Adjustable mirror processing support device

Abstract

The application relates to the technical field of mirror processing, and discloses a supporting equipment for adjustable mirror processing, which comprises a supporting unit, the supporting unit comprises a supporting frame and a supporting ring, a to-be-processed mirror, when the to-be-processed mirror is polished, the to-be-processed mirror is placed in the supporting ring, an offset correction unit, the offset correction unit comprises a monitoring mechanism and a sensing mechanism, the monitoring mechanism comprises a monitoring shaft arranged in the supporting frame, the sensing mechanism is provided with multiple groups, the sensing mechanism is used for sensing the offset of the to-be-processed mirror, adjusting the offset position, and resetting the to-be-processed mirror. The monitoring mechanism is used for realizing real-time and accurate capture of the offset amount; the sensing mechanism is used for pushing and resetting the monitoring shaft, realizing monitoring correction, a plurality of sensing mechanisms are arranged along the fixed ring annular array, the side sensing components are automatically reset through the first spring, reverse resistance is avoided, and the correction force is uniformly distributed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of mirror processing, more particularly, it is a kind of adjustable support equipment for mirror processing. BACKGROUND

[0002] In the field of optical element manufacturing, the polishing process of large-size and high-precision mirrors is the core process that determines the final optical performance. This process requires high stability of the reference position during mirror processing. The mirror must maintain the preset spatial reference attitude throughout the process. Any positional deviation will directly lead to roughness of the mirror surface exceeding the design tolerance range and deviation of the surface precision from the theoretical design value, resulting in problems such as decreased imaging resolution and increased aberration in the subsequent assembled optical system. In severe cases, the entire optical system may not meet the established functional requirements. However, due to the inherent properties of the mirror itself, limitations of the support system, and the action rules of the polishing tool, it is difficult to completely avoid mirror deviation during polishing through conventional means.

[0003] Among them, large-size and high-precision mirrors generally have inherent properties such as high brittleness and uneven internal material density distribution. The supporting units that match these mirrors are easily affected by factors such as machining precision, assembly gap, and material elastic modulus difference, leading to inconsistent local support stiffness. Before polishing, the mirror's own weight will cause a slight pre-deformation in the area with weak support stiffness. During the polishing process, the periodic processing force exerted by the polishing tool will further add to this deformation effect, ultimately causing the mirror to produce axial micro-displacement perpendicular to the mirror surface. This displacement is non-uniform due to uneven support stiffness distribution and cannot be completely eliminated through pre-adjustment, thereby disrupting the axial reference of the mirror surface processing.

[0004] In addition, during the polishing process, there is unavoidable dynamic fluctuation in the cutting action between the tool and the mirror surface. On one hand, the degree of wear and distribution density of the tool surface abrasive will dynamically change with the processing time, causing instantaneous irregular fluctuations in the cutting force and direction of the tool on the mirror surface. On the other hand, when the tool polishes the edge area or the position of sudden change in the mirror surface, the contact between the tool and the mirror will produce an instantaneous impact load, which will disrupt the original stress balance of the mirror, inducing random radial movement of the mirror along the direction parallel to the mirror surface or angular deviation around any axis in the mirror surface without a preset direction. Such movement and deviation cannot be avoided in advance through preset processing parameters due to random factors such as tool abrasive state and contact position, further disrupting the radial and angular references of the mirror surface processing. SUMMARY

[0005] The application provides a support device for adjustable mirror processing, which solves the technical problem that the self-weight of the mirror in the related art can cause a slight pre-deformation in the weak support rigidity area, resulting in an axial micro-displacement of the mirror in the direction perpendicular to the mirror surface, and the inevitable dynamic fluctuation of the cutting action of the tool on the mirror surface during polishing.

[0006] The application provides a support device for adjustable mirror processing, which comprises:

[0007] A support unit, which comprises a support frame and a support ring, a plurality of first clamping pieces are installed on the support frame, and a plurality of second clamping pieces are installed on the support ring;

[0008] A to-be-processed mirror, when the to-be-processed mirror is polished, the to-be-processed mirror is placed in the support ring, and the to-be-processed mirror is clamped and fixed by the first clamping pieces and the second clamping pieces;

[0009] An offset correction unit, which comprises a monitoring mechanism, a sensing mechanism and a fixing ring installed on the support frame;

[0010] The monitoring mechanism comprises a monitoring shaft arranged in the support frame, one end of the monitoring shaft close to the to-be-processed mirror is provided with a first connecting suction cup, the first connecting suction cup is used for negatively sucking the surface of the to-be-processed mirror, and the monitoring shaft is connected to the to-be-processed mirror;

[0011] The sensing mechanism is provided in a plurality of groups, and the plurality of groups of sensing mechanisms are annularly distributed outside the fixing ring, the sensing mechanism is used for sensing the offset of the to-be-processed mirror, adjusting the offset position, and resetting the to-be-processed mirror.

[0012] As a further optimization scheme of the application, a universal ball is installed at one end of the monitoring shaft away from the first connecting suction cup, and a connecting seat is movably connected outside the universal ball.

[0013] As a further optimization scheme of the application, a gas flow channel for gas circulation is arranged in the monitoring shaft, a groove in communication with the inner wall of the gas flow channel is arranged in the universal ball, and a pipeline connector is installed in the groove.

[0014] As a further optimization scheme of the application, the sensing mechanism comprises a first cylinder body annularly distributed on the fixing ring, the first cylinder body is fixedly connected with the fixing ring, a first piston rod is slidably connected in the first cylinder body, a sensing pressing plate is installed on the first piston rod, a first spring is arranged between the first cylinder body and the first piston rod, and one end of the sensing pressing plate away from the first piston rod is in contact with the monitoring shaft.

[0015] As a further optimization scheme of the present application, a second cylinder is further arranged below the plurality of first cylinders, and a second piston rod is slidably connected in the second cylinder; a communication port is arranged on each of the first cylinder and the second cylinder, and the communication ports are connected by a first connecting hose.

[0016] As a further optimization scheme of the present application, a rubber block is arranged at an end of the second piston rod away from the second cylinder, and the rubber block is used to press and reset the monitoring shaft when the second piston rod is extended outward.

[0017] As a further optimization scheme of the present application, a spacing between an end surface of the rubber block and an outer surface of the monitoring shaft is a maximum extension distance of the second piston rod.

[0018] As a further optimization scheme of the present application, a buffer cylinder is arranged on the second cylinder, and the buffer cylinder is arranged close to a direction of the first connecting hose; a buffer rod is slidably connected in the buffer cylinder, and a third spring is arranged outside the buffer rod.

[0019] As a further optimization scheme of the present application, a clamping mechanism is further arranged on the monitoring shaft, the clamping mechanism comprises a fixed plate arranged on the monitoring shaft, and a plurality of airflow communication tubes are annularly arranged in the fixed plate; a second connecting suction disc is arranged at an end of the airflow communication tube close to the to-be-processed mirror; and the airflow communication tube and the monitoring shaft are connected by a second connecting hose.

[0020] As a further optimization scheme of the present application, the fixed plate and the airflow communication tube are in sliding connection, and a fourth spring is arranged between the airflow communication tube and the fixed plate.

[0021] The present application has the following beneficial effects: the monitoring mechanism of the present application uses the first connecting suction disc to be negatively attracted to the mirror, and the non-rigid contact completely avoids the mirror surface scratch and local stress deformation caused by rigid clamping; at the same time, the negative attraction ensures that the monitoring shaft and the mirror do not slide relative to each other, and any direction deviation of the mirror can be synchronously transmitted to the monitoring shaft, so that the deviation amount can be captured in real time and accurately; in addition, the sensing mechanism uses the hydraulic transmission structure of the first cylinder and the second cylinder, after the mirror deviation presses the sensing plate, the pressure of the first cylinder can be instantaneously transmitted to the second cylinder through the hose to push and reset the monitoring shaft, so that the monitoring correction is realized, and a plurality of sensing mechanisms are arranged in an annular array along the fixed ring, and the sensing components on the opposite side are automatically reset by the first spring, so that the reverse resistance is avoided, and the correction force is uniformly distributed. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a schematic diagram of a three-dimensional structure of the present application;

[0023] Figure 2 is a schematic diagram of the explosion of the present application;

[0024] Figure 3 is a schematic diagram of the support unit of the present application;

[0025] Figure 4 is a schematic diagram of the support unit and the offset correction unit of the present application;

[0026] Figure 5 is a schematic diagram of the offset correction unit of the present application;

[0027] Figure 6 is a schematic diagram of the offset correction unit of the present application;

[0028] Figure 7 is a schematic diagram of the offset correction unit of the present application;

[0029] Figure 8 is a schematic diagram of the sensing mechanism of the present application;

[0030] Figure 9 is a schematic diagram of the monitoring shaft swing range structure of the present application.

[0031] In the figure: 100, support unit; 110, support frame; 120, support ring; 130, first clamping piece; 140, second clamping piece; 150, connecting bracket; 200, mirror to be processed; 300, offset correction unit; 310, monitoring mechanism; 311, monitoring shaft; 312, first connecting suction cup; 313, universal ball; 314, connecting seat; 320, sensing mechanism; 321, first cylinder body; 322, first piston rod; 323, sensing pressure plate; 324, second cylinder body; 325, second piston rod; 326, first connecting hose; 327, first spring; 328, second spring; 329, buffer cylinder body; 3210, buffer rod; 3211, third spring; 330, clamping mechanism; 331, fixed plate; 332, air flow pipe; 333, second connecting suction cup; 334, second connecting hose; 335, fourth spring; 340, fixed ring. DETAILED DESCRIPTION

[0032] The subject matter described herein will now be discussed with reference to example implementations. It should be understood that discussions of these implementations are merely provided for illustrative purposes and that elements of the implementations can be modified, omitted, or added to by one of ordinary skill in the art without departing from the scope of the present specification. Each example can omit, substitute, or add various processes or components in addition to those described or in lieu thereof. In addition, features described with respect to some examples can be combined in other examples.

[0033] According to the drawings Figure 1 According to the drawings Figure 3 As shown in the drawings, a support device for adjustable mirror processing includes a support unit 100 and a mirror to be processed 200; the support unit 100 includes a support frame 110 and a support ring 120, the support frame 110 and the support ring 120 are fixedly connected, a plurality of first clamping pieces 130 are installed on the support frame 110, a plurality of second clamping pieces 140 are installed on the support ring 120, the first clamping pieces 130 and the second clamping pieces 140 are arranged in a ring array with the center of the support ring 120 as the center point, and a connecting bracket 150 is also installed on the support frame 110.

[0034] When the mirror to be processed 200 is polished and processed, the mirror to be processed 200 is placed inside the support ring 120, and the first clamping piece 130 and the second clamping piece 140 are used to clamp and fix the mirror to be processed 200.

[0035] It should be understood that the mirror to be processed 200 is embedded in the inner ring area of the support ring 120, the support ring 120 serves as the radial reference of the mirror to be processed 200, and limits the initial movement in the horizontal direction; at the same time, the rigid connection between the support ring 120 and the support frame 110 provides stable vertical bearing for the mirror to be processed 200, avoiding micro-deformation caused by self-weight before processing.

[0036] In addition, the first clamping piece 130 and the second clamping piece 140 arranged in a ring array realize double-layer radial constraint; the first clamping piece 130 acts on the back of the mirror to be processed 200, forming auxiliary clamping; the second clamping piece 140 acts on the outside of the edge of the mirror to be processed 200, limiting the radial large displacement of the mirror to be processed 200 through mechanical jacking force; since the two groups of clamping pieces are arranged with the center of the support ring 120 as the array center, it can ensure that the clamping force is uniformly distributed along the circumferential direction of the mirror to be processed 200, avoiding initial deviation or surface damage caused by excessive local clamping force.

[0037] According to the drawings Figure 4 According to the drawings Figure 5 As shown in the drawings, the offset correction unit 300 includes a monitoring mechanism 310, a sensing mechanism 320 and a clamping mechanism 330, and a fixed ring 340 installed on the support frame 110.

[0038] Specifically, according to the drawings Figure 6 According to the drawings Figure 7 As shown in the drawings, the monitoring mechanism 310 includes a monitoring shaft 311 arranged inside the support frame 110, the monitoring shaft 311 is provided with a first connecting suction cup 312 at one end close to the mirror to be processed 200, the first connecting suction cup 312 is used for negative pressure suction on the surface of the mirror to be processed 200, so that the monitoring shaft 311 is connected to the mirror to be processed 200.

[0039] In operation, a negative pressure is supplied to the airflow passage of the monitoring shaft 311 through an external pipeline, and the negative pressure is transmitted to the first connecting suction cup 312 through the internal passage of the monitoring shaft 311 and the groove of the universal ball 313, so that the suction cup is tightly sucked to the surface of the to-be-processed mirror 200. The negative pressure suction mode is a non-rigid contact, which can ensure the synchronous movement of the monitoring shaft 311 and the to-be-processed mirror 200, and can also avoid scratching or stress damage to the surface of the to-be-processed mirror 200 caused by mechanical clamping.

[0040] According to the drawings Figure 6 and the drawings Figure 7 , the universal ball 313 is installed at the end of the monitoring shaft 311 away from the first connecting suction cup 312, and the outer part of the universal ball 313 is movably connected with the connecting seat 314, and the connecting seat 314 is fixedly connected with the connecting support 150.

[0041] The internal part of the monitoring shaft 311 is provided with an airflow passage for gas flow, the internal part of the universal ball 313 is provided with a groove in communication with the inner wall of the airflow passage, a pipeline connector is installed in the groove, the internal part of the connecting seat 314 is provided with a through groove, so that the pipeline connector is connected with the external pipeline through the through groove, and a circular opening in communication with the through groove is formed in the connecting support 150. In this embodiment, the circular opening is provided to facilitate the connection between the pipeline connector and the external pipeline, and to facilitate the control of the negative pressure suction of the first connecting suction cup 312.

[0042] In operation, when the to-be-processed mirror 200 deviates in the polishing process due to factors such as uneven support stiffness, fluctuation of processing force, etc., such as radial movement, angular swing or axial micro-displacement, etc., the to-be-processed mirror 200 can drive the monitoring shaft 311 to produce a corresponding displacement through the first connecting suction cup 312; since the end of the monitoring shaft 311 is movably connected with the connecting seat 314 through the universal ball 313, the universal ball 313 can rotate 360° and swing in multiple directions in the connecting seat 314, which can neither limit the small deviation of the to-be-processed mirror 200, nor can it transmit the deviation of the to-be-processed mirror 200 to the monitoring shaft 311 in real time. At the same time, the airflow passage in the monitoring shaft 311 and the universal ball 313 can continuously maintain the supply of negative pressure when the monitoring shaft 311 moves with the to-be-processed mirror 200, so as to avoid the suction cup from falling off due to the interruption of airflow, and to ensure the continuity of monitoring.

[0043] When the monitoring shaft 311 captures the deviation of the to-be-processed mirror 200, the sensing mechanism 320 senses the change of the displacement stress, and then drives the to-be-processed mirror 200 to correct and adjust through the sensing mechanism 320, so as to realize the dynamic correction of the deviation of the to-be-processed mirror 200.

[0044] Specifically, according to the drawings Figure 5 , the drawings Figure 6 and the drawings Figure 7 , the universal ball 313 is installed at the end of the monitoring shaft 311 away from the first connecting suction cup 312, and the outer part of the universal ball 313 is movably connected with the connecting seat 314, and the connecting seat 314 is fixedly connected with the connecting support 150.As shown, the sensing mechanism 320 is provided with multiple groups, and the multiple groups of sensing mechanism 320 are annularly distributed outside the fixed ring 340, and the sensing mechanism 320 is used for sensing the deviation of the to-be-processed mirror 200 and adjusting the deviation position, so that the to-be-processed mirror 200 is adjusted and reset.

[0045] According to the accompanying Figure 8 and the accompanying Figure 9 As shown, the sensing mechanism 320 includes a first cylinder body 321 annularly distributed on the fixed ring 340, the first cylinder body 321 is fixedly connected with the fixed ring 340, a first piston rod 322 is slidably connected inside the first cylinder body 321, and a sensing pressing plate 323 is installed on the first piston rod 322, and an end of the sensing pressing plate 323 away from the first piston rod 322 is in contact with the monitoring shaft 311. Among them, the first spring 327 is installed between the first cylinder body 321 and the first piston rod 322.

[0046] A second cylinder body 324 is further arranged below the multiple groups of first cylinder bodies 321, and a second piston rod 325 is slidably connected inside the second cylinder body 324, and the first cylinder body 321 and the second cylinder body 324 are both provided with a communication pipe, and the communication pipes are connected by a first connecting hose 326. Among them, the second spring 328 is installed between the second cylinder body 324 and the second piston rod 325.

[0047] An end of the second piston rod 325 away from the second cylinder body 324 is provided with a rubber block, when the second piston rod 325 extends outward, the rubber block extrudes and adjusts and resets the monitoring shaft 311. It should be noted that the distance between the end surface of the rubber block and the outer surface of the monitoring shaft 311 is the maximum extension distance of the second piston rod 325.

[0048] When the to-be-processed mirror 200 deviates due to fluctuation of processing force, uneven support stiffness, etc., the to-be-processed mirror 200 drives the monitoring shaft 311 to deviate synchronously through the first connecting suction cup 312, and the deviation of the monitoring shaft 311 will extrude the sensing pressing plate 323 attached thereto; if the monitoring shaft 311 deviates in a certain direction, the sensing pressing plate 323 in the corresponding direction is pushed by the thrust force, and drives the first piston rod 322 to retract into the first cylinder body 321.

[0049] At this time, the closed fluid in the first cylinder body 321, such as hydraulic oil, is compressed due to the retraction of the piston rod, the pressure in the cavity is increased, and the pressure change is transmitted to the second cylinder body 324 below in real time through the first connecting hose 326, after the second cylinder body 324 receives the pressure signal transmitted by the first cylinder body 321, the pressure in the cavity is increased to drive the second piston rod 325 to extend outward, and the pressure change of the first cylinder body 321 will be converted into the axial thrust of the second piston rod 325 synchronously.

[0050] When the second piston rod 325 is subjected to an axial thrust, the rubber block at the end extends with the piston rod until it comes into contact with the outer surface of the monitoring shaft 311 and exerts a correction force, and the rubber block exerts a stable thrust on the monitoring shaft 311, pushing the monitoring shaft 311 to reset to the initial position. At the same time, the sensing mechanism 320 in the offset direction actively exerts a correction force, and the sensing mechanism 320 on the opposite side is separated from the extrusion due to the offset of the monitoring shaft 311, and the first spring 327 pushes the first piston rod 322 to reset, avoiding the generation of reverse resistance to the correction action, and ensuring the unidirectionality and stability of the correction force.

[0051] When the monitoring shaft 311 is reset under the push of the rubber block, after the mirror to be processed 200 returns to the initial processing position, the extrusion force of the monitoring shaft 311 on the sensing pressure plate 323 disappears, the first spring 327 in the first cylinder body 321 releases the pre-compression amount, pushes the first piston rod 322 and the sensing pressure plate 323 to reset, and the pressure in the cavity of the first cylinder body 321 decreases to the initial value; the pressure in the second cylinder body 324 decreases synchronously, the second spring 328 pulls the second piston rod 325 to retract, the rubber block and the monitoring shaft 311 restore the initial distance, and the entire sensing mechanism 320 returns to the triggered state, waiting for the next offset signal.

[0052] According to the accompanying Figure 8 and the accompanying Figure 9 It is shown that the second cylinder body 324 is provided with a buffer cylinder body 329, and the position of the buffer cylinder body 329 is close to the direction of the first connecting hose 326, and the volume of the first cylinder body 321 is greater than that of the second cylinder body 324. Among them, the buffer rod 3210 is slidably connected in the buffer cylinder body 329, and one end of the buffer rod 3210 extends through the buffer cylinder body 329 to the outer surface of the buffer cylinder body 329.

[0053] The end of the buffer rod 3210 close to the second cylinder body 324 is provided with a stop block, and the buffer rod 3210 is provided with a third spring 3211 outside, one end of the third spring 3211 is fixedly connected with the stop block, and the other end of the third spring 3211 is fixedly connected with the buffer cylinder body 329.

[0054] It should be noted that the elastic force of the third spring 3211 is greater than that of the first spring 327 and the second spring 328.

[0055] When working, when the mirror to be processed 200 produces a conventional offset, the monitoring shaft 311 extrudes the sensing pressure plate 323, and the first piston rod 322 retracts to increase the pressure in the first cylinder body 321; due to the volume of the first cylinder body 321 being greater than that of the second cylinder body 324, according to Pascal's principle, the pressure is preferentially transmitted to the second cylinder body 324 with smaller volume through the first connecting hose 326, pushing the second piston rod 325 to extend, and realizing normal reset.

[0056] It needs to be pointed out that when the monitoring shaft 311 is slightly deviated, the rebound force of the induction pressure plate 323 can push the monitoring shaft 311 to assist in resetting; when the monitoring shaft 311 is greatly deviated, the second piston rod 325 is pushed out to realize normal resetting.

[0057] At this stage, the pressure in the second cylinder body 324 does not reach the elastic threshold of the third spring 3211, the buffer rod 3210 remains stationary, the third spring 3211 is not compressed and deformed, and the buffer cylinder 329 does not participate in the action, so as to ensure that the correction force is concentrated on the monitoring shaft 311 when the mirror is deviated normally, and to avoid the correction lag caused by the pressure shunting of the buffer mechanism.

[0058] When the mirror to be processed 200 is abnormally deviated or impacted by a tool, the pressure in the first cylinder body 321 continues to rise, and the pressure in the second cylinder body 324 simultaneously exceeds the elastic threshold of the third spring 3211; the pressure pushes the stop block in the buffer cylinder 329 to compress the third spring 3211, and the buffer rod 3210 extends out of the cylinder body. During this process, the buffer cylinder 329 absorbs the pressure peak by expanding the fluid volume, so as to avoid the second piston rod 325 from extending too much.

[0059] At the same time, the high elastic property of the third spring 3211 ensures that the buffer action is triggered only when the pressure is excessive, and the monitoring shaft 311 is protected from bending deformation caused by excessive torque during the normal correction stage, and the rubber block is prevented from being excessively pressed against the mirror to be processed 200.

[0060] When the monitoring shaft 311 is reset, the pressure in the first cylinder body 321 is reset with the first spring 327, the pressure in the second cylinder body 324 is simultaneously reduced, the third spring 3211 releases the compression amount, the stop block and the buffer rod 3210 are reset, the fluid in the buffer cylinder 329 flows back to the second cylinder body 324, and finally the second piston rod 325 is retracted under the action of the second spring 328, and the rubber block and the monitoring shaft 311 restore the initial distance.

[0061] According to the drawings Figure 5 and the drawings Figure 6 As shown in the drawings, the clamping mechanism 330 includes a fixed plate 331 mounted on the monitoring shaft 311, and the inside of the fixed plate 331 is annularly distributed with a plurality of groups of airflow pipes 332. The airflow pipes 332 are provided with a second connecting chuck 333 at one end close to the mirror to be processed 200. The airflow pipes 332 and the monitoring shaft 311 are connected through a second connecting hose 334, and the second connecting hose 334 is connected with the airflow channel in the monitoring shaft 311. Among them, the fixed plate 331 and the airflow pipes 332 are in sliding connection, and the fourth spring 335 is installed between the airflow pipes 332 and the fixed plate 331.

[0062] It should be noted that when the first connecting chuck 312 is used to fix the to-be-processed mirror 200 with an arc-shaped back surface, the second connecting chuck 333 is used to increase the contact surface with the arc-shaped surface, thereby assisting the first connecting chuck 312 to clamp, so as to avoid loosening when the to-be-processed mirror 200 with an arc-shaped back surface is fixed. Specifically, the fourth spring 335 is arranged to facilitate the second connecting chuck 333 to adapt to arc-shaped surfaces with various radii.

[0063] The above describes the embodiments of the present specific embodiment, but the present embodiment is not limited to the above specific embodiment, and the above specific embodiment is only illustrative but not restrictive, and a person of ordinary skill in the art can make many forms under the inspiration of the present embodiment, which all belong to the protection of the present embodiment.

Claims

1. A support device for processing adjustable reflectors, characterized in that, The utility model relates to a polishing device for mirror, which comprises the following parts: a supporting unit comprising a supporting frame and a supporting ring, a plurality of first clamping members are installed on the supporting frame, and a plurality of second clamping members are installed on the supporting ring; a mirror to be processed, which is placed inside the supporting ring when the mirror to be processed is polished, and is clamped and fixed by the first clamping members and the second clamping members; an offset correction unit comprising a monitoring mechanism and a sensing mechanism, and a fixing ring installed on the supporting frame; the monitoring mechanism comprises a monitoring shaft arranged inside the supporting frame, one end of the monitoring shaft close to the mirror to be processed is provided with a first connecting suction cup, the first connecting suction cup is used for negative pressure suction on the surface of the mirror to be processed, so that the monitoring shaft is connected to the mirror to be processed; the sensing mechanism is provided with a plurality of groups, and the plurality of groups of sensing mechanisms are annularly distributed outside the fixing ring, the sensing mechanism is used for sensing the offset of the mirror to be processed, adjusting the offset position, and adjusting the mirror to be processed to reset.

2. The support apparatus for a mirror according to claim 1, wherein a universal ball is installed at the end of the monitoring shaft away from the first connecting suction cup, and a connecting seat is movably connected outside the universal ball.

3. The support apparatus for a mirror according to claim 2, wherein a gas flow channel for gas circulation is arranged inside the monitoring shaft, a groove in communication with the inner wall of the gas flow channel is arranged inside the universal ball, and a pipeline connector is installed in the groove.

4. The support apparatus for a mirror according to claim 1, wherein the sensing mechanism comprises a first cylinder body annularly distributed on the fixing ring, the first cylinder body is fixedly connected with the fixing ring, a first piston rod is slidably connected inside the first cylinder body, a sensing pressing plate is installed on the first piston rod, a first spring is installed between the first cylinder body and the first piston rod, and one end of the sensing pressing plate away from the first piston rod is in contact with the monitoring shaft.

5. The support apparatus for a mirror according to claim 4, wherein a second cylinder body is further arranged below the plurality of first cylinder bodies, a second piston rod is slidably connected inside the second cylinder body, a communication pipe opening is installed on the first cylinder body and the second cylinder body, and the communication pipe openings are connected by a first connecting hose.

6. The support apparatus for a mirror according to claim 5, wherein a rubber block is installed at the end of the second piston rod away from the second cylinder body, when the second piston rod extends outward, the rubber block extrudes and adjusts the monitoring shaft to reset.

7. The support apparatus for a mirror according to claim 6, wherein the distance between the end surface of the rubber block and the outer surface of the monitoring shaft is the maximum extension distance of the second piston rod.

8. The support apparatus for a mirror according to claim 5, wherein a buffer cylinder is installed on the second cylinder body, the position of the buffer cylinder is close to the direction of the first connecting hose, a buffer rod is slidably connected inside the buffer cylinder, and a third spring is arranged outside the buffer rod.

9. The support apparatus for a mirror according to claim 1, wherein a clamping mechanism is further arranged on the monitoring shaft, the clamping mechanism comprises a fixing plate installed on the monitoring shaft, a plurality of gas flow tubes are annularly distributed inside the fixing plate, a second connecting suction cup is installed at one end of the gas flow tube close to the mirror to be processed, and the gas flow tube and the monitoring shaft are connected by a second connecting hose.

10. The support apparatus for a mirror according to claim 9, wherein the fixing plate and the gas flow tube are slidably connected, and a fourth spring is installed between the gas flow tube and the fixing plate.

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