Diamond growth reaction gas conveying device with multi-gas-source cooperative control

Abstract

The invention provides a multi-gas-source cooperative control diamond growth reaction gas conveying device, and relates to the technical field of diamond preparation. An arch-shaped supporting frame is arranged on the top of the supporting base, three pressurizing exhaust pumps are installed on the top of the supporting base in an arrayed mode, and the pressurizing exhaust pumps are communicated with three different gas conveying pipelines respectively. Four-way gas conveying guide pipes are connected to the outer parts of the pressurizing exhaust pumps, and the three pressurizing exhaust pumps are communicated with the diamond growth reaction equipment through the four-way gas conveying guide pipes. According to the conveying requirements of different types of gases, the corresponding pressurizing exhaust pumps can be driven to operate, corresponding gas accurate quantitative conveying operation is carried out, different types of gases can be switched in sequence, and multi-gas-source cooperative control is achieved. The problems that an existing diamond growth reaction gas conveying device can only meet the conveying requirement of single-type gas, multiple conveying devices of the same type need to be arranged in parallel, a cooperative control mechanism is lacked, and accurate matching of multiple gas sources is difficult to achieve are solved.

Description

Technical Field

[0001] This invention relates to the field of diamond preparation technology, and in particular to a diamond growth reaction gas delivery device with multi-gas source coordinated control. Background Technology

[0002] Diamond materials possess excellent mechanical, electrical, thermal, acoustic, optical, and corrosion-resistant properties, making them widely used in military and civilian fields such as machinery manufacturing, aerospace, optical components, and semiconductor components. However, the high cost and difficulty in mining natural diamonds far outweigh the application demands, making the industrialization of synthetic diamonds an inevitable trend for large-scale diamond applications. Chemical vapor deposition (CVD) technology can artificially synthesize large-size, high-purity diamond materials, enabling the application of diamonds in numerous high-tech fields. In the process of epitaxially growing diamond seed crystals using microwave plasma CVD, a specialized reactive gas delivery device is required to introduce the reactive gas and achieve diamond growth.

[0003] For example, the Chinese patent "CN105624645B Reaction Gas Conveying Device and Chemical Vapor Deposition or Epitaxial Layer Growth Reactor" includes an isolation plate and a gas conveying plate. A first gas diffusion region is formed above the isolation plate, and a second gas diffusion region is formed between the isolation plate and the gas conveying plate. The upper surface of the gas conveying plate is alternately provided with parallel longitudinally elongated first gas diffusion grooves and longitudinally elongated second gas diffusion grooves. The bottom of the first gas diffusion grooves and the second gas diffusion grooves are respectively provided with first gas outlet channels and second gas outlet channels, which are used to convey the gas in the first gas diffusion region and the gas in the second gas diffusion region to the processing region, respectively. The lower surface of the gas conveying plate between the outlets of adjacent first gas outlet channels and second gas outlet channels is arc-shaped or conical.

[0004] The current configuration of diamond growth reaction gas delivery system has functional limitations. Its design can only meet the delivery requirements of a single type of gas. In practical applications, in order to meet the process requirements of multiple gas sources, it is necessary to configure multiple sets of the same type of delivery system in parallel. This superimposed deployment scheme leads to the expansion of the equipment cluster size, which not only significantly increases the system complexity and floor space, but also makes it difficult to achieve accurate proportioning, dynamic adjustment and synchronous response of multiple gas sources due to the lack of a coordinated control mechanism between the devices. Ultimately, this results in a series of problems such as decreased process stability and soaring operation and maintenance costs, which seriously restricts the overall system's operating efficiency and process expansion space. Summary of the Invention

[0005] This invention relates to a multi-source coordinated control device for diamond growth reaction gas delivery. Depending on the required delivery of different types of gas, a switching motor drives a transverse screw to rotate. The transverse screw drives a movable switching element to move along a guide bar, causing the driving pinion to mesh with the corresponding driven large gear. A drive motor then drives a splined shaft to rotate, which in turn drives the driving pinion to rotate. The driving pinion then drives a transmission crankshaft to rotate, driving a booster pump for precise quantitative delivery of the corresponding gas. By moving the movable switching element, different types of gas can be switched sequentially, achieving multi-source coordinated control and ensuring precise quantitative delivery of different types of gas.

[0006] In a first aspect, this invention provides a multi-source coordinated control device for delivering reaction gas in diamond growth, specifically comprising: a support base, booster pumps, a four-way gas delivery conduit, a movable switching component, a drive pinion, a switching motor, a transverse screw, a drive motor, and a splined shaft; the support base has an arched support frame on its top, and three booster pumps are arranged in a row on the top of the support base, each booster pump being connected to three different gas delivery pipelines; the booster pumps are externally connected to a four-way gas delivery conduit, and the three booster pumps are connected to the diamond growth reaction gas via the four-way gas delivery conduit. The growth reaction equipment is connected; a movable switching component is connected inside the arched support frame, and a driving pinion is connected to the bottom of the movable switching component. The driving pinion is alternately connected to three booster pumps for exhaust and desiccation; a switching motor is fixedly installed at one end of the arched support frame, and a drive motor is installed at the other end of the arched support frame; a transverse screw and a splined shaft are installed inside the arched support frame, with the transverse screw located above the splined shaft. The drive shaft of the switching motor is connected to the transverse screw, and the drive shaft of the drive motor is connected to the splined shaft; the transverse screw is connected to the movable switching component, and the splined shaft is connected to the driving pinion.

[0007] Furthermore, the booster pump consists of a main pump body, an intake connecting pipe, an exhaust connecting pipe, an intake check valve, an exhaust check valve, a transmission crankshaft, a pumping piston, and a transmission connecting rod. The bottom of the main pump body is in contact with the support base, and the intake connecting pipe and the exhaust connecting pipe are connected to the support base.

[0008] Furthermore, the main pump body is provided with two inverted T-shaped suction and discharge chambers. The suction and discharge piston is slidably connected in the T-shaped suction and discharge chambers. The air inlet pipe and the air outlet pipe are respectively installed at opposite ends of the bottom of the main pump body. The air inlet of the T-shaped suction and discharge chamber is connected to the air inlet pipe, and the air outlet of the T-shaped suction and discharge chamber is connected to the air outlet pipe.

[0009] Furthermore, the intake check valve is located at the connection between the main pump body and the intake connecting pipe, and the exhaust check valve is located at the connection between the main pump body and the exhaust connecting pipe.

[0010] Furthermore, when the exhaust piston moves upward, the intake check valve is open and the exhaust check valve is closed; when the exhaust piston moves downward, the intake check valve is closed and the exhaust check valve is open.

[0011] Furthermore, the transmission crankshaft is rotatably connected to the main pump body, one end of the transmission connecting rod is rotatably connected to the transmission crankshaft, and the other end of the transmission connecting rod is rotatably connected to the extraction piston. The transmission crankshaft is connected to two extraction pistons through the transmission connecting rod. When one extraction piston moves to the top, the other extraction piston moves to the bottom. The transmission crankshaft rotates, and the transmission crankshaft drives the two extraction pistons to move up and down reciprocally through the transmission connecting rod. During the upward movement of the extraction piston, the exhaust check valve is in a closed state, and the gas is drawn into the extraction chamber through the intake check valve. During the downward movement of the extraction piston, the intake check valve is in a closed state, pressurizing the gas so that the gas finally enters the diamond growth reaction equipment through the exhaust check valve.

[0012] Furthermore, the inlet pipe is connected to the gas delivery pipeline, the four-way gas delivery duct is connected to the three exhaust pipes, and the three booster pumps are connected to the corresponding gas delivery pipelines, which can deliver the three different types of gases required for the diamond growth reaction to the inside of the diamond growth reaction equipment.

[0013] Furthermore, the arched support frame is provided with two guide crossbars, and the movable switching component is provided with two symmetrical guide holes. The guide crossbars slide through the guide holes. The driving pinion is rotatably connected to the movable switching component. The end of the transmission crankshaft is provided with a driven large gear. The driving pinion alternately meshes with three driven large gears. Through the sliding cooperation between the guide crossbars and the guide holes, the movable switching component is guided.

[0014] Furthermore, the transverse screw is rotatably connected to the arched support frame, and the movable switching component has a threaded hole inside. The transverse screw is rotatably connected to the threaded hole. The spline shaft is rotatably connected to the arched support frame, and the driving pinion has a spline hole inside. The spline shaft slides through the spline hole. When different types of gas need to be transported, the switching motor drives the transverse screw to rotate. The transverse screw drives the movable switching component to move along the guide crossbar, so that the driving pinion meshes with the corresponding driven large gear. The drive motor drives the spline shaft to rotate, the spline shaft drives the driving pinion to rotate, and the driving pinion drives the transmission crankshaft to rotate, driving the booster pump to operate and perform precise quantitative transport of the corresponding gas.

[0015] This invention provides a multi-source coordinated control device for diamond growth reaction gas delivery, which has the following beneficial effects: In operation, the crankshaft rotates, and through precise linkage of the transmission connecting rods, drives two extraction pistons to perform cyclical up-and-down reciprocating motions. During the upward movement of the extraction pistons, the exhaust check valve automatically closes, forming a sealed space. At this time, external gas is smoothly drawn into the extraction chamber through the open intake check valve. When the extraction pistons move downwards, the intake check valve closes, cutting off the gas return path. Simultaneously, the pistons pressurize the gas in the extraction chamber, forcing the high-pressure gas to be directionally transported to the diamond growth reaction equipment via the exhaust check valve. Through the alternating and coordinated operation of the two extraction pistons, continuous and uninterrupted gas delivery is achieved, effectively ensuring the stability and efficiency of the gas supply inside the diamond growth reaction equipment.

[0016] In addition, the three booster pumps are precisely connected to their respective gas supply lines, enabling them to stably and efficiently deliver three different types of gases to the diamond growth reaction equipment in accordance with the requirements of the diamond growth reaction, thus providing a reliable gas supply guarantee for the smooth progress of the diamond growth reaction.

[0017] Furthermore, the guide crossbar and guide hole adopt a sliding fit design, providing precise and reliable guidance for the movement of the movable switching component. When different types of gas need to be transported according to process requirements, the switching motor starts and drives the transverse screw to rotate. Driven by the transverse screw, the movable switching component moves smoothly along the guide crossbar until the driving pinion and the corresponding driven large gear engage. At this time, the drive motor starts working, driving the spline shaft to rotate. The spline shaft further transmits power to the driving pinion, which then drives the transmission crankshaft to rotate, thereby driving the booster pump to operate and achieving precise quantitative delivery of the corresponding gas. Through the movement and switching of the movable switching component, different types of gas can be switched sequentially, achieving coordinated control of multiple gas sources and ensuring that different types of gas can achieve precise quantitative delivery, meeting the stringent requirements of the production process.

[0018] Other advantages, objectives and features of the present invention will become apparent in part from the following description, and in part from those skilled in the art through study and practice of the invention. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings of the embodiments will be briefly described below.

[0020] The accompanying drawings described below are only related to some embodiments of the invention and are not intended to limit the invention.

[0021] In the attached diagram: Figure 1This paper shows a schematic diagram of the overall top-shaft side structure of the diamond growth reaction gas delivery device with multi-gas source coordinated control according to this application; Figure 2 This paper shows a schematic diagram of the overall bottom shaft side structure of the diamond growth reaction gas delivery device with multi-gas source coordinated control according to this application; Figure 3 This paper shows a schematic diagram of the support base axial side structure of the diamond growth reaction gas delivery device with multi-gas source coordinated control according to this application; Figure 4 This paper shows a schematic diagram of the connection structure between the booster pump and the four-way gas duct of the diamond growth reaction gas delivery device with multi-gas source coordinated control according to this application. Figure 5 This paper shows a schematic diagram of the booster pump shaft side structure of the diamond growth reaction gas delivery device with multi-gas source coordinated control according to this application; Figure 6 This paper shows a schematic diagram of the disassembled structure of the booster pump and exhaust pump of the diamond growth reaction gas delivery device with multi-gas source coordinated control according to this application. Figure 7 This paper shows a schematic diagram of the internal cross-sectional structure of the main pump body of the diamond growth reaction gas delivery device with multi-gas source coordinated control according to this application. Figure 8 A schematic diagram of the connection structure between the movable switching component and the active pinion of the diamond growth reaction gas delivery device with multi-gas source coordinated control according to this application is shown.

[0022] Figure label: 1. Support base; 101. Arched support frame; 1011. Guide crossbar; 2. Booster exhaust pump; 21. Main pump body; 2101. Exhaust chamber; 22. Intake connecting pipe; 23. Exhaust connecting pipe; 24. Intake check valve; 25. Exhaust check valve; 26. Drive crankshaft; 2601. Driven large gear; 27. Exhaust piston; 28. Drive connecting rod; 3. Four-way air supply duct; 4. Movable switching component; 401. Guide hole; 402. Threaded hole; 5. Drive pinion; 501. Spline hole; 6. Switching motor; 7. Horizontal screw; 8. Drive motor; 9. Spline shaft. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the described embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] Please refer to Figures 1 to 8Example 1: This invention proposes a multi-source coordinated control device for diamond growth reaction gas delivery, comprising: a support base 1, booster pumps 2, a four-way gas delivery duct 3, a movable switching element 4, a drive pinion 5, a switching motor 6, a transverse screw 7, a drive motor 8, and a spline shaft 9; an arched support frame 101 is provided on the top of the support base 1, and three booster pumps 2 are arranged in a row on the top of the support base 1, each booster pump 2 being connected to three different gas delivery pipelines; the booster pumps 2 are externally connected to the four-way gas delivery duct 3, and the three booster pumps 2 are connected to the diamond growth reaction equipment through the four-way gas delivery duct 3; the movable switching element 4 is connected inside the arched support frame 101, and the bottom of the movable switching element 4 is connected to the drive pinion 5, which is alternately connected to the three booster pumps 2; a switching motor 6 is fixedly installed at one end of the arched support frame 101, and a drive motor 8 is installed at the other end of the arched support frame 101; the arched support frame 101 is internally equipped with... It has a transverse screw 7 and a splined shaft 9. The transverse screw 7 is located above the splined shaft 9. The drive shaft of the switching motor 6 is connected to the transverse screw 7, and the drive shaft of the drive motor 8 is connected to the splined shaft 9. The transverse screw 7 is connected to the movable switching part 4, and the splined shaft 9 is connected to the driving pinion 5. The booster pump 2 consists of a main pump body 21, an intake connecting pipe 22, an exhaust connecting pipe 23, an intake check valve 24, an exhaust check valve 25, a transmission crankshaft 26, a pump piston 27, and a transmission connecting rod 28. The bottom of the main pump body 21 is in contact with the support base 1, and the intake pipe 22 and the exhaust pipe 23 are connected to the support base 1. The main pump body 21 is provided with two inverted T-shaped exhaust chambers 2101. The exhaust piston 27 is slidably connected in the T-shaped exhaust chamber 2101. The intake pipe 22 and the exhaust pipe 23 are respectively installed at opposite ends of the bottom of the main pump body 21. The air inlet of the T-shaped exhaust chamber 2101 is connected to the intake pipe 22, and the exhaust outlet of the T-shaped exhaust chamber 2101 is connected to the exhaust pipe 23.

[0025] In this embodiment, the intake check valve 24 is located at the connection between the main pump body 21 and the intake connecting pipe 22, and the exhaust check valve 25 is located at the connection between the main pump body 21 and the exhaust connecting pipe 23. When the exhaust piston 27 moves upward, the intake check valve 24 is in the open state and the exhaust check valve 25 is in the closed state. When the exhaust piston 27 moves downward, the intake check valve 24 is in the closed state and the exhaust check valve 25 is in the open state. The transmission crankshaft 26 is rotatably connected to the main pump body 21. One end of the transmission connecting rod 28 is rotatably connected to the transmission crankshaft 26, and the other end of the transmission connecting rod 28 is rotatably connected to the exhaust piston 27. The transmission crankshaft 26 is connected to the two exhaust pistons 27 through the transmission connecting rod 28. When one of the exhaust pistons 27 moves to the top, the other exhaust piston 27 moves to the bottom. Using the above technical solution, the transmission crankshaft 26 rotates, and the transmission crankshaft 26 drives the two extraction pistons 27 to move up and down reciprocally through the transmission connecting rod 28. During the upward movement of the extraction pistons 27, the exhaust one-way valve 25 is in a closed state, and the gas is drawn into the extraction chamber 2101 through the intake one-way valve 24. During the downward movement of the extraction pistons 27, the intake one-way valve 24 is in a closed state, pressurizing the gas, so that the gas finally enters the diamond growth reaction equipment through the exhaust one-way valve 25. By alternating operation of the upper and lower extraction pistons 27, the gas delivery operation can be realized without interruption, ensuring the gas delivery effect inside the diamond growth reaction equipment.

[0026] In this embodiment, the intake pipe 22 is connected to the gas supply pipeline, and the four-way gas supply duct 3 is connected to the three exhaust pipes 23. Using the above technical solution, the three booster pumps 2 are connected to the corresponding gas pipelines, which can deliver the three different types of gases required for the diamond growth reaction to the inside of the diamond growth reaction equipment to realize the diamond growth reaction.

[0027] In Example 2, based on Example 1, two guide crossbars 1011 are provided inside the arched support frame 101, and two guide holes 401 are symmetrically provided inside the movable switching component 4. The guide crossbars 1011 slide through the guide holes 401. The driving pinion 5 is rotatably connected to the movable switching component 4. The driven large gear 2601 is provided at the end of the transmission crankshaft 26. The driving pinion 5 alternately meshes with three driven large gears 2601. The transverse screw 7 is rotatably connected to the arched support frame 101. The movable switching component 4 is provided with a threaded hole 402. The transverse screw 7 is rotatably connected to the threaded hole 402. The spline shaft 9 is rotatably connected to the arched support frame 101. The driving pinion 5 is provided with a spline hole 501. The spline shaft 9 slides through the spline hole 501. Using the above technical solution, the guide bar 1011 slides with the guide hole 401 to guide the movement of the movable switching component 4. When different types of gas need to be transported, the switching motor 6 drives the transverse screw 7 to rotate. The transverse screw 7 drives the movable switching component 4 to move along the guide bar 1011, so that the driving pinion 5 meshes with the corresponding driven large gear 2601. The drive motor 8 drives the spline shaft 9 to rotate, which in turn drives the driving pinion 5 to rotate. The driving pinion 5 drives the transmission crankshaft 26 to rotate, driving the booster pump 2 to operate and perform precise quantitative gas delivery. By moving and switching the movable switching component 4, different types of gas can be switched sequentially, realizing multi-gas source coordinated control and ensuring the precise quantitative delivery of different types of gas.

[0028] The working principle of this embodiment is as follows: The guide crossbar 1011 slides with the guide hole 401, providing precise guidance for the movement of the movable switching component 4. When different types of gas need to be transported according to process requirements, the switching motor 6 starts, driving the transverse screw 7 to rotate. The rotation of the transverse screw 7 is converted into the linear movement of the movable switching component 4 along the guide crossbar 1011, so that the driving pinion 5 and the target driven large gear 2601 are accurately meshed. At this time, the drive motor 8 drives the spline shaft 9 to rotate, and the spline shaft 9 transmits power to the driving pinion 5, which in turn drives the transmission crankshaft 26 to rotate, and finally drives the booster pump 2 to start running. During the operation of the booster pump 2, the transmission crankshaft 26 rotates continuously and drives the two exhaust pistons 27 to move up and down through the transmission connecting rod 28. When the exhaust piston 27 moves upward, the exhaust check valve 25 automatically closes, and the gas passes through the intake check valve 24 under the action of pressure difference. The gas is drawn into the extraction chamber 2101. When the extraction piston 27 moves downward, the inlet check valve 24 closes, pressurizing the gas in the extraction chamber 2101. The gas is then transported to the diamond growth reaction equipment via the exhaust check valve 25. The alternating operation of the upper and lower extraction pistons 27 ensures continuous and uninterrupted gas delivery, effectively guaranteeing the stability and efficiency of gas delivery within the diamond growth reaction equipment. The three booster extraction and exhaust pumps 2 are connected to corresponding gas pipelines, enabling the simultaneous and accurate delivery of three different types of gas required for diamond growth to the equipment. In actual operation, different types of gas can be switched sequentially according to a preset program, achieving coordinated and precise control of multiple gas sources. This ensures that different types of gas are delivered according to precise proportions and flow rates, providing a reliable gas supply guarantee for high-quality diamond growth.

[0029] The following points should be noted in this article: 1. The accompanying drawings of the embodiments of the present invention only involve the structures involved in the embodiments of the present invention; other structures can refer to general designs.

[0030] 2. Where there is no conflict, the embodiments of the present invention and the features thereof can be combined with each other to obtain new embodiments.

[0031] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A multi-source coordinated control device for conveying reaction gas in diamond growth, comprising: The support base (1), booster exhaust pump (2), four-way gas supply duct (3), movable switching component (4), driving pinion (5), switching motor (6), transverse screw (7), drive motor (8), and spline shaft (9) are characterized in that an arched support frame (101) is provided on the top of the support base (1), and three booster exhaust pumps (2) are installed in an arrangement on the top of the support base (1), and the booster exhaust pumps (2) are respectively connected to three different gas supply pipelines; the booster exhaust pumps (2) are externally connected to a four-way gas supply duct (3), and the three booster exhaust pumps (2) are connected to the diamond growth reaction equipment through the four-way gas supply duct (3); the arched support frame (101) is internally connected to a movable switch. The movable switching component (4) is connected to a driving pinion (5) at its bottom. The driving pinion (5) is alternately connected to three booster exhaust pumps (2). A switching motor (6) is fixedly installed at one end of the arched support frame (101), and a drive motor (8) is installed at the other end of the arched support frame (101). A transverse screw (7) and a spline shaft (9) are installed inside the arched support frame (101). The transverse screw (7) is located above the spline shaft (9). The drive shaft of the switching motor (6) is connected to the transverse screw (7), and the drive shaft of the drive motor (8) is connected to the spline shaft (9). The transverse screw (7) is connected to the movable switching component (4), and the spline shaft (9) is connected to the driving pinion (5).

2. The diamond growth reaction gas delivery device with multi-gas source coordinated control according to claim 1, characterized in that, The booster pump (2) consists of a main pump body (21), an intake connecting pipe (22), an exhaust connecting pipe (23), an intake check valve (24), an exhaust check valve (25), a transmission crankshaft (26), an exhaust piston (27), and a transmission connecting rod (28). The bottom of the main pump body (21) is in contact with the support base (1), and the intake connecting pipe (22) and the exhaust connecting pipe (23) are connected to the support base (1).

3. The diamond growth reaction gas delivery device with multi-gas source coordinated control according to claim 2, characterized in that, The main pump body (21) is provided with two inverted T-shaped exhaust chambers (2101). The exhaust piston (27) is slidably connected in the T-shaped exhaust chamber (2101). The intake pipe (22) and the exhaust pipe (23) are respectively installed at opposite ends of the bottom of the main pump body (21). The intake port of the T-shaped exhaust chamber (2101) is connected to the intake pipe (22), and the exhaust port of the T-shaped exhaust chamber (2101) is connected to the exhaust pipe (23).

4. The diamond growth reaction gas delivery device with multi-gas source coordinated control according to claim 3, characterized in that, The intake check valve (24) is located at the connection between the main pump body (21) and the intake connecting pipe (22), and the exhaust check valve (25) is located at the connection between the main pump body (21) and the exhaust connecting pipe (23).

5. The diamond growth reaction gas delivery device with multi-gas source coordinated control according to claim 4, characterized in that, When the exhaust piston (27) moves upward, the intake check valve (24) is open and the exhaust check valve (25) is closed. When the exhaust piston (27) moves downward, the intake check valve (24) is closed and the exhaust check valve (25) is open.

6. A diamond growth reaction gas delivery device with multi-source coordinated control according to claim 2, characterized in that, The transmission crankshaft (26) is rotatably connected to the main pump body (21). One end of the transmission connecting rod (28) is rotatably connected to the transmission crankshaft (26), and the other end of the transmission connecting rod (28) is rotatably connected to the extraction piston (27). The transmission crankshaft (26) is connected to two extraction pistons (27) through the transmission connecting rod (28). When one extraction piston (27) moves to the top, the other extraction piston (27) moves to the bottom.

7. A diamond growth reaction gas delivery device with multi-gas source coordinated control according to claim 2, characterized in that, The intake pipe (22) is connected to the gas supply pipeline, and the four-way gas supply pipe (3) is connected to the three exhaust pipes (23).

8. A diamond growth reaction gas delivery device with multi-gas source coordinated control according to claim 2, characterized in that, The arched support (101) is provided with two guide crossbars (1011), and the movable switching component (4) is provided with two guide holes (401) symmetrically arranged inside. The guide crossbars (1011) slide through the guide holes (401). The driving pinion (5) is rotatably connected to the movable switching component (4). The end of the transmission crankshaft (26) is provided with a driven large gear (2601). The driving pinion (5) alternately meshes with the three driven large gears (2601).

9. A diamond growth reaction gas delivery device with multi-source coordinated control according to claim 1, characterized in that, The transverse screw (7) is rotatably connected to the arched support (101). The movable switching part (4) is provided with a threaded hole (402). The transverse screw (7) is rotatably connected to the threaded hole (402). The spline shaft (9) is rotatably connected to the arched support (101). The drive pinion (5) is provided with a spline hole (501). The spline shaft (9) slides through the spline hole (501).

Images