Connecting rod type stepless variable pitch clamping jaw

Abstract

The invention relates to a connecting rod type stepless variable-pitch clamping jaw which comprises a track base plate, a motor fixing plate installed on the track base plate through a fixing vertical plate, a servo motor installed on the motor fixing plate, a second gear driven by the servo motor, a first gear meshed with the second gear and a rotating disc synchronously rotating with the first gear. The turntable is positioned between the track substrate and the motor fixing plate; the servo motor drives the second gear and the first gear and drives the rotary disc to rotate, and then the supporting hook is pushed through the connecting rod to do radial linear motion along the linear guide rail through the sliding block. The mechanical lifting structure can easily bear crystal ingots within 8 kg, and the problem that heavy objects cannot be carried through vacuum adsorption is solved. By means of the unique annular synchronous groove mechanism, the movement consistency of the multiple supporting hooks is guaranteed, positioning is accurate, and the clamping or deviation risk is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer processing, and particularly relates to a connecting rod type stepless variable distance gripper. BACKGROUND

[0002] In the full-automatic loading and unloading process of a wafer, the wafer is usually placed on a processing station by a wafer robot through suction and carrying from a loading container. The wafer robot is developed for thin wafer products, so the wafer robot can carry light products and has a small load. Therefore, the suction device of the wafer robot usually uses a thin ceramic finger. The ceramic finger itself is light in weight, and the wafer product that can be carried by the ceramic finger is relatively light, mostly within 200 g. Due to the size limitation of the wafer, the ceramic finger needs to be manually replaced with different sizes when carrying different sizes of wafers including 4-inch, 6-inch, 8-inch and 12-inch wafers. The replacement takes a long time, and the debugging cost is high after replacement.

[0003] For a cylindrical ingot with a large thickness, if the thickness of an 8-inch ingot is 30 mm and the weight is up to 2.5 kg, the conventional suction and carrying cannot meet the full-automatic loading and unloading demand of such products due to the load limitation of the wafer robot and the vacuum suction reliability problem. Therefore, other mechanical carrying methods need to be considered to realize the full-automatic carrying of such products.

[0004] In view of the above defects, the present design person actively researches and innovates to create a connecting rod type stepless variable distance gripper, so that it has more industrial utilization value. SUMMARY

[0005] To solve the above technical problems, the purpose of the present application is to provide a connecting rod type stepless variable distance gripper.

[0006] To achieve the above purpose, the present application adopts the following technical solutions:

[0007] The connecting rod type stepless variable distance gripper comprises a track base plate, a motor fixing plate installed on the track base plate through a fixed vertical plate, a servo motor installed on the motor fixing plate, a second gear driven by the servo motor, a first gear meshing with the second gear, and a rotating disc rotating synchronously with the first gear, wherein the rotating disc is located between the track base plate and the motor fixing plate;

[0008] Further comprising a connecting shaft, a bearing seat, at least one set of linear guide rails, a sliding block slidingly matched with the linear guide rails, a connecting rod, and a hook;

[0009] The connecting shaft is installed between the track base plate and the motor fixing plate, the bearing seat is rotationally matched with the connecting shaft through a bearing and is axially fixed by a compression nut, the rotating disc and the inner bearing seat are installed together, one end of the connecting rod is connected with an eccentric pin hole on the rotating disc through a connecting pin, the other end is connected with an eccentric pin hole on the hook through a connecting pin, and the top of the hook is provided with the sliding block.

[0010] The servo motor drives the second gear and the first gear and rotates the rotating disc, and then pushes the hooks to move along the linear guide rail in a radial linear motion through the connecting rod.

[0011] As a further improvement of the present application, the first gear is a circular arc block structure, and a stop block is installed on one side of the rotating disc, and a limiting block matched with the stop block is installed on the bottom of the motor fixing plate on both sides of the stop block.

[0012] As a further improvement of the present application, an inductive sheet is installed on the rotating disc, and an inductor matched with the inductive sheet is installed on the motor fixing plate.

[0013] As a further improvement of the present application, the number of hooks is three and they are evenly distributed along the circumferential direction of the rotating disc.

[0014] As a further improvement of the present application, a guide block parallel to the linear guide rail is arranged on one side of the top of the hook, and a guide groove parallel to the linear guide rail is opened on the track base plate outside the guide block, and the guide block moves freely in the guide groove.

[0015] As a further improvement of the present application, a detachable clamping block is installed on one side of the bottom of the hook, and the clamping block is embedded into the clamping installation groove at the bottom of the hook and locked by quick change screws.

[0016] As a further improvement of the present application, the clamping block is a rubber block or a silica gel block.

[0017] As a further improvement of the present application, the static friction coefficient of the contact surface at the top of the clamping block is greater than 0.8.

[0018] By the above scheme, the present application has at least the following advantages:

[0019] High load capacity: the mechanical lifting structure can easily bear the crystal ingot within 8kg, solving the problem of vacuum adsorption unable to transport heavy objects.

[0020] Motion precise synchronization: the unique annular synchronization groove mechanism ensures the motion consistency of multiple hooks, accurate positioning, no jamming or deviation risk.

[0021] Good product protection: soft clamping block and torque limiting function effectively prevent hard scratches or scratches on the crystal ingot.

[0022] Convenient and wide adaptability: the quick-change clamping block design enables the equipment to quickly adapt to various product specifications, improving equipment utilization.

[0023] Simple control and low cost: no need for complex vacuum system or visual positioning system, reliable structure, easy to debug, low manufacturing and maintenance cost.

[0024] The above description is only a summary of the technical solutions of the present application. In order to make the technical means of the present application more clearly understood and implemented according to the content of the description, the preferred embodiments of the present application are described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required to be used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0026] Figure 1 is a structural schematic diagram of a connecting rod type stepless variable distance gripper of the present application;

[0027] Figure 2 is a partial internal structure schematic diagram of Figure 1 ;

[0028] Figure 3 is a structural schematic diagram of one side in the first working state of the present application;

[0029] Figure 4 is a structural schematic diagram of the other side in the first working state of the present application;

[0030] Figure 5 is a structural schematic diagram of one side in the second working state of the present application;

[0031] Figure 6 is a structural schematic diagram of the other side in the second working state of the present application.

[0032] In the drawings, the meanings of various reference signs are as follows.

[0033] Track base plate 1, fixed vertical plate 2, motor fixing plate 3, first gear 4, rotating disc 5, second gear 6, servo motor 7, bearing seat 8, pressing nut 9, connecting shaft 10, connecting rod 11, sliding block 12, connecting pin 13, linear guide rail 14, supporting hook 15. DETAILED DESCRIPTION

[0034] The specific embodiments of the present application will be further described in detail below with reference to the drawings and examples. The following examples are used to illustrate the present application, but are not used to limit the scope of the present application.

[0035] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0036] First embodiment of the present invention:

[0037] like Figures 1-2 As shown, a linkage-type continuously variable pitch gripper in this embodiment mainly includes a track base plate 1, a fixed upright plate 2, a motor fixing plate 3, a first gear 4, a turntable 5, a second gear 6, a servo motor 7, a connecting shaft 10, a connecting rod 11, a linear guide rail 14, and a hook 15.

[0038] The motor mounting plate 3 is mounted on the track base plate 1 via the fixed upright plate 2. The servo motor 7 is mounted on the motor mounting plate 3. The servo motor 7 drives the second gear 6. The second gear 6 meshes with the first gear 4 and drives the turntable 5 to rotate synchronously. The turntable 5 is located between the track base plate 1 and the motor mounting plate 3.

[0039] The first gear 4 is an arc-shaped block structure. A stop block is installed on the turntable 5 on one side of the first gear 4. Limiting blocks that are compatible with the stop block are installed on the bottom of the motor fixing plate 3 on both sides of the stop block.

[0040] A sensor plate is installed on the turntable 5, and a sensor compatible with the aforementioned sensor plate is installed on the motor mounting plate 3.

[0041] The connecting shaft 10 is installed between the track base plate 1 and the motor fixing plate 3. The bearing seat 8 is rotatably engaged with the connecting shaft 10 through the bearing and is axially fixed by the clamping nut 9. The turntable 5 is installed together with the inner bearing seat 8.

[0042] There are three hooks 15 evenly distributed along the circumference of the turntable 5. One end of the connecting rod 11 is connected to the eccentric pin hole on the turntable 5 via a connecting pin 13, and the other end is connected to the eccentric pin hole on the hook 15 via a connecting pin 13. A slider 12 is mounted on the top of the hook 15. The servo motor 7 drives the second gear 6 and the first gear 4 to rotate the turntable 5, which in turn pushes the hook 15 to move radially linearly along the linear guide rail 14 via the connecting rod 11 and the slider 12.

[0043] A guide block parallel to the linear guide rail 14 is arranged on the top side of the hook 15, and a guide groove parallel to the linear guide rail 14 is formed on the track base plate 1 outside the guide block, and the guide block is freely movable in the guide groove.

[0044] A detachable clamping block is mounted on the bottom side of the hook 15, and the clamping block is embedded into the clamping mounting groove at the bottom of the hook 15 and locked by quick change screws. The clamping block is a rubber block or a silica gel block, and the static friction coefficient of the contact surface at the top of the clamping block is greater than 0.8. The static friction coefficient of the contact surface at the top of the clamping block after sand blasting treatment can reach more than 0.8, which is much higher than the 0.1-0.3 of conventional materials, thereby greatly reducing the slip of the crystal ingot during the handling process due to inertia or vibration, and the safety factor is extremely high.

[0045] The second embodiment of the present application is as follows:

[0046] As shown in Figures 1-2 , the present embodiment designs a mechanical connecting rod type stepless variable distance clamping jaw for handling crystal ingots and other cylindrical products. The clamping jaw using the connecting rod type is driven by a servo motor, and the size range of the product that can be handled is from 100mm in diameter to 200mm in diameter, and other cylindrical products with any diameter within the range can be handled, and the clamping jaw does not need to be replaced for handling products with different outer diameter sizes, and the variable distance is completed by the servo motor; the clamping jaw is a metal hook, and three points are in contact with the product, which ensures the reliability during handling. The maximum load of the metal hook is 8kg, which can handle wafers or crystal ingots with large thickness, and there is no weight limit, and other materials with cylindrical shape can be handled at the same time.

[0047] The positional relationship and connection relationship between the components of the present embodiment are as follows:

[0048] The main body is connected with the device structure using the present embodiment through the track base plate 1, and all the components of the present embodiment are directly or indirectly connected with the track base plate 1.

[0049] Among them, the fixed vertical plate 2 is connected with the track base plate 1 on both sides of the center of the track base plate 1 by using screws, the motor fixing plate 3 is connected with the fixed vertical plate 2 above the fixed vertical plate 2 by using screws, the second gear 6 is connected with the output shaft of the servo motor 7 by using a common flat key, and the common flat key is pressed on the connection between the second gear 6 and the common flat key by using a stop screw in the radial direction of the second gear 6, and the fastening connection is completed. After forming the above connection frame, the connecting shaft 10 is connected with the hole machined on the track base plate 1 in a positioning matching manner, and the connecting shaft 10 is tightly connected by using screws to lock the end surface, and the bearing seat 8 is connected with the turntable 5 in a shaft hole matching manner, and the bearing seat is tightly connected with the turntable 5 by the end surface flange of the bearing seat.

[0050] One of the planes on the rotating disc 5 is machined with an outer boss, the first gear 4 is connected with the boss in a positioning fit, and is fastened by a screw. At this time, the first gear 4 and the rotating disc 5 form an integral motion body, the connecting body formed by the bearing seat, the gear and the rotating disc is connected with the connecting shaft 10 in a positioning fit through the deep groove ball bearing inner ring in the bearing seat 8, the compression nut 9 is connected with the connecting shaft 10 through a threaded connection, and the bearing seat 8 is compressed on the connecting shaft 10 through a threaded feed, thereby limiting the axial and radial degrees of freedom of the bearing seat. At this time, the rotating disc 5 can rotate at any angle with the connecting shaft 10 as the rotation center.

[0051] The rotating disc 5 is machined with three equidistantly distributed precise pin holes near the outer circle position, and is connected with the connecting rod 11 using a connecting pin 13. At this time, the rotating disc 5 can drive the connecting rod 11 to move when rotating. The other side of the connecting rod is connected with the hook 15 using a screw, the back of the hook is fastened with the slider 12 using a screw, the slider 12 is connected with the linear guide rail 14 in a precise fit sliding connection, and the slider can move linearly on the guide rail. At this time, the rotating disc 5 rotates, and the hook 15 can move linearly along the radius direction of the rotating disc 5 under the action of the connecting rod 11.

[0052] The working principle and process of the embodiment are as follows:

[0053] The embodiment can be compatible with any size of circular or cylindrical product carrying within the diameter range of four-inch wafers to eight-inch wafers. The working parameters corresponding to different sizes of wafers can be set and recalled when the equipment performs an automatic operation process.

[0054] As shown in Figure 3 and Figure 4 , the initial position of the clamping jaw (i.e. the structure composed of three hooks 15) is when the hooks form a circle with the maximum diameter, so as to facilitate the clamping jaw to fall from above the product to the bottom of the product as a whole. After the clamping jaw falls to the bottom of the product, the servo motor 7 rotates clockwise within the visual angle shown in Figure 3 . The rotation of the servo motor 7 drives the second gear 6 to rotate. Since the second gear 6 and the first gear 4 are in external meshing transmission, the rotation directions of the two gears are opposite. Under the action of meshing transmission, the first gear 4 rotates counterclockwise within the visual angle shown in Figure 3 . At this time, the counterclockwise rotation of the first gear 4 drives the rotating disc 5 to rotate counterclockwise on the connecting shaft 10. Since one end of the connecting rod 11 is connected with the rotating disc 5 through a pin shaft, when the outer circle region of the rotating disc 5 rotates, the part of the connecting rod 11 hinged thereto swings. The other end of the connecting rod 11 is connected with the slider 12 through the connecting pin 13, and the slider 12 can only move linearly along the axis direction of the linear guide rail 14 under the action of the linear guide rail 14. Therefore, at this time, the hook 15 connected with the slider 12 through a bolt also moves linearly along the axis direction of the linear guide rail 14. Therefore, the hook 15 moves linearly along the axis direction of the linear guide rail 14 under the action of the connecting rod 11 and the rotating disc 5. Figure 3When rotated counterclockwise within the shown viewpoint, the three hooks 15 are in Figure 3 Moving in a straight line along the center of the circle within the viewpoint shown, eventually reaching... Figure 5 As shown, the circular area formed by the three hooks 15 is as follows: Figure 6 As shown, the diameter of the circular area formed by the hook is at its smallest at this point, representing the minimum handling range, thus enabling product handling. When the product arrives at the required workstation and the handling is complete, the servo motor 7 executes a command in the opposite direction to the above-mentioned actions. Under the reverse motion of the above results, the gripper opens and reaches the position of the largest circular area of ​​the hook. The opening and closing positions can be adjusted according to the different handling requirements and positions corresponding to different product sizes. The control terminal drives the servo motor 7 to stop at an appropriate position, thus achieving different handling sizes.

[0055] This embodiment solves the problem that conventional wafer robotic arms cannot handle thick cylindrical products such as ingots, and greatly facilitates the fully automated loading and unloading process for ingot-type products.

[0056] This embodiment uses mechanical, accessible grippers for lifting and handling, eliminating the need for a vacuum lamp or air source. The handling is stable and reliable, with no risk of falling.

[0057] This embodiment utilizes a simple linkage structure based on mechanical principles, and precisely combines various machined parts and servo drive components to achieve fully automated loading and unloading of cylindrical products with large thickness and weighing up to 8kg. It is suitable for wafer and ingot products.

[0058] This embodiment has undergone continuous testing, and the mechanical linkage gripper has reliable opening and closing movements, accurate stopping position, smooth movement, and no jamming or excessive positional deviation.

[0059] This embodiment does not use an imaging system, making control simple and debugging convenient. It greatly saves time and material costs, making a significant contribution to the overall cost control of the equipment. Its cost and efficiency give the equipment a certain degree of market competitiveness.

[0060] In the description of the present application, it is to be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" and the like are only for the purpose of description and cannot be understood as indicating or implying relative importance or implying the number of technical features indicated. Therefore, the features defined with "first", "second" and the like can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0061] In the description of the present application, it should be noted that unless otherwise specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood through specific circumstances.

[0062] The above is only the preferred embodiment of the present application, and is not used to limit the present application, it should be pointed out that for ordinary skilled in the art, without departing from the technical principles of the present application, a number of improvements and modifications can be made, these improvements and modifications should be considered as the protection scope of the present application.

Claims

1. A linkage-type continuously variable pitch gripper, comprising a track base plate (1), a motor fixing plate (3) mounted on the track base plate (1) via a fixing plate (2), a servo motor (7) mounted on the motor fixing plate (3), a second gear (6) driven by the servo motor (7), a first gear (4) meshing with the second gear (6), and a turntable (5) rotating synchronously with the first gear (4), wherein the turntable (5) is located between the track base plate (1) and the motor fixing plate (3); Its features are: It also includes a connecting shaft (10), a bearing seat (8), at least one set of linear guides (14), a slider (12) that slides with the linear guides (14), a connecting rod (11), and a hook (15); The connecting shaft (10) is installed between the track base plate (1) and the motor fixing plate (3). The bearing seat (8) is rotatably engaged with the connecting shaft (10) through the bearing and is axially fixed by the clamping nut (9). The turntable (5) is installed together with the inner bearing seat (8). One end of the connecting rod (11) is connected to the eccentric pin hole on the turntable (5) through the connecting pin (13), and the other end is connected to the eccentric pin hole on the hook (15) through the connecting pin (13). A slider (12) is installed on the top of the hook (15). The servo motor (7) drives the second gear (6) and the first gear (4) to rotate the turntable (5), and then pushes the hook (15) to make radial linear motion along the linear guide rail (14) through the slider (12) via the connecting rod (11).

2. The linkage-type continuously variable pitch gripper as described in claim 1, characterized in that, The first gear (4) is an arc-shaped block structure. A stop block is installed on the turntable (5) on one side of the first gear (4). Limiting blocks that are compatible with the stop block are installed at the bottom of the motor fixing plate (3) on both sides of the stop block.

3. The linkage-type continuously variable pitch gripper as described in claim 1, characterized in that, An induction plate is installed on the turntable (5), and a sensor adapted to the induction plate is installed on the motor mounting plate (3).

4. The linkage-type continuously variable pitch gripper as described in claim 1, characterized in that, The number of hooks (15) is three and they are evenly distributed along the circumference of the turntable (5).

5. The linkage-type continuously variable pitch gripper as described in claim 1, characterized in that, A guide block parallel to the linear guide rail (14) is provided on one side of the top of the hook (15). A guide groove parallel to the linear guide rail (14) is provided on the track base plate (1) outside the guide block. The guide block can move freely in the guide groove.

6. The linkage-type continuously variable pitch gripper as described in claim 1, characterized in that, A detachable clamping block is installed on one side of the bottom of the hook (15). The clamping block is embedded in the clamping mounting groove at the bottom of the hook (15) and locked by quick-change screws.

7. The linkage-type continuously variable pitch gripper as described in claim 6, characterized in that, The clamping block is a rubber block or a silicone block.

8. The linkage-type continuously variable pitch gripper as described in claim 6, characterized in that, The static friction coefficient of the contact surface at the top of the clamping block is greater than 0.8.

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