Exhaust tank

Abstract

Provided is an exhaust tank capable of recycling, in a clean state, a coating liquid discharged into the exhaust tank by exhaust treatment. Specifically, an exhaust tank (10) for collecting a coating liquid discharged from a coater (20) is provided with: a tank main body (11) for storing the coating liquid; an exhaust pipe (12) which is inserted into the tank main body (11) and guides the coating liquid discharged from the coater (20) to the tank main body (11); and a cleaning nozzle (13) that is inserted into the tank main body (11) and sprays a cleaning liquid into the tank main body (11), the cleaning nozzle (13) having a nozzle part (13a) that sprays the cleaning liquid in all directions into the tank main body (11).

Description

Technical Field

[0001] This invention relates to an exhaust tank for recovering coating liquid discharged from a coating machine. Background Technology

[0002] As an apparatus for applying a coating liquid to a substrate such as a glass substrate, a coating apparatus is known to have a coating device having a slit nozzle for discharging the coating liquid. The slit nozzle is formed to be relatively long in the width direction of the coating device, and while the coating device is moved relative to the substrate, the coating liquid is discharged from the slit nozzle, thereby forming a coating film on the surface of the substrate.

[0003] The coater is equipped with a manifold for temporary storage of coating liquid. However, when coating is performed with air bubbles or other gases mixed into the manifold, the pressure of the output coating liquid will change, which becomes the main cause of uneven coating.

[0004] Patent Document 1 describes a method (hereinafter referred to as "exhaust treatment") in which a coating liquid containing air bubbles mixed into the manifold is drawn in by a suction pump and discharged into a coating liquid storage tank (exhaust tank).

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent Application Publication No. 2009-131788 Summary of the Invention

[0008] The problem that the invention aims to solve

[0009] The aim is to recycle the coating liquid discharged into the exhaust tank through exhaust treatment back to the coater, thereby achieving reuse.

[0010] However, for example, color filters used in liquid crystal displays are manufactured by repeatedly applying three (RGB) color resists (coating solutions) to a glass substrate. Therefore, even when the coating solution discharged to the exhaust can is recycled back into the coater for reuse, the exhaust can needs to be cleaned every time the coating solution is replaced.

[0011] Cleaning the exhaust canister can be effective to some extent by replacing the interior with a cleaning solution. However, during exhaust treatment, it is difficult to completely remove the coating liquid that adheres to the inner wall (especially the top cover) of the exhaust canister due to liquid splashing. If the residual coating liquid that has not been removed by the cleaning solution mixes with the replaced coating liquid, it becomes a major cause of quality degradation.

[0012] The present invention was made in view of the above-mentioned problems, and its object is to provide an exhaust can that can reuse the coating liquid discharged into the exhaust can through exhaust treatment in a clean state.

[0013] means for solving problems

[0014] The present invention provides an exhaust can for recovering coating liquid discharged from a coater. The exhaust can includes: a can body for storing the coating liquid; an exhaust pipe inserted into the can body for guiding the coating liquid discharged from the coater to the can body; and a cleaning nozzle inserted into the can body for spraying cleaning liquid into the can body. The cleaning nozzle has a nozzle portion for spraying cleaning liquid omnidirectionally into the can body.

[0015] Invention Effects

[0016] According to the present invention, an exhaust canister is provided that can reuse the coating liquid discharged into the exhaust canister through exhaust treatment in a clean state. Attached Figure Description

[0017] Figure 1 This is a schematic diagram illustrating a coating apparatus for an exhaust canister as described in this embodiment.

[0018] Figure 2 This is a schematic cross-sectional view illustrating the structure of the exhaust tank in this embodiment.

[0019] Figure 3 This is a diagram showing a modified example of an exhaust canister.

[0020] Figure 4A This is a diagram showing other variations of the exhaust canister.

[0021] Figure 4B It is along Figure 4A A cross-sectional view of the IVB-IVB line.

[0022] Figure 5A This is a diagram showing other variations of the exhaust canister.

[0023] Figure 5B It is along Figure 5A A sectional view of the VB-VB line in the diagram.

[0024] Figure 6A This is a diagram showing other variations of the exhaust canister.

[0025] Figure 6B It is along Figure 6A A cross-sectional view of the VIB-VIB line. Detailed Implementation

[0026] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the following embodiments.

[0027] Figure 1This is a schematic diagram illustrating a coating apparatus for an exhaust canister as described in this embodiment.

[0028] like Figure 1 As shown, the coating apparatus includes: a coater 20 having a slit nozzle 21 for discharging coating liquid; and an exhaust canister 10 for recovering the coating liquid discharged from a manifold 22 disposed within the coater 20.

[0029] The slit nozzle 21 is formed to be longer in the width direction of the coater 20. While the coater 20 is moved relative to the substrate (not shown), the coating liquid is sprayed from the slit nozzle 21, thereby forming a coating film on the surface of the substrate.

[0030] A manifold 22 for temporary storage of coating liquid is provided inside the coater 20. Opening valve 60 activates the supply pump 40, thereby supplying the coating liquid into the manifold 22 through supply pipes 50 and 51 from the supply port 23. The lower side of the manifold 22 is connected to the slit nozzle 21, and the coating liquid supplied to the manifold 22 is output from the slit nozzle 21. Furthermore, valves 61, 62, 63, and 66 are closed during coating.

[0031] (Exhaust treatment)

[0032] The coater 20 has vent holes 24, 25, and 26 for venting the coating liquid containing gases such as air bubbles present in the manifold 22. Venting is performed by supplying coating liquid to the manifold 22 through the supply hole 23 by opening valves 60, 61, 62, and 63. The coating liquid containing gas is discharged from the vent holes 24, 25, and 26 through the discharge pipes 52, 53, 54, and 55 to the vent tank 10.

[0033] A discharge port 57 is provided at the bottom of the exhaust tank 10. By opening the valve 65, the coating liquid accumulated in the exhaust tank 10 can be discharged to the outside through the discharge port 57. Furthermore, when a predetermined amount of coating liquid accumulates in the exhaust tank 10, the valve 66 is opened to allow the coating liquid to circulate from the discharge port 57 through the piping 58 to the supply pump 40, thereby enabling the reuse of the coating liquid discharged into the exhaust tank 10 during exhaust treatment.

[0034] (Structure of the exhaust canister)

[0035] Figure 2 This is a cross-sectional view schematically showing the structure of the exhaust tank 10 in this embodiment.

[0036] like Figure 2As shown, the exhaust canister 10 includes: a canister body 11 that stores the coating liquid; an exhaust pipe 12 inserted into the canister body 11 to guide the coating liquid discharged from the manifold 22 to the canister body 11; and a cleaning nozzle 13 inserted into the canister body 11 to spray cleaning liquid into the canister body 11. The exhaust pipe 12 and the cleaning nozzle 13 are respectively fixed to the top cover 11a and connected to the discharge pipe 55 and the cleaning liquid supply pipe 56. In addition, an outlet 57 is provided at the bottom 11b of the canister body 11.

[0037] The cleaning nozzle 13 has a nozzle section 13a that sprays the cleaning fluid supplied by the cleaning fluid supply pipe 56 omnidirectionally into the tank body 11. Here, "omnidirectional spraying" means as... Figure 2 As shown by the dashed arrow, the cleaning fluid is sprayed from the nozzle 13a in a 360° direction so that the cleaning fluid reaches the entire area of ​​the inner wall of the tank body 11.

[0038] The construction of the nozzle section 13a is not particularly limited. For example, multiple spray holes can be provided in the nozzle section 13a, and the spray direction of the cleaning fluid sprayed from each spray hole can be adjusted to be directed towards all directions inside the tank body 11. Alternatively, at least one or more spray holes can be provided in the nozzle section 13a, and the cleaning fluid sprayed from the spray holes can reach the entire area of ​​the inner wall of the tank body 11 while the nozzle section 13a is rotated.

[0039] According to this embodiment, by spraying cleaning fluid into the tank body 11 from the nozzle portion 13a of the cleaning nozzle 13 inserted into the tank body 11, the coating fluid adhering to all inner walls of the tank body 11, including the top cover 11a, can be reliably removed. Thus, the coating fluid discharged to the exhaust tank 10 through the exhaust process can be reused in a clean state.

[0040] (Example of a modified exhaust canister)

[0041] Figure 3 This is a diagram showing a modified example of the exhaust canister 10.

[0042] like Figure 3 As shown, the exhaust tank 10 in this modified example, besides Figure 2 In addition to the structure of the exhaust canister 10 shown, it also includes a liquid level sensor 14 for detecting the liquid level inside the canister body 11. In this case, the nozzle portion 13a is arranged inside the canister body 11 such that the lower end of the nozzle portion 13a is located above the position where the liquid level sensor 14 is installed.

[0043] With this structure, when the level of the coating liquid accumulated in the venting tank 10 reaches the position of the liquid level sensor 14, the discharge of coating liquid based on venting is stopped, thereby preventing the nozzle section 13a from being immersed in the coating liquid. This prevents the spray hole provided in the nozzle section 13a from being blocked by the coating liquid, thus ensuring that the cleaning liquid is normally sprayed from the spray hole. Furthermore, when the nozzle section 13a has a rotating mechanism, the rotation of the nozzle section 13a can be normally maintained.

[0044] Figure 4A The diagram shows other variations of the exhaust canister 10. Figure 4B It is along Figure 4A A cross-sectional view of the IVB-IVB line.

[0045] like Figure 4A and Figure 4B As shown, the exhaust tank 10 in this modified example, besides Figure 2 In addition to the structure of the exhaust tank 10 shown, it also includes an auxiliary cleaning nozzle 15 with a nozzle portion 15a for spraying cleaning fluid. Furthermore, the auxiliary cleaning nozzle 15 is fixed to the top cover 11a and connected to the cleaning fluid supply pipe 59.

[0046] like Figure 4B As shown, an exhaust pipe 12 is disposed inside the tank body 11, so the inner wall of the tank body 11 has a dead zone area A. The cleaning fluid sprayed from the nozzle portion 13a is blocked by the exhaust pipe 12 and cannot reach the dead zone area A. The nozzle portion 15a of the auxiliary cleaning nozzle 15 is configured to spray cleaning fluid at least toward the inner wall including the dead zone area A.

[0047] This structure allows for the reliable removal of coating liquid adhering to all inner walls of the tank body 11, including the dead zone A. Consequently, the coating liquid discharged into the exhaust tank 10 via the exhaust process can be reused in a clean state.

[0048] Furthermore, in this modified example, an example is shown where one exhaust pipe 12 is arranged inside the tank body 11. However, when multiple exhaust pipes 12 are arranged, there may sometimes be multiple dead zones A that the cleaning fluid sprayed from the nozzle section 13a cannot reach. In such cases, multiple auxiliary cleaning nozzles 15 can be provided to spray cleaning fluid toward the inner wall that includes all dead zones A.

[0049] Figure 5A The diagram shows other variations of the exhaust canister 10. Figure 5B It is along Figure 5A A sectional view of the VB-VB line in the diagram.

[0050] like Figure 5A and Figure 5BAs shown, the cleaning nozzle 13 of the exhaust can 10 in this modified example includes: a shaft portion 13b, which is inserted vertically into the center of the can body 11; a connecting portion 13c, which is connected to the shaft portion 13b and extends horizontally; and a nozzle portion 13a, which is installed at the end of the connecting portion 13c and has a spray hole for spraying cleaning fluid.

[0051] The shaft portion 13b and the connecting portion 13c have internal flow paths for the cleaning fluid to flow, such as... Figure 5B As shown, while the connecting part 13c is rotated around the shaft part 13b, cleaning fluid is sprayed out from the spray hole of the nozzle part 13a.

[0052] With this structure, the nozzle portion 13a, installed at the end of the connecting portion 13c, sprays cleaning fluid while rotating around the shaft portion 13b. Therefore, no dead zones are created on the inner wall of the tank body 11 where the cleaning fluid sprayed from the nozzle portion 13a cannot reach due to obstruction by the exhaust pipe 12. Thus, the coating fluid adhering to the inner wall of the tank body 11 can be reliably removed. Consequently, the coating fluid discharged into the exhaust tank 10 through the exhaust process can be reused in a clean state.

[0053] The structure of the nozzle section 13a is not particularly limited, and is consistent with... Figure 2 Similarly, the nozzle section 13a shown may also be a structure that sprays cleaning fluid into the tank body 11 in all directions, or a structure with a rotating mechanism.

[0054] In addition, such as Figure 5B As shown, when the exhaust pipe 12 is located in a position that interferes with the rotation of the connecting part 13c, it is sufficient to rotate the connecting part 13c within a range that does not interfere with the exhaust pipe 12.

[0055] Figure 6A The diagram shows other variations of the exhaust canister 10. Figure 6B It is along Figure 6A A cross-sectional view of the VIB-VIB line.

[0056] like Figure 6A and Figure 6B As shown, the exhaust tank 10 in this modified example and Figure 5A and Figure 5B The difference in the exhaust canister 10 shown is that the connecting part 13c is connected to the shaft part 13b at its center, and nozzle parts 13a and 13a are respectively installed at the two ends of the connecting part 13c.

[0057] With this structure, the nozzles 13a and 13a installed at both ends of the connecting part 13c spray cleaning fluid while rotating around the shaft 13b. Therefore, no dead zones are created on the inner wall of the tank body 11 where the cleaning fluid sprayed from the nozzles 13a and 13a cannot reach due to obstruction by the exhaust pipe 12. Thus, the coating fluid adhering to the inner wall of the tank body 11 can be reliably removed. Consequently, the coating fluid discharged into the exhaust tank 10 through the exhaust process can be reused in a clean state.

[0058] In addition, such as Figure 6B As shown, when the exhaust pipe 12 is located in a position that interferes with the rotation of the connecting part 13c, it is sufficient to rotate the connecting part 13c within a range that does not interfere with the exhaust pipe 12.

[0059] The present invention has been described above through preferred embodiments, but such description is not limiting and various modifications are possible. For example, in the above embodiments, the case in which the coating liquid discharged from the manifold 22 in the coater 20 is recovered to the exhaust tank 10 is described as an example, but the coating liquid existing in the coater 20 outside the manifold 22 may also be recovered to the exhaust tank 10.

[0060] Label Explanation

[0061] 10: Exhaust canister;

[0062] 11: Tank body;

[0063] 11a: Top cover;

[0064] 11b: Bottom;

[0065] 12: Exhaust piping;

[0066] 13: Clean the nozzle;

[0067] 13a: Nozzle section;

[0068] 13b: Shaft portion;

[0069] 13c: Connecting part;

[0070] 14: Liquid level sensor;

[0071] 15: Auxiliary cleaning nozzle;

[0072] 15a: Nozzle section;

[0073] 20: Applicator;

[0074] 21: Slit nozzle;

[0075] 22: manifold;

[0076] 23: Supply hole;

[0077] 24, 25, 26: Exhaust vents;

[0078] 40: Supply pump;

[0079] 50, 51: Supply piping;

[0080] 52, 53, 54, 55: Exit piping;

[0081] 56, 59: Cleaning fluid supply piping;

[0082] 57: Discharge outlet;

[0083] 58: Piping.

Claims

1. An exhaust canister that recovers coating liquid discharged from a coater. The exhaust canister includes: The main body of the tank stores the coating liquid; An exhaust pipe, inserted into the tank body, guides the coating liquid discharged from the coater to the tank body; and A cleaning nozzle, inserted into the tank body, sprays cleaning fluid into the tank body. The cleaning nozzle has a nozzle portion that sprays the cleaning liquid into the tank body from all directions.

2. The exhaust tank according to claim 1, wherein, The nozzle section has multiple spray holes that spray the cleaning fluid into the tank body from all directions.

3. The exhaust tank according to claim 1, wherein, The nozzle portion has at least one or more spray holes, and the cleaning fluid is sprayed out from the spray holes while the nozzle portion is rotated.

4. The exhaust tank according to claim 1, wherein, The exhaust canister also includes a liquid level sensor for detecting the liquid level inside the canister body. The nozzle is disposed within the tank body such that its lower end is positioned above the location of the liquid level sensor.

5. The exhaust tank according to claim 1, wherein, The inner wall of the tank body has a dead corner area, and the cleaning fluid sprayed from the nozzle is blocked by the exhaust pipe and cannot reach this dead corner area. The exhaust canister also includes an auxiliary cleaning nozzle, which has a nozzle portion that sprays cleaning fluid toward the dead corner area.

6. The exhaust tank according to claim 1, wherein, The cleaning nozzle has the following features: The shaft portion is inserted vertically into the center of the can body; A connecting portion, which connects to the shaft portion and extends horizontally; and The nozzle portion, which is installed at the end of the connecting portion, has a spray hole for spraying cleaning fluid. The shaft and the connecting part have internal flow paths for the cleaning fluid to flow. While rotating the connecting part around the shaft part, cleaning fluid is sprayed out from the spray hole of the nozzle part.

7. The exhaust tank according to claim 6, wherein, The connecting portion is connected to the shaft portion at its center. The nozzle portion is installed at each of the two ends of the connecting portion.

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