Carbon dioxide treatment system and method for combustion tail gas

Abstract

The invention provides a carbon dioxide treatment system and method for combustion tail gas, mainly through the combined design of an incineration device, a cooling device, an adsorption and desorption device, a chimney, a compression and liquefaction device and at least one storage device, the incineration device discharges the combustion tail gas, the combustion tail gas contains carbon dioxide gas, and the cooling device is used for cooling the combustion tail gas. Combustion tail gas is cooled by the cooling device and then sent to the adsorption and desorption device for adsorption and desorption of carbon dioxide gas, then the desorbed carbon dioxide gas is compressed and liquefied into liquid carbon dioxide by the compression and liquefaction device, and the liquid carbon dioxide is stored by the storage device. Storage equipment with liquid carbon dioxide can be conveyed to a place for purification treatment, so that the device has the efficiency of concentrating and recycling carbon dioxide gas in combustion tail gas.

Description

TECHNICAL FIELD

[0001] The present application relates to a carbon dioxide treatment system of combustion tail gas and a method thereof, in particular to a carbon dioxide treatment system of combustion tail gas with the efficiency of concentrating and recycling carbon dioxide gas in combustion tail gas, which is suitable for petrochemical plant area, oil storage plant area, science and technology manufacturing plant area or similar area. BACKGROUND

[0002] Taiwan's semiconductor cluster is complete, and advanced process development is rapid. The demand for related electronic chemicals and gases is growing, and chemical plants are striving to enter the supply chain. When the electronics industry grows, the demand for industrial gases will also increase simultaneously. The main industrial gas suppliers are Lianhua Gas, Sanfu Gas, and Yada Gas.

[0003] In response to the trend of green economy, Donglian starts with ethylene, and the byproduct of ethylene oxide production is carbon dioxide. After carbon capture, the carbon dioxide is reused to produce high-purity liquid carbon dioxide. This product can be applied to beverage, food-grade, and can also enter the supply chain of electronics and semiconductor industries. Currently, more than 70% of carbon dioxide comes from reuse.

[0004] However, the electronics or semiconductor industry is prone to produce volatile organic gases (VOC) when manufacturing products. Volatile organic gases (VOC) are hydrocarbons, plus the use of auxiliary fuels such as natural gas for heating, which will also produce carbon dioxide after combustion and oxidation. Currently, most of them are directly discharged through the chimney.

[0005] Therefore, the applicant, in view of the above shortcomings, hopes to provide a carbon dioxide treatment system of combustion tail gas with the efficiency of concentrating and recycling carbon dioxide gas in combustion tail gas, so that users can easily operate and assemble. Intensive thinking, design and organization, to provide convenience for users, which is the motivation for the applicant to develop the invention. SUMMARY

[0006] In view of the above technical problems, the present application provides a carbon dioxide treatment system of combustion tail gas and a method thereof, in order to at least partially solve the above technical problems, thus the specific technical solutions provided by the present application are as follows.

[0007] The main purpose of the present application is to provide a carbon dioxide treatment system for combustion exhaust gas and a method thereof. The system mainly comprises a combustion exhaust gas, a cooling device, an adsorption and desorption device, a chimney, a compression and liquefaction device, and at least one storage device. The combustion exhaust gas contains carbon dioxide gas. The combustion exhaust gas is cooled by the cooling device, and then sent to the adsorption and desorption device for carbon dioxide gas adsorption and desorption. The desorbed carbon dioxide gas is compressed and liquefied into liquid carbon dioxide by the compression and liquefaction device. The liquid carbon dioxide is stored in the storage device. The storage device with liquid carbon dioxide can be sent to a place for purification treatment. The system has the effects of concentrating and recycling carbon dioxide gas in the combustion exhaust gas, and increasing the overall practicability.

[0008] Another purpose of the present application is to provide a carbon dioxide treatment system for combustion exhaust gas and a method thereof. The system is sent to a place for purification treatment by the at least one storage device. The place is provided with at least one purification device. The stored liquid carbon dioxide is purified into any one of high-concentration liquid carbon dioxide or high-concentration gaseous carbon dioxide by the purification device. When the liquid carbon dioxide is purified into high-concentration liquid carbon dioxide, it is stored in at least one purified storage device. The purified high-concentration liquid carbon dioxide is sent to a factory area for use. When the liquid carbon dioxide is purified into high-concentration gaseous carbon dioxide, the purification device is provided with a purification pipeline connected to a factory area. The purified high-concentration gaseous carbon dioxide is transported to the factory area through the purification pipeline for use. The factory area is any one of a semiconductor process factory area, an electronic process factory area, an optoelectronic process factory area, a chemical process factory area, a petrochemical process factory area, an electroplating process factory area, a food process factory area, a drying and cleaning process factory area, and a pharmaceutical process factory area. The purified carbon dioxide has the effects of recycling and reuse, and increases the overall usability.

[0009] Another object of the present application is to provide a carbon dioxide treatment system for combustion exhaust gas and a method thereof, which is combined with either a two-rotor volatile organic gas (VOC) treatment system or a single-rotor volatile organic gas (VOC) treatment system, wherein the incineration device is any one of a direct-fired incinerator (TO), a catalytic incinerator, or a regenerative incinerator (RTO), so that the incineration device can oxidize the desorption concentrated gas desorbed from the zeolite rotor at high temperature to oxidize volatile organic compounds into main components containing carbon dioxide and water, and then discharge the combustion exhaust gas to capture, separate, purify, and utilize the carbon dioxide gas in the combustion exhaust gas, thereby achieving the purposes of environmental protection, energy saving, and carbon reduction, and further increasing the overall operability.

[0010] For further understanding of the features, characteristics and technical contents of the present application, please refer to the following detailed description of the present application and the attached drawings, which are provided for reference and illustration only, and not to limit the present application. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 Main system architecture schematic diagram of the adsorption and desorption device using a rotor;

[0012] Figure 2 Another system architecture schematic diagram of the adsorption and desorption device using a rotor;

[0013] Figure 3 Architecture schematic diagram of the liquid carbon dioxide entering the purification device;

[0014] Figure 4 First embodiment schematic diagram of the gaseous carbon dioxide entering the purification device;

[0015] Figure 5 Second embodiment schematic diagram of the gaseous carbon dioxide entering the purification device;

[0016] Figure 6 Main system architecture schematic diagram of the adsorption and desorption device using an adsorbent;

[0017] Figure 7 Another system architecture schematic diagram of the adsorption and desorption device using an adsorbent;

[0018] Figure 8 Main step flowchart;

[0019] Figure 9 First embodiment step flowchart after the purification treatment;

[0020] Figure 10 Second embodiment step flowchart after the purification treatment.

[0021] BRIEF DESCRIPTION OF DRAWINGS

[0022] 1. A dual-rotor volatile organic compound (VOC) treatment system;

[0023] 10. An incineration device; 101. A direct-fired incinerator (TO);

[0024] 11. An exhaust gas delivery line; 111. A cooling device; 112. A fan; 113. A dust removal device;

[0025] 20. An adsorption / desorption device; 201. An adsorbent; 202. A rotor;

[0026] 21. At least one adsorption zone

[0027] 22. At least one desorption zone;

[0028] 23. At least one exhaust gas line; 231. A fan;

[0029] 24. At least one hot gas line;

[0030] 25. At least one desorption gas line;

[0031] 26. A chimney;

[0032] 27. A compression liquefaction device;

[0033] 28. A storage device;

[0034] 29. A heater;

[0035] 30. A site;

[0036] 31. A purification device; 3101. A raw material tank; 3102. A purification column; 31021. A packing bed; 3103. A heater; 3104. A cooling facility; 311. A purification line; 3121. A liquid-to-gas device; 3122. A raw material tank; 3123. A membrane contactor; 31231. A membrane; 3124. A heater; 3131. A liquid-to-gas device; 3132. A raw material tank; 3133. An adsorption / desorption bed module; 3134. A vacuum pump;

[0037] 32. A purified storage device;

[0038] 33. A plant site;

[0039] 40. A first adsorption rotor; 401. An adsorption zone; 402. A cooling zone; 403. A desorption zone;

[0040] 41. An exhaust gas inlet line; 411. An exhaust gas communication line; 4111. An exhaust gas communication control valve;

[0041] 42, first clean gas exhaust line; 421, first clean gas communication line; 4211, first clean gas communication control valve;

[0042] 43, first cool gas intake line;

[0043] 44, first cool gas delivery line;

[0044] 45, first hot gas delivery line;

[0045] 46, first desorbed concentrated gas line; 461, fan;

[0046] 50, second adsorption wheel; 501, adsorption zone; 502, cooling zone; 503, desorption zone;

[0047] 52, second clean gas exhaust line; 521, fan;

[0048] 53, second cool gas intake line;

[0049] 54, second cool gas delivery line;

[0050] 55, second hot gas delivery line;

[0051] 56, second desorbed concentrated gas line; 561, fan;

[0052] 61, first heat exchanger; 611, first cold side line; 612, first hot side line;

[0053] 62, second heat exchanger; 621, second cold side line; 622, second hot side line;

[0054] 63, third heat exchanger; 631, third cold side line; 632, third hot side line;

[0055] 64, fourth heat exchanger; 641, fourth cold side line; 642, fourth hot side line;

[0056] 65, first cold side delivery line;

[0057] 66, fourth cold side delivery line;

[0058] S100, exhaust combustion tail gas;

[0059] S110, combustion tail gas cooling;

[0060] S120, carbon dioxide adsorption;

[0061] S130, carbon dioxide desorption;

[0062] S140, compression and liquefaction;

[0063] S150, storage device stores;

[0064] S200, purification treatment is performed;

[0065] S210, purified storage device stores;

[0066] S211, sent to the plant for use;

[0067] S220, purified pipeline delivery. DETAILED DESCRIPTION

[0068] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application is further described in detail below in combination with specific examples and with reference to the drawings.

[0069] Reference is made to Figures 1-10 For the schematic diagram of the embodiments of the present application, the best embodiment of the carbon dioxide treatment system of the combustion exhaust gas and the method thereof of the present application is applied to a petrochemical plant, an oil storage plant, a science and technology manufacturing plant or a similar area, mainly having the effect of concentrating and recycling the carbon dioxide gas in the combustion exhaust gas.

[0070] The carbon dioxide treatment system of the combustion exhaust gas of the present application mainly comprises a combination design of an incineration device 10, a cooling device 111, an adsorption and desorption device 20, a chimney 26, a compression and liquefaction device 27 and at least one storage device 28 (as shown in Figure 1 and Figure 2The incineration equipment 10 discharges a combustion tail gas containing carbon dioxide gas, and is provided with a tail gas conveying pipeline 11 for conveying the combustion tail gas. The incineration equipment 10 is any one of a direct-fired incinerator (TO) 101, a catalytic incinerator (not shown), or a regenerative incinerator (RTO) (not shown). When the incineration equipment 10 is the direct-fired incinerator (TO) 101, the direct-fired incinerator (TO) 101 is provided with any one of two heat exchangers, three heat exchangers, or four heat exchangers. The incineration equipment 10 is combined with any one of a dual-rotor volatile organic gas (VOC) treatment system 1 or a single-rotor volatile organic gas (VOC) treatment system (not shown). Since volatile organic gas (VOC) is a hydrocarbon compound, combustion produces carbon dioxide gas. In order to heat the direct-fired incinerator (TO) 101, fuel is needed. If the fuel is a fossil fuel such as natural gas, it contains hydrocarbon compounds, and combustion produces carbon dioxide gas. Therefore, the incineration equipment 10 can oxidize volatile organic gas (VOC) desorbed from the zeolite rotor at a high temperature of about 732°C to oxidize the volatile organic compounds into main components containing carbon dioxide and water, and then capture, separate, purify, and utilize the carbon dioxide in the combustion tail gas. This has the effect of simultaneously treating volatile organic gas (VOC) and carbon dioxide gas, and achieves the purpose of environmental protection, energy saving, and carbon reduction.

[0071] The combustion tail gas is conveyed to the adsorption and desorption device 20 through the tail gas conveying pipeline 11 to adsorb and desorb carbon dioxide gas. When conveyed to the adsorption and desorption device 20, the tail gas conveying pipeline 11 is provided with a cooling device 111 (as shown in Figure 1 and Figure 2 The cooling device 111 is any one of a cooler, a condenser, a dehumidifier, a cooler, a cooling water tower, or a refrigerant compressor. When the cooling device 111 is a cooler, it is any one of a shell-and-tube cooler, a finned tube cooler, or a plate heat exchanger cooler. The cooling device 111 cools the combustion tail gas. Since the combustion tail gas has a high temperature of about 200°C, it needs to be cooled before being sent to the adsorption and desorption device 20 for subsequent adsorption and desorption of carbon dioxide gas. Figure 2 The tail gas conveying pipeline 11 is provided with a fan 112 (as shown in

[0072] Furthermore, in a wafer manufacturing plant, organic compounds sometimes contain silicon elements. After combustion and oxidation, silicon dioxide particles are produced. In addition to the cooling device 111, the tail gas conveying pipeline 11 can also be provided with a dust removal device 113 (as shown in Figure 2As shown), the dust or oxides such as silicon dioxide (SiO2) contained in the combustion exhaust gas are removed and filtered through the dust removal device 113, wherein the dust removal device 113 is any one of a bag dust collector, a pulse bag dust collector, an electric bag composite dust collector, a negative pressure back-blowing bag dust collector, a low-pressure long bag pulse dust collector, a cartridge pulse dust collector, a pulse filter element dust collector, a pulse jet bag dust collector, an inertial dust collector, an electrostatic precipitator, a horizontal electrostatic precipitator, a centrifugal dust collector, a cyclone separator, a multi-cyclone dust collector, a wet dust collector, a wet electrostatic precipitator, a charged water mist dust collector, a water film dust collector, a venturi tube dust collector, and a multi-layer dust collector. In addition, in addition to being equipped with a dust removal device 113, the exhaust gas conveying pipeline 111 can also be equipped with a filter device (not shown), and the dust or oxides such as silicon dioxide (SiO2) contained in the combustion exhaust gas can be removed and filtered through the filter device for dust removal, wherein the filter device can be any of a non-woven filter and a fine mesh.

[0073] The adsorption and desorption device 20 has two embodiments. The first embodiment is provided with at least one adsorption material 201 (such as Figure 6 and Figure 7The at least one adsorbent 201 is filled with a plurality of tubular hollow fiber membrane adsorbents, with a filling rate of 65% to 95%, mainly to increase the adsorption area. The tubular hollow fiber membrane is made of micron-sized powdered adsorbent and high molecular material, and the adsorbent contained therein is any one or combination of zeolite (such as X-type zeolite (e.g. 13X)), anion exchange resin, metal organic framework (MOF) material. The tubular hollow fiber membrane adsorbent contains at least one pore and at least one adsorption layer (not shown in the figure), and the at least one adsorption layer surrounds the at least one pore. The adsorption layer is adjacent to the pore, and multiple pores can also be arranged between the adsorption layers. The number of pores and the number of adsorption layers are not limited by the present application. Gas passes through the pore inside the pore through the pore, but does not penetrate through the pore. The inner diameter of the at least one pore is any one of 0.3 mm to 1.5 mm, which can be designed to match different applications. In addition, the diameter of the tubular hollow fiber membrane adsorbent is D1, and the opening diameter of the at least one pore is d1, which satisfies the condition 1 2 / m 3 1 / d1<99. The tubular hollow fiber membrane adsorbent can be arranged in any one of a rectangular body (not shown in the figure), a fan-shaped body (not shown in the figure), and a cylindrical body, and combined through the above-mentioned shapes to minimize the gap between the tubular hollow fiber membrane adsorbent combinations. The porosity of the tubular hollow fiber membrane adsorbent is 20%-80%, and the porosity is the ratio of the volume of the hollow portion to the total volume of the material, and the gas or liquid enters through the pores. In addition, the specific surface area of the tubular hollow fiber membrane adsorbent is greater than 500 m 2 / m 3 2. The specific surface area refers to the surface area per unit volume of a porous solid substance, and the surface area refers to the internal surface area, which has better adsorption efficiency.

[0074] Furthermore, the tubular hollow fiber pipe type membrane adsorbent material is made of at least one amine group modified anion exchange resin material and one high molecular material (not shown in the figure), which is mainly made of the amine group modified anion exchange resin material and the high molecular material, wherein the high molecular material is at least one of the group consisting of polysulfone, polyethersulfone, polyvinylidene fluoride, polyphenylsulfone, polyacrylonitrile, cellulose acetate, diacetyl cellulose, polyimide, polyetherimide, polyamide, polyvinyl alcohol, polylactic acid, polyglycolic acid, polylactic-glycolic acid, polycaprolactone, polyvinylpyrrolidone, ethylene-vinyl alcohol, polydimethylsiloxane, polytetrafluoroethylene and cellulose acetate. The amine group modified anion exchange resin is exchanged with negative ions. According to the reversible balance principle of ion exchange reaction, the combined exchange ions are any one of hydroxyl (OH - ) or carbonate (CO3 2- ), and the resin can be restored to the original state by using the displacement reaction of ion exchange resin. The amine group modified anion exchange resin material is modified by any one or a combination of primary amine (-NH2), secondary amine (-NHR), tertiary amine (-NR2) and quaternary ammonium salt (-NR3OH). Modification is to change the properties of the material by physical processes such as heating, cooling, ion bombardment and injection, as well as chemical treatment, to improve performance. Amine group (-NH2) is the functional group of amine (amine), and amine can be divided into primary amine (-NH2), secondary amine (-NHR), tertiary amine (-NR2) and quaternary ammonium salt (-NR3OH) according to the number of hydrogen atoms substituted on the nitrogen molecule, wherein the primary amine (-NH2), secondary amine (-NHR) and tertiary amine (-NR2) are weakly basic functional groups that can dissociate OH - in water to exhibit weak alkalinity. The positive groups of such resins can be adsorbed and combined with anions in the solution to produce anion exchange. The quaternary ammonium salt (-NR3OH) is a strongly basic functional group that can dissociate OH - in water to exhibit strong alkalinity. The positive groups of such resins can be adsorbed and combined with anions in the solution to produce anion exchange.

[0075] In addition to the above-mentioned high molecular material, the tubular hollow fiber pipe type membrane adsorbent material used in the present application also adds at least one adsorbent (not shown in the figure), such as zeolite powder, resin, activated carbon, etc. The adsorbent is in powder form, micron size, and the average particle size is between 1-99 microns, wherein 1 micron is equal to 1*10 -6The tubular hollow fiber tube type membrane adsorbent is made by dry-wet spinning phase transition method, and the membrane body structure of the tubular hollow fiber tube type membrane adsorbent is similar to sponge or foam structure, and has connected micron-sized small pores, and gas molecules can move and diffuse between the micron-sized small pores, wherein the gas molecules are sub-nanometer or angstrom (Å) molecular size. In addition, the polymer material content is less than the adsorbent, and the polymer material accounts for 5wt%-55wt%, the adsorbent (such as zeolite) accounts for 95wt%-45wt%, and generally, the better ratio is that the polymer material accounts for 10wt%-30wt%. The use of the tubular hollow fiber tube type membrane adsorbent of the application is mainly used for separating or purifying mixed gas containing two or more gases by adsorption principle. The principle is that the source feed gas flows through the surface of the membrane body of the tubular hollow fiber tube type membrane adsorbent, and is output as concentrated gas. When the source feed gas flows through the surface of the membrane body of the tubular hollow fiber tube type membrane adsorbent, some gas or multiple gases are easily adsorbed by the adsorbent contained in the membrane body of the tubular hollow fiber tube type membrane adsorbent, and other gas components are less easily adsorbed. Therefore, the part of gas that is more easily adsorbed is adsorbed on the adsorbent in the membrane body of the tubular hollow fiber tube type membrane adsorbent, so that the separation or purification effect is achieved. The adsorption factors of the source feed gas include the micropore size of the adsorbent, the size of the gas molecules, the van der Waals force, the polarity, the hydrophilicity or hydrophobicity of the adsorbent, and the like. The flow rate of the source feed gas through the surface of the membrane body of the tubular hollow fiber tube type membrane adsorbent is generally controlled at 0.01m / s-1m / s, and sometimes, the maximum flow rate can be adjusted to 2.5m / s according to the processing efficiency requirement or the low separation and purification requirement.

[0076] The second embodiment of the adsorption and desorption device 20 is provided with at least one rotating wheel 202 (as shown in Figure 1 and Figure 2 ), the rotating wheel 202 is any one of rotating tower type, horizontal type and cylindrical type, and the rotating wheel 202 is filled with any one of activated carbon, zeolite, silica gel, activated alumina, molecular sieve, manganese oxide, calcium hydroxide, graphene and hollow fiber. In addition, the adsorption and desorption device 20 of the application has at least one adsorption zone 21 and at least one desorption zone 22, when the adsorption and desorption device 20 has at least one adsorbent 201 (as shown in Figure 6 and Figure 7The at least one adsorption material 201 is filled with a plurality of tubular hollow fiber tube type membrane adsorption materials, and the at least one adsorption material 201 can be provided as two adsorption materials 201. Taking two adsorption materials 201 as an example, one of the adsorption materials 201 is the adsorption zone 21, and the other adsorption material 201 is the desorption zone 22. After a period of time, the adsorption material 201 is converted to the desorption zone 22, and the other adsorption material 201 is converted to the adsorption zone 21, so as to facilitate the use of adsorption and desorption. When the adsorption and desorption device 20 is the at least one rotating wheel 202 of the second embodiment (as shown in Figure 1 and Figure 2 ), the rotating wheel 202 is divided into at least one adsorption zone 21 and at least one desorption zone 22. After a period of time, the rotating wheel 202 rotates, so that the adsorption zone 21 rotates to the desorption zone 22, and the desorption zone 22 rotates to the adsorption zone 21, so as to facilitate the use of adsorption and desorption.

[0077] The adsorption and desorption device 20 of the present application is provided with at least one exhaust pipe 23, at least one hot gas pipe 24, and at least one desorption gas pipe 25. The at least one adsorption zone 21 is connected to the exhaust gas delivery pipe 11 of the incineration device 10 (as shown in Figure 1 , Figure 2 , Figure 6 and Figure 7 ), so as to send the combustion exhaust gas of the exhaust gas delivery pipe 11 into the at least one adsorption zone 21 for carbon dioxide gas adsorption. The at least one adsorption zone 21 is connected to the at least one exhaust pipe 23, so as to discharge the adsorbed gas generated by the at least one adsorption zone 21 through the at least one exhaust pipe 23. The at least one exhaust pipe 23 is connected to the chimney 26, and the exhaust pipe 23 is provided with a fan 231 (as shown in Figure 2 and Figure 7 ) to push and pull the adsorbed gas through the at least one exhaust pipe 23 into the chimney 26 for discharge. In addition, the at least one desorption zone 22 is connected to the at least one hot gas pipe 24, so as to deliver at least one heat source into the at least one desorption zone 22 through the at least one hot gas pipe 24. The at least one hot gas pipe 24 has two embodiments. The first embodiment is that the at least one hot gas pipe 24 is connected to a heat exchanger (not shown in the figure), which is any one of a finned tube heat exchanger, a shell and tube heat exchanger, a plate heat exchanger, a gas-to-gas heat exchanger, and a liquid-to-gas heat exchanger. The second embodiment is that the at least one hot gas pipe 24 is connected to a heater 29 (as shown in Figure 1 , Figure 2 , Figure 6 and Figure 7As shown), the heater 29 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater, so that the at least one hot gas pipeline 24 can transport at least one heat source to the at least one desorption zone 22 for desorption through a heat exchanger (not shown) or the heater 29. The at least one desorption zone 22 is connected to the at least one desorption gas pipeline 25 so that the carbon dioxide gas desorbed from the at least one desorption zone 22 is output through the at least one desorption gas pipeline 25.

[0078] The at least one desorbed gas pipeline 25 is connected to the compression and liquefaction device 27 to compress and liquefy the desorbed carbon dioxide gas into liquid carbon dioxide. Carbon dioxide is one of the most easily liquefied gases, with a liquefaction temperature of 15°C and a pressure of approximately 14.7 Pa. When the carbon dioxide pressure exceeds 7.4 MPa and the temperature exceeds 31°C, it transforms into a supercritical fluid. Its physical properties are intermediate between those of a gas and a liquid, combining the characteristics of both gas and liquid, with low viscosity and almost no surface tension. Furthermore, the compression and liquefaction device 27 is equipped with a compressor (not shown). These compressors can be divided into two types: those that change gas volume and those that change gas velocity. A compressor that changes gas volume introduces gas into a confined space and then increases its pressure by compressing the gas volume. A compressor that changes gas velocity uses the rotation of impellers to force the gas to flow at high speed, then passes through a peripheral boost ring. As the cross-sectional area of ​​the boost ring increases, the gas velocity gradually decreases, converting kinetic energy into pressure energy, thereby increasing the pressure. In addition, the compressor has a cooling pipeline (not shown), which is used for the entry of a liquid or a gas. The liquid is any one of water, ice water, and refrigerant, and the gas is any one of air and cold air. After the desorbed carbon dioxide gas is compressed and liquefied into liquid carbon dioxide, the compressed and liquefied carbon dioxide is stored in the at least one storage device 28 (e.g., Figure 1 、 Figure 2 、 Figure 6 and Figure 7 As shown), the at least one storage device 28 is any one of a tank truck, a cylinder, a barrel, a storage tank, and a container, which can facilitate the handling or transportation of the liquid carbon dioxide to any place or any site 30, wherein the site 30 is a place where the liquid carbon dioxide is processed, such as a chemical plant, a gas processing plant, and the like.

[0079] When the at least one storage device 28 is sent to a site 30 for purification, the site 30 is provided with at least one purification device 31 to purify the stored liquid carbon dioxide through the purification device 31 into either high-concentration liquid carbon dioxide or high-concentration gaseous carbon dioxide, and when the purification device 31 purifies the liquid carbon dioxide into high-concentration liquid carbon dioxide, the purified high-concentration liquid carbon dioxide is stored through at least one purified storage device 32 (as shown in Figure 1 and Figure 6 The at least one purified storage device 32 is any one of a tank car, a steel bottle, a barrel, a storage tank, or a container, which can facilitate the transportation of the high-concentration liquid carbon dioxide. The at least one purified storage device 32 is sent to a factory area 33 (as shown in Figure 1 and Figure 6 The purified high-concentration liquid carbon dioxide is sent to the factory area 33 for use, and the factory area 33 is any one of a semiconductor process factory area, an electronic process factory area, an optoelectronic process factory area, a chemical process factory area, a petrochemical process factory area, an electroplating process factory area, a food process factory area, a drying and cleaning process factory area, or a pharmaceutical process factory area, for example, sent back to a semiconductor process factory area for use as a laser light source in deep ultraviolet lithography, or sent back to a semiconductor process factory area for use in cleaning processes or for removing static electricity.

[0080] The purification device 31 for purifying the liquid carbon dioxide into high-concentration liquid carbon dioxide is provided with a raw material tank 3101, a purification tower 3102, a heater 3103, and a cooling facility 3104 (as shown in Figure 3The purified tower 3102 is connected to the raw material tank 3101, the heater 3103, and the cooling facility 3104. The liquid carbon dioxide stored in the at least one storage device 28 is sent to the raw material tank 3101 for storage. The raw material tank 3101 then sends the liquid carbon dioxide to the purified tower 3102 for convection heat exchange with the hot gas sent by the heater 3103, which is any one of an electric heater, a gas heater, a heat medium oil heater, and a hot water heater. The lower boiling point substances dissolved in the liquid carbon dioxide are evaporated and rise, while the higher boiling point substances dissolved in the liquid carbon dioxide are in liquid form and sink. The evaporated lower boiling point substances are cooled by the cooling facility 3104, which is any one of a cooler, a condenser, a dehumidifier, a cooler, a cooling water tower, and a refrigerant compressor, to obtain high-concentration liquid carbon dioxide. In addition, the purified tower 3102 is provided with at least one packing bed 31021, which is any one of a mesh ring (Dixon) packing, a mesh saddle (McMahon) packing, and a corrugated (Sulyer) packing made of double-layer wire mesh, so that the liquid carbon dioxide flows into the top of the purified tower 3102 by its own gravity and undergoes convection heat exchange with the hot gas generated by the heater 3103.

[0081] When the purification device 31 purifies the liquid carbon dioxide into high-concentration gaseous carbon dioxide, the purification device 31 is provided with a purification pipeline 311 connected to a factory area 33 (as shown in Figure 2 and Figure 7 to send the purified high-concentration gaseous carbon dioxide to the factory area 33, which is any one of a semiconductor process factory area, an electronic process factory area, an optoelectronic process factory area, a chemical process factory area, a petrochemical process factory area, an electroplating process factory area, a food process factory area, a drying and cleaning process factory area, and a pharmaceutical process factory area, for example, to be sent back to a semiconductor process factory area for use as a laser light source in deep ultraviolet lithography or for use in cleaning processes and static electricity removal.

[0082] The purification device 31 for purifying liquid carbon dioxide into high-concentration gaseous carbon dioxide has two embodiments. The first embodiment is that the purification device 31 is provided with a liquid-to-gas device 3121, a raw material tank 3122, a thin film contactor 3123, and a heater 3124 (as shown in Figure 4As shown), the liquid-to-gas device 3121 is connected to the raw material tank 3122, wherein the liquid-to-gas device 3121 is any one of an evaporator and a vaporizer, and the raw material tank 3122 is connected to the film contactor 3123, wherein the film contactor 3123 is provided with at least one film 31231, and the at least one film 31231 is any one of a hollow fiber tubular membrane, a nanoporous carbon film, a poly(ether ether) ketone film, a polyimide film, a monoethanolamine film, a rubber-like polymer film, and a polyimide hollow fiber film, and the heater 3124 is connected to the film The contactor 3123, wherein the heater 3124 is any one of an electric heater, a gas heater, a thermal oil heater, and a hot water heater. The liquid carbon dioxide stored in the at least one storage device 28 is first converted into gaseous carbon dioxide by the liquid-to-gas device 3121 and then sent to the raw material tank 3122 for storage. It is then sent to the membrane separator 3123 for convection heat exchange with the hot air sent by the heater 3124, so as to filter and remove impurities in the gaseous carbon dioxide, so that the converted gaseous carbon dioxide can form a high concentration of gaseous carbon dioxide for filtration and purification.

[0083] The second embodiment of the purification device 31 for purifying liquid carbon dioxide into high-concentration gaseous carbon dioxide is that the purification device 31 is provided with a liquid-to-gas device 3131, a raw material tank 3132, at least one adsorption-desorption bed module 3133 and a vacuum pump 3134 (such as Figure 5The liquid-to-gas device 3131 is connected to the raw material tank 3132, wherein the liquid-to-gas device 3131 is any one of an evaporator or a gasifier, the raw material tank 3132 is connected to the at least one adsorption bed module 3133, the vacuum pump 3134 is connected to the at least one adsorption bed module 3133, wherein the adsorption bed module 3133 is filled with a plurality of tubular hollow fiber membrane adsorbents, the tubular hollow fiber membrane adsorbents are any one or a combination of zeolite, anion exchange resin, metal organic framework material, the tubular hollow fiber membrane adsorbents comprise at least one pore and at least one adsorption layer (not shown in the figure), the adsorption layer comprises an amine group modified anion exchange resin material and a polymer material (please refer to the previous paragraph for the content of the tubular hollow fiber membrane adsorbent), the liquid carbon dioxide stored in the at least one storage device 28 is converted into gaseous carbon dioxide by the liquid-to-gas device 3131 and then sent to the raw material tank 3132, and then transported to the at least one adsorption bed module 3133 for pressurized adsorption or reduced pressure desorption, wherein the at least one adsorption bed module 3133 adopts a combination structure of an absorption tower and a desorption tower, gaseous carbon dioxide enters the absorption tower of the at least one adsorption bed module 3133 and is in countercurrent contact with ethanolamine (MEA) solution entering from the top to perform gaseous carbon dioxide adsorption process. The saturated solution after adsorption is input into the desorption tower of the at least one adsorption bed module 3133 to evaporate and vaporize gaseous carbon dioxide after heating, so as to separate gaseous carbon dioxide from ethanolamine (MEA) solution for desorption, and high-concentration gaseous carbon dioxide is desorbed by vacuum pumping (TVSA process) through the vacuum pump 3134 for reduced pressure desorption, so as to perform filtration and purification.

[0084] Furthermore, the incineration device 10 described in the previous paragraph is combined with any one of a double-rotary volatile organic gas (VOC) treatment system 1 or a single-rotary volatile organic gas (VOC) treatment system (not shown in the figure), when the incineration device 10 is combined with a double-rotary volatile organic gas (VOC) treatment system 1, the incineration device 10 is a direct-fired incinerator (TO) 101, the double-rotary volatile organic gas (VOC) treatment system 1 is designed in combination with a first heat exchanger 61, a second heat exchanger 62, a third heat exchanger 63, a fourth heat exchanger 64, a first cold side conveying pipeline 65, a fourth cold side conveying pipeline 66, a first adsorption rotary wheel 40, a second adsorption rotary wheel 50, and a chimney 26 (as shown in Figure 1 and Figure 2As shown in FIG. 1, the first heat exchanger 61 is provided with a first cold side pipe 611 and a first hot side pipe 612, the second heat exchanger 62 is provided with a second cold side pipe 621 and a second hot side pipe 622, the third heat exchanger 63 is provided with a third cold side pipe 631 and a third hot side pipe 632, and the fourth heat exchanger 64 is provided with a fourth cold side pipe 641 and a fourth hot side pipe 642. The direct-fired incinerator (TO) 101 is provided with a furnace head and a furnace chamber (not shown in the figure), the furnace head is communicated with the furnace chamber, the first heat exchanger 61, the second heat exchanger 62, the third heat exchanger 63 and the fourth heat exchanger 64 are respectively arranged in the furnace chamber of the direct-fired incinerator (TO) 101, and the direct-fired incinerator (TO) 101 is provided with an inlet and an outlet, the inlet is arranged at the furnace head, and the inlet is connected with the other end of the fourth cold side pipe 641 of the fourth heat exchanger 64.

[0085] The furnace head of the direct-fired incinerator (TO) 101 can first transport the high-temperature gas after incineration to one side of the first hot side pipe 612 of the first heat exchanger 61 to exchange heat, then transport the high-temperature gas after incineration from the other side of the first hot side pipe 612 of the first heat exchanger 61 to one side of the second hot side pipe 622 of the second heat exchanger 62 to exchange heat, then transport the high-temperature gas after incineration from the other side of the second hot side pipe 622 of the second heat exchanger 62 to one side of the third hot side pipe 632 of the third heat exchanger 63 to exchange heat, then transport the high-temperature gas after incineration from the other side of the third hot side pipe 632 of the third heat exchanger 63 to one side of the fourth hot side pipe 642 of the fourth heat exchanger 64 to exchange heat, and finally transport the high-temperature gas after incineration from the other side of the fourth hot side pipe 642 of the fourth heat exchanger 64 to the outlet of the furnace chamber.

[0086] The first adsorption wheel 40 is provided with an adsorption zone 401, a cooling zone 402 and a desorption zone 403, and is connected with a waste gas inlet pipe 41, a first clean gas discharge pipe 42, a first cooling gas inlet pipe 43, a first cooling gas delivery pipe 44, a first hot gas delivery pipe 45 and a first desorption concentrated gas pipe 46 (as shown in FIG. 2). Figure 1 and Figure 2 The second adsorption wheel 50 is provided with an adsorption zone 501, a cooling zone 502 and a desorption zone 503, and is connected with a second clean gas discharge pipe 52, a second cooling gas inlet pipe 53, a second cooling gas delivery pipe 54, a second hot gas delivery pipe 55 and a second desorption concentrated gas pipe 56. The first adsorption wheel 40 and the second adsorption wheel 50 are respectively zeolite concentration wheels or concentration wheels made of other materials.

[0087] The waste gas inlet pipeline 41 is connected to one side of the adsorption zone 401 of the first adsorption wheel 40, so that the waste gas inlet pipeline 41 can deliver the organic waste gas to one side of the adsorption zone 401 of the first adsorption wheel 40. One end of the first clean gas discharge pipeline 42 is connected to the other side of the adsorption zone 401 of the first adsorption wheel 40, and one end of the first clean gas discharge pipeline 42 is connected to one side of the adsorption zone 501 of the second adsorption wheel 50 (as shown in Figure 1 and Figure 2 ). Thus, the organic waste gas can be adsorbed by the adsorption zone 401 of the first adsorption wheel 40 and then delivered to the adsorption zone 501 of the second adsorption wheel 50 by the first clean gas discharge pipeline 42. The other side of the adsorption zone 501 of the second adsorption wheel 50 is connected to the second clean gas discharge pipeline 52 (as shown in Figure 1 and Figure 2 ), so that the other end of the second clean gas discharge pipeline 52 is connected to the chimney 26, and the second clean gas discharge pipeline 52 is provided with a fan 521, so that the fan 521 can push and pull the adsorbed gas in the second clean gas discharge pipeline 52 to the chimney 26 for discharge.

[0088] One side of the cooling zone 402 of the first adsorption wheel 40 is connected to the first cooling gas inlet pipeline 43, so that the gas can enter the cooling zone 402 of the first adsorption wheel 40 for cooling. The other side of the cooling zone 402 of the first adsorption wheel 40 is connected to one end of the first cooling gas delivery pipeline 44, and the other end of the first cooling gas delivery pipeline 44 is connected to one end of the second cold side pipeline 621 of the second heat exchanger 62 (as shown in Figure 1 and Figure 2 ), so that the gas entering the cooling zone 402 of the first adsorption wheel 40 can be delivered to the second heat exchanger 62 for heat exchange. In addition, one end of the first hot gas delivery pipeline 45 is connected to the other side of the desorption zone 403 of the first adsorption wheel 40, and the other end of the first hot gas delivery pipeline 45 is connected to the other end of the second cold side pipeline 621 of the second heat exchanger 62, so that the high-temperature hot gas exchanged by the second heat exchanger 62 can be delivered to the desorption zone 403 of the first adsorption wheel 40 through the first hot gas delivery pipeline 45 for desorption.

[0089] The cooling zone 402 of the first adsorption wheel 40 has two embodiments. In the first embodiment, the first cooling gas inlet pipeline 43 connected to one side of the cooling zone 402 of the first adsorption wheel 40 is used to supply fresh air or outside air to provide cooling for the cooling zone 402 of the first adsorption wheel 40. In the second embodiment, the waste gas inlet pipeline 41 is provided with a waste gas communication pipeline 411 (as shown in Figure 1The other end of the exhaust gas communication pipeline 411 is connected with the first cooling gas inlet pipeline 43, so that the exhaust gas in the exhaust gas inlet pipeline 41 can be transported to the cooling zone 402 of the first adsorption runner 40 through the exhaust gas communication pipeline 411 for cooling, and the exhaust gas communication pipeline 411 is provided with an exhaust gas communication control valve 4111 for controlling the air volume of the exhaust gas communication pipeline 411.

[0090] One side of the cooling zone 502 of the second adsorption runner 50 is connected with the second cooling gas inlet pipeline 53 for gas to enter the cooling zone 502 of the second adsorption runner 50 for cooling, and the other side of the cooling zone 502 of the second adsorption runner 50 is connected with one end of the second cooling gas delivery pipeline 54, and the other end of the second cooling gas delivery pipeline 54 is connected with one end of the third cold side pipeline 631 of the third heat exchanger 63 (as shown in Figure 1 and Figure 2 so as to deliver the gas entering the cooling zone 502 of the second adsorption runner 50 to the third heat exchanger 63 for heat exchange, and in addition, one end of the second hot gas delivery pipeline 55 is connected with the other side of the desorption zone 503 of the second adsorption runner 50, and the other end of the second hot gas delivery pipeline 55 is connected with the other end of the third cold side pipeline 631 of the third heat exchanger 63, so that the high-temperature hot gas subjected to heat exchange through the third heat exchanger 63 can be delivered to the desorption zone 503 of the second adsorption runner 50 through the second hot gas delivery pipeline 55 for desorption.

[0091] The cooling zone 502 of the second adsorption runner 50 has two implementation modes, wherein the first implementation mode is that the second cooling gas inlet pipeline 53 connected with one side of the cooling zone 502 of the second adsorption runner 50 supplies fresh air or outside air (as shown in Figure 2 so as to provide the cooling zone 502 of the second adsorption runner 50 with fresh air or outside air for cooling. The second implementation mode is that the first clean gas delivery pipeline 42 is provided with a first clean gas communication pipeline 421 (as shown in Figure 1 The other end of the first clean gas communication pipeline 421 is connected with the second cooling gas inlet pipeline 53, so that the gas in the first clean gas delivery pipeline 42 can be delivered to the cooling zone 502 of the second adsorption runner 50 through the first clean gas communication pipeline 421 for cooling, and the first clean gas communication pipeline 421 is provided with a first clean gas communication control valve 4211 for controlling the air volume of the first clean gas communication pipeline 421.

[0092] One end of the first desorption concentrated gas pipeline 46 is connected with one side of the desorption zone 403 of the first adsorption runner 40, and the other end of the first desorption concentrated gas pipeline 46 is connected with one end of the fourth cold side pipeline 641 of the fourth heat exchanger 64 (as shown in Figure 1and Figure 2 The other end of the fourth cold side conduit 641 of the fourth heat exchanger 64 is connected to one end of the fourth cold side delivery conduit 66, and the other end of the fourth cold side delivery conduit 66 is connected to one end of the first cold side conduit 611 of the first heat exchanger 61. In addition, the other end of the first cold side conduit 611 of the first heat exchanger 61 is connected to one end of the first cold side delivery conduit 65, and the other end of the first cold side delivery conduit 65 is connected to the inlet of the direct-fired incinerator (TO) 101, so that the desorbed concentrated gas after high-temperature desorption can be transported into one end of the fourth cold side conduit 641 of the fourth heat exchanger 64 through the first desorbed concentrated gas conduit 46, into one end of the fourth cold side conduit 641 of the fourth heat exchanger 64 through the other end of the fourth cold side conduit 641 of the fourth heat exchanger 64, into one end of the fourth cold side delivery conduit 66 through the other end of the fourth cold side delivery conduit 66, into one end of the first cold side conduit 611 of the first heat exchanger 61 through the other end of the fourth cold side delivery conduit 66, into one end of the first cold side conduit 611 of the first heat exchanger 61 through the other end of the first cold side conduit 611 of the first heat exchanger 61, and finally into the inlet of the direct-fired incinerator (TO) 101 through the other end of the first cold side delivery conduit 65 (as shown in Figure 1 and Figure 2 so that the tip of the direct-fired incinerator (TO) 101 can be cracked at high temperature to reduce volatile organic compounds. The first desorbed concentrated gas conduit 46 is provided with a fan 461 to push and pull the desorbed concentrated gas into one end of the first cold side conduit 611 of the first heat exchanger 61.

[0093] One end of the second desorbed concentrated gas conduit 56 is connected to one side of the desorption zone 503 of the second adsorption runner 50, and the other end of the second desorbed concentrated gas conduit 56 has two implementation modes. The first implementation mode is that the other end of the second desorbed concentrated gas conduit 56 is connected to the waste gas inlet conduit 41 (as shown in Figure 1 so that the concentrated gas can enter the adsorption zone 401 of the first adsorption runner 40 again through the waste gas inlet conduit 41 for re-adsorption. The second implementation mode is that the other end of the second desorbed concentrated gas conduit 56 is connected to the first cooling gas inlet conduit 43 (as shown in Figure 2 so that the concentrated gas can enter the cooling zone 402 of the first adsorption runner 40 again through the first cooling gas inlet conduit 43 for cooling use. In addition, the second desorbed concentrated gas conduit 56 is provided with a fan 561 (as shown in Figure 2The first desorption concentrated gas pipeline 46 is connected to the first cold side pipeline 611 of the first heat exchanger 61, and the other end of the first cold side pipeline 611 is connected to the first cold side conveying pipeline 65, and the other end of the first cold side conveying pipeline 65 is connected to the inlet of the direct combustion incinerator (TO) 101, so that the desorption concentrated gas after high-temperature desorption can be conveyed to the first cold side pipeline 611 of the first heat exchanger 61 through the first desorption concentrated gas pipeline 46, and then conveyed to the first cold side conveying pipeline 65 through the other end of the first cold side pipeline 611 of the first heat exchanger 61, and finally conveyed to the inlet of the direct combustion incinerator (TO) 101 through the other end of the first cold side conveying pipeline 65.

[0094] Finally, the above-mentioned double-rotor volatile organic gas (VOC) treatment system 1, in addition to the above-mentioned first heat exchanger 61, second heat exchanger 62, third heat exchanger 63, fourth heat exchanger 64 provided in the direct combustion incinerator (TO) 101, can be replaced by only the first heat exchanger 61, second heat exchanger 62, third heat exchanger 63 (as shown in Figure 6 and Figure 7 The difference is that the fourth heat exchanger 64 is removed, and the other end of the first desorption concentrated gas pipeline 46 is connected to one end of the first cold side pipeline 611 of the first heat exchanger 61, and the other end of the first cold side pipeline 611 of the first heat exchanger 61 is connected to one end of the first cold side conveying pipeline 65, and the other end of the first cold side conveying pipeline 65 is connected to the inlet of the direct combustion incinerator (TO) 101, so that the desorption concentrated gas after high-temperature desorption can be conveyed to one end of the first cold side pipeline 611 of the first heat exchanger 61 through the first desorption concentrated gas pipeline 46, and then conveyed to the other end of the first cold side pipeline 611 of the first heat exchanger 61 through the other end of the first cold side pipeline 611 of the first heat exchanger 61, and finally conveyed to the inlet of the direct combustion incinerator (TO) 101 through the other end of the first cold side conveying pipeline 65. The rest of the first adsorption rotor 40 and the second adsorption rotor 50 are designed in the same way, so the above-mentioned direct combustion incinerator (TO) 101, first heat exchanger 61, second heat exchanger 62, third heat exchanger 63, first cold side conveying pipeline 65, first adsorption rotor 40, second adsorption rotor 50 and chimney 26 are not repeated here, please refer to the above description.

[0095] In addition to the above-mentioned combination design with the double-rotor volatile organic gas (VOC) treatment system 1, the incineration equipment of the present application can also be combined with a single-rotor volatile organic gas (VOC) treatment system (not shown), and the difference between the single-rotor volatile organic gas (VOC) treatment system (not shown) and the above-mentioned double-rotor volatile organic gas (VOC) treatment system 1 is that the second adsorption rotor 50 is removed, and two heat exchangers or three heat exchangers can be provided in the direct combustion incinerator (TO) 101, and the combination state can refer to the design of the first adsorption rotor 40 in the double-rotor volatile organic gas (VOC) treatment system 1, and the content is not repeated here, please refer to the above description.

[0096] The carbon dioxide treatment method of the combustion exhaust gas of the present application is mainly used in a carbon dioxide treatment system of a combustion exhaust gas, which is provided with an incineration device 10, a cooling device 111, an adsorption and desorption device 20, a chimney 26 and a compression and liquefaction device 27 (as shown in Figure 1 and Figure 2 The incineration device 10 is provided with an exhaust gas conveying pipeline 11, the cooling device 111 is arranged on the exhaust gas conveying pipeline 11, the adsorption and desorption device 20 has at least one adsorption zone 21 and at least one desorption zone 22, the adsorption and desorption device 20 is provided with at least one exhaust pipeline 23, at least one hot gas pipeline 24 and at least one desorption gas pipeline 25, the at least one adsorption zone 21 is connected with the exhaust gas conveying pipeline 11 of the incineration device 10, the at least one adsorption zone 21 is connected with the at least one exhaust pipeline 23, the at least one exhaust pipeline 23 is connected with the chimney 26, at least one desorption zone 22 is connected with the at least one desorption gas pipeline 25, the at least one desorption zone 22 is connected with the at least one hot gas pipeline 24, and the compression and liquefaction device 27 is connected with the at least one desorption gas pipeline 25.

[0097] The main steps of the carbon dioxide treatment method of the combustion exhaust gas (as shown in Figure 8 include the step S100 of discharging a combustion exhaust gas: the incineration device 10 discharges a combustion exhaust gas containing carbon dioxide gas, and the combustion exhaust gas is sent out through the exhaust gas conveying pipeline 11. After the above step S100 is completed, the next step S110 is performed.

[0098] The above incineration device 10 is any one of a direct-fired incinerator (TO) 101, a catalytic incinerator (not shown in the figure), a regenerative incinerator (RTO) (not shown in the figure), when the incineration device 10 is the direct-fired incinerator (TO) 101, the direct-fired incinerator (TO) 101 is provided with any one of two heat exchangers, three heat exchangers or four heat exchangers, and the incineration device 10 is combined with any one of a double-rotor volatile organic gas (VOC) treatment system 1 or a single-rotor volatile organic gas (VOC) treatment system (not shown in the figure). Since volatile organic gas (VOC) is a hydrocarbon compound, carbon dioxide gas is generated after combustion, and in order to heat the direct-fired incinerator (TO) 101, fuel needs to be used, if the fuel is a fossil fuel such as natural gas, it contains hydrocarbon compounds, and carbon dioxide gas is generated after combustion. Therefore, the incineration device 10 can generally design the volatile organic gas (VOC) desorbed from the zeolite rotor to be oxidized at a high temperature of about 732°C to oxidize the volatile organic compounds into main components containing carbon dioxide and water, capture and separate the carbon dioxide gas in the combustion exhaust gas for purification and utilization, and has the effect of simultaneously treating volatile organic gas (VOC) and carbon dioxide gas to achieve the purpose of environmental protection, energy saving and carbon reduction.

[0099] In addition, the next step S110 is carried out to cool the combustion exhaust gas: the combustion exhaust gas is cooled by the cooling device 111. After the above step S110 is completed, the next step S120 is carried out.

[0100] The combustion exhaust gas is transported to the adsorption and desorption device 20 to adsorb and desorb carbon dioxide gas via the exhaust gas transportation pipeline 11. When transported to the adsorption and desorption device 20, the exhaust gas transportation pipeline 11 is provided with a cooling device 111 (as shown in Figure 1 and Figure 2 The cooling device 111 is any one of a cooler, a condenser, a dehumidifier, a cooler, a cooling water tower, and a refrigerant compressor. When the cooling device 111 is a cooler, the cooler is any one of a shell-and-tube cooler, a finned tube cooler, and a plate heat exchanger cooler. The cooling device 111 cools the combustion exhaust gas. Since the combustion exhaust gas has a high temperature, it needs to be cooled first before being sent to the adsorption and desorption device 20 for subsequent carbon dioxide gas adsorption and desorption. The exhaust gas transportation pipeline 11 is provided with a fan 112 (as shown in Figure 2 to be able to push and pull the combustion exhaust gas into the adsorption and desorption device 20.

[0101] Furthermore, for example, in a wafer manufacturing plant, organic compounds sometimes contain silicon as an elemental component. After combustion and oxidation, silicon dioxide particles are generated. In addition to the cooling device 111, the exhaust gas transportation pipeline 11 can also be provided with a dust removal device 113 (as shown in Figure 2 to remove and filter dust or silicon dioxide (SiO2) and other oxides contained in the combustion exhaust gas. The dust removal device 113 is any one of a bag-type dust collector, a pulse bag-type dust collector, an electric bag-type composite dust collector, a negative pressure back-blowing filter bag dust collector, a low-pressure long-bag pulse dust collector, a filter cartridge-type pulse dust collector, a pulse filter core dust collector, a pulse jet bag-type dust collector, an inertial dust collector, an electrostatic dust collector, a horizontal electrostatic dust collector, a centrifugal dust collector, a cyclone separator, a multi-tube cyclone dust collector, a wet dust collector, a wet electrostatic dust collector, a charged water mist dust collector, a water film dust collector, a Venturi tube dust collector, and a multi-layer dust collector. In addition, in addition to the dust removal device 113, the exhaust gas transportation pipeline 111 can also be provided with a filter screen device (not shown in the figure) to remove and filter dust or silicon dioxide (SiO2) and other oxides contained in the combustion exhaust gas. The filter screen device is any one of a non-woven fabric filter screen and a fine mesh.

[0102] In addition, the next step S120 is carried out to adsorb carbon dioxide: the cooled combustion exhaust gas is sent to at least one adsorption zone 21 of the adsorption and desorption device 20 by the exhaust gas transportation pipeline 11 to adsorb carbon dioxide gas. After the above step S120 is completed, the next step S130 is carried out.

[0103] The above-mentioned adsorption and desorption device 20 has two embodiments. The first embodiment is provided with at least one adsorbent 201 (as shown in Figure 6 and Figure 7 ), which is filled with a plurality of tubular hollow fiber tube type membrane adsorbents, with a filling rate of 65% to 95%, mainly to increase the adsorption area. The tubular hollow fiber tube type membrane is made of micron-sized powder adsorbent and high molecular material, and the adsorbent contained therein is any one or combination of zeolite (such as X-type zeolite (e.g. 13X)), anion exchange resin, metal organic framework (MOF) material. The above-mentioned tubular hollow fiber tube type membrane adsorbent contains at least one pore and at least one adsorption layer (not shown in the figure), and the at least one adsorption layer surrounds the at least one pore, wherein the adsorption layer is adjacent to the pore, and a plurality of pores can also be provided between the adsorption layers, and the number of pores and the number of adsorption layers are not limited by the present application. The gas passes through the pore inside the pore through the pore, but does not penetrate through the pore, wherein the inner diameter of the at least one pore is any one of 0.3 mm to 1.5 mm, which can be designed to match different applications. In addition, the diameter of the tubular hollow fiber tube type membrane adsorbent is D1, and the opening diameter of the at least one pore is d1, which satisfies the condition 1 2 3 The specific surface area of the tubular hollow fiber tube type membrane adsorbent is greater than 500 m 2 / m 3 2 / m 2 2 / m 3 , wherein the specific surface area refers to the surface area per unit volume of a porous solid substance, and the surface area refers to the internal surface area, which has better adsorption efficiency.

[0104] Furthermore, the tubular hollow fiber tube type membrane adsorbent material is made of at least one amine group modified anion exchange resin material and one high molecular material (not shown in the figure), which is mainly made of the amine group modified anion exchange resin material and the high molecular material, wherein the high molecular material is at least one of the group consisting of polysulfone, polyethersulfone, polyvinylidene fluoride, polyphenylsulfone, polyacrylonitrile, cellulose acetate, diacetyl cellulose, polyimide, polyetherimide, polyamide, polyvinyl alcohol, polylactic acid, polyglycolic acid, polylactic-glycolic acid, polycaprolactone, polyvinylpyrrolidone, ethylene-vinyl alcohol, polydimethylsiloxane, polytetrafluoroethylene and cellulose acetate. The amine group modified anion exchange resin is exchanged with negative ions. According to the reversible balance principle of ion exchange reaction, the combined exchange ions are any one of hydroxyl (OH - ) or carbonate (CO3 2- ). The resin can be restored to the original state by using the displacement reaction of ion exchange resin. The amine group modified anion exchange resin material is modified by any one or a combination of primary amine (-NH2), secondary amine (-NHR), tertiary amine (-NR2) and quaternary ammonium salt (-NR3OH). Modification is to change the properties of the material by physical processes such as heating, cooling, ion bombardment and injection, as well as chemical treatment, to improve performance. Amine group (-NH2) is the functional group of amine (amine), and amine can be divided into primary amine (-NH2), secondary amine (-NHR), tertiary amine (-NR2) and quaternary ammonium salt (-NR3OH) according to the number of hydrogen atoms substituted on the nitrogen molecule, wherein the primary amine (-NH2), secondary amine (-NHR) and tertiary amine (-NR2) are weakly basic functional groups, which can dissociate OH - in water to exhibit weak alkalinity. The positive groups of such resins can be adsorbed and combined with anions in the solution, thereby producing anion exchange. The quaternary ammonium salt (-NR3OH) is a strongly basic functional group, which can dissociate OH - in water to exhibit strong alkalinity. The positive groups of such resins can be adsorbed and combined with anions in the solution, thereby producing anion exchange.

[0105] The tubular hollow fiber tube type membrane adsorbent material used in the present application further comprises at least one adsorbent (not shown in the figure) in addition to the above-mentioned high molecular material, such as zeolite powder, resin, activated carbon, etc. The adsorbent is in powder form, micron size, with an average particle size of 1-99 microns, wherein 1 micron is equal to 1*10 -6The tubular hollow fiber tube type membrane adsorbent is made by dry-jet wet spinning phase transition method, and the membrane body of the tubular hollow fiber tube type membrane adsorbent is similar to a sponge or a foam body structure, and has connected micron-sized small pores, and gas molecules can move and diffuse between the micron-sized small pores, wherein the gas molecules are sub-nanometer or angstrom (Å) molecular size. In addition, the content of the polymer material is less than that of the adsorbent, and the polymer material accounts for 5wt%-55wt%, the adsorbent (such as zeolite) accounts for 95wt%-45wt%, and generally, the better ratio is that the polymer material accounts for 10wt%-30wt%. The tubular hollow fiber tube type membrane adsorbent used in the application is mainly used for separating or purifying mixed gas containing two or more gases by adsorption. The principle is that the source feed gas flows through the surface of the membrane body of the tubular hollow fiber tube type membrane adsorbent, and is output as concentrated gas. When the source feed gas flows through the surface of the membrane body of the tubular hollow fiber tube type membrane adsorbent, some gas or multiple gases are easily adsorbed by the adsorbent contained in the membrane body of the tubular hollow fiber tube type membrane adsorbent, and other gas components are less easily adsorbed. Therefore, the part of the gas that is more easily adsorbed is adsorbed on the adsorbent in the membrane body of the tubular hollow fiber tube type membrane adsorbent, so that the separation or purification effect is achieved. The adsorption factors of the source feed gas include the micropore size of the adsorbent, the size of the gas molecules, the van der Waals force, the polarity, the hydrophilicity or hydrophobicity of the adsorbent, and the like. The flow rate of the source feed gas through the surface of the membrane body of the tubular hollow fiber tube type membrane adsorbent is generally controlled at 0.01m / s-1m / s, and sometimes, the maximum flow rate can be adjusted to 2.5m / s according to the processing efficiency requirement or the low separation requirement.

[0106] The second embodiment of the adsorption and desorption device 20 is provided with at least one rotating wheel 202 (as shown in Figure 1 and Figure 2 , the rotating wheel 202 is any one of a rotating tower type, a horizontal type, and a cylindrical type, and the rotating wheel 202 is filled with any one of activated carbon, zeolite, silica gel, activated alumina, molecular sieve, manganese oxide, calcium hydroxide, graphene, and hollow fiber. In addition, the adsorption and desorption device 20 of the application has at least one adsorption zone 21 and at least one desorption zone 22, and when the adsorption and desorption device 20 has the first embodiment of at least one adsorbent 201 (as shown in Figure 6 and Figure 7The at least one adsorbent 201 is filled with a plurality of tubular hollow fiber tube type membrane adsorbent. The at least one adsorbent 201 can be provided as two adsorbents 201. In the case of two adsorbents 201, one of the adsorbents 201 is an adsorption zone 21, and the other adsorbent 201 is a desorption zone 22. After a period of time, the adsorbent 201 is converted to a desorption zone 22, and the other adsorbent 201 is converted to an adsorption zone 21, so as to facilitate the adsorption and desorption. When the adsorption and desorption device 20 is the at least one rotating wheel 202 having the second embodiment, the rotating wheel 202 is divided into at least one adsorption zone 21 and at least one desorption zone 22. After a period of time, the rotating wheel 202 is rotated, so that the adsorption zone 21 is rotated to the desorption zone 22, and the desorption zone 22 is rotated to the adsorption zone 21, so as to facilitate the adsorption and desorption.

[0107] In addition, the next step S130 of carbon dioxide desorption is performed. The adsorbed carbon dioxide gas is desorbed in the at least one desorption zone 22 of the adsorption and desorption device 20, and the desorbed carbon dioxide gas is output by the at least one desorption gas pipeline 25. After the above-mentioned step S130 is completed, the next step S140 is performed.

[0108] The above-mentioned adsorption and desorption device 20 is provided with at least one exhaust pipeline 23, at least one hot gas pipeline 24, and at least one desorption gas pipeline 25. The at least one adsorption zone 21 is connected to the exhaust gas delivery pipeline 11 of the incineration device 10 (as shown in Figure 1 Figure 2 Figure 6 Figure 7 so as to send the combustion exhaust gas of the exhaust gas delivery pipeline 11 into the at least one adsorption zone 21 for carbon dioxide gas adsorption. The at least one adsorption zone 21 is connected to the at least one exhaust pipeline 23, so as to discharge the adsorbed gas generated in the at least one adsorption zone 21 through the at least one exhaust pipeline 23. The at least one exhaust pipeline 23 is connected to the chimney 26. The exhaust pipeline 23 is provided with a fan 231 (as shown in Figure 2 Figure 7 so as to push and pull the adsorbed gas into the chimney 26 through the at least one exhaust pipeline 23 for discharge. In addition, the at least one desorption zone 22 is connected to the at least one hot gas pipeline 24, so as to send at least one heat source into the at least one desorption zone 22 through the at least one hot gas pipeline 24. The at least one hot gas pipeline 24 has two embodiments. In the first embodiment, the at least one hot gas pipeline 24 is connected to a heat exchanger (not shown). The heat exchanger is any one of a finned tube heat exchanger, a shell and tube heat exchanger, a plate heat exchanger, a gas-to-gas heat exchanger, and a liquid-to-gas heat exchanger. In the second embodiment, the at least one hot gas pipeline 24 is connected to a heater 29 (as shown in Figure 1 Figure 2 Figure 6 Figure 7 ​​​​​​​The heater 29 is any one of an electric heater, a gas heater, a heat medium oil heater, or a hot water heater, so that the at least one hot gas pipeline 24 can deliver at least one heat source to the at least one desorption zone 22 through a heat exchanger (not shown) or the heater 29 for desorption, and the at least one desorption zone 22 is connected to the at least one desorption gas pipeline 25 to output the carbon dioxide gas after desorption of the at least one desorption zone 22 through the at least one desorption gas pipeline 25.

[0109] In addition, the next step S140 is to perform compression and liquefaction: the carbon dioxide gas after desorption is delivered to the compression and liquefaction device 27 through the at least one desorption gas pipeline 25 to compress and liquefy the carbon dioxide gas after desorption into liquid carbon dioxide. After the above-mentioned step S140 is completed, the next step S150 is performed.

[0110] The at least one desorption gas pipeline 25 is connected to the compression and liquefaction device 27 to compress and liquefy the carbon dioxide gas after desorption into liquid carbon dioxide. Carbon dioxide is one of the gases that is easier to liquefy, and the liquefaction temperature is 15°C, and the pressure is about 14.7 Pa. When the carbon dioxide pressure is higher than 7.4 MPa and the temperature is higher than 31°C, the carbon dioxide will change into a supercritical fluid, which has physical properties between gas and liquid phases, and has the characteristics of gas and liquid, with low viscosity and almost no surface tension. In addition, the compression and liquefaction device 27 is provided with a compressor (not shown), which can be divided into two types: changing the volume of the gas and changing the speed of the gas. The compressor that changes the volume of the gas first guides the gas into a closed space, and then increases the pressure of the gas by compressing the volume of the gas. The compressor that changes the speed of the gas makes the gas flow at high speed by rotating the blades, and then gradually reduces the flow rate of the gas by increasing the cross-sectional area of the peripheral booster ring, so that the energy of the gas is converted from kinetic energy to pressure energy, and the pressure is increased. In addition, the compressor has a cooling pipeline (not shown) for any one of a liquid or a gas, and the liquid is any one of water, ice water, or refrigerant, and the gas is any one of air or cold air.

[0111] In addition, the next step S150 is to store the equipment: the liquid carbon dioxide is stored by the at least one storage equipment 28.

[0112] After the carbon dioxide gas after desorption is compressed and liquefied into liquid carbon dioxide, the liquid carbon dioxide compressed and liquefied by the compression and liquefaction device 27 is stored by the at least one storage equipment 28 (as shown in Figure 1 、 Figure 2 、 Figure 6 and Figure 7As shown in FIG. 1, the at least one storage device 28 is any one of a tanker, a cylinder, a barrel, a tank, or a container, which can facilitate the transportation of the liquid carbon dioxide to any place or any site 30, where the site 30 is a place for processing liquid carbon dioxide, such as a chemical plant, a gas processing plant, or the like.

[0113] Further, the present application, after the storage device storage step S150, includes the following step (as shown in FIG. 1): S200, purification treatment: the at least one storage device 28 is sent to a site 30 for purification treatment, where the site 30 is provided with at least one purification device 31 to purify the stored liquid carbon dioxide into any one of high-concentration liquid carbon dioxide or high-concentration gaseous carbon dioxide through the purification device 31. Figure 9

[0114] As shown in FIG. 1, when the at least one storage device 28 is sent to a site 30 for purification treatment, the site 30 is provided with at least one purification device 31 (as shown in FIG. 1) to purify the stored liquid carbon dioxide into any one of high-concentration liquid carbon dioxide or high-concentration gaseous carbon dioxide through the purification device 31, where the site 30 is a place for processing carbon dioxide, such as a chemical plant, a gas processing plant, or the like. Figure 1 Figure 2

[0115] After the purification of the stored liquid carbon dioxide through the purification device, there are two embodiments, where the first embodiment is when the liquid carbon dioxide is purified into high-concentration liquid carbon dioxide through the purification device 31, and after the purification treatment step S200, the following step (as shown in FIG. 1) is included: S210, purification storage device storage: the purified high-concentration liquid carbon dioxide is stored through at least one purification storage device 32 by the purification device 31. After the step S210 is completed, the next step S211 is performed. Figure 9

[0116] As shown in FIG. 1, when the liquid carbon dioxide is purified into high-concentration liquid carbon dioxide by the purification device 31, the purified high-concentration liquid carbon dioxide is stored through at least one purification storage device 32 (as shown in FIG. 1), where the at least one purification storage device 32 is any one of a tanker, a cylinder, a barrel, a tank, or a container, which can facilitate the transportation of the high-concentration liquid carbon dioxide. Figure 1 Figure 6 In addition, the next step S211 is sent to a factory for use: the at least one purification storage device 32 is sent to a factory 33 to send the purified high-concentration liquid carbon dioxide to the factory 33 for use.

[0117]

[0118] ​​​​​​The at least one purified storage device 32 is sent to a factory area 33 for use of the high-concentration liquid carbon dioxide, wherein the factory area 33 is any one of a semiconductor process factory area, an electronic process factory area, an optoelectronic process factory area, a chemical process factory area, a petrochemical process factory area, an electroplating process factory area, a food process factory area, a dry cleaning process factory area, a pharmaceutical process factory area, such as being sent back to a semiconductor process factory area for use as a laser light source in deep ultraviolet lithography or for use in cleaning processes, removing static electricity, etc.

[0119] The purification device 31 for purifying the liquid carbon dioxide into high-concentration liquid carbon dioxide is provided with a raw material tank 3101, a purification tower 3102, a heater 3103, and a cooling facility 3104 (as shown in Figure 3 The raw material tank 3101 is connected to the purification tower 3102, the heater 3103 is connected to the purification tower 3102, and the cooling facility 3104 is connected to the purification tower 3102. The liquid carbon dioxide stored in the at least one storage device 28 is sent to the raw material tank 3101 for storage, and the raw material tank 3101 then sends the liquid carbon dioxide to the purification tower 3102 for convection heat exchange with the hot gas sent by the heater 3103. The heater 3103 is any one of an electric heater, a gas heater, a heat medium oil heater, or a hot water heater. The lower-boiling-point substances dissolved in the liquid carbon dioxide are evaporated and rise, and the higher-boiling-point substances dissolved in the liquid carbon dioxide are in a liquid state and sink. The lower-boiling-point substances that evaporate and rise are cooled into high-concentration liquid carbon dioxide by the cooling facility 3104, which is any one of a cooler, a condenser, a dehumidifier, a temperature reducer, a cooling water tower, or a refrigerant compressor, for filtration and purification. In addition, the purification tower 3102 is provided with at least one packing bed 31021, which is any one of a mesh ring (Dixon) packing, a mesh saddle (McMahon) packing, or a corrugated (Sulyer) packing made of double-layer wire mesh, so that the liquid carbon dioxide flows into the top of the purification tower 3102 by its own gravity and undergoes convection heat exchange with the hot gas generated by the heater 3103.

[0120] Furthermore, the second embodiment of the purified liquid carbon dioxide stored and purified by the purification device 31 is when the liquid carbon dioxide is purified into high-concentration gaseous carbon dioxide by the purification device 31, and after the purification processing step S200, the following steps (as shown in Figure 10 are included: S220 purified pipeline delivery, wherein the purification device 31 is provided with a purified pipeline 311 connected to a factory area 33 for delivery of the high-concentration gaseous carbon dioxide purified by the purified pipeline 311 to the factory area 33.

[0121] When the purification device 31 purifies the liquid carbon dioxide into high-concentration gaseous carbon dioxide, the purification device 31 is provided with a purification pipeline 311 connected to a factory 33 (as shown in Figure 2 and Figure 7 indicated) to deliver the high-concentration gaseous carbon dioxide purified through the purification pipeline 311 to the factory 33, which is any one of a semiconductor process factory, an electronic process factory, an optoelectronic process factory, a chemical process factory, a petrochemical process factory, an electroplating process factory, a food process factory, a dry cleaning process factory, and a pharmaceutical process factory, for example, to be sent back to a semiconductor process factory for use as a laser light source in deep ultraviolet lithography or for use in cleaning processes and static electricity removal.

[0122] The purification device 31 for purifying liquid carbon dioxide into high-concentration gaseous carbon dioxide has two embodiments, of which the first embodiment is that the purification device 31 is provided with a liquid-to-gas device 3121, a raw material tank 3122, a membrane contactor 3123, and a heater 3124 (as shown in Figure 4 indicated), the liquid-to-gas device 3121 is connected to the raw material tank 3122, wherein the liquid-to-gas device 3121 is any one of an evaporator or a gasifier, the raw material tank 3122 is connected to the membrane contactor 3123, wherein the membrane contactor 3123 is provided with at least one membrane 31231, which is any one of a hollow fiber tube membrane, a nano-porous carbon membrane, a poly(ether ether ketone) membrane, a polyimide membrane, a monoethanolamine membrane, a rubber-like polymer membrane, and a polyimide hollow fiber membrane, the heater 3124 is connected to the membrane contactor 3123, wherein the heater 3124 is any one of an electric heater, a gas heater, a heat medium oil heater, or a hot water heater, and the liquid carbon dioxide stored in the at least one storage device 28 is first converted into gaseous carbon dioxide by the liquid-to-gas device 3121, then stored in the raw material tank 3122, and then delivered to the membrane contactor 3123 to perform countercurrent heat exchange with the hot gas delivered by the heater 3124, so as to filter and remove impurities in the gaseous carbon dioxide, and to form high-concentration gaseous carbon dioxide for filtration and purification.

[0123] The second embodiment of the purification device 31 for purifying liquid carbon dioxide into high-concentration gaseous carbon dioxide is that the purification device 31 is provided with a liquid-to-gas device 3131, a raw material tank 3132, at least one adsorption bed module 3133, and a vacuum pump 3134 (as shown in Figure 5The liquid-to-gas device 3131 is connected to the raw material tank 3132, wherein the liquid-to-gas device 3131 is any one of an evaporator or a gasifier, the raw material tank 3132 is connected to the at least one adsorption bed module 3133, the vacuum pump 3134 is connected to the at least one adsorption bed module 3133, wherein the adsorption bed module 3133 is filled with a plurality of tubular hollow fiber membrane adsorbents, the tubular hollow fiber membrane adsorbents are any one or a combination of zeolite, anion exchange resin, metal organic framework material, the tubular hollow fiber membrane adsorbents comprise at least one pore and at least one adsorption layer (not shown in the figure), the adsorption layer comprises an amine group modified anion exchange resin material and a polymer material (please refer to the previous paragraph for the content of the tubular hollow fiber membrane adsorbent), the liquid carbon dioxide stored in the at least one storage device 28 is converted into gaseous carbon dioxide by the liquid-to-gas device 3131 and then sent to the raw material tank 3132, and then transported to the at least one adsorption bed module 3133 for pressurized adsorption or reduced pressure desorption, wherein the at least one adsorption bed module 3133 adopts a combination structure of an absorption tower and a desorption tower, gaseous carbon dioxide enters the absorption tower of the at least one adsorption bed module 3133 and is in countercurrent contact with ethanolamine (MEA) solution entering from the top to perform gaseous carbon dioxide adsorption process. The saturated solution after adsorption is input into the desorption tower of the at least one adsorption bed module 3133 to evaporate and vaporize gaseous carbon dioxide after heating, so as to separate gaseous carbon dioxide from ethanolamine (MEA) solution for desorption, and high-concentration gaseous carbon dioxide is desorbed by vacuum pumping (TVSA process) through the vacuum pump 3134 when reduced pressure desorption is performed, so as to perform filtration and purification.

[0124] Furthermore, the incineration device 10 described in the previous paragraph is combined with any one of a double-rotary volatile organic gas (VOC) treatment system 1 or a single-rotary volatile organic gas (VOC) treatment system (not shown in the figure), when the incineration device 10 is combined with a double-rotary volatile organic gas (VOC) treatment system 1, the incineration device 10 is a direct-fired incinerator (TO) 101, the double-rotary volatile organic gas (VOC) treatment system 1 is designed in combination with a first heat exchanger 61, a second heat exchanger 62, a third heat exchanger 63, a fourth heat exchanger 64, a first cold side conveying pipeline 65, a fourth cold side conveying pipeline 66, a first adsorption rotary wheel 40, a second adsorption rotary wheel 50, and a chimney 26 (as shown in Figure 1 and Figure 2As shown in FIG. 1, the first heat exchanger 61 is provided with a first cold side pipe 611 and a first hot side pipe 612, the second heat exchanger 62 is provided with a second cold side pipe 621 and a second hot side pipe 622, the third heat exchanger 63 is provided with a third cold side pipe 631 and a third hot side pipe 632, and the fourth heat exchanger 64 is provided with a fourth cold side pipe 641 and a fourth hot side pipe 642. The direct-fired incinerator (TO) 101 is provided with a furnace head and a furnace chamber (not shown in the figure), the furnace head is communicated with the furnace chamber, the first heat exchanger 61, the second heat exchanger 62, the third heat exchanger 63 and the fourth heat exchanger 64 are respectively arranged in the furnace chamber of the direct-fired incinerator (TO) 101, and the direct-fired incinerator (TO) 101 is provided with an inlet and an outlet, the inlet is arranged at the furnace head, and the inlet is connected with the other end of the fourth cold side pipe 641 of the fourth heat exchanger 64.

[0125] The furnace head of the direct-fired incinerator (TO) 101 can first transport the high-temperature gas after incineration to one side of the first hot side pipe 612 of the first heat exchanger 61 to exchange heat, then transport the high-temperature gas after incineration from the other side of the first hot side pipe 612 of the first heat exchanger 61 to one side of the second hot side pipe 622 of the second heat exchanger 62 to exchange heat, then transport the high-temperature gas after incineration from the other side of the second hot side pipe 622 of the second heat exchanger 62 to one side of the third hot side pipe 632 of the third heat exchanger 63 to exchange heat, then transport the high-temperature gas after incineration from the other side of the third hot side pipe 632 of the third heat exchanger 63 to one side of the fourth hot side pipe 642 of the fourth heat exchanger 64 to exchange heat, and finally transport the high-temperature gas after incineration from the other side of the fourth hot side pipe 642 of the fourth heat exchanger 64 to the outlet of the furnace chamber.

[0126] The first adsorption wheel 40 is provided with an adsorption zone 401, a cooling zone 402 and a desorption zone 403, and is connected with a waste gas inlet pipe 41, a first clean gas discharge pipe 42, a first cooling gas inlet pipe 43, a first cooling gas delivery pipe 44, a first hot gas delivery pipe 45 and a first desorption concentrated gas pipe 46 (as shown in FIG. 2). Figure 1 and Figure 2 The second adsorption wheel 50 is provided with an adsorption zone 501, a cooling zone 502 and a desorption zone 503, and is connected with a second clean gas discharge pipe 52, a second cooling gas inlet pipe 53, a second cooling gas delivery pipe 54, a second hot gas delivery pipe 55 and a second desorption concentrated gas pipe 56. The first adsorption wheel 40 and the second adsorption wheel 50 are respectively zeolite concentration wheels or concentration wheels made of other materials.

[0127] The waste gas inlet pipeline 41 is connected to one side of the adsorption zone 401 of the first adsorption wheel 40, so that the waste gas inlet pipeline 41 can deliver the organic waste gas to one side of the adsorption zone 401 of the first adsorption wheel 40. One end of the first clean gas discharge pipeline 42 is connected to the other side of the adsorption zone 401 of the first adsorption wheel 40, and one end of the first clean gas discharge pipeline 42 is connected to one side of the adsorption zone 501 of the second adsorption wheel 50 (as shown in Figure 1 and Figure 2 ). Thus, the organic waste gas can be adsorbed by the adsorption zone 401 of the first adsorption wheel 40 and then delivered to the adsorption zone 501 of the second adsorption wheel 50 by the first clean gas discharge pipeline 42. The other side of the adsorption zone 501 of the second adsorption wheel 50 is connected to the second clean gas discharge pipeline 52 (as shown in Figure 1 and Figure 2 ), so that the other end of the second clean gas discharge pipeline 52 is connected to the chimney 26, and the second clean gas discharge pipeline 52 is provided with a fan 521, so that the fan 521 can push and pull the adsorbed gas in the second clean gas discharge pipeline 52 to the chimney 26 for discharge.

[0128] One side of the cooling zone 402 of the first adsorption wheel 40 is connected to the first cooling gas inlet pipeline 43, so that the gas can enter the cooling zone 402 of the first adsorption wheel 40 for cooling use. The other side of the cooling zone 402 of the first adsorption wheel 40 is connected to one end of the first cooling gas delivery pipeline 44, and the other end of the first cooling gas delivery pipeline 44 is connected to one end of the second cold side pipeline 621 of the second heat exchanger 62 (as shown in Figure 1 and Figure 2 ), so that the gas entering the cooling zone 402 of the first adsorption wheel 40 can be delivered to the second heat exchanger 62 for heat exchange. In addition, one end of the first hot gas delivery pipeline 45 is connected to the other side of the desorption zone 403 of the first adsorption wheel 40, and the other end of the first hot gas delivery pipeline 45 is connected to the other end of the second cold side pipeline 621 of the second heat exchanger 62, so that the high-temperature hot gas after heat exchange in the second heat exchanger 62 can be delivered to the desorption zone 403 of the first adsorption wheel 40 through the first hot gas delivery pipeline 45 for desorption use.

[0129] The cooling zone 402 of the first adsorption wheel 40 has two embodiments. In the first embodiment, the first cooling gas inlet pipeline 43 connected to one side of the cooling zone 402 of the first adsorption wheel 40 is used to supply fresh air or outside air (not shown) to provide cooling for the cooling zone 402 of the first adsorption wheel 40. In the second embodiment, the waste gas inlet pipeline 41 is provided with a waste gas communication pipeline 411 (as shown in Figure 1The other end of the exhaust gas communication pipeline 411 is connected with the first cooling gas inlet pipeline 43, so that the exhaust gas in the exhaust gas inlet pipeline 41 can be transported to the cooling zone 402 of the first adsorption runner 40 through the exhaust gas communication pipeline 411 to be cooled, and the exhaust gas communication pipeline 411 is provided with an exhaust gas communication control valve 4111 to control the air volume of the exhaust gas communication pipeline 411.

[0130] One side of the cooling zone 502 of the second adsorption runner 50 is connected with the second cooling gas inlet pipeline 53, so that the gas can enter the cooling zone 502 of the second adsorption runner 50 to be cooled, and the other side of the cooling zone 502 of the second adsorption runner 50 is connected with one end of the second cooling gas delivery pipeline 54, and the other end of the second cooling gas delivery pipeline 54 is connected with one end of the third cold side pipeline 631 of the third heat exchanger 63 (as shown in Figure 1 and Figure 2 so as to transport the gas entering the cooling zone 502 of the second adsorption runner 50 to the third heat exchanger 63 to exchange heat, and one end of the second hot gas delivery pipeline 55 is connected with the other side of the desorption zone 503 of the second adsorption runner 50, and the other end of the second hot gas delivery pipeline 55 is connected with the other end of the third cold side pipeline 631 of the third heat exchanger 63, so that the high-temperature hot gas exchanged by the third heat exchanger 63 can be transported to the desorption zone 503 of the second adsorption runner 50 through the second hot gas delivery pipeline 55 to be desorbed.

[0131] The cooling zone 502 of the second adsorption runner 50 has two implementation modes, one of which is that the second cooling gas inlet pipeline 53 connected with one side of the cooling zone 502 of the second adsorption runner 50 supplies fresh air or outside air (as shown in Figure 2 to provide the cooling zone 502 of the second adsorption runner 50 with cooling air. The second implementation mode is that the first clean gas delivery pipeline 42 is provided with a first clean gas communication pipeline 421 (as shown in Figure 1 The other end of the first clean gas communication pipeline 421 is connected with the second cooling gas inlet pipeline 53, so that the gas in the first clean gas delivery pipeline 42 can be transported to the cooling zone 502 of the second adsorption runner 50 through the first clean gas communication pipeline 421 to be cooled, and the first clean gas communication pipeline 421 is provided with a first clean gas communication control valve 4211 to control the air volume of the first clean gas communication pipeline 421.

[0132] One end of the first desorption concentrated gas pipeline 46 is connected with one side of the desorption zone 403 of the first adsorption runner 40, and the other end of the first desorption concentrated gas pipeline 46 is connected with one end of the fourth cold side pipeline 641 of the fourth heat exchanger 64 (as shown in Figure 1and Figure 2 As shown), the other end of the fourth cold side pipeline 641 of the fourth heat exchanger 64 is connected to one end of the fourth cold side transport pipeline 66, and the other end of the fourth cold side transport pipeline 66 is connected to one end of the first cold side pipeline 611 of the first heat exchanger 61. In addition, the other end of the first cold side pipeline 611 of the first heat exchanger 61 is connected to one end of the first cold side transport pipeline 65, and the other end of the first cold side transport pipeline 65 is connected to the inlet of the direct-fired incinerator (TO) 101, so that the desorbed concentrated gas desorbed by high temperature can be transported to one end of the fourth cold side pipeline 641 of the fourth heat exchanger 64 through the first desorbed concentrated gas pipeline 46, and the fourth cold side pipeline of the fourth heat exchanger 64 is connected to the inlet of the direct-fired incinerator (TO) 101. The other end of the pipeline 641 is transported to one end of the fourth cold side transport pipeline 66, and the other end of the fourth cold side transport pipeline 66 is transported to one end of the first cold side pipeline 611 of the first heat exchanger 61, and then the other end of the first cold side pipeline 611 of the first heat exchanger 61 is transported to one end of the first cold side transport pipeline 65, and finally the other end of the first cold side transport pipeline 65 is transported to the inlet of the direct-fired incinerator (TO) 101 (such as Figure 1 and Figure 2 As shown, this allows the burner of the direct-fired incinerator (TO) 101 to undergo high-temperature cracking to reduce volatile organic compounds. The first desorbed concentrated gas pipeline 46 is equipped with a fan 461 to push and pull the desorbed concentrated gas into one end of the first cold-side pipeline 611 of the first heat exchanger 61.

[0133] One end of the second desorption concentrated gas pipeline 56 is connected to one side of the desorption zone 503 of the second adsorption rotor 50, wherein the other end of the second desorption concentrated gas pipeline 56 has two implementation modes. The first implementation mode is that the other end of the second desorption concentrated gas pipeline 56 is connected to the exhaust gas intake pipeline 41 (such as Figure 1 As shown), the concentrated gas can enter the adsorption zone 401 of the first adsorption wheel 40 through the exhaust gas intake pipe 41 to be adsorbed again. The second embodiment is that the other end of the second desorption concentrated gas pipeline 56 is connected to the first cooling gas intake pipe 43 (as shown). Figure 2 As shown), the concentrated gas can then enter the cooling zone 402 of the first adsorption wheel 40 through the first cooling gas inlet pipe 43 for cooling. In addition, the second desorption concentrated gas pipe 56 is provided with a fan 561 (as shown). Figure 2As shown in FIG, the desorbed concentrated gas can be pushed and pulled into the exhaust gas intake pipe 41 or the first cooling gas intake pipe 43. The desorbed gas generated by the desorption zone 503 of the second adsorption rotor 50 can enter the adsorption zone 401 of the first adsorption rotor 40 or the cooling zone 402 of the first adsorption rotor 40 for recycling.

[0134] Finally, the dual-rotor volatile organic gas (VOC) treatment system 1 may be provided with only the first heat exchanger 61, the second heat exchanger 62, the third heat exchanger 63, and the fourth heat exchanger 64 in the direct-fired incinerator (TO) 101 (e.g., Figure 6 and Figure 7 As shown), the difference is that the fourth heat exchanger 64 is subtracted, and the other end of the first desorption concentrated gas pipeline 46 is connected to one end of the first cold side pipeline 611 of the first heat exchanger 61, wherein the other end of the first cold side pipeline 611 of the first heat exchanger 61 is connected to one end of the first cold side transport pipeline 65, and the other end of the first cold side transport pipeline 65 is connected to the inlet of the direct-fired incinerator (TO) 101, so that the desorbed concentrated gas desorbed by high temperature can be transported to one end of the first cold side pipeline 611 of the first heat exchanger 61 through the first desorption concentrated gas pipeline 46, and transported from the other end of the first cold side pipeline 611 of the first heat exchanger 61 to one end of the first cold side transport pipeline 65, and transported from the other end of the first cold side transport pipeline 65 to the inlet of the direct-fired incinerator (TO) 101. The rest of the first adsorption rotor 40 and the second adsorption rotor 50 adopt the same design. Therefore, the above-mentioned direct-fired incinerator (TO) 101, the first heat exchanger 61, the second heat exchanger 62, the third heat exchanger 63, the first cold side conveying pipeline 65, the first adsorption rotor 40, the second adsorption rotor 50 and the chimney 26 are not repeated. Please refer to the above-mentioned description.

[0135] In addition to being designed in combination with the dual-rotor VOC treatment system 1 as described above, the incineration equipment of the present invention can also be designed in combination with a single-rotor VOC treatment system (not shown). The difference between the single-rotor VOC treatment system (not shown) and the dual-rotor VOC treatment system 1 described above is the lack of the second adsorption rotor 50. The direct-fired incinerator (TO) 101 can instead be equipped with two or three heat exchangers. The design of the first adsorption rotor 40 in the dual-rotor VOC treatment system 1 can be referred to for its combination. The details will not be repeated here; please refer to the above description.

[0136] From the above detailed description, it can be understood by those skilled in the art that the present invention can indeed achieve the aforementioned objectives and is in compliance with the provisions of the Patent Law, and thus an invention patent application is filed.

[0137] However, the above is only a preferred embodiment of the present invention and should not be used to limit the scope of implementation of the present invention; therefore, all simple equivalent changes and modifications made according to the scope of protection of the claims of the present invention and the contents of the invention description should still fall within the scope of protection of the present invention.

[0138] The specific embodiments described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A carbon dioxide treatment system for combustion exhaust gas, characterized by, The application relates to a carbon dioxide gas absorption and storage system, comprising: a combustion device, which discharges combustion tail gas containing carbon dioxide gas, and is provided with a tail gas conveying pipeline for conveying the combustion tail gas; a cooling device, which is arranged on the tail gas conveying pipeline and is used for cooling the combustion tail gas; an adsorption and desorption device, which has at least one adsorption zone and at least one desorption zone, and is provided with at least one exhaust pipeline, at least one hot gas pipeline and at least one desorption gas pipeline, the at least one adsorption zone is connected with the tail gas conveying pipeline of the combustion device, so that the combustion tail gas in the tail gas conveying pipeline is sent into the at least one adsorption zone for carbon dioxide gas adsorption, the at least one adsorption zone is connected with the at least one exhaust pipeline, so that the adsorbed gas generated in the at least one adsorption zone is discharged through the at least one exhaust pipeline, the at least one desorption zone is connected with the at least one desorption gas pipeline, so that the carbon dioxide gas desorbed in the at least one desorption zone is output through the at least one desorption gas pipeline, and the at least one desorption zone is connected with the at least one hot gas pipeline, so that at least one heat source is conveyed into the at least one desorption zone through the at least one hot gas pipeline; a chimney, which is connected with the at least one exhaust pipeline; a compression and liquefaction device, which is connected with the at least one desorption gas pipeline, and is used for compressing and liquefying the desorbed carbon dioxide gas into liquid carbon dioxide; and at least one storage device, which is used for storing the liquid carbon dioxide compressed and liquefied by the compression and liquefaction device.

2. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The tail gas conveying pipeline is further provided with a fan.

3. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The at least one exhaust pipeline is further provided with a fan.

4. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The at least one hot gas pipeline is further connected with a heat exchanger, which is any one of a finned tube heat exchanger, a shell and tube heat exchanger, a plate heat exchanger, a gas-to-gas heat exchanger and a liquid-to-gas heat exchanger.

5. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The at least one hot gas pipeline is further connected with a heater, which is any one of an electric heater, a gas heater, a heat medium oil heater and a hot water heater.

6. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The compression and liquefaction device is further provided with a compressor, which has a cooling pipeline for any one of a liquid or a gas, so that the desorbed carbon dioxide gas is compressed and liquefied into liquid carbon dioxide.

7. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The cooling device is any one of a cooler, a condenser, a dehumidifier, a cooler, a cooling water tower and a refrigerant compressor.

8. The carbon dioxide treatment system of combustion exhaust gases according to claim 7, characterized in that, The cooler is any one of a shell and tube cooler, a finned tube cooler and a plate heat exchanger cooler.

9. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The tail gas conveying pipeline is further provided with a dust removal device, which is any one of a bag filter, a pulse bag filter, an electric bag filter, a negative pressure back-blowing filter bag dust remover, a low-pressure long-bag pulse dust remover, a filter cartridge type pulse dust remover, a pulse filter core dust remover, a pulse jet bag dust remover, an inertial dust remover, an electrostatic dust remover, a horizontal electrostatic dust remover, a centrifugal dust remover, a cyclone separator, a multi-tube cyclone dust remover, a wet dust remover, a wet electrostatic dust remover, a charged water mist dust remover, a water film dust remover, a Venturi tube dust remover and a multi-layer dust remover.

10. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The tail gas conveying pipeline is further provided with a filter screen device, which is used for dust removal.

11. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The at least one storage device is any one of a tanker, a cylinder, a barrel, a tank, or a container.

12. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The at least one storage device is sent to a site for purification treatment, and the site is also provided with at least one purification device to purify the stored liquid carbon dioxide into any one of high-concentration liquid carbon dioxide or high-concentration gaseous carbon dioxide through the purification device.

13. The carbon dioxide treatment system of combustion exhaust gases according to claim 12, characterized in that, The purification device is also provided with a purification pipeline connected to a factory area to deliver the purified high-concentration gaseous carbon dioxide to the factory area through the purification pipeline.

14. The carbon dioxide treatment system of combustion exhaust gases according to claim 13, characterized in that, The factory area is any one of a semiconductor process factory area, an electronic process factory area, an optoelectronic process factory area, a chemical process factory area, a petrochemical process factory area, an electroplating process factory area, a food process factory area, a drying and cleaning process factory area, or a pharmaceutical process factory area.

15. The carbon dioxide treatment system of combustion exhaust gases according to claim 12, characterized in that, The purification device is also provided with at least one purified storage device to store the purified high-concentration liquid carbon dioxide through the at least one purified storage device.

16. The carbon dioxide treatment system of combustion exhaust gases according to claim 15, characterized in that, The at least one purified storage device is any one of a tanker, a cylinder, a barrel, a tank, or a container.

17. The carbon dioxide treatment system of combustion exhaust gases according to claim 15, characterized in that, The at least one purified storage device is sent to a factory area to deliver the purified high-concentration liquid carbon dioxide to the factory area for use.

18. The carbon dioxide treatment system of combustion exhaust gases according to claim 17, characterized in that, The factory area is any one of a semiconductor process factory area, an electronic process factory area, an optoelectronic process factory area, a chemical process factory area, a petrochemical process factory area, an electroplating process factory area, a food process factory area, a drying and cleaning process factory area, or a pharmaceutical process factory area.

19. The carbon dioxide treatment system of combustion exhaust gases according to claim 12, characterized in that, The purification device is also provided with a raw material tank, a purification tower, a heater, and a cooling facility, the raw material tank is connected to the purification tower, the heater is connected to the purification tower, and the cooling facility is connected to the purification tower, the liquid carbon dioxide stored in the at least one storage device is sent to the raw material tank, then delivered to the purification tower to perform countercurrent heat exchange with the hot gas delivered by the heater, so that the lower-boiling-point substances dissolved in the liquid carbon dioxide are evaporated and rise, and the higher-boiling-point substances dissolved in the liquid carbon dioxide are in liquid form and sink, the evaporated and rising lower-boiling-point substances are cooled into high-concentration liquid carbon dioxide by the cooling facility to perform filtration and purification.

20. The carbon dioxide treatment system of claim 19, wherein, The purification tower is also provided with at least one packing bed made of any one of mesh ring packing, mesh saddle packing, or corrugated packing made of double-layer mesh.

21. The carbon dioxide treatment system of claim 12, wherein, The purification device is also provided with a liquid-to-gas device, a raw material tank, at least one adsorption and desorption bed module, and a vacuum pump, the liquid-to-gas device is connected to the raw material tank, the raw material tank is connected to the at least one adsorption and desorption bed module, and the vacuum pump is connected to the at least one adsorption and desorption bed module, the liquid carbon dioxide stored in the at least one storage device is first converted into gaseous carbon dioxide by the liquid-to-gas device, then sent to the raw material tank, and then delivered to the at least one adsorption and desorption bed module to perform pressurized adsorption or reduced-pressure desorption, and high-concentration gaseous carbon dioxide is desorbed by the vacuum pump in a vacuum manner during reduced-pressure desorption to perform filtration and purification.

22. The carbon dioxide treatment system of claim 21, wherein, The adsorption and desorption bed module is filled with a plurality of tubular hollow fiber tube type membrane adsorbents, and the tubular hollow fiber tube type membrane adsorbent is any one or a combination of zeolite, anion exchange resin, and metal organic framework material.

23. The carbon dioxide treatment system of combustion exhaust gases according to claim 22, characterized in that, The tubular hollow fiber tube type membrane adsorbent further comprises at least one pore and at least one adsorption layer, the adsorption layer comprises an amine group modified anion exchange resin material and a polymer material.

24. The carbon dioxide treatment system of claim 21, wherein, The liquid-to-gas device is any one of an evaporator or a gasifier.

25. The carbon dioxide treatment system of combustion exhaust gases according to claim 12, characterized in that, The purification device further comprises a liquid-to-gas device, a raw material tank, a membrane contactor, and a heater, the liquid-to-gas device is connected to the raw material tank, the raw material tank is connected to the membrane contactor, the heater is connected to the membrane contactor, the liquid carbon dioxide stored in the at least one storage device is first converted into gaseous carbon dioxide by the liquid-to-gas device, then sent to the raw material tank, and then transported to the membrane separator to perform countercurrent heat exchange with the hot gas transported by the heater, so that the converted gaseous carbon dioxide can form high-concentration gaseous carbon dioxide for filtration and purification.

26. The carbon dioxide treatment system of claim 25, wherein, The membrane contactor further comprises at least one membrane, which is any one of a hollow fiber tube type membrane, a nanoporous carbon membrane, a poly(ether ether ketone) membrane, a polyimide membrane, a monoethanolamine membrane, a rubber-like polymer membrane, or a polyimide hollow fiber membrane.

27. The carbon dioxide treatment system of claim 25, wherein, The liquid-to-gas device is any one of an evaporator or a gasifier.

28. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The adsorption and desorption device further comprises a rotating wheel, which is any one of a rotating tower type, a horizontal type, or a cylindrical type.

29. The carbon dioxide treatment system of claim 28, wherein, The rotating wheel is filled with any one of activated carbon, zeolite, silica gel, activated alumina, molecular sieve, manganese oxide, calcium hydroxide, graphene, or hollow fiber.

30. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The adsorption and desorption device further comprises at least one adsorbent, which is filled with a plurality of tubular hollow fiber tube type membrane adsorbents, and the tubular hollow fiber tube type membrane adsorbent is any one or a combination of zeolite, anion exchange resin, or metal organic framework material.

31. The carbon dioxide treatment system of combustion exhaust gases according to claim 30, characterized in that, The tubular hollow fiber tube type membrane adsorbent further comprises at least one pore and at least one adsorption layer, the adsorption layer comprises an amine group modified anion exchange resin material and a polymer material.

32. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The incineration device is any one of a direct-fired incinerator, a catalytic incinerator, or a regenerative incinerator.

33. The carbon dioxide treatment system of combustion exhaust gases according to claim 1, characterized in that, The incineration device is combined with any one of a double-rotating-wheel volatile organic gas treatment system or a single-rotating-wheel volatile organic gas treatment system.

34. The carbon dioxide treatment system of combustion exhaust gases according to claim 32, characterized in that, The direct-fired incinerator comprises any one of two heat exchangers, three heat exchangers, or four heat exchangers.

35. A method of carbon dioxide treatment of combustion exhaust gas, characterized by, The carbon dioxide treatment system for combustion tail gas mainly comprises an incineration device, a cooling device, an adsorption and desorption device, a chimney, and a compression and liquefaction device, the incineration device comprises a tail gas delivery pipeline, the cooling device is arranged on the tail gas delivery pipeline, the adsorption and desorption device comprises at least one adsorption zone and at least one desorption zone, the adsorption and desorption device comprises at least one exhaust pipeline, at least one hot gas pipeline, and at least one desorption gas pipeline, the at least one adsorption zone is connected to the tail gas delivery pipeline of the incineration device, the at least one adsorption zone is connected to the at least one exhaust pipeline, the at least one exhaust pipeline is connected to the chimney, at least one desorption zone is connected to the at least one desorption gas pipeline, and at least one desorption zone is connected to the at least one hot gas pipeline, and the compression and liquefaction device is connected to the at least one desorption gas pipeline, the main steps of the carbon dioxide treatment method for combustion tail gas mainly include: exhausting combustion tail gas: the incineration device exhausts a combustion tail gas, the combustion tail gas contains carbon dioxide gas, the combustion tail gas is sent out through the tail gas conveying pipeline; combustion tail gas cooling: the combustion tail gas passes through the cooling device to cool the combustion tail gas; carbon dioxide adsorption: the tail gas conveying pipeline sends the cooled combustion tail gas into at least one adsorption zone of the adsorption and desorption device to perform carbon dioxide gas adsorption; carbon dioxide desorption: the adsorbed carbon dioxide gas is desorbed through at least one desorption zone of the adsorption and desorption device, and the desorbed carbon dioxide gas is output through the at least one desorption gas pipeline; performing compression and liquefaction: the desorbed carbon dioxide gas is conveyed to the compression and liquefaction device through the at least one desorption gas pipeline to compress and liquefy the desorbed carbon dioxide gas into liquid carbon dioxide; and storage device storage: the liquid carbon dioxide is stored by at least one storage device.

36. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, characterized by, After the storage device storage step, the following steps are further included: performing purification treatment: the at least one storage device is sent to a place for purification treatment, and the place is provided with at least one purification device to purify the stored liquid carbon dioxide into any one of high-concentration liquid carbon dioxide or high-concentration gaseous carbon dioxide through the purification device.

37. The method of carbon dioxide treatment of combustion exhaust gas according to claim 36, characterized by, After the purification treatment step, the following steps are further included: purified storage device storage: the purified high-concentration liquid carbon dioxide is stored by at least one purified storage device; and sent to a factory area for use: the at least one purified storage device is sent to a factory area to send the purified high-concentration liquid carbon dioxide to the factory area for use.

38. The method of carbon dioxide treatment of combustion exhaust gas according to claim 36, wherein, After the purification treatment step, the following steps are further included: purified pipeline conveying: the purification device is provided with a purified pipeline connected to a factory area to convey the purified high-concentration gaseous carbon dioxide to the factory area through the purified pipeline.

39. The method of carbon dioxide treatment of combustion exhaust gas according to claim 37, wherein, The at least one purified storage device is any one of a tank car, a steel bottle, a barrel tank, a storage tank, or a container.

40. The method of carbon dioxide treatment of combustion exhaust gas according to claim 37 or 38, characterized in that, The factory area is any one of a semiconductor process factory area, an electronic process factory area, an optoelectronic process factory area, a chemical process factory area, a petrochemical process factory area, an electroplating process factory area, a food process factory area, a drying and cleaning process factory area, or a pharmaceutical process factory area.

41. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, wherein, The tail gas conveying pipeline is further provided with a fan.

42. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, wherein, The at least one exhaust gas pipeline is further provided with a fan.

43. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, wherein, The at least one hot gas pipeline is further connected to a heat exchanger, which is any one of a finned tube heat exchanger, a shell and tube heat exchanger, a plate heat exchanger, a gas-to-gas heat exchanger, or a liquid-to-gas heat exchanger.

44. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, wherein, The at least one hot gas pipeline is further connected to a heater, which is any one of an electric heater, a gas heater, a heat medium oil heater, or a hot water heater.

45. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, wherein, The compression and liquefaction device is further provided with a compressor having a cooling pipeline for any one of a liquid or a gas to enter to compress and liquefy the desorbed carbon dioxide gas into liquid carbon dioxide.

46. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, wherein, The cooling device is any one of a cooler, a condenser, a dehumidifier, a cooler, a cooling water tower, or a refrigerant compressor.

47. The method of carbon dioxide treatment of combustion exhaust gas according to claim 46, wherein, The cooler is any one of a shell and tube cooler, a finned tube cooler, or a plate heat exchanger cooler.

48. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, wherein, The tail gas conveying pipeline is further provided with a dust removal device, which is any one of a bag-type dust collector, a pulse bag-type dust collector, an electric-bag composite dust collector, a negative pressure back-blowing filter bag dust collector, a low-pressure long bag pulse dust collector, a filter cartridge type pulse dust collector, a pulse filter core dust collector, a pulse spray bag-type dust collector, an inertia dust collector, an electrostatic dust collector, a horizontal electrostatic dust collector, a centrifugal dust collector, a cyclone separator, a multi-tube cyclone dust collector, a wet dust collector, a wet electrostatic dust collector, a charged water mist dust collector, a water film dust collector, a Venturi tube dust collector, a multi-layer dust collector.

49. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, wherein, The tail gas conveying pipeline is further provided with a filter screen device for dust removal.

50. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, wherein, The at least one storage device is any one of a tank car, a steel bottle, a barrel tank, a storage tank, a container.

51. The method of carbon dioxide treatment of combustion exhaust gas according to claim 36, wherein, The purification device is further provided with a raw material tank, a purification tower, a heater and a cooling facility, the raw material tank is connected to the purification tower, the heater is connected to the purification tower, and the cooling facility is connected to the purification tower; liquid carbon dioxide stored in the at least one storage device is sent into the raw material tank, then conveyed into the purification tower to conduct convective heat exchange with hot gas conveyed by the heater, so that lower-boiling-point substances dissolved in the liquid carbon dioxide are evaporated and rise, and higher-boiling-point substances dissolved in the liquid carbon dioxide sink in liquid state, the lower-boiling-point substances evaporated and rising are cooled into high-concentration liquid carbon dioxide by the cooling facility to conduct filtration and purification.

52. The method of carbon dioxide treatment of combustion exhaust gas according to claim 51, wherein, The purification tower is further provided with at least one packing bed, which is any one of a mesh ring packing, a mesh saddle packing, and a corrugated packing made of double-layer wire mesh.

53. The method of carbon dioxide treatment of combustion exhaust gas according to claim 36, wherein, The purification device is further provided with a liquid-to-gas device, a raw material tank, a membrane contactor and a heater, the liquid-to-gas device is connected to the raw material tank, the raw material tank is connected to the membrane contactor, and the heater is connected to the membrane contactor; liquid carbon dioxide stored in the at least one storage device is first converted into gaseous carbon dioxide by the liquid-to-gas device, then sent into the raw material tank, and conveyed into the membrane contactor to conduct convective heat exchange with hot gas conveyed by the heater, so that the gaseous carbon dioxide converted can form high-concentration gaseous carbon dioxide to conduct filtration and purification.

54. The method of carbon dioxide treatment of combustion exhaust gas according to claim 53, wherein, The membrane contactor is further provided with at least one membrane, which is any one of a hollow fiber tube type membrane, a nano-porous carbon membrane, a poly(ether ether ketone) membrane, a polyimide membrane, a monoethanolamine membrane, a rubber-like polymer membrane, and a polyimide hollow fiber membrane.

55. The method of carbon dioxide treatment of combustion exhaust gas according to claim 53, wherein, The liquid-to-gas device is any one of an evaporator and a gasifier.

56. The method of carbon dioxide treatment of combustion exhaust gas according to claim 36, wherein, The purification device is further provided with a liquid-to-gas device, a raw material tank, at least one adsorption bed module and a vacuum pump, the liquid-to-gas device is connected to the raw material tank, the raw material tank is connected to the at least one adsorption bed module, and the vacuum pump is connected to the at least one adsorption bed module; liquid carbon dioxide stored in the at least one storage device is first converted into gaseous carbon dioxide by the liquid-to-gas device, then sent into the raw material tank, and conveyed into the at least one adsorption bed module to conduct pressurized adsorption or reduced-pressure desorption, and high-concentration gaseous carbon dioxide is desorbed by vacuum pumping by the vacuum pump during reduced-pressure desorption, so as to conduct filtration and purification.

57. The method of carbon dioxide treatment of combustion exhaust gas according to claim 56, wherein, The adsorption and desorption bed module is filled with a plurality of tubular hollow fiber tube type membrane adsorbents, which are any one or combination of zeolite, anion exchange resin, and metal organic framework material.

58. The method of carbon dioxide treatment of combustion exhaust gas according to claim 57, wherein, The tubular hollow fiber tube type membrane adsorbent further comprises at least one pore and at least one adsorption layer, and the adsorption layer comprises an amine group modified anion exchange resin material and a polymer material.

59. The method of carbon dioxide treatment of combustion exhaust gas according to claim 56, wherein, The liquid-to-gas device is any one of an evaporator or a gasifier.

60. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, wherein, The adsorption and desorption device is further provided with a rotating wheel, which is any one of a rotating tower type, a horizontal type, or a cylindrical type.

61. The method of carbon dioxide treatment of combustion exhaust gas according to claim 60, wherein, The rotating wheel is filled with any one of activated carbon, zeolite, silica gel, activated alumina, molecular sieve, manganese oxide, calcium hydroxide, graphene, and hollow fiber.

62. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, wherein, The adsorption and desorption device is further provided with at least one adsorbent, which is filled with a plurality of tubular hollow fiber tube type membrane adsorbents, which are any one or combination of zeolite, anion exchange resin, and metal organic framework material.

63. The method of carbon dioxide treatment of combustion exhaust gas according to claim 62, wherein, The tubular hollow fiber tube type membrane adsorbent further comprises at least one pore and at least one adsorption layer, and the adsorption layer comprises an amine group modified anion exchange resin material and a polymer material.

64. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, wherein, The incineration equipment is any one of a direct-fired incinerator, a catalytic incinerator, or a regenerative incinerator.

65. The method of carbon dioxide treatment of combustion exhaust gas according to claim 35, wherein, The incineration equipment is further combined with any one of a double-rotating-wheel volatile organic gas treatment system or a single-rotating-wheel volatile organic gas treatment system.

66. The method of carbon dioxide treatment of combustion exhaust gas according to claim 65, wherein, The direct-fired incinerator is provided with any one of two heat exchangers, three heat exchangers, or four heat exchangers.

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