Ceramic heating plate and preparation method thereof

Abstract

The invention provides a ceramic heating plate and a preparation method thereof, and relates to the technical field of ceramic heating plates. A ceramic heating disc comprises an upper disc body, a lower disc body, a heating wire, a tray, ceramic tubes and a piston plate, the tray is arranged in the upper disc body, the heating wire is arranged in the lower disc body, the bottom end of the tray is driven to press the heating wire when the upper disc body and the lower disc body are installed mutually, the ceramic tubes are arranged in the tray, and the space between the upper disc body and the tray is filled with heat conduction oil. Conduction oil is arranged in a closed space formed by the piston plate and the ceramic pipe, the conduction oil drives the piston plate to move to a preset position during expansion and is sprayed autonomously, and the conduction oil on the upper layer of the storage space is extracted autonomously by the closed space after pressure relief of the conduction oil. According to the invention, the heating wire can be placed in the lower disc body at any position and fixed without central positioning, and the thin wafer is uniformly heated by heating the heat-conducting oil in the storage space; the plurality of ceramic tubes force mutual flowing of the heat-conducting oil in the storage space, thereby facilitating heat convection and accelerating uniform heating of the heat-conducting oil in the storage space.

Description

Technical Field

[0001] The present invention relates to the technical field of ceramic heating plates, and in particular to a ceramic heating plate and a preparation method thereof. Background Art

[0002] The production process of semiconductor chips involves processing steps such as wafer material deposition, removal, and wafer bonding. During the process, the wafer needs to be heated or hot-pressed. Ceramic heating plates are widely used in this field due to their high strength, corrosion resistance, and low impurity content.

[0003] The heating wire inside the existing ceramic heating plate is fixed by welding. If it deviates during the welding process, the uniform heating of the wafer will be affected, and the heating wire will transfer heat unevenly. Summary of the Invention

[0004] In order to solve the above problems, the present invention provides a ceramic heating plate and a preparation method thereof.

[0005] The present invention provides a ceramic heating plate, comprising an upper plate body, a lower plate body, a heating wire, a tray, a ceramic tube and a piston plate. The tray is arranged on the inner side of the upper plate body, and the heating wire is placed on the inner side of the lower plate body. When the upper plate body and the lower plate body are installed with each other, the bottom end of the tray is driven to press the heating wire. A plurality of ceramic tubes are evenly arranged on the inner side of the tray. The storage space formed between the upper plate body and the tray is filled with heat-conducting oil. The piston plate is arranged inside the ceramic tube, and the enclosed space formed by the bottom end thereof and the side wall of the ceramic tube is filled with heat-conducting oil. When the heat-conducting oil in the enclosed space is in an expanded state, the piston plate is driven to move vertically upward. When the piston plate moves upward to a preset position, the heat-conducting oil in the expanded state is autonomously sprayed to the lower layer in the storage space. When the heat-conducting oil in the enclosed space is depressurized, the piston plate is reset and the enclosed space autonomously extracts the heat-conducting oil in the upper layer of the storage space.

[0006] Optionally, the bottom end of the ceramic tube is coaxially fixedly connected to a copper base, and the copper base is fixedly installed in a hole opened at the bottom end of the tray. The copper base matches the size of the hole, and the enclosed space formed by the bottom end of the piston plate, the side wall of the ceramic tube and the upper end of the copper base is filled with heat transfer oil.

[0007] Optionally, the outer side of the piston plate is slidably connected to the inner wall of the ceramic tube, a second spring is fixedly connected to the middle of the bottom end of the piston plate, the bottom end of the second spring is fixedly connected to the middle of the end face of the copper base, and a plurality of evenly distributed and through-going first micropores are opened in the side wall of the ceramic tube along the circumferential direction of the axis.

[0008] Optionally, an oil inlet pipe is fixedly installed in the middle of the piston plate, the lower end of the oil inlet pipe is located in a confined space, a one-way valve is fixedly installed on the lower end of the oil inlet pipe, the oil inlet pipe is slidingly connected to the middle of the upper end of the ceramic tube, and a limiting ring is coaxially fixed on the inner wall of the ceramic tube.

[0009] Optionally, a fixed plate is provided at the upper end of the first microhole, a lifting plate is provided at the upper end of the fixed plate, the outer side of the fixed plate is fixed on the inner wall of the ceramic tube, the outer side of the lifting plate is slidably connected to the inner wall of the ceramic tube, a plurality of evenly distributed and through-going second microholes are opened in the inner circumference of the side wall of the ceramic tube, the second microholes are located between the upper end of the fixed plate and the bottom end of the lifting plate, and a third spring is fastened between the middle part of the upper end of the fixed plate and the middle part of the bottom end of the lifting plate.

[0010] Optionally, the lower end of the ceramic tube is formed into a tapered section, and the bottom end of the tapered section of the ceramic tube is fixed to the upper end surface of the copper base.

[0011] Optionally, a locking ring is fixedly provided at the lower end of the outer periphery of the upper disk body, and the locking ring and the upper end of the lower disk body are fastened to each other by a plurality of bolts.

[0012] Optionally, the tray is molded with an outer ring on its outer periphery, and a plurality of evenly distributed first springs are fixed to the bottom end of the outer ring along the circumferential direction. The inner side of the upper plate body is molded with an inner ring, and the bottom end of the first spring is fixed to the upper end face of the inner ring. The outer ring of the tray is slidably connected to the inner side of the upper plate body.

[0013] Optionally, both ends of the heating wire are provided with connection terminals, which are used to electrically connect to an external power source.

[0014] A method for preparing a ceramic heating plate, based on the ceramic heating plate described above, comprises the following steps: S1: The upper plate, lower plate, tray, ceramic tube, and piston plate are manufactured by sintering. An annular groove is opened on the outer periphery of the piston plate, and then the sealing ring is installed in the annular groove. The piston plate is then installed inside the ceramic tube, and the lower end is filled with heat transfer oil. Then, multiple ceramic tubes are fixed to the bottom end of the tray by brazing. S2: Then, the tray is installed inside the upper plate body, and the storage space between the upper plate body and the tray is filled with heat transfer oil; S3: Then place the heating wire on the bottom surface of the lower tray, leaving terminal blocks at both ends of the heating wire, and then install the upper tray and the lower tray together. During installation, press the bottom end of the tray against the upper end of the heating wire.

[0015] The ceramic heating plate of the present invention has the following beneficial effects: the heating wire can be placed in the lower plate body at any position and fixed without the need for central positioning, and the thin wafer is heated evenly by heating the heat-conducting oil in the storage space, thereby avoiding warping or stress cracking of the thin wafer caused by local overheating, and the heating wire is easy to replace; when the heat-conducting oil in the confined space expands, the piston plate is pushed to move vertically upward to a preset position, and the heat-conducting oil in the expanded state is sprayed toward the lower layer of the storage space by itself, and the sprayed heat-conducting oil impacts the heat-conducting oil in the lower layer of the storage space, and by arranging multiple ceramic tubes, the sprayed heat-conducting oil can effectively impact all directions of the heat-conducting oil in the lower layer of the storage space, forcing the heat-conducting oil in the lower layer of the storage space to flow with each other, which is beneficial to heat convection and accelerates the uniform heating of the heat-conducting oil in the lower layer of the storage space; when the heat-conducting oil in the confined space is depressurized, the piston plate is reset and the heat-conducting oil in the upper layer of the storage space is automatically extracted in the confined space, and the heat-conducting oil is immediately heated after being extracted in the confined space, and then sprayed and impacted by thermal expansion, thereby accelerating the uniform heating of the heat-conducting oil in the upper and lower layers. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the overall three-dimensional structure of a ceramic heating plate according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the overall internal structure of a ceramic heating plate according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the position of the heating wire in a ceramic heating plate according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the upper plate structure of a ceramic heating plate according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of a tray in a ceramic heating plate according to an embodiment of the present invention; Figure 6 This is a schematic diagram of the external structure of the copper base and ceramic tube in a ceramic heating plate according to an embodiment of the present invention; Figure 7 This is a schematic diagram of the internal structure of a ceramic tube in a ceramic heating plate according to an embodiment of the present invention; Figure 8 This is a schematic diagram of the moving state of a piston plate in a ceramic heating plate according to an embodiment of the present invention.

[0017] Explanation of the accompanying drawings: 100, upper plate; 101, locking ring; 102, bolt; 200, lower plate; 300, heating wire; 400, tray; 401, first spring; 500, copper base; 501, ceramic tube; 502, limiting ring; 503, piston plate; 504, second spring; 505, first micropore; 600, oil inlet pipe; 601, one-way valve; 700, fixing plate; 701, lifting plate; 702, third spring; 703, second micropore. DETAILED DESCRIPTION

[0018] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0019] In the description of the present invention, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0020] Throughout this specification, reference to terms such as "an embodiment," "one embodiment," "some embodiments," "exemplarily," and "one embodiment" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or embodiment are included in at least one embodiment or embodiment of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or embodiment. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or embodiments.

[0021] The terms "first," "second," etc. are used for descriptive purposes only and should not be understood to indicate or imply relative importance or to implicitly specify the quantity of the technical features indicated. Thus, a feature specified as "first" or "second" may explicitly or implicitly include at least one of the features.

[0022] like Figure 1-8 As shown, the embodiment of the present invention provides a ceramic heating plate, including an upper plate body 100, a lower plate body 200, a heating wire 300, a tray 400, a ceramic tube 501 and a piston plate 503. The tray 400 is arranged on the inner side of the upper plate body 100, and the heating wire 300 is placed on the inner side of the lower plate body 200. When the upper plate body 100 and the lower plate body 200 are installed with each other, the bottom end of the tray 400 is driven to press the heating wire 300. A plurality of ceramic tubes 501 are evenly arranged on the inner side of the tray 400. The space between the upper plate body 100 and the tray 400 is formed. The storage space formed is filled with heat transfer oil. The piston plate 503 is arranged inside the ceramic tube 501. The enclosed space formed by its bottom end and the side wall of the ceramic tube 501 is filled with heat transfer oil. When the heat transfer oil in the enclosed space is in an expanded state, the piston plate 503 is driven to move vertically upward. When the piston plate 503 moves upward to a preset position, the heat transfer oil in the expanded state is autonomously sprayed to the lower layer of the storage space. When the heat transfer oil in the enclosed space is depressurized, the piston plate 503 is reset and the enclosed space autonomously extracts the heat transfer oil in the upper layer of the storage space.

[0023] In this embodiment, the heating wire 300 is placed in the lower plate 200, and then the upper plate 100 and the lower plate 200 are installed with each other. During the installation process, the bottom end of the tray 400 located on the inner side of the upper plate 100 presses the heating wire 300. At this time, the position of the heating wire 300 is fixed, and there will be no shaking or poor contact with the bottom end of the tray 400. After the installation is completed, the heating wire 300 is energized. After the heating wire 300 is energized, heat is generated. Since the bottom end of the tray 400 presses the heating wire 300, the generated heat is transferred to the tray 400. 0 bottom, since the storage space formed between the upper plate 100 and the tray 400 is filled with heat-conducting oil, the generated heat will be dissipated to the heat-conducting oil in the storage space through the bottom of the tray 400. When the heat-conducting oil in the storage space is evenly heated, the heat in the heat-conducting oil will be evenly transferred to the upper plate 100, thereby uniformly heating the thin wafers on the upper end of the upper plate 100, avoiding warping or stress cracking of the thin wafers due to local overheating; when the bottom of the tray 400 is heated by the heating wire 300, the heat-conducting oil in the lower layer of the storage space will be heated first, Then the heat is transferred to the upper layer of thermal oil. At the same time, the multiple ceramic tubes 501 located on the inner side of the tray 400 are also heated, and the heat is transferred to the thermal oil in the enclosed space formed by the bottom end of the piston plate 503 and the side wall of the ceramic tube 501. When the thermal oil in the enclosed space is heated to an expanded state, the thermal oil pressure increases and pushes the piston plate 503 to move vertically upward. When the piston plate 503 moves upward to a preset position, the thermal oil in the expanded state sprays autonomously to the lower layer in the storage space, and the sprayed thermal oil impacts the thermal oil in the lower layer of the storage space. By setting multiple ceramic tubes 501, the thermal oil in the enclosed space is heated to an expanded state. The thermal oil pressure increases and pushes the piston plate 503 to move vertically upward. When the piston plate 503 moves upward to a preset position, the thermal oil in the expanded state sprays autonomously to the lower layer in the storage space. The sprayed thermal oil impacts the thermal oil in the lower layer of the storage space. The ceramic tube 501 allows the sprayed heat transfer oil to effectively impact all directions of the heat transfer oil in the lower layer of the storage space, forcing the heat transfer oil in the lower layer of the storage space to flow relative to each other, which is beneficial to heat convection and accelerates the uniform heating of the heat transfer oil in the lower layer of the storage space. When the heat transfer oil in the enclosed space is depressurized, the piston plate 503 is reset and the heat transfer oil in the upper layer of the storage space is automatically extracted in the enclosed space. After the heat transfer oil is extracted from the enclosed space, it is immediately heated and then sprayed and impacted through thermal expansion. This process is repeated until the upper and lower layers of the heat transfer oil in the enclosed space are evenly heated, so that the thin wafer can be evenly heated. The heating wire 300 can be placed in the lower plate 200 at any position and fixed without center positioning. By heating the heat-conducting oil in the storage space, the thin wafer is heated evenly, avoiding warping or stress cracking of the thin wafer due to local overheating, and the heating wire 300 is easy to replace; when the heat-conducting oil in the closed space expands, it pushes the piston plate 503 to move vertically upward to a preset position, and the heat-conducting oil in the expanded state sprays autonomously into the lower layer of the storage space, and the sprayed heat-conducting oil impacts the heat-conducting oil in the lower layer of the storage space. Multiple ceramic tubes 501 are arranged so that the sprayed heat-conducting oil can effectively impact all directions of the heat-conducting oil in the lower layer of the storage space, forcing the heat-conducting oil in the lower layer of the storage space to flow with each other, which is beneficial to heat convection and accelerates the uniform heating of the heat-conducting oil in the lower layer of the storage space; when the heat-conducting oil in the enclosed space is depressurized, the piston plate 503 is reset and the upper layer of the heat-conducting oil in the storage space is automatically extracted in the enclosed space, and the heat-conducting oil is immediately heated after being extracted from the enclosed space, and then sprayed and impacted through thermal expansion, thereby accelerating the uniform heating of the upper and lower layers of the heat-conducting oil.

[0024] like Figure 2 、 Figure 5 and Figure 7 As shown, optionally, the bottom end of the ceramic tube 501 is coaxially fixedly connected to the copper base 500, and the copper base 500 is fixedly installed in the hole opened at the bottom end of the tray 400. The copper base 500 matches the size of the hole, and the enclosed space formed by the bottom end of the piston plate 503, the side wall of the ceramic tube 501 and the upper end of the copper base 500 is filled with heat transfer oil.

[0025] In this embodiment, multiple copper bases 500 are evenly distributed and installed in the holes opened at the bottom of the tray 400. Since the bottom of the tray 400 presses the heating wire 300, the heat generated when the heating wire 300 is energized will not only be transferred to the bottom of the tray 400, but also to the multiple copper bases 500. Since the thermal conductivity of copper is much greater than that of the tray 400 made of ceramic material, the copper base 500 will be heated in a short time and transfer the heat to the heat-conducting oil filled in the confined space. The heat-conducting oil will absorb a large amount of heat in a short time and expand, pushing the piston plate 503 to move vertically upward.

[0026] like Figure 2 、 Figure 7 and Figure 8 As shown, optionally, the outer side of the piston plate 503 is slidably connected to the inner wall of the ceramic tube 501, and a second spring 504 is fixedly connected to the middle of the bottom end of the piston plate 503. The bottom end of the second spring 504 is fixedly connected to the middle of the end face of the copper base 500, and a plurality of evenly distributed and through-going first micropores 505 are opened in the side wall of the ceramic tube 501 along the circumferential direction of the axis.

[0027] In this embodiment, when the heating wire 300 is energized, the copper base 500 is heated in a short time, and the heat is transferred to the heat-conducting oil in the enclosed space. The heat-conducting oil absorbs a large amount of heat in a short time and expands, pushing the piston plate 503 to move vertically upward, and at the same time stretching the second spring 504. When the piston plate 503 moves upward to a preset position, that is, when the piston plate 503 moves upward to a position located at the upper end of the first microhole 505, the enclosed space at the lower end of the piston plate 503 is connected to the multiple first microholes 505. Since the first microholes 505 The heat transfer oil is connected to the external storage space. Therefore, due to the high oil pressure, the heat transfer oil in the expanded state in the enclosed space will automatically spray into the lower layer of heat transfer oil in the storage space through the multiple first micropores 505. The sprayed heat transfer oil effectively impacts all directions of the heat transfer oil in the lower layer of the storage space, forcing the heat transfer oil in the lower layer of the storage space to flow with each other, which is beneficial to heat convection and accelerates the uniform heating of the heat transfer oil in the lower layer of the storage space. When the heat transfer oil in the enclosed space is depressurized, the second spring 504 recovers its deformation, pulling the lower piston plate 503 to move vertically downward and reset. Here, the piston plate 503 is made of high-temperature resistant ceramic material, the sealing ring sleeved on the outside of the piston plate 503 is made of silicon boron rubber, and the second spring 504 is made of nickel-based alloy material, all of which have high-temperature resistant properties.

[0028] like Figure 7 and Figure 8 As shown, optionally, an oil inlet pipe 600 is fixedly installed in the middle of the piston plate 503, the lower end of the oil inlet pipe 600 is located in a confined space, a one-way valve 601 is fixedly installed on the lower end of the oil inlet pipe 600, the oil inlet pipe 600 is slidingly connected to the middle of the upper end of the ceramic tube 501, and a limiting ring 502 is coaxially fixed on the inner wall of the ceramic tube 501.

[0029] When the piston plate 503 moves downward to the upper end of the limit ring 502, it is limited. At this time, the piston plate 503 cannot move downward any further. Since there is very little heat transfer oil in the confined space at this time, negative pressure will be generated in the confined space, thereby driving the upper end of the oil inlet pipe 600 to autonomously extract the upper layer of heat transfer oil in the storage space, so that the heat transfer oil is automatically filled into the confined space, so as to facilitate thermal expansion and spraying again, thereby accelerating the uniform heating of the upper and lower layers of heat transfer oil in the storage space. Here, the one-way valve 601 ensures that the oil inlet pipe 600 can transport oil into the confined space but cannot discharge oil.

[0030] like Figure 7 and Figure 8As shown, optionally, a fixed plate 700 is provided at the upper end of the first microhole 505, and a lifting plate 701 is provided at the upper end of the fixed plate 700. The outer side of the fixed plate 700 is fixed on the inner wall of the ceramic tube 501, and the outer side of the lifting plate 701 is slidably connected to the inner wall of the ceramic tube 501. A plurality of evenly distributed and through-going second microholes 703 are opened in the inner circumference of the side wall of the ceramic tube 501. The second microhole 703 is located between the upper end of the fixed plate 700 and the bottom end of the lifting plate 701. A third spring 702 is fastened between the middle part of the upper end of the fixed plate 700 and the middle part of the bottom end of the lifting plate 701.

[0031] In this embodiment, after the heat transfer oil in the storage space is evenly heated, the heat transfer oil will cause its pressure to increase due to thermal expansion. At this time, the expanded heat transfer oil enters the space between the middle of the upper end of the fixed plate 700 and the bottom end of the lifting plate 701 through the second micropore 703. As the oil pressure increases, the lifting plate 701 is pushed to move vertically upward, and the expanded heat transfer oil is stored by increasing the volume of the accommodating space. The expanded heat transfer oil in the storage space is stored through multiple ceramic tubes 501, dispersing the pressure in the storage space. By reserving expansion space, the heat transfer oil is prevented from overflowing after heating.

[0032] like Figure 7 and Figure 8 As shown, optionally, the lower end of the ceramic tube 501 is formed into a tapered section, and the bottom end of the tapered section of the ceramic tube 501 is fixed to the upper end surface of the copper base 500.

[0033] In this embodiment, the copper base 500 is connected to the straight section of the ceramic tube 501 through the transition of the tapered portion of the ceramic tube 501. Since the inner diameter of the straight section of the ceramic tube 501 is smaller than the diameter of the copper base 500, the large area of ​​heat conduction through the copper base 500 accelerates the expansion of the heat transfer oil in the enclosed space.

[0034] like Figure 1 and Figure 2 As shown, optionally, a locking ring 101 is fixed to the lower end of the outer periphery of the upper disk body 100 , and the locking ring 101 and the upper end of the lower disk body 200 are fastened to each other by a plurality of bolts 102 .

[0035] In this embodiment, multiple bolts 102 are provided to facilitate the disassembly or installation of the upper plate 100 and the lower plate 200.

[0036] like Figure 2 and Figure 3 As shown, optionally, an outer ring is molded on the outer periphery of the tray 400, and a plurality of evenly distributed first springs 401 are fixed along the circumferential direction at the bottom end of the outer ring. An inner ring is molded on the inner side of the upper disk body 100, and the bottom end of the first spring 401 is fixed to the upper end face of the inner ring. The outer ring of the tray 400 is slidably connected to the inner side of the upper disk body 100.

[0037] In this embodiment, when the upper disk body 100 and the lower disk body 200 are installed with each other, the bottom end of the tray 400 presses the upper end of the heating wire 300. At this time, the first spring 401 is in an upward stretched state, and the heating wire 300 can be placed at any position. Here, the sealing ring of the outer ring of the tray 400 is silicon boron rubber, and the first spring 401 is a nickel-based alloy material.

[0038] like Figure 3 As shown, optionally, both ends of the heating wire 300 are provided with connection terminals, which are used to electrically connect to an external power source.

[0039] In this embodiment, the heating wire 300 is energized through an external power source and a connection terminal, which is a prior art and will not be described in detail.

[0040] like Figure 1-8 As shown, a method for preparing a ceramic heating plate is based on the above ceramic heating plate, and the steps are: S1: The upper plate 100, lower plate 200, tray 400, ceramic tube 501, and piston plate 503 are manufactured by sintering. An annular groove is formed on the outer periphery of the piston plate 503. A sealing ring is then installed in the annular groove. The piston plate 503 is then installed inside the ceramic tube 501, and the lower end is filled with heat transfer oil. The ceramic tubes 501 are then fixed to the bottom end of the tray 400 by brazing. S2: Then, the tray 400 is installed inside the upper plate 100, and the storage space between the upper plate 100 and the tray 400 is filled with heat transfer oil; S3: Then place the heating wire 300 on the inner bottom surface of the lower plate 200, with connection terminals left at both ends of the heating wire 300, and then install the upper plate 100 and the lower plate 200 to each other, and during installation, press the bottom end of the tray 400 against the upper end of the heating wire 300.

[0041] Although the present invention is disclosed as above, the protection scope of the present invention is not limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the protection scope of the present invention.

Claims

1. A ceramic heating plate, characterized in that: The invention comprises an upper disk body (100), a lower disk body (200), a heating wire (300), a tray (400), a ceramic tube (501) and a piston plate (503), wherein the tray (400) is arranged on the inner side of the upper disk body (100), and the heating wire (300) is placed on the inner side of the lower disk body (200). When the upper disk body (100) and the lower disk body (200) are installed with each other, the bottom end of the tray (400) is driven to press the heating wire (300). A plurality of ceramic tubes (501) are evenly arranged on the inner side of the tray (400). The upper disk body (100) and the tray (400) The storage space formed between the piston plate (503) is filled with heat-conducting oil, and the piston plate (503) is arranged inside the ceramic tube (501). The closed space formed by the bottom end thereof and the side wall of the ceramic tube (501) is filled with heat-conducting oil. When the heat-conducting oil in the closed space is in an expanded state, the piston plate (503) is driven to move vertically upward. When the piston plate (503) moves upward to a preset position, the heat-conducting oil in the expanded state is sprayed autonomously to the lower layer in the storage space. When the heat-conducting oil in the closed space is depressurized, the piston plate (503) is reset and the closed space autonomously extracts the heat-conducting oil in the upper layer of the storage space.

2. A ceramic heating plate according to claim 1, characterized in that: The bottom end of the ceramic tube (501) is coaxially fixedly connected to a copper base (500), and the copper base (500) is fixedly installed in a hole opened at the bottom end of the tray (400). The size of the copper base (500) matches that of the hole. The enclosed space formed by the bottom end of the piston plate (503), the side wall of the ceramic tube (501) and the upper end of the copper base (500) is filled with heat transfer oil.

3. A ceramic heating plate according to claim 1, characterized in that: The outer side of the piston plate (503) is slidably connected to the inner wall of the ceramic tube (501); a second spring (504) is fixedly connected to the middle of the bottom end of the piston plate (503); the bottom end of the second spring (504) is fixedly connected to the middle of the end face of the copper base (500); and a plurality of uniformly distributed and through-going first micropores (505) are opened in the side wall of the ceramic tube (501) along the circumferential direction of the axis.

4. A ceramic heating plate according to claim 1, characterized in that: An oil inlet pipe (600) is fixedly installed in the middle of the piston plate (503), the lower end of the oil inlet pipe (600) is located in a closed space, a one-way valve (601) is fixedly installed on the lower end of the oil inlet pipe (600), the oil inlet pipe (600) is slidably connected to the middle of the upper end of the ceramic tube (501), and a limiting ring (502) is coaxially fixed on the inner side wall of the ceramic tube (501).

5. A ceramic heating plate according to claim 3, characterized in that: A fixed plate (700) is provided at the upper end of the first microhole (505), and a lifting plate (701) is provided at the upper end of the fixed plate (700). The outer side of the fixed plate (700) is fixed on the inner side wall of the ceramic tube (501), and the outer side of the lifting plate (701) is slidably connected to the inner side wall of the ceramic tube (501). A plurality of evenly distributed and through-going second microholes (703) are opened in the inner circumference of the side wall of the ceramic tube (501). The second microholes (703) are located between the upper end of the fixed plate (700) and the bottom end of the lifting plate (701). A third spring (702) is fastened between the middle part of the upper end of the fixed plate (700) and the middle part of the bottom end of the lifting plate (701).

6. A ceramic heating plate according to claim 2, characterized in that: The lower end of the ceramic tube (501) is formed into a tapered section, and the bottom end of the tapered section of the ceramic tube (501) is fixed to the upper end surface of the copper base (500).

7. The ceramic heating plate according to claim 1, characterized in that: A locking ring (101) is fixedly provided at the lower end of the outer periphery of the upper disk body (100), and the locking ring (101) and the upper end of the lower disk body (200) are fastened to each other via a plurality of bolts (102).

8. The ceramic heating plate according to claim 1, wherein: The tray (400) is formed with an outer ring on its outer periphery, and a plurality of evenly distributed first springs (401) are fixedly arranged at the bottom end of the outer ring along the circumferential direction. The inner side of the upper disk body (100) is formed with an inner ring, and the bottom end of the first spring (401) is fixedly arranged on the upper end surface of the inner ring. The outer ring of the tray (400) is slidably connected to the inner side of the upper disk body (100).

9. The ceramic heating plate according to claim 1, characterized in that: Both ends of the heating wire (300) are provided with connection terminals, which are used to electrically connect to an external power source.

10. A method for preparing a ceramic heating plate, based on the ceramic heating plate according to any one of claims 1 to 9, characterized in that: The steps are: S1: an upper plate body (100), a lower plate body (200), a tray (400), a ceramic tube (501) and a piston plate (503) are manufactured by sintering. An annular groove is provided on the outer periphery of the piston plate (503). A sealing ring is then installed in the annular groove. The piston plate (503) is then installed inside the ceramic tube (501). The lower end of the piston plate (503) is filled with heat transfer oil. The ceramic tubes (501) are then fixed to the bottom end of the tray (400) by brazing. S2: Then, the tray (400) is installed inside the upper plate (100), and the storage space between the upper plate (100) and the tray (400) is filled with heat transfer oil; S3: Then, the heating wire (300) is placed on the inner bottom surface of the lower plate (200), with connection terminals left at both ends of the heating wire (300), and then the upper plate (100) and the lower plate (200) are installed with each other, and during installation, the bottom end of the tray (400) is pressed against the upper end of the heating wire (300).

Images