Finishing and grinding pad mechanism with stable function
The design of the flexible ring and metal pressure cover solves the problem of inconsistency on the polishing pad surface, achieving consistency in the polishing pad surface topography and improved grinding accuracy.
Patent Information
- Application Number
- CN202410486623.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-22
- Publication Date
- 2025-10-24
AI Technical Summary
In the existing dressing mechanism, the adaptive ring structure is unstable and has a high center of gravity. After the dressing pad is installed, it is not concentric with the pivot, resulting in inconsistent surface morphology of the polishing pad, which affects the accuracy of chemical mechanical polishing.
The flexible ring structure with the pivot coaxial with the mounting base, combined with the metal gland and gas filling chamber design, ensures that the dressing pad exerts uniform force on the polishing pad, improving the consistency of the polishing pad surface topography.
The polishing pad has good surface topography consistency, high grinding accuracy, and improved chemical mechanical polishing accuracy.
Smart Images
Figure CN120828362A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of chemical mechanical polishing, in particular to a functional stable dressing and grinding pad mechanism. BACKGROUND
[0002] Chemical mechanical polishing (CMP) is also known as chemical mechanical planarization (CMP), and a CMP device includes a polishing disc, a polishing pad attached to the polishing disc, a carrier head that adsorbs a wafer and drives the wafer to rotate, a dresser that dresses the polishing pad, a polishing liquid supply device that provides a polishing liquid to the surface of the polishing pad, and a loading bracket.
[0003] During the CMP process, the polishing pad changes with use, resulting in inconsistent characteristics at different positions, and the polishing pad surface deformation caused by dressing needs to be flattened by using the dresser to ensure the consistency of the polishing pad surface topography during polishing, thereby keeping the polishing removal rate stable.
[0004] In the currently used dressing mechanism, the self-adaptive ring structure is unstable, the center of gravity is high, the dressing pad head is off-center after installation with the pivot, and the bending stiffness is large, so that the force applied by the dressing pad on the polishing pad is uneven, the consistency of the polishing pad surface topography is poor, and the precision of the CMP is affected. Therefore, the present application provides a functional stable dressing and grinding pad mechanism. SUMMARY
[0005] The purpose of the present application is to solve the problems existing in the prior art and provide a functional stable dressing and grinding pad mechanism.
[0006] In order to achieve the above-mentioned purpose, the present application adopts the following technical scheme: a functional stable dressing and grinding pad mechanism, comprising a pivot, an outer shell, a mounting base, and a flexible ring, the pivot is coaxial with the mounting base, and the bottom end of the pivot is slidingly connected with the mounting base, the bottom of the outer shell is fixedly installed with the top of the mounting base; The outer ring of the flexible ring is fixedly connected with the top of the mounting base, the outer side of the pivot is fixedly connected with a connecting sleeve, and the inner ring of the flexible ring is fixedly connected with the connecting sleeve, so that a cavity is formed between the lower part of the flexible ring and the upper part of the mounting base.
[0007] Further description of the above technical scheme: The bottom of the outer shell is fixedly connected with a metal gland, the metal gland is fixedly installed with the mounting base by bolts, and the flexible ring is pressed between the metal gland and the mounting base.
[0008] Further description of the above technical scheme: The top of the connecting sleeve is provided with a sliding part, and the shell is in sliding connection with the sliding part.
[0009] As a further description of the above technical solution: The bottom of the connecting sleeve is provided with a mounting part, the inner ring of the flexible ring is sleeved on the mounting part, and the flexible ring is fixedly connected to the mounting part by a compression ring which is threadedly connected to the mounting part.
[0010] As a further description of the above technical solution: The top center of the mounting base is fixedly connected with a center protrusion, the top of the center protrusion is provided with an axial circular groove, the bottom end center hole of the pivot is fixedly installed with a connecting nail, the bottom end plate of the connecting nail is located in the axial circular groove and slides, the top of the center protrusion is fixedly installed with an annular limiting piece, and the inner ring diameter of the annular limiting piece is smaller than the bottom end plate diameter of the connecting nail.
[0011] As a further description of the above technical solution: The annular limiting piece comprises a pressing-down piece and a mounting piece, the axial circular groove is a stepped hole, the pressing-down piece is arranged on the inner side of the axial circular groove, and the mounting piece is fixedly connected to the top of the center protrusion.
[0012] As a further description of the above technical solution: The mounting piece is a rubber ring.
[0013] The present application has the following advantages: 1. Compared with the prior art, the functional stable trimming and grinding pad mechanism is characterized in that the outer ring of the flexible ring is fixedly connected to the top of the mounting base, the outer side of the pivot is fixedly connected with the connecting sleeve, and the inner ring of the flexible ring is fixedly connected to the connecting sleeve, so that a cavity is formed between the lower part of the flexible ring and the upper part of the mounting base. The cavity has a structure of being small at the top and large at the bottom, and the bottom is the cross section of the mounting base, so that the gravity center of the cavity is lowered to the lowest position. When the cavity is filled with gas, the pivot and the mounting base can be coaxial (the pivot is vertical, and the mounting base needs to be horizontal), so that the trimming pad can uniformly exert force on the polishing pad, the surface morphology of the polishing pad is good in consistency, and the grinding precision is high.
[0014] 2. Compared with the prior art, the functional stable trimming and grinding pad mechanism is characterized in that the inner side of the shell is fixedly connected with a metal compression cover. The extrusion surface at the bottom of the metal compression cover can tightly fix the outer ring of the flexible ring. The metal compression cover made of metal material is not easy to deform, and compared with the traditional integrated shell, the connection of the flexible ring is more stable. BRIEF DESCRIPTION OF DRAWINGS
[0015] Figure 1 A perspective view of a functional stable trimming and grinding pad mechanism is provided. Figure 2 A front view of a functional stable dressing and grinding pad mechanism according to the present application; Figure 3 A front view of a functional stable dressing and grinding pad mechanism according to the present application; Figure 2 A sectional view of the section line A-A in the figure; Figure 4 A front view of a functional stable dressing and grinding pad mechanism according to the present application; Figure 3 A local enlarged view of the section B in the figure; Figure 5 An exploded view of the connecting structure of the dressing pad and the pivot of a functional stable dressing and grinding pad mechanism according to the present application.
[0016] Legend: 1, housing; 2, pivot; 3, mounting base; 4, flexible ring; 5, metal gland; 6, connecting sleeve; 7, sliding part; 8, mounting part; 9, compression ring; 10, center protrusion; 11, shaft center circular groove; 12, connecting nail; 13, pressing piece; 14, mounting piece. DETAILED DESCRIPTION
[0017] With reference to Figures 1-5 , the present application provides a functional stable dressing and grinding pad mechanism, which comprises a pivot 2, a housing 1, a mounting base 3, a flexible ring 4, the pivot 2 is coaxial with the mounting base 3, and the bottom end of the pivot 2 is slidingly connected with the mounting base 3, so that the mounting base 3 can move up and down relative to the pivot 2, the bottom of the housing 1 is fixedly installed with the top of the mounting base 3, the outer ring of the flexible ring 4 is fixedly connected with the top of the mounting base 3, the outer side of the pivot 2 is fixedly connected with a connecting sleeve 6, and the inner ring of the flexible ring 4 is fixedly connected with the connecting sleeve 6, so that a cavity is formed between the lower part of the flexible ring 4 and the upper part of the mounting base 3.
[0018] The pivot 2 is a hollow structure, and gas is filled into the cavity between the lower part of the flexible ring 4 and the upper part of the mounting base 3 according to needs, the gas expands to press down the mounting base 3, the bottom of the mounting base 3 is fixedly installed with a dressing pad, so that the force of the dressing pad pressing on the polishing pad is uniform, thereby the consistency of the surface topography of the polished polishing pad after dressing is good, and the precision of chemical mechanical polishing is high.
[0019] In an embodiment, a metal gland 5 is fixedly connected with the bottom end of the housing 1, the metal gland 5 is fixedly installed with the mounting base 3 through bolts, and the flexible ring 4 is pressed between the metal gland 5 and the mounting base 3. The thickness of the threaded hole opened on the metal gland 5 is low from the edge, the metal gland 5 can ensure that it is not easy to deform, and compared with a traditional integrated shell, the structure stability is good, and the metal gland 5 is pressed on the flexible ring 4, so that the sealing and fixing are good.
[0020] In an embodiment, a sliding part 7 is arranged on the top of the connecting sleeve 6, and the housing 1 is slidingly connected with the sliding part 7, so as to improve the stability of the structure of the housing 1 itself.
[0021] In one embodiment, a mounting portion 8 is provided at the bottom of the connecting sleeve 6, the inner ring of the flexible ring 4 is sleeved on the mounting portion 8, and is tightened and fixed by a pressure ring 9 threadedly connected to the mounting portion 8. The pressure ring 9 is installed from bottom to top and needs to be installed before the outer ring of the flexible ring 4 is installed. The installation structure is simple and convenient.
[0022] In one embodiment, a center protrusion 10 is fixedly connected to the top center position of the mounting base 3, and an axial circular groove 11 is opened on the top of the center protrusion 10. A connecting pin 12 is fixedly installed on the bottom center hole of the pivot 2. The connecting pin 12 is threadedly connected to the pivot 2. The interior of the pivot 2 needs to ensure that the chamber formed between the bottom of the flexible ring 4 and the top of the mounting base 3 is connected. Specifically, two methods can be adopted. The threaded connection part of the connecting pin 12 has a slit opening, and the connecting pin 12 itself has a gap space. The bottom end plate of the connecting pin 12 slides in the axial circular groove 11. The bottom end plate of the connecting pin 12 is spherical or annular. An annular limiting member is fixedly installed on the top of the center protrusion 10. The inner ring diameter of the annular limiting member is smaller than the diameter of the bottom end plate of the connecting pin 12. It is used to limit the lowest position of the mounting base 3. When in actual use, the polishing pad is dragged by the polishing disk to support the mounting base 3, and the mounting base 3 will not move down to the lowest position.
[0023] In one embodiment, the annular limiting member includes a pressing member 13 and a mounting member 14. The axial circular groove 11 is a stepped hole. The pressing member 13 is arranged on the inner side of the axial circular groove 11. The mounting member 14 is fixedly connected to the top of the center protrusion 10. The mounting member 14 is used to limit the up and down movement of the pressing member 13. The pressing member 13 limits the up and down movement of the bottom end plate of the connecting nail 12. The mounting member 14 is a rubber ring, which provides an elastic downward force, and the use effect is better.
[0024] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A functional stable dressing and polishing pad mechanism comprising a pivot (2), a housing (1), a mounting base (3), characterized in that, The pivot (2) is coaxial with the mounting base (3), and the bottom end of the pivot (2) is slidingly connected with the mounting base (3), the bottom of the shell (1) is fixedly installed with the top of the mounting base (3), and the shell (1) further comprises: A flexible ring (4) is fixedly connected with the top of the mounting base (3), the outer side of the pivot (2) is fixedly connected with a connecting sleeve (6), the inner ring of the flexible ring (4) is fixedly connected with the connecting sleeve (6), so that a cavity is formed between the lower part of the flexible ring (4) and the upper part of the mounting base (3).
2. The mechanism for a functional stabilized dressing pad according to claim 1, wherein: The bottom of the shell (1) is fixedly connected with a metal gland (5), the metal gland (5) is fixedly installed with the mounting base (3) through bolts, and the flexible ring (4) is pressed between the metal gland (5) and the mounting base (3).
3. The mechanism for a functional stabilized dressing pad according to claim 1, wherein: The top of the connecting sleeve (6) is provided with a sliding part (7), and the shell (1) is slidingly connected with the sliding part (7).
4. The mechanism for a functional stabilized dressing pad according to claim 1, wherein: The bottom of the connecting sleeve (6) is provided with a mounting part (8), the inner ring of the flexible ring (4) is sleeved on the mounting part (8), and the flexible ring (4) is fixedly pressed by a compression ring (9) threadedly connected on the mounting part (8).
5. The mechanism for a functional stabilized dressing pad according to claim 1, wherein: The top center of the mounting base (3) is fixedly connected with a center protrusion (10), the top of the center protrusion (10) is provided with an axial circular groove (11), the bottom end center hole of the pivot (2) is fixedly installed with a connecting nail (12), the bottom end plate of the connecting nail (12) is slidingly arranged in the axial circular groove (11), the top of the center protrusion (10) is fixedly installed with an annular limiting member, and the inner ring diameter of the annular limiting member is smaller than the diameter of the bottom end plate of the connecting nail (12).
6. The mechanism for a functional stabilized dressing pad according to claim 5, wherein: The annular limiting member comprises a pressing member (13) and a mounting member (14), the axial circular groove (11) is a stepped hole, the pressing member (13) is arranged on the inner side of the axial circular groove (11), and the mounting member (14) is fixedly connected with the top of the center protrusion (10).
7. The mechanism for a functional stabilized trim pad according to claim 6, wherein: The mounting member (14) is a rubber ring.