Low-power-consumption specific-parameter single-beam light source acquisition device and method and energy-saving application of low-power-consumption specific-parameter single-beam light source acquisition device in magneto-optical detection

Abstract

The invention relates to a low-power-consumption specific-parameter single-beam light source acquisition device and method and energy-saving application of the low-power-consumption specific-parameter single-beam light source acquisition device and method in magneto-optical detection, and belongs to the technical field of magneto-optical detection, and the low-power-consumption specific-parameter single-beam light source acquisition device comprises a laser transmitter, a monochromator, an off-axis converter, a wavelength selector, an attenuator, a light chopper, a regulator, an optical filter system, a polarizer system, a collimator and a stabilizer. According to the invention, a novel light source technology is adopted, and a stable single beam of light with high consistency is obtained by accurately controlling the emission characteristic of a light source; the intensity, the phase and the polarization state of the light beam are precisely controlled by combining an optical modulation technology, so that the precise adjustment of the detected light beam parameters is realized; the light source is dynamically managed through the intelligent control system, so that different detection requirements are met, and the energy consumption is further reduced.

Description

TECHNICAL FIELD

[0001] The application relates to a low-power specific parameter single-beam light source acquisition device and method and energy-saving application thereof in magneto-optical detection. BACKGROUND

[0002] In current MRAM (Magnetic Random Access Memory, a non-volatile magnetic random memory) process detection, magneto-optical detection technology has become an important means for detecting material properties or magnetic field distribution due to its unique advantages. Especially in the background of extremely high requirements for the interface flatness of the magnetic layer and the tunnel layer in MRAM, traditional mechanical detection methods are difficult to meet the high-precision requirements of super-large integrated circuits due to their limitations. Therefore, the magneto-optical detection technology can be applied to MRAM process detection, but special attention should be paid to the light splitting technology and a series of optical path designs to achieve the purpose of adjusting the detection effect. However, how to simply obtain a single-beam light source with specific parameters (such as wavelength, light intensity and spatial distribution, etc.) has become a major challenge for this technology.

[0003] Traditional light sources such as white light sources or monochromatic light sources have certain limitations in meeting specific parameters, such as limited wavelength range, unstable light intensity and difficult light beam adjustment, etc., which will affect the performance and reliability of the magneto-optical detection system. In view of this, it is urgent to propose a low-power specific parameter single-beam light source acquisition method and its energy-saving application in magneto-optical detection. SUMMARY

[0004] In order to solve the problems of the prior art, the application provides a low-power specific parameter single-beam light source acquisition device and its energy-saving application in magneto-optical detection, which not only focuses on obtaining a single-beam light source with specific parameters through specific light source acquisition technology and light beam adjustment technology, but also integrates the concepts of energy saving and low power consumption into each link of magneto-optical detection.

[0005] The application adopts the following technical solutions:

[0006] A low-power specific parameter single-beam light source acquisition device comprises a laser emitter, a monochromator, an off-axis converter, a wavelength selector, an attenuator, a light chopper, an adjuster, a filter system, a polarizer system, a collimator and a stabilizer.

[0007] The laser emitter is connected with a current controller for generating a single beam laser source; an off-axis converter is used to parallelize its light and become a parallel beam; a wavelength selector is used to select the appropriate beam wavelength according to specific wavelength requirements; an attenuator is used to adjust the beam intensity; a light chopper is used for light intensity modulation; a collimator is used to adjust the direction and shape of the beam to make it a parallel beam; a polarizer system is used to select a specific polarization direction or change the polarization state of the beam; a filter system is used to adjust the wavelength range of the beam; and a stabilizer is used to adjust the output of the light source to maintain its stability and consistency.

[0008] The present application has the following characteristics:

[0009] Specific light source acquisition technology: By selecting appropriate light source devices such as lasers, LEDs, etc., and using optical elements such as filters, anisotropic materials, etc., a single beam light source with specific parameters is obtained. The effect of current is used to establish the connection of magneto-optical while obtaining stable parameters.

[0010] Wavelength range adjustability of the present application: Different combinations of light source devices and filters can achieve a wide range of wavelength selection to meet the specific wavelength requirements in magneto-optical detection.

[0011] Light intensity stability: The specific light source acquisition technology can provide stable light intensity output, reducing the influence of light intensity fluctuations on magneto-optical detection results.

[0012] Beam adjustment technology: By using optical elements such as lenses, prisms, polarizers, etc., the light beam of the light source is adjusted and optimized.

[0013] The advantages of this technical means include:

[0014] Spatial distribution control: The beam adjustment technology can achieve spatial distribution control of the light source beam, making it match the requirements of the magneto-optical detection system, improving the sensitivity and accuracy of detection.

[0015] Beam focusing and direction: By using optical elements such as lenses or prisms, the light beam of the light source can be focused and directed, making it more suitable for the needs of the magneto-optical detection system, improving the precision and stability of detection.

[0016] Through the above technical means, the present application solves the problems of obtaining a single beam light source with specific parameters and its application in magneto-optical detection in the prior art. The specific light source acquisition technology provides flexible wavelength range selection and stable light intensity output, meeting the requirements of magneto-optical detection for specific parameter light sources. The beam adjustment technology realizes precise control and optimization of the light source beam, improving the performance and reliability of the magneto-optical detection system.

[0017] The application discloses a low-power specific parameter single-beam light source acquisition device and an acquisition method thereof.

[0018] Preferably, the new light source technology is a specific wavelength light source based on LED or laser.

[0019] Preferably, the optical modulation technology includes precisely controlling the intensity, phase and polarization state of the light beam by using electro-optic modulators (EOM) and spatial light modulators (SLM).

[0020] Preferably, first, a laser emitter is used to generate a single-beam laser light source; the laser emitter can adjust the wavelength and power of the laser as needed.

[0021] The light beam output by the laser emitter is introduced into a wavelength selector, which selects an appropriate wavelength of the light beam according to specific wavelength requirements and filters out light of other wavelengths.

[0022] Through a collimator, the direction and shape of the light beam are adjusted to make it a parallel light beam, and the light beam is guided to the next optical component.

[0023] Before the light beam enters the next optical component, an attenuator is used to adjust the intensity of the light beam, which is to adapt to the requirements of magneto-optical detection on light intensity.

[0024] In order to maintain the stability of the light source, a stabilizer is used before the light beam enters the next optical component, which can adjust the output of the light source through feedback control and other methods to maintain its stability and consistency.

[0025] Next, the light beam passes through a polarizer system, which can select a specific polarization direction or change the polarization state of the light beam to adapt to the needs of magneto-optical detection.

[0026] The light beam passes through an off-axis converter to make its light rays parallel and become a parallel light beam, which helps the subsequent optical components to process.

[0027] Before the light beam enters the next stage, a light chopper can be used for light intensity modulation, which periodically blocks the light beam to produce light pulses, which is very important for subsequent signal processing and modulation.

[0028] The light beam enters a monochromator to select a light beam of a specific wavelength and filter out light of other wavelengths, which ensures that only the required wavelength participates in magneto-optical detection.

[0029] After the monochromator, the wavelength range of the light beam can be further adjusted using a filter system, which can select a specific wavelength range of the light beam by combining multiple filters;

[0030] Finally, the beam with specific parameters passes through the optical assembly and enters the magneto-optical detection device for detecting and analyzing the magneto-optical properties of the light beam passing through the MRAM sample. The magneto-optical detection device can measure parameters such as the polarization state or optical rotation of the light to obtain information about the MRAM process.

[0031] The present application can meet the requirements of specific wavelength range and light intensity in magneto-optical detection while achieving lower energy consumption, thereby improving the accuracy and energy efficiency of detection. Secondly, the spatial distribution of the light source can be optimized to better meet the requirements of the magneto-optical detection system, improving the sensitivity of detection. Finally, through the application of beam adjustment technology, precise control of the light source can be achieved, reducing errors and interference, thereby not only reducing energy consumption in the detection process, but also improving the stability and accuracy of magneto-optical detection.

[0032] An application of the above-mentioned low-power specific parameter single-beam light source acquisition device is applied to magneto-optical detection, improving the accuracy and sensitivity of magneto-optical detection, and reducing energy consumption while ensuring detection efficiency.

[0033] The core of the present application includes two aspects: one is to adopt new light source technology, such as specific wavelength light source based on LED or laser, to obtain stable and highly consistent single beam by precisely controlling the emission characteristics of the light source; the other is to combine advanced optical modulation technology, such as using electro-optic modulator (EOM) and spatial light modulator (SLM), to precisely control the intensity, phase and polarization state of the light beam, thereby realizing precise adjustment of the parameters of the detection light beam. In addition, an intelligent control system is used to dynamically manage the light source to adapt to different detection requirements, further reducing energy consumption.

[0034] The application of the present application can not only significantly improve the accuracy and sensitivity of magneto-optical detection, but also greatly reduce energy consumption while ensuring detection efficiency, meeting the requirements of green manufacturing and sustainable development. This innovative method not only has important significance for MRAM process detection, but also provides a new technical solution for other application fields that require high-precision magnetic detection.

[0035] The details of the present application can be referred to the prior art.

[0036] The beneficial effects of the present application are:

[0037] 1. Improve the accuracy of magneto-optical detection: Through specific light source acquisition technology, a single light source with specific parameters such as specific wavelength range, light intensity and spatial distribution can be obtained. This allows the magneto-optical detection system to select the light source accurately for different materials and application requirements, thereby improving the accuracy and accuracy of detection.

[0038] 2. Enhance the stability of magneto-optical detection: Specific light source acquisition technology can provide stable light intensity output, reducing the influence of light intensity fluctuation on magneto-optical detection results. Light beam adjustment technology can optimize the spatial distribution of the light source, making it more suitable for the requirements of the magneto-optical detection system, further improving the stability and reliability of detection.

[0039] 3. Improve the sensitivity of magneto-optical detection: Through the application of light beam adjustment technology, the focusing and direction of the light beam of the light source can be realized, which is more suitable for the needs of the magneto-optical detection system, which helps to improve the sensitivity of magneto-optical detection, and the system can more accurately detect the tiny magneto-optical signal.

[0040] 4. Increase the flexibility of the magneto-optical detection system: Specific light source acquisition technology provides wavelength range adjustability, allowing appropriate wavelength range to be selected according to specific requirements. This increases the flexibility of the magneto-optical detection system, allowing it to adapt to the needs of different materials and application scenarios.

[0041] 5. Improve the reliability and feasibility of the magneto-optical detection system: Through the optimization of the parameters of the light source and the application of light beam adjustment technology, the invention can realize the accurate control and optimization of the magneto-optical detection system. This helps to reduce errors and interference, improve the stability, reliability and feasibility of the system.

[0042] 6. Reduce the energy consumption of the overall process: Through specific light source acquisition technology and light beam adjustment technology, a low-power single light source with specific parameters is obtained, and an algorithm is explored to apply the low-power single light source to process detection in a more energy-saving way, thereby achieving lower energy consumption indicators.

[0043] In summary, the specific parameter single light source acquisition and its application method in magneto-optical detection have significant advantages in improving the accuracy of magneto-optical detection, enhancing stability, improving sensitivity, increasing flexibility, and improving system reliability and feasibility. It also has important value in energy saving and emission reduction, and has wide application prospects in the fields of material science, optoelectronics, information storage and other fields of magneto-optical detection application. BRIEF DESCRIPTION OF DRAWINGS

[0044] The drawings accompanying the specification of this application are used to provide a further understanding of the application, the illustrative embodiments of the application and their descriptions serve to explain the application, and do not constitute an improper limitation on the application.

[0045] Figure 1A low-power specific parameter single-beam light source acquisition device structure schematic diagram of the present application;

[0046] Figure 2 A magnetic domain observation graph under parameter instability and under the parameter stability of the present application; wherein (a) is a magnetic domain observation graph under parameter instability; (b) is a magnetic domain observation graph under the parameter stability of the present application. DETAILED DESCRIPTION

[0047] In order for those skilled in the art to better understand the technical solutions in the specification, the technical solutions in the embodiments of the specification will be described clearly and completely below in conjunction with the drawings in the specification, but not limited to this, the present application is not described in detail, and is according to the conventional technology in the art.

[0048] Embodiment 1

[0049] A low-power specific parameter single-beam light source acquisition device, such as Figure 1 , comprising a laser emitter, a monochromator, an off-axis converter, a wavelength selector, an attenuator, a chopper, an adjuster, a filter system, a polarizer system, a collimator, and a stabilizer.

[0050] The laser emitter is connected with a current controller, for generating a single-beam laser light source; the off-axis converter is used to parallelize the light and become a parallel light beam; the wavelength selector is used to select the appropriate light beam wavelength according to the specific wavelength requirement; the attenuator is used to adjust the light beam intensity; the chopper is used for light intensity modulation; the collimator is used to adjust the direction and shape of the light beam, so that it becomes a parallel light beam; the polarizer system is used to select a specific polarization direction or change the polarization state of the light beam; the filter system is used to adjust the wavelength range of the light beam; the stabilizer is used to adjust the output of the light source to maintain its stability and consistency.

[0051] Embodiment 2

[0052] An acquisition method of the low-power specific parameter single-beam light source acquisition device of embodiment 1, as described in embodiment 1, the difference is that a new light source technology is adopted, by precisely controlling the emission characteristics of the light source, a stable and highly consistent single-beam light is obtained; combined with optical modulation technology, the intensity, phase and polarization state of the light beam are precisely controlled, so as to realize the precise adjustment of the detection light beam parameters; through the intelligent control system, the light source is dynamically managed to adapt to different detection requirements, further reducing the energy consumption.

[0053] The new light source technology is a specific wavelength light source based on LED or laser.

[0054] The optical modulation technology includes precisely controlling the intensity, phase and polarization state of the light beam by using electro-optic modulator (EOM) and spatial light modulator (SLM).

[0055] First, a single laser beam is generated using a laser emitter; the laser emitter can adjust the wavelength and power of the laser as needed;

[0056] The light beam output by the laser emitter is introduced into a wavelength selector, which selects the appropriate wavelength of the light beam according to specific wavelength requirements and filters out other wavelengths of light;

[0057] The collimator adjusts the direction and shape of the light beam to make it a parallel beam and directs it to the next optical component;

[0058] Before the light beam enters the next optical component, an attenuator is used to adjust the intensity of the light beam, which is to adapt to the requirements of magneto-optical detection on light intensity;

[0059] In order to maintain the stability of the light source, a stabilizer is used before the light beam enters the next optical component, which can adjust the output of the light source through feedback control and other methods to maintain its stability and consistency;

[0060] Next, the light beam passes through a polarizer system, which can select a specific polarization direction or change the polarization state of the light beam to meet the needs of magneto-optical detection;

[0061] The light beam passes through an off-axis converter to parallelize its rays and become a parallel beam, which helps the subsequent optical components to process;

[0062] Before the light beam enters the next stage, a light chopper can be used for light intensity modulation, which periodically blocks the light beam to produce light pulses, which is very important for subsequent signal processing and modulation;

[0063] The light beam enters a monochromator, which selects a specific wavelength of light beam and filters out other wavelengths of light, which ensures that only the required wavelength participates in magneto-optical detection;

[0064] After the monochromator, a filter system can be used to further adjust the wavelength range of the light beam, which can select a specific wavelength range of the light beam by combining multiple filters;

[0065] Finally, the light beam with specific parameters passes through the optical components and enters the magneto-optical detection device, which is used to detect and analyze the magneto-optical properties of the light beam when it passes through the MRAM sample. The magneto-optical detection device can measure parameters such as polarization state or optical rotation to obtain information about the MRAM process.

[0066] The present application can meet the requirements of specific wavelength range and light intensity in magneto-optical detection while achieving lower energy consumption, thereby improving the accuracy and energy efficiency of detection. Secondly, the spatial distribution of the light source can be optimized to better meet the requirements of the magneto-optical detection system, improving the sensitivity of the detection. Finally, through the application of beam adjustment technology, precise control of the light source can be achieved, reducing errors and interference, thereby not only reducing energy consumption in the detection process, but also improving the stability and accuracy of magneto-optical detection.

[0067] Traditional light source acquisition techniques often use traditional light sources such as white light sources or monochromatic light sources. However, the present embodiment achieves the acquisition of a low-power single-beam light source with specific parameters by selecting appropriate light source devices and optical elements.

[0068] In addition, the present application also applies beam adjustment technology to optimize and control the light beam of the light source, which are two key technical means that constitute the important difference between the present application and previous technologies.

[0069] The specific key points of the present application are as follows:

[0070] Wavelength selection and adjustment:

[0071] One of the key points is to be able to select and adjust the wavelength of the light source, which can be achieved by using appropriate light sources or using wavelength selectors and optical components such as filters. By precisely controlling the wavelength of the light source, the requirements of specific wavelengths in magneto-optical detection can be met to measure and analyze the magneto-optical properties of the sample.

[0072] Light intensity adjustment:

[0073] Another key point is to be able to adjust the intensity of the light source, which can be achieved by using optical components such as attenuators or stabilizers. In magneto-optical detection, the stability and consistency of light intensity are very important for obtaining accurate measurement results. Therefore, ensuring stable output and appropriate light intensity adjustment of the light source is one of the key points.

[0074] Polarization control of light beam:

[0075] Magneto-optical detection usually involves measurement and analysis of the polarization state of the light beam. Therefore, one of the key points is to be able to control the polarization state of the light source, which can be achieved by using polarizer systems or other polarization control elements. By adjusting the polarization state of the light source, the requirements of specific polarization states in magneto-optical detection can be met, and accurate magneto-optical property measurement results can be obtained.

[0076] Light beam stability and uniformity:

[0077] The stability and uniformity of the light beam are very important for the accuracy and reliability of magneto-optical detection. One of the key points is to ensure that the light source produces a stable and uniform light beam. This can be achieved by using optical components such as stabilizers and beam shapers. Stabilizers can monitor and adjust the output of the light source to maintain its stability. Beam shapers can adjust the shape and uniformity of the light beam to meet the requirements of magneto-optical detection.

[0078] Embodiment 3

[0079] An application of the low-power specific parameter single-beam light source acquisition device of embodiment 1 is applied to magneto-optical detection, which improves the precision and sensitivity of magneto-optical detection, reduces energy consumption while ensuring detection efficiency.

[0080] As shown in Figure 2 , the application has better effect compared with the unstable state of the parameters. Figure 1

[0081] The above is the preferred embodiment of the present application. It should be noted that for ordinary skilled in the art, without departing from the principles of the present application, a number of improvements and refinements can be made, which should be considered as the protection scope of the present application.​

Claims

1. A low-power specific parameter single-beam light source acquisition device, characterized in that, The laser emitter, monochromator, off-axis converter, wavelength selector, attenuator, chopper, adjuster, filter system, polarizer system, collimator, and stabilizer; The laser emitter is connected with a current controller for generating a single laser beam; the off-axis converter is used to parallelize the light and make it a parallel beam; The wavelength selector is used to select the appropriate wavelength of the light beam according to specific requirements; the attenuator is used to adjust the intensity of the light beam; the chopper is used for light intensity modulation; the collimator is used to adjust the direction and shape of the light beam, making it a parallel beam; the polarizer system is used to select a specific polarization direction or change the polarization state of the light beam; the filter system is used to adjust the wavelength range of the light beam; the stabilizer is used to adjust the output of the light source to maintain its stability and consistency.

2. An acquisition method based on the low-power specific parameter single-beam light source acquisition device of claim 1, characterized in that, Using new light source technology, the emission characteristics of the light source are precisely controlled to obtain a stable and highly consistent single beam; Combining optical modulation technology, the intensity, phase, and polarization state of the light beam are precisely controlled to achieve precise adjustment of the detection beam parameters; through intelligent control system, the light source is dynamically managed to adapt to different detection requirements, further reducing energy consumption.

3. The acquisition method of a low-power specific parameter single-beam light source acquisition device according to claim 2, characterized in that, The new light source technology is a specific wavelength light source based on LED or laser.

4. The acquisition method of a low-power specific parameter single-beam light source acquisition device according to claim 3, characterized in that, The optical modulation technology includes the use of photoelectric modulators and spatial light modulators to precisely control the intensity, phase, and polarization state of the light beam.

5. The acquisition method of a low-power specific parameter single-beam light source acquisition device according to claim 4, characterized in that, First, a single laser beam is generated using a laser emitter; the laser emitter adjusts the wavelength and power of the laser as needed; The light beam output by the laser emitter is introduced into the wavelength selector, which selects the appropriate wavelength of the light beam according to specific requirements and filters out other wavelengths of light; Through the collimator, the direction and shape of the light beam are adjusted to make it a parallel beam, and it is guided to the next optical component; Before the light beam enters the next optical component, the attenuator is used to adjust the intensity of the light beam; The stabilizer is used before the light beam enters the next optical component; the stabilizer can adjust the output of the light source through feedback control and other methods to maintain its stability and consistency; Next, the light beam passes through the polarizer system, which selects a specific polarization direction or changes the polarization state of the light beam to meet the needs of magneto-optical detection; The light beam passes through the off-axis converter, which parallelizes the light and makes it a parallel beam; Before the light beam enters the next stage, the chopper is used for light intensity modulation; the chopper periodically blocks the light beam to produce light pulses; The light beam enters the monochromator, which selects a specific wavelength of the light beam and filters out other wavelengths of light; After the monochromator, the filter system is used to further adjust the wavelength range of the light beam; the filter system selects a specific wavelength range of the light beam by combining multiple filters; Finally, the specific parameter beam passes through the optical components and enters the magneto-optical detection device, which is used to detect and analyze the magneto-optical properties of the light beam when it passes through the MRAM sample; the magneto-optical detection device measures parameters such as the polarization state or optical rotation of the light to obtain information about the MRAM process.

6. Use of the low-power consumption specific parameter single-beam light source acquisition device according to claim 1, characterized in that, Applied to magneto-optical detection, it improves the precision and sensitivity of magneto-optical detection, reduces energy consumption while ensuring detection efficiency.

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