A multi-point measurement optical thin film thickness measuring device

Abstract

This invention discloses a multi-point measurement optical thin film thickness measuring device, relating to the field of optical thin film preparation technology. The device has a connecting ring rotatably connected to its annular housing via bearings. Multiple crystal oscillator mounting stations are circumferentially distributed on the connecting ring. Each station is secured to the crystal oscillator by a limiting component, a mounting component, and a locking component. Inside the device are a first driving component and a second driving component, driven by a power component. The power component can intermittently drive the first driving component to rotate the connecting ring to switch crystal oscillators, and drive the second driving component to move a top-mounting component back and forth. The top-mounting component can precisely push the crystal oscillator to be used to the detection hole and achieve electrical connection. This invention achieves fully automatic, uninterrupted cyclic replacement and measurement of crystal oscillators in a vacuum environment, completely avoiding process interruptions, low efficiency, and chamber contamination problems caused by breaking the vacuum to replace crystal oscillators, significantly improving the efficiency and product quality of coating production.

Description

Technical Field

[0001] This invention relates to the field of thin film thickness measurement technology, and in particular to a multi-point measurement optical thin film thickness measurement device. Background Technology

[0002] In the field of optical manufacturing, optical vacuum coating is the core technology for preparing various functional optical thin films (such as antireflection films, high reflectivity films, beam splitters, filters, etc.). This technology vaporizes the film material and deposits it on the surface of optical components (such as lenses, prisms, substrates) through physical or chemical methods in a high vacuum environment to form a thin film layer with specific optical properties, precise thickness and excellent stability.

[0003] The performance of optical thin films is extremely sensitive to their thickness and refractive index. Their thickness is typically a fraction of the wavelength of light, even a fraction of a nanometer, thus requiring atomic-level precision in thickness control. Currently, the industry commonly uses film thickness monitoring systems based on the Quartz Crystal Microbalance (QCM) principle for real-time monitoring. These systems utilize a Quartz Crystal Sensor, which employs the piezoelectric effect to precisely calculate and control the thickness and rate of film deposition by monitoring changes in the resonant frequency caused by film deposition.

[0004] However, as a consumable component, the crystal oscillator has a physical upper limit to its effective working life. As the deposited film accumulates on the surface, the resonant frequency of the crystal oscillator will continuously decrease. When its frequency deviation exceeds a certain percentage (typically 5%-10%) of the initial frequency, its monitoring sensitivity, linearity, and accuracy will drop sharply, eventually leading to monitoring failure. Therefore, the crystal oscillator must be replaced periodically to ensure the reliability of monitoring data throughout the coating process.

[0005] Currently, the vast majority of optical vacuum coating equipment uses the traditional method of manually replacing the crystal oscillator. The basic operating procedure is as follows:

[0006] When the film thickness monitoring system issues an alarm indicating that the lifespan of the crystal oscillator is about to expire, the operator must immediately stop the current coating process.

[0007] 1. Break the vacuum in the deposition chamber of the vacuum coating machine, restoring it from a high vacuum state to normal pressure;

[0008] 2. Open the chamber cover or gate and manually disassemble the crystal oscillator that has failed or is about to fail;

[0009] 3. Clean the mounting base and carefully install the new crystal oscillator, ensuring good electrode contact;

[0010] 4. Reseal the chamber and activate the vacuum system to evacuate the chamber back to the high vacuum level required for the process (typically 10⁻³ Pa to 10⁻⁻⁴ Pa). 5 Pa or higher);

[0011] 5. The coating process can only be restarted after the vacuum level has stabilized and baking and degassing are usually required for a period of time.

[0012] The aforementioned existing technologies have the following prominent shortcomings that urgently need to be addressed:

[0013] It severely disrupts production continuity and efficiency: Each time a crystal oscillator is replaced, it means a complete interruption of the process. The process of breaking and re-vacuuming is extremely time-consuming. For large optical coating machines, this process may take tens of hours or even longer. This greatly reduces the utilization efficiency of the equipment, increases the production cycle and energy consumption cost of a single product, and seriously restricts production capacity, making it impossible to meet the urgent needs of mass production and high-efficiency production of modern optical components.

[0014] Introducing contaminants can jeopardize the optical performance of thin films: When the vacuum chamber is broken and exposed to the atmospheric environment, contaminants such as water vapor, grease, and dust will inevitably be introduced. These contaminants will be adsorbed on the inner wall of the chamber, baffles, film material, and substrate holder, and will be slowly released during subsequent high-temperature and high-vacuum processes, causing fatal defects such as scattering, absorption, pinholes, abnormal stress, or decreased adhesion of the thin film. For high-end applications such as high-performance laser thin films and aerospace-grade optical thin films, such contamination is absolutely unacceptable and will directly lead to a sharp drop in product yield.

[0015] Unable to achieve ultra-multilayer films and ultra-long cycle processes: Modern complex optical filters often require the deposition of hundreds of thin films, and the total process time may exceed 24 hours, far exceeding the life limit of a single crystal oscillator. The drawbacks of manual replacement mode make the implementation of such advanced processes difficult and uneconomical.

[0016] To address the above issues, although there are ideas to adopt complex multi-arm structures, these solutions often suffer from problems such as complex structure, high cost, large chamber space occupation, difficulty in guaranteeing reliability, and poor compatibility with existing mainstream coating equipment.

[0017] Therefore, there is an urgent need in this field for a novel automated device that is ingeniously designed, stable in operation, and can be seamlessly integrated into existing optical vacuum coating machines. This device must be able to safely, reliably, and quickly perform the automatic replacement of crystal oscillators while maintaining a completely vacuum environment in the chamber and uninterrupted process, thereby completely eliminating the inherent drawbacks of manual replacement and providing key technical support for achieving high-efficiency, high-performance, high-consistency, and fully automated production of optical coatings. Summary of the Invention

[0018] The purpose of this invention is to address the shortcomings of existing technologies by proposing a multi-point measurement optical thin film thickness measuring device.

[0019] To achieve the above objectives, the present invention adopts the following technical solution: a multi-point measuring optical thin film thickness measuring device, comprising a body, an annular shell fixedly connected to the front side of the body, an mounting shell fixedly connected to the middle position of the rear side of the body, a sealing cover plate provided on the front side of the body and the annular shell, a detection hole provided on the right side of the sealing cover plate, a connecting ring rotatably connected to the rear side inside the annular shell, a toothed ring fixedly connected to the outer ring of the front side of the connecting ring, a bearing provided between the inner ring of the connecting ring and the annular shell, a plurality of openings distributed circumferentially on the connecting ring, limit components provided on both sides of the openings on the front side of the connecting ring, mounting components provided between the limit components, locking components provided on the front side of the mounting components, and a crystal oscillator provided between the locking components and the mounting components;

[0020] A top-mounted assembly is located inside the machine body on the right side, behind the detection hole, and is used to move the crystal oscillator and energize it;

[0021] The first drive assembly is disposed on the left and right sides inside the body and is used to drive the gear ring to rotate.

[0022] The second drive assembly is located on the right side inside the body and is used to drive the top assembly to move.

[0023] A power assembly, which is disposed inside the mounting housing, is used to intermittently drive the first drive assembly and the second drive assembly.

[0024] Furthermore, a first ear plate is fixedly connected to the middle position of each of the left and right sides of the machine body, and a second ear plate is fixedly connected to the middle position of each of the left and right sides of the sealing cover. Locking bolts are provided between the first ear plate and the second ear plate. A sealing gasket is provided between the sealing cover and the machine body and the annular shell. A third ear plate is fixedly connected to each of the four corners of the rear side of the mounting shell. A cable is fixedly connected to the middle position of the rear side of the mounting shell. A sealing ring is fixedly connected to the outer ring of the cable on the rear side of the mounting shell.

[0025] Furthermore, the limiting component includes a connecting frame, and a second limiting rod is fixedly connected inside the connecting frame. A spring is sleeved on the outer front end of each of the second limiting rods. The mounting component includes a moving ring, and sliders are fixedly connected to both sides of the moving ring. The sliders are slidably connected to the corresponding second limiting rods. An external threaded ring is fixedly connected to the front end of the moving ring. The locking component includes a retaining ring, and a slot is provided inside the retaining ring. The front side of the crystal oscillator is engaged with the rear side of the slot. The retaining ring is threadedly connected to the external threaded ring. A chamfer structure is provided on the front side of the retaining ring, and a sealing gasket is provided on the outer side of the chamfer. The rear side of the inside of the detection hole has the same chamfer structure as the retaining ring.

[0026] Furthermore, the first drive assembly includes a first fixed base, a second rotating shaft, a third rotating shaft, a fourth rotating shaft, and a fifth rotating shaft. The first fixed base is fixedly connected to the rear side of the machine body near the left end. The first rotating shaft is rotatably connected to the first fixed base. A first sprocket and a first power gear are fixedly connected to the left and right ends of the first rotating shaft, respectively. The second rotating shaft is rotatably connected to the left side wall of the machine body. A third sprocket, a second sprocket, and a first conveying gear are fixedly connected to the second rotating shaft from left to right. The first sprocket and the second sprocket are driven by a first chain. The third rotating shaft is horizontally rotatably connected to the bottom end of the machine body between the left and right side walls. A fourth sprocket is fixedly connected to both ends of the rotating shaft. The fourth sprocket on the left side is driven by a second chain to the third sprocket. The fourth rotating shaft is rotatably connected to the right side wall inside the machine body. A fifth sprocket and a first transmission gear are fixedly connected to the left and right ends of the fourth rotating shaft, respectively. The fourth sprocket on the right side is driven by a third chain to the fifth sprocket. The fifth rotating shaft is rotatably connected to the right side inside the machine body above the fourth rotating shaft. A second conveying gear and a second transmission gear are fixedly connected to the left and right ends of the fifth rotating shaft, respectively. The first transmission gear and the second transmission gear are meshed together. Both the first conveying gear and the second conveying gear are meshed together with a gear ring.

[0027] Furthermore, the second drive assembly includes a second fixed base, a reciprocating lead screw, and a seventh rotating shaft. The second fixed base is fixedly connected to the rear side of the machine body near the right side. A sixth rotating shaft is rotatably connected to the second fixed base. A second power gear and a worm gear are fixedly connected to the left and right ends of the sixth rotating shaft, respectively. The reciprocating lead screw is rotatably connected to the rear right side of the machine body. First limit rods are fixedly connected to the upper and lower sides of the reciprocating lead screw on the rear side of the machine body. A seventh sprocket is fixedly connected to the rear end of the reciprocating lead screw. The seventh rotating shaft is rotatably connected to the rear side of the machine body on the left side of the reciprocating lead screw. The sixth sprocket is fixedly connected to the rear end of the seventh rotating shaft. The sixth sprocket and the seventh sprocket are driven by a fourth chain. A worm gear is fixedly connected to the front end of the seventh rotating shaft. The worm gear meshes with the worm gear.

[0028] Furthermore, the power assembly includes a drive motor fixedly connected inside the mounting housing. A first incomplete end face gear is fixedly connected to the output end of the drive motor. A connecting shaft is fixedly connected to the middle position of the front end of the first incomplete end face gear. A second incomplete end face gear is fixedly connected to the front end of the connecting shaft. The end teeth of the first incomplete end face gear occupy one-sixth of the total area, and the end teeth of the second incomplete end face gear occupy two-thirds of the total area. The end teeth are evenly divided into two parts and symmetrically arranged on both sides. The first incomplete end face gear meshes intermittently with the first power gear, and the second incomplete end face gear meshes intermittently with the second power gear.

[0029] Furthermore, the top assembly includes a connecting plate and a plug rod. The connecting plate has a through hole in the middle, which is sleeved and connected to a reciprocating lead screw. A connecting block is provided inside the through hole, and the connecting block is slidably connected to the reciprocating groove of the reciprocating lead screw. Sliding holes are provided on both the upper and lower sides of the connecting plate, and the sliding holes are slidably connected to the corresponding first limiting rods. The plug rod is fixedly connected to the left and right sides of the connecting plate, and an electrode rod is fixedly connected to the front end of each plug rod.

[0030] The beneficial effects of this invention are:

[0031] Fully automated uninterrupted measurement was achieved: through mechanical structure and control logic, the switching, positioning, power-on and measurement of crystal oscillators were completed automatically while maintaining the vacuum level of the coating chamber and the continuity of the process, which greatly improved the equipment utilization and production efficiency.

[0032] Effectively avoids chamber contamination: It eliminates the possibility of introducing contaminants such as water vapor and dust due to frequent vacuum breaking and crystal oscillator replacement, fundamentally ensuring the high purity and performance of the optical thin film layer, and is particularly suitable for applications with extremely high cleanliness requirements such as high-performance laser thin films and aerospace-grade optical thin films.

[0033] Improve measurement consistency and reliability: The use of mechanical automatic positioning and clamping ensures the positional accuracy of the crystal oscillator and the reliability of electrode contact during each operation, eliminating errors and uncertainties caused by manual operation, and ensuring the consistency and accuracy of film thickness monitoring data between different crystal oscillators and between different coating batches.

[0034] Supports ultra-long cycles and complex processes: It has multiple built-in crystal oscillators that can be automatically replaced. Its total effective working time far exceeds the lifespan of a single crystal oscillator, making it possible to complete ultra-complex optical filter coating processes that require the deposition of hundreds of layers and take tens of hours, thus expanding the equipment's process capabilities.

[0035] Compact structure and high integration: The entire device is ingeniously designed, with the drive, transmission and execution mechanisms all integrated inside the machine body. Two independent motion sequences can be controlled by a single power source (drive motor) and a set of intermittent mechanisms. The structure is reliable and easy to integrate with existing coating equipment. Attached Figure Description

[0036] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description of the specific embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0037] Figure 1 This is a front view of the present invention;

[0038] Figure 2 This is a rear view of the present invention;

[0039] Figure 3 This is a schematic diagram of the mounting structure of the limiting component, mounting component, and locking component of the present invention;

[0040] Figure 4 This is a schematic diagram of the installation structure of the limiting component and the mounting component of the present invention;

[0041] Figure 5 This is a schematic diagram of the structure of the first drive component and the power component of the present invention;

[0042] Figure 6 This is a schematic diagram of the structure of the first driving component and the second driving component of the present invention;

[0043] Figure 7 This is a schematic diagram of the mounting structure of the first power gear and the second power gear of the present invention;

[0044] Figure 8 This is a schematic diagram of the top-mounted component structure of the present invention;

[0045] Figure 9 This is a schematic diagram of the sealing cover structure of the present invention;

[0046] Figure 10 This is a schematic diagram of the limiting component structure of the present invention;

[0047] Figure 11 This is a schematic diagram of the installation component structure of the present invention;

[0048] Figure 12 This is a front view of the locking assembly and crystal oscillator of the present invention;

[0049] Figure 13 This is a rear view of the locking assembly and crystal oscillator of the present invention;

[0050] Figure 14 This is a schematic diagram of the card slot structure of the present invention;

[0051] Figure 15 This is a front view of the first incomplete end face gear and the second incomplete end face gear of the present invention.

[0052] Figure 16 This is a rear view of the first incomplete end face gear and the second incomplete end face gear of the present invention.

[0053] The attached figures are labeled as follows:

[0054] 1. Body; 2. Annular shell; 3. Mounting shell; 4. First ear plate; 5. Sealing cover plate; 6. Detection hole; 7. Second ear plate; 8. Locking bolt; 9. Cable; 10. Sealing ring; 11. Third ear plate; 12. Connecting ring; 13. Bearing; 14. Gear ring; 15. Limiting assembly; 16. Mounting assembly; 17. Locking assembly; 18. Drive motor; 19. First incomplete end face gear; 20. Second incomplete end face gear; 21. First fixed seat; 22. First rotating shaft; 23. First sprocket; 24. First chain; 25. Second rotating shaft; 26. Third sprocket; 27. Second sprocket; 28. First conveying gear; 29. ​​Second chain; 30. Third rotating shaft; 31. Fourth sprocket; 32. Third chain; 33. 34. Fifth sprocket; 35. First transmission gear; 36. Fifth shaft; 37. Second transmission gear; 38. Second conveying gear; 39. Second fixed seat; 40. Sixth shaft; 41. Worm gear; 42. Seventh shaft; 43. Worm wheel; 44. Sixth sprocket; 45. Reciprocating screw; 46. Seventh sprocket; 47. Fourth chain; 48. First limiting rod; 49. Top mounting assembly; 50. First power gear; 51. Second power gear; 52. Connecting plate; 53. Insert rod; 54. Electrode rod; 55. Opening; 56. Connecting frame; 57. Second limiting rod; 58. Spring; 59. Moving ring; 60. Slider; 61. External threaded ring; 62. Retaining ring; 63. Crystal oscillator; 64. Slot; 65. Connecting shaft. Detailed Implementation

[0055] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0056] like Figures 1-16 As shown, the present invention has the following specific embodiments.

[0057] Example 1: A multi-point measurement optical thin film thickness measuring device includes a body 1, an annular shell 2 fixedly connected to the front side of the body 1, and an installation shell 3 fixedly connected to the middle of the rear side of the body 1. A sealing cover 5 is provided on the front side of the body 1 and the annular shell 2. A detection hole 6 is opened on the right side of the sealing cover 5. A connecting ring 12 is rotatably connected to the rear side inside the annular shell 2. A toothed ring 14 is fixedly connected to the outer ring of the front side of the connecting ring 12. A bearing 13 is provided between the inner ring of the connecting ring 12 and the annular shell 2. A plurality of openings 55 are distributed circumferentially on the connecting ring 12. Limiting components 15 are provided on both sides of the openings 55 on the front side of the connecting ring 12. Installation components 16 are provided between the corresponding limiting components 15. Locking components 17 are provided on the front side of the installation components 16. A crystal oscillator 63 is provided between the locking components 17 and the installation components 16.

[0058] The first ear plate 4 is fixedly connected to the middle position of both sides of the body 1. The second ear plate 7 is fixedly connected to the middle position of both sides of the sealing cover 5. Locking bolts 8 are provided between the first ear plate 4 and the second ear plate 7. A sealing gasket is provided between the sealing cover 5 and the body 1 and the annular shell 2. The third ear plate 11 is fixedly connected to the four corners of the rear side of the mounting shell 3. A cable 9 is fixedly connected to the middle position of the rear side of the mounting shell 3. A sealing ring 10 is fixedly connected to the outer ring of the cable 9 on the rear side of the mounting shell 3.

[0059] Top mounting component 49 is located inside the body 1 on the right side behind the detection hole 6, and is used to move the crystal oscillator 63 and energize it;

[0060] The first drive assembly is located on the left and right sides inside the body 1 and is used to drive the gear ring 14 to rotate.

[0061] The second drive assembly is located inside the right side of the body 1 and is used to drive the top assembly 49 to move.

[0062] The power assembly is located inside the mounting housing 3 and is used to intermittently drive the first drive assembly and the second drive assembly.

[0063] In this embodiment, as Figures 1-6 As shown, a basic structural configuration is provided, in which the sealing cover 5 and the body 1 are detachably and firmly connected by the first ear plate 4, the second ear plate 7 and the locking bolt 8. The sealing gasket provided therebetween ensures the vacuum seal of the entire device after it is connected to the coating chamber. The sealing ring 10 at the rear of the mounting housing 3 ensures the vacuum seal at the cable 9 outlet. This configuration ensures the sealing reliability necessary for the device as part of the vacuum chamber.

[0064] Example 2: The limiting component 15 includes a connecting frame 56, and a second limiting rod 57 is fixedly connected inside the connecting frame 56. A spring 58 is sleeved on the front end of the outer side of the second limiting rod 57. The mounting component 16 includes a moving ring 59, and sliders 60 are fixedly connected to both sides of the outer side of the moving ring 59. The sliders 60 are slidably connected to the corresponding second limiting rods 57. An external threaded ring 61 is fixedly connected to the front end of the moving ring 59. The locking component 17 includes a retaining ring 62, and a slot 64 is opened inside the retaining ring 62. The front side of the crystal oscillator 63 is engaged with the rear side of the slot 64. The retaining ring 62 is threadedly connected to the external threaded ring 61. A chamfer structure is provided on the front side of the retaining ring 62, and a sealing gasket is provided on the outer side of the chamfer. The rear side of the inside of the detection hole 6 is provided with the same chamfer structure as the retaining ring 62.

[0065] In this embodiment, as Figures 9-14 As shown, the clamping and sealing mechanism of the crystal oscillator 63 is described in detail. When the retaining ring 62 is tightened, the crystal oscillator 63 is securely clamped between the retaining ring 62's slot 64 and the moving ring 59. The chamfer and sealing gasket at the front end of the retaining ring 62 cooperate with the chamfer structure on the rear side of the detection hole 6 to form an effective local seal when the top assembly 49 pushes the crystal oscillator 63 to the working position, minimizing gas exchange between the measurement point and other parts of the chamber.

[0066] Example 3: The first drive assembly includes a first fixed base 21, a second rotating shaft 25, a third rotating shaft 30, a fourth rotating shaft 33, and a fifth rotating shaft 36. The first fixed base 21 is fixedly connected to the rear side of the machine body 1 near the left end. A first rotating shaft 22 is rotatably connected to the first fixed base 21. A first sprocket 23 and a first power gear 50 are fixedly connected to the left and right ends of the first rotating shaft 22, respectively. The second rotating shaft 25 is rotatably connected to the left side wall inside the machine body 1. A third sprocket 26, a second sprocket 27, and a first conveying gear 28 are fixedly connected to the second rotating shaft 25 from left to right. The first sprocket 23 and the second sprocket 27 are driven by a first chain 24. The third rotating shaft 30 is horizontally rotatably connected to the bottom of the machine body 1, located between the left and right side walls. The fourth sprocket 31 is fixedly connected to both ends of the 30. The fourth sprocket 31 on the left side is driven by the third sprocket 26 through the second chain 29. The fourth shaft 33 is rotatably connected to the right side wall inside the body 1. The fifth sprocket 34 and the first transmission gear 35 are fixedly connected to the left and right ends of the fourth shaft 33, respectively. The fourth sprocket 31 on the right side is driven by the third chain 32 through the fifth sprocket 34. The fifth shaft 36 is rotatably connected to the right side inside the body 1 above the fourth shaft 33. The second conveying gear 38 and the second transmission gear 37 are fixedly connected to the left and right ends of the fifth shaft 36, respectively. The first transmission gear 35 and the second transmission gear 37 are meshed. The first conveying gear 28 and the second conveying gear 38 are both meshed with the gear ring 14.

[0067] The second drive assembly includes a second fixed base 39, a reciprocating screw 45, and a seventh rotating shaft 42. The second fixed base 39 is fixedly connected to the rear side of the machine body 1 near the right side. A sixth rotating shaft 40 is rotatably connected to the second fixed base 39. A second power gear 51 and a worm gear 41 are fixedly connected to the left and right ends of the sixth rotating shaft 40, respectively. The reciprocating screw 45 is rotatably connected to the rear right side of the machine body 1. A first limit rod 48 is fixedly connected to the upper and lower sides of the reciprocating screw 45 on the rear side of the machine body 1. A seventh sprocket 46 is fixedly connected to the rear end of the reciprocating screw 45. The seventh rotating shaft 42 is rotatably connected to the rear side of the machine body 1 on the left side of the reciprocating screw 45. A sixth sprocket 44 is fixedly connected to the rear end of the seventh rotating shaft 42. The sixth sprocket 44 and the seventh sprocket 46 are driven by a fourth chain 47. A worm gear 43 is fixedly connected to the front end of the seventh rotating shaft 42. The worm gear 41 is meshed with the worm gear 43.

[0068] The power assembly includes a drive motor 18 fixedly connected inside the mounting housing 3. A first incomplete end face gear 19 is fixedly connected to the output end of the drive motor 18. A connecting shaft 65 is fixedly connected to the middle position of the front end of the first incomplete end face gear 19. A second incomplete end face gear 20 is fixedly connected to the front end of the connecting shaft 65. The end teeth of the first incomplete end face gear 19 occupy one-sixth of the gear, and the end teeth of the second incomplete end face gear 20 occupy two-thirds of the gear. The end teeth are evenly divided into two parts and symmetrically arranged on both sides. The first incomplete end face gear 19 intermittently meshes with the first power gear 50, and the second incomplete end face gear 20 intermittently meshes with the second power gear 51.

[0069] In this embodiment, as Figures 3-7 and Figures 15-16 The diagram illustrates the detailed path of power transmission. In the power assembly, the drive motor 18 drives two incomplete gears to rotate synchronously. When the toothed portion of the first incomplete end-face gear 19 meshes with the first power gear 50, power is transmitted via the first rotating shaft 22, the first sprocket 23, and the first chain 24 to the second rotating shaft 25, driving the first conveying gear 28 to rotate. Simultaneously, power is also transmitted via the third sprocket 26, the second chain 29, the fourth sprocket 31, the third rotating shaft 30, another fourth sprocket 31, the third chain 32, and the fifth sprocket 34 to the fourth... The rotating shaft 33 transmits power to the fifth rotating shaft 36 via the first transmission gear 35 and the second transmission gear 37, and is finally output by the second conveying gear 38. The first conveying gear 28 and the second conveying gear 38 jointly drive the gear ring 14 to rotate at a certain angle to realize the switching of work positions. When the toothed part of the second incomplete end face gear 20 meshes with the second power gear 51, the power is transmitted to the seventh rotating shaft 42 via the sixth rotating shaft 40, the worm 41, and the worm wheel 43, and then drives the reciprocating screw 45 to rotate via the sixth sprocket 44, the fourth chain 47, and the seventh sprocket 46.

[0070] Example 4: The top mounting component 49 includes a connecting plate 52 and a rod 53. A through hole is provided in the middle of the connecting plate 52, and the through hole is sleeved and connected to the reciprocating screw 45. A connecting block is provided inside the through hole, and the connecting block is slidably connected to the reciprocating groove of the reciprocating screw 45. Sliding holes are provided on the upper and lower sides of the connecting plate 52, and the sliding holes are slidably connected to the corresponding first limiting rod 48. The rod 53 is fixedly connected to the left and right sides of the connecting plate 52, and an electrode rod 54 is fixedly connected to the front end of the rod 53.

[0071] In this embodiment, Figure 6 and Figure 8 As shown, the movement mode of the top mounting component 49 is illustrated. When the reciprocating screw 45 rotates, the reciprocating groove on its surface, through the cooperation with the connecting block in the through hole of the connecting plate 52, converts the rotational motion into the linear reciprocating motion of the connecting plate 52. The connecting plate 52 slides along the first limiting rod 48 through the sliding holes on its upper and lower sides to ensure smooth movement without deflection. When the connecting plate 52 moves forward, it drives the insertion rods 53 and electrode rods 54 on both sides to move forward. The electrode rods 54 are inserted into the rear end of the moving ring 59 and apply pressure to the electrode of the crystal oscillator 63 to achieve electrical connection. At the same time, the entire mounting component 16 is pushed forward so that the retaining ring 62 is sealed in the detection hole 6.

[0072] The overall working principle of this invention is as follows: The core working principle of this invention is to automatically execute two actions in sequence through a power source: "switching of crystal oscillator 63 station" and "powering on the ejection of crystal oscillator 63", thereby realizing thin film thickness measurement and automatic replacement.

[0073] Initial state: The device is installed on the wall panel of the coating chamber. Multiple crystal oscillators 63 have been pre-installed at each station and fixed by the locking assembly 17. The top assembly 49 is in the retracted position. The drive motor 18 rotates, driving the first incomplete end face gear 19 and the second incomplete end face gear 20 to rotate synchronously.

[0074] During the workstation switching phase, the first drive component operates: when the toothed portion of the first incomplete end face gear 19 rotates to mesh with the first power gear 50, power transmission begins.

[0075] Power flow: First power gear 50 → First shaft 22 → First sprocket 23 → First chain 24 → Second sprocket 27 → Second shaft 25 → First conveyor gear 28, simultaneously, on the second shaft 25, the third sprocket 26 → Second chain 29 → Left fourth sprocket 31 → Third shaft 30 → Right fourth sprocket 31 → Third chain 32 → Fifth sprocket 34 → Fourth shaft 33 → First transmission gear 35 → Second transmission gear 37 → Fifth shaft 36 → Second conveyor gear 38;

[0076] The first conveying gear 28 and the second conveying gear 38 simultaneously mesh with the gear ring 14, driving it to rotate precisely by a predetermined angle (e.g., 36°, depending on the number of workstations; for example, if there are 10 workstations, the transmission ratio of the first conveying gear 28, the second conveying gear 38, and the gear ring 14 is 1:1:10; when the first conveying gear 28 and the second conveying gear 38 rotate one revolution, the gear ring 14 rotates 36°). This causes the connecting ring 12 to rotate, moving the next workstation, the crystal oscillator 63, to a position aligned with the detection hole 6 and the top assembly 49. Subsequently, the first incomplete end face gear 19 disengages from the first power gear 50, the transmission stops, and the workstation switching is completed.

[0077] During the ejection and energization phase of the crystal oscillator 63, the second drive assembly operates: immediately following or slightly overlapping according to the gear phase design, the toothed portion on one side of the second incomplete end face gear 20 rotates to mesh with the second power gear 51.

[0078] Power flow: Second power gear 51 → Sixth shaft 40 → Worm 41 → Worm wheel 43 → Seventh shaft 42 → Sixth sprocket 44 → Fourth chain 47 → Seventh sprocket 46 → Reciprocating screw 45;

[0079] The reciprocating lead screw 45 rotates, and through the cooperation of its groove with the connecting block in the top assembly 49, it drives the entire top assembly 49 to move forward stably along the first limit rod 48.

[0080] When the top mounting component 49 moves forward, its front electrode rod 54 first inserts into the rear end of the moving ring 59 of the current station mounting component 16, contacts the electrode of the crystal oscillator 63 and applies pressure to achieve electrical connection.

[0081] Subsequently, the top mounting component 49 continues to advance, and through the electrode rod 54, it pushes the entire mounting component 16 to overcome the elastic force of the spring 58 in the limiting component 15 and slide forward until the front part of the retaining ring 62 of this station is tightly pressed into the chamfered sealing surface of the rear part of the detection hole 6, forming a local seal. At this time, the working surface of the crystal oscillator 63 is just exposed to the vacuum environment of the coating chamber and begins to perform the film thickness monitoring task.

[0082] The second incomplete end face gear 20 disengages from the second power gear 51, and the reciprocating screw 45 stops rotating. If the crystal oscillator 63 needs to be replaced, the drive motor 18 continues to rotate. The toothed part on the other side of the second incomplete end face gear 20 rotates to mesh with the second power gear 51, driving the reciprocating screw 45 to rotate. The top mounting component 49 retracts under the rotation drive of the reciprocating screw 45. The rebound force of the spring 58 pulls the mounting component 16 back to its original position, the electrode disconnects, and the retaining ring 62 disengages from the detection hole 6, preparing for the next switch.

[0083] Through the above cycle, multiple crystal oscillators 63 can be used and automatically replaced in a vacuum environment, ensuring the continuous and efficient operation of the coating process.

[0084] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to any specific implementation. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A multi-point measurement optical thin film thickness measuring device, comprising a body (1), characterized in that: An annular shell (2) is fixedly connected to the front side of the body (1), and an installation shell (3) is fixedly connected to the middle position of the rear side of the body (1). A sealing cover (5) is provided on the front side of the body (1) and the annular shell (2). A detection hole (6) is opened on the right side of the sealing cover (5). A connecting ring (12) is rotatably connected to the rear side of the inside of the annular shell (2). A toothed ring (14) is fixedly connected to the outer ring of the front side of the connecting ring (12). A bearing (13) is provided between the inner ring of the connecting ring (12) and the annular shell (2). Several openings (55) are distributed around the circumference of the connecting ring (12). Limiting components (15) are provided on both sides of the openings (55) on the front side of the connecting ring (12). An installation component (16) is provided between the limiting components (15). A locking component (17) is provided on the front side of the installation component (16). A crystal oscillator (63) is provided between the locking component (17) and the installation component (16). The top mounting component (49) is located inside the body (1) on the right side behind the detection hole (6) and is used to move the crystal oscillator (63) and energize it. The top mounting component (49) includes a connecting plate (52) and a plug rod (53). The connecting plate (52) has a through hole in the middle and is sleeved with a reciprocating screw (45). The front end of the plug rod (53) is fixedly connected with an electrode rod (54). The first drive assembly is located on the left and right sides inside the body (1). The first drive assembly includes a first power gear (50), a first conveying gear (28), and a second conveying gear (38). The first power gear (50) is connected to the first conveying gear (28) and the second conveying gear (38) in a transmission connection. The first conveying gear (28) and the second conveying gear (38) are both meshed with the gear ring (14). The second drive assembly is located on the right side inside the body (1) and is used to drive the top assembly (49) to move. The second drive assembly includes a second power gear (51) and a reciprocating screw (45), and the reciprocating screw (45) and the second power gear (51) are connected in a transmission. The power assembly is disposed inside the mounting housing (3) and is used to intermittently drive the first drive assembly and the second drive assembly. The power assembly includes a drive motor (18) fixedly connected inside the mounting housing (3). The output end of the drive motor (18) is fixedly connected to a first incomplete end face gear (19). A connecting shaft (65) is fixedly connected to the middle position of the front end of the first incomplete end face gear (19). A second incomplete end face gear (20) is fixedly connected to the front end of the connecting shaft (65). The end teeth of the first incomplete end face gear (19) occupy one-sixth of the total area, and the end teeth of the second incomplete end face gear (20) occupy two-thirds of the total area. The end teeth are evenly divided into two parts and symmetrically arranged on both sides. The first incomplete end face gear (19) intermittently meshes with the first power gear (50), and the second incomplete end face gear (20) intermittently meshes with the second power gear (51).

2. The multi-point measurement optical thin film thickness measuring device according to claim 1, characterized in that: The machine body (1) is fixedly connected to the middle position of the left and right sides of the first ear plate (4), and the sealing cover plate (5) is fixedly connected to the middle position of the left and right sides of the second ear plate (7). Locking bolts (8) are provided between the first ear plate (4) and the second ear plate (7). A sealing gasket is provided between the sealing cover plate (5) and the machine body (1) and the annular shell (2). The four corners of the rear side of the mounting shell (3) are fixedly connected to the third ear plate (11). A cable (9) is fixedly connected to the middle position of the rear side of the mounting shell (3). A sealing ring (10) is fixedly connected to the outer ring of the cable (9) on the rear side of the mounting shell (3).

3. The multi-point measurement optical thin film thickness measuring device according to claim 2, characterized in that: The limiting component (15) includes a connecting frame (56), and a second limiting rod (57) is fixedly connected inside the connecting frame (56). A spring (58) is sleeved on the front end of the outer side of the second limiting rod (57). The mounting component (16) includes a moving ring (59), and sliders (60) are fixedly connected on both sides of the outer side of the moving ring (59). The sliders (60) are slidably connected to the corresponding second limiting rods (57). An external threaded ring (61) is fixedly connected to the front end of the moving ring (59). The locking component (17) includes a retaining ring (62), and a slot (64) is opened inside the retaining ring (62). The front side of the crystal oscillator (63) is engaged with the rear side of the slot (64). The retaining ring (62) is threadedly connected to the external threaded ring (61). A chamfer structure is provided on the front side of the retaining ring (62), and a sealing gasket is provided on the outer side of the chamfer. The rear side of the detection hole (6) is provided with the same chamfer structure as the retaining ring (62).

4. The multi-point measurement optical thin film thickness measuring device according to claim 3, characterized in that: The first drive assembly includes a first fixed base (21), a second rotating shaft (25), a third rotating shaft (30), a fourth rotating shaft (33), and a fifth rotating shaft (36). The first fixed base (21) is fixedly connected to the rear side of the machine body (1) near the left end. A first rotating shaft (22) is rotatably connected to the first fixed base (21). A first sprocket (23) and a first power gear (50) are fixedly connected to the left and right ends of the first rotating shaft (22), respectively. The second rotating shaft (25) is rotatably connected to the left side wall inside the machine body (1). A third sprocket (26), a second sprocket (27), and a first conveying gear (28) are fixedly connected to the second rotating shaft (25) from left to right. The first sprocket (23) and the second sprocket (27) are driven by a first chain (24). The third rotating shaft (30) is horizontally rotatably connected to the bottom end of the machine body (1) located on the left side. At the position between the right side walls, the third rotating shaft (30) is fixedly connected to the left and right ends of the fourth sprocket (31). The fourth sprocket (31) on the left side is driven by the third sprocket (26) through the second chain (29). The fourth rotating shaft (33) is rotatably connected to the right side wall inside the machine body (1). The left and right ends of the fourth rotating shaft (33) are fixedly connected to the fifth sprocket (34) and the first transmission gear (35), respectively. The fourth sprocket (31) on the right side is driven by the third chain (32). The fifth rotating shaft (36) is rotatably connected to the right side inside the machine body (1) above the fourth rotating shaft (33). The left and right ends of the fifth rotating shaft (36) are fixedly connected to the second conveying gear (38) and the second transmission gear (37), respectively. The first transmission gear (35) and the second transmission gear (37) are meshed together.

5. The multi-point measurement optical thin film thickness measuring device according to claim 4, characterized in that: The second drive assembly includes a second fixed base (39) and a seventh rotating shaft (42). The second fixed base (39) is fixedly connected to the rear side of the machine body (1) near the right side. A sixth rotating shaft (40) is rotatably connected to the second fixed base (39). A second power gear (51) and a worm gear (41) are fixedly connected to the left and right ends of the sixth rotating shaft (40), respectively. The reciprocating screw (45) is rotatably connected to the rear right side of the machine body (1). The positions of the rear side of the machine body (1) above and below the reciprocating screw (45) are fixedly connected. A first limiting rod (48) is fixedly connected to the reciprocating screw (45). A seventh sprocket (46) is fixedly connected to the rear end of the reciprocating screw (45). A seventh rotating shaft (42) is rotatably connected to the rear side of the machine body (1) at the left side of the reciprocating screw (45). A sixth sprocket (44) is fixedly connected to the rear end of the seventh rotating shaft (42). The sixth sprocket (44) and the seventh sprocket (46) are driven by a fourth chain (47). A worm gear (43) is fixedly connected to the front end of the seventh rotating shaft (42). The worm (41) is meshed with the worm gear (43).

6. The multi-point measurement optical thin film thickness measuring device according to claim 5, characterized in that: A connecting block is provided inside the through hole. The connecting block is slidably connected to the reciprocating groove of the reciprocating screw (45). Sliding holes are provided on both the upper and lower sides of the connecting plate (52). The sliding holes are slidably connected to the corresponding first limiting rod (48). The insertion rod (53) is fixedly connected to the left and right sides of the connecting plate (52).

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