Angle measuring device for polygon mirror

Abstract

The invention relates to the technical field of semiconductor production, in particular to a polygon mirror angle measuring device which comprises a goniometer unit, a first limiting unit and a second limiting unit, the goniometer unit comprises a goniometer, a lifting table, a rotary table and an objective table, the goniometer is installed at the top end of the lifting table, and the rotary table is installed on the lifting table; the lifting table is used for driving the goniometer to ascend and descend, the objective table is installed at the top end of the rotary table, the rotary table is used for driving the objective table to rotate, and the first limiting unit and the second limiting unit are both used for being installed on the objective table so that a polygon mirror can be fixed to the objective table. And the goniometer is used for measuring angles between the mirror surfaces on the polygon mirror. The objective of the invention is to provide a polygon mirror angle measuring device for at least one technical problem in the background technology.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and more specifically, to a multi-faceted mirror angle measuring device. Background Art

[0002] Multifaceted mirrors are used in reference devices as a benchmark for the offline and online installation and debugging of interferometers, leveling and focusing sensors in semiconductor exposure equipment. Therefore, the accuracy of the multifaceted mirror itself must be guaranteed first. Currently, existing angle measuring devices are insufficient for locating the multifaceted mirror and measuring its multi-angle data. Summary of the Invention

[0003] The purpose of this application is to provide a multi-faceted mirror angle measuring device to address at least one of the technical problems addressed in the background art.

[0004] To achieve the above objectives, this application adopts the following technical solution: This application provides a multi-faceted mirror angle measuring device, including a goniometer unit, a first limiting unit, and a second limiting unit. The goniometer unit includes a goniometer, a lifting platform, a turntable, and a platform. The goniometer is mounted on the top of the lifting platform, which is used to drive the goniometer to move up and down. The platform is mounted on the top of the turntable, which is used to drive the platform to rotate. The first limiting unit and the second limiting unit are both mounted on the platform to fix the multi-faceted mirror to the platform. The goniometer is used to measure the angles between the mirror surfaces on the multi-faceted mirror.

[0005] Optionally, the first limiting unit includes a base plate and three baffles, and the second limiting unit includes a first limiting component and two second limiting components. The first limiting component, each of the second limiting components and each of the baffles are detachably mounted on the same surface of the base plate, and the base plate is detachably mounted on the platform. Each of the second limiting components is disposed on one side edge of the base plate in the first direction, and the second limiting components are arranged in the second direction. Two baffles are disposed on the other side edge of the base plate in the first direction, and the two baffles are arranged in the second direction. The first limiting component is disposed on one side edge of the base plate in the second direction, and a third baffle is disposed on the other side edge of the base plate in the second direction. The first limiting component and the third baffle are not on the same straight line parallel to the second direction. The first limiting component, each of the second limiting components, and each of the baffles are all used to make pressure contact with the multifaceted mirror. The first direction is the width direction of the base plate, and the second direction is the length direction of the base plate. The first limiting component and the third baffle are used to make pressure contact with the two end faces of the square mirror in the length direction in a one-to-one correspondence.

[0006] The beneficial effects of this technical solution are as follows: A region for placing a multifaceted mirror is formed between the first limiting component, each of the second limiting components, and each baffle on the base plate. The multifaceted mirror is placed on the base plate with its length direction parallel to the second direction. The two end faces of the square mirror in its length direction are in pressure contact with the first limiting component and the third baffle, respectively. One of the two sides of the square mirror in the first direction is in pressure contact with the two baffles, and the other is in pressure contact with the second limiting component, thus limiting the multifaceted mirror. Rotating the stage allows for the measurement of the angles between different faces of the multifaceted mirror. Since the two 45° mirrors installed on the two end faces of the square mirror in its length direction are not on the same straight line, the first limiting component and the third baffle are not on the same straight line parallel to the second direction. This allows the first limiting component and the third baffle to avoid the corresponding 45° mirrors and make pressure contact with the corresponding end faces of the square mirror.

[0007] Optionally, the first limiting component includes a pressure plate and a first ball plunger. The pressure plate is configured perpendicular to the base plate and has a first threaded hole. The first ball plunger is threadedly engaged with the first threaded hole so that the axial direction of the first ball plunger is parallel to the second direction. The first ball plunger is used to make pressure contact with the multifaceted mirror.

[0008] The beneficial effects of this technical solution are as follows: After placing multiple mirrors on the base plate, the first ball-head plunger can be rotated to adjust its relative position in the second direction, so that the first ball-head plunger gradually presses against the end face of the square mirror, and the first ball-head plunger and the third baffle together limit the position of the multiple mirrors in the second direction; when the multiple mirrors need to be disassembled, it is only necessary to rotate the first ball-head plunger in the opposite direction to release the pressure exerted by the first ball-head plunger on the end face of the square mirror.

[0009] Optionally, the second limiting component includes an L-shaped plate, a second ball plunger, and a third ball plunger. The L-shaped plate includes a first plate portion and a second plate portion arranged perpendicularly to each other. The first plate portion is arranged perpendicular to the base plate, and the second plate portion is fixed to the top end of the first plate portion and is arranged parallel to the base plate. A second threaded hole is formed on the first plate portion, and a third threaded hole is formed on the second plate portion. The second ball plunger is threadedly connected to the second threaded hole so that the axial direction of the second ball plunger is parallel to the first direction. The third ball plunger is threadedly connected to the third threaded hole so that the third ball plunger is arranged perpendicular to the base plate.

[0010] The beneficial effects of this technical solution are as follows: After placing multiple mirrors on the base plate, rotating the second ball-head plunger can adjust its position in the first direction, thereby gradually squeezing the square mirrors in the first direction to achieve the purpose of limiting the position of the multiple mirrors in the first direction through the second ball-head plunger and the baffle; rotating the third ball-head plunger can adjust its position in the direction perpendicular to the base plate, and by gradually squeezing the square mirrors through the third ball-head plunger, the purpose of limiting the position of the multiple mirrors in the direction perpendicular to the base plate can be achieved.

[0011] Optionally, the base plate includes a plate body and a plurality of protrusions formed on the plate body. The first limiting component, each of the second limiting components and each of the baffles are detachably installed on the plate body. Each of the protrusions is distributed between the first limiting component, each of the second limiting components and each of the baffles. The top surface of each protrusion is a plane parallel to the plate surface of the plate body, and the top edge of each protrusion is chamfered.

[0012] The beneficial effects of this technical solution are as follows: the purpose of setting the boss is to reduce the installation area of ​​the multifaceted mirror, and the chamfering of the top edge of the boss can reduce the probability of damaging the multifaceted mirror.

[0013] Optionally, the first limiting unit further includes a counterweight block, which is used to be installed on the platform, and the counterweight block and the base plate are arranged in the second direction.

[0014] The beneficial effect of this technical solution is that if it is found during assembly that the overall center of gravity deviates far from the central axis of the adapter plate after the multifaceted mirror, the first limiting unit and the second limiting unit are installed, a counterweight can be installed at an appropriate position on the adapter plate to bring the overall center of gravity closer to the axis of the adapter plate, ensuring that the position of the multifaceted mirror relative to the adapter plate remains stable when the turntable drives the adapter plate to rotate during the measurement process.

[0015] Optionally, the first limiting unit further includes an inclined support plate, the inclined support plate including a first connecting plate portion and an inclined support block portion mounted on the plate surface of the first connecting plate portion, the top surface of the inclined support block portion being inclined, the top surface of the inclined support block portion forming a 45° angle with the top surface of the base plate, and the bottom surface of the base plate being detachably connected to the top surface of the inclined support block portion.

[0016] The beneficial effect of this technical solution is that, by detachably mounting the base plate onto the inclined support plate, the C-plane 111 or D-plane 112 of the 45° mirror can be set perpendicular to the light emitted by the light tube of the goniometer.

[0017] Optionally, the first limiting unit includes a mounting plate, and the second limiting unit includes a shaped plate assembly and two side pressure plate assemblies. The mounting plate includes a second connecting plate portion and a connecting block fixed to the second connecting plate portion, the second connecting plate portion being detachably mounted to the platform. The irregular plate assembly and the two side pressure plate assemblies are both mounted on the connecting block to fix the multifaceted mirror that is perpendicular to the second connecting plate in the length direction.

[0018] The beneficial effect of this technical solution is that, in this way, the multifaceted mirror can be erected by the first limiting unit and the second limiting unit, so that the length direction of the multifaceted mirror is perpendicular to the base plate, and then the angle between the corresponding mirror surfaces can be measured.

[0019] Optionally, the connecting block includes a first portion extending upward in a third direction and a second portion extending in a fourth direction, the first portion and the second portion being perpendicularly connected to form an L-shape, the third direction being the width direction of the second connecting plate portion, and the fourth direction being the length direction of the second connecting plate portion. The irregular plate assembly includes an irregular plate for fixing to the connecting block to form a receiving cavity between the irregular plate and the connecting block for accommodating a 45° mirror, and to make the end face of the square mirror on the corresponding side fit against the top surface of the connecting block.

[0020] The beneficial effect of this technical solution is that after the 45° mirror is inserted into the receiving cavity, the top surface of the connecting block can support the polygonal mirror by fitting with the end face of the square mirror, so that the polygonal mirror can be in a relatively stable upright state.

[0021] Optionally, the irregularly shaped plate includes a first limiting plate portion and a second limiting plate portion that are perpendicularly connected to each other. The first limiting plate portion is fixedly connected to the first block portion and is disposed opposite to the second block portion. The second limiting plate portion is fixedly connected to the second block portion and is disposed opposite to the first block portion, so that the height of the second limiting plate portion is greater than the height of the first limiting plate portion in the direction perpendicular to the second connecting plate portion. The irregular plate assembly also includes three fourth ball-head plungers. One fourth ball-head plunger is vertically installed on the first limiting plate portion, and two fourth ball-head plungers are installed on the second limiting plate portion. The two fourth ball-head plungers installed on the second limiting plate portion are arranged in a direction perpendicular to the second connecting plate portion.

[0022] The beneficial effects of this technical solution are as follows: Since the height of the second limiting plate is greater than that of the first limiting plate in the direction perpendicular to the second connecting plate, the bottom surface of the square mirror corresponding to the position of the second limiting plate can obtain a larger range of support and position limitation during measurement, thereby improving the stability of fixing the multifaceted mirror. Rotating the fourth ball plunger can adjust the position of the fourth ball plunger, thereby realizing the fixing or disassembly of the multifaceted mirror.

[0023] Optionally, the side pressure plate assembly includes a side pressure plate and a fifth ball-head plunger, the fifth ball-head plunger being vertically mounted on the side pressure plate, one side pressure plate being directly opposite the second limiting plate portion and detachably mounted on the first block portion, and another side pressure plate being directly opposite the first limiting plate portion and detachably mounted on the second block portion, the fifth ball-head plunger being located above the connecting block.

[0024] The beneficial effect of this technical solution is that the fourth ball-head plunger on the second limiting plate and the fifth ball-head plunger fixed on the side pressure plate of the first block cooperate to clamp the multifaceted mirror, and the fourth ball-head plunger on the first limiting plate and the fifth ball-head plunger fixed on the pressure plate of the second block cooperate to clamp the multifaceted mirror, thereby achieving the fixation of the multifaceted mirror.

[0025] The technical solution provided in this application can achieve at least one of the following beneficial effects: The multi-faceted mirror angle measuring device provided in this application, when in use, installs the multi-faceted mirror on the stage through the first limiting unit and the second limiting unit to achieve the positioning of the multi-faceted mirror. The position of the goniometer in the vertical direction is changed by raising and lowering the lifting platform. The multi-faceted mirror is rotated by the rotating platform driving the stage, thereby changing the mirror surface that the goniometer is facing, and realizing the measurement of the angle between different mirror surfaces.

[0026] The additional technical features and advantages of this application will become more apparent from the following description or from practical application. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the specific embodiments of this application, the accompanying drawings used in the description of the specific embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the front view structure of one embodiment of the multifaceted mirror provided in this application. Figure 2 A top view of one embodiment of the multifaceted mirror provided in this application. Figure 3 A three-dimensional structural schematic diagram of one embodiment of the multifaceted mirror provided in this application; Figure 4 A top view of one embodiment of the base plate provided in this application; Figure 5 A three-dimensional structural schematic diagram of one embodiment of the first limiting component provided in this application; Figure 6 A three-dimensional structural schematic diagram of one embodiment of the second limiting component provided in this application; Figure 7 A three-dimensional structural schematic diagram of one embodiment of the multi-faceted mirror angle measuring device provided in this application; Figure 8 for Figure 7 A magnified view of the local area at point α; Figure 9 for Figure 7 A three-dimensional structural diagram of one embodiment of the multi-mirror angle measuring device provided in the paper after installing the multi-mirror; Figure 10 for Figure 9 A magnified view of the area at β; Figure 11 A three-dimensional structural schematic diagram of another embodiment of the multi-faceted mirror angle measuring device provided in this application; Figure 12 for Figure 11 A three-dimensional structural diagram of one embodiment of the multi-mirror angle measuring device provided in the paper after installing the multi-mirror; Figure 13 for Figure 12 A magnified view of the area at γ; Figure 14 for Figure 11 A three-dimensional structural diagram of another implementation of the multi-faceted mirror angle measuring device provided in the paper, after mounting the multi-faceted mirror; Figure 15 for Figure 14 A magnified view of the area at δ; Figure 16 A three-dimensional structural schematic diagram of a third embodiment of the multi-faceted mirror angle measuring device provided in this application; Figure 17 for Figure 16 A three-dimensional structural diagram of one embodiment of the multi-mirror angle measuring device provided in the paper after installing the multi-mirror; Figure 18 for Figure 16 A three-dimensional structural diagram of another implementation of the multi-faceted mirror angle measuring device provided in the paper, after mounting the multi-faceted mirror; Figure 19 for Figure 16 A three-dimensional structural diagram of the third embodiment of the multi-faceted mirror angle measuring device provided in the paper after installing the multi-faceted mirror; Figure 20 for Figure 16 A three-dimensional structural diagram of the fourth embodiment of the multi-faceted mirror angle measuring device provided in the paper after installing the multi-faceted mirror; Figure 21 A three-dimensional structural schematic diagram of one embodiment of the inclined support plate provided in this application; Figure 22 A three-dimensional structural schematic diagram of a fourth embodiment of the multi-faceted mirror angle measuring device provided in this application; Figure 23 for Figure 22 A three-dimensional structural diagram of one embodiment of the multi-mirror angle measuring device provided in the paper after installing the multi-mirror; Figure 24 for Figure 22 A three-dimensional structural diagram of another implementation of the multi-faceted mirror angle measuring device provided in the paper, after mounting the multi-faceted mirror; Figure 25 for Figure 22 A three-dimensional structural diagram of the third embodiment of the multi-faceted mirror angle measuring device provided in the paper after installing the multi-faceted mirror; Figure 26 for Figure 22 A three-dimensional structural diagram of the fourth embodiment of the multi-faceted mirror angle measuring device provided in the paper after installing the multi-faceted mirror; Figure 27 A perspective view of a three-dimensional structural diagram of one embodiment of the mounting plate provided in this application; Figure 28 Another perspective view of the three-dimensional structure of an embodiment of the mounting plate provided in this application; Figure 29 A three-dimensional structural schematic diagram of a fifth embodiment of the multi-faceted mirror angle measuring device provided in this application; Figure 30 for Figure 29 A magnified view of the local area at ε; Figure 31 for Figure 29 A three-dimensional structural diagram of one embodiment of the multi-mirror angle measuring device provided in the paper after mounting the multi-mirror.

[0029] Figure label: 01. Baffle; 02. First limit component; 03. Second limit component; 04. Adapter plate; 05. Base plate; 06. Platform; 07. Turntable; 08. Lifting platform; 9. Angle measuring instrument; 10. Boss; 11. Plate body; 12. First ball-head plunger; 13. Pressure plate; 14. Third ball-head plunger; 15. L-shaped plate; 16. Second ball-head plunger; 17. Counterweight; 18. Inclined support plate; 19. Inclined support block; 20. First connecting plate; 21. Mounting plate; 22. Second part; 23. First section; 24. Second connecting plate section; 25. Connecting block; 26. Side pressure plate assembly; 27. Irregularly shaped plate assembly; 28. First limiting plate section; 29. Second limiting plate; 30. Irregularly shaped plate; 31. Fourth ball-head plunger; 32. Fifth ball-head plunger; 33. Side pressure plate; a1. First baffle interface; a2, Second baffle interface; a3, Third baffle interface; b1, fourth baffle interface; b2, fifth baffle interface; c1, First pressure plate interface; c2, Second pressure plate interface; c3, Third pressure plate interface; d1, First L-plate interface; d2, Second L-board interface; e1, First fixed interface; e2, second fixed interface; e3, third fixed interface; e4, fourth fixed interface; e5, fifth fixed interface; e6, the sixth fixed interface; f1, the seventh fixed interface; f2, the eighth fixed interface; f3, the ninth fixed interface; f4, tenth fixed interface; g1, first connection interface; g2, Second connection interface; 100, Multifaceted mirror; 110. 45° mirror; 111. C-plane; 112. Side D; 113. Side B; 114. Side E; 115. Bottom surface; 116. Surface A; 117. Non-reference surface; 118. Z-plane; 120. Square mirror. Detailed Implementation

[0030] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0031] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this application and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0032] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0033] like Figures 1 to 3As shown, the multifaceted mirror 100 is made of microcrystalline glass or quartz, and requires very high processing precision. It cannot be processed as a single piece and can only be formed by bonding one square mirror 120 and two 45° mirrors 110. The six faces of the square mirror 120 are perpendicular to each other. The bottom face 115 serves as the mounting surface for the mounting reference device. Faces A 116, Z 118, E 114, and B 113 are reference surfaces. The sixth face of the square mirror 120 is a non-reference surface 117. The 45° mirrors 110 are bonded to faces E 114 and B 113 of the square mirror 120. Faces C 111 and D 112 of the 45° mirrors 110 are reference surfaces. Face D 112 is far away from face A 116, and face C 111 is close to face A 116.

[0034] like Figures 4 to 31 As shown, this application provides a multi-faceted mirror angle measuring device, including a goniometer unit, a first limiting unit, and a second limiting unit. The goniometer unit includes a goniometer 09, a lifting platform 08, a turntable 07, and a platform 06. The goniometer 09 is mounted on the top of the lifting platform 08, and the lifting platform 08 is used to drive the goniometer 09 to rise and fall. The platform 06 is mounted on the top of the turntable 07, and the turntable 07 is used to drive the platform 06 to rotate. The first limiting unit and the second limiting unit are both used to be mounted on the platform 06 to fix the multi-faceted mirror 100 to the platform 06. The goniometer 09 is used to measure the angles between the mirror surfaces on the multi-faceted mirror 100.

[0035] Preferably, the stage 06 includes a transition plate 04, and a first limiting unit and a second limiting unit are used to be mounted on the transition plate 04. The transition plate 04 is preferably a circular plate.

[0036] The multi-faceted mirror angle measuring device provided in this application, when in use, uses the first limiting unit and the second limiting unit to install the multi-faceted mirror 100 on the stage 06 to achieve positioning of the multi-faceted mirror 100. The lifting platform 08 changes the position of the goniometer 09 in the vertical direction. The turntable 07 drives the stage 06 to rotate, thereby rotating the multi-faceted mirror 100 and changing the mirror surface that the goniometer 09 is facing, thus realizing the measurement of the angle between different mirror surfaces.

[0037] Optionally, the first limiting unit includes a base plate 05 and three baffles 01, and the second limiting unit includes a first limiting component 02 and two second limiting components 03. The first limiting component 02, each of the second limiting components 03 and each of the baffles 01 are detachably installed on the same surface of the base plate 05, and the base plate 05 is detachably installed on the platform 06. Each of the second limiting components 03 is disposed near one side edge of the base plate 05 in the first direction, and the second limiting components 03 are arranged in the second direction. Two baffles 01 are disposed near the other side edge of the base plate 05 in the first direction, and the two baffles 01 are arranged in the second direction. A first limiting component 02 is disposed near one side edge of the base plate 05 in the second direction, and a third baffle 01 is disposed near the other side edge of the base plate 05 in the second direction. The first limiting component 02 and the third baffle 01 are not on the same straight line parallel to the second direction. The first limiting component 02, each of the second limiting components 03 and each of the baffles 01 are all used to make pressure contact with the multifaceted mirror 100. The first direction is the width direction of the base plate 05 and the second direction is the length direction of the base plate 05. The first limiting component 02 and the third baffle 01 are used to make pressure contact with the two end faces of the square mirror 120 in the length direction in a one-to-one correspondence.

[0038] Thus, an area for placing the polygonal mirror 100 is formed on the base plate 05 between the first limiting component 02, each of the second limiting components 03, and each baffle 01. The polygonal mirror 100 is placed on the base plate 05 such that its length direction is parallel to the second direction. The two end faces of the square mirror 120 in its length direction are in pressure contact with the first limiting component 02 and the aforementioned third baffle 01, respectively. One of the two sides of the square mirror 120 in the first direction is in pressure contact with both baffles 01, and the other is in pressure contact with the second limiting component 03. The multifaceted mirror 100 is positioned to limit the movement of the multifaceted mirror 100. By rotating the stage 06, the angles between different faces of the multifaceted mirror 100 can be measured. Since the two 45° mirrors 110 installed on the two end faces of the square mirror 120 along its length are not on the same straight line, the first limiting component 02 and the third baffle 01 are not on the same straight line parallel to the second direction. This allows the first limiting component 02 and the third baffle 01 to avoid the corresponding 45° mirrors 110 and make pressure contact with the corresponding end faces of the square mirror 120.

[0039] like Figure 5As shown, optionally, the first limiting component 02 includes a pressure plate 13 and a first ball-head plunger 12. The pressure plate 13 is arranged perpendicular to the base plate 05, and a first threaded hole is formed on the pressure plate 13. The first ball-head plunger 12 is threadedly engaged with the first threaded hole so that the axial direction of the first ball-head plunger 12 is parallel to the second direction. The first ball-head plunger 12 is used to make pressure contact with the polygon mirror 100. In this way, after the polygon mirror 100 is placed on the base plate 05, the first ball-head plunger 12 can be rotated to adjust the relative position of the first ball-head plunger 12 in the second direction, so that the first ball-head plunger 12 gradually presses the end face of the square mirror 120, so that the first ball-head plunger 12 and the third baffle 01 together limit the position of the polygon mirror 100 in the second direction. When it is necessary to remove the polygon mirror 100, it is only necessary to rotate the first ball-head plunger 12 in the opposite direction to release the pressure of the first ball-head plunger 12 on the end face of the square mirror 120. Preferably, a first connecting part is formed at the bottom of the pressure plate 13, and a through hole is provided on the first connecting part, through which rod-shaped connecting parts such as bolts are installed on the base plate 05.

[0040] like Figure 6 As shown, optionally, the second limiting component 03 includes an L-shaped plate 15, a second ball plunger 16, and a third ball plunger 14. The L-shaped plate 15 includes a first plate portion and a second plate portion arranged perpendicularly to each other. The first plate portion is arranged perpendicular to the base plate 05. The second plate portion is fixed to the top end of the first plate portion and is arranged parallel to the base plate 05. A second threaded hole is formed on the first plate portion, and a third threaded hole is formed on the second plate portion. The second ball plunger 16 is threadedly connected to the second threaded hole so that the axial direction of the second ball plunger 16 is parallel to the first direction. The third ball plunger 14 is threadedly connected to the third threaded hole so that the third ball plunger 14 is arranged perpendicular to the base plate 05. Thus, after placing multiple mirrors 100 on the base plate 05, rotating the second ball-head plunger 16 adjusts its position in the first direction, thereby gradually compressing the square mirror 120 in the first direction. This achieves the purpose of limiting the position of the multiple mirrors 100 in the first direction through the second ball-head plunger 16 and the baffle 01. Rotating the third ball-head plunger 14 adjusts its position in the direction perpendicular to the base plate 05, and gradually compresses the square mirror 120 through the third ball-head plunger 14, achieving the purpose of limiting the position of the multiple mirrors 100 in the direction perpendicular to the base plate 05. Preferably, a second connecting portion is formed at the bottom of the first plate, and a through hole is formed on the second connecting portion. Rod-shaped connecting parts such as bolts are installed on the base plate 05 through this through hole.

[0041] like Figure 4As shown, optionally, the base plate 05 includes a plate body 11 and a plurality of protrusions 10 formed on the plate body 11. The first limiting component 02, each of the second limiting components 03, and each of the baffles 01 are detachably installed on the plate body 11. Each of the protrusions 10 is distributed between the first limiting component 02, each of the second limiting components 03, and each of the baffles 01. The top surface of each protrusion 10 is a plane parallel to the plate surface of the plate body 11, and the top edge of each protrusion 10 is chamfered. The purpose of providing the protrusions 10 is to reduce the installation area of ​​the multifaceted mirror 100, and the chamfered top edge of the protrusion 10 can reduce the probability of damaging the multifaceted mirror 100. In this embodiment, the number of protrusions 10 can be 3 to 5, for example, 3, 4, or 5. Preferably, the number of protrusions 10 is 3, and the 3 protrusions 10 on the plate body 11 are distributed in a triangular pattern. The plate 11 also has a first baffle interface a1, a second baffle interface a2 and a third baffle interface a3, as well as a fourth baffle interface b1, a fifth baffle interface b2 and a sixth baffle interface b3. The plate 11 also has a first pressure plate interface c1, a second pressure plate interface c2 and a third pressure plate interface c3, as well as a first L-plate interface d1 and a second L-plate interface d2. The plate 11 also has a first fixing interface e1, a second fixing interface e2, a third fixing interface e3, a fourth fixing interface e4, a fifth fixing interface e5 and a sixth fixing interface e6, as well as a seventh fixing interface f1, an eighth fixing interface f2, a ninth fixing interface f3 and a tenth fixing interface f4. The plate 11 also has a first connecting interface g1 and a second connecting interface g2.

[0042] Specifically, if Figures 7 to 10 As shown, the measurement procedure for the angle between surface A 116 and surface B 113 of the polygon mirror 100, and the angle between surface A 116 and surface E 114, is as follows: (1) Install the three baffles 01 on the first baffle interface a1, the second baffle interface a2 and the third baffle interface a3 of the base plate 05; (2) Install the base plate 05 on the adapter plate 04, and fix the interfaces as the first fixing interface e1, the second fixing interface e2, the third fixing interface e3, the fourth fixing interface e4, the fifth fixing interface e5 and the sixth fixing interface e6; (3) Install the multifaceted mirror 100 on the base plate 05. The bottom surface 115 of the multifaceted mirror 100 contacts the boss 10, the Z surface 118 faces upward, the A surface 116 contacts the two baffles 01, and the B surface 113 contacts one baffle 01. (4) Install the first limiting component 02 on the first pressure plate interface c1 of the base plate 05; (5) Install the two second limiting components 03 on the first L plate interface d1 and the second L plate interface d2 of the base plate 05; (6) Adjust the first ball-head plunger 12 so that it presses against the E surface 114 of the multifaceted mirror 100; (7) Adjust the second ball plunger 16 and the third ball plunger 14 to press them against the non-reference surface 117 and Z-surface 118 of the multifaceted mirror 100; (8) Adjust the height of the lifting platform 08 so that the light tube of the goniometer 09 is aligned with surface A 116, and record the current position data (understandably, the goniometer 09 has a light tube).

[0043] (9) Rotate the turntable 07 clockwise by about 90° so that the light tube of the goniometer 09 is aligned with surface B 113. Record the current position data. The computer will automatically calculate and display the angle between surface A 116 and surface B 113. (10) Rotate the turntable 07 counterclockwise by about 90° so that the light tube of the goniometer 09 is aligned with surface A 116, and record the current position data; (11) Rotate the turntable 07 counterclockwise by about 90° so that the light tube of the angle measuring instrument 09 is aligned with surface E 114. Record the current position data. The computer will automatically calculate and display the angle between surface A 116 and surface E 114.

[0044] like Figures 11 to 13 As shown, the procedure for measuring the angle between plane B113 and plane Z118 of polygon mirror 100 is as follows: (1) Install the three baffles 01 on the fourth baffle interface b1, the fifth baffle interface b2 and the sixth baffle interface b3 of the base plate 05; (2) Install the base plate 05 on the adapter plate 04, and fix the interfaces as the first fixing interface e1, the second fixing interface e2, the third fixing interface e3, the fourth fixing interface e4, the fifth fixing interface e5 and the sixth fixing interface e6; (3) Install the multifaceted mirror 100 on the base plate 05, with surface A 116 contacting the boss 10, non-reference surface 117 facing upward, and surface B 113 contacting a baffle 01. (4) Install the first limiting component 02 on the third pressure plate interface c3 of the base plate 05; (5) Install the two second limiting components 03 on the first L plate interface d1 and the second L plate interface d2 of the base plate 05; (6) Adjust the first ball-head plunger 12 so that it presses against the E surface 114 of the multifaceted mirror 100; (7) Adjust the second ball plunger 16 and the third ball plunger 14 to press them against the non-reference surface 117 and Z-surface 118 of the multifaceted mirror 100; (8) Adjust the height of the lifting platform 08 so that the light tube of the goniometer 09 is aligned with the Z-plane 118, and record the current position data; (9) Rotate the turntable 07 clockwise by about 90° so that the light tube of the goniometer 09 is aligned with surface B 113. Record the current position data. The computer will automatically calculate and display the angle between surface Z 118 and surface B 113.

[0045] like Figure 11 , Figure 14 and Figure 15 As shown, the angle between plane E114 and plane Z118 of polygon mirror 100 is measured, and the procedure is as follows: Similar to the process of measuring the angle between surface B113 and surface Z118, the difference lies in the installation method of the multifaceted mirror 100 in step (3). Specifically, the non-reference surface 117 contacts the boss 10, surface A116 faces upward, surface E114 contacts a baffle 01, the second ball-head plunger 16 presses against surface Z118 of the multifaceted mirror 100, and the third ball-head plunger 14 presses against surface A116 of the multifaceted mirror 100.

[0046] Optionally, the first limiting unit further includes a counterweight 17, which is mounted on the stage 06 and arranged with the base plate 05 in the second direction. If, during assembly, it is found that after the polygon mirror 100, the first limiting unit, and the second limiting unit are installed, the overall center of gravity deviates significantly from the central axis of the adapter plate 04, the counterweight 17 can be installed at an appropriate position on the adapter plate 04 to bring the overall center of gravity closer to the axis of the adapter plate 04. This ensures that when the turntable 07 rotates the adapter plate 04 during the measurement process, the position of the polygon mirror 100 relative to the adapter plate 04 remains stable. It is understood that when the counterweight 17 is located between the goniometer 09 and the polygon mirror 100, the height of the counterweight 17 should not obstruct the goniometer 09 from measuring the polygon mirror 100.

[0047] like Figures 16 to 18 As shown, the angle between plane B 113 and plane C 111 of the polygon mirror 100 is measured, and the procedure is as follows: (1) Install the three baffles 01 on the fourth baffle interface b1, the fifth baffle interface b2 and the sixth baffle interface b3 of the base plate 05; (2) Install the base plate 05 on the adapter plate 04, and fix the interfaces as the seventh fixing interface f1, the eighth fixing interface f2, the ninth fixing interface f3 and the tenth fixing interface f4; (3) Install the multifaceted mirror 100 on the base plate 05 with surface A 116 facing upward, surface Z 118 in contact with two baffles 01, and surface B 113 in contact with one baffle 01. (4) Install the first limiting component 02 on the second pressure plate interface c2 of the base plate 05; (5) Install the two second limiting components 03 on the first L plate interface d1 and the second L plate interface d2 of the base plate 05; (6) Adjust the first ball-head plunger 12 so that it presses against the E surface 114 of the multifaceted mirror 100; (7) Adjust the second ball plunger 16 and the third ball plunger 14 to press them against the bottom surface 115 and surface A 116 of the multifaceted mirror 100; (8) Adjust the height of the lifting platform 08 so that the light tube of the goniometer 09 is aligned with surface B 113 and the turntable 07 can also be aligned with surface C 111 when it rotates. (9) Rotate the turntable 07 so that the light tube of the goniometer 09 is aligned with surface B 113 and record the current position data; (10) Rotate the turntable 07 clockwise by about 45° so that the light tube of the angle measuring instrument 09 is aligned with surface C 111. Record the current position data. The computer will automatically calculate and display the angle between surface B 113 and surface C 111.

[0048] (11) If it is found during assembly that the center of gravity of the multifaceted mirror 100, the first limiting unit and the second limiting unit are far away from the central axis of the adapter plate 04 after installation, a counterweight 17 can be installed at an appropriate position on the adapter plate 04 to make the center of gravity of the whole closer to the axis of the adapter plate 04, so as to ensure that the position of the multifaceted mirror 100 relative to the adapter plate 04 remains stable when the turntable 07 drives the adapter plate 04 to rotate during the measurement process.

[0049] like Figure 19 and Figure 20 As shown, the angle between surface D 112 and surface E 114 of the polygon mirror 100 is measured, and the procedure is as follows: Similar to the process of measuring the angle between surface B113 and surface C111, the difference is that the installation method of the multifaceted mirror 100 in step (3) is different. The non-reference surface 117 faces upward, surface E114 is in contact with a baffle 01, and surface Z118 is in contact with two baffles 01.

[0050] like Figure 21 As shown, optionally, the first limiting unit further includes an inclined support plate 18. The inclined support plate 18 includes a first connecting plate portion 20 and an inclined support block portion 19 mounted on the surface of the first connecting plate portion 20. The top surface of the inclined support block portion 19 is inclined, and the top surface of the inclined support block portion 19 forms a 45° angle with the top surface of the base plate 05. The bottom surface of the base plate 05 is detachably connected to the top surface of the inclined support block portion 19. In this way, by detachably mounting the base plate 05 onto the inclined support plate 18, the C-plane 111 or D-plane 112 of the 45° mirror 110 can be perpendicular to the light emitted by the optical tube of the goniometer 09.

[0051] Specifically, if Figures 22 to 24 As shown, the procedure for measuring the angle between surface C111 and surface A116 is as follows: (1) Install the inclined support plate 18 on the adapter plate 04; (2) Install the base plate 05 on the inclined support plate 18, and fix the interface as the second fixing interface e2, the fifth fixing interface e5, the first connecting interface g1 and the second connecting interface g2; (3) Install the three baffles 01 on the first baffle interface a1, the second baffle interface a2 and the third baffle interface a3 of the base plate 05; (4) Install the multifaceted mirror 100 on the base plate 05, with the bottom surface 115 contacting the boss 10, the A surface 116 contacting the two baffles 01, and the B surface 113 contacting one baffle 01. (5) Install the first limiting component 02 on the first pressure plate interface c1 of the base plate 05; (6) Install the two second limiting components 03 on the first L plate interface d1 and the second L plate interface d2 of the base plate 05; (7) Adjust the first ball-head plunger 12 so that it presses against the E surface 114 of the multifaceted mirror 100; (8) Adjust the second ball plunger 16 and the third ball plunger 14 to press them against the non-reference surface 117 and Z-surface 118 of the multifaceted mirror 100; (9) Adjust the height of the lifting platform 08 so that the light tube of the goniometer 09 is aligned with surface C 111 and the turntable 07 can also be aligned with surface A 116 when it rotates. (10) Rotate the turntable 07 so that the light tube of the goniometer 09 is aligned with surface C 111 and record the current position data; (11) Rotate the turntable 07 counterclockwise by about 90° so that the light tube of the angle measuring instrument 09 is aligned with surface A 116. Record the current position data. The computer will automatically calculate and display the angle between surface C 111 and surface A 116.

[0052] Measure the angle between surface D112 and surface A116, such as... Figure 25 and Figure 26 As shown, the process is as follows: Similar to the angle measurement process between surface C111 and surface A116, the difference lies in the installation method of the multifaceted mirror 100 in step (4). Surface E114 is in contact with one baffle 01, and the non-reference surface 117 is in contact with two baffles 01. The second ball-head plunger 16 and the third ball-head plunger 14 of the second limiting assembly 03 press against surface A116 and surface Z118 of the multifaceted mirror 100.

[0053] like Figure 27 and Figure 28 As shown, optionally, the first limiting unit includes a mounting plate 21, and the second limiting unit includes a shaped plate assembly 27 and two side pressure plate assemblies 26. The mounting plate 21 includes a second connecting plate portion 24 and a connecting block 25 fixed to the second connecting plate portion 24. The second connecting plate portion 24 is used for detachable mounting to the platform 06. The irregular plate assembly 27 and the two side pressure plate assemblies 26 are both mounted on the connecting block 25 to fix the multifaceted mirror 100 which is arranged perpendicular to the second connecting plate portion 24 in a fixed length direction.

[0054] In this way, the multifaceted mirror 100 can be erected by the first limiting unit and the second limiting unit, so that the length direction of the multifaceted mirror 100 is perpendicular to the base plate 05, and then the angle between the corresponding mirror surfaces can be measured.

[0055] Optionally, the connecting block 25 includes a first block portion 23 extending upward in a third direction and a second block portion 22 extending in a fourth direction. The first block portion 23 and the second block portion 22 are perpendicularly connected to form an L-shape. The third direction is the width direction of the second connecting plate portion 24, and the fourth direction is the length direction of the second connecting plate portion 24. The irregular plate assembly 27 includes an irregular plate 30, which is fixed to the connecting block 25 to form a receiving cavity between the irregular plate 30 and the connecting block 25 for accommodating a 45° mirror 110, and to make the square mirror 120 fit against the top surface of the connecting block 25 on the end face (B face 113 or E face 114) on the corresponding side.

[0056] This allows the top surface of the connecting block 25 to support the polygon mirror 100 by fitting against the end face of the square mirror 120 after the 45° mirror 110 is inserted into the receiving cavity, so that the polygon mirror 100 can be in a relatively stable upright state.

[0057] Optionally, the irregularly shaped plate 30 includes a first limiting plate portion 28 and a second limiting plate portion 29 that are perpendicularly connected to each other. The first limiting plate portion 28 is fixedly connected to the first block portion 23 and is disposed opposite to the second block portion 22. The second limiting plate portion 29 is fixedly connected to the second block portion 22 and is disposed opposite to the first block portion 23, so that the height of the second limiting plate portion 29 is greater than the height of the first limiting plate portion 28 in the direction perpendicular to the second connecting plate portion 24. The irregular plate assembly 27 further includes three fourth ball-head plungers 31. One fourth ball-head plunger 31 is vertically mounted on the first limiting plate portion 28, and two fourth ball-head plungers 31 are mounted on the second limiting plate portion 29. The two fourth ball-head plungers 31 mounted on the second limiting plate portion 29 are arranged in a direction perpendicular to the second connecting plate portion 24. It is understood that the fourth ball-head plungers 31 are threadedly connected to the fourth threaded holes formed in the irregular plate 30. Since the height of the second limiting plate portion 29 is greater than the height of the first limiting plate portion 28 in the direction perpendicular to the second connecting plate portion 24, the bottom surface 115 on the square mirror 120 corresponding to the position of the second limiting plate portion 29 can obtain a wider range of support and position limitation during measurement, thereby improving the stability of fixing the polygon mirror 100. Rotating the fourth ball-head plunger 31 can adjust the position of the fourth ball-head plunger 31, thereby realizing the fixing or disassembly of the polygon mirror 100. Preferably, the irregular plate 30 is fixed to the connecting block 25 by bolts.

[0058] Optionally, the side pressure plate assembly 26 includes a side pressure plate 33 and a fifth ball-head plunger 32. The fifth ball-head plunger 32 is vertically mounted on the side pressure plate 33. One side pressure plate 33 is detachably mounted to the first block portion 23, facing the second limiting plate portion 29, and another side pressure plate 33 is detachably mounted to the second block portion 22, facing the first limiting plate portion 28. The fifth ball-head plunger 32 is located above the connecting block 25. It is understood that the fifth ball-head plunger 32 is threadedly connected to a fifth threaded hole on the side pressure plate 33. Preferably, the side pressure plate 33 is fixed to the connecting block 25 by bolts. In this way, the fourth ball-head plunger 31 on the second limiting plate 29 and the fifth ball-head plunger 32 fixed on the side pressure plate 33 of the first block 23 cooperate to clamp the polygon mirror 100, and the fourth ball-head plunger 31 on the first limiting plate 28 and the fifth ball-head plunger 32 fixed on the side pressure plate 33 of the second block 22 cooperate to clamp the polygon mirror 100, thereby achieving the fixation of the polygon mirror 100.

[0059] Specifically, if Figures 29 to 31 The angle between the Z-plane 118 and the A-plane 116 of the polygon mirror 100 is measured, and the procedure is as follows: (1) Install the mounting plate 21 onto the adapter plate 04; (2) Install the irregularly shaped plate assembly 27 on the side of the mounting plate 21; (3) Install the two side pressure plate assemblies 26 on the corresponding sides of the mounting plate 21; (4) Place the multifaceted mirror 100 on the mounting plate 21 so that the E-face 114 contacts the top surface of the mounting plate 21; (5) Adjust each fourth ball plunger 31 and each fifth ball plunger 32 to press the bottom surface 115, non-reference surface 117, Z surface 118 and A surface 116 of the multifaceted mirror 100. (6) Adjust the height of the lifting platform 08 so that the light tube of the goniometer 09 is aligned with the Z-plane 118, and record the current position data; (7) Rotate the turntable 07 about 90° clockwise so that the light tube of the goniometer 09 is aligned with surface A 116. Record the current position data. The computer will automatically calculate and display the angle between surface Z 118 and surface A 116.

[0060] In this embodiment of the application, the angles between the reference planes of the square mirror 120 and the 45° mirror 110 after bonding must be strictly controlled to ensure accuracy in later use. As shown in Table 1, the nine angles between the different reference planes must be within their theoretical range.

[0061] Table 1:

[0062] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some or all of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A multi-faceted mirror angle measuring device, characterized in that, The device includes a goniometer unit, a first limiting unit, and a second limiting unit. The goniometer unit includes a goniometer, a lifting platform, a turntable, and a platform. The goniometer is mounted on the top of the lifting platform, which is used to move the goniometer up and down. The platform is mounted on the top of the turntable, which is used to rotate the platform. The first limiting unit and the second limiting unit are both mounted on the platform to fix the multifaceted mirror to the platform. The goniometer is used to measure the angles between the mirror surfaces of the multifaceted mirror.

2. The multi-faceted mirror angle measuring device according to claim 1, characterized in that, The first limiting unit includes a base plate and three baffles, and the second limiting unit includes a first limiting component and two second limiting components. The first limiting component, each of the second limiting components and each of the baffles are all detachably mounted on the same surface of the base plate, and the base plate is detachably mounted on the platform. Each of the second limiting components is disposed on one side edge of the base plate in the first direction, and the second limiting components are arranged in the second direction. Two baffles are disposed on the other side edge of the base plate in the first direction, and the two baffles are arranged in the second direction. The first limiting component is disposed on one side edge of the base plate in the second direction, and a third baffle is disposed on the other side edge of the base plate in the second direction. The first limiting component and the third baffle are not on the same straight line parallel to the second direction. The first limiting component, each of the second limiting components, and each of the baffles are all used to make pressure contact with the multifaceted mirror. The first direction is the width direction of the base plate, and the second direction is the length direction of the base plate. The first limiting component and the third baffle are used to make pressure contact with the two end faces of the square mirror in the length direction in a one-to-one correspondence.

3. The multi-faceted mirror angle measuring device according to claim 2, characterized in that, The first limiting component includes a pressure plate and a first ball plunger. The pressure plate is configured to be perpendicular to the base plate. A first threaded hole is formed on the pressure plate. The first ball plunger is threadedly engaged with the first threaded hole so that the axial direction of the first ball plunger is parallel to the second direction. The first ball plunger is used to make pressure contact with the multifaceted mirror.

4. The multi-faceted mirror angle measuring device according to claim 2, characterized in that, The second limiting assembly includes an L-shaped plate, a second ball plunger, and a third ball plunger. The L-shaped plate includes a first plate portion and a second plate portion arranged perpendicularly to each other. The first plate portion is arranged perpendicular to the base plate, and the second plate portion is fixed to the top end of the first plate portion and is arranged parallel to the base plate. A second threaded hole is formed on the first plate portion, and a third threaded hole is formed on the second plate portion. The second ball plunger is threadedly connected to the second threaded hole so that the axial direction of the second ball plunger is parallel to the first direction. The third ball plunger is threadedly connected to the third threaded hole so that the third ball plunger is arranged perpendicular to the base plate.

5. The multi-faceted mirror angle measuring device according to claim 2, characterized in that, The base plate includes a plate body and a plurality of protrusions formed on the plate body. The first limiting component, each of the second limiting components and each of the baffles are detachably installed on the plate body. Each of the protrusions is distributed between the first limiting component, each of the second limiting components and each of the baffles. The top surface of each protrusion is a plane parallel to the plate surface of the plate body, and the top edge of each protrusion is chamfered.

6. The multi-faceted mirror angle measuring device according to claim 2, characterized in that, The first limiting unit further includes a counterweight block, which is used to be installed on the platform, and the counterweight block and the base plate are arranged in the second direction.

7. The multi-faceted mirror angle measuring device according to claim 2, characterized in that, The first limiting unit further includes an inclined support plate, which includes a first connecting plate portion and an inclined support block portion mounted on the plate surface of the first connecting plate portion. The top surface of the inclined support block portion is inclined, and the top surface of the inclined support block portion forms a 45° angle with the top surface of the base plate. The bottom surface of the base plate is detachably connected to the top surface of the inclined support block portion.

8. The multi-faceted mirror angle measuring device according to any one of claims 1 to 7, characterized in that, The first limiting unit includes a mounting plate, and the second limiting unit includes a shaped plate assembly and two side pressure plate assemblies. The mounting plate includes a second connecting plate portion and a connecting block fixed to the second connecting plate portion, the second connecting plate portion being detachably mounted to the platform. The irregular plate assembly and the two side pressure plate assemblies are both mounted on the connecting block to fix the multifaceted mirror that is perpendicular to the second connecting plate in the length direction; The connecting block includes a first portion extending upward in a third direction and a second portion extending in a fourth direction. The first and second portions are perpendicularly connected to form an L-shape. The third direction is the width direction of the second connecting portion, and the fourth direction is the length direction of the second connecting portion. The irregular plate assembly includes an irregular plate for fixing to the connecting block to form a receiving cavity between the irregular plate and the connecting block for accommodating a 45° mirror, and to make the end face of the square mirror on the corresponding side fit against the top surface of the connecting block.

9. The multi-faceted mirror angle measuring device according to claim 8, characterized in that, The irregularly shaped plate includes a first limiting plate portion and a second limiting plate portion that are perpendicularly connected to each other. The first limiting plate portion is fixedly connected to the first block portion and is positioned opposite to the second block portion. The second limiting plate portion is fixedly connected to the second block portion and is positioned opposite to the first block portion, such that the height of the second limiting plate portion is greater than the height of the first limiting plate portion in the direction perpendicular to the second connecting plate portion. The irregular plate assembly also includes three fourth ball-head plungers. One fourth ball-head plunger is vertically installed on the first limiting plate portion, and two fourth ball-head plungers are installed on the second limiting plate portion. The two fourth ball-head plungers installed on the second limiting plate portion are arranged in a direction perpendicular to the second connecting plate portion.

10. The multi-faceted mirror angle measuring device according to claim 9, characterized in that, The side pressure plate assembly includes a side pressure plate and a fifth ball-head plunger. The fifth ball-head plunger is vertically mounted on the side pressure plate. One side pressure plate is detachably mounted on the first block portion and faces the second limiting plate portion. Another side pressure plate is detachably mounted on the second block portion and faces the first limiting plate portion. The fifth ball-head plunger is located above the connecting block.

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