Baking equipment

Abstract

The invention belongs to the technical field of baking, and provides baking equipment, which comprises a box body, a baking device, a baking device and a controller, the box body is internally provided with a sealed accommodating cavity, and the accommodating cavity is used for being connected with an inert gas device to provide an inert gas environment; the heating module is arranged in the containing cavity, the heating module comprises a plurality of heating furnaces, each heating furnace comprises a heating chamber with an opening, a first sealing door and a heating piece, the first sealing door movably covers the opening of the heating chamber and is used for sealing the heating chamber, and the heating piece is arranged in the heating chamber. The baking equipment provided by the embodiment of the invention has relatively high production efficiency and can meet the demand of mass production of solar cells.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of baking, in particular to a baking equipment. BACKGROUND

[0002] At present, perovskite solar cells have attracted much attention due to their constantly refreshed photoelectric conversion efficiency, and the industrialization research is also being continuously carried out.

[0003] The solar cell annealing furnace is usually a small experimental type of equipment, and the production efficiency of the annealing furnace is low, which cannot be applied to the automatic production line and cannot meet the demand of mass production of solar cells. SUMMARY

[0004] Therefore, the baking equipment provided in the embodiments of the present application can improve the production efficiency, and improve the stability of the product before and after baking, which is beneficial to guarantee the baking quality. The baking equipment solves the problem of low production efficiency of the existing annealing furnace, and can be applied to the automatic production line to meet the demand of mass production of solar cells.

[0005] The baking equipment provided in the embodiments of the present application comprises a box body and a heating module. The box body is internally provided with a sealed containing cavity, and the containing cavity can provide an inert gas environment for products to prevent the products from being oxidized and improve the stability of the products before and after baking. The heating module comprises a plurality of heating furnaces. Each heating furnace comprises a heating chamber, a first sealing door and a heating element. The opening of the heating chamber is used for taking and placing products, and the first sealing door is used for closing the opening, so that each heating furnace forms an independent cavity and can heat the products by the heating element. The plurality of heating furnaces can heat a plurality of products at the same time, which improves the baking efficiency. Therefore, the baking equipment provided in the embodiments of the present application can improve the production efficiency, improve the stability of the products before and after baking, and guarantee the baking quality. The baking equipment solves the problem of low production efficiency of the existing annealing furnace, can be applied to the automatic production line, and meets the demand of mass production of solar cells.

[0006] The baking equipment provided in the embodiments of the present application comprises a box body and a heating module. The box body is internally provided with a sealed containing cavity, and the containing cavity can provide an inert gas environment for products to prevent the products from being oxidized and improve the stability of the products before and after baking. The heating module comprises a plurality of heating furnaces. Each heating furnace comprises a heating chamber, a first sealing door and a heating element. The opening of the heating chamber is used for taking and placing products, and the first sealing door is used for closing the opening, so that each heating furnace forms an independent cavity and can heat the products by the heating element. The plurality of heating furnaces can heat a plurality of products at the same time, which improves the baking efficiency. Therefore, the baking equipment provided in the embodiments of the present application can improve the production efficiency, improve the stability of the products before and after baking, and guarantee the baking quality. The baking equipment solves the problem of low production efficiency of the existing annealing furnace, can be applied to the automatic production line, and meets the demand of mass production of solar cells.

[0007] In some embodiments, the heating module further comprises a plurality of gas inlet pipes and a plurality of gas outlet pipes. Each heating furnace is in communication with a corresponding gas inlet pipe and a gas outlet pipe. The gas inlet pipe is used for introducing inert gas into the heating furnace, and the gas outlet pipe is used for discharging gas in the heating furnace.

[0008] By adopting the technical scheme, inert gas can be separately introduced into each heating furnace, and an independent gas atmosphere can be formed in each heating furnace, so that each heating furnace can roast products inside.

[0009] In some embodiments, the roasting device further comprises a gas flow monitoring system arranged outside the box body; mass flow meters are arranged on the gas inlet pipeline and the gas outlet pipeline respectively, a flow regulating valve is arranged on the gas inlet pipeline, and the mass flow meters and the flow regulating valve are electrically connected with the gas flow monitoring system.

[0010] By adopting the technical scheme, the gas atmosphere in each heating furnace can be separately monitored and controlled, and the heating module can adapt to the heating requirements of different products, and has good adaptability; the gas atmosphere in the heating furnace can be circulated and heated, and the product film uniformity is improved.

[0011] In some embodiments, the roasting device further comprises a water-oxygen monitoring system arranged outside the box body; a water-oxygen monitor is further arranged in the heating furnace, the water-oxygen monitor is used for monitoring the water-oxygen content in the heating furnace, and the water-oxygen monitor is electrically connected with the water-oxygen monitoring system.

[0012] By adopting the technical scheme, the water-oxygen content of each heating furnace can be separately monitored to detect whether the atmosphere environment in the heating furnace meets the roasting requirements, thereby reducing the problem that the product quality is affected due to the atmosphere environment in the furnace body not meeting the requirements.

[0013] In some embodiments, the heating furnace further comprises a first detection member, the first detection member comprises one or more of a heating member temperature probe, an infrared temperature probe, a cavity temperature detector, and an organic solvent detector, the heating member temperature probe is used for detecting the temperature of the heating member, the infrared temperature probe is used for measuring the temperature of the product surface, the cavity temperature detector is used for detecting the temperature in the heating furnace, and the organic solvent detector is used for detecting the concentration of the organic solvent in the heating furnace; the roasting device further comprises a control system arranged outside the box body, and the gas flow monitoring system, the water-oxygen monitoring system, and the first detection member are electrically connected with the control system.

[0014] By adopting the technical scheme, each heating furnace can realize independent temperature control and monitoring of multiple parameters, and the roasting device can realize online intelligent and efficient heating control.

[0015] In some embodiments, the heating member is a heating plate for generating heat radiation; the number of the heating members is multiple, and the heating members are arranged on multiple sides of the heating chamber.

[0016] By adopting the technical scheme, the heating element heats the product in a non-contact radiation heating mode, avoiding the influence of contact heating on the quality of the product coating; and the number of the heating elements is multiple, which is beneficial to uniformly heating the product and improving the baking efficiency.

[0017] In some embodiments, the heating furnace further comprises a first support assembly arranged in the heating chamber and a first lifting driving assembly connected to the first support assembly, the first support assembly being configured to support the product, and the first lifting driving assembly being configured to drive the first support assembly to lift.

[0018] By adopting the technical scheme, the baking equipment can adjust the height of the product in the heating furnace to adapt to different baking requirements, achieving high-efficiency baking.

[0019] In some embodiments, the first lifting driving assembly comprises a first driving member, a torque link, a link guiding slider, a jacking guiding slider, and a positioning guiding column, the first driving member is arranged outside the heating furnace, two ends of the torque link are connected to the first driving member and the link guiding slider respectively, the first driving member drives the link guiding slider to slide horizontally through the torque link, the positioning guiding column is arranged on the jacking guiding slider in a vertical direction, and the jacking guiding slider is configured to drive the first support assembly to lift.

[0020] By adopting the technical scheme, the first driving member is arranged outside the heating furnace, which is beneficial to stable operation of the first driving member; and the first lifting driving assembly drives the first support assembly to lift through the combination of the link and the slider, which is simple in control and high in accuracy.

[0021] In some embodiments, the link guiding slider is provided with an inclined guiding hole, the jacking guiding slider is slidingly connected in the inclined guiding hole, the link guiding slider moving in a horizontal direction can drive the jacking guiding slider to move in a vertical direction, and the first support assembly comprises a plurality of first jacks arranged on the jacking guiding slider.

[0022] By adopting the technical scheme, the link guiding slider and the jacking guiding slider are used in cooperation, which can convert horizontal movement into vertical movement, the first lifting driving assembly is simple in structure and small in occupied space; the positioning accuracy of the first support assembly is high, and direct metal friction with the product is avoided, improving the product quality.

[0023] In some embodiments, the baking equipment further comprises a first automatic door opening mechanism connected to the first sealing door, the first automatic door opening mechanism being configured to open and close the first sealing door.

[0024] By adopting the technical scheme, the first automatic door opening mechanism can automatically open and close the first sealing door, so as to facilitate the product to enter and exit the heating furnace, and improve the automation degree of the baking equipment.

[0025] In some embodiments, two sides of the heating module are provided with mounting plates, and two ends of the first sealing door are rotatably connected with the two mounting plates respectively; the first automatic door opening mechanism comprises two driving members, the two driving members are arranged on the two mounting plates respectively, and the two driving members can drive the first sealing door to rotate relative to the mounting plates to open or close the opening.

[0026] By adopting the technical scheme, the driving member can be automatically controlled, and the automation degree is improved.

[0027] In some embodiments, the mounting plate is provided with an arc-shaped sliding groove, the two ends of the first sealing door are provided with shaft portions, and the shaft portions are rotatably connected with the sliding groove; the driving member can drive the shaft portions to slide in the sliding groove to drive the first sealing door to rotate.

[0028] By adopting the technical scheme, the first sealing door is opened and closed in a rotating manner, and does not affect the adjacent heating cabin.

[0029] In some embodiments, the baking equipment further comprises a cooling module and a mechanical hand arranged in the box body, and the mechanical hand is used for transferring and placing and taking the product; the cooling module comprises a plurality of cooling furnaces, and each cooling furnace comprises a cooling chamber, a second sealing door movably arranged on the cooling chamber, and a cooling member arranged in the cooling chamber.

[0030] By adopting the technical scheme, the baking equipment can realize automatic baking and cooling of the product, realize automatic feeding and discharging, and has high automation degree.

[0031] In some embodiments, the cooling furnace is provided with a second detection member, and the second detection member comprises at least one of a crack detection member and an infrared temperature measurement member.

[0032] By adopting the technical scheme, the baking equipment can monitor the production parameters and production state in each cooling furnace.

[0033] In some embodiments, the cooling furnace further comprises a second supporting assembly arranged in the cooling chamber and a second lifting driving assembly connected with the second supporting assembly, the second supporting assembly is used for supporting the product, and the second lifting driving assembly is used for driving the second supporting assembly to lift to adjust the distance between the product and the cooling member.

[0034] By adopting the technical scheme, the distance between the product and the cooling member is adjustable to meet the cooling requirements of different products, and the adaptability of the cooling furnace is good.

[0035] In some embodiments, the second lifting driving assembly comprises a second lifting member and a connecting plate, the second support assembly comprises a plurality of second pins, the second pins are arranged on the connecting plate, and the second driving member is used to drive the connecting plate to drive the second support assembly to lift.

[0036] By adopting the above technical scheme, the second pins can position and support the product, and the second lifting driving assembly has simple structure and high control precision, and can conveniently drive the product to lift.

[0037] In some embodiments, a plurality of the heating furnaces are stacked, and a plurality of the cooling furnaces are stacked; the mechanical hand comprises a horizontal movement servo lead screw module, a vertical movement servo lead screw module arranged on the horizontal movement servo lead screw module, and a material taking and placing mechanism arranged on the vertical movement servo lead screw module.

[0038] By adopting the above technical scheme, the baking equipment reduces space occupation, and realizes automatic feeding and discharging through the multi-axis mechanical hand, and has high automation degree.

[0039] In some embodiments, the baking equipment further comprises a purification circulation pipeline and a purification air extraction pipeline connected with the inert gas device, the purification circulation pipeline is used to fill inert gas into the box, the purification air extraction pipeline is used to extract gas in the box, the purification circulation pipeline is connected to the upper part of the box, and the purification air extraction pipeline is connected to the lower part of the box.

[0040] By adopting the above technical scheme, the whole process flow can be in a water-free and oxygen-free environment, and product stability and quality are improved.

[0041] In some embodiments, the baking equipment further comprises a transition cabin and a feeding conveying mechanism, the box is provided with a feeding position, the transition cabin is communicated with one side of the box, the feeding conveying mechanism is arranged between the transition cabin and the feeding position, and the feeding conveying mechanism is used to convey the product from the transition cabin to the feeding position; the transition cabin is provided with a movable cabin door, a gas inlet used to be connected with the inert gas device, and a vacuum port used to be connected with the vacuum device.

[0042] By adopting the above technical scheme, the transition cabin can be connected with the upstream production equipment and the baking equipment, the baking equipment realizes automatic feeding, has high automation degree, and is beneficial to realize large-scale production.

[0043] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments or conventional technical descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0045] FIG. 1A This is one of the structural diagrams of baking equipment provided in some embodiments of the present application;

[0046] FIG. 1B yes FIG. 1A A partial enlarged view of section A of the baking equipment shown;

[0047] FIG. 2 This is the second structural diagram of the baking equipment provided in some embodiments of the present application;

[0048] FIG. 3A This is the third structural diagram of the baking equipment provided in some embodiments of the present application;

[0049] FIG. 3B yes FIG. 3A A partial enlarged view of part B of the baking equipment shown;

[0050] FIG. 4 This is the fourth structural diagram of the baking equipment provided in some embodiments of the present application;

[0051] FIG. 5 yes FIG. 4 A cross-sectional view of the baking apparatus shown along line CC;

[0052] FIG. 6 A fifth structural diagram of a baking device provided in some embodiments of the present application;

[0053] FIG. 7 yes FIG. 6 A cross-sectional view of the baking apparatus shown along line DD;

[0054] FIG. 8 yes FIG. 7 A cross-sectional view of a heating furnace in the baking apparatus shown;

[0055] FIG. 9 yes FIG. 8 A cross-sectional view of a heating element in the heating furnace shown;

[0056] FIG. 10 yes FIG. 7 A cross-sectional view of a cooling furnace in the baking apparatus shown;

[0057] FIG. 11 yes FIG. 10 A cross-sectional view of a cooling element in a cooling furnace is shown;

[0058] FIG. 12 yes FIG. 7 Schematic diagram of the transition chamber and feeding conveyor mechanism in the baking equipment shown.

[0059] FIG. 13 yes FIG. 1A A three-dimensional schematic diagram of a robot in a baking device shown;

[0060] The meanings of the marks in the figure are:

[0061] 100, baking equipment; 10, box; 11, feeding position; 12, outer exhaust pipe; 20, heating module; 21, heating furnace; 211, heating chamber; 2111, opening; 212, first sealing door; 2121, rotating shaft part; 213, heating piece; 2131, heating lamp tube; 2132, air blowing hole; 2133, heating piece temperature probe; 214, water oxygen monitor; 2151, infrared temperature probe; 2152, cavity temperature detector; 2153, organic solvent monitor; 216, first supporting assembly; 217, first lifting driving assembly; 2171, first driving piece; 2172, torque connecting rod; 2173, connecting rod guide sliding block; 21731, inclined guide hole; 2174, jacking guide sliding block; 2175, positioning guide column; 22, first automatic door opening mechanism; 221, driving piece; 23, mounting plate; 231, sliding groove; 231, air inlet pipeline; 232, air inlet main pipeline; 241, air outlet pipeline; 242, air outlet main pipeline; 25, mass flow meter; 26, flow regulating valve; 30, cooling module; 31, cooling furnace; 311, heating chamber; 312, second sealing door; 313, cooling piece; 3131, cooling flow channel; 3141, split detection piece; 3142, infrared temperature measuring piece; 316, second supporting assembly; 317, second lifting driving assembly; 3171, second driving piece; 3172, connecting plate; 32, second automatic door opening mechanism; 40, mechanical hand; 41, horizontal movement servo lead screw module; 42, vertical movement servo lead screw module; 43, material taking and placing mechanism; 50, control system; 51, gas flow monitoring system; 52, water oxygen monitoring system; 53, touch screen; 54, inert gas device; 541, purification circulation pipeline; 542, purification air exhaust pipeline; 55, vacuum device; 551, vacuum dust removal pipeline; 552, vacuum exhaust pipeline; 56, water chiller; 60, transition cabin; 61, cabin door; 62, gas inlet; 63, vacuum port; 70, feeding conveying mechanism; 71, conveying belt; 72, aligning assembly. DETAILED DESCRIPTION

[0062] The embodiments of the technical scheme of the present application will be described in detail below with reference to the drawings. The following embodiments are only used to more clearly illustrate the technical scheme of the present application, and therefore only serve as examples, and cannot limit the protection scope of the present application.

[0063] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the present application; the terms "include" and "have" and any variations thereof in the specification and claims of the present application and the above description of drawings are intended to cover non-exclusive inclusion.

[0064] In the description of the embodiments of the present application, the technical terms "first", "second", etc. are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "multiple" is more than two, unless otherwise explicitly specified and limited.

[0065] Reference herein to "embodiments" means that the particular features, structures, or characteristics described in connection with the embodiments can be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily all refer to the same embodiment, nor is it necessarily independent or alternative to other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0066] In the description of the embodiments of the present application, the term "and / or" is only a description of the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B, which can represent the three cases of A alone, A and B together, and B alone. In addition, the character " / " herein generally represents an "or" relationship between the associated objects before and after it.

[0067] In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two), and similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0068] In the description of the embodiments of the present application, the technical terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the embodiments of the present application and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0069] In the description of the embodiments of the present application, unless otherwise explicitly specified and limited, the technical terms "mounting", "connection", "connection", "fixing", etc. should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0070] In the manufacturing process of solar cells, the coating on the cell substrate needs to be baked and cured. At present, the solar cell annealing furnace is usually a small experimental device, and the automation degree of the annealing furnace is not high, the production efficiency is low, and it cannot be applied to the automatic production line and cannot meet the demand of mass production of solar cells.

[0071] Therefore, the baking equipment has high production efficiency, can be applied to the automatic production line, and can meet the demand of mass production of solar cells.

[0072] The baking equipment provided by the embodiments of the present application is used for baking products, and the embodiments of the present application take solar cells as an example for illustration. The solar cell includes a substrate and a coating on the substrate, and the baking equipment can bake the solar cell to crystallize and cure the coating. The solar cell can be a perovskite solar cell.

[0073] Please refer to FIG. 1A 、 FIG. 1B The baking equipment 100 provided by the embodiments of the present application includes a box body 10 and a heating module 20. The box body 10 is provided with a sealed accommodating cavity, and the accommodating cavity is connected with an inert gas device to provide an inert gas environment. The heating module 20 is arranged in the accommodating cavity, and the heating module 20 includes a plurality of heating furnaces 21. Please refer to FIG. 3A 、 FIG. 7 to FIG. 9 The heating furnace 21 includes a heating chamber 211 with an opening 2111, a first sealing door 212 arranged on the opening 2111 of the heating chamber 211, and a heating element 213 arranged in the heating chamber 211.

[0074] The structure of the box body 10 can be various, for example, the box body 10 includes a frame and a sealing cover (not shown in the figure). It can be understood that the box body 10 can also be an integrated structure, or the box body 10 includes a first part and a second part that are covered with each other. The box body 10 can be square, or can be cylindrical or other shapes.

[0075] The box 10 is provided with a containing cavity, which is a sealed cavity and is used to be connected with an external inert gas device 54. The inert gas device 54 can input inert gas into the containing cavity to form an inert gas environment in the containing cavity. The inert gas device 54 can provide nitrogen gas, and in some embodiments, the inert gas device 54 can also provide argon gas or other inert gas. The inert gas can provide a stable, water-free and oxygen-free environment for the product as a protective gas or filling gas, which can help to protect the battery from damage during the annealing process and improve the stability of the battery. The box 10 can be a glove box, which can provide a stable environment by filling inert gas into the box 10 and circulating to filter out active substances.

[0076] The heating module 20 includes a plurality of heating furnaces 21, each of which can individually bake one or more products. The plurality of heating furnaces 21 are stacked to reduce the occupied space of the heating module 20. It can be understood that the plurality of heating furnaces 21 can also be distributed horizontally or in other ways.

[0077] The heating furnace 21 includes a heating chamber 211, a first sealing door 212 and a heating element 213. The heating chamber 211 is used to place the products to be baked, and the heating chamber 211 has an opening 2111 for taking and placing the products.

[0078] The first sealing door 212 is arranged on the opening 2111 of the heating chamber 211 to seal the heating chamber 211. The first sealing door 212 can move relative to the heating chamber 211, so that the first sealing door 212 can be opened or closed to facilitate taking and placing the products.

[0079] The heating element 213 is used to heat the products. The heating element 213 can be a non-contact heating device to heat the products by heat radiation. Of course, the heating element 213 can also be a contact heating device.

[0080] In the baking process, the plurality of products are placed in the containing cavity, the containing cavity is connected with the inert gas device 54, and the containing cavity can provide an inert gas environment for the products. Then, the plurality of products are placed in the plurality of heating furnaces 21 respectively, the first sealing door 212 of each heating furnace 21 is closed to form an independent cavity, and the heating element 213 in the heating furnace 21 can heat and bake the products. After the products are baked, the first sealing door 212 is opened, and the products are taken out of the containing cavity and enter the next process.

[0081] The baking equipment 100 provided by the embodiment of the present application comprises a box body 10 and a heating module 20. The box body 10 is internally provided with a sealed containing cavity capable of providing an inert gas environment for products to prevent the products from being oxidized and improve the stability of the products before and after baking. The heating module 20 comprises a plurality of heating furnaces 21. Each heating furnace 21 comprises a heating cavity 211, a first sealing door 212 and a heating piece 213. The opening of the heating cavity 211 is used for taking and placing products. The first sealing door 212 is used for closing the opening, so that each heating furnace 21 forms an independent cavity and can heat the products through the heating piece 213. The plurality of heating furnaces 21 simultaneously heat a plurality of products, thereby improving the baking efficiency. Therefore, the baking equipment 100 provided by the embodiment of the present application can improve the production efficiency and improve the stability of the products before and after baking, thereby being beneficial to guaranteeing the baking quality. The baking equipment 100 solves the problem of low production efficiency of the existing annealing furnace and can be applied to an automatic production line and be suitable for large-area product production, thereby meeting the demand for mass production of solar cells.

[0082] Please refer to FIG. 1A to FIG. 3B In some embodiments, the heating module 20 further comprises a plurality of air inlet pipes 231 and a plurality of air outlet pipes 241. Each heating furnace 21 is in communication with a corresponding air inlet pipe 231 and air outlet pipe 241. The air inlet pipe 231 is used for introducing inert gas into the heating furnace 21. The air outlet pipe 241 is used for discharging the gas in the heating furnace 21.

[0083] The plurality of air inlet pipes 231 are in communication with an air inlet main pipe 232. The air inlet pipe 231 is connected between the air inlet main pipe 232 and the heating furnace 21. The air inlet main pipe 232 can provide inert gas into the plurality of heating furnaces 21 through the plurality of air inlet pipes 231. The inert gas can be nitrogen.

[0084] The plurality of air outlet pipes 241 are in communication with an air outlet main pipe 242. The air outlet pipe 241 is connected between the air outlet main pipe 242 and the heating furnace 21. The gas in the plurality of heating furnaces 21 can flow into the air outlet main pipe 242 through the plurality of air outlet pipes and be discharged.

[0085] By arranging the plurality of air inlet pipes 231 and the plurality of air outlet pipes 241, inert gas can be introduced into each heating furnace 21. At the same time, each heating furnace 21 is sealingly arranged, so that an independent gas atmosphere can be formed in each heating furnace 21, that is, the atmospheres of the heating furnaces 21 are not communicated with each other, so as to facilitate the baking of the products in each heating furnace 21.

[0086] Please refer to FIG. 1A to FIG. 3BIn some embodiments, the baking device 100 further comprises a gas flow monitoring system 51 arranged outside the cabinet 10; a mass flow meter 25 is arranged on the inlet pipe 231 and the outlet pipe 241 respectively, and a flow regulating valve 26 is arranged on the inlet pipe 231; the mass flow meter 25 and the flow regulating valve 26 are electrically connected with the gas flow monitoring system 51 respectively.

[0087] The mass flow refers to the mass of fluid passing through the effective cross section of a closed pipe or an open slot per unit time, and the unit is usually kg / h or kg / s; the mass flow meter 25 is an instrument for measuring the mass flow; the mass flow meter 25 is arranged on the inlet pipe 231 and the outlet pipe 241 respectively, so that the mass flow meter 25 can measure the mass flow of the gas in the pipe.

[0088] The flow regulating valve 26 can be a precision electromagnetic valve; the flow regulating valve 26 is used to regulate the gas flow in the inlet pipe 231, and the flow regulating valve 26 can also open or close the inlet pipe 231.

[0089] The mass flow meter 25 and the flow regulating valve 26 are electrically connected with the gas flow monitoring system 51 respectively; the gas flow monitoring system 51 can receive the measurement information sent by the mass flow meter 25, and control the flow regulating valve 26 according to the measurement information, so as to regulate the flow of the gas flowing into the heating furnace 21. In this way, the gas atmosphere in each heating furnace 21 can be individually monitored and controlled, and the flexibility is good; the heating module 20 can adapt to the heating needs of different products, and the adaptability is good; since the gas atmosphere flow of each heating furnace 21 can be accurately controlled independently, the gas atmosphere circulation heating can be realized in the heating furnace 21, and the product film uniformity is improved.

[0090] Please refer to FIG. 1A In some embodiments, the baking device 100 further comprises a water-oxygen monitoring system 52 arranged outside the cabinet 10; please refer to FIG. 8 The heating furnace 21 further comprises a water-oxygen monitor 214; the water-oxygen monitor 214 is used to monitor the water-oxygen content in the heating furnace 21; the water-oxygen monitor 214 is electrically connected with the water-oxygen monitoring system 52.

[0091] The water-oxygen monitor 214 can monitor the water-oxygen content in the heating furnace 21; the water-oxygen monitor 214 is electrically connected with the water-oxygen monitoring system 52; in this way, the water-oxygen content of each heating furnace 21 can be individually monitored, so as to detect whether the atmosphere environment in the heating furnace 21 meets the baking requirements, and reduce the problem that the product quality is affected due to the atmosphere environment in the furnace body not meeting the standards.

[0092] Please refer to FIG. 1A and FIG. 8In some embodiments, the heating furnace 21 further comprises a first detection member, which comprises one or more of a heating member temperature probe 2133, an infrared temperature probe 2151, a cavity temperature detector 2152, and an organic solvent detector 2153. The heating member temperature probe 2133 is arranged in the heating member 213 and is used to detect the temperature of the heating member 213. The infrared temperature probe 2151 is used to measure the temperature of the product surface. The cavity temperature detector 2152 is used to detect the temperature in the heating furnace 21. The organic solvent detector 2153 is used to detect the concentration of the organic solvent in the heating furnace 21. The baking equipment 100 further comprises a control system 50 arranged outside the box 10, a gas flow monitoring system 51, and a water-oxygen monitoring system 52. The first detection member is electrically connected to the control system 50.

[0093] During baking, the heating member 213 can perform non-contact radiation heating on the product to achieve rapid temperature rise. The heating member temperature probe 2133 can monitor the temperature of the heating member 213 in real time. The infrared temperature probe 2151 can monitor the product surface temperature in real time. The water-oxygen monitor 214 can monitor the water-oxygen content in the heating furnace 21. The first detection member is electrically connected to the water-oxygen monitoring system 52 and the control system 50, which can realize real-time monitoring of the temperature in the heating furnace 21, the product surface temperature, the water-oxygen concentration, and the evaporated organic solvent concentration.

[0094] By using the above technical solution, each heating furnace 21 can realize independent temperature control and monitoring of multiple parameters, and can control the temperature in the heating furnace 21 to achieve uniform closed-loop heating, with a temperature uniformity of ±2℃. The baking equipment 100 comprises the control system 50, the gas flow monitoring system 51, and the water-oxygen monitoring system 52, which can realize online intelligent and efficient heating control.

[0095] Optionally, as shown in FIG. 1A The baking equipment 100 further comprises a touch screen 53 arranged outside the box 10. The touch screen is electrically connected to the control system 50 and can display the detection parameters and adjust the baking time.

[0096] Please refer to FIG. 8 and FIG. 9 In some embodiments, the heating member 213 is a heating plate for generating heat radiation. The number of heating members 213 is multiple, and the heating members 213 are arranged on multiple sides of the heating chamber 211.

[0097] Optionally, the heating member 213 is a heating plate with an embedded heating pipe. The heating member 213 heats the product by non-contact radiation heating, avoiding the influence of contact heating on the quality of the product coating. The maximum heating temperature of the heating member 213 can reach 200℃.

[0098] The number of heating elements 213 can be multiple and arranged on multiple sides of the heating chamber 211. For example, multiple heating elements 213 are arranged on the upper and lower sides and the left and right sides of the heating chamber 211, or one heating element 213 is arranged on each side of the heating chamber 211.

[0099] By adopting the above technical solutions, the heating element 213 heats the product by a non-contact radiation heating mode, avoiding the influence of contact heating on the quality of the product coating. The number of heating elements 213 is multiple, which is conducive to uniformly heating the product and improving the baking efficiency.

[0100] It can be understood that in other embodiments, the heating element 213 can also heat the product by a contact heating mode. In other embodiments, only one heating element 213 can be arranged in the heating furnace 21.

[0101] As shown in FIG. 9 some embodiments, the heating element 213 is internally provided with a heating lamp tube 2131, and the heating element 213 is provided with a blowing hole 2132.

[0102] The heating lamp tube 2131 can be a strip-shaped lamp tube, a curved lamp tube, etc. The heating element 213 is provided with one or more blowing holes 2132, and the heating element 213 can blow air towards the product through the blowing hole 2132, improving the uniformity of baking.

[0103] It can be understood that the blowing hole 2132 can also be omitted, and the product can be heated by the heat radiation generated by the heating lamp tube 2131.

[0104] Please refer to FIG. 8 In some embodiments, the heating furnace 21 further comprises a first support assembly 216 arranged in the heating chamber 211 and a first lifting driving assembly 217 connected to the first support assembly 216. The first support assembly 216 is used to support the product, and the first lifting driving assembly 217 is used to drive the first support assembly 216 to lift.

[0105] The first support assembly 216 can include support columns, thimbles and other support members. The first lifting driving assembly 217 can be arranged in the heating chamber 211 or at least partially arranged outside the heating chamber 211.

[0106] The first lifting driving assembly 217 can drive the first support assembly 216 to lift, so as to adjust the height of the product in the heating furnace 21 and adjust the distance between the product and the heating element 213, so as to adapt to different baking requirements and realize efficient baking.

[0107] In some embodiments, the first lifting driving assembly 217 comprises a first driving member 2171, a torque connecting rod 2172, a connecting rod guide sliding block 2173, a jacking guide sliding block 2174, and a positioning guide column 2175. The first driving member 2171 is arranged outside the heating furnace 21. The two ends of the torque connecting rod 2172 are connected to the first driving member 2171 and the connecting rod guide sliding block 2173, respectively. The first driving member 2171 drives the connecting rod guide sliding block 2173 to slide horizontally through the torque connecting rod 2172. The positioning guide column 2175 is arranged on the jacking guide sliding block 2174 in the vertical direction, and the jacking guide sliding block 2174 is used to drive the first support assembly 216 to lift.

[0108] The first driving member 2171 can comprise various driving members such as a pneumatic cylinder. The first driving member 2171 is used to drive the torque connecting rod 2172 to move horizontally, so as to drive the connecting rod guide sliding block 2173 to slide horizontally through the torque connecting rod 2172. The connecting rod guide sliding block 2173 is arranged on at least one guide rod, and the guide rod defines the moving direction of the connecting rod guide sliding block 2173. The guide rod can be fixed to the opposite sides of the heating furnace 21 in the horizontal direction. The positioning guide column 2175 is arranged on the jacking guide sliding block 2174 to limit the jacking guide sliding block 2174 from sliding in the horizontal direction. The first support assembly 216 is arranged on the jacking guide sliding block 2174. Thus, when the connecting rod guide sliding block 2173 slides horizontally, the jacking guide sliding block 2174 will move in the vertical direction to drive the first support assembly 216 to lift.

[0109] By adopting the above technical solution, the first driving member 2171 is arranged outside the heating furnace 21, which is conducive to the stable operation of the first driving member 2171. The first lifting driving assembly 217 drives the first support assembly 216 to lift through the connecting rod sliding block combination, and the control mode is simple and the accuracy is high.

[0110] In some embodiments, the connecting rod guide sliding block 2173 is provided with an inclined guide hole 21731, the jacking guide sliding block 2174 is slidably connected with the inclined guide hole 21731, the connecting rod guide sliding block 2173 can drive the jacking guide sliding block 2174 to move in the vertical direction when the connecting rod guide sliding block 2173 moves in the horizontal direction, and the first support assembly 216 comprises a plurality of first jacks arranged on the jacking guide sliding block 2174.

[0111] The inclined guide hole 21731 is arranged obliquely relative to the vertical direction. The jacking guide sliding block 2174 can comprise a jacking sliding block arranged in the horizontal direction and a sliding pin arranged on the side of the jacking sliding block. The sliding pin is slidably arranged in the inclined guide hole 21731. When the connecting rod guide sliding block 2173 slides in the horizontal direction, the jacking guide sliding block 2174 can lift in the vertical direction under the limiting of the positioning guide column 2175.

[0112] By adopting the above technical scheme, the connecting rod guide slider 2173 is used in cooperation with the jacking guide slider 2174, horizontal movement can be converted into vertical movement, and the first lifting driving assembly 217 has a simple structure and occupies a small space.

[0113] Optionally, the heating furnace 21 is provided with a partition plate, the partition plate divides the heating furnace 21 into an upper cavity and a lower cavity, the heating element 213 is arranged in the upper cavity, and the first lifting driving assembly 217 is partially arranged in the lower cavity. The first supporting assembly 216 extends from the lower cavity to the upper cavity. In this way, the heating element 213 and the product are located in the upper cavity, and the heating efficiency is improved.

[0114] Please continue to refer to FIG. 8 In some embodiments, the first supporting assembly 216 includes a plurality of first thimbles. The plurality of first thimbles collectively support the product to be baked, and the first thimbles improve the positioning accuracy of the product. The first thimbles can be made of PEEK engineering plastic, which is resistant to high temperature, radiation, wear and corrosion.

[0115] By adopting the above technical scheme, the positioning accuracy of the first supporting assembly 216 is high, and direct metal friction with the product is avoided, thereby improving the product quality.

[0116] Please continue to refer to FIG. 1A and FIG. 7 In some embodiments, the baking equipment 100 further includes a first automatic door opening mechanism 22 connected to the first sealing door 212, and the first automatic door opening mechanism 22 is used to open and close the first sealing door 212.

[0117] The first automatic door opening mechanism 22 can include a driving member such as a servo cylinder, and can further include a connecting member such as a connecting rod. The driving member is connected to the first sealing door 212 through the connecting member. The first automatic door opening mechanism 22 can drive the first sealing door 212 to slide or rotate to open and close the first sealing door 212.

[0118] By adopting the above technical scheme, the first automatic door opening mechanism 22 can automatically open and close the first sealing door 212, which facilitates the product to enter and exit the heating furnace 21, and improves the automation degree of the baking equipment 100.

[0119] Optionally, the heating module 20 is provided with mounting plates 23 on both sides, and the two ends of the first sealing door 212 are respectively rotatably connected to the two mounting plates 23. The first automatic door opening mechanism 22 includes two driving members 221, and the two driving members 221 are respectively arranged on the two mounting plates 23. The two driving members 221 can drive the first sealing door 212 to rotate relative to the mounting plates 23 to open or close the opening 2111. The driving member 221 can include a servo motor, a cylinder or the like. In this way, the driving member 221 can be automatically controlled, and the automation degree is improved.

[0120] In some embodiments, the mounting plate 23 is provided with an arc-shaped sliding groove 231, and the first sealing door 212 is provided with a rotating shaft part 2121 at both ends, which is rotatably connected to the sliding groove 231; the driving part 221 can drive the rotating shaft part 2121 to slide in the sliding groove 231, so as to drive the first sealing door 212 to rotate. In this way, the first sealing door 212 is opened and closed in a rotating manner, without affecting the adjacent heating cabin 21.

[0121] Optionally, the driving part 221 is a cylinder, and the driving shaft thereof is arranged obliquely relative to the vertical direction. The first automatic door opening mechanism 22 is provided with multiple groups and is arranged one-to-one with multiple first sealing doors 212, and each first sealing door 212 can be independently controlled. In other embodiments, the first automatic door opening mechanism 22 can also be connected to multiple first sealing doors 212 and control multiple first sealing doors 212 to open and close at the same time.

[0122] Please refer to FIG. 1A 、 FIG. 7 、 FIG. 10 In some embodiments, the baking equipment 100 further comprises a cooling module 30 and a mechanical hand 40 arranged in the cabinet 10, and the mechanical hand 40 is used for transferring and placing and taking products; the cooling module 30 comprises multiple cooling furnaces 31, and each cooling furnace 31 comprises a cooling chamber 311, a second sealing door 312 movably arranged on the cooling chamber 311, and a cooling part 313 arranged in the cooling chamber 311.

[0123] The cooling module 30 is used for cooling the products after the products are baked, and the cooling module 30 comprises multiple cooling furnaces 31, each of which forms an independent and sealed cooling cavity and can cool the products in the cooling furnace 31. The cooling furnace 31 comprises a cooling chamber 311 with an opening, a cooling part arranged in the cooling chamber 311, and a second sealing door 312 movably connected to the cooling chamber 311 to seal the opening of the cooling chamber 311.

[0124] The mechanical hand 40 is arranged in the cabinet 10, and the mechanical hand 40 can be a three-axis mechanical hand, a four-axis mechanical hand, etc. The mechanical hand 40 can place the products into the heating furnace 21, and after the products are baked, the mechanical hand 40 takes the products out of the heating furnace 21 and places the products into the cooling furnace 31.

[0125] The second sealing door 312 can be controlled to open and close by a second automatic door opening mechanism 32, and the structure of the second automatic door opening mechanism 32 can be the same as that of the first automatic door opening mechanism 22.

[0126] In use, the products are automatically carried by the mechanical hand 40 from the feeding position to the heating furnace 21; the products are heated to a solidification temperature and maintained for a solidification setting time, and then automatically carried to the cooling furnace 31 for cooling.

[0127] By adopting the above technical solutions, the plurality of cooling furnaces 31 in the cooling module 30 can simultaneously cool a plurality of products, and the baking equipment 100 can automatically bake and cool the products. For solar cells, the baking equipment 100 can automatically complete the crystallization and cooling of the substrate coating. The baking equipment 100 uses the robot 40 to automatically take and place the products, realizes automatic feeding and discharging, and has a high degree of automation.

[0128] Please refer to FIG. 11 In some embodiments, the cooling member 313 is a liquid cooling plate, and the liquid cooling plate is internally provided with a cooling flow channel for flowing of a cooling medium.

[0129] Optionally, the cooling member 313 is internally provided with a cooling flow channel 3131 for circulating the cooling medium, the cooling flow channel 3131 extends in the cooling member 313, and the circulating cooling flow channel 3131 has an inlet and an outlet, and the inlet and the outlet are in communication with the external water chiller 56.

[0130] By adopting the above technical solutions, the cooling member 313 can reduce the temperature in the cooling furnace 31 and the temperature of the product, so that the product is cooled, and has a high cooling efficiency.

[0131] Please refer to FIG. 10 In some embodiments, the cooling furnace 31 is internally provided with a second detection member, and the second detection member includes at least one of a crack detection member 3141 and an infrared temperature measurement member 3142.

[0132] The second detection member is electrically connected with the control system 50, wherein the crack detection member 3141 is used to detect whether the product has a cracking problem, and the infrared temperature measurement member 3142 is used to measure the temperature of the product.

[0133] By arranging the infrared temperature measurement member 3142, the temperature of the product can be monitored; by arranging the crack detection member 3141, whether the product has a cracking problem can be monitored in real time, so that the baking equipment 100 can monitor the production parameters and the production state in each cooling furnace 31. It can be understood that the second detection member can also include a detection member for monitoring other parameters.

[0134] In some embodiments, the cooling furnace 31 further includes a second support assembly 3151 arranged in the cooling chamber 311 and a second lifting driving assembly 317 connected to the second support assembly 3151, the second support assembly 3151 is used to support the product, and the second lifting driving assembly 317 is used to drive the second support assembly 3151 to lift and lower, so as to adjust the distance between the product and the cooling member.

[0135] The second support assembly 3151 can include a thimble, a support plate and the like, and the second lifting driving assembly 317 can drive the second support assembly 3151 to lift and lower, so as to drive the product to lift and lower, and then adjust the distance between the product and the cooling member.

[0136] By adopting the above technical solution, the distance between the product and the cooling member 313 is adjustable to meet the cooling needs of different products, and the cooling furnace 31 has good adaptability.

[0137] In some embodiments, the second lifting driving assembly 317 comprises a second driving member 3171 and a connecting plate 3172, and the second support assembly 3151 comprises a plurality of second pins arranged on the connecting plate 3172, and the second driving member is used to drive the connecting plate 3172 to lift the second support assembly 3151.

[0138] The second driving member 3171 can be a pneumatic cylinder or other driving structure; the connecting plate 3172 is arranged opposite to and spaced apart from the cooling member; the second support assembly 3151 comprises a plurality of second pins capable of positioning and supporting the product. In this way, the second driving member 3171 drives the connecting plate 3172 to lift, and the product can be lifted by the second pins.

[0139] By adopting the above technical solution, the second pins can position and support the product, and the second lifting driving assembly 317 has simple structure and high control precision, and can conveniently lift the product.

[0140] Please refer to FIG. 1A In some embodiments, the plurality of heating furnaces 21 are stacked, and the plurality of cooling furnaces 31 are stacked; please refer to FIG. 13 The robot 40 comprises a horizontal moving servo lead screw module 41, a vertical moving servo lead screw module 42 arranged on the horizontal moving servo lead screw module 41, and a material taking and placing mechanism 43 arranged on the vertical moving servo lead screw module.

[0141] Specifically, the plurality of heating furnaces 21 are stacked along the vertical direction, the plurality of cooling furnaces 31 are stacked along the vertical direction, and the heating furnaces 21 and the cooling furnaces 31 are arranged side by side, thereby saving space.

[0142] The robot 40 can move horizontally to move the material taking and placing mechanism 43 between the heating furnaces 21 and the cooling furnaces 31; the robot 40 can move vertically to adapt to different furnace body heights, and the robot 40 has good degrees of freedom and can realize automatic feeding and discharging.

[0143] Please refer to FIG. 3A to FIG. 5 In some embodiments, the baking equipment 100 further comprises a vacuum assembly connected with the box body 10, and the vacuum assembly is used to connect the vacuum device 55.

[0144] The vacuum assembly comprises a vacuum dust removal pipeline 551, and optionally, the vacuum assembly further comprises a vacuum exhaust pipeline 552. By arranging the vacuum assembly, the vacuum degree in the box body 10 is controllable, and the annealing conditions of the product are convenient to control.

[0145] In some embodiments, the baking equipment 100 further comprises a purging circulation pipeline 541 and a purging exhaust pipeline 542 connected with the inert gas device 54, the purging circulation pipeline 541 is used to fill the inert gas into the box 10, and the purging exhaust pipeline 542 is used to extract the gas in the box 10, the purging circulation pipeline 541 is connected to the upper part of the box 10, and the purging exhaust pipeline is connected to the lower part of the box 10.

[0146] The inert gas device 54, the purging circulation pipeline 541 and the purging exhaust pipeline 542 form a purging system, so that the inert gas environment can be maintained in the box 10; the purging circulation pipeline 541 is connected to the upper part of the box 10, and the purging exhaust pipeline 542 is connected to the lower part of the box 10, which is beneficial to the uniform distribution of the inert gas in the box 10 and the rapid replacement of the inert gas and the gas inside the wall.

[0147] In the baking equipment 100 provided by the embodiments of the present application, the box 10 is connected with the purging system and the vacuum system, so that the entire process flow can be in a water-free and oxygen-free environment, and the product stability and quality are improved.

[0148] In some embodiments, the box 10 is provided with an external exhaust pipe 12, which can exhaust the organic solvent evaporated from the product, so that the baking equipment 100 can collect and concentrate the organic solvent evaporated from each layer of the heating furnace 21 and then exhaust and recycle, thereby achieving the effects of safety, environmental protection and consumption reduction.

[0149] Please refer to FIG. 2 , FIG. 7 , FIG. 12 In some embodiments, the baking equipment 100 further comprises a transition cabin 60 and a feeding conveying mechanism 70, the box 10 is provided with a feeding position 11, the transition cabin 60 is communicated with one side of the box 10, and the feeding conveying mechanism 70 is arranged between the transition cabin 60 and the feeding position 11, and the feeding conveying mechanism 70 is used to convey the product from the transition cabin 60 to the feeding position 11.

[0150] The transition cabin 60 is used to connect the upstream production equipment and the baking equipment 100, by arranging the transition cabin 60 and the feeding conveying mechanism 70, the baking equipment 100 realizes automatic feeding, and the degree of automation is high, which is beneficial to realize large-scale production.

[0151] As shown in FIG. 12 In some embodiments, the transition cabin 60 is provided with a movable cabin door 61, a gas inlet 62 connected with the inert gas device, and a vacuum port 63 connected with the vacuum device.

[0152] The cabin door 61 can be controlled by an automatic door opening mechanism. When the cabin door 61 is opened, the product can enter the box 10 from the transition cabin 60. When the cabin door is closed, the box 10 remains sealed. The transition cabin 60 is provided with a gas inlet 62, through which inert gas such as nitrogen can be introduced. The transition cabin 60 is provided with a vacuum port 63, so that the transition cabin 60 can reach a vacuum condition. When the water and oxygen environment meets the standard, the cabin door 61 is opened by the driving assembly 45, and the product is transferred to the feeding conveying mechanism 70.

[0153] By adopting the above technical scheme, the product is transferred from the upstream production equipment to the box 10 through the transition cabin 60. The transition cabin 60 can provide an inert gas environment, reducing the risk of product oxidation and improving the stability of the product.

[0154] Please continue to refer to FIG. 12 In some embodiments, the feeding conveying mechanism 70 includes a conveying belt 71 and a straightening assembly 72 for straightening the product. In this way, the feeding conveying mechanism 70 can convey and straighten the product, facilitating the accurate grasping of the product by the robot 40 and improving the degree of automation.

[0155] Please refer to FIG. 1A to FIG. 12 Some embodiments of the present application provide a baking device 100, which includes a box and a heating module 20, a cooling module 30 and a robot 40 arranged in the box 10. The box 10 is provided with a sealed containing cavity, which is connected with an inert gas device to provide an inert gas environment. The heating module 20 includes a plurality of heating furnaces 21 arranged in layers, each heating furnace 21 is in communication with an air inlet pipe 231 and an air outlet pipe 241, and each heating furnace 21 can control the gas atmosphere independently. The cooling module 30 includes a plurality of cooling furnaces 31 arranged in layers, each cooling furnace 31 can cool the product independently. The robot 40 can grasp and transfer the product. The above-mentioned baking device 100 can bake and cool a plurality of products, has high production efficiency, and is suitable for mass production of solar cells.

[0156] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, but not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should be covered in the scope of the claims and the description of the present application. Especially, as long as there is no structural conflict, each technical feature mentioned in each embodiment can be combined in any way. The present application is not limited to the specific embodiments disclosed in the text, but includes all technical solutions falling within the scope of the claims.

Claims

1. A toasting apparatus, characterised in that, The baking equipment comprises a box body, a sealed containing cavity is arranged in the box body, and the containing cavity is connected with an inert gas device to provide an inert gas environment. A heating module is arranged in the containing cavity, and the heating module comprises a plurality of heating furnaces, each of the heating furnaces comprises a heating chamber with an opening, a first sealing door and a heating element, the first sealing door is movably arranged on the opening of the heating chamber and is used for sealing the heating chamber, and the heating element is arranged in the heating chamber. The heating module further comprises a plurality of gas inlet pipes and a plurality of gas outlet pipes, each of the heating furnaces is connected with corresponding gas inlet pipes and gas outlet pipes, the gas inlet pipes are used for introducing inert gas into the heating furnaces, and the gas outlet pipes are used for discharging gas in the heating furnaces.

2. The toasting apparatus of claim 1, wherein: The baking equipment further comprises a gas flow monitoring system arranged outside the box body.

3. The toasting apparatus of claim 2, wherein: Mass flow meters are arranged on the gas inlet pipes and the gas outlet pipes respectively, a flow regulating valve is arranged on the gas inlet pipe, and the mass flow meters and the flow regulating valve are electrically connected with the gas flow monitoring system. The baking equipment further comprises a water and oxygen monitoring system arranged outside the box body.

4. The toasting apparatus of claim 3, wherein: A water and oxygen monitoring instrument is further arranged in the heating furnace, the water and oxygen monitoring instrument is used for monitoring water and oxygen content in the heating furnace, and the water and oxygen monitoring instrument is electrically connected with the water and oxygen monitoring system.

5. The baking equipment according to claim 4, characterized in that: A first detection element is further arranged in the heating furnace, the first detection element comprises one or more of a heating element temperature probe, an infrared temperature probe, a cavity temperature detector and an organic solvent detector, the heating element temperature probe is used for detecting the temperature of the heating element, the infrared temperature probe is used for measuring the temperature of the surface of a product, the cavity temperature detector is used for detecting the temperature in the heating furnace, and the organic solvent detector is used for detecting the concentration of organic solvent in the heating furnace. The baking equipment further comprises a control system arranged outside the box body, and the gas flow monitoring system, the water and oxygen monitoring system and the first detection element are electrically connected with the control system. The heating element is a heating plate for generating heat radiation.

6. The toasting apparatus of claim 1, wherein: The number of the heating elements is a plurality, and the heating elements are arranged on multiple sides of the heating chamber. The heating furnace further comprises a first support assembly arranged in the heating chamber and a first lifting driving assembly connected to the first support assembly, the first support assembly is used for supporting a product, and the first lifting driving assembly is used for driving the first support assembly to lift.

7. The toasting apparatus of claim 1, wherein: The first lifting driving assembly comprises a first driving element, a torque connecting rod, a connecting rod guide sliding block, a jacking guide sliding block and a positioning guide column, the first driving element is arranged on the outside of the heating furnace, two ends of the torque connecting rod are respectively connected to the first driving element and the connecting rod guide sliding block, the first driving element drives the connecting rod guide sliding block to horizontally slide through the torque connecting rod, the positioning guide column is arranged on the jacking guide sliding block in the vertical direction, and the jacking guide sliding block is used for driving the first support assembly to lift.

8. The toasting apparatus of claim 7, wherein: ​ 9. The toasting apparatus of claim 8, wherein: The connecting rod guide slider is provided with an inclined guide hole, and the jacking guide slider is slidably connected in the inclined guide hole.

10. The toasting apparatus of claim 1, wherein: The baking equipment further comprises a first automatic door opening mechanism connected to the first sealing door, which is used to open and close the first sealing door.

11. The toasting apparatus of claim 10, wherein: Both sides of the heating module are provided with mounting plates, and both ends of the first sealing door are rotatably connected with the two mounting plates respectively; the first automatic door opening mechanism comprises two driving members, and the two driving members are arranged on the two mounting plates respectively, and the two driving members can drive the first sealing door to rotate relative to the mounting plates to open or close the opening.

12. The toasting apparatus of claim 11, wherein: The mounting plate is provided with an arc-shaped sliding groove, both ends of the first sealing door are provided with a rotating shaft part, and the rotating shaft part is rotatably connected with the sliding groove; the driving member can drive the rotating shaft part to slide in the sliding groove to drive the first sealing door to rotate.

13. The toasting apparatus of any one of claims 1-12, wherein: The baking equipment further comprises a cooling module and a mechanical hand arranged in the box body, and the mechanical hand is used to transfer and take and place products. The cooling module comprises a plurality of cooling furnaces, and each cooling furnace comprises a cooling chamber, a second sealing door movably arranged on the cooling chamber, and a cooling member arranged in the cooling chamber.

14. The toasting apparatus of claim 13, wherein: The cooling furnace is provided with a second detection member, and the second detection member comprises at least one of a crack detection member and an infrared temperature measurement member.

15. The toasting apparatus of claim 13, wherein: The cooling furnace further comprises a second supporting assembly arranged in the cooling chamber and a second lifting driving assembly connected to the second supporting assembly, the second supporting assembly is used to support the product, and the second lifting driving assembly is used to drive the second supporting assembly to lift to adjust the distance between the product and the cooling member.

16. The toasting apparatus of claim 15, wherein: The second lifting driving assembly comprises a second driving member and a connecting plate, and the second supporting assembly comprises a plurality of second ejector pins, the second ejector pins are arranged on the connecting plate, and the second driving member is used to drive the connecting plate to drive the second supporting assembly to lift.

17. The baking equipment according to claim 13, wherein: A plurality of the heating furnaces are arranged in layers, and a plurality of the cooling furnaces are arranged in layers. The mechanical hand comprises a horizontal movement servo lead screw module, a vertical movement servo lead screw module arranged on the horizontal movement servo lead screw module, and a taking and placing mechanism arranged on the vertical movement servo lead screw module.

18. The toasting apparatus of any one of claims 1-17, wherein: The baking equipment further comprises a purification circulating pipeline and a purification exhaust pipeline connected with the inert gas device, the purification circulating pipeline is used to fill inert gas into the box body, the purification exhaust pipeline is used to extract gas in the box body, the purification circulating pipeline is connected to the upper part of the box body, and the purification exhaust pipeline is connected to the lower part of the box body.

19. The toasting apparatus of any one of claims 1-17, wherein: The baking equipment further comprises a transition cabin and a feeding conveying mechanism, the box is internally provided with a feeding position, the transition cabin is communicated with one side of the box, and the feeding conveying mechanism is arranged between the transition cabin and the feeding position and used for conveying products from the transition cabin to the feeding position. The transition cabin is provided with a movable cabin door, a gas inlet used for being connected with an inert gas device, and a vacuum port used for being connected with a vacuum device.

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