Pressurizing device

Abstract

The invention provides a pressurizing device capable of controlling the pressure distribution of a pressed surface. This pressurizing device (1, 1A) is provided with: a first pressurizing member (4, 14); a second pressing member (6, 16) disposed below the first pressing member; intermediate members (5, 15, 5B-5E) disposed adjacent to the first pressing member and the second pressing member between the first pressing member and the second pressing member; and planar upper pressing surfaces (71a, 171a) made of metal. The intermediate member is provided with: contact regions (R1, R11) that come into contact with the second pressing member; and non-contact regions (R2, R12) that do not come into contact with the second pressing member. The upper pressing surface is provided with pressing surface regions (R3, R13) that come into contact with the workpiece. The contact region is disposed adjacent to the non-contact region when viewed from the vertical direction, and is disposed further inward than a first outer peripheral line (Lo1) indicated by the outer peripheral line of the pressure surface region.

Description

TECHNICAL FIELD

[0001] The present application relates to a pressurizing device. BACKGROUND

[0002] A pressurizing device is used as a device for pressurizing a laminate in which a plurality of sheet-like substrates (for example, green sheets of a multilayer ceramic capacitor, a printed circuit board, and the like) are laminated. The pressurizing device pressurizes the laminate (a pressurized object) with a pair of pressurizing units from above and below with a prescribed pressurizing force. The press surfaces of the molds in the pressurizing units, which come into contact with the laminate, are formed in a planar shape in parallel with each other so that uniform surface pressure is applied to the entire upper and lower surfaces of the laminate when the laminate is pressurized.

[0003] It is known that, in such a pressurizing device, there is a phenomenon in which the pressure applied to the press surface of the workpiece becomes significantly high at the outer edge portion and becomes low from the outer edge portion toward the central portion when the workpiece is pressurized (a phenomenon in which the outer edge portion of the press surface is strongly pressed) (for example, refer to Patent Literature 1). If this phenomenon occurs, the press surface of the workpiece is not uniformly pressurized, and deformation of the workpiece (such as deformation in which the central portion of the workpiece expands more than the outer edge portion of the workpiece) can occur. As a main cause of this phenomenon, the deflection of the pressurizing unit (mold) that occurs when pressurizing can be cited. In particular, in the case where the size of the workpiece is small relative to the size of the press surface, since the edge portion of the workpiece functions like a “lever fulcrum”, this phenomenon easily occurs.

[0004] PRIOR ART DOCUMENTS

[0005] PATENT LITERATURE

[0006] Patent Literature 1: Japanese Patent Application Laid-Open No. 2020-146703 SUMMARY

[0007] Generally, in order to suppress this phenomenon, a design in which the rigidity of the mold itself is increased by increasing the thickness of the mold having a press surface is adopted. In this design, the mold is upsized, and the weight of the mold increases. Therefore, workability at the time of manufacturing the pressurizing device and at the time of maintenance thereof deteriorates. In addition, the processing of the mold (particularly, the press surface) becomes difficult, and the materials that can be used as the mold are limited. Furthermore, even in this design, the above-described phenomenon still occurs. Therefore, a technique that is different from the technique of increasing the thickness of the mold and that can improve the phenomenon in which the outer edge portion of the press surface is strongly pressed is required. As described above, it is difficult to control the pressure distribution of the press surface using a mold having a planar press surface.

[0008] An object of the present application is to provide a pressurizing device that can control the pressure distribution of a press surface.

[0009] One aspect of the present application is a pressurizing device that sandwiches a work in the up-down direction to pressurize the work, wherein the pressurizing device has an upper pressurizing unit disposed above the work, the upper pressurizing unit having: a first pressurizing member; a second pressurizing member disposed at a position lower than the first pressurizing member; a plate-shaped intermediate member disposed between the first pressurizing member and the second pressurizing member so as to abut against the first pressurizing member and the second pressurizing member; and a planar upper pressing surface made of metal that comes into contact with the work when the work is pressurized, the intermediate member having: an abutting region that abuts against the second pressurizing member; and a non-abutting region that does not abut against the second pressurizing member, the upper pressing surface having a pressing surface region that comes into contact with the work when the work is pressurized, the abutting region being disposed at a position closer to the inside than a first outer peripheral line indicated by an outer peripheral line of the pressing surface region when viewed in the up-down direction.

[0010] Effects of the Invention

[0011] According to the present application, a pressurizing device capable of controlling the pressure distribution of a pressurized surface is provided. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 is a schematic cross-sectional view of a pressurizing device illustrating an embodiment of the pressurizing device of the present application.

[0013] Figure 2 is Figure 1 is a schematic plan view of an upper pressurizing unit of the pressurizing device of

[0014] Figure 3 is a schematic view illustrating the positional relationship of regions defined in the pressurizing device of Figure 1

[0015] Figure 4 is a schematic view illustrating the test conditions and test results of the embodiment of the present application.

[0016] Figure 5 is a pressure distribution diagram illustrating the test results of the above embodiment.

[0017] Figure 6 is a schematic plan view of an intermediate member of the pressurizing device of Figure 1 Figure 6 (a) of is a schematic plan view of a first type, Figure 6 (b) of is a schematic plan view of a second type, Figure 6 (c) of is a schematic plan view of a third type, Figure 6 (d) of is a schematic plan view of a fourth type. ​​

[0018] Figure 7 Shows the stress transfer state of the simulator, Figure 7 (a) shows the transfer state when a workpiece smaller than the area of ​​the configuration area is pressurized. Figure 7 (b) shows a transfer state when a workpiece larger than the area of ​​the arrangement region is pressurized.

[0019] Figure 8 It is a schematic diagram explaining the factors that improve the imbalance of pressure distribution.

[0020] Figure 9 This is a schematic cross-sectional view of a pressurizing device showing a first modified example of the pressurizing device of the present invention.

[0021] Figure 10 1 is a schematic bottom view of the intermediate member in the second to fifth modified examples of the pressurizing device of the present invention. Figure 10 (a) shows the intermediate component in the second modification, Figure 10 (b) shows the intermediate component in the third modification, Figure 10 (c) shows the intermediate component in the fourth modification, Figure 10 (d) shows the intermediate component in the fifth modification.

[0022] Description of Reference Numerals

[0023] 1: Pressurization device

[0024] 2: Basic component (first pressurizing component)

[0025] 4: First buffer member (first pressurizing member)

[0026] 5: Middle part

[0027] 5c, 5c1 to 5c12: Non-contact surface

[0028] 5d, 5d1~5d9: contact surface

[0029] 6: Second cushioning member (second pressurizing member)

[0030] 7: Upper pressure plate (second pressure component, third pressure component)

[0031] 71a: Lower surface (upper pressure surface)

[0032] 12: Second base component (first pressurizing component)

[0033] 14: Third cushioning member (first pressurizing member)

[0034] 15: Second middle part (middle part)

[0035] 15c: Non-contact surface

[0036] 15d: abutting surface

[0037] 16: 4th cushion member (2nd pressure member)

[0038] 17: upper pressure plate (2nd pressure member, 3rd pressure member)

[0039] 171a: lower surface (upper pressure surface)

[0040] R1: abutting region

[0041] R2: non-abutting region

[0042] R11: abutting region

[0043] R12: non-abutting region

[0044] Rx: arrangement region

[0045] R3a: partial pressure region

[0046] R3b: other region DETAILED DESCRIPTION

[0047] Embodiments of a pressure device of the present application (hereinafter referred to as "the present device") will be described below. In the following description, reference is made to the respective drawings as appropriate. In the respective drawings, like parts and elements are denoted by like reference numerals, and repeated description is omitted. In addition, for ease of description, the dimensions of the respective elements are exaggerated in some cases, and are not limited to the proportions shown in the respective drawings.

[0048] In the following description and drawings, unless specifically emphasized, when three axes orthogonal to each other in space are respectively the X-axis, the Y-axis, and the Z-axis, the X-axis and the Y-axis are parallel to the horizontal direction, and the Z-axis is parallel to the vertical direction. The "X-axis direction" is the direction along the X-axis, the "+X direction" is one of the X-axis directions, and the "-X direction" is the other of the X-axis directions. The "Y-axis direction" is the direction along the Y-axis, the "+Y direction" is one of the Y-axis directions, and the "-Y direction" is the other of the Y-axis directions. The "Z-axis direction" is the direction along the Z-axis, which is the vertical direction. The "+Z direction" is upward, and the "-Z direction" is downward. The "XY direction" is the direction along the X-axis direction and the Y-axis direction, and the "XY plane" is a virtual plane parallel to the XY direction (horizontal direction). The "XZ direction" is the direction along the X-axis direction and the Z-axis direction, and the "XZ plane" is a virtual plane parallel to the XZ direction (plumb direction).

[0049] In the following description, the lower surface is a surface facing downward and parallel to the XY direction. The upper surface is a surface facing upward and parallel to the XY direction. That is, the lower surface and the upper surface are planar. In addition, the thickness of each component is the length of each component in the vertical direction.

[0050] The present application can improve the phenomenon that the outer edge portion of the pressed surface of the workpiece is strongly pressed by adjusting the transmission of stress in each component to the pressing surface in a pressing device that presses the workpiece from the vertical direction using a planar pressing surface. In addition, the present application can control the pressure distribution of the pressed surface of the workpiece by controlling the stress transmitted to the pressing surface.

[0051] The "phenomenon that the outer edge portion of the pressed surface of the workpiece is strongly pressed" refers to the phenomenon that the pressure applied to the outer edge portion of the pressed surface of the workpiece becomes significantly high at the outer edge portion and gradually decreases from the outer edge portion to the central portion when the workpiece is pressed by the planar pressing surface. Hereinafter, this phenomenon will be simply referred to as the "strong pressing phenomenon of the outer edge portion".

[0052] The "workpiece" refers to an object (a pressed object) to be pressed by the present device, such as a sheet-shaped base material (a ceramic green sheet or the like), an electronic component, a substrate on which a circuit or the like is mounted, or the like. The workpiece has a pressed surface. The pressed surface refers to the upper surface that is pressed from above by the present device.

[0053] Pressing device

[0054] Structure of the pressing device

[0055] Figure 1 is a schematic cross-sectional view of the present device showing an embodiment of the present device.

[0056] This figure shows a cross-sectional surface of the present device 1 along the XZ plane in which the central portion of the present device 1 in the Y-axis direction is cut (see FIG. 1). Figure 9 Also, this figure shows the pressing surface region R3 described later with a thicker dashed line.

[0057] The present device 1 presses the workpiece W while sandwiching the workpiece W in the vertical direction. The present device 1 has a base component 2, a frame component 3, a first buffer component 4, an intermediate component 5, a second buffer component 6, an upper pressing plate 7, a placement plate 8, a lower pressing plate 9, a lifting device 10, and a control device 11. The base component 2, the frame component 3, the first buffer component 4, the intermediate component 5, the second buffer component 6, and the upper pressing plate 7 are disposed at a position higher than the workpiece W and function as an upper pressing unit UP that presses the workpiece W from above. The placement plate 8 and the lower pressing plate 9 are disposed at a position lower than the workpiece W and function as a lower pressing unit DP that presses the workpiece W from below.

[0058] The base member 2 supports the first cushion member 4, the intermediate member 5, the second cushion member 6, and the upper pressing plate 7 via the frame member 3. The base member 2 is made of, for example, a metal (e.g., carbon steel) having high rigidity. The shape of the base member 2 is a rectangular shape (in this embodiment, a square shape) along the XY direction as viewed in the vertical direction, and the shape of the base member 2 is a cuboid shape. The base member 2 is supported by the lifting device 10 so as to be movable (lifted and lowered) in the vertical direction. The base member 2 has a lower surface 2a.

[0059] The frame member 3 houses a part of the first cushion member 4, the intermediate member 5, the second cushion member 6, and the upper pressing plate 7. The frame member 3 is made of a metal (e.g., stainless steel). The frame member 3 is attached to the lower surface 2a of the base member 2, for example, by a plurality of bolts (not shown). Thus, the frame member 3 can be easily attached to and detached from the base member 2 by detaching and attaching the bolts. The frame member 3 has a main body portion 31 and an inner flange portion 32.

[0060] The shape of the main body portion 31 is a rectangular shape (in this embodiment, a square shape) along the XY direction as viewed in the vertical direction, and the shape of the main body portion 31 is a cylindrical shape (a rectangular cylindrical shape). The inner circumferential surface 31a of the main body portion 31 faces the XY direction. In the horizontal direction, the main body portion 31 is disposed so as to surround the entire circumference of the first cushion member 4, the intermediate member 5, the second cushion member 6, and the upper pressing plate 7. The lower end portion of the inner circumferential surface 31a protrudes equally in the inward direction on the entire circumference, and forms the inner flange portion 32. That is, in the horizontal direction, the inner flange portion 32 protrudes from the main body portion 31 in the inward direction, and is formed integrally with the main body portion 31.

[0061] The inner flange portion 32 supports the first cushion member 4, the intermediate member 5, the second cushion member 6, and the upper pressing plate 7, and restricts the movement of the first cushion member 4, the intermediate member 5, the second cushion member 6, and the upper pressing plate 7 in the downward direction. As viewed in the vertical direction, the shape of the inner flange portion 32 is a frame shape (a rectangular frame shape). The inner flange portion 32 has an upper surface 32a and an inner circumferential surface 32b. The inner circumferential surface 32b is a surface parallel to the vertical direction, and faces the XY direction.

[0062] Note that, in the present embodiment, the shape of the inner flange portion 32 is not limited to a rectangular frame shape. That is, for example, the inner flange portion 32 can protrude from the main body portion 31 only in the X-axis direction or the Y-axis direction. In addition, for example, a plurality of rod-shaped portions protruding from the main body portion 31 at equal distances in the X-axis direction and / or the Y-axis direction can each function as the inner flange portion 32.

[0063] When the work W is pressed, the first cushion member 4 diffuses and equalizes the pressure applied to the first cushion member 4. In addition, when the work W is pressed, the first cushion member 4 suppresses the axial displacement (movement in the horizontal direction) of the intermediate member 5. The first cushion member 4 is made of an elastic material (for example, a known pressing cushion material) that is compressed in the vertical direction when the work W is pressed and is able to return to the state before the pressing of the work W ends. The shape of the first cushion member 4 is a rectangular shape (in this embodiment, a square shape) along the XY direction when viewed in the vertical direction, and the shape of the first cushion member 4 is a sheet shape. The first cushion member 4 is housed in the frame member 3. The first cushion member 4 is disposed in contact with the base member 2 below the base member 2. The first cushion member 4 has a lower surface 4a and an upper surface 4b. The first cushion member 4 is one example of the first pressing member in the present application.

[0064] The intermediate member 5, when the work W is pressed, controls the distribution of the pressure in the pressed surface Wa by concentrating the pressure applied to the intermediate member 5. The intermediate member 5 is made of, for example, a metal (for example, carbon steel) having a high rigidity. The shape of the intermediate member 5 is a rectangular shape (in this embodiment, a square shape) along the XY direction when viewed in the vertical direction, and the shape of the intermediate member 5 is a plate shape. The intermediate member 5 is housed in the frame member 3. The intermediate member 5 is disposed in contact with the first cushion member 4 below the first cushion member 4. The intermediate member 5 has a lower surface 5a, an upper surface 5b, a non-contact surface 5c, and a contact surface 5d.

[0065] The outer edge portion in the lower surface 5a is recessed upwardly on the entire circumference, and forms the non-contact surface 5c. The central portion in the lower surface 5a other than the non-contact surface 5c forms the contact surface 5d. In the vertical direction, the non-contact surface 5c is disposed at a position more upward than the contact surface 5d. The shape of the non-contact surface 5c is a rectangular shape (in this embodiment, a square shape) along the XY direction when viewed in the vertical direction, and the shape of the non-contact surface 5c is a frame shape (a rectangular frame shape). The shape of the contact surface 5d is a rectangular shape (in this embodiment, a square shape) along the XY direction when viewed in the vertical direction. The non-contact surface 5c and the contact surface 5d face downwardly, and are surfaces parallel to the XY direction.

[0066] The second cushion member 6 diffuses and equalizes the pressure applied to the second cushion member 6 when the workpiece W is pressed. In addition, the second cushion member 6 suppresses the axial displacement of the intermediate member 5 when the workpiece W is pressed. The second cushion member 6 is, for example, a known cushion material for pressing. In the present embodiment, the shape of the second cushion member 6 is the same as that of the first cushion member 4. The second cushion member 6 has a lower surface 6a and an upper surface 6b. The second cushion member 6 is housed in the frame member 3. The second cushion member 6 is arranged in contact with the intermediate member 5 below the intermediate member 5. The second cushion member 6 is one example of the second pressing member in the present application.

[0067] The upper pressing plate 7 presses the workpiece W downward when the workpiece W is pressed. The upper pressing plate 7 is, for example, made of a metal (for example, carbon steel) having high rigidity. The shape of the upper pressing plate 7 is a reverse hat shape when viewed from the side. The upper pressing plate 7 has an upper surface 7a, a main body portion 71, and an outer flange portion 72. The upper pressing plate 7 is one example of the third pressing member in the present application.

[0068] The shape of the main body portion 71 is a rectangular shape (in the present embodiment, a square shape) along the XY direction when viewed from the top and bottom directions, and the shape of the main body portion 71 is a plate shape. The main body portion 71 has a lower surface 71a and an outer peripheral surface 71b. The lower surface 71a is arranged in opposition to the workpiece W when the workpiece W is pressed, and is a surface that comes into contact with the pressed surface Wa of the workpiece W. That is, a part of the lower surface 71a is a region that comes into contact with the pressed surface Wa (hereinafter referred to as a "pressed surface region R3") when viewed from the top and bottom directions. In other words, the lower surface 71a has the pressed surface region R3. The lower surface 71a is one example of the upper pressing surface in the present application.

[0069] The upper half of the outer peripheral surface 71b protrudes outwardly in an equal manner over the entire circumference, and forms the outer flange portion 72. That is, in the horizontal direction, the outer flange portion 72 protrudes outwardly from the main body portion 71, and is formed integrally with the main body portion 71. Therefore, the upper surface 7a of the upper pressing plate 7 is formed by the upper surfaces of the main body portion 71 and the outer flange portion 72, respectively. The shape of the outer flange portion 72 is a frame shape (a rectangular frame shape). The outer flange portion 72 has a lower surface 72a.

[0070] Note that, in the present application, the shape of the outer flange portion 72 is not limited to the rectangular frame shape. That is, for example, the outer flange portion 72 can protrude only in the X-axis direction or the Y-axis direction from the outer peripheral surface 71c. That is, the outer flange portion 72 can protrude only from the outer peripheral surface 71b parallel to the X-axis direction or the Y-axis direction. In addition, for example, a plurality of rod-shaped portions that protrude from the main body portion 71 at equal distances in the X-axis direction and / or the Y-axis direction, etc. can each function as the outer flange portion 72.

[0071] The upper pressure plate 7 is housed in the frame member 3 except for the lower portion of the main body portion 71. That is, in the vertical direction, the lower portion (lower surface 71a) of the main body portion 71 is positioned more downward than the frame member 3. The upper pressure plate 7 is disposed in abutment with the second cushion member 6 below the second cushion member 6. The lower surface 72a of the outer flange portion 72 is in abutment with the upper surface 32a of the inner flange portion 32. As a result, the inner flange portion 32 restricts and supports the first cushion member 4, the intermediate member 5, the second cushion member 6, and the upper pressure plate 7 from moving downward.

[0072] The upper surface 4b of the first cushion member 4 is in abutment with the lower surface 2a of the base member 2, and the lower surface 4a is in abutment with the upper surface 5b of the intermediate member 5. The abutment surface 5d of the intermediate member 5 is in abutment with a portion of the upper surface 6b of the second cushion member 6. The non-abutment surface 5c is disposed in abutment with the upper surface 6b at a position more upward than the upper surface 6b. That is, the non-abutment surface 5c is not in abutment with the upper surface 6b. Thus, when viewed in the vertical direction, the abutment surface 5d in the intermediate member 5 forms an area (hereinafter referred to as "abutment area Rl") that is in abutment with the second cushion member 6, and the non-abutment surface 5c forms an area (hereinafter referred to as "non-abutment area R2") that is not in abutment with the second cushion member 6. That is, when viewed in the vertical direction, the abutment area Rl is an area in which the abutment surface 5d is disposed, and the non-abutment area R2 is an area in which the non-abutment surface 5c is disposed. The lower surface 6a of the second cushion member 6 is in abutment with the upper surface 7a of the upper pressure plate 7.

[0073] Figure 2 is a schematic plan view of the upper pressurizing unit UP.

[0074] For ease of explanation, the inner peripheral surface 31a, the first cushion member 4, the intermediate member 5, and the second cushion member 6 are shown by thicker double-dot chain lines, and the workpiece W and the pressure surface area R3 are shown by thinner double-dot chain lines in this drawing. In the following description, the abutment area Rl and the non-abutment area R2 of the intermediate member 5 are appropriately referred to together with the first cushion member 4 and the second cushion member 6. Figure 2 Figure 1 .

[0075] The relationship between the lengths of the members in the upper pressurizing unit UP in the X-axis direction and the Y-axis direction, that is, the XY direction, will be described. The length L2 of the base member 2 is greater than the length L3 of the frame member 3. The spacing L31 between the inner peripheral surfaces 31a of the main body portions 31 is the same as (slightly greater than) the length L4 of the first cushion member 4, the length L5 of the intermediate member 5, the length L6 of the second cushion member 6, and the length L72 of the outer flange portion 72 of the upper pressure plate 7. The length L4 of the first cushion member 4 is the same as the length L5 of the intermediate member 5, the length L6 of the second cushion member 6, and the length L72 of the outer flange portion 72 of the upper pressure plate 7. The length L71 of the main body portion 71 (that is, the lower surface 71a) is smaller than the spacing L32 between the inner peripheral surfaces 32b of the inner flange portions 32. ​

[0076] The length Lw of the pressed surface Wa of the workpiece W is smaller than the length L71 of the lower surface 71a. That is, the length LR3 of the pressing surface region R3 is smaller than the length L71 of the lower surface 71a. In other words, the workpiece size is smaller than the upper pressing surface size. The length L51 of the contact surface 5d of the intermediate component 5 is smaller than the length L71 of the lower surface 71a and the length Lw of the pressed surface Wa. That is, the length LR1 of the contact region R1 is smaller than the length LR3 of the pressing surface region R3.

[0077] Figure 3 It is a schematic diagram showing the positional relationship between the respective areas defined in the present device 1 when viewed from the top and bottom directions.

[0078] For ease of explanation, the figure shows the intermediate component 5 with a thicker solid line, the non-contact area R2 (non-contact surface 5c) with a gray area, the lower surface 71a with a thinner double-dashed line, and the pressing surface area R3 with a thicker double-dashed line. Figure 3 With appropriate reference Figure 1 and Figure 2 .

[0079] When viewed from above and below, the contact region R1 is positioned further inward than the first outer peripheral line Lo1, which is indicated by the outer peripheral line of the pressing surface region R3. When viewed from above and below, the contact region R1 is positioned adjacent to the non-contact region R2, being completely surrounded by the non-contact region R2. That is, when viewed from above and below, the first outer peripheral line Lo1 does not overlap with the contact region R1, but does overlap with the non-contact region R2.

[0080] In this embodiment, the intermediate member 5 includes a single abutment surface 5d. When viewed from above, the area where the abutment surface 5d is located (hereinafter referred to as "location area Rx") is confined to the pressing surface area R3 (i.e., the area demarcated by the first outer peripheral line Lo1). Specifically, the second outer peripheral line Lo2, indicated by the outer perimeter of the location area Rx, is located further inboard of the first outer peripheral line Lo1 and does not overlap with the first outer peripheral line Lo1. When viewed from above, the second outer peripheral line Lo2 has the same shape as the first outer peripheral line Lo1 (a square in this embodiment), forming a similar pattern.

[0081] In the following description, the main reference is to the accompanying drawings. Figure 1 .

[0082] The loading plate 8 is a member for loading the workpiece W. It is made of, for example, a metal with high thermal conductivity (e.g., a copper alloy). The loading plate 8 is square and plate-like, extending along the X and Y directions, when viewed from above and below. The loading plate 8 is placed on the lower platen 9. The loading plate 8 has an upper surface, or loading surface 8a.

[0083] The lower press plate 9 presses the work W upward in accordance with the pressing force from the upper pressing unit UP when the work W is pressed. The lower press plate 9 is made of, for example, a metal (e.g., carbon steel) having high rigidity. The shape of the lower press plate 9 is a square shape in the upward and downward direction, and the shape of the lower press plate 9 is a plate shape.

[0084] The lifting device 10 lifts the base member 2. The lifting device 10 is, for example, a known hydraulic cylinder.

[0085] The control device 11 controls the operation of the entire device 1.

[0086] In the device 1 thus configured, the frame member 3 is detachable with respect to the base member 2 by dismounting and mounting of the bolts. Therefore, by removing the frame member 3, the first buffer member 4, the intermediate member 5, and the second buffer member 6 can be easily replaced.

[0087] Note that in the present application, the shape of each of the base member 2, the frame member 3, the first buffer member 4, the intermediate member 5, the second buffer member 6, the upper press plate 7, the placement plate 8, and the lower press plate 9, when viewed in the upward and downward direction, is not limited to a square shape.

[0088] Operation of the pressing device

[0089] Next, the operation of the device 1 will be described as follows. In the following description, the above-described drawings will be appropriately referred to. Figures 1-3 .

[0090] First, the work W is placed on the placement surface 8a of the placement plate 8.

[0091] Next, the control device 11 controls the operation of the lifting device 10 to lower the upper pressing unit UP to a prescribed position. At this time, the lower surface 71a of the upper press plate 7 is in abutment with the work W. That is, the pressure surface region R3 is in abutment with the pressure receiving surface Wa.

[0092] Next, the control device 11 controls the operation of the lifting device 10 to further lower the upper pressing unit UP, and press the work W between the upper pressing unit UP and the lower pressing unit DP. At this time, as will be described later, the pressure applied from the first buffer member 4 to the intermediate member 5 is diffused and homogenized. The pressure applied from the intermediate member 5 to the second buffer member 6 is concentrated on the portion of the second buffer member 6 that is in abutment with the abutment surface 5d. The pressure applied from the second buffer member 6 to the upper press plate 7 is diffused and homogenized. The pressure applied from the upper press plate 7 to the work W is concentrated on the portion of the work W that is in abutment with the pressure surface region R3 (the pressure receiving surface Wa). As described above, as a result of the pressure being applied within each member, the edge portion of the work W does not function as a "lever fulcrum", and the strong pressing phenomenon of the outer edge portion does not occur. As a result, the pressure distribution in the pressure receiving surface Wa is homogenized.

[0093] In addition, when the workpiece W is pressurized, a pressure of several MPa to several tens of MPa is applied to the intermediate component 5. Generally speaking, when planar metal surfaces are in contact with each other and pressurized, if the pressurizing axis of the pressurizing side is offset relative to the normal direction of the metal surface on the pressurized side (if so-called axial offset occurs), the pressurized side cannot be pressurized flatly. Even if the components of the present device 1 are manufactured with precision, axial offset may occur due to various reasons. Therefore, assuming that the intermediate component 5 is in direct contact with the base component 2 and the upper pressing plate 7, axial offset may occur between the intermediate component 5 and the base component 2 and the upper pressing plate 7. In this embodiment, the first buffer component 4 is arranged between the base component 2 and the intermediate component 5, and the second buffer component 6 is arranged between the intermediate component 5 and the upper pressing plate 7. As mentioned above, the first buffer component 4 and the second buffer component 6 are made of elastic material, and their function is to align the axes therebetween. Therefore, the axial offset of the intermediate component 5 relative to the base component 2 and the axial offset of the intermediate component 5 relative to the upper pressing plate 7 are suppressed together.

[0094] Example

[0095] Next, as an embodiment and reference example of the present invention, the test results of a pressurization test performed by an existing pressurization device (test device) assembled with a first buffer component 4, an intermediate component 5, and a second buffer component 6 are described below. In the description of the following embodiments, pressure measurement is performed using "Prescale (registered trademark: hereinafter referred to as "scale") manufactured by Fujifilm Corporation. The pressure is 5 MPa. For the convenience of testing, the first buffer component 4 is not used except for some reference examples. In each reference example and some comparative examples, only the scale is pressurized. In all test conditions, the shape of the upper pressure plate 7 is a rectangular parallelepiped of 160 mm × 164 mm × 15 mm.

[0096] In the following description of the embodiments, reference is made to Figures 1-3 In the following description, for convenience of explanation, elements having the same functions as those in the previously described embodiment (hereinafter referred to as “first embodiment”) are denoted by the same names and reference numerals.

[0097] Figure 4 Schematic diagram showing test conditions and test results of an embodiment of the present invention.

[0098] Figure 5 is a pressure distribution diagram showing the test results.

[0099] Figure 6 is a schematic bottom view of the intermediate component 5 used in each embodiment, Figure 6 (a) is a schematic bottom view of the first type, Figure 6 (b) is a schematic bottom view of the second type, Figure 6(c) is a schematic bottom view of the third type. Figure 6 (d) is a schematic bottom view of the fourth type.

[0100] Figure 5 The color of each scale shows the magnitude of pressure, and as the color becomes darker, the pressure becomes greater. Figure 6 In FIG, a thick two-dot chain line indicates a second outer peripheral line Lo2. Gray areas indicate non-contact surfaces 5c, 5c1, and 5c2 described later.

[0101] (Test conditions)

[0102] First, yes Figure 4 The test conditions shown are explained below. "Type" shows the type of the intermediate component 5. The details of each type are as follows. Figure 6 As shown, refer to the following content. In "1st cushioning component" and "2nd cushioning component", "-" means not used, "A" means "flexible protective cloth: EPT1.0" manufactured by Shibata Industry Co., Ltd., and "B" means "hot pressing cushioning component: MF-20S" manufactured by Sanfu Industry Co., Ltd. In "Others", "*1" means that a heat insulating material made of PGX is used between the second cushioning component 6 and the upper pressing plate 7. "*2" means that the workpieces with a size of 30 mm are evenly arranged in 3 rows × 3 columns within the first outer peripheral line Lo1 of a 110 mm × 110 mm square. The interval between the workpieces is 5 mm. "*3" means that an upper pressing plate 7 with a thickness T1 of 10 mm is used. "Area ratio" means the ratio (Ax / A3) of the area "Ax" of the configuration area Rx to the area "A3" of the pressing surface area R3. The shape of the workpiece W is square. In the "Results" column, "◎" indicates that no strong pressure phenomenon occurred at the outer edge, and the pressure distribution on the pressed surface Wa was controlled to be relatively uniform. "○" indicates that the pressure uniformity was lower than "◎", but no strong pressure phenomenon occurred at the outer edge, and the pressure distribution on the pressed surface Wa was controlled to correspond to the shape of the intermediate component 5. "△" indicates that there was a tendency for strong pressure phenomenon at the outer edge, but this phenomenon was suppressed in the pressure distribution on the pressed surface Wa. "X" indicates that strong pressure phenomenon occurred at the outer edge. In other words, "X" indicates that the pressure distribution on the pressed surface Wa was controlled to decrease from the outer edge toward the center.

[0103] (Type 1)

[0104] The first type of intermediate component 5 includes a non-contact surface 5c and an abutment surface 5d. When viewed from above, the abutment surface 5d is a 115 mm x 115 mm square. When viewed from above, the non-contact surface 5c is a 160 mm x 164 mm rectangular frame surrounding the entire circumference of the abutment surface 5d. The abutment surface 5d is 5 mm thick. Note that only in Example 17 is the abutment surface 5d a 95 mm x 95 mm square when viewed from above.

[0105] (Type 2)

[0106] The second type of intermediate component 5 includes two non-contact surfaces 5c1 and 5c2, and one contact surface 5d. When viewed from above, the non-contact surface 5c1 is a 45 mm x 45 mm square. When viewed from above, the contact surface 5d is a 95 mm x 95 mm rectangular frame surrounding the entire circumference of the non-contact surface 5c1. The non-contact surface 5c2 is a 160 mm x 164 mm rectangular frame surrounding the entire circumference of the contact surface 5d. The contact surface 5d is 5 mm thick.

[0107] (Type 3)

[0108] The third type of intermediate component 5 includes one non-contact surface 5c and nine contact surfaces 5d1 to 5d9. When viewed from above, the contact surfaces 5d1 to 5d9 are 25 mm x 25 mm squares. The contact surfaces 5d1 to 5d9 are evenly arranged in three rows x three columns within the second outer peripheral line Lo2, which is 95 mm x 95 mm square. The contact surfaces 5d1 to 5d9 are spaced 10 mm apart. The non-contact surface 5c includes a 10 mm wide grid-like portion located inside the second outer peripheral line Lo2 and a rectangular frame-like portion located outside the second outer peripheral line Lo2. In other words, when viewed from above, the non-contact surface 5c has a grid-like shape. The contact surfaces 5d1 to 5d9 are 5 mm thick.

[0109] (Type 4)

[0110] The intermediate member 5 of the fourth type has one non-contact surface 5c and four contact surfaces 5dl to 5d4. The contact surfaces 5dl to 5d4 are square shaped with a side of 45 mm when viewed from the top and bottom. The contact surfaces 5dl to 5d4 are arranged in two rows and two columns within the second outer periphery line Lo2 which is square shaped with a side of 115 mm. The contact surfaces 5dl to 5d4 are spaced apart from each other by 25 mm. The non-contact surface 5c has a grid-shaped portion arranged inside the second outer periphery line Lo2 with a width of 15 mm and a rectangular frame-shaped portion arranged outside the second outer periphery line Lo2. In other words, the non-contact surface 5c is grid-shaped when viewed from the top and bottom. The thickness of the contact surfaces 5dl to 5d4 is 5 mm.

[0111] Examples 1 to 5

[0112] In Examples 1 to 5, the intermediate member 5 of the first type was used and the workpiece size was set to three types of 150 mm, 130 mm, and 120 mm. The area ratio was "0.59", "0.78", and "0.92". In Example 4, a heat insulating material was used. In Examples 1 to 4, the second cushion member 6 was "A" with a thickness of 1 mm, and in Example 5, the second cushion member 6 was "A" with a thickness of 2 mm. In all conditions, no strong pressing phenomenon of the outer edge portion occurred, and in particular, in Examples 2, 3, and 5, the pressure distribution of the pressed surface Wa was controlled to be uniform. As the workpiece size became larger, the pressure applied to the workpiece W had a tendency to increase in the central portion compared to the outer edge portion. This indicates that by adjusting the area ratio, the pressure distribution of the pressed surface Wa can be controlled. In Example 4, the pressure distribution had a slight deviation. It is presumed that this is due to the fact that the gap between the contact surface 5d and the lower surface 71a became longer due to the heat insulating material. In addition, it is presumed that the influence of the arrangement of the members and the workpiece W at the time of the test (the influence of the axis deviation) was also a cause of the slight deviation. As described in Example 5, this influence can be alleviated by increasing the thickness of the second cushion member 6.

[0113] Examples 6 and 7

[0114] In Examples 6 and 7, the workpiece size was set to 120 mm using the second type of intermediate member 5. The area ratio was "0.63". In Example 6, the second buffer member 6 used "A", and in Example 7, the second buffer member 6 used "B". In all conditions, the strong pressure phenomenon of the outer edge portion did not occur, and the pressure distribution of the pressed surface Wa was controlled to be uniform. In Example 6, the pressure applied to the workpiece W was larger in the outer edge portion than in the central portion. In Example 7, compared to Example 6, the pressure applied to the workpiece W was larger in the central portion than in the outer edge portion. This indicates that, by changing the structure of the second buffer member 6, the influence of the intermediate member 5 on the pressure distribution of the pressed surface Wa changes. That is, "A" has a tendency to uniformly spread stress, compared to "B", and "B" has a tendency to concentrate stress toward the center, compared to "A". As described above, the structure of the second buffer member 6 can be a factor that influences the control of the intermediate member 5 on the pressure distribution of the pressed surface Wa.

[0115] Examples 8 to 13

[0116] In Examples 8 to 13, the third type of intermediate member 5 was used, and the workpiece size was set to four types of 150 mm, 130 mm, 120 mm, and 100 mm. The area ratios were "0.40", "0.53", "0.63", and "0.90", respectively. In Examples 8 to 11, the second buffer member 6 used "A" with a thickness of 1 mm, in Example 12, the second buffer member 6 used "A" with a thickness of 2 mm, and in Example 13, the second buffer member 6 used "B" with a thickness of 2 mm. In Examples 8 to 10, 12, and 13, the strong pressure phenomenon of the outer edge portion did not occur, and in particular, in Examples 9, 10, and 12, the pressure distribution of the pressed surface Wa was controlled to be uniform. In Example 11, the tendency of this phenomenon slightly occurred, but the central portion of the workpiece W was also pressed, and the phenomenon was improved. Comparing Examples 10, 12, and 13, in Example 13, the pressure applied to the workpiece W was larger in the central portion than in the outer edge portion. In addition, the same was true for Example 8. This result indicates that, by using the material quality of the second buffer member 6 and the size of the abutting region Rl, it is possible to control the pressure distribution in the pressed surface Wa to be a distribution that depends on the shape of the abutting region Rl (abutting surface 5d).

[0117] Examples 14 and 15

[0118] In Examples 14 and 15, the intermediate member 5 of Type 4 was used, the workpiece size was set to 120 mm, and the thickness Tl of the upper platen 7 was set to two values of 15 mm and 10 mm. In Example 14, no strong pressing phenomenon occurred in the outer edge portion, and the pressure distribution of the pressed surface Wa was controlled to be uniform. On the other hand, in Example 15, a pressure distribution in which the pressure was concentrated at four points centered on the abutting region Rl (abutting surfaces 5dl to 5d4) (i.e., a pressure distribution depending on the shape of the intermediate member 5) was obtained. This result indicates that the degree of diffusion of stress in the inner portion of the upper platen 7 depends on the thickness Tl. Therefore, in Example 15 in which the thickness Tl was small, a pressure distribution that significantly depended on the shape of the intermediate member 5 was obtained as compared with Example 14. That is, this result indicates that the pressure distribution can be controlled depending on the thickness Tl.

[0119] Examples 16 and 17

[0120] In Example 16, the intermediate member 5 of Type 1 (95 mm x 95 mm) was used, and in Example 17, the intermediate member 5 of Type 3 was used. In Examples 16 and 17, nine workpieces W each having a workpiece size of 30 mm were simultaneously pressed. In Example 16, one abutting surface 5d (abutting region Rl) corresponded to all the workpieces W when viewed in the upward and downward direction (one abutting surface 5d was disposed above all the workpieces W). The area ratios were "0.75 (95 mm x 95 mm / 110 mm x 110 mm)" and "0.69 (30 mm x 30 mm)" in this order. In Example 16, the workpiece size of each workpiece W was smaller than the abutting surface 5d, and no strong pressing phenomenon occurred in the outer edge portion of each workpiece W. This result indicates that the nine workpieces W can be pressed as one workpiece W (a workpiece W having a workpiece size of 110 mm), the region of the lower surface 71a including the region to which each workpiece W abuts functions as the pressure surface region R3, and the present application can be implemented even when a plurality of workpieces W are simultaneously pressed. However, in Example 16, the workpiece W disposed on the outer side of the pressure surface region R3 (particularly, the portion on the outer edge portion side of the pressure surface region R3) was slightly more strongly pressed. On the other hand, in Example 17, all the workpieces W were uniformly pressed even when a plurality of workpieces W were simultaneously pressed. This result indicates that the geometry of the intermediate member 5 also locally has an effect, each region of the lower surface 71a that contacts each workpiece W (workpiece size of 30 mm) functions as the pressure surface region R3, each region in which each abutting surface 5dl to 5d9 is disposed functions as the disposition region Rx when viewed in the upward and downward direction, and by making each area ratio less than "1", the pressure distribution of the pressed surface Wa of each workpiece W can be controlled to be uniform.

[0121] Reference Examples 1 to 7

[0122] In Reference Examples 1 to 4, the intermediate member 5 of the first type was used, in Reference Examples 5 and 6, the intermediate member 5 of the second type was used, and in Reference Example 7, the intermediate member 5 of the third type was used. In Reference Examples 1 to 7, only the scale was pressed as described above. In Reference Example 1, the first cushion member 4 and the second cushion member 6 were not used. In Reference Example 2, the first cushion member 4 was used with "A" having a thickness of 1 mm, and the second cushion member 6 was not used. In Reference Examples 3, 5, and 7, the first cushion member 4 was not used, and the second cushion member 6 was used with "A" having a thickness of 1 mm. In Reference Example 4, the first cushion member 4 and the second cushion member 6 were used with "A" having a thickness of 1 mm. In Reference Example 6, the first cushion member 4 was not used, and the second cushion member 6 was used with "B" having a thickness of 2 mm. In all of the conditions, no strong pressing phenomenon of the outer edge portion occurred, and in each of the conditions, a pressure distribution depending on the shape of the intermediate member 5 was obtained. In Reference Example 1, a pressure distribution in which the pressure was higher in the vicinity of the portion where the corner of the abutment region Rl (abutment surface 5d) was obtained when viewed in the upward and downward directions. In Reference Example 2, a pressure distribution in which the pressure was slightly diffused as in Reference Example 1 was obtained. In Reference Examples 3 to 5 and 7, a pressure distribution in which the pressure was higher in the portion where the abutment region Rl was obtained when viewed in the upward and downward directions. In Reference Example 4, a pressure distribution in which the pressure was slightly diffused as in Reference Example 3 was obtained. In Reference Example 5, a rectangular frame-shaped pressure distribution corresponding to the shape of the abutment region Rl (abutment surface 5d) was obtained. In Reference Example 6, a pressure distribution in which the pressure was higher in the central portion of the abutment region Rl was obtained. These results indicate that the intermediate member 5 contributes to improvement of the strong pressing phenomenon of the outer edge portion. In addition, the results indicate that stress (pressure) is concentrated in the abutment region Rl of the intermediate member 5. Furthermore, the results indicate that the second cushion member 6 diffuses the pressure concentrated by the intermediate member 5. Moreover, the results indicate that the pressure distribution in the pressed surface Wa can be controlled to a distribution depending on the shape of the abutment region Rl (abutment surface 5d) by the presence or absence and the material of each of the first cushion member 4 and the second cushion member 6.

[0123] Comparative Examples 1 to 9

[0124] In Comparative Examples 1 to 4, the intermediate member 5 was not used. In Comparative Examples 5 to 7, the first type of intermediate member 5 was used, in Comparative Example 8, the second type of intermediate member 5 was used, and in Comparative Example 9, the third type of intermediate member 5 was used. In Comparative Examples 1 and 2, only the scale was pressed. In Comparative Examples 5 to 9, the workpiece size was set to be smaller than the area "Ax" of the arrangement region Rx. In Comparative Examples 1, 3 to 9, a typical pressure distribution showing the strong pressure phenomenon of the outer edge portion was obtained. On the other hand, in Comparative Example 2, by using the second buffer member 6, a pressure distribution in which the pressure was diffused as in Comparative Example 1 was obtained. According to this result, the second buffer member 6 suppressed the strong pressure phenomenon of the outer edge portion in the case where the workpiece W was not arranged. However, the intermediate member 5 and the second buffer member 6 did not suppress the phenomenon when the workpiece W smaller than the area "Ax" of the arrangement region Rx was pressed.

[0125] Improvement of the phenomenon that the outer edge portion of the pressed surface of the workpiece is strongly pressed

[0126] As can be seen from the foregoing examples and reference examples, the phenomenon that the outer edge portion of the pressed surface Wa of the workpiece W is strongly pressed is improved by the intermediate member 5. Regarding this factor, the observation results of the inventors of the present application and the like are described below.

[0127] Figure 7 (a) shows the transmission state when the workpiece W smaller than the area "Ax" of the arrangement region Rx is pressed, Figure 7 (b) shows the transmission state when the workpiece W larger than the area "Ax" of the arrangement region Rx is pressed. Figure 7

[0128] Figure 8 is a schematic view illustrating a factor of improving the imbalance of the pressure distribution.

[0129] Figure 7 In Comparative Examples 1 to 4, the intermediate member 5 was not used. In Comparative Examples 5 to 7, the first type of intermediate member 5 was used, in Comparative Example 8, the second type of intermediate member 5 was used, and in Comparative Example 9, the third type of intermediate member 5 was used. In Comparative Examples 1 and 2, only the scale was pressed. In Comparative Examples 5 to 9, the workpiece size was set to be smaller than the area "Ax" of the arrangement region Rx. In Comparative Examples 1, 3 to 9, a typical pressure distribution showing the strong pressure phenomenon of the outer edge portion was obtained. On the other hand, in Comparative Example 2, by using the second buffer member 6, a pressure distribution in which the pressure was diffused as in Comparative Example 1 was obtained. According to this result, the second buffer member 6 suppressed the strong pressure phenomenon of the outer edge portion in the case where the workpiece W was not arranged. However, the intermediate member 5 and the second buffer member 6 did not suppress the phenomenon when the workpiece W smaller than the area "Ax" of the arrangement region Rx was pressed. Figure 7 In (a) of Comparative Example 1, the size of the arrangement region Rx was 115 mm x 115 mm, and the workpiece size was 80 mm x 80 mm. Figure 7 In (b) of Comparative Example 1, the size of the arrangement region Rx was 115 mm x 115 mm, and the workpiece size was 140 mm x 140 mm. For convenience of explanation, Figure 8 The size of the stress is shown by a black arrow, and the case of stress concentration or diffusion is shown by a dotted line.

[0130] As Figure 7 ​When the workpiece W, which is smaller than the arrangement region Rx shown in (a), is pressurized, stress generated in the inside of the upper platen 7 due to the pressure applied from the intermediate member 5 is transmitted to the entire lower surface 71a of the upper platen 7 (more outward than the pressure surface region R3). Also, the pressure applied from the workpiece W to the placement plate 8 becomes maximum at the edge portion of the workpiece W. When the pressure is applied from the entire lower surface 71a to the workpiece W, there is no object that bears the external force (pressure) from the portion more outward than the pressure surface region R3. Therefore, this portion functions like a "fulcrum point of a lever", and the edge portion of the workpiece W functions like a "fulcrum point of a lever". At this time, stress transmitted to the outside of the pressure surface region R3 is concentrated on the outer edge portion of the pressure surface region R3. As a result, the pressure from the lower surface 71a is excessively applied to the edge portion of the workpiece W, and thus the strong pressure phenomenon of the outer edge portion occurs.

[0131] On the other hand, as shown in (b), when the workpiece W, which is larger than the arrangement region Rx, is pressurized, stress generated in the inside of the upper platen 7 due to the pressure applied from the intermediate member 5 is transmitted to the pressure surface region R3 while being diffused in the upper platen 7. Also, the pressure applied from the workpiece W to the placement plate 8 is diffused downward of the workpiece W, and does not become maximum at the edge portion of the workpiece W. This indicates that the edge portion of the workpiece W does not function like a "fulcrum point of a lever", and that the strong pressure phenomenon of the outer edge portion is suppressed. Figure 7 As shown in (b), when the workpiece W, which is larger than the arrangement region Rx, is pressurized, stress generated in the inside of the upper platen 7 due to the pressure applied from the intermediate member 5 is transmitted to the pressure surface region R3 while being diffused in the upper platen 7. Also, the pressure applied from the workpiece W to the placement plate 8 is diffused downward of the workpiece W, and does not become maximum at the edge portion of the workpiece W. This indicates that the edge portion of the workpiece W does not function like a "fulcrum point of a lever", and that the strong pressure phenomenon of the outer edge portion is suppressed.

[0132] Figure 8 ​As shown, when pressure is applied from the base component 2, the stress generated within the first cushioning component 4 diffuses and equalizes within the first cushioning component 4. Consequently, the pressure applied from the first cushioning component 4 to the intermediate component 5 diffuses and equalizes. In other words, the pressure distribution on the upper surface 5b of the intermediate component 5 is equalized. Next, when pressure is applied from the first cushioning component 4, the stress generated within the intermediate component 5 is concentrated and transmitted to the abutment surface 5d (abutment region R1) within the intermediate component 5. Consequently, the pressure applied from the intermediate component 5 to the second cushioning component 6 is concentrated on the portion of the second cushioning component 6 that abuts the abutment surface 5d. Meanwhile, the stress transmitted to the non-abutment surface 5c (non-abutment region R2) is concentrated on the outer edge of the abutment surface 5d (abutment region R1). Consequently, the pressure applied from the abutment surface 5d to the second cushioning component 6 is higher at the outer edge than at the center. Next, when pressure is applied from the intermediate component 5, the stress generated within the second cushioning component 6 diffuses and equalizes within the second cushioning component 6. Therefore, the pressure applied to the upper pressing plate 7 from the second buffer component 6 is diffused and homogenized. That is, the pressure distribution in the upper surface 7a of the upper pressing plate 7 is homogenized. Next, when pressure is applied from the second buffer component 6, the stress generated inside the upper pressing plate 7 is slightly diffused inside the upper pressing plate 7 and transmitted to the lower surface 71a, mainly within the range of the pressing surface area R3. That is, the stress transmitted inside the upper pressing plate 7 is concentrated within the range of the pressing surface area R3 compared to the outside of the pressing surface area R3. Therefore, the pressure applied to the workpiece W from the upper pressing plate 7 is concentrated on the part of the workpiece W that abuts the pressing surface area R3 (the pressed surface Wa). As a result, the edge portion of the workpiece W does not function like a "lever fulcrum", and the strong pressure phenomenon of the outer edge portion does not occur.

[0133] Here, the degree of stress diffusion within the upper platen 7 increases as the thickness T1 of the upper platen 7 increases, as indicated by Saint Venant's Principle. That is, the area on the lower surface 71a where stress is concentrated and transmitted (hereinafter referred to as the "concentration area") increases as the thickness T1 of the upper platen 7 increases, and decreases as this thickness T1 decreases. Therefore, the size of the concentration area can be controlled by the thickness T1 of the upper platen 7 and the area of ​​the abutment surface 5d (abutment region R1) (i.e., the area "Ax" of the configuration region Rx). In other words, to maintain the size of the concentration area within a predetermined range (the range of the pressure surface region R3), the area "Ax" of the configuration region Rx is designed to decrease as the distance between the abutment surface 5d of the intermediate component 5 and the lower surface 71a increases, and to increase as this distance decreases.

[0134] As described above, the ratio of the area "Ax" of the arrangement region Rx to the area "A3" of the pressure surface region R3 (area ratio: Ax / A3) is designed to be at least less than "1" depending on various parameters such as the thickness Tl of the upper platen 7, the material, and the pressure applied to the upper platen 7 when viewed in the up-down direction. In the case of the conditions shown in the foregoing embodiment, for example, the area ratio is preferably designed to be "0.32" or more, more preferably "0.40" or more and "0.92" or less, and particularly preferably "0.53" or more and "0.92" or less. The area "A3" is an example of the first area in the present application, and the area "Ax" is an example of the second area in the present application.

[0135] SUMMARY

[0136] According to the embodiment described above, the upper pressurizing unit UP is provided with the first cushion member 4, the intermediate member 5, the second cushion member 6, and the lower surface 71a. The second cushion member 6 is arranged at a position lower than the first cushion member 4. The intermediate member 5 is arranged in abutment with the first cushion member 4 and the second cushion member 6 between the first cushion member 4 and the second cushion member 6. The lower surface 71a is made of metal and comes into abutment with the workpiece W when the workpiece W is pressed. The lower surface 71a is planar and parallel to the XY direction. The intermediate member 5 is provided with a non-abutment surface 5c (non-abutment region R2) and an abutment surface 5d (abutment region Rl). The lower surface 71a is provided with a pressure surface region R3 that comes into abutment with the workpiece W when the workpiece W is pressed. When viewed in the up-down direction, the abutment region Rl is arranged at a position more inward than a first outer periphery line Loi shown by the outer periphery line of the pressure surface region R3. According to this structure, stress is concentrated in the abutment region Rl (abutment surface 5d) in the inside of the intermediate member 5. Then, stress is diffused while being transferred toward the pressure surface region R3 in the process of being transferred to the lower surface 71a in the inside of the upper platen 7. That is, stress is concentrated in the pressure surface region R3. As a result, excessive pressure is not applied to the edge portion of the workpiece W, and the strong pressure phenomenon of the outer edge portion is improved. That is, the present device 1 can control the pressure distribution of the pressed surface Wa to avoid the strong pressure phenomenon of the outer edge portion.

[0137] As described above, the present application does not adopt the existing design that increases the thickness Tl of the upper platen 7 to increase the rigidity of the upper platen 7. Therefore, in the present application, the thickness Tl of the upper platen 7 can be made thinner than in the existing design. Therefore, the burden on the worker in charge of replacing the first cushion member 4, the intermediate member 5, and the second cushion member 6 is reduced. In addition, the present device 1 can control the amount of diffusion of stress in the inside of the upper platen 7 using the size of the thickness Tl of the upper platen 7, thereby controlling the pressure distribution of the pressed surface Wa.

[0138] Further, according to the above-described embodiment, the upper pressing unit UP is provided with the upper pressing plate 7 provided with the lower surface 71a. The upper pressing plate 7 is disposed in abutment with the second buffer member 6 at a position lower than the second buffer member 6. The second buffer member 6 is composed of an elastic material that is compressed in the vertical direction when the work W is pressed and is able to return to the state before the pressing of the work W ends. According to this structure, even if the stress in the interior of the intermediate member 5 is concentrated on the abutment region Rl (abutment surface 5d), the stress generated in the interior of the second buffer member 6 is diffused and homogenized in the interior of the second buffer member 6. As a result, the pressure applied to the upper pressing plate 7 from the second buffer member 6 is homogenized. Therefore, the stress generated in the interior of the upper pressing plate 7 is homogenized. Thus, the distribution of the stress transmitted to the pressure surface region R3 is homogenized compared to the distribution in the case where the second buffer member 6 is not assumed. As a result, the device 1 is able to control the pressure distribution of the pressed surface Wa to become uniform. Further, by disposing the second buffer member 6 composed of an elastic material between the intermediate member 5 and the upper pressing plate 7, the axial misalignment of the intermediate member 5 with respect to the upper pressing plate 7 is suppressed.

[0139] Further, according to the above-described embodiment, the first buffer member 4 is composed of an elastic material that is compressed in the vertical direction when the work W is pressed and is able to return to the state before the pressing of the work W ends. According to this structure, the pressure applied to the intermediate member 5 from the first buffer member 4 is homogenized. Further, by disposing the first buffer member 4 composed of an elastic material between the base member 2 and the intermediate member 5, the axial misalignment of the intermediate member 5 with respect to the base member 2 is suppressed.

[0140] Further, according to the above-described embodiment, the intermediate member 5 is provided with the non-abutment surface 5c and the abutment surface 5d. The abutment surface 5d is in abutment with the second buffer member 6. The non-abutment surface 5c is disposed at a position higher than the abutment surface 5d in the vertical direction and is not in abutment with the second buffer member 6. When viewed in the vertical direction, the abutment region Rl is a region in which the abutment surface 5d is disposed, and the non-abutment region R2 is a region in which the non-abutment surface 5c is disposed. According to this structure, the intermediate member 5 can be easily formed by simply forming a recess in the lower surface of the plate-shaped member. Further, the position and shape of the abutment surface 5d can be arbitrarily designed according to the position and shape of the recess. Therefore, the device 1 is able to control the pressure distribution of the pressed surface Wa to be a distribution that depends on the shape of the intermediate member 5 or a uniform distribution.

[0141] Further, according to the above-described embodiment, the shape of the first outer periphery line Loi shown by the outer periphery line of the pressing surface area R3 when viewed in the upward and downward direction is a square shape. The shape of the arrangement area Rx for arranging the abutting surface 5d when viewed in the upward and downward direction is a square shape. The arrangement area Rx is arranged inside the first outer periphery line Loi when viewed in the upward and downward direction. That is, the shape of the second outer periphery line Lo2 is a similar figure to the shape of the first outer periphery line Loi. The ratio of the area "Ax" of the arrangement area Rx to the area "A3" of the pressing surface area R3 when viewed in the upward and downward direction is "0.40" or more and "0.92" or less. According to this structure, the device 1 can reliably improve the strong pressing phenomenon of the outer edge portion and can control the pressure distribution of the pressed surface Wa.

[0142] Further, according to the above-described embodiment, the arrangement area Rx is designed to become smaller as the interval between the abutting surface 5d of the intermediate member 5 that abuts against the second buffer member 6 and the lower surface 71a becomes larger and to become larger as the interval becomes smaller. According to this structure, the intermediate member 5 having the abutting surface 5d (having the arrangement area Rx) corresponding to the workpiece W can be easily designed in accordance with the length (workpiece size) of the pressed surface Wa of the workpiece W and the thickness Tl of the upper pressing plate 7.

[0143] Other Embodiments

[0144] Note that, in the present application, the device 1 can also not have the first buffer member 4. That is, the intermediate member 5 can be arranged in abutment with the base member 2 below the base member 2. In this case, the base member 2 functions as the first pressing member in the present application. In this structure, as shown in the above-described Embodiments 1 to 12, the device 1 can improve the strong pressing phenomenon of the outer edge portion and can control the pressure distribution of the pressed surface Wa to become uniform.

[0145] In addition, in the present application, the device 1 can also not have the second buffer member 6. That is, the upper pressing plate 7 is arranged in abutment with the intermediate member 5 below the intermediate member 5. In this case, the upper pressing plate 7 functions as the second pressing member in the present application. In this structure, although the distribution of stress transmitted inside the upper pressing plate 7 is not uniform compared to the first embodiment, as shown in the above-described Reference Example 2, the strong pressing phenomenon of the outer edge portion is improved.

[0146] Furthermore, in the present invention, the device 1 does not need to include the first buffer member 4 and the second buffer member 6. That is, the intermediate member 5 can be arranged below the base member 2, adjacent to the base member 2. Furthermore, the upper platen 7 is arranged below the intermediate member 5, adjacent to the intermediate member 5. In this case, the base member 2 functions as the first pressurizing member in the present invention, and the upper platen 7 functions as the second pressurizing member in the present invention. In this structure, although the distribution of stress transmitted within the upper platen 7 is more uneven than in the first embodiment, as shown in the aforementioned Reference Example 1, the strong pressure phenomenon at the outer edge is improved.

[0147] Furthermore, in the present invention, the material of the intermediate member 5 can be any material that substantially maintains the shape (area) of the contact region R1 when pressure is applied, and is not limited to metals having high rigidity. That is, for example, the device 1 may include a first cushioning member 4 or a second cushioning member 6 having the same shape as the intermediate member 5, instead of the intermediate member 5, as the intermediate member of the present invention. Furthermore, for example, the intermediate member 5 may be made of a rigid heat-insulating member.

[0148] Furthermore, in the present invention, the intermediate member 5 only needs to include the contact region R1 and the non-contact region R2, and the shape of the intermediate member 5 is not limited to that of the first embodiment. That is, for example, the intermediate member 5 may be formed in a shape similar to the intermediate members 5B to 5E in the second to fifth modified examples described below.

[0149] Furthermore, in the present invention, the thickness T1 of the upper platen 7 can be designed to allow the portion below the contact region R1 to elastically deform when the workpiece W is pressurized (i.e., to be thinner). In this case, the contact region R1 is positioned above the area of ​​the pressed surface Wa where localized pressure is required, for example, depending on the shape or composition of the pressed surface Wa of the workpiece W. In this configuration, the upper platen 7 elastically deforms locally. Therefore, the present device 1 can apply localized pressure only to portions of the pressed surface Wa that protrude after pressurization, for example, due to compositional differences. Furthermore, for example, the present device 1 can simultaneously pressurize multiple workpieces W, allowing for localized pressure on workpieces W with complex shapes. Furthermore, for example, when the thickness T1 is thin, the present device 1 can achieve a uniform pressure distribution on the pressed surface Wa by maximizing the area ratio to "1." By reducing the area ratio, the pressure distribution on the pressed surface Wa can be controlled to a distribution that depends on the shape of the intermediate member 5. This design of the thickness T1 is not feasible in conventional designs that increase the rigidity of the upper platen 7.

[0150] Furthermore, in the present invention, the lower press unit DP may include a thermal energy unit for heating the workpiece W.

[0151] Further, in the present application, the intermediate member 5 can also have a plurality of abutting surfaces 5d. In this case, the shape of each abutting surface 5d can be the same as the abutting surfaces 5dl to 5d9 of the third modified example described later, or can be different from one another.

[0152] Further, in the present application, the shape of the abutting surface 5d when viewed in the up-down direction is not limited to a rectangular shape. That is, for example, the shape of the abutting surface 5d when viewed in the up-down direction can be arbitrarily designed in accordance with the distribution shape of the stress transmitted to the downward surface 71a by solving an inverse problem using a known analysis method such as the Finite Element Method, and seeking an optimal shape that meets the purpose.

[0153] Further, in the present application, in the XY direction, the length L5 of the intermediate member 5 can also be smaller than the length L72 of the outer flange portion 72 of the upper press plate 7. That is, for example, the length L5 can also be smaller than the length LR3 of the press surface region R3. In other words, when viewed in the up-down direction, the intermediate member 5 can also be disposed only at a position more inward than the first outer peripheral line Lol.

[0154] Further, in the present application, the apparatus 1 can also have three or more upper press units UP and lower press units DP. That is, the apparatus 1 can also be a press apparatus of three stages or more.

[0155] Further, in the present application, the apparatus 1 can also have a heat insulating member made of a heat insulating material, which is disposed between the intermediate member 5 and the second cushion member 6. In this case, when viewed in the up-down direction, the shape of the heat insulating member can also be the same as the shape of the second cushion member 6. When the apparatus 1 does not have the second cushion member 6, the heat insulating member can function as the second press member in the present application. In this structure, even if the lower press unit DP has a thermal energy unit that heats the work W, the thermal energy from the thermal energy unit is blocked by the heat insulating member and is not transmitted to the second cushion member 6, the first cushion member 4, and the base member 2.

[0156] Further, in the present application, as described in the above-described embodiment 17, a plurality of work Ws are pressurized together, and when viewed in the up-down direction, the press surface region R3 can be a region in the downward surface 71a that includes the region where each work W abuts when one abutting surface 5d corresponds to all the work Ws. That is, the press surface region R3 can include a plurality of regions where each work W abuts. In this case, the first outer peripheral line Lol is shown by the outer peripheral line of the region.

[0157] Further, in the present application, as shown in the above-described Embodiment 14, a plurality of workpieces W are collectively pressed, and when each abutting surface 5dl-5d9 corresponds to each workpiece W as viewed in the upward and downward direction, the pressing surface region R3 can also be each region of the lower surface 71a to which each workpiece W abuts. That is, the lower surface 71a can also have a plurality of pressing surface regions R3. In this case, the first outer peripheral line Loi is shown by the outer peripheral line of each region.

[0158] Further, in the present application, a protective sheet that aims to protect the lower surface 71a and prevent the workpieces W from adhering can also be overlaid on the workpieces W. The thickness of the protective sheet is thin to the extent that stress equalization does not substantially occur inside. Therefore, the effects of the present application do not differ depending on the presence or absence of the protective sheet.

[0159] Modified Examples

[0160] Next, a modified example of the present device 1 will be described below, focusing on differences from the previously described embodiment (hereinafter referred to as "first embodiment"). For ease of description, in the following modified example, the same reference numerals are assigned to the same components as those of the first embodiment and components having the same functions, and detailed descriptions thereof will be omitted. In the following modified example, the first embodiment will be appropriately referred to. Figure 1 and Figure 2 .

[0161] First Modified Example

[0162] Figure 9 is a schematic cross-sectional view of the present device showing a first modified example of the present device.

[0163] The device 1A sandwiches and pressurizes two workpieces W1, W2 in the vertical direction. The device 1A has a base member 2, a frame member 3, a first buffer member 4, an intermediate member 5, a second buffer member 6, an upper press plate 7, a placement plate 8, a lower press plate 9, a lifting device 10, a control device 11, a second base member 12, a second frame member 13, a third buffer member 14, a second intermediate member 15, a fourth buffer member 16, a second upper press plate 17, and a second placement plate 18. The base member 2, the frame member 3, the first buffer member 4, the intermediate member 5, the second buffer member 6, and the upper press plate 7 are arranged at a position higher than the workpiece W1 in the vertical direction, and function as an upper press unit UP that pressurizes the workpiece W1 from above. The placement plate 8 and the second base member 12 are arranged at a position lower than the workpiece W1 in the vertical direction, and function as a lower press unit DP that pressurizes the workpiece W1 from below. Similarly, the second base member 12, the second frame member 13, the third buffer member 14, the second intermediate member 15, the fourth buffer member 16, and the second upper press plate 17 are arranged at a position higher than the workpiece W2 in the vertical direction, and function as a second upper press unit UP2 that pressurizes the workpiece W2 from above. The second placement plate 18 and the second lower press plate 19 are arranged at a position lower than the workpiece W2 in the vertical direction, and function as a second lower press unit DP2 that pressurizes the workpiece W2 from below. That is, the device 1A is a two-stage press device in which the upper press unit UP, the lower press unit DP, the second upper press unit UP2, and the second lower press unit UD2 are arranged in this order from above.

[0164] The second base member 12 supports the third buffer member 14, the second intermediate member 15, the fourth buffer member 16, and the second upper press plate 17 via the second frame member 13. The second base member 12 has the same structure as the base member 2. The second base member 2 has a lower surface 12a. The second base member 12 is supported by the lifting device 10 so as to be movable (liftable) in the vertical direction. The placement plate 8 is placed on the second base member 12. The second base member 12 also functions as a lower press plate of the lower press unit DP. In the vertical direction, the size (thickness) of the second base member 12 is set to a size at which stress generated inside the second base member 12 due to pressure transmitted to the second base member 12 via the placement plate 8 can sufficiently spread inside the second base member 12.

[0165] The second frame member 13 houses the third cushion member 14, the second intermediate member 15, the fourth cushion member 16, and a portion of the second upper pressure plate 17. The second frame member 13 has the same structure as the frame member 3. The second frame member 13 includes a main body portion 131 and an inner flange portion 132. The main body portion 131 includes an inner peripheral surface 131a. The inner flange portion 132 includes an upper surface 132a and an inner peripheral surface 132b.

[0166] The third cushion member 14 diffuses and equalizes the pressure applied to the third cushion member 14 when the workpiece W2 is pressed. In addition, the third cushion member 14 suppresses the axial displacement of the second intermediate member 15 when the workpiece W2 is pressed. The third cushion member 14 has the same structure as the first cushion member 4. The third cushion member 14 includes a lower surface 14a and an upper surface 14b. The third cushion member 14 is one example of the first pressing member in the present application.

[0167] The second intermediate member 15 concentrates the pressure applied to the second intermediate member 15 when the workpiece W2 is pressed. The second intermediate member 15 has the same structure as the intermediate member 5. The second intermediate member 15 includes a lower surface 15a, an upper surface 15b, a non-abutment surface 15c, and an abutment surface 15d. The second intermediate member 15 is one example of the intermediate member in the present application. When viewed in the upward and downward directions, the region of the second intermediate member 15 in which the abutment surface 15d is disposed is an abutment region R11, and the region in which the non-abutment surface 15c is disposed is a non-abutment region R12.

[0168] The fourth cushion member 16 diffuses and equalizes the pressure applied to the fourth cushion member 16 when the workpiece W2 is pressed. In addition, the fourth cushion member 16 suppresses the axial displacement of the second intermediate member 15 when the workpiece W2 is pressed. The fourth cushion member 16 has the same structure as the second cushion member 6. The fourth cushion member 16 includes a lower surface 16a and an upper surface 16b. The fourth cushion member 16 is one example of the second pressing member in the present application.

[0169] The second upper pressure plate 17 presses the workpiece W2 downward when the workpiece W2 is pressed. The second upper pressure plate 17 has the same structure as the upper pressure plate 7. The second upper pressure plate 17 includes an upper surface 17a, a main body portion 171, and an outer flange portion 172. The main body portion 171 includes a lower surface 171a and an outer peripheral surface 171b. The lower surface 171a includes a pressure surface region R13. The second upper pressure plate 17 is one example of the third pressing member in the present application. The lower surface 171a is one example of the upper pressure surface in the present application. The outer flange portion 172 includes a lower surface 172a.

[0170] The 2nd placement plate 18 is a member for placing the workpiece W2. The 2nd placement plate 18 has the same structure as the placement plate 8. The 2nd placement plate 18 is placed on the 2nd lower press plate 19. The 2nd placement plate 18 has an upper surface, i.e., a placement surface 18a.

[0171] The 2nd lower press plate 19 presses the workpiece W2 upward according to the pressure from the 2nd upper press unit UP2 when the workpiece W2 is pressed. The 2nd lower press plate 19 has the same structure as the lower press plate 9.

[0172] The positional relationship and the size relationship of each of the 2nd base member 12, the 2nd frame member 13, the 3rd buffer member 14, the 2nd intermediate member 15, the 4th buffer member 16, and the 2nd upper press plate 17 are the same as those of each of the base member 2, the frame member 3, the 1st buffer member 4, the intermediate member 5, the 2nd buffer member 6, and the upper press plate 7.

[0173] Note that, in the 1st modified example, the pressure distribution in the upper surface 5b of the intermediate member 5 can be different from the pressure distribution in the upper surface 15b of the 2nd intermediate member 15 due to dimensional tolerance of each member or the like. In addition, in the case where the 2nd base member 12 is thin, the workpiece W1 itself functions as the intermediate member in the present application, and the pressure transmitted from the 2nd base member 12 to the 2nd intermediate member 15 can be affected thereby. In this case, the length LR1 of the abutment region R1 of the intermediate member 5 is set according to the pressure applied to the workpiece W1, and the length LR11 of the abutment region R11 of the 2nd intermediate member 15 is set according to the pressure applied to the workpiece W2. That is, the length LR11 can be different from the length LR1.

[0174] In addition, in the 1st modified example, the apparatus 1A can not have the 3rd buffer member 14. That is, the 2nd intermediate member 15 can be disposed in abutment with the 2nd base member 12 below the 2nd base member 12. In this case, the 2nd base member 12 functions as the 1st press member in the present application.

[0175] Furthermore, in the 1st modified example, the apparatus 1A can not have the 4th buffer member 16. That is, the 2nd upper press plate 17 can be disposed in abutment with the 2nd intermediate member 15 below the 2nd intermediate member 15. In this case, the 2nd upper press plate 17 functions as the 2nd press member in the present application.

[0176] Further, in the first modification example, the device 1A can not have the third buffer member 14 and the fourth buffer member 16. That is, the second intermediate member 15 can be disposed below the second base member 12 so as to be contiguous to the second base member 12. In addition, the second upper pressure plate 17 can be disposed below the second intermediate member 15 so as to be contiguous to the second intermediate member 15. In this case, the second base member 12 functions as the first pressure member in the present application, and the second upper pressure plate 17 functions as the second pressure member in the present application.

[0177] Second to fifth modification examples

[0178] In the second to fifth modification examples of the device, the structure of the intermediate member is different from that of the first embodiment. Therefore, in the following description, only the intermediate member will be described.

[0179] Figure 10 is a schematic bottom view of the intermediate member in the second to fifth modification examples of the device, Figure 10 (a) of FIG. 5B shows the intermediate member in the third modification example, Figure 10 (b) of FIG. 5B shows the intermediate member in the third modification example, Figure 10 (c) of FIG. 5B shows the intermediate member in the fourth modification example, Figure 10 (d) of FIG. 5B shows the intermediate member in the fifth modification example.

[0180] The figure shows the second outer peripheral line Lo2 of the disposition region Rx with a thicker dashed line, and the pressure surface region R3 (the pressure surface Wa) with a double-dot chain line.

[0181] The intermediate member 5B in the second modification example has two non-contact surfaces 5cl, 5c2 and one contact surface 5d. When viewed from the top and bottom directions, the non-contact surface 5cl is rectangular in shape, the contact surface 5d is rectangular frame-shaped that surrounds the entire periphery of the non-contact surface 5cl, and the non-contact surface 5c2 is rectangular frame-shaped that surrounds the entire periphery of the contact surface 5d. The second outer peripheral line Lo2 is the same as the outer peripheral line of the contact surface 5d. When viewed from the top and bottom directions, the contact region Rl is a region in which the contact surface 5d is disposed, and the non-contact region R2 is a region in which the non-contact surfaces 5cl, 5c2 are disposed. In this structure, as shown in Embodiments 6 to 7 and Reference Examples 5 to 6, the device 1 can improve the strong pressure phenomenon of the outer edge portion. In addition, the device 1 can control the pressure distribution of the pressure surface Wa to be a distribution that depends on the shape of the intermediate member 5.

[0182] The intermediate member 5C in the third modification example has one non-contact surface 5c and nine contact surfaces 5dl to 5d9. The contact surfaces 5dl to 5d9 are rectangular in shape as viewed in the up-down direction. The contact surfaces 5dl to 5d9 are uniformly arranged in a 3-row by 3-column arrangement. The arrangement region Rx is a region in which all the contact surfaces 5dl to 5d9 are arranged and which has the smallest area as viewed in the up-down direction. The non-contact surface 5cl has a grid-shaped portion arranged inside the arrangement region Rx and a rectangular frame-shaped portion arranged outside the arrangement region Rx. The contact region Rl is a region in which the contact surfaces 5dl to 5d9 are arranged and the non-contact region R2 is a region in which the non-contact surface 5c is arranged as viewed in the up-down direction. In this configuration, the device 1 can improve the strong pressure phenomenon of the outer edge portion as in Embodiments 8 to 12 and Reference Example 7. In addition, the device 1 can control the pressure distribution of the pressure surface Wa to be a distribution depending on the shape of the intermediate member 5.

[0183] The intermediate member 5D in the fourth modification example has twelve non-contact surfaces 5cl to 5cl2, nine contact surfaces 5dl to 5d9, and four through portions 5el to 5e4. The contact surfaces 5dl to 5d9 are rectangular in shape as viewed in the up-down direction. The contact surfaces 5dl to 5d9 are uniformly arranged in a 3-row by 3-column arrangement. Adjacent contact surfaces 5dl to 5d9 are connected together by a bridge-shaped portion as viewed in the up-down direction. The non-contact surfaces 5cl to 5cl2 are arranged in the bridge-shaped portion. The through portions 5el to 5e4 are through holes that pass through the intermediate member 5D in the up-down direction. The through portions 5el to 5e4 are cross-shaped in shape as viewed in the up-down direction. The through portions 5el to 5e4 are arranged between the contact surfaces 5dl to 5d9 in a manner that divides the contact surfaces 5dl to 5d9. The arrangement region Rx is a region in which all the contact surfaces 5dl to 5d9 are arranged and which has the smallest area as viewed in the up-down direction. The contact region Rl is a region in which the contact surfaces 5dl to 5d9 are arranged and the non-contact region R2 is a region in which the non-contact surfaces 5cl to 5cl2 and the through portions 5el to 5e4 are arranged as viewed in the up-down direction. In the fourth modification example, the length L5 of the intermediate member 5D is smaller than the length L4 of the first cushion member 4 and the length L6 of the second cushion member 6. Therefore, a rectangular frame-shaped space is formed around the intermediate member 5D. The outer edge portion of the first cushion member 4 faces the outer edge portion of the second cushion member 6 across the space. In this configuration, the intermediate member 5D can be easily formed by forming through holes that function as the non-contact region R2 in a plate-shaped member and forming the non-contact surfaces 5cl to 5cl2 in the bridge-shaped portion. In addition, the positions and shapes of the contact surfaces 5d can be arbitrarily designed depending on the positions and shapes of the through holes.

[0184] Note that in the fourth modification, the non-contact surfaces 5c1 to 5c12 can not be formed in the bridge-shaped portion. In this case, the bridge-shaped portion functions as a contact surface. In this structure, the non-contact surfaces 5c1 to 5c12 do not have to be formed, and it is only necessary to form a through-hole in the plate-shaped member, which functions as a non-contact region R2, so that the intermediate member 5D can be easily formed.

[0185] In addition, in the fourth modification, the shapes of the through portions 5e1 to 5e4 are not limited to cross shapes, and the number of the through portions 5e1 to 5e4 is not limited to four.

[0186] The intermediate member 5E in the fifth modification has one non-contact surface 5c and one contact surface 5d. The contact surface 5d has a rectangular shape when viewed in the upward and downward direction. The contact surface 5d is disposed inward of the pressing surface region R3 and is biased toward one corner of the intermediate member 5E when viewed in the upward and downward direction. The non-contact surface 5c has a rectangular frame shape that surrounds the entire periphery of the contact surface 5d when viewed in the upward and downward direction. The contact region R1 is a region in which the contact surface 5d is disposed, and the non-contact region R2 is a region in which the non-contact surface 5c is disposed when viewed in the upward and downward direction. By forming the intermediate member 5E in this way, a prescribed region (a region that includes the contact region R1 and is centered on the contact region R1 when viewed in the upward and downward direction) in the pressing surface region R3 can be pressed at a pressure that is higher than the pressure of the other regions (R3b) (see the hatched region in (d) of FIG. 10). Figure 10 The prescribed region (the hatched region in (d) of FIG. 10) in the pressing surface region R3 is a bias pressing region R3a in which the work W is pressed at a pressure that is higher than the pressure of the other regions R3b. The contact region R1 is disposed within the range of the bias pressing region R3a and corresponds to the bias pressing region R3a when viewed in the upward and downward direction. In other words, the contact region R1 includes a region (hereinafter referred to as a "specific region R1a") that corresponds to the bias pressing region R3a. In this structure, the device 1 can control the pressure of a prescribed region (a region that is in contact with the bias pressing region R3a) in the pressed surface Wa to be higher than the pressure of the other regions. The position and length of the bias pressing region R3a are arbitrarily designed in accordance with the position and length of the specific region R1a (the contact surface 5d) with respect to the pressing surface region R3. That is, the device 1 can perform bias pressing of an arbitrary region in the pressed surface Wa by using the intermediate member 5E instead of the intermediate member 5, which is not possible with a conventional pressing device (hereinafter referred to as a "conventional device") in which a planar pressing surface directly (or indirectly via a protective sheet) presses a work. In addition, by forming a plurality of specific regions R1a (contact surfaces 5d) in a manner in which a plurality of bias pressing regions R3a are formed, the device 1 can also perform pressing of a plurality of works W at once, which is not possible with the conventional device.

[0187] Note that in the fifth modification, the intermediate member 5E can have a plurality of contact surfaces 5d that correspond to a plurality of contact regions R1 that include the specific region R1a.

[0188] Embodiments of the present application

[0189] Next, the embodiments of the present application grasped based on the above-described embodiments are described below, citing the terms and reference numerals described in the embodiments.

[0190] The first embodiment of the present application is a pressurizing device (for example, pressurizing device 1, 1A) that sandwiches a work (for example, work W, W1, W2) in the up-down direction to pressurize the work, wherein the pressurizing device has an upper pressurizing unit (for example, upper pressurizing unit UP, second upper pressurizing unit UP2) disposed above the work, the upper pressurizing unit has: a first pressurizing member (for example, base member 2, first cushion member 4, third cushion member 14); a second pressurizing member (for example, second cushion member 6, upper pressure plate 7, fourth cushion member 16, second upper pressure plate 17) disposed at a position lower than the first pressurizing member; an intermediate member (for example, intermediate members 5 to 5E) disposed at a position adjacent to the first pressurizing member and the second pressurizing member between the first pressurizing member and the second pressurizing member; and a planar upper pressure surface (for example, lower surfaces 71a, 171a) made of metal that comes into abutment with the work when the work is pressurized, the intermediate member has: an abutment region (for example, abutment regions R1, R11) that comes into abutment with the second pressurizing member; and a non-abutment region (for example, non-abutment regions R2, R12) that does not come into abutment with the second pressurizing member, the upper pressure surface has a pressure surface region (for example, pressure surface regions R3, R13) that comes into abutment with the work when the work is pressurized, the abutment region is disposed at a position closer to the inside than a first outer peripheral line (for example, first outer peripheral line Lo1) indicated by an outer peripheral line of the pressure surface region when viewed in the up-down direction.

[0191] According to this structure, the pressurizing device can control the pressure distribution of the pressure surface to avoid the strong pressure phenomenon of the outer edge portion.

[0192] The second embodiment of the present application is based on the pressurizing device described in the first embodiment, wherein the upper pressurizing unit has a third pressurizing member (for example, upper pressure plate 7, second upper pressure plate 17) having the upper pressure surface, the third pressurizing member is disposed at a position adjacent to the second pressurizing member (for example, second cushion member 6, fourth cushion member 16) lower than the second pressurizing member, the second pressurizing member is made of an elastic material that is compressed in the up-down direction when the work is pressurized and can return to the state before pressurization when the pressurization of the work ends.

[0193] According to this structure, the pressure surface of the work is uniformly pressurized. In addition, the axial offset of the intermediate member with respect to the upper pressure plate is suppressed.

[0194] The third embodiment of the present application is based on the pressurizing device described in the first embodiment, and the second pressurizing member (for example, the upper press plate 7, the second upper press plate 17) has the upper press surface.

[0195] According to this structure, the pressurizing device can control the pressure distribution of the pressurized surface to avoid the strong pressure phenomenon of the outer edge portion at each stage.

[0196] The fourth embodiment of the present application is based on the pressurizing device described in the second or third embodiment, and the first pressurizing member (for example, the first buffer member 4, the third buffer member 14) is composed of an elastic material that is compressed in the up-down direction when the workpiece is pressurized and can return to the state before pressurization when the pressurization of the workpiece ends.

[0197] According to this structure, the pressure applied to the intermediate member from the first buffer member is uniformized. In addition, the axial offset of the intermediate member with respect to the base member is suppressed.

[0198] The fifth embodiment of the present application is based on the pressurizing device described in any one of the first to third embodiments, and the intermediate member has an abutting surface (for example, the abutting surfaces 5d, 5d1 to 5d9) that abuts against the second pressurizing member and a non-abutting surface (for example, the non-abutting surfaces 5c, 5c1 to 5c12) that is disposed at a position higher than the abutting surface in the up-down direction and does not abut against the second pressurizing member, the abutting region is a region in which the abutting surface is disposed when viewed in the up-down direction, and the non-abutting region is a region in which the non-abutting surface is disposed when viewed in the up-down direction.

[0199] According to this structure, it is only necessary to form a recess in the lower surface of the plate-shaped member to easily form the intermediate member.

[0200] The sixth embodiment of the present application is based on the pressurizing device described in any one of the first to third embodiments, and the intermediate member (for example, the intermediate member 5D) has an abutting surface (for example, the abutting surfaces 5d1 to 5d9) that abuts against the second pressurizing member and a through-hole (for example, the through-holes 5e1 to 5e4) that penetrates the intermediate member in the up-down direction, the abutting region is a region in which the abutting surface is disposed when viewed in the up-down direction, and the non-abutting region is a region in which the through-hole is disposed when viewed in the up-down direction.

[0201] According to this structure, it is only necessary to form a through-hole that functions as a non-abutting region in the plate-shaped member to easily form the intermediate member.

[0202] The seventh embodiment of the present application is based on the pressurizing device described in the first embodiment, and is characterized in that, when viewed in the up-down direction, the shape of a second outer periphery line (e.g., second outer periphery line Lo2) indicated by an outer periphery line of a disposition region (e.g., disposition region Rx) in which the abutting region is disposed is a similar figure to the shape of the first outer periphery line, and the ratio of a second area (e.g., area "Ax") of the disposition region divided by the second outer periphery line to a first area (e.g., area "A3") of the press surface region divided by the first outer periphery line is 0.40 or more and 0.92 or less.

[0203] According to this structure, the device can reliably improve the strong pressure phenomenon of the outer edge portion and can control the pressure distribution of the press surface.

[0204] The eighth embodiment of the present application is based on the pressurizing device described in the first embodiment, and is characterized in that, when viewed in the up-down direction, the disposition region in which the abutting region is disposed is designed to become smaller as the interval (e.g., thickness "T1") between the abutting surface in the intermediate member that abuts against the second pressurizing member and the upper press surface becomes larger, and to become larger as the interval becomes smaller.

[0205] According to this structure, the intermediate member having the abutting surface (disposition region) corresponding to the workpiece can be easily designed.

[0206] The ninth embodiment of the present application is based on the pressurizing device described in the first embodiment, and is characterized in that the press surface region includes a partial pressurizing region (e.g., partial pressurizing region R3a) that, when the workpiece is pressurized, pressurizes a prescribed region of a portion of the workpiece with a larger pressurizing force than other regions of the workpiece, and the abutting region includes a specific region (e.g., specific region R1a) corresponding to the partial pressurizing region, and the specific region is disposed within the range of the partial pressurizing region when viewed in the up-down direction.

[0207] According to this structure, the device can control the pressure distribution of the press surface so that any region in the press surface is pressurized more strongly.

Claims

1. A pressurizing device that sandwiches a work in an up-down direction to pressurize the work, wherein the pressurizing device has an upper pressurizing unit arranged above the work, the upper pressurizing unit has: a first pressurizing member; a second pressurizing member arranged at a position lower than the first pressurizing member; a plate-shaped intermediate member arranged at a position adjacent to the first pressurizing member and the second pressurizing member between the first pressurizing member and the second pressurizing member; and a planar upper pressure surface made of metal that comes into contact with the work when the work is pressurized, the intermediate member has: a contact region that comes into contact with the second pressurizing member; and a non-contact region that does not come into contact with the second pressurizing member, the upper pressure surface has a pressure surface region that comes into contact with the work when the work is pressurized, the contact region is arranged at a position inside a first outer peripheral line indicated by an outer peripheral line of the arrangement region for the contact region, in a similar pattern to a shape of the first outer peripheral line, when viewed in the up-down direction.

2. The pressurizing device according to claim 1, wherein the upper pressurizing unit has a third pressurizing member that has the upper pressure surface, the third pressurizing member is arranged at a position adjacent to the second pressurizing member, lower than the second pressurizing member, the second pressurizing member is made of an elastic material that is compressed in the up-down direction when the work is pressurized, and is able to return to a state before pressurization when pressurization of the work ends.

3. The pressurizing device according to claim 1, wherein the second pressurizing member has the upper pressure surface.

4. The pressurizing device according to claim 2 or 3, wherein the first pressurizing member is made of an elastic material that is compressed in the up-down direction when the work is pressurized, and is able to return to a state before pressurization when pressurization of the work ends.

5. The pressurizing device according to any one of claims 1 to 3, wherein the intermediate member has: a contact surface that comes into contact with the second pressurizing member; and a non-contact surface that is arranged at a position higher than the contact surface in the up-down direction, and does not come into contact with the second pressurizing member, the contact region is a region for arranging the contact surface, when viewed in the up-down direction, the non-contact region is a region for arranging the non-contact surface, when viewed in the up-down direction.

6. The pressurizing device according to any one of claims 1 to 3, wherein the intermediate member has: a contact surface that comes into contact with the second pressurizing member; and a through-hole that penetrates the intermediate member in the up-down direction, the contact region is a region for arranging the contact surface, when viewed in the up-down direction, the non-contact region is a region for arranging the through-hole, when viewed in the up-down direction.

7. The pressurizing device according to claim 1, wherein a second outer peripheral line indicated by an outer peripheral line of an arrangement region for the contact region is in a similar pattern to a shape of the first outer peripheral line, when viewed in the up-down direction. ​ The ratio of a second area of the arrangement region divided by the second outer periphery line to a first area of the pressing surface region divided by the first outer periphery line is 0.40 or more and 0.92 or less when viewed in the up-down direction.

8. The pressurizing device according to claim 1, wherein The arrangement region for arranging the abutting region is designed to become smaller as a distance between an abutting surface in the intermediate member that abuts against the second pressurizing member and the upper pressing surface becomes larger and to become larger as the distance becomes smaller when viewed in the up-down direction.

9. The pressurizing device according to claim 1, wherein The pressing surface region includes a partial pressurizing region that prescribes a region of the workpiece to be pressurized with a larger pressurizing force than other regions of the workpiece when the workpiece is pressurized, The abutting region includes a specific region that corresponds to the partial pressurizing region, The specific region is arranged within the range of the partial pressurizing region when viewed in the up-down direction.

Images