Semiconductor glass substrate intelligent stacking industrial robot

Abstract

The application is suitable for the technical field of glass substrate stacking, and provides a semiconductor glass substrate intelligent stacking industrial robot, which comprises a fixing frame and a stacking assembly rotatably arranged on the fixing frame; the stacking assembly comprises a bearing part; a sliding part is slidably arranged between the inner walls of the bearing part; a connecting rod telescopic part is arranged between the bearing part and the sliding part; a sliding frame is slidably arranged on the side surface of the bearing part; a plurality of adsorption parts matched with the sliding frame are uniformly rotatably arranged on the connecting rod telescopic part; the device further comprises a paper covering piece laid on the surfaces of the glass substrates in an unfolded state; a cutting part for cutting the paper covering piece is slidably arranged on the side surface of the U-shaped seat; the device realizes the cutting of the tearable paper by covering the paper covering piece on each group of glass substrates and cooperating with the cutting part, completes the synchronous paper covering operation on the multiple groups of glass substrates, realizes the synchronous stacking of the multiple groups of glass substrates by controlling the contraction of the connecting rod telescopic part, and improves the stacking efficiency and the work efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of glass substrate stacking, more particularly, it relates to a semiconductor glass substrate intelligent stacking industrial robot. BACKGROUND

[0002] In the process of semiconductor manufacturing, glass substrate is one of the core materials, and its quality and processing precision directly affect the performance of semiconductor devices; during the processing, transportation and storage of the substrate, protective paper is usually covered on the surface of the substrate to prevent damage, contamination or scratches, and then the glass substrate with the covered paper is stacked together for transportation and subsequent processing operation.

[0003] In the prior art, protective paper is usually covered on the glass substrate one by one, and then the glass substrate with the covered paper is stacked together one by one. The above-mentioned process is complicated, and the above-mentioned process is carried out separately, which reduces the stacking efficiency of the glass substrate and affects the subsequent processing efficiency. SUMMARY

[0004] In view of the deficiencies in the prior art, the purpose of the present application is to provide a semiconductor glass substrate intelligent stacking industrial robot, which places the glass substrates one by one on the corresponding suction parts of the link extension part in the unfolded state, covers the paper on each group of glass substrates, cooperates with the cutting part to realize the cutting of the tearable paper, and completes the synchronous paper covering operation of multiple groups of glass substrates; controls the stacking assembly to rotate to be perpendicular to the ground, controls the sliding frame to move, drives each group of glass substrates adsorbed in the U-shaped suction plate to rotate synchronously to be parallel to the ground, controls the link extension part to retract, and completes the synchronous stacking of multiple groups of glass substrates, thereby improving the stacking efficiency and work efficiency.

[0005] To achieve the above-mentioned purpose, the present application provides the following technical scheme:

[0006] A semiconductor glass substrate intelligent stacking industrial robot, comprising a fixed frame and a stacking assembly rotatably arranged on the fixed frame; the stacking assembly comprises a bearing part; a sliding part is slidably arranged between the inner walls of the bearing part; a link extension part is arranged between the bearing part and the sliding part; a sliding frame is slidably arranged on the side surface of the bearing part; a plurality of suction parts matched with the sliding frame are uniformly rotatably arranged on the link extension part; the suction parts are used for adsorbing glass substrates; a paper covering piece is laid on the surface of each glass substrate in an unfolded state; the paper covering piece comprises a plurality of protective papers and a tearable paper arranged alternately; an easy-to-tear line is arranged at the connection between the protective paper and the tearable paper; the fixed frame comprises a U-shaped seat; a cutting part for cutting the paper covering piece is slidably arranged through the side surface of the U-shaped seat; a boss is fixed on the side surface of the U-shaped seat; a storage part for storing each glass substrate in a stacking state is slidably arranged on the surface of the boss.

[0007] The application is further provided with a servo motor fixed on the inner wall of the U-shaped seat, and a controller fixed on the side surface of the servo motor; the output end of the controller is electrically connected with the output end of the servo motor; a first U-shaped plate is fixed on the inner wall of the U-shaped seat; an axle hole is formed on the side surface of the first U-shaped plate; the bearing part comprises a bearing frame; a second U-shaped plate is fixed on the side surface of the bearing frame; a connecting shaft rotatably matched with the axle hole is fixed on the side surface of the second U-shaped plate; the output end of the servo motor is fixedly connected with the end of the connecting shaft.

[0008] The application is further provided with a stepping motor fixed on the surface of the bearing frame and electrically connected with the output end of the controller; a screw rod is fixed on the output end of the stepping motor; the sliding part comprises a sliding plate; sliding rails are fixed on the top and bottom of the sliding plate; sliding grooves slidably matched with the sliding rails are symmetrically formed on the inner wall of the bearing frame; an L-shaped extension plate is fixed on the side surface of the sliding plate; screw holes threadedly rotatably matched with the screw rod are formed on the side surface of the L-shaped extension plate.

[0009] The application is further provided with sliding rods symmetrically fixed on the side surface of the bearing frame; sliding holes slidably matched with the sliding rods are symmetrically formed on the surface of the sliding frame; a threaded sleeve is fixed on the surface of the sliding frame; a driving motor electrically connected with the output end of the controller is fixed on the inner bottom surface of the second U-shaped plate; a first screw rod threadedly rotatably matched with the threaded sleeve is fixed on the output end of the driving motor.

[0010] The application is further provided with I-shaped connecting rods fixed on the side surface of the sliding plate and the side surface of the bearing frame; the connecting rod telescopic part comprises a plurality of first connecting rods rotatably matched with each other; first rotation holes are formed on the surface of the first connecting rods, and second rotation holes are symmetrically formed on the surface of the first connecting rods near the two ends thereof; I-shaped rotation shafts are rotatably arranged between the two second rotation holes coaxially; second connecting rods are rotatably arranged at the end of the outermost first connecting rod; third rotation holes are symmetrically formed on the surface of the second connecting rods near the two ends thereof; the second rotation holes and the third rotation holes coaxially are rotatably matched through the I-shaped rotation shafts; the other third rotation holes are rotatably matched with the corresponding I-shaped connecting rods.

[0011] The application is further provided with a U-shaped suction plate with a hollow structure; a plurality of suction holes are uniformly formed on the inner wall of the U-shaped suction plate, and an air extraction pipe is communicatively arranged on the side surface of the U-shaped suction plate; a vacuum pump electrically connected with the controller is fixedly mounted on the surface of the U-shaped seat; the vacuum pump is connected with the air extraction pipe through a hose; baffles are fixed on the two ends of the U-shaped suction plate; I-shaped rotation rods are fixed on the side surface of the U-shaped suction plate; the two first rotation holes coaxially are rotatably matched with the corresponding I-shaped rotation rods; ear plates are fixed on the circumferential surface of the I-shaped rotation rods; guide rods matched with the sliding frame are fixed on the side surface of the ear plates.

[0012] The U-shaped seat is provided with a first electric push rod electrically connected with the output end of the controller on the side surface, and a guide groove is formed on the side surface; the cutting part comprises an L-shaped guide plate in sliding fit with the guide groove; the first electric push rod is fixedly connected with the L-shaped guide plate at the telescopic end; the L-shaped guide plate is fixedly connected with a bottom plate at the end; the bottom plate is fixedly connected with a T-shaped base on the side surface; the bottom plate is fixedly connected with vertical rods on the surface in a symmetrical manner; a lifting plate is slidably arranged between the two vertical rods; the second electric push rod electrically connected with the output end of the controller is fixedly connected between the bottom plate and the lifting plate.

[0013] The lifting plate is uniformly fixed with a support plate on the side surface; the first pressing plate is fixedly connected with the support plate at the end; the first pressing plate is symmetrically provided with a cross-shaped groove on the opposite sides; the third electric push rod electrically connected with the output end of the controller is fixedly connected with the lifting plate on the side surface; the third electric push rod is fixedly connected with an E-shaped frame at the telescopic end; the E-shaped frame is fixedly connected with a plurality of mounting plates at the end; the mounting plates are symmetrically fixed with cross-shaped rails in sliding fit with the corresponding cross-shaped grooves on the opposite sides; the mounting plates are fixedly connected with vertical plates at the end; the vertical plates are symmetrically fixed with cutting knives for cutting the easy-to-tear line on the side surface.

[0014] The receiving part comprises a supporting seat; the supporting seat is provided with an avoiding groove in sliding fit with the boss on the bottom surface; the supporting seat is fixedly connected with a U-shaped enclosure slidably arranged between the inner walls of the opposite two baffle plates on the surface; the U-shaped enclosure is fixedly connected with a positioning frame at the top; the positioning frame is slidably arranged with a top cover inside; the top cover is slidably arranged with a second pressing plate penetrating through the surface; the top cover is rotatably arranged with a second screw; the second pressing plate is fixedly connected with an L-shaped frame in threaded rotary fit with the second screw on the surface; the positioning frame is provided with a through groove in sliding fit with the L-shaped frame on the surface.

[0015] The advantages of the present application are:

[0016] 1、The glass substrates are placed one by one on the corresponding adsorption parts of the linkage telescopic part in the unfolded state, the paper covering piece is covered on each group of glass substrates, the cutting part is matched to realize the cutting of the tearable paper, the synchronous paper covering operation of multiple groups of glass substrates is completed, and the working efficiency is improved.

[0017] 2、After the paper covering operation is completed, the stacking assembly is controlled to rotate to be perpendicular to the ground, the sliding frame is controlled to move, each group of glass substrates adsorbed in the U-shaped adsorption plate is driven to rotate to be parallel to the ground, the linkage telescopic part is controlled to shrink, the synchronous stacking of multiple groups of glass substrates is completed, the stacking efficiency is improved, the process is optimized, and the working efficiency is further improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0019] Figure 2 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application. Figure 1 It is an enlarged view of the A area of the semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0020] Figure 3 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0021] Figure 4 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0022] Figure 5 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0023] Figure 6 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0024] Figure 7 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0025] Figure 8 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0026] Figure 9 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0027] Figure 10 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0028] Figure 11 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0029] Figure 12 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0030] Figure 13 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0031] Figure 14 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0032] Figure 15 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application. Figure 14 It is an enlarged view of the B area of the semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0033] Figure 16 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0034] Figure 17 It is a structure schematic diagram of a semiconductor glass substrate intelligent stacking industrial robot protection paper state of the application.

[0035] Figure 18 Structure diagram of the storage part of the application.

[0036] In the figure: 1, fixed frame; 2, stacking assembly; 3, bearing part; 4, sliding part; 5, sliding frame; 6, adsorption part; 7, glass substrate; 8, paper cover; 9, protective paper; 10, tearable paper; 11, easy-to-tear line; 12, U-shaped seat; 13, cutting part; 14, boss; 15, storage part; 16, servo motor; 17, controller; 18, first U-shaped plate; 19, shaft hole; 20, bearing frame; 21, second U-shaped plate; 22, connecting shaft; 23, stepping motor; 24, screw rod; 25, sliding plate; 26, sliding rail; 27, sliding groove; 28, L-shaped extension plate; 29, screw hole; 30, sliding rod; 31, sliding hole; 32, threaded sleeve; 33, driving motor; 34, first screw rod; 35, I-shaped connecting rod; 36, first connecting rod; 37, first rotating hole; 38, second rotating hole; 39, I-shaped rotating shaft; 40, second connecting rod; 41, third rotating hole; 42, U-shaped suction plate; 43, adsorption hole; 44, air extraction pipe; 45, vacuum pump; 46, baffle; 47, I-shaped rotating rod; 48, lug plate; 49, guide rod; 50, first electric push rod; 51, guide groove; 52, L-shaped guide plate; 53, bottom plate; 54, T-shaped base; 55, vertical rod; 56, lifting plate; 57, second electric push rod; 58, support plate; 59, first pressing plate; 60, cross-shaped slot; 61, third electric push rod; 62, E-shaped frame; 63, mounting plate; 64, cross-shaped rail; 65, vertical plate; 66, cutting knife; 67, support seat; 68, avoiding groove; 69, U-shaped fence; 70, positioning frame; 71, top cover; 72, second pressing plate; 73, second screw rod; 74, L-shaped frame; 75, through groove. DETAILED DESCRIPTION

[0037] It should be noted that the embodiments and features in the embodiments in the present application can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0038] It should be noted that, unless otherwise specified, all the technical and scientific terms used in the present application have the same meaning as that generally understood by the ordinary skilled person in the technical field to which the present application belongs.

[0039] In the present application, unless otherwise specified, the orientation such as "upper", "lower" is generally directed to the direction shown in the drawings, or is directed to the vertical, perpendicular or gravity direction; similarly, for the convenience of understanding and description, "left", "right" is generally directed to the left and right shown in the drawings; "inner", "outer" refers to the inner and outer relative to the contour of each component itself, but the above orientation words are not used to limit the present application.

[0040] Embodiment one, please refer to Figures 1-18The application provides the following technical solutions:

[0041] The application discloses a kind of semiconductor glass substrate intelligent stacking industrial robots, specifically, including fixed frame 1 and the stacking assembly 2 of rotation being arranged on fixed frame 1;Stacking assembly 2 includes bearing part 3;Sliding part 4 is slidably arranged between the inner wall of bearing part 3;Linkage telescopic part is arranged between bearing part 3 and sliding part 4;Sliding frame 5 is slidably arranged on the side surface of bearing part 3;Several suction parts 6 compatible with sliding frame 5 are uniformly arranged on linkage telescopic part;Suction part 6 is used to adsorb glass substrate 7;It also includes the paper cover 8 of each glass substrate 7 surface in unfolded state;Paper cover 8 includes several protective paper 9 and tearable paper 10 arranged alternately;Easily torn line 11 is arranged at the junction of protective paper 9 and tearable paper 10;Fixed frame 1 includes U-shaped seat 12;U-shaped seat 12 side surface is slidably arranged with cutting part 13 for cutting paper cover 8;U-shaped seat 12 side surface is fixed with boss 14;Storage part 15 for storing each glass substrate 7 in stacking state is slidably arranged on the surface of boss 14.

[0042] The working principle of the embodiment is as follows:

[0043] By placing glass substrate 7 into corresponding suction part 6 on linkage telescopic part one by one in unfolded state, paper cover 8 is covered on each group of glass substrate 7, and cutting part 13 is used to cut tearable paper 10, so that synchronous paper covering operation of multiple groups of glass substrate 7 is completed, and the working efficiency is improved;After completing the paper covering operation, the stacking assembly 2 is controlled to rotate to be perpendicular to the ground, the sliding frame 5 is controlled to move, and each group of glass substrate 7 adsorbed in the U-shaped suction plate 42 is synchronously rotated to be parallel to the ground, the linkage telescopic part is controlled to shrink, the synchronous stacking of multiple groups of glass substrate 7 is completed, the stacking efficiency is improved, the process is optimized, and the working efficiency is further improved.

[0044] The second embodiment is described below Figures 1-18 The second embodiment is improved on the basis of the first embodiment, specifically, the U-shaped seat 12 is fixed with a servo motor 16 on the inner wall, and the controller 17 is fixed on the side surface;The output end of the controller 17 is electrically connected with the output end of the servo motor 16;The first U-shaped plate 18 is fixed on the inner wall of the U-shaped seat 12;The shaft hole 19 is formed on the side surface of the first U-shaped plate 18;The bearing frame 20 is included in the bearing part 3;The second U-shaped plate 21 is fixed on the side surface of the bearing frame 20;The connecting shaft 22 is rotatably connected with the shaft hole 19 on the side surface of the second U-shaped plate 21;The output end of the servo motor 16 is fixedly connected with the end of the connecting shaft 22.

[0045] The end of the connecting shaft 22 is fixedly installed on the output end of the servo motor 16 by the fastening bolt, the servo motor 16 is controlled to rotate, the stacking assembly 2 is driven to rotate, and the conversion of the paper covering and stacking process is completed.

[0046] The bearing frame 20 is fixedly installed with a stepping motor 23 connected with the output end of the controller 17; the output end of the stepping motor 23 is fixedly connected with a lead screw 24; the sliding part 4 comprises a sliding plate 25; the top and bottom of the sliding plate 25 are fixedly connected with sliding rails 26; the inner wall of the bearing frame 20 is symmetrically provided with sliding grooves 27 slidably connected with the sliding rails 26; the side of the sliding plate 25 is fixedly connected with an L-shaped extension plate 28; the side of the L-shaped extension plate 28 is provided with screw holes 29 threadedly connected with the lead screw 24.

[0047] The side of the sliding plate 25 and the side of the bearing frame 20 are fixedly connected with I-shaped connecting rods 35; the connecting rod telescopic part comprises a plurality of first connecting rods 36 rotatably connected with each other; the surface of the first connecting rod 36 is provided with a first rotating hole 37, and the surface thereof is symmetrically provided with second rotating holes 38 near the two ends; I-shaped rotating shafts 39 are rotatably arranged between the two second rotating holes 38 of the same shaft; the end of the outermost first connecting rod 36 is rotatably provided with a second connecting rod 40; the surface of the second connecting rod 40 is symmetrically provided with third rotating holes 41 near the two ends; the second rotating holes 38 and the third rotating holes 41 are rotatably connected through the I-shaped rotating shafts 39; the other third rotating holes 41 are rotatably connected with the corresponding I-shaped connecting rods 35.

[0048] By controlling the starting of the stepping motor 23 to drive the rotation of the lead screw 24, the L-shaped extension plate 28 drives the sliding plate 25 to slide along the inside of the bearing frame 20, and through the rotation connection of each group of first connecting rods 36, second connecting rods 40, I-shaped rotating shafts 39 and I-shaped connecting rods 35, the connecting rod telescopic part is expanded or contracted with the sliding of the sliding plate 25, specifically, when the sliding plate 25 slides towards the direction of the I-shaped connecting rod 35 on the bearing frame 20, the connecting rod telescopic part is contracted, and when the sliding plate 25 slides away from the direction of the I-shaped connecting rod 35 on the bearing frame 20, the connecting rod telescopic part is expanded; during the contraction or expansion of the connecting rod telescopic part, each group of guide rods 49 slides in the sliding frame 5.

[0049] The side of the bearing frame 20 is symmetrically fixedly connected with sliding rods 30; the surface of the sliding frame 5 is symmetrically provided with sliding holes 31 slidably connected with the sliding rods 30; the surface of the sliding frame 5 is fixedly connected with a threaded sleeve 32; the inner bottom surface of the second U-shaped plate 21 is fixedly connected with a driving motor 33 connected with the output end of the controller 17 through electrical connection; the output end of the driving motor 33 is fixedly connected with a first screw rod 34 threadedly connected with the threaded sleeve 32.

[0050] The side of the U-shaped suction plate 42 is fixedly connected with an I-shaped rotating rod 47; the two first rotating holes 37 of the same shaft are rotatably connected with the corresponding I-shaped rotating rod 47; the side of the I-shaped rotating rod 47 is fixedly connected with an ear plate 48; the side of the ear plate 48 is fixedly connected with a guide rod 49 matched with the sliding frame 5.

[0051] By controlling the starting drive motor 33 to drive the first screw rod 34 to rotate, the sliding frame 5 is driven to slide along the slide rod 30, and in the process of sliding, the sliding frame 5 drives each group of guide rods 49 to slide inside the sliding frame 5, thereby driving each group of I-shaped rotating rods 47 to rotate and flip synchronously, and further driving each group of U-shaped suction plates 42 to rotate and flip synchronously together with the glass substrates 7 being adsorbed.

[0052] The adsorption part 6 comprises a U-shaped suction plate 42 with a hollow structure inside; the inner wall of the U-shaped suction plate 42 is uniformly provided with a plurality of adsorption holes 43, and the side surface is provided with a suction pipe 44 in communication; the surface of the U-shaped seat 12 is fixedly installed with a vacuum pump 45 electrically connected with the controller 17; the vacuum pump 45 is connected between the suction end and the suction pipe 44 through a hose; the both ends of the U-shaped suction plate 42 are fixedly provided with a baffle 46.

[0053] Each group of glass substrates 7 is placed inside the U-shaped suction plate 42, and the vacuum pump 45 is controlled to start to suck the air inside the U-shaped suction plate 42, so that the U-shaped suction plate 42 forms a negative pressure environment, thereby adsorbing and fixing the corresponding glass substrate 7 through the adsorption hole 43.

[0054] The side surface of the U-shaped seat 12 is fixedly provided with a first electric push rod 50 electrically connected with the output end of the controller 17, and the side surface is provided with a guide groove 51; the cutting part 13 comprises an L-shaped guide plate 52 in sliding cooperation with the guide groove 51; the first electric push rod 50 is fixedly connected with the L-shaped guide plate 52 at the extension end; the end of the L-shaped guide plate 52 is fixedly provided with a bottom plate 53; the side surface of the bottom plate 53 is fixedly provided with a T-shaped base 54; the surface of the bottom plate 53 is fixedly provided with vertical rods 55 in symmetry; the lifting plate 56 is slidingly arranged between the two vertical rods 55; the bottom plate 53 and the lifting plate 56 are fixedly connected with a second electric push rod 57 electrically connected with the output end of the controller 17.

[0055] The side surface of the lifting plate 56 is fixedly provided with a support plate 58 in symmetry; the end of the support plate 58 is fixedly provided with a first pressing plate 59; the opposite side surfaces of the first pressing plate 59 are symmetrically provided with a cross-shaped groove 60; the side surface of the lifting plate 56 is fixedly provided with a third electric push rod 61 electrically connected with the output end of the controller 17; the extension end of the third electric push rod 61 is fixedly provided with an E-shaped frame 62; the end of the E-shaped frame 62 is fixedly provided with a plurality of mounting plates 63; the opposite side surfaces of the mounting plate 63 are fixedly provided with a cross-shaped rail 64 in sliding cooperation with the corresponding cross-shaped groove 60; the end of the mounting plate 63 is fixedly provided with a vertical plate 65; the side surface of the vertical plate 65 is fixedly provided with a cutting knife 66 for cutting the easy-to-tear line 11.

[0056] The first electric push rod 50 is activated to retract, thereby causing the cutting part 13 to slide towards the stacking assembly 2 until the T-shaped base 54 is positioned directly below each group of U-shaped suction plates 42 and they are in contact with each other. Each group of glass substrates 7 is attached to the surface of the T-shaped base 54, and the T-shaped base 54 provides support for the glass substrates 7. At this time, each group of first pressure plates 59 is positioned directly above the corresponding glass substrate 7. The second electric push rod 57 is activated to retract, causing the lifting plate 56 and each group of first pressure plates 59 to descend synchronously and press against the corresponding protective paper 9 on the paper covering part 8 on the surface of each group of glass substrates 7. This prevents the position of the protective paper 9 from being forced to change during the cutting process of the tearable paper 10, which would cause the paper covering operation to fail.

[0057] The storage section 15 includes a support base 67; the bottom surface of the support base 67 has a relief groove 68 that slides with the boss 14; a U-shaped enclosure 69 is fixedly fixed on the surface of the support base 67 and slidably disposed between the inner walls of the two opposing baffles 46; a positioning frame 70 is fixedly fixed on the top of the U-shaped enclosure 69; a top cover 71 is slidably disposed inside the positioning frame 70; a second pressure plate 72 is slidably disposed through the surface of the top cover 71; a second screw 73 is rotatably disposed on the surface of the top cover 71; an L-shaped frame 74 is fixedly fixed on the surface of the second pressure plate 72 and rotatably engaged with the second screw 73; and a through groove 75 is provided on the surface of the positioning frame 70 and slidably engaged with the L-shaped frame 74.

[0058] Working principle of this embodiment two:

[0059] like Figure 1 , Figure 6 , Figure 7 as well as Figure 16 As shown, the connecting rod telescopic part is in the extended state. At this time, the bearing frame 20 on the stacking assembly 2 and each set of U-shaped suction plates 42 are kept horizontal with respect to the ground. The first electric push rod 50 is activated to drive the cutting part 13 to slide towards the stacking assembly 2 until the T-shaped base 54 is placed directly below each set of U-shaped suction plates 42. Each set of glass substrates 7 is placed into the corresponding U-shaped suction plates 42 in sequence. Finally, the vacuum pump 45 is activated so that the U-shaped suction plates 42 adsorb and fix the corresponding glass substrates 7. The protective paper 9 on the paper covering part 8 is covered onto the corresponding glass substrates 7. The first pressure plate 59 of each set is pressed down until it is pressed tightly onto the corresponding protective paper 9. The third electric push rod 61 is activated to drive each set of mounting plates 63 to slide, thereby driving each set of cutting blades 66 to cut along the corresponding easy-tear line 11, completing the synchronous paper covering operation of multiple sets of glass substrates 7, which improves work efficiency.

[0060] After the paper covering operation is completed, the control starts the servo motor 16 to drive the whole stack assembly 2 to rotate. In this process, the control slides the sliding frame 5 along the slide rod 30, the guide rod 49 slides in the sliding frame 5, thereby driving each group of U-shaped suction plates 42 to rotate and overturn the glass substrate 7 covered with paper synchronously. When the bearing frame 20 rotates to be perpendicular to the ground, each group of U-shaped suction plates 42 rotates to be parallel to the ground synchronously with the glass substrate 7 covered with paper. The control slides the sliding plate 25 towards the I-shaped connecting rod 35 on the bearing frame 20, the connecting rod telescopic part is contracted, so that each group of U-shaped suction plates 42 slides and approaches each other, until the adjacent U-shaped suction plates 42 are attached to each other, the synchronous stacking of each group of glass substrates 7 covered with paper is completed, the stacking efficiency is improved, and the work efficiency is improved.

[0061] The receiving part 15 is slid along the boss 14 towards the glass substrate 7, until the U-shaped fence 69 is slid and inserted between the opposite two baffle plates 46, so that each group of glass substrates 7 covered with paper is received between the support seat 67 and the U-shaped fence 69. The top cover 71 is pushed along the positioning frame 70, so that the top cover 71 is slid to the top of the uppermost glass substrate 7. The second screw rod 73 is rotated to drive the second pressing plate 72 to slide and descend in the top cover 71 and press tightly on the surface of the corresponding glass substrate 7. The clamping and fixing of the stacked glass substrate 7 is completed, and the receiving part 15 can be slid and taken out.

[0062] Obviously, the above-described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor should belong to the scope of protection of the present application.

[0063] It should be noted that the terms used herein are only intended to describe specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form unless the context clearly indicates otherwise, and it should be understood that when the terms "comprise" and / or "include" are used in the specification, there is a feature, step, work, device, component and / or combination thereof.

[0064] It should be noted that the terms "first", "second", and the like in the specification and claims of the present application and the above-described drawings are used to distinguish similar objects, and do not necessarily indicate a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0065] The above merely describes the preferred embodiments of the present application, and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

[0066] The above merely describes the preferred embodiments of the present application, and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A smart stacking industrial robot for semiconductor glass substrates, comprising a fixed frame (1) and a stacking assembly (2) rotatably mounted on the fixed frame (1); characterized in that: The stacking assembly (2) includes a support part (3); a sliding part (4) is slidably disposed between the inner walls of the support part (3); a connecting rod telescopic part is disposed between the support part (3) and the sliding part (4); The supporting part (3) is slidably provided with a sliding frame (5) on its side; a plurality of adsorption parts (6) adapted to the sliding frame (5) are uniformly rotatably provided on the connecting rod extension part; the adsorption parts (6) are used to adsorb the glass substrate (7). It also includes a paper cover (8) laid on the surface of each of the glass substrates (7) in the unfolded state; the paper cover (8) includes a plurality of protective papers (9) and a tearable paper (10) arranged in an alternating manner; an easy-tear line (11) is provided at the connection between the protective paper (9) and the tearable paper (10). The fixing frame (1) includes a U-shaped seat (12); the side of the U-shaped seat (12) is slidably provided with a cutting part (13) for cutting the paper cover (8). The U-shaped base (12) has a boss (14) fixed on its side; the surface of the boss (14) is slidably provided with a storage part (15) for storing each glass substrate (7) in a stacked state. A servo motor (16) is fixed to the inner wall of the U-shaped seat (12), and a controller (17) is fixed to its side. The output end of the controller (17) is electrically connected to the output end of the servo motor (16). A first U-shaped plate (18) is fixed to the inner wall of the U-shaped seat (12). A shaft hole (19) is opened on the side of the first U-shaped plate (18). The bearing part (3) includes a bearing frame (20). A second U-shaped plate (21) is fixed to the side of the bearing frame (20). A connecting shaft (22) that rotates with the shaft hole (19) is fixed to the side of the second U-shaped plate (21). The output end of the servo motor (16) is fixedly connected to the end of the connecting shaft (22).

2. The intelligent stacking industrial robot for semiconductor glass substrates according to claim 1, characterized in that: A stepper motor (23) electrically connected to the output end of the controller (17) is fixedly installed on the surface of the support frame (20); a lead screw (24) is fixed to the output end of the stepper motor (23); the sliding part (4) includes a slide plate (25); a slide rail (26) is fixed to the top and bottom of the slide plate (25); symmetrical grooves (27) that slide with the slide rail (26) are opened on both sides of the inner wall of the support frame (20); an L-shaped extension plate (28) is fixed to the side of the slide plate (25); a screw hole (29) that rotates with the lead screw (24) is opened on the side of the L-shaped extension plate (28).

3. The intelligent stacking industrial robot for semiconductor glass substrates according to claim 2, characterized in that: The support frame (20) is symmetrically fixed with sliding rods (30) on its side; the sliding frame (5) is symmetrically provided with sliding holes (31) that slide with the sliding rods (30); the sliding frame (5) is fixed with a threaded sleeve (32); the bottom surface of the second U-shaped plate (21) is fixed with a drive motor (33) that is electrically connected to the output end of the controller (17); the output end of the drive motor (33) is fixed with a first screw (34) that rotates with the threaded sleeve (32).

4. The intelligent stacking industrial robot for semiconductor glass substrates according to claim 3, characterized in that: The sides of the slide plate (25) and the side of the support frame (20) are both fixed with I-shaped connecting rods (35); the telescopic part of the connecting rod includes several first connecting rods (36) that rotate and cooperate with each other; the surface of the first connecting rod (36) is provided with a first rotating hole (37), and its surface is symmetrically provided with second rotating holes (38) near its two ends; an I-shaped rotating shaft (39) is rotatably arranged between the two second rotating holes (38) on the same axis. The outermost first connecting rod (36) is rotatably provided with a second connecting rod (40); the surface of the second connecting rod (40) is symmetrically provided with a third rotating hole (41) near its two ends; the coaxial second rotating hole (38) and the third rotating hole (41) are rotatably engaged by an I-shaped rotating shaft (39); the other third rotating hole (41) is rotatably engaged with the corresponding I-shaped connecting rod (35).

5. The intelligent stacking industrial robot for semiconductor glass substrates according to claim 4, characterized in that: The adsorption unit (6) includes a U-shaped suction plate (42) with a hollow internal structure; the inner wall of the U-shaped suction plate (42) is evenly provided with a plurality of adsorption holes (43), and a suction pipe (44) is provided on its side; a vacuum pump (45) that is electrically connected to the controller (17) is fixedly installed on the surface of the U-shaped seat (12); the suction end of the vacuum pump (45) is connected to the suction pipe (44) through a flexible hose; baffles (46) are fixed at both ends of the U-shaped suction plate (42). The U-shaped suction plate (42) is fixed with an I-shaped rotating rod (47) on its side; the two coaxial first rotating holes (37) are rotatably engaged with the corresponding I-shaped rotating rod (47); the I-shaped rotating rod (47) is fixed with an ear plate (48) on its circumferential side; the ear plate (48) is fixed with a guide rod (49) that is compatible with the sliding frame (5) on its side.

6. The intelligent stacking industrial robot for semiconductor glass substrates according to claim 5, characterized in that: The U-shaped seat (12) has a first electric push rod (50) fixed on its side and electrically connected to the output end of the controller (17), and a guide groove (51) is provided on its side; the cutting part (13) includes an L-shaped guide plate (52) that slides with the guide groove (51); the telescopic end of the first electric push rod (50) is fixedly connected to the L-shaped guide plate (52); The L-shaped guide plate (52) is fixed with a base plate (53) at its end; a T-shaped base (54) is fixed with the side of the base plate (53); vertical rods (55) are symmetrically fixed with the surface of the base plate (53); a lifting plate (56) is slidably arranged between the two vertical rods (55); a second electric push rod (57) is fixedly connected between the base plate (53) and the lifting plate (56) and is electrically connected to the output end of the controller (17).

7. The intelligent stacking industrial robot for semiconductor glass substrates according to claim 6, characterized in that: The lifting plate (56) has support plates (58) evenly fixed on its side; the support plate (58) has a first pressure plate (59) fixed at its end; the first pressure plate (59) has cross-shaped grooves (60) symmetrically opened on its two opposite sides. The lifting plate (56) has a third electric push rod (61) fixed on its side, which is electrically connected to the output end of the controller (17); the telescopic end of the third electric push rod (61) is fixed with an E-shaped frame (62); the end of the E-shaped frame (62) is fixed with several mounting plates (63); the mounting plates (63) have cross-shaped rails (64) that slide in cooperation with the corresponding cross-shaped grooves (60) symmetrically fixed on opposite sides; the end of the mounting plates (63) is fixed with a vertical plate (65); the side of the vertical plate (65) is symmetrically fixed with a cutting knife (66) for cutting the easy-tear line (11).

8. The intelligent stacking industrial robot for semiconductor glass substrates according to claim 7, characterized in that: The storage section (15) includes a support base (67); the bottom surface of the support base (67) is provided with a relief groove (68) that slides with the boss (14); a U-shaped enclosure (69) is fixed on the surface of the support base (67) and is slidably disposed between the inner walls of the two opposing baffles (46); a positioning frame (70) is fixed on the top of the U-shaped enclosure (69); a top cover (71) is slidably disposed inside the positioning frame (70); a second pressure plate (72) is slidably disposed through the surface of the top cover (71); a second screw (73) is rotatably disposed on the surface of the top cover (71); an L-shaped frame (74) is fixed on the surface of the second pressure plate (72) and is threadedly rotated with the second screw (73); a through groove (75) is provided on the surface of the positioning frame (70) and is slidably disposed with the L-shaped frame (74).

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