliability detection apparatus and method

Abstract

The present disclosure provides a reliability detection device and method, and relates to the technical field of reliability detection. The reliability detection device comprises a thermal environment module and a dynamic load module. The thermal environment module comprises a heating chamber. The dynamic load module comprises a bearing mechanism and a driving mechanism. The bearing mechanism comprises an experimental tray and a moving table. The experimental tray is located in the heating chamber and is detachably arranged on the side of the moving table away from the driving mechanism. The experimental tray comprises a recessed part for bearing a device to be detected. The device to be detected is provided with an impact block. The driving mechanism drives the moving table to reciprocate so that the impact block reciprocally impacts the device to be detected.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of reliability detection, and in particular to a reliability detection device and method. BACKGROUND

[0002] High-temperature ceramic products, such as carriers, suction cups, disc bases and the like made of materials such as quartz, silicon carbide ceramic, alumina ceramic, aluminum nitride ceramic, silicon nitride ceramic, etc., are widely used in semiconductor manufacturing. In the semiconductor manufacturing process, high-temperature ceramic products need to be served in an ultra-high-temperature and high-speed rotating environment for a long time, and wafers will impact the surface of high-temperature ceramic products due to centrifugal force, which puts higher requirements on the reliability of high-temperature ceramic products.

[0003] At present, only a single thermal shock test is used to detect the reliability of high-temperature ceramic products, which cannot simulate the thermal-stress coupling effect of high-temperature ceramic products in actual working conditions, resulting in inaccurate reliability detection results. SUMMARY

[0004] Therefore, the present disclosure provides a reliability detection device and method.

[0005] In a first aspect, a reliability detection device is provided, comprising a thermal environment module and a dynamic load module; the thermal environment module comprises a heating chamber; the dynamic load module comprises a bearing mechanism and a driving mechanism; wherein the bearing mechanism comprises an experimental tray and a motion table, the experimental tray is located in the heating chamber, and the experimental tray is detachably arranged on the side of the motion table away from the driving mechanism; the experimental tray comprises a recessed part, the recessed part is used for bearing a to-be-detected device, and the to-be-detected device is provided with an impact block; the driving mechanism is used for driving the motion table to reciprocate, so that the impact block reciprocally impacts the to-be-detected device.

[0006] In combination with the first aspect, in some implementations of the first aspect, a groove is formed on the side of the experimental tray facing the motion table, the groove is located at the junction of the side surface and the bottom surface of the experimental tray, and the groove extends along a first direction; a boss is arranged on the side of the motion table facing the experimental tray, the shape of the boss in a first plane is adapted to the shape of the groove in the first plane, so that the experimental tray and the motion table are connected in cooperation, and the first plane is a plane perpendicular to the first direction.

[0007] In combination with the first aspect, in some implementations of the first aspect, the motion table reciprocates along a second direction, and the second direction is perpendicular to the first direction.

[0008] In combination with the first aspect, in some implementations of the first aspect, the number of bosses is a plurality, and the plurality of bosses are arranged at intervals along the second direction; the number of grooves is a plurality, and the grooves correspond to the bosses one by one; the driving mechanism drives the motion table to reciprocate along the second direction.

[0009] With reference to the first aspect, in some implementations of the first aspect, the recess includes a main body region and a plurality of jig positioning openings arranged around the main body region; a bottom surface profile of the main body region is adapted to an outer profile of the device to be detected, and the jig positioning openings pass through the inner surface and the outer surface of the experimental tray.

[0010] With reference to the first aspect, in some implementations of the first aspect, the driving mechanism includes a support plate, a moving frame, and a driving component; the moving frame is connected to the moving table, and edges of the moving frame include a first edge and a second edge perpendicular to the second direction, and a third edge and a fourth edge parallel to the second direction, wherein the moving table reciprocates along the second direction; the support plate is located between the moving frame and the moving table, and a side of the support plate facing the moving frame is provided with a guide groove, and a rotating shaft is arranged in the guide groove; the driving component is configured to drive the rotating shaft to perform circular motion in the guide groove; wherein four elastic sheets are arranged around the moving frame, and the four elastic sheets are arranged corresponding to the edges of the moving frame; the front end of the elastic sheet is fixedly connected to the corresponding edge of the moving frame in the direction of the circular motion; the rear end of the elastic sheet corresponding to the first edge and the elastic sheet corresponding to the second edge are fixedly connected to the bottom surface of the heating chamber, respectively; the support plate includes a first extension and a second extension extending along the second direction; the first extension is located between the third edge and the elastic sheet corresponding to the third edge, one side of the first extension is fixedly connected to the rear end of the elastic sheet corresponding to the third edge, and the other side of the first extension is abutted against the second edge; the second extension is located between the fourth edge and the elastic sheet corresponding to the fourth edge, one side of the second extension is fixedly connected to the rear end of the elastic sheet corresponding to the fourth edge, and the other side of the second extension is abutted against the first edge.

[0011] With reference to the first aspect, in some implementations of the first aspect, a side of the support plate away from the moving frame is provided with a heat insulation plate.

[0012] With reference to the first aspect, in some implementations of the first aspect, the reliability detection device further includes: a heat control module in communication connection with the thermal environment module, configured to control the environmental temperature of the thermal environment module; and a power control module in communication connection with the dynamic load module, configured to control the reciprocating frequency and / or the impact force.

[0013] With reference to the first aspect, in some implementations of the first aspect, the device to be detected includes a graphite base or a ceramic disc base used in a semiconductor manufacturing process, and the impact block includes a wafer.

[0014] In a second aspect, a reliability detection method is provided, which is applied to the reliability detection device provided in the first aspect. The reliability detection method comprises: controlling the thermal environment module to start and warm up to a preset temperature; controlling the driving mechanism to start, so that the impact block on the device to be detected reciprocally impacts the device to be detected; during the detection process, collecting detection data of the device to be detected, the detection data comprising at least one of surface temperature, local stress and surface topography; and determining a reliability analysis result of the device to be detected based on the detection data.

[0015] The reliability detection device provided by the present disclosure realizes the simulation of the combined working condition of thermal stress coupling through the collaborative design of the thermal environment module and the dynamic load module. During the detection process, the reciprocating movement of the impact block simulates the situation that the wafer impacts the side wall of the pedestal when it is suddenly stopped, accelerated or decelerated in the real working condition, so as to evaluate the stability of the device to be detected in the process of sudden speed change, and improve the accuracy of the reliability detection result. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 Fig. 1 shows a structural schematic diagram of a reliability detection device provided by an embodiment of the present disclosure.

[0017] Figure 2 Fig. 4 shows a structural schematic diagram of a bearing mechanism provided by an embodiment of the present disclosure.

[0018] Figure 3 Fig. 5 shows a structural schematic diagram of a driving mechanism provided by an embodiment of the present disclosure.

[0019] Figure 4 Fig. 6 shows a bottom view of the driving mechanism provided by an embodiment of the present disclosure.

[0020] Figure 5 Fig. 8 shows a flow chart of a reliability detection method provided by an embodiment of the present disclosure. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present disclosure will be described clearly and completely below with reference to the drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present disclosure.

[0022] High-temperature ceramic products include graphite susceptor, which needs to be rotated at high speed in a high-temperature environment in an epitaxial process, so that the wafer surface is uniformly deposited on the wafer surface by reaction gas. In this process, the graphite susceptor needs to withstand the centrifugal force of the wafer in high-speed rotation and the thermal expansion stress. Alternatively, high-temperature ceramic products also include ceramic disc base, which needs to withstand thermal cycling and mechanical vibration in a chemical vapor deposition (CVD) process.

[0023] Currently, the reliability detection of high-temperature ceramic products mainly uses single thermal shock test. Thermal shock test is a test of the performance change of high-temperature ceramic products under thermal shock conditions through high-temperature-room temperature cycling. It can be seen that the current reliability detection can only simulate the reliability of high-temperature ceramic products in a high-temperature environment, and cannot simulate the external impact or vibration of high-temperature ceramic products in a high-temperature environment, so the accuracy of the reliability detection result is low. In addition, there is a lack of quantitative evaluation means for the dynamic bearing capacity of high-temperature ceramic products under rotating load, and it is difficult to predict the stability of high-temperature ceramic products in the process of sudden acceleration / deceleration.

[0024] In view of the above technical problems, the present disclosure provides a reliability detection device and method with high universality, which can simulate thermal-stress coupling working conditions, cover high-temperature resistance, dynamic bearing and comprehensive service performance evaluation, and improve the accuracy of the reliability detection result.

[0025] The following will be combined Figures 1 to 4 The reliability detection device provided by the embodiment of the present disclosure is illustrated by way of example.

[0026] Figure 1 The structure of the reliability detection device provided by the embodiment of the present disclosure is shown. As Figure 1 The reliability detection device includes a thermal environment module 100 and a dynamic load module 200.

[0027] The thermal environment module 100 is used to simulate high-temperature working conditions. Specifically, the thermal environment module 100 includes a heating chamber. The heating chamber is a closed cavity structure as a whole, and the heating chamber is provided with an openable and closable furnace door. One side of the furnace door is hingedly connected with the heating chamber, and the other side of the furnace door can be provided with a buckle type door handle to realize buckling fixation. During the detection process, the experimental tray, the device to be detected, etc. can be disassembled through the furnace door.

[0028] The heating chamber is made of high-temperature resistant material as a whole. For example, the main body of the heating chamber can be an alumina fiber furnace hearth, which is wrapped by thick steel plate and coated with a rust-proof coating.

[0029] A heating element is arranged in the heating chamber to realize uniform temperature rise in the chamber. The heating element can be arranged on the inner wall of the heating chamber. Exemplarily, the heating element includes multiple groups of nichrome resistance wires arranged on the inner side wall and the top of the heating chamber respectively. The nichrome resistance wire has the advantages of high temperature resistance, fast heating, long service life, stable resistance, small power deviation, uniform pitch after stretching, strong corrosion resistance and oxidation resistance, and is suitable for use in the heating chamber.

[0030] The heating chamber further includes four support feet arranged at the four corners of the bottom of the heating chamber. One end of the support feet is rigidly connected to the bottom of the heating chamber, and the other end extends downward to the ground to ensure the stability of the heating chamber.

[0031] The dynamic load module 200 is used to simulate the dynamic load such as vibration and impact that the device to be detected may be subjected to in actual use. The dynamic load module 200 includes a bearing mechanism and a driving mechanism. The bearing mechanism is used to support the device to be detected, and the driving mechanism is used to provide dynamic load for the device to be detected. The following will be introduced respectively in combination with the drawings.

[0032] Figure 2 As shown in the structural schematic diagram of the bearing mechanism provided by an embodiment of the present disclosure. As shown in the structural schematic diagram of the bearing mechanism provided by an embodiment of the present disclosure, the bearing mechanism includes an experimental tray 211 and a motion table 212. Figure 2 The experimental tray 211 is located in the heating chamber, and the experimental tray 211 is detachably arranged on the side of the motion table 212 away from the driving mechanism, that is, the experimental tray 211, the motion table 212 and the driving mechanism are arranged in sequence from top to bottom.

[0033] The material of the motion table 212 is consistent with the material of the main body of the heating chamber, including polycrystalline alumina fiber.

[0034] The experimental tray 211 includes a recessed part 211A for bearing the device to be detected 300. The device to be detected 300 can be a graphite susceptor, a ceramic disc base or other high-temperature ceramic products used in semiconductor manufacturing processes, and the present disclosure does not make specific limitations on this.

[0035] In order to simulate the situation that the wafer repeatedly hits the graphite susceptor in the epitaxial process, a hitting block (not shown in the figure) can be further arranged on the device to be detected 300. The hitting block is located on the surface of the side of the device to be detected 300 away from the experimental tray 211. The hitting block can include a wafer or a device similar in shape and characteristics to the wafer.

[0036] The driving mechanism is used to drive the motion table 212 to reciprocate, the experimental tray 211 is fixed on the motion table 212, and the device to be detected 300 is embedded in the recessed portion 211A of the experimental tray 211. When the motion table 212 reciprocates, the device to be detected 300 on the motion table 212 synchronously reciprocates, so that the impact block arranged on the device to be detected 300 reciprocally impacts the device to be detected 300. Specifically, the device to be detected 300 is disc-shaped, and during the detection process, the impact block is placed on the bottom surface of the device to be detected 300 and reciprocally impacts the inner side wall of the device to be detected 300.

[0037] In the embodiments of the present disclosure, through the cooperative design of the thermal environment module and the dynamic load module, the simulation of the combined working condition of thermal-stress coupling is realized. During the detection process, through the reciprocating movement of the impact block, the impact of the wafer on the side wall of the pedestal under the condition of sudden stop, sudden acceleration or sudden deceleration in the real working condition is simulated, so as to evaluate the stability of the device to be detected during the sudden speed change process and improve the accuracy of the reliability detection result. Moreover, the overall structure of the device is compact, the operation is convenient, and the device has high practicability.

[0038] In some embodiments, continuing to refer to Figure 2 The recessed portion 211A of the experimental tray 211 includes a main body region Q1 and a plurality of clamp positioning openings Q2, and the plurality of clamp positioning openings Q2 are arranged around the main body region Q1.

[0039] The bottom surface profile of the main body region Q1 is matched with the outer profile of the device to be detected 300. The main body region Q1 limits the device to be detected 300 through the profile-fitted side wall, so that the device to be detected 300 remains relatively stationary with the experimental tray 211 during the experiment.

[0040] The clamp positioning openings Q2 penetrate the inner surface and the outer surface of the experimental tray 211. When the device to be detected 300 is placed in the main body region Q1, the clamp positioning openings Q2 expose part of the side edges of the device to be detected 300.

[0041] The number of clamping jaws of the pick-and-place clamp should be consistent with the number of clamp positioning openings Q2. The pick-and-place clamp is used to take out the device to be detected 300 from the experimental tray 211 after the experiment, or place the device to be detected 300 in the experimental tray 211 before the experiment. Exemplarily, the number of clamping jaws of the clamp is four, and correspondingly, four clamp positioning openings Q2 can be arranged, and the intervals between the four clamp positioning openings Q2 are the same.

[0042] When the experiment is finished, the clamping jaws of the pick-and-place clamp can be inserted into the recessed portion 211A through the clamp positioning openings Q2, clamp the side edges of the device to be detected 300 from the circumferential direction, and take out vertically, so as to avoid the deviation caused by the rolling of the circular device.

[0043] In the embodiments of the present disclosure, the experimental tray is provided with a clamp positioning opening matched with the taking and placing clamp. The clamp positioning opening can guide the clamp to accurately contact the preset stress point, so that the stress of the device to be detected during taking and placing is uniform. Moreover, the temperature of the device to be detected is relatively high after the experiment is completed, and the operator can take out the device to be detected through the taking and placing clamp, thereby reducing the risk of scalding of the operator.

[0044] In the following, the experimental tray and the motion table will be described in detail. Figure 2 The connection mode of the experimental tray and the motion table will be further described.

[0045] As described in the above embodiments, the experimental tray and the motion table are detachably connected. For different devices to be detected, different experimental trays can be selected according to the shape, thermal expansion coefficient and the like of the device to be detected. For example, the device to be detected can be made of quartz, silicon carbide ceramic, alumina ceramic and the like. Since the thermal physical properties of devices made of different materials are significantly different, if a unified specification experimental tray is used, the accuracy of the reliability detection result will be affected.

[0046] In the embodiments of the present disclosure, the experimental tray and the motion table are detachably connected. Before the experiment starts, an experimental tray matched with the device to be detected is selected and fixed on the motion table. Therefore, the reliability detection device can be compatible with devices to be detected made of various materials and having various sizes, and has high versatility.

[0047] Specifically, as shown in Figure 2 The side of the experimental tray 211 facing the motion table 212 is provided with a groove 211B. The groove 211B is located at the junction of the side surface and the bottom surface of the experimental tray 211, and the groove 211B extends along the first direction.

[0048] The side of the motion table 212 facing the experimental tray 211 is provided with a boss 212A. The shape of the boss 212A in the cross section of the first plane is matched with the shape of the groove 211B in the cross section of the first plane. The first plane is a plane perpendicular to the first direction.

[0049] When the experimental tray 211 is installed on the motion table 212, the boss 212A of the motion table 212 is embedded in the groove 211B of the experimental tray 211, so that the experimental tray 211 and the motion table 212 are connected in cooperation. Exemplarily, the boss 212A is in the shape of a cuboid as a whole, the boss 212A extends along the first direction, and the cross section of the boss 212A in the first plane is in the shape of a rectangle. Correspondingly, the cross section of the groove 211B in the first plane is also in the shape of a rectangle, and the size of the cross section of the groove 211B in the first plane is consistent with the size of the cross section of the boss 212A in the first plane. Alternatively, the cross section of the boss 212A in the first plane can also include a T shape, an inverted trapezoid and the like, and the present disclosure does not make specific limitations in this regard.

[0050] Continuing to refer to Figure 1, the first direction can be perpendicular to a side wall of a furnace body on which the furnace door is installed. When installing the experimental tray 211, an operator aligns the groove 211B on the lower surface of the experimental tray 211 with the boss 212A on the upper surface of the moving table 212, and pushes the experimental tray 211 in the first direction, so that the boss 212A slides into the groove 211B in the extension direction of the groove 211B, to complete the installation of the experimental tray 211 through the furnace door. The disassembly process of the experimental tray 211 is also similar, and will not be described here.

[0051] Further, the upper surface of the moving table 212 away from the side of the furnace door can also be provided with a limiting block. During the process of pushing the experimental tray 211 in the first direction by the operator, the end of the experimental tray 211 is attached to the limiting block, at which time the experimental tray 211 cannot continue to slide, indicating that the installation is complete.

[0052] In the embodiments of the present disclosure, through the complementary design of the boss structure of the moving table and the groove structure of the experimental tray, the installation and disassembly of the experimental tray are facilitated, the difficulty of the operator to replace the experimental tray according to different devices to be detected is reduced, and the overall ease of use of the device is improved.

[0053] In some embodiments, the moving table 212 reciprocates in a second direction, the second direction is perpendicular to the first direction, and the second direction is parallel to the ground plane. It can be understood that, due to the limitation of the extension direction of the groove 211B, when the experimental tray 211 is installed on the moving table 212, the experimental tray 211 can only slide in the first direction and cannot move in other directions intersecting the first direction.

[0054] When the moving table 212 reciprocates in the second direction, the experimental tray 211 thereon will not have relative displacement in other directions except the first direction under the constraint of the concave-convex matching structure. Since the second direction is perpendicular to the first direction, the experimental tray 211 and the moving table 212 do not have relative sliding in the second direction, so that they keep completely synchronous reciprocation in the second direction.

[0055] In the embodiments of the present disclosure, the design of the moving table and the experimental tray reciprocating in the second direction not only facilitates the installation and disassembly of the experimental tray, but also ensures the connection stability of the experimental tray and the moving table during reciprocation, further improving the practicality of the device, the accuracy of the reliability test results, and the like.

[0056] In some embodiments, continuing to refer to Figure 1 , Figure 2The number of the convex blocks 212A on the motion table 212 is multiple, and the multiple convex blocks 212A are arranged at intervals along the second direction. For example, the number of the convex blocks 212A can be set to 5, 6, 7, or any number, and in addition, the interval distances between the multiple convex blocks 212A can be the same or different, which can be designed according to the size of the motion table 212, and the present disclosure does not make specific limitations hereon.

[0057] Correspondingly, the number of the grooves 211B on the experimental tray 211 is multiple, and the multiple grooves 211B are arranged at intervals along the second direction. The grooves 211B correspond to the convex blocks 212A one by one, that is, the number of the grooves 211B is the same as that of the convex blocks 212A, and the position, extension direction, and cross-sectional size of each groove 211B are accurately matched with the corresponding convex block 212A, so that the experimental tray 211 can be smoothly installed on the motion table 212.

[0058] In the embodiments of the present disclosure, by setting the one-to-one corresponding cooperation of multiple sets of grooves and convex blocks, stress concentration of the experimental tray and the motion table during reciprocating motion is avoided, structural deformation of the grooves and the convex blocks is avoided, and the service life of the device is prolonged. In addition, the multiple convex blocks arranged at intervals along the second direction can further inhibit the experimental tray from being twisted and deviated relative to the motion table, and ensure the straight motion of the experimental tray along the second direction.

[0059] In addition to the above-mentioned structures, the motion table 212 further includes a motion connecting rod 212B. The motion connecting rod 212B is connected with the driving mechanism below to realize the transmission of the driving force output by the driving mechanism to the motion table. The specific structure of the driving mechanism will be described below in conjunction with the drawings.

[0060] Figure 3 Fig. 4 shows a structural schematic diagram of a driving mechanism provided by an embodiment of the present disclosure. Figure 4 Fig. 5 shows a bottom view of the driving mechanism provided by an embodiment of the present disclosure. As shown in Fig. 5, Figure 3 Figure 4 As shown in Fig. 4, the driving mechanism includes a supporting plate 410, a motion frame 420, and a driving component 430.

[0061] The motion table is connected with the motion frame 420 through the motion connecting rod. The motion frame 420 is surrounded by four sides. The sides of the motion frame include a first side L1, a third side L3, a second side L2, and a fourth side L4 connected in sequence. Among them, the first side L1 and the second side L2 are oppositely arranged and both are perpendicular to the second direction; the third side L3 and the fourth side L4 are oppositely arranged and both are parallel to the second direction. The motion frame 420 is roughly rectangular, but one end of the first side L1 slightly exceeds the fourth side L4, one end of the fourth side L4 away from the first side L1 slightly exceeds the second side L2, one end of the second side L2 away from the fourth side L4 slightly exceeds the third side L3, and one end of the third side L3 away from the second side L2 slightly exceeds the first side L1. ​

[0062] The support plate 410 is located between the moving frame 420 and the moving table, and is parallel to the ground. The side of the support plate 410 facing the moving frame 420 is provided with a guide groove 410A in a circular shape. A rotating shaft 410B is arranged in the guide groove 410A. The support plate 410 includes a first extension 411 and a second extension 412 extending in the second direction. The first extension 411 and the second extension 412 are located at the side edges of the support plate 410.

[0063] The driving component 430 is located on the side of the moving frame 420 away from the support plate 410. The driving component 430 includes a motor and a transmission belt. The motor can be a variable frequency brushless motor with a speed of 0-5000 rpm. When the motor is working, the transmission belt drives the rotating shaft 410B to make a circular motion in the guide groove. Further, the rotating shaft 410B is an adjustable eccentric shaft, and the driving component 430 drives the rotating shaft 410B to make an eccentric rotary motion in the guide groove 410A, thereby driving the support plate 410 to make a rotary motion.

[0064] Four elastic sheets are arranged around the moving frame 420, and the four elastic sheets are arranged corresponding to the four sides of the moving frame, respectively, and are fixedly connected to the four sides of the support plate 410, respectively. The elastic sheets can be steel sheets.

[0065] For convenience of description, the four elastic sheets are denoted as T1, T2, T3 and T4, respectively. Among them, the elastic sheet T1 corresponds to the first side L1, the elastic sheet T2 corresponds to the second side L2, the elastic sheet T3 corresponds to the third side L3, and the elastic sheet T4 corresponds to the fourth side L4.

[0066] In the direction of the circular motion, the front end of the elastic sheet is fixedly connected to the corresponding side of the moving frame; the rear ends of the elastic sheet corresponding to the first side and the elastic sheet corresponding to the second side are fixedly connected to the bottom surface of the heating chamber, respectively.

[0067] For example, the circular motion is in the clockwise direction. The side of the elastic sheet T1 close to the third side L3 is the front end, and the side close to the fourth side L4 is the rear end. The side of the elastic sheet T3 close to the second side L2 is the front end, and the side close to the first side L1 is the rear end. The side of the elastic sheet T2 close to the fourth side L4 is the front end, and the side close to the third side L3 is the rear end. The side of the elastic sheet T4 close to the first side L1 is the front end, and the side close to the second side L2 is the rear end.

[0068] If the circular motion is in the counterclockwise direction, the side of the elastic sheet T1 close to the fourth side L4 is the front end, and the side close to the third side L3 is the rear end. The front and rear ends of the remaining elastic sheets are similar, and are not described here.

[0069] Continuing to take the clockwise direction of the circular motion as an example, in combination with Figure 4The first extension 411 is located between the third side L3 and the elastic sheet T3 corresponding to the third side L3, and the second extension 412 is located between the fourth side L4 and the elastic sheet T4 corresponding to the fourth side L4.

[0070] The front ends of elastic plates T1, T2, T3, and T4 are fixedly connected to the corresponding edges of the motion frame. Specifically, the side of elastic plate T1 closest to the third edge L3 is fixedly connected to the first edge L1, the side of elastic plate T2 closest to the fourth edge L4 is fixedly connected to the second edge L2, the side of elastic plate T3 closest to the second edge L2 is fixedly connected to the third edge L3, and the side of elastic plate T4 closest to the first edge L1 is fixedly connected to the fourth edge L4.

[0071] The rear ends of the elastic sheet T1 corresponding to the first side L1 and the rear ends of the elastic sheet T2 corresponding to the second side L2 are fixedly connected to the bottom surface of the heating chamber. The rear end of the elastic sheet T3 corresponding to the third side L3 is fixedly connected to one side of the first extension 411, and the other side of the first extension 411 abuts against the side wall of the second side L2 facing the first side L1. The rear end of the elastic sheet T4 corresponding to the fourth side L4 is fixedly connected to one side of the second extension 412, and the other side of the second extension 412 abuts against the side wall of the first side L1 facing the second side L2. A fixing seat can extend downward from the bottom surface of the heating chamber, and the rear ends of the elastic sheets are fixed on the fixing seat to achieve a fixed connection between the elastic sheets and the bottom surface of the heating chamber.

[0072] exist Figure 4 In the state shown, none of the four elastic plates are under force. When the rotating shaft 410B drives the support plate 410 to make a circular motion, the mechanical motion of the motion frame 420 in the first direction is affected by the fixing of the rear ends of the elastic plates T1 and T2, and is offset by the deformation of the elastic plates T3 and T4. However, the mechanical motion of the motion frame 420 in the second direction is not restricted, so the motion frame 420 can only make reciprocating motion in the second direction.

[0073] In this embodiment, the motion frame, elastic plate, and support plate cooperate with each other. The motion frame uses the elastic deformation of the steel plate to offset the mechanical motion along the first direction during rotation, retaining only the mechanical motion along the second direction, so that the motion frame drives the upper motion table to reciprocate along the second direction. The overall structure of the drive mechanism is simple and stable, realizing the efficient conversion of rotational power to pure linear reciprocating power, while taking into account motion accuracy, smoothness, and ease of maintenance.

[0074] In some embodiments, continue to refer to Figure 3The side of the support plate 410 away from the moving frame 420 is provided with a heat insulation plate 440. Since the heat of the thermal environment module will be gradually conducted to the support plate 410, the moving frame 420, the driving component 430 and other structures through the moving table, the high temperature will cause performance failure of the driving component 430, movement precision deviation between the moving frame 420 and the elastic sheet and other problems.

[0075] Therefore, the heat insulation plate 440 is arranged on the side of the support plate 410 away from the moving frame 420, so as to reduce the heat conduction of the thermal environment module to the driving mechanism, control the working environment temperature of the driving mechanism, improve the movement precision and service life of the driving mechanism, and further improve the stability and reliability of the reliability detection device in a high-temperature scene.

[0076] In some embodiments, the reliability detection device further comprises a thermal control module and a power control module. The thermal control module is in communication connection with the thermal environment module and is used for controlling the environment temperature of the thermal environment module. The power control module is in communication connection with the dynamic load module and is used for controlling the reciprocating frequency and / or the impact force.

[0077] The thermal control module and the power control module respectively realize the temperature and dynamic load controllable environment requirements through communication and cooperation with the thermal environment module and the dynamic load module, so as to provide the to-be-detected device with test conditions of thermal-stress coupling in line with actual working conditions.

[0078] Further, the reliability detection device further comprises a data acquisition module for acquiring state parameters of the to-be-detected device under the thermal-stress combined working condition.

[0079] The data acquisition module comprises an infrared thermal imager, a strain sheet and a high-definition camera. The infrared thermal imager is used for acquiring the surface temperature field distribution of the to-be-detected device and determining the temperature change of each region of the to-be-detected device through a thermal imaging map. The strain sheet is used for acquiring local stress changes of the to-be-detected device to determine stress concentration of the to-be-detected device. The high-definition camera is used for recording surface morphology changes of the to-be-detected device, such as surface cracks and coating peeling. In addition, an insertion type thermocouple can be additionally arranged to avoid surface temperature monitoring failure.

[0080] The above describes the device embodiments of the present disclosure in combination with Figures 1 to 4 The device embodiments of the present disclosure are described in detail, and the following describes the reliability detection method embodiments of the reliability detection device of the present disclosure in combination with Figure 5 The device embodiments of the present disclosure are described in detail, and the following describes the reliability detection method embodiments of the reliability detection device of the present disclosure in combination with

[0081] Figure 5Fig. 1 shows a flowchart of a reliability detection method provided by an embodiment of the present disclosure, which can be applied to the reliability detection apparatus provided by any of the above embodiments. As shown in Fig. 1, the reliability detection method provided by the embodiment of the present disclosure includes the following steps. Figure 5 As shown in Fig. 1, the reliability detection method provided by the embodiment of the present disclosure includes the following steps.

[0082] S510, control the thermal environment module to start and warm up to a preset temperature.

[0083] At the beginning of the experiment, the preset temperature can be set, for example, the ambient temperature can be set to 1000°C, 1200°C, 1300°C, etc. And in the detection process, the heating power is adjusted in real time by the PID method to ensure the stability of the ambient temperature.

[0084] S520, control the driving mechanism to start, so that the impact block on the device to be detected reciprocally impacts the device to be detected.

[0085] When the thermal environment module is warmed up to the preset temperature, the driving mechanism works based on the preset parameters. Exemplarily, the preset parameters can be set to 3000 rpm speed, 20 Hz impact frequency, or 2500 rpm speed, 15 Hz impact frequency, or 4000 rpm speed, 30 Hz impact frequency, etc.

[0086] S530, in the detection process, the detection data of the device to be detected is collected.

[0087] In the detection process, the device to be detected is monitored in real time by the data acquisition module until the termination condition is met. The termination condition can be that the detection time length meets the preset time length, the crack propagation rate of the device to be detected is greater than the preset rate or the deformation is greater than the preset deformation, etc.

[0088] When the termination condition is met, the detection is stopped and the detection data is saved. The detection data includes at least one of the surface temperature, the local stress and the surface topography.

[0089] S540, based on the detection data, the reliability analysis result of the device to be detected is determined.

[0090] Based on the detection data, a surface temperature-stress-deformation correlation curve is generated to analyze the failure condition of the device to be detected through the correlation curve, quantify the failure threshold of the device to be detected, and thus obtain the reliability analysis result of the device to be detected.

[0091] The above describes the basic principles of the present disclosure in combination with specific embodiments, but it needs to be pointed out that the advantages, benefits, effects and the like mentioned in the present disclosure are only examples and are not limiting, and these advantages, benefits, effects and the like cannot be considered as necessary for each embodiment of the present disclosure. In addition, the above specific details of the disclosure are only for the purpose of example and for the purpose of understanding, and are not limiting, and the above details do not limit the present disclosure to be necessarily implemented with the above specific details.

[0092] The block diagrams of the devices, apparatuses, equipment, systems involved in the present disclosure are only illustrative examples and are not intended to require or imply the connection, arrangement, configuration shown in the block diagram. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner. Words such as "include", "contain", "have" and the like are open-ended words, which mean "including but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.

[0093] It also needs to be pointed out that in the system, equipment and method of the present disclosure, each component or each step can be decomposed and / or recombined. These decompositions and / or recombination should be considered as equivalent solutions of the present disclosure.

[0094] The above description of the disclosed aspects is provided so that any person skilled in the art can make or use the present disclosure. Various modifications to these aspects will be apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather is to be accorded the broadest scope consistent with the principles and novel features disclosed herein.

[0095] The above description has been given for the purpose of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present disclosure to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain modifications, alterations, changes, additions and subcombinations thereof.

Claims

1. A reliability detection apparatus, characterized by, Includes a thermal environment module and a dynamic load module; The thermal environment module includes a heating chamber; The dynamic load module includes a load-bearing mechanism and a drive mechanism; The supporting mechanism includes an experimental tray and a motion table. The experimental tray is located in the heating chamber and is detachably mounted on the side of the motion table away from the driving mechanism. The experimental tray includes a recess for supporting the device under test, and the device under test is provided with an impact block. The experimental tray has a groove on the side facing the motion table. The groove is located at the junction of the side surface and the bottom surface of the experimental tray, and the groove extends along a first direction. The motion platform has a protrusion on the side facing the experimental tray. The shape of the cross-section of the protrusion on the first plane matches the shape of the cross-section of the groove on the first plane, so that the experimental tray and the motion platform can be connected. The first plane is a plane perpendicular to the first direction. There are multiple protrusions, which are arranged at intervals along a second direction, which is perpendicular to the first direction. There are also multiple grooves, and each groove corresponds to one of the protrusions. The driving mechanism is used to drive the motion stage to reciprocate along the second direction, so that the impact block reciprocates to impact the device under test; The drive mechanism includes a support plate, a motion frame, and drive components; The motion frame is connected to the motion table. The sides of the motion frame include a first side and a second side perpendicular to the second direction, and a third side and a fourth side parallel to the second direction. The motion table reciprocates along the second direction. The pallet is located between the motion frame and the motion table. A guide groove is provided on the side of the pallet facing the motion frame, and a rotating shaft is provided in the guide groove. The driving component is used to drive the rotating shaft to make a circular motion in the guide groove; The motion frame is provided with four elastic plates around its perimeter, each corresponding to a side of the motion frame. Along the circumferential direction of motion, the front end of each elastic plate is fixedly connected to the corresponding side of the motion frame. The rear ends of the elastic plates corresponding to the first and second sides are fixedly connected to the bottom surface of the heating chamber. The support plate includes a first extension and a second extension extending along the second direction. The first extension is located between the third side and the elastic plate corresponding to the third side, with one side fixedly connected to the rear end of the elastic plate corresponding to the third side, and the other side abutting against the second side. The second extension is located between the fourth side and the elastic plate corresponding to the fourth side, with one side fixedly connected to the rear end of the elastic plate corresponding to the fourth side, and the other side abutting against the first side.

2. The reliability detection apparatus according to claim 1, characterized by, The recess includes a main area and a plurality of clamping positioning openings arranged around the main area; the bottom contour of the main area is adapted to the outer contour of the device to be tested, and the clamping positioning openings penetrate the inner and outer surfaces of the experimental tray.

3. The reliability detection apparatus according to claim 1, characterized by, A heat insulation plate is provided on the side of the tray away from the motion frame.

4. The reliability detection apparatus according to claim 1, characterized by Also includes: A thermal control module, which is communicatively connected to the thermal environment module, is used to control the ambient temperature of the thermal environment module. The power control module is communicatively connected to the dynamic load module and is used to control the reciprocating motion frequency and / or impact force.

5. The reliability testing device according to claim 1, characterized in that, The device under test includes a graphite base or a ceramic disk base used in semiconductor manufacturing processes, and the impact block includes a wafer.

6. A reliability testing method, characterized in that, The reliability testing method, applied to the reliability testing apparatus as described in any one of claims 1 to 5, comprises: The thermal environment control module starts up and heats up to the preset temperature; The control drive mechanism is activated to cause the impact block on the device under test to reciprocate to impact the device under test. During the testing process, test data of the device under test is collected, including at least one of surface temperature, local stress, and surface morphology. Based on the test data, the reliability analysis results of the device under test are determined.

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