Vacuum cavity insulation sealing rotation transmission assembly

Abstract

The invention discloses a vacuum cavity insulation sealing rotary transmission assembly which comprises a rotary transmission shaft, a wear-resistant sealing shaft sleeve, an O-shaped sealing ring, a lip-shaped sealing ring, a bearing, a shell, an insulation sleeve, a transmission shaft fixing seat and a vacuum cavity. The left side and the right side of the lip-type sealing ring are connected with the bearings respectively, the bearings are connected with the shell, the shell is connected with the insulation sleeve, the insulation sleeve is connected with the transmission shaft fixing base, the transmission shaft fixing base is fixedly arranged on the outer side of the vacuum cavity, and one end of the transmission shaft is connected with the working part. And the working part is arranged in the vacuum cavity. Through the vacuum cavity insulation sealing rotary transmission assembly, the sealing performance of the vacuum cavity and the operation stability of the working assembly can be kept, meanwhile, the rotary transmission shaft does not need to be replaced, only the wear-resistant sealing shaft sleeve needs to be replaced, the service life is longer, maintenance and replacement are more convenient, and therefore time and cost are saved.

Description

Technical Field

[0001] This invention relates to the field of vacuum cavity transmission technology, and in particular to a vacuum cavity insulated and sealed rotary transmission assembly. Background Technology

[0002] Vacuum chamber drive technology is mainly used in magnetron sputtering equipment. During use, the vacuum chamber drive assembly connects to the metal target inside the magnetron sputtering machine and drives it to rotate to complete the magnetron sputtering operation. Since magnetron sputtering needs to be carried out in a vacuum, the sealing performance is also crucial. However, conventional vacuum chamber drive assemblies will experience wear on the surface of the drive shaft in the drive assembly after long-term operation, resulting in a decrease in sealing performance or even failure. Replacing the entire drive shaft is costly and time-consuming and labor-intensive. Summary of the Invention

[0003] Based on this, the purpose of this invention is to provide a vacuum chamber insulated and sealed rotary transmission assembly that can maintain the sealing of the vacuum chamber and the operational stability of the working components. At the same time, it eliminates the need to replace the rotary transmission shaft, requiring only the replacement of the wear-resistant sealing bushing. This results in a longer service life, more convenient maintenance and replacement, thereby saving time and costs, and making the process more convenient.

[0004] A vacuum chamber insulated and sealed rotary transmission assembly includes a rotary transmission shaft, a wear-resistant sealing bushing, O-rings, lip seals, bearings, a housing, an insulating sleeve, a transmission shaft mounting base, and a vacuum chamber. The rotary transmission shaft is connected to the wear-resistant sealing bushing, two O-rings are provided between the wear-resistant sealing bushing and the rotary transmission shaft, the wear-resistant sealing bushing is connected to the lip seals, the left and right sides of the three lip seals are respectively connected to the bearings, the two bearings are connected to the housing, the housing is connected to the insulating sleeve, the insulating sleeve is connected to the transmission shaft mounting base, the transmission shaft mounting base is fixed on the outside of the vacuum chamber, one end of the transmission shaft is connected to a working component, and the working component is disposed inside the vacuum chamber.

[0005] Preferably, the wear-resistant sealing bushing is connected to three lip seals, each of the three lip seals having a sealing ring positioning ring at both ends, two O-rings between the two sealing ring positioning rings and the wear-resistant sealing bushing, and two O-rings between the two sealing ring positioning rings and the outer shell.

[0006] Preferably, the three lip seals are connected to the bearings on the left and right sides respectively, the left bearing has two shaft spiral retaining rings on both sides, and the right bearing is connected to the outer casing end cover on the right side.

[0007] Preferably, the two bearings are connected to the housing, which is simultaneously fixed to the outside of the two bearings and the three lip seals.

[0008] Preferably, two O-rings are provided between the outer shell and the insulating sleeve, and an insulating sleeve end cap is provided at the left end of the outer shell, which is connected to the insulating sleeve.

[0009] Preferably, the insulating sleeve is connected to the drive shaft mounting base, and two O-rings are provided between the insulating sleeve and the drive shaft mounting base.

[0010] Preferably, the drive shaft mounting base is fixed to the outside of the vacuum chamber, two O-rings are provided between the drive shaft mounting base and the vacuum chamber, and four bearings are provided between the drive shaft mounting base and the rotating drive shaft.

[0011] Preferably, the wear-resistant sealing bushing is fixed to the outside of the rotating transmission shaft by bolts.

[0012] Preferably, the wear-resistant sealing bushing is provided with a first fixing ring and a second fixing ring on the right side.

[0013] Preferably, the working component is fixed to one end of the transmission shaft by bolts, and the working component is a lead screw, shaft or target material. Beneficial effects

[0014] This invention uses a vacuum chamber-insulated and sealed rotary transmission assembly to maintain the airtightness of the vacuum chamber and the operational stability of the working components. At the same time, there is no need to replace the rotary transmission shaft; only the wear-resistant sealing bushing needs to be replaced. This results in a longer service life and more convenient maintenance and replacement, thereby saving time and costs. Attached Figure Description

[0015] Figure 1 This is a cross-sectional schematic diagram of the present invention; Figure 2 This is a schematic diagram of the cross-section of the end of the rotary transmission shaft of the present invention; Figure 3 This is a perspective view of the end of the rotary transmission shaft of the present invention; Figure 4 This is a schematic diagram of the wear-resistant sealing bushing structure of the present invention.

[0016] Explanation of key component symbols: Rotary drive shaft 1 shell 10 Wear-resistant sealing bushing 2 Outer end cap 11 O-ring 3 Insulating sleeve 12 First fixing ring 4 Insulating sleeve end cap 13 Second fixing ring 5 bearings 14 bearings 6 Drive shaft mounting base 15 Shaft with spiral retaining ring 7 vacuum chamber 16 Sealing ring positioning ring 8 Working parts 17 Lip seal 9 The following detailed description, in conjunction with the accompanying drawings, will further illustrate the present invention. Detailed Implementation

[0017] To facilitate understanding of the present invention, a more complete description will be given below with reference to the accompanying drawings. Several embodiments of the invention are illustrated in the drawings. However, the invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

[0018] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0019] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0020] Please see Figure 1-4 This invention provides a vacuum chamber insulating and sealed rotary transmission assembly, comprising a rotary transmission shaft 1, a wear-resistant sealing bushing 2, O-ring seals 3, lip seals 9, bearings 6, a housing 10, an insulating sleeve 12, a transmission shaft fixing seat 15, and a vacuum chamber 16. The rotary transmission shaft 1 is connected to the wear-resistant sealing bushing 2, and two O-ring seals 3 are provided between the wear-resistant sealing bushing 2 and the rotary transmission shaft 1. The wear-resistant sealing bushing 2 is connected to the lip seals 9, and the three lip seals 9 are connected to the bearings 6 on their left and right sides, respectively. The two bearings 6 are connected to the housing 10, and the housing 10 is connected to the insulating sleeve 12. The insulating sleeve 12 is connected to the transmission shaft fixing seat 15, and the transmission shaft fixing seat 15 is fixed to the outside of the vacuum chamber 16. One end of the transmission shaft 1 is connected to a working component 17, and the working component 17 is disposed inside the vacuum chamber 16.

[0021] The wear-resistant sealing bushing 2 is fixed to the outside of the rotating transmission shaft 1 by multiple bolts.

[0022] The wear-resistant sealing bushing 2 is provided with a first fixing ring 4 and a second fixing ring 5 on its right side. The first fixing ring 4 and the second fixing ring 5 are connected by bolts.

[0023] The wear-resistant sealing bushing 2 is connected to the lip seal ring 9. Each end of the three lip seal rings 9 is provided with a sealing ring positioning ring 8. Two O-rings 3 are provided between the two sealing ring positioning rings 8 and the wear-resistant sealing bushing 2. Two O-rings 3 are provided between the two sealing ring positioning rings 8 and the outer shell 10.

[0024] The three lip seals 9 are connected to the bearings 6 on the left and right sides respectively. The left bearing 6 has two shaft spiral retaining rings 7 on both sides. The right bearing 6 is connected to the outer casing end cover 11 on the right side.

[0025] The two bearings 6 are connected to the housing 10, and the housing 10 is fixed to the outside of both bearings 6 and three lip seals 9.

[0026] Two O-rings 3 are provided between the outer shell 10 and the insulating sleeve 12. An insulating sleeve end cap 13 is provided at the left end of the outer shell 10, and the insulating sleeve end cap 13 is connected to the insulating sleeve 12.

[0027] The insulating sleeve 12 is connected to the drive shaft fixing seat 15, and two O-rings 3 are provided between the insulating sleeve 12 and the drive shaft fixing seat 15.

[0028] The drive shaft fixing seat 15 is fixed on the outside of the vacuum chamber 16. The drive shaft fixing seat 15 fixes the rotating drive shaft 1 on the vacuum chamber 16. Two O-rings 3 are provided between the drive shaft fixing seat 15 and the vacuum chamber 16. Four bearings 14 are provided between the drive shaft fixing seat 15 and the rotating drive shaft 1.

[0029] The working component is fixed to one end of the transmission shaft by bolts, and the working component is a lead screw, shaft or target material.

[0030] It should be noted that the present invention is used in accordance with the following steps: When one end of the rotary drive shaft 1 is driven by a motor, the rotary drive shaft 1 drives the working part 17 at the other end to rotate. At the same time, if the working part 17 needs to be cooled, a rotary joint can be externally installed on the shaft of the rotary drive shaft 1, and cooling water can be passed through it to cool it down.

[0031] When the rotary drive shaft 1 rotates, it drives the wear-resistant sealing bushing 2 and the inner rings of bearings 14 and 6 to rotate as well. The wear-resistant sealing bushing 2 replaces the surface of the rotary drive shaft 1 that is worn. The two O-ring seals 3 isolate the air, and the lip seal 9 seals the internal lubricating oil. During operation, if the working part 17 inside the vacuum chamber 16 is a target material, a magnetic field current will be generated. The insulating sleeve 12 blocks the current from flowing to the outer surface of the vacuum chamber 16 and the drive shaft fixing seat 15.

[0032] In summary, the vacuum cavity insulation and sealing rotary transmission assembly of the present invention, by setting wear-resistant sealing bushing 2, bearing 14, bearing 6 and lip seal ring 9, enables the vacuum cavity insulation and sealing rotary transmission assembly to maintain the sealing of the vacuum cavity and the operational stability of the working components. At the same time, there is no need to replace the rotary transmission shaft, only the wear-resistant sealing bushing needs to be replaced, which has a longer service life and is more convenient for maintenance and replacement, thereby saving time, saving costs and making it more convenient.

[0033] In this specification, the various embodiments are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. Furthermore, the above-described embodiments merely illustrate several implementation methods of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this patent should be determined by the appended claims.

Claims

1. A vacuum cavity insulated and sealed rotary transmission assembly, characterized in that, The assembly includes a rotary drive shaft, a wear-resistant sealing bushing, O-rings, lip seals, bearings, a housing, an insulating sleeve, a drive shaft mounting base, and a vacuum chamber. The rotary drive shaft is connected to the wear-resistant sealing bushing. Two O-rings are provided between the wear-resistant sealing bushing and the rotary drive shaft. The wear-resistant sealing bushing is connected to the lip seals. The three lip seals are connected to the bearings on their left and right sides, respectively. The two bearings are connected to the housing. The housing is connected to the insulating sleeve. The insulating sleeve is connected to the drive shaft mounting base. The drive shaft mounting base is fixed to the outside of the vacuum chamber. One end of the drive shaft is connected to a working component, which is located inside the vacuum chamber.

2. The vacuum cavity insulated and sealed rotary transmission assembly according to claim 1, characterized in that, The wear-resistant sealing bushing is connected to three lip seals. Each of the three lip seals has a sealing ring positioning ring at both ends. Two O-rings are provided between the two sealing ring positioning rings and the wear-resistant sealing bushing, and two O-rings are provided between the two sealing ring positioning rings and the outer shell.

3. The vacuum cavity insulated and sealed rotary transmission assembly according to claim 2, characterized in that, The three lip seals are connected to the bearings on the left and right sides respectively. The left bearing has two shaft spiral retaining rings on both sides, and the right bearing is connected to the outer casing end cover on the right side.

4. The vacuum cavity insulated and sealed rotary transmission assembly according to claim 3, characterized in that, The two bearings are connected to the housing, which is simultaneously fixed to the outside of the two bearings and the three lip seals.

5. A vacuum cavity insulated and sealed rotary transmission assembly according to claim 1, characterized in that, Two O-rings are provided between the outer shell and the insulating sleeve. An insulating sleeve end cap is provided at the left end of the outer shell, and the insulating sleeve end cap is connected to the insulating sleeve.

6. A vacuum cavity insulated and sealed rotary transmission assembly according to claim 5, characterized in that, The insulating sleeve is connected to the drive shaft mounting base, and two O-rings are provided between the insulating sleeve and the drive shaft mounting base.

7. The vacuum cavity insulated and sealed rotary transmission assembly according to claim 1, characterized in that, The drive shaft mounting base is fixed to the outside of the vacuum chamber. Two O-rings are provided between the drive shaft mounting base and the vacuum chamber. Four bearings are provided between the drive shaft mounting base and the rotating drive shaft.

8. A vacuum cavity insulated and sealed rotary transmission assembly according to claim 1, characterized in that, The wear-resistant sealing bushing is fixed to the outside of the rotating transmission shaft by bolts.

9. A vacuum cavity insulated and sealed rotary transmission assembly according to claim 1, characterized in that, The wear-resistant sealing bushing is provided with a first fixing ring and a second fixing ring on the right side.

10. A vacuum cavity insulated and sealed rotary transmission assembly according to claim 1, characterized in that, The working component is fixed to one end of the transmission shaft by bolts, and the working component is a lead screw, shaft or target material.

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