Rotary table system and control method thereof

Abstract

The invention relates to the technical field of semiconductor detection, in particular to a rotary table system and a control method thereof.The rotary table system comprises a rotary table, the rotary table can rotate along a rotating shaft, the rotating shaft is perpendicular to the top face of the rotary table, and the top face of the rotary table is used for bearing a sample; the jitter suppression assembly is located on the side, bearing a sample, of the rotary table; wherein when the rotary table is pre-controlled to stop rotating, the jitter suppression assembly applies an acting force to the rotary table, and the direction of the acting force is parallel to that of the rotating shaft, so that the jitter of the rotary table is suppressed. The size, the cost and the complexity of the jitter suppression assembly are greatly reduced while it is guaranteed that the rotary table has high positioning precision.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor testing technology, and particularly relates to a turntable system and its control method. Background Art

[0002] In the optical inspection process of semiconductors, a turntable is used to drive the optical components to rotate. As a component in the inspection system, if the optical components vibrate when they need to stop rotating, it will negatively affect the inspection accuracy and efficiency. Therefore, for a rotatable turntable used to place optical components, the turntable needs to have high positioning accuracy. If the turntable cannot stop stably after power is cut off when it is controlled to stop rotating, it will have a significant impact on the inspection system.

[0003] Existing turntables suffer from problems such as low positioning accuracy, complex structural design, and limited available space. Furthermore, if a turntable jitter suppression structure is used to achieve high-precision jitter suppression, the design of the turntable jitter suppression structure is usually quite complex, requires a large space, and is also costly. This is especially true for small turntables with low encoder accuracy, where the absolute error of servo control is relatively high, and the cost of achieving high-precision servo control is also relatively high. Summary of the Invention

[0004] In view of this, the present invention aims to provide a turntable system and its control method, which can greatly reduce the size, cost and complexity of the jitter suppression components while ensuring that the turntable has high positioning accuracy.

[0005] To achieve the above objectives, the technical solution created by this invention is implemented as follows: This invention provides a turntable system, comprising: a turntable rotatable along a rotation axis perpendicular to the top surface of the turntable, the top surface of the turntable being used to support a sample; and a vibration suppression component located on the side of the turntable supporting the sample; wherein, when the turntable is pre-controlled to stop rotating, the vibration suppression component applies a force parallel to the rotation axis to the turntable to suppress turntable vibration.

[0006] Furthermore, the vibration suppression component is spaced apart from the top surface of the turntable, and the vibration suppression component includes an electromagnet; when the turntable is pre-controlled to stop rotating, the coil of the electromagnet is energized, and the electromagnet generates a magnetic attraction force on the top surface of the turntable to suppress the vibration of the turntable.

[0007] Furthermore, the vibration suppression component has a free end facing the top surface of the turntable, which is extendable in a direction parallel to the rotation axis; when the turntable is pre-controlled to stop rotating, the free end moves toward the turntable until it contacts the top surface of the turntable, and applies a certain pressure to the top surface of the turntable to suppress turntable vibration.

[0008] Furthermore, the top surface of the turntable has a limiting groove; when the turntable is pre-controlled to stop rotating, the free end moves toward the turntable until it contacts the top surface of the turntable, and then the free end is embedded in the limiting groove.

[0009] Furthermore, the vibration suppression component has a free end facing the turntable, which is telescopic in a direction parallel to the rotation axis; the turntable system also includes a transmission element connected to the edge of the turntable; when the turntable is pre-controlled to stop rotating, the free end moves toward the turntable until it contacts the transmission element, and the free end applies pressure to the transmission element to suppress turntable vibration through the transmission element.

[0010] Furthermore, both the vibration suppression components and the transmission components are non-elastic parts, and the transmission components are elastically connected to the turntable.

[0011] Furthermore, the jitter suppression component includes a drive unit and a connector. One end of the connector is connected to the drive unit, and the other end of the connector serves as a free end. The drive unit is used to drive the connector to move in a direction parallel to the rotation axis.

[0012] Furthermore, the drive unit is a linear motor or a threaded pair.

[0013] Furthermore, the connecting component is a ball-head plunger.

[0014] Furthermore, the connector is a non-elastic component, and the connector is elastically connected to the drive unit.

[0015] Furthermore, the turntable system also includes a force measuring component, which is connected to the jitter suppression component. The force measuring component is used to measure the magnitude of the force applied to the turntable by the jitter suppression component.

[0016] Another aspect of the present invention provides a control method for a turntable system, which is used to control the turntable system described above. The turntable system includes a turntable and a jitter suppression component. The control method for the turntable system includes: when the turntable is pre-controlled to stop rotating, applying a force parallel to the rotation axis to the turntable using the jitter suppression component to suppress turntable jitter.

[0017] Furthermore, when controlling the rotation of the turntable, the turntable is energized and rotates, and the force exerted on the turntable by the vibration suppression component is zero.

[0018] Furthermore, the vibration suppression component is spaced apart from the top surface of the turntable, and the vibration suppression component includes an electromagnet; when the turntable is controlled to rotate, the coil of the electromagnet is de-energized; when the turntable is pre-controlled to stop rotating, the turntable is de-energized and the coil of the electromagnet is energized, and the electromagnet generates a magnetic attraction force on the top surface of the turntable to suppress the vibration of the turntable.

[0019] Furthermore, when the pre-controlled turntable stops rotating, the turntable is powered off and the free end of the vibration suppression component moves toward the turntable until the free end contacts the turntable, and the free end applies a certain pressure to the top surface of the turntable to suppress the turntable vibration.

[0020] Compared with the prior art, the present invention can achieve the following beneficial effects: The present invention provides a turntable system in which, when the turntable stops rotating due to power failure, a jitter suppression component applies a force parallel to the rotation axis to one side of the top surface of the turntable to suppress turntable jitter. This not only solves the problem that the turntable cannot stop in time after power failure, but also the jitter suppression component has small space requirements, is easy to install and adjust, has a simple control method, and a relatively simple structure. It does not require complex control algorithms, and can greatly reduce the size, cost, and complexity of the jitter suppression component while ensuring high stability and positioning accuracy of the turntable. This is beneficial to improving the detection accuracy and efficiency of semiconductor optical inspection systems. Attached Figure Description

[0021] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments and descriptions of the invention are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings: Figure 1 A schematic diagram of the turntable system described in an embodiment of the present invention; Figure 2 Another structural schematic diagram of the turntable system described in the embodiment of the present invention; Figure 3 This is another structural schematic diagram of the turntable system described in an embodiment of the present invention. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not constitute a limitation thereof.

[0023] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other.

[0024] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0025] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0026] The invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0027] refer to Figures 1 to 3 The present invention provides a turntable system, comprising: a turntable 11, which is rotatable along a rotation axis perpendicular to the top surface of the turntable 11, the top surface of the turntable 11 being used to support a sample 20; and a vibration suppression component located on the side of the turntable 11 supporting the sample 20; wherein, when the turntable 11 is pre-controlled to stop rotating, the vibration suppression component applies a force parallel to the rotation axis to the turntable 11 to suppress vibration of the turntable 11.

[0028] In some examples, the sample can be an optical element, which can be a component in a semiconductor optical detection system used to form the detection optical path.

[0029] In some embodiments, the turntable 11 is mounted on the turntable servo control base 10, which is used to control the turntable 11 to rotate or stop rotating relative to the turntable servo control base 10 along the rotation axis.

[0030] In some embodiments, the turntable servo control base 10 and the jitter suppression component are both disposed on the same substrate 101.

[0031] In some embodiments, the jitter suppression component is disposed on the substrate 101 by a bracket 110, and the bracket 110 supports the jitter suppression component on the side of the turntable 11 used to carry the sample 20.

[0032] Furthermore, the vibration suppression component is spaced apart from the top surface of the turntable 11. The vibration suppression component includes an electromagnet. When the turntable 11 is pre-controlled to stop rotating, the coil of the electromagnet is energized, and the electromagnet generates a magnetic attraction force on the top surface of the turntable 11 to suppress vibration. By controlling the magnetic attraction force through energization and de-energization, vibration can be suppressed without contact between the vibration suppression component and the top surface of the turntable 11, ensuring frictionless control and thus avoiding the generation of particles due to friction. This results in a high level of cleanliness and is suitable for applications sensitive to particulate contamination, such as the semiconductor industry.

[0033] Furthermore, the vibration suppression component has a free end facing the top surface of the turntable 11, which is extendable and retractable in a direction parallel to the rotation axis. When the turntable 11 is pre-controlled to stop rotating, the free end moves toward the turntable 11 until it contacts the top surface of the turntable 11, applying a certain pressure to suppress vibration. This method mainly suppresses vibration through the friction between the free end and the top surface of the turntable 11. When the turntable 11 is powered off, due to the friction, the rotation angle of the turntable 11 changes only slightly, which helps the turntable 11 to reach stability in a shorter time.

[0034] Furthermore, the top surface of the turntable 11 has a limiting groove 116; when the turntable 11 is pre-controlled to stop rotating, the free end moves towards the turntable 11 until it contacts the top surface of the turntable 11, and then the free end is embedded in the limiting groove 116. In this way, the turntable 11 can be positioned more accurately, and the vibration suppression effect is better, and the repeatability is also higher.

[0035] In some embodiments, the limiting groove 116 can be a concave point, a groove, or a V-shaped groove.

[0036] Furthermore, the vibration suppression component has a free end facing the turntable 11, which is extendable in a direction parallel to the rotation axis. The turntable system also includes a transmission element 114 connected to the edge of the turntable 11. When the turntable 11 is pre-controlled to stop rotating, the free end moves toward the turntable 11 until it contacts the transmission element 114, applying pressure to the transmission element 114 to suppress vibration of the turntable 11. This design avoids occupying space on top of the turntable.

[0037] Furthermore, both the vibration suppression component and the transmission component 114 are non-elastic parts, while the transmission component 114 is elastically connected to the turntable 11. This elastic connection can mitigate the impact of sudden interference forces when the turntable 11 disengages from or contacts the transmission component 114, which helps reduce damage to the vibration suppression component and extends the service life of the turntable system.

[0038] Furthermore, the vibration suppression component includes a drive unit and a connector. One end of the connector is connected to the drive unit, and the other end of the connector serves as a free end. The drive unit is used to drive the connector to move in a direction parallel to the rotation axis. Thus, when the turntable 11 is rotating normally, the drive unit can control the connector to be in a non-contact state with the turntable 11, avoiding interference with the rotation of the turntable 11. When the turntable 11 is powered off and stops rotating, the drive unit controls the connector to move towards the turntable 11, so that the end of the connector away from the drive unit contacts the turntable 11, thereby suppressing the vibration of the turntable 11 and allowing the turntable 11 to stop as quickly as possible.

[0039] In some embodiments, along the extension direction of the rotation axis, the drive unit and the connector are offset from each other, the connector faces the top surface of the turntable 11, and the drive unit is offset from the top surface of the turntable 11. In this case, the drive unit and the connector can be connected by the connector 112.

[0040] In some embodiments, the drive unit is a linear motor 111. The linear motor 111 is suitable for situations where the structural space is compact and the external interference force on the turntable 11 is small. The pressure provided by the linear motor 111 generates frictional force, which suppresses the vibration of the turntable 11. It has a simple structure and low implementation cost.

[0041] In some embodiments, the drive unit may also be a threaded pair 115. The threaded pair 115 is suitable for situations where the external interference force on the turntable 11 is large. Using the threaded pair 115 as the drive unit results in a simpler structure, requires less space, and has a lower cost.

[0042] Furthermore, the connecting component is a ball-head plunger 113. The ball-head plunger 113 has a certain degree of elasticity, and one end of the ball-head plunger 113 is spherical. Using the ball-head plunger 113 as a connecting component allows the spherical end of the ball-head plunger 113 to contact the top surface of the turntable 11, reducing the contact area with the top surface of the turntable 11, which helps to reduce the generation of particles. In addition, the elasticity of the ball-head plunger 113 can also prevent damage to the vibration suppression component and the turntable 11 during the vibration suppression process, extending the service life of the turntable system. Moreover, the ball-head plunger 113 is easy to replace and convenient for maintenance.

[0043] Furthermore, the connector is a non-elastic component, while the connector is elastically connected to the drive unit. This elastic connection mitigates the impact of sudden interference forces generated when the turntable 11 disengages from or contacts the connector, thus reducing damage to the vibration suppression components and extending the service life of the turntable system.

[0044] Furthermore, the turntable system also includes a force measuring component, which is connected to the jitter suppression component. The force measuring component is used to measure the magnitude of the force exerted by the jitter suppression component on the turntable 11. The force measuring component monitors the force on the jitter suppression component, providing accurate feedback on the force magnitude, thereby enabling precise control of the pressure and friction, reducing structural deformation, and extending the service life of the turntable system.

[0045] In some embodiments, the drive unit can be a linear motor with force measurement function. Using a linear motor with force measurement function can achieve both force control and force measurement.

[0046] The turntable system provided by this invention uses a jitter suppression component to improve the servo control accuracy of the turntable 11. By controlling or adjusting the force exerted by the jitter suppression component on the turntable 11, the jitter of the turntable 11 can be suppressed without affecting its normal rotation. The force control can be achieved using a linear motor 111 or a precision threaded pair 115. The system has a simple structure, low cost, and small footprint, which helps to reduce the cost of semiconductor optical inspection systems and improve their detection accuracy and efficiency.

[0047] Another aspect of this invention provides a control method for a turntable system, used to control the aforementioned turntable system, which includes a turntable 11 and a jitter suppression component. The control method includes: when pre-controlling the turntable 11 to stop rotating, applying a force parallel to the rotation axis to the turntable 11 using the jitter suppression component to suppress the jitter of the turntable 11. Here, pre-controlling the turntable 11 to stop rotating refers to the turntable servo control base 10 controlling the turntable 11 to stop rotating, typically by disconnecting the power supply to the turntable 11.

[0048] Furthermore, when the turntable 11 is controlled to rotate, the turntable 11 is energized and rotates, and the force exerted by the vibration suppression component on the turntable 11 is zero.

[0049] Furthermore, the jitter suppression component is spaced apart from the top surface of the turntable 11. The jitter suppression component includes an electromagnet. When the turntable 11 is controlled to rotate, the coil of the electromagnet is de-energized. When the turntable 11 is pre-controlled to stop rotating, the turntable 11 is de-energized and the coil of the electromagnet is energized. The electromagnet generates a magnetic attraction force on the top surface of the turntable 11 to suppress the jitter of the turntable 11.

[0050] Furthermore, when the pre-controlled turntable 11 stops rotating, the turntable 11 is de-energized and the free end of the vibration suppression component moves toward the turntable 11 until the free end contacts the turntable 11, and the free end applies a certain pressure to the top surface of the turntable 11 to suppress the vibration of the turntable 11.

[0051] It should be understood that the various forms of processes shown above can be used to reorder, add, or delete steps. For example, the steps described in this invention disclosure can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution disclosed in this invention can be achieved, and this is not limited herein.

[0052] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A turntable system, characterized in that, include: A turntable, which is rotatable along a rotation axis perpendicular to the top surface of the turntable, and the top surface of the turntable is used to support the sample; A vibration suppression component is located on the side of the turntable that carries the sample; When the turntable is pre-controlled to stop rotating, the vibration suppression component applies a force parallel to the rotation axis to the turntable to suppress the turntable vibration.

2. The turntable system according to claim 1, characterized in that, The jitter suppression component is spaced apart from the top surface of the turntable, and the jitter suppression component includes an electromagnet; When the turntable is pre-controlled to stop rotating, the coil of the electromagnet is energized, and the electromagnet generates a magnetic attraction force on the top surface of the turntable to suppress the turntable vibration.

3. The turntable system according to claim 1, characterized in that, The jitter suppression component has a free end facing the top surface of the turntable, and the free end is extendable and retractable in a direction parallel to the rotation axis; When the turntable is pre-controlled to stop rotating, the free end moves toward the turntable until it contacts the top surface of the turntable. The free end applies a certain pressure to the top surface of the turntable to suppress the turntable vibration.

4. The turntable system according to claim 3, characterized in that, The top surface of the turntable has a limiting groove; When the turntable is pre-controlled to stop rotating, the free end moves toward the turntable until it contacts the top surface of the turntable, and then the free end is embedded in the limiting groove.

5. The turntable system according to claim 1, characterized in that, The jitter suppression component has a free end facing the turntable, and the free end is extendable and retractable in a direction parallel to the rotation axis; The turntable system also includes a transmission component connected to the edge of the turntable; When the turntable is pre-controlled to stop rotating, the free end moves toward the turntable until it contacts the transmission component. The free end applies pressure to the transmission component to suppress the turntable vibration through the transmission component.

6. The turntable system according to claim 5, characterized in that, Both the vibration suppression component and the transmission component are non-elastic parts, and the transmission component is elastically connected to the turntable.

7. The turntable system according to claim 3 or 5, characterized in that, The jitter suppression component includes a driving part and a connecting member. One end of the connecting member is connected to the driving part, and the other end of the connecting member serves as the free end. The driving part is used to drive the connecting member to move in a direction parallel to the rotation axis.

8. The turntable system according to claim 7, characterized in that, The drive unit is a linear motor or a threaded pair.

9. The turntable system according to claim 7, characterized in that, The connector is a ball-head plunger.

10. The turntable system according to claim 7, characterized in that, The connector is a non-elastic component, and the connector is elastically connected to the drive unit.

11. The turntable system according to claim 1, characterized in that, The turntable system also includes a force measuring component, which is connected to the jitter suppression component and is used to measure the magnitude of the force applied by the jitter suppression component to the turntable.

12. A control method for a turntable system, characterized in that, A method for controlling a turntable system according to any one of claims 1 to 11, the turntable system comprising a turntable and a jitter suppression component, the method for controlling the turntable system comprising: When the turntable is pre-controlled to stop rotating, the vibration suppression component applies a force parallel to the rotation axis to the turntable to suppress turntable vibration.

13. The control method for the turntable system according to claim 12, characterized in that, When the turntable is controlled to rotate, the turntable is energized and rotates, and the force applied to the turntable by the jitter suppression component is zero.

14. The control method for the turntable system according to claim 13, characterized in that, The jitter suppression component is spaced apart from the top surface of the turntable, and the jitter suppression component includes an electromagnet; When the turntable is rotated, the coil of the electromagnet is de-energized; When the turntable is pre-controlled to stop rotating, the turntable is de-energized and the coil of the electromagnet is energized. The electromagnet generates a magnetic attraction force on the top surface of the turntable to suppress the turntable vibration.

15. The control method for the turntable system according to claim 13, characterized in that, When the turntable is pre-controlled to stop rotating, the turntable is de-energized and the free end of the vibration suppression component moves toward the turntable until the free end contacts the turntable, and the free end applies a certain pressure to the top surface of the turntable to suppress the vibration of the turntable.

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