Vacuum degree suction device for single crystal furnace

Abstract

The invention provides a single crystal furnace vacuum degree suction device, and belongs to the technical field of single crystal furnace vacuumizing, the single crystal furnace vacuum degree suction device comprises a vacuum pump, an anti-blocking assembly and a filtering dust removal assembly, the vacuum pump is connected with the anti-blocking assembly through a pipeline, and the anti-blocking assembly is connected with the filtering dust removal assembly through a pipeline; when the suction device provided by the invention is used for sucking the waste gas in the single crystal furnace, firstly, the vacuum pump pumps the waste gas in the single crystal furnace and discharges the waste gas to the anti-blocking assembly, and then the anti-blocking assembly generates a non-uniform electric field, so that the non-uniform electric field ionizes the waste gas to perform oil mist adsorption and discharge the oil-removed waste gas; according to the application, oily steam and dust particles in the waste gas of the single crystal furnace are subjected to targeted graded suction treatment through the anti-blocking assembly and the filtering dust removal assembly, so that the problems that the suction force of the vacuum pump is reduced due to pressure building, the shutdown risk exists, and the production efficiency is improved are solved. Therefore, the waste gas in the single crystal furnace can be effectively discharged, and the impurity content of the single crystal is reduced.

Description

Technical Field

[0001] This invention relates to the field of vacuum pumping technology for single crystal furnaces, and particularly to a vacuum pumping device for single crystal furnaces. Background Technology

[0002] A single crystal furnace is a device that melts polycrystalline materials in an inert gas protected environment using a graphite heater and grows dislocation-free single crystals using the Czochralski method. The waste gas generated during the high-temperature melting of polycrystalline materials mainly contains silicon-based dust, such as single-crystal silicon microparticles (PM2.5~PM10), silicon dioxide (vaporized or stripped from the quartz crucible), silicon carbide dust, graphite dust, metal oxides (oxides of Fe, Al, Ca, etc. in silicon raw materials or metal parts), and dopant dust (particles formed by the volatilization of dopants such as boron and phosphorus). During the single crystal pulling process, extracting the waste gas to maintain the vacuum environment of the single crystal furnace can provide an oxidation-free and pure growth environment for single crystal silicon, significantly improving the purity of the crystal.

[0003] Currently, most monocrystalline silicon manufacturers use vacuum pumps to extract waste gas to maintain the vacuum level in the monocrystalline furnace. However, the lubricating oil in the vacuum pump volatilizes hydrocarbon compounds at high temperatures. When these hydrocarbon compounds come into contact with the dust particles, they form oily vapors, resulting in oily vapors in the vacuum-extracted waste gas. When filtering the waste gas containing oily vapors using a dust collector, the oily vapors envelop the dust particles and adhere to the surface of the dust collector, making it difficult to remove. This causes the dust collector to become easily clogged, which in turn reduces the suction force of the vacuum pump and poses a risk of vacuum pump shutdown due to pressure buildup. Ultimately, the waste gas in the monocrystalline furnace cannot be effectively discharged, resulting in a high impurity content in the pulled monocrystalline silicon. Summary of the Invention

[0004] In view of this, and to address the above shortcomings, it is necessary to propose a vacuum suction device for a single crystal furnace. This device addresses the problem that when filtering exhaust gas containing oily vapors, the oily vapors envelop dust particles that adhere to the surface of the dust collector, making it difficult to remove. This causes the dust collector to become easily clogged, leading to a decrease in the suction force of the vacuum pump and the risk of vacuum pump shutdown due to pressure buildup. Ultimately, this results in the exhaust gas in the single crystal furnace not being effectively discharged, causing the pulled single crystals to have a high impurity content.

[0005] This invention provides a vacuum suction device for a single crystal furnace, comprising a vacuum pump, an anti-clogging component, and a filter dust removal component. The vacuum pump is connected to the anti-clogging component via a pipe, and the anti-clogging component is connected to the filter dust removal component via a pipe. The vacuum pump draws in the waste gas inside the single crystal furnace to maintain the vacuum level inside the furnace and discharges the waste gas to the anti-clogging component. The anti-clogging component generates a non-uniform electric field to ionize the waste gas, causing oil mist adsorption and discharge of the oil-removing waste gas. The filter dust removal component filters dust particles from the oil-removing waste gas and discharges the dust-removing waste gas.

[0006] Preferably, the anti-clogging component includes a high-voltage DC power supply, a negative electrode discharge section, a positive electrode adsorption section, and a first extraction section. An ionization channel exists between the negative electrode discharge section and the positive electrode adsorption section. The inlet of the ionization channel is connected to the vacuum pump via a pipe, and the outlet of the ionization channel is connected to the filter dust removal component via a pipe. The first extraction section is located at the outlet of the ionization channel. The negative electrode discharge section is electrically connected to the negative electrode of the high-voltage DC power supply. The positive electrode adsorption section is connected to ground via a wire. The high-voltage DC power supply supplies high-voltage DC current to the negative electrode discharge section to create a non-uniform electric field within the ionization channel. Exhaust gas passes through the ionization channel, and the non-uniform electric field ionizes the exhaust gas, causing the oily vapors in the exhaust gas to carry a negative charge. The positive electrode adsorption section adsorbs the negatively charged oily vapors to form an oil film. The first extraction section extracts the gas from the ionization channel and discharges the oil-removed exhaust gas to the filter dust removal component.

[0007] Preferably, the anti-clogging component further includes an oil collection hopper and an electromagnetic vibrator. The oil collection hopper is disposed below the positive electrode adsorption part, and the electromagnetic vibrator is used to vibrate the positive electrode adsorption part so that the oil film attached to the positive electrode adsorption part falls into the oil collection hopper.

[0008] Preferably, the filtration and dust removal assembly includes a filter cartridge dust removal section and a second extraction section. The inlet of the filter cartridge dust removal section is connected to the anti-clogging assembly through a pipe. The second extraction section is disposed at the outlet of the filter cartridge dust removal section. The filter cartridge dust removal section is used to filter dust particles in the oil removal exhaust gas. The second extraction section draws gas from the filter cartridge dust removal section and discharges the dust removal exhaust gas.

[0009] Preferably, the filtration and dust removal assembly further includes a dust collection hopper and a pulse purging unit. The dust collection hopper is disposed below the filter cartridge dust removal unit, and the pulse purging unit is used to spray gas to purge dust particles attached to the filter cartridge dust removal unit, so that the dust particles fall into the dust collection hopper.

[0010] Preferably, the filtration and dust removal assembly further includes a filter press, which is disposed inside the dust collection hopper. The output end of the filter press extends and retracts within the dust collection hopper, compressing the dust particles inside the dust collection hopper to form dust blocks.

[0011] Preferably, the vacuum suction device for the single crystal furnace further includes two washing and filtering components. The outlet of the dust removal and filtering component is connected to the bottom inlet of one of the washing and filtering components through a pipe, and the top outlet of one of the washing and filtering components is connected to the bottom inlet of the other washing and filtering component through a pipe. The washing and filtering components are used to wash the dust removal exhaust gas to capture soluble pollutants in the dust removal exhaust gas and obtain exhaustable gas.

[0012] Preferably, the washing and filtering assembly includes a washing section, a third extraction section, a spray section, and a reagent holding section. The washing section has a washing channel with an outlet at the top and an inlet at the bottom. The third extraction section is located at the outlet at the top of the washing channel, and the spray section is located at the top of the washing channel. The spray section draws the reagent from the reagent holding section and sprays it onto the dust removal exhaust gas from top to bottom within the washing channel. The third extraction section extracts the dust removal exhaust gas from the washing channel, allowing the dust removal exhaust gas to flow from bottom to top within the washing channel.

[0013] Preferably, the washing and filtering assembly further includes a plurality of Pall rings, which fill the washing channel, and the spray section draws the liquid medicine from the medicine holding section and sprays it onto the plurality of Pall rings.

[0014] Preferably, the washing and filtering assembly further includes a demisting layer, which is disposed at the outlet of the washing channel and is used to adsorb water vapor for dehydration and demisting.

[0015] As can be seen from the above technical solution, the vacuum suction device for a single crystal furnace provided by the present invention includes a vacuum pump, an anti-clogging component, and a filter and dust removal component. The vacuum pump is connected to the anti-clogging component through a pipe, and the anti-clogging component is connected to the filter and dust removal component through a pipe. When using the suction device provided by this application to suction the exhaust gas in the single crystal furnace, the vacuum pump first suctions the exhaust gas in the single crystal furnace to maintain the vacuum level in the single crystal furnace and discharges the exhaust gas to the anti-clogging component. Then, the anti-clogging component generates a non-uniform electric field, which ionizes the exhaust gas to adsorb oil mist and discharge the oil-removed exhaust gas. Subsequently, the filter and dust removal process is performed. The component filters out dust particles from the oily exhaust gas and discharges them into the dust removal exhaust gas. To address this, this application uses anti-clogging components and filter dust removal components to specifically and progressively extract and treat oily vapors and dust particles in the exhaust gas from the single crystal furnace. This avoids the problem of oily vapors enveloping dust particles and adhering to the filter dust removal components, making them difficult to clean and causing pipe blockages. This ensures the smoothness of the suction channel and prevents the vacuum pump's suction power from decreasing due to pressure buildup, thus preventing the risk of vacuum pump shutdown. This allows the exhaust gas in the single crystal furnace to be effectively discharged, reducing the impurity content of the single crystal. Attached Figure Description

[0016] Figure 1 This is a flowchart of the vacuum suction device for a single crystal furnace.

[0017] Figure 2 A schematic diagram of the functional modules of the anti-clogging component.

[0018] Figure 3 This is a schematic diagram of a filtration and dust removal assembly.

[0019] Figure 4 This is a schematic diagram of the washing and filtering assembly.

[0020] The single crystal furnace vacuum suction device 10, vacuum pump 110, anti-clogging component 120, high voltage DC power supply 121, negative electrode discharge section 122, positive electrode adsorption section 123, first extraction section 124, oil collection hopper 125, electromagnetic vibrator 126, current monitoring unit 127, current analysis unit 128, cleaning control unit 129, filter dust removal component 130, filter cartridge dust removal section 131, second extraction section 132, dust collection hopper 133, pulse purging section 134, pressure filter section 135, washing filter component 140, washing section 141, third extraction section 142, spray section 143, reagent storage section 144, Pall ring 145, and demisting layer 146. Detailed Implementation

[0021] To further understand the present invention, preferred embodiments of the present invention are described below in conjunction with examples. However, it should be understood that these descriptions are only for further illustrating the features and advantages of the present invention, and not for limiting the scope of the claims of the present invention.

[0022] Please refer to Figures 1 to 4 This invention provides a vacuum suction device 10 for a single crystal furnace, including a vacuum pump 110, an anti-clogging component 120, and a filter and dust removal component 130. The vacuum pump 110 is connected to the anti-clogging component 120 via a pipe, and the anti-clogging component 120 is connected to the filter and dust removal component 130 via a pipe. The vacuum pump 110 draws in the exhaust gas from the single crystal furnace to maintain the vacuum level inside the furnace and discharges the exhaust gas to the anti-clogging component 120. The anti-clogging component 120 generates a non-uniform electric field to ionize the exhaust gas, allowing for oil mist adsorption and discharge of the oil-removed exhaust gas. The filter and dust removal component 130 is used for filtration. Dust particles in the oil removal exhaust gas are discharged into the dust removal exhaust gas. To address this, this application uses an anti-clogging component 120 and a filter dust removal component 130 to specifically and progressively extract and treat the oily vapors and dust particles in the exhaust gas from the single crystal furnace. This avoids the problem of the filter dust removal component 130 being difficult to clean and the pipes being blocked due to oily vapor enveloping dust adhering to it, thus ensuring the smoothness of the suction channel. This prevents the risk of reduced suction power and shutdown of the vacuum pump 110 due to pressure buildup, allowing the exhaust gas in the single crystal furnace to be effectively discharged, thereby reducing the impurity content of the single crystal.

[0023] Furthermore, the anti-clogging component 120 includes a high-voltage DC power supply 121, a negative electrode discharge section 122, a positive electrode adsorption section 123, and a first extraction section 124. An ionization channel is formed between the negative electrode discharge section 122 and the positive electrode adsorption section 123. The inlet of the ionization channel is connected to the vacuum pump 110 via a pipe, and the outlet of the ionization channel is connected to the filter dust removal component 130 via a pipe. The first extraction section 124 is located at the outlet of the ionization channel. The negative electrode discharge section 122 is connected to the high-voltage DC power supply 121. The negative electrode of 1 is electrically connected, and the positive electrode adsorption part 123 is connected to the ground through a wire. The high voltage DC power supply 121 supplies high voltage DC power to the negative electrode discharge part 122 to form a non-uniform electric field in the ionization channel. The waste gas passes through the ionization channel, and the non-uniform electric field ionizes the waste gas, so that the oil vapor in the waste gas carries a negative charge. The positive electrode adsorption part 123 adsorbs the negatively charged oil vapor to form an oil film. The first extraction part 124 extracts the gas in the ionization channel and discharges the oil-removed waste gas to the filter dust removal assembly 130.

[0024] In a preferred embodiment, to improve the adsorption effect on oily vapors, the negative electrode discharge section 122 is a hollow plate-shaped metal wire structure, and each metal wire is electrically connected to the negative electrode of the high-voltage DC power supply 121 to form a discharge matrix, so that the negative electrode discharge section 122 has dense ionization points to expand the coverage of non-uniform electric field ionization. The positive electrode adsorption section 123 is a solid plate-shaped structure, and its bottom end is connected to the ground through a wire to expand the adsorption area. At the same time, the solid plate-shaped structure facilitates the subsequent vibration and cleaning of the oil film by the electromagnetic vibrator 126. In this regard, the electromagnetic vibrator only needs to vibrate the solid plate-shaped structure at a single point to drive the entire positive electrode adsorption section 123 of the solid plate-shaped structure to vibrate and achieve comprehensive cleaning.

[0025] Furthermore, in order to extend the service life of the positive electrode adsorption section 123 and prevent the oil film adsorbed on the positive electrode adsorption section 123 from carbonizing and coking, which would cause the positive electrode adsorption section 123 to short-circuit and fail, the anti-clogging component 120 also includes an oil collection hopper 125 and an electromagnetic vibrator 126. The oil collection hopper 125 is located below the positive electrode adsorption section 123, and the electromagnetic vibrator 126 is used to vibrate the positive electrode adsorption section 123 so that the oil film attached to the positive electrode adsorption section 123 falls into the oil collection hopper 125.

[0026] In a preferred embodiment, in order to monitor the oil film condition adsorbed on the positive electrode adsorption part 123 in real time and thus automatically clean the oil film from the positive electrode adsorption part 123, the anti-clogging component 120 further includes a current monitoring unit 127, a current analysis unit 128, and a cleaning control unit 129. The positive electrode adsorption part 123, the current monitoring unit 127, the current analysis unit 128, the cleaning control unit 129, and the electromagnetic vibrator 126 are sequentially and electrically connected. The current monitoring unit 127 collects the current of the positive electrode adsorption part 123 in real time to obtain the status current and transmits the status current to the current analysis unit. Unit 128 receives the status current and compares it with a pre-stored current threshold. If the current is less than the preset current threshold, it indicates that the positive electrode adsorption part 123 needs to be cleaned of oil film, generating a cleaning task and transmitting the cleaning task to the cleaning control unit 129. If the current is greater than the preset current threshold, it indicates that the positive electrode adsorption part 123 does not need to be cleaned of oil film. After receiving the cleaning task, the cleaning control unit 129 controls the electromagnetic vibrator 126 to vibrate the positive electrode adsorption part 123 so that the oil film attached to the positive electrode adsorption part 123 falls into the oil collection hopper 125.

[0027] Furthermore, the filter dust removal assembly 130 includes a filter cartridge dust removal section 131 and a second extraction section 132. The inlet of the filter cartridge dust removal section 131 is connected to the anti-clogging assembly 120 through a pipe, and the second extraction section 132 is disposed at the outlet of the filter cartridge dust removal section 131. The filter cartridge dust removal section 131 is used to filter dust particles in the oil removal exhaust gas, and the second extraction section 132 draws gas from the filter cartridge dust removal section 131 and discharges the dust removal exhaust gas.

[0028] In a preferred embodiment, the filter cartridge dust removal section 131 is a nanotube filter. When the second extraction section 132 extracts the oil-removed exhaust gas through the nanotube filter, the dust particles in the oil-removed exhaust gas are trapped in the nanotube filter through friction and collision for dust removal and filtration.

[0029] Furthermore, the filter dust removal assembly 130 also includes a dust collection hopper 133 and a pulse purging unit 134. The dust collection hopper 133 is located below the filter cartridge dust removal unit 131, and the pulse purging unit 134 is used to spray gas to purge dust particles attached to the filter cartridge dust removal unit 131 so that the dust particles fall into the dust collection hopper 133.

[0030] In a preferred embodiment, the pulse purging unit 134 is a telescopic rotary nozzle. The telescopic rotary nozzle is connected to a pressure tank through an air pipe. The pressure tank supplies purging gas to the telescopic rotary nozzle. The telescopic rotary nozzle extends into the nanotube filter and sprays gas to purge dust particles attached to the nanotube filter, so that the dust particles fall into the dust collection hopper 133.

[0031] Furthermore, in order to prevent the dry dust particles obtained after oil removal from falling into the dust collection hopper 133 and being re-entrained, the filter dust removal assembly 130 also includes a filter press 135. The filter press 135 is disposed in the dust collection hopper 133, and the output end of the filter press 135 extends and retracts in the dust collection hopper 133 to compress the dust particles in the dust collection hopper 133 to form dust blocks.

[0032] Furthermore, in order to dissolve soluble pollutants in the oil removal exhaust gas to obtain exhaustable gas, the single crystal furnace vacuum suction device 10 also includes two washing and filtering components 140. There are two washing and filtering components 140. The outlet of the dust removal and filtering component 130 is connected to the bottom inlet of one of the washing and filtering components 140 through a pipe. The top outlet of one washing and filtering component 140 is connected to the bottom inlet of the other washing and filtering component 140 through a pipe, so that the exhaustable gas is discharged through the top outlet of the other washing and filtering component 140, thereby reducing the height of the washing and filtering components 140. The washing and filtering components 140 are used to wash the dust removal exhaust gas to capture soluble pollutants in the dust removal exhaust gas to obtain exhaustable gas.

[0033] Furthermore, the washing and filtering assembly 140 includes a washing section 141, a third extraction section 142, a spray section 143, and a reagent holding section 144. The washing section 141 has a washing channel with an outlet at the top and an inlet at the bottom. The third extraction section 142 is disposed at the outlet at the top of the washing channel, and the spray section 143 is disposed at the top of the washing channel. The spray section 143 draws the reagent solution in the reagent holding section 144 and sprays it from top to bottom in the washing channel to wash the dust removal exhaust gas. The third extraction section 142 extracts the dust removal exhaust gas in the washing channel so that the dust removal exhaust gas flows from bottom to top in the washing channel.

[0034] In a preferred embodiment, the washing section 141 is a washing tower. The dust removal exhaust gas enters from the bottom of the first washing tower and exits from the top, and then enters from the bottom of the second washing tower and exits from the top. The spray head of the spray section 143 is set at the top of the washing tower so that the upward flow of the dust removal exhaust gas and the downward spray of the liquid form a countercurrent contact, thereby fully increasing the contact probability between the dust removal exhaust gas and the liquid.

[0035] Furthermore, in order to increase the contact area between the dust removal exhaust gas and the liquid medicine, the washing and filtering assembly 140 also includes a number of Pall rings 145. The number of Pall rings 145 fills the washing channel, and the spray section 143 draws the liquid medicine in the medicine holding section 144 and sprays it onto the number of Pall rings 145.

[0036] In this application, the Pall ring 145 is the prior art, which has many rectangular holes on its ring wall. These holes allow the gas and liquid phases to contact and mix more fully. When the liquid flows through the holes, it is dispersed into smaller droplets or liquid films, increasing the surface area of ​​the liquid, thereby increasing the gas-liquid mass transfer area and improving the mass transfer efficiency.

[0037] Furthermore, the washing and filtering assembly 140 also includes a demisting layer 146, which is disposed at the outlet of the washing channel and is used to adsorb water vapor for dehydration and demisting.

[0038] In a preferred embodiment, since the soluble pollutants in the oil removal exhaust gas are gaseous acidic substances, soluble metal ions, oil mist pyrolysis organic matter, and micron-sized droplets, the first scrubbing tower can be filled with Pall rings 145 and sprayed with NaOH solution. This allows the first scrubbing tower to neutralize the gaseous acidic substances and react with soluble metal ions to generate precipitates. The second scrubbing tower can be equipped with a wire mesh demister layer 146 and sprayed with NaClO solution. This allows the second scrubbing tower to oxidize and decompose the oil mist pyrolysis organic matter and intercept the micron-sized droplets. In this way, the soluble pollutants in the oil removal exhaust gas are removed in a gradient and thorough manner, ultimately yielding exhaustable gas.

[0039] The above description discloses only preferred embodiments of the present invention and should not be construed as limiting the scope of the invention. Those skilled in the art will understand that implementing all or part of the above embodiments and making equivalent changes in accordance with the claims of the present invention are still within the scope of the invention.

Claims

1. A vacuum suction device for a single crystal furnace, characterized in that: The system includes a vacuum pump, an anti-clogging component, and a filter and dust removal component. The vacuum pump is connected to the anti-clogging component via a pipe, and the anti-clogging component is connected to the filter and dust removal component via a pipe. The vacuum pump draws in the exhaust gas from the single crystal furnace to maintain the vacuum level inside the furnace and discharges the exhaust gas to the anti-clogging component. The anti-clogging component generates a non-uniform electric field to ionize the exhaust gas, causing oil mist adsorption and discharge of the oil-removing exhaust gas. The filter and dust removal component filters dust particles from the oil-removing exhaust gas and discharges the dust-removing exhaust gas.

2. The vacuum suction device for a single crystal furnace according to claim 1, characterized in that: The anti-clogging component includes a high-voltage DC power supply, a negative electrode discharge section, a positive electrode adsorption section, and a first extraction section. An ionization channel exists between the negative electrode discharge section and the positive electrode adsorption section. The inlet of the ionization channel is connected to the vacuum pump via a pipe, and the outlet of the ionization channel is connected to the filter dust removal component via a pipe. The first extraction section is located at the outlet of the ionization channel. The negative electrode discharge section is electrically connected to the negative electrode of the high-voltage DC power supply. The positive electrode adsorption section is connected to ground via a wire. The high-voltage DC power supply supplies high-voltage DC current to the negative electrode discharge section to create a non-uniform electric field within the ionization channel. Exhaust gas passes through the ionization channel, and the non-uniform electric field ionizes the exhaust gas, causing the oily vapors in the exhaust gas to carry a negative charge. The positive electrode adsorption section adsorbs the negatively charged oily vapors to form an oil film. The first extraction section extracts the gas from the ionization channel and discharges the oil-removed exhaust gas to the filter dust removal component.

3. The vacuum suction device for a single crystal furnace according to claim 2, characterized in that: The anti-clogging component also includes an oil collection hopper and an electromagnetic vibrator. The oil collection hopper is located below the positive electrode adsorption part, and the electromagnetic vibrator is used to vibrate the positive electrode adsorption part so that the oil film attached to the positive electrode adsorption part falls into the oil collection hopper.

4. The vacuum suction device for a single crystal furnace according to claim 1, characterized in that: The filtration and dust removal assembly includes a filter cartridge dust removal section and a second extraction section. The inlet of the filter cartridge dust removal section is connected to the anti-clogging assembly through a pipe. The second extraction section is located at the outlet of the filter cartridge dust removal section. The filter cartridge dust removal section is used to filter dust particles in the oil removal exhaust gas. The second extraction section draws gas from the filter cartridge dust removal section and discharges the dust removal exhaust gas.

5. The vacuum suction device for a single crystal furnace according to claim 4, characterized in that: The dust removal and filtration assembly also includes a dust collection hopper and a pulse purging unit. The dust collection hopper is located below the dust removal unit of the filter cartridge, and the pulse purging unit is used to spray gas to purge dust particles attached to the dust removal unit of the filter cartridge, so that the dust particles fall into the dust collection hopper.

6. The vacuum suction device for a single crystal furnace according to claim 5, characterized in that: The dust removal and filtration assembly also includes a filter press, which is disposed inside the dust collection hopper. The output end of the filter press extends and retracts within the dust collection hopper, compressing the dust particles inside the dust collection hopper to form dust blocks.

7. The vacuum suction device for a single crystal furnace according to claim 1, characterized in that: The vacuum suction device for the single crystal furnace also includes two washing and filtering components. The outlet of the dust removal and filtering component is connected to the bottom inlet of one of the washing and filtering components through a pipe, and the top outlet of one of the washing and filtering components is connected to the bottom inlet of the other washing and filtering component through a pipe. The washing and filtering components are used to wash the dust removal exhaust gas to capture soluble pollutants in the dust removal exhaust gas and obtain exhaustable gas.

8. The vacuum suction device for a single crystal furnace according to claim 7, characterized in that: The washing and filtering assembly includes a washing section, a third extraction section, a spray section, and a reagent holding section. The washing section has a washing channel with an outlet at the top and an inlet at the bottom. The third extraction section is located at the outlet at the top of the washing channel. The spray section is located at the top of the washing channel so that the spray section draws the reagent from the reagent holding section and sprays it onto the dust removal exhaust gas from top to bottom within the washing channel. The third extraction section draws the dust removal exhaust gas from the washing channel so that the dust removal exhaust gas flows from bottom to top within the washing channel.

9. The vacuum suction device for a single crystal furnace according to claim 8, characterized in that: The washing and filtering assembly also includes a plurality of Pall rings, which fill the washing channel. The spray section draws the liquid medicine from the medicine holding section and sprays it onto the plurality of Pall rings.

10. The vacuum suction device for a single crystal furnace according to claim 8, characterized in that: The washing and filtering assembly also includes a demisting layer, which is disposed at the outlet of the washing channel and is used to adsorb water vapor for dehydration and demisting.

Images