Vacuum valve device and system comprising vacuum pump and vacuum valve device

Abstract

The invention relates to a vacuum valve device, the valve housing of which is provided with a gas inlet and a gas outlet which are connected by means of a communication channel which can be selectively sealed in a gas-tight manner by means of a valve element which is movably arranged and which cooperates with a valve seat in a closed position, at least one gas pressure sensor integrated in the valve device being provided, the gas pressure sensor is used for measuring the gas pressure of the corresponding communication channel section. The invention also relates to a system comprising a vacuum pump and such a vacuum valve arrangement. The invention further relates to a system comprising at least such a vacuum valve device and a vacuum pump.

Description

Technical Field

[0001] This invention relates to a vacuum valve device that can be installed in a vacuum system. Background Technology

[0002] In scientific research and many industrial processes, such as coating technology and / or semiconductor technology, certain processing or technological steps need to be completed in a vacuum environment, especially high vacuum or ultra-high vacuum. Vacuum systems configured for this purpose typically contain one or more chambers, which can be evacuated by a vacuum pump to complete the corresponding processing or technological steps. Depending on the application and vacuum quality requirements, vacuum pumps with specific performance characteristics are used. Vacuum systems also include valve devices to isolate the various components of the vacuum system from each other and / or from the external environment.

[0003] To control such vacuum systems, sensors are typically required to measure pressure at appropriate locations within the system. The data from these sensors can be processed by a control unit and used to control at least one vacuum pump and / or valve assembly. Summary of the Invention

[0004] The purpose of this invention is to provide a vacuum valve device that can realize the monitoring and control of a vacuum system in an economical and efficient manner.

[0005] This technical problem is solved by a vacuum valve device having the features described in claim 1.

[0006] According to the present invention, the vacuum valve device includes a valve housing having a gas inlet and a gas outlet. The gas inlet and the gas outlet are interconnected via a communication channel, which can be selectively gas-tightened by a valve core that is movably disposed and engages with a valve seat in a closed position. Furthermore, at least one gas pressure sensor integrated within the valve device is provided for measuring the gas pressure within its corresponding communication channel section.

[0007] The gas inlet and gas outlet can be connected to other components of the vacuum system, such as the gas outlet and / or vacuum piping of the chamber and / or vacuum pump. The gas pressure sensor can measure the pressure within the connecting passage when the valve is open. When the valve is closed, the valve core and valve seat form a sealed fit, and the pressure within the corresponding connecting passage section can be measured using the gas pressure sensor.

[0008] By integrating a gas pressure sensor into a vacuum valve assembly, a compact component has been created that can directly measure the gas pressure at the center of a vacuum system. Installing this vacuum valve assembly simultaneously integrates two functions (shutdown and monitoring sensing), significantly reducing installation costs and time. Furthermore, it eliminates the need for special piping sections with corresponding adapters to integrate the pressure sensor into the vacuum system. Integrating pressure sensors into vacuum pumps not only significantly increases costs but also makes maintenance and / or repairs time-consuming and labor-intensive.

[0009] Other embodiments of the present invention are detailed in the claims, description and drawings.

[0010] According to one embodiment, the gas pressure sensor is disposed in a pressure measuring chamber formed within the valve housing, and the measuring chamber is in fluid communication with a connecting channel. The size of the chamber can be adjusted according to actual needs to accommodate pressure sensors of different specifications.

[0011] The pressure measuring chamber can be connected to the connecting channel via a pressure measuring channel, wherein the opening cross-section of the pressure measuring channel is smaller than that of the pressure measuring chamber. This design is based on the consideration that a smaller opening cross-section is sufficient to achieve pressure balance between the measuring chamber and the connecting channel. However, in principle, the pressure measuring channel can also use an opening cross-section of the same size or even a larger one.

[0012] A cover element can be provided to airtightly isolate the pressure measuring chamber from the external environment. The cover element can be at least partially accommodated in a groove on the outer surface of the valve housing, from which the pressure measuring chamber extends into the valve housing. The groove at least partially compensates for the thickness of the cover element, thereby making the vacuum valve assembly as compact as possible. This also helps simplify the installation process.

[0013] According to one embodiment, a gas pressure sensor is mounted on a circuit board constituting a cover plate element. A connection device for electronic connection of the sensor may be provided on the side of the circuit board facing away from the gas sensor. This circuit board also functions as a vacuum-sealed feedthrough, both sealing the measurement chamber hermetically and outputting data from the gas pressure sensor.

[0014] According to another embodiment, the valve core is configured to move linearly. Its direction of movement can be perpendicular to the longitudinal extension direction of the pressure measuring chamber and / or the extension direction of at least one connecting passage segment.

[0015] According to a low-cost embodiment of the vacuum valve device, the pressure measuring chamber and / or pressure measuring channel are drilled holes. Alternatively, the connecting channel may also be at least partially formed by at least one drilled hole.

[0016] The vacuum valve device may include an actuation unit that moves the valve core to open and / or close the communication channel. In a particularly compact design, the actuation unit and a gas pressure sensor can be controlled and connected simultaneously using the same cable.

[0017] According to another embodiment, the vacuum valve device, in addition to the gas pressure sensor, also includes at least one second gas pressure sensor integrated within the valve device. The gas pressure sensor described above can be configured to measure the first gas pressure in the communication channel between the gas inlet and the valve seat. The second gas pressure sensor is configured to measure the second gas pressure in the communication channel between the gas outlet and the valve seat. Thus, even when the valve device is closed or shut off, the pressure at the inlet and outlet sections of the communication channel can be measured. Furthermore, this embodiment can also monitor the flow rate of the vacuum valve device.

[0018] The preceding descriptions of the gas pressure sensor and its associated components, namely the "pressure measurement chamber," "pressure measurement channel," and "cover element," also apply to the second gas pressure sensor. The second gas pressure sensor can be disposed within a second pressure measurement chamber, which is connected to a connecting channel via a second pressure measurement channel. The cross-sectional area of ​​the opening of the second pressure measurement channel can be smaller than that of the second pressure measurement chamber. The second pressure measurement chamber can also be isolated from the external environment by a cover element. This cover element can be independent of the cover element of the first pressure measurement chamber. Preferably, a common cover element can be provided, which seals both the first and second pressure measurement chambers. In particular, this cover element can be a circuit board housing both the first and second gas pressure sensors. While each gas pressure sensor could theoretically have its own connection device, a scheme using a common connection device for both gas pressure sensors is more cost-effective and compact.

[0019] The present invention also relates to a system comprising at least one vacuum pump and at least one independent, detachably mounted to or connected to the vacuum pump according to any of the foregoing embodiments. A particularly compact design can be achieved when the valve assembly is directly connected to the vacuum pump. However, in most applications, it is equally advantageous to arrange the valve assembly spaced apart from the pump and to form a fluid connection between the two components.

[0020] Especially when the vacuum pump is a high-vacuum pump (e.g., a turbomolecular pump), it may be unable to withstand the exhaust gas pressure of the environment. In this case, a backing vacuum pump is usually required, the function of which is to establish a pre-depressurization environment at the outlet of the high-vacuum pump so that the high-vacuum pump can operate.

[0021] The valve device described in this invention has a dual function: in addition to its basic shut-off function, it can also be used for system monitoring—namely, by measuring the inlet-side pressure, i.e., the fore-vacuum pressure. When this pressure deviates from the expected value (e.g., excessive pressure), the valve device can be shut off to protect the high-vacuum pump. In this scenario, an implementation of the vacuum valve device with two gas pressure sensors is particularly advantageous because, for example, when the valve device is closed, it is possible to determine whether the pressure difference across the valve core in the closed position has decreased to a level sufficient to safely open the valve device.

[0022] Preferably, the drive mechanism for the gas pressure sensor and / or (if provided) vacuum valve device is connected to the system's control unit. The control unit may be a control unit of the vacuum pump or integrated within a control unit. Alternatively, the control unit may be a higher-level control unit or integrated into such a control unit for controlling the vacuum system. Such vacuum systems can be very complex, containing multiple chambers, pumps, and numerous valve lines; these components are preferably centrally controlled. Attached Figure Description

[0023] The present invention will now be described by way of example with reference to preferred embodiments. These embodiments demonstrate: Figure 1a and Figure 1b An example of a vacuum system according to the present invention is shown respectively; Figure 2 A cross-sectional view of the vacuum valve assembly is shown. Figure 3a and Figure 3b A perspective view showing one embodiment of a vacuum valve device; Figures 4a to 4c According to Figure 3a and Figure 3b Cross-sectional view and side view of the embodiment shown. Detailed Implementation

[0024] Figure 1 shows a vacuum system 10, which includes a chamber 12, a high vacuum pump 14 (e.g., a turbomolecular pump), and a backing vacuum pump 16 of any type. A valve device 18 (hereinafter referred to as the valve) is provided between pumps 14 and 16 to isolate pumps 14 and 16 when necessary. The valve 18 is located in a conduit 20 connecting pumps 14 and 16. The high vacuum pump 14 is connected to the chamber 12 via conduit 20a.

[0025] exist Figure 1a In this configuration, valve 18 is a component separate from pumps 14 and 16. The valve is connected to a control device (not shown), which can be further connected to other components (not shown), such as various sensors and / or other valves, pumps, or chambers.

[0026] Figure 1b Vacuum system 10' is shown. In this embodiment, valve 18 is directly located in the outlet area of ​​the high vacuum pump and is detachably mounted, thereby achieving a particularly compact structural design.

[0027] It should be noted that the above-described vacuum systems 10 and 10' are merely examples of systems configured with at least one vacuum pump and a valve according to the present invention.

[0028] Figure 2 A cross-sectional view of valve 18 is shown. Valve 18 includes a valve housing 22 having an inlet 24 and an outlet 26. The inlet 24 and outlet 26 extend into the interior of the valve housing 22 through boreholes 28 and 30, respectively. The boreholes 28 and 30 are arranged parallel to each other and offset from one another.

[0029] The borehole 28 is connected to the borehole 32 arranged perpendicularly thereto, and the end of the borehole 32 away from the borehole 28 forms a valve seat 34.

[0030] As shown in the figure, when valve 18 is in the closed state, valve core 38 is pressed against the valve seat by spring 36, thereby blocking the fluid passage between inlet 24 and outlet 26. To open valve 18, an actuating device 39, not shown in detail but well-known in the art, is operated to move valve core 38 upward against the force of spring 36. This actuating device 39 can be driven, for example, by pneumatic, electric, or electromagnetic means (e.g., selectively energized coils).

[0031] Figure 3a and Figure 3b A perspective view of valve 18 is shown, which is equipped with two pressure measuring chambers 40 and 42, communicating with boreholes 28 and 30 respectively. Gas pressure sensors 44 and 46 are installed within pressure measuring chambers 40 and 42, and these sensors are mounted on a common cover element 48. This cover element enables the pressure measuring chambers to be both airtightly isolated from the external environment and airtightly connected to each other.

[0032] In this embodiment, the cover element 48 is configured as an airtight circuit board, and its outer surface is provided with a connecting element 50 for connecting to sensors 44 and 46. This connecting element may include a socket device for securing cables to transmit data from sensors 44 and 46 to a control device. The control device (not shown) may also be configured to operate the drive device 39 and / or control other components of the vacuum system.

[0033] Figure 4a and Figure 4c The diagram shows cross-sectional views of valve 18 (i.e., sections BB and CC), the positions of which are indicated in the side view of valve 18 (see [reference]). Figure 4b ).

[0034] Figure 4aA cross-section of the pressure measuring chamber 40 is shown. This chamber is connected to a borehole 28 via a pressure measuring channel 52. The pressure measuring channel 52 is also a borehole, but its diameter is significantly smaller than that of the chamber 40. Therefore, the sensor 44 can measure the pressure within the borehole 28. As previously described, the sensor 44 is mounted on a circuit board 48, which provides airtight isolation between the pressure measuring chamber 40 and the external space. The circuit board 48 is partially accommodated within a recess 54. Figure 3a This can also be observed in the middle. A seal 56 is provided between the circuit board 48 and the groove.

[0035] Figure 4c A cross-sectional view of the pressure measuring chamber 42 is shown, in which a sensor 46, disposed on a common circuit board 48, extends into the chamber. The pressure measuring chamber 42 is connected to the borehole 30 via a pressure measuring channel 58. The pressure measuring channel 58 is inclined because the borehole 30 and borehole 28 are arranged parallel to each other and offset from each other. In this embodiment, the channel is also a borehole.

[0036] like Figure 3a , 3b As shown in 4a and 4c, the two cavities 40 and 42 are arranged parallel to each other and at the same height within the valve housing 22. These cavities extend perpendicular to both boreholes 28 and 30 and borehole 32.

[0037] The valve 18 described above can be easily formed by machining several holes in a single workpiece, thereby achieving a structure that combines high rigidity and compactness. It should be noted that the valve body 22 can also be composed of multiple parts.

[0038] Explanation of reference numerals in the attached figures 10, 10' Vacuum System 12 chambers 14 High Vacuum Pump 16. Backing vacuum pump 18 valves 20, 20a piping 22 valve housing 24 Entrances 26 Exports Drilling holes at 28, 30, and 32. 34 Valve seat 36 Springs 38 Valve Core 39. Drive unit Pressure measuring chambers 40 and 42 44, 46 Gas pressure sensors 48 Cover plate components / circuit boards 50 Connecting elements Pressure measurement channels 52 and 58 54 Grooves 56 Seals

Claims

1. A vacuum valve device, comprising a valve housing (22), the valve housing having a gas inlet (24) and a gas outlet (26) connected by a communication channel, the communication channel being selectively gas-tightened by a valve core (38) movably disposed and cooperating with a valve seat (34) in a closed position, wherein at least one gas pressure sensor (44, 46) integrated in the valve device is provided for measuring the gas pressure in the corresponding communication channel section (28, 30).

2. The vacuum valve device according to claim 1, characterized in that, The gas pressure sensors (44, 46) are disposed in the pressure measuring chambers (40, 42) formed within the valve housing (22), and the pressure measuring chambers are in fluid communication with the connecting channel.

3. The vacuum valve device according to claim 2, characterized in that, The pressure measuring chambers (40, 42) are connected to the communicating channel via pressure measuring channels (52, 58), wherein the opening cross-section of the pressure measuring channels (52, 58) is smaller than that of the pressure measuring chambers (40, 42).

4. The vacuum valve device according to claim 2 or 3, characterized in that, A cover element (48) is provided to airtightly isolate the pressure measuring chamber (40, 42) from the external environment.

5. The vacuum valve device according to claim 4, characterized in that, The outer surface of the valve housing (22) is provided with a groove (54), the pressure measuring chamber (40, 42) extends from the groove into the interior of the valve housing (22), and the groove at least partially accommodates the cover element (48).

6. The vacuum valve device according to claim 4 or 5, characterized in that, The gas pressure sensors (44, 46) are mounted on the circuit board constituting the cover element (48).

7. The vacuum valve device according to claim 6, characterized in that, A connecting element (50) is provided for electronic connection of the gas pressure sensor (44, 46), the connecting device being disposed on the side of the circuit board (48) facing away from the gas sensor.

8. The vacuum valve device according to any one of the preceding claims, characterized in that, The valve core (38) is configured to be linearly movable, in particular, the direction of movement of the valve core (38) is perpendicular to the longitudinal extension direction of the pressure measuring chamber (40, 42) and / or the extension direction of at least one segment (28, 30) of the communicating channel.

9. The vacuum valve device according to any one of the preceding claims, characterized in that, The pressure measuring chambers (40, 42) and / or the pressure measuring channels (52, 58) are drilled holes, and / or the connecting channels are at least partially formed by at least one drilled hole (28, 30, 32).

10. The vacuum valve device according to any one of the preceding claims, characterized in that, A drive device (39) is provided for driving the valve core (38) to move in order to open and / or close the communication channel.

11. The vacuum valve device according to any one of the preceding claims, characterized in that, In addition to the gas pressure sensor (44), at least one second gas pressure sensor (46) is integrated into the valve device. The gas pressure sensor (44) is configured to measure the first gas pressure in the communication channel between the gas inlet (24) and the valve seat (34), and the second gas pressure sensor (46) is configured to measure the second gas pressure in the communication channel between the gas outlet (26) and the valve seat (34).

12. A system comprising at least one vacuum pump (14, 16), particularly a high vacuum pump, and at least one independent vacuum valve device detachably mounted on or connected to the vacuum pump (14, 16) according to any one of the preceding claims, wherein the gas inlet (24) of the vacuum valve device is connected to the gas outlet (26) of the vacuum pump (14, 16).

13. The system according to claim 12, characterized in that, The gas pressure sensor (44, 46) of the vacuum valve device and / or the drive device (39) as provided are connected to the control device of the system.

14. The system according to claim 13, characterized in that, The control device is a control unit of the vacuum pump (14, 16), or integrated into the control unit; or, the control device is a control unit for controlling a vacuum system containing other components, or integrated into the control unit.

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