Detection method and detection system

Abstract

The invention provides a detection method and system, and the method comprises the steps: employing detection light to scan a to-be-scanned region of the surface of an object to be detected, enabling the detection light to pass through the to-be-scanned region to form feedback light, employing a detector to receive the feedback light of the to-be-scanned region, enabling the field of view of the detector on the surface of the object to be detected to comprise a plurality of detection regions, the plurality of detection areas are arranged along the relative movement direction between the detection areas and the to-be-detected object; in the process that the detection light scans the sub-scanning areas of the area to be scanned, the incident angles of the detection light to the sub-scanning areas are changed, and a plurality of detection areas obtain a plurality of detection images of the same sub-scanning area at different incident angles at different moments; the size of one detection area along the arrangement direction is the same as the size of one sub-scanning area along the arrangement direction; or, in the process that the detection light scans the sub-scanning areas of the area to be scanned, the exposure time of the multiple detection areas to the same sub-scanning area is set to be different, and the multiple detection areas are made to obtain multiple detection images of the same sub-scanning area under different exposure time at different moments; and the size of one detection area along the arrangement direction is the same as the size of one sub-scanning area along the arrangement direction. And the detection efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor testing, in particular to a detection method and a detection system. BACKGROUND

[0002] For the semiconductor manufacturing industry, defects generated in the production process are the main cause of chip reliability and yield reduction, so defect detection of chips is of great significance in the semiconductor manufacturing process.

[0003] How to improve detection efficiency is the research direction that needs to be concerned. SUMMARY

[0004] The present application provides a detection method and a detection system for improving detection efficiency.

[0005] The present application provides a detection method, comprising: scanning a to-be-scanned area on a surface of a to-be-detected object by using a probe light, the probe light forming feedback light after passing through the to-be-scanned area; and receiving the feedback light of the to-be-scanned area by using a detector, wherein a field of view of the detector on the surface of the to-be-detected object comprises a plurality of detection areas, and the plurality of detection areas are arranged along a relative movement direction between the detection areas and the to-be-detected object; during scanning of a sub-scanning area of the to-be-scanned area by using the probe light, the incidence angle of the probe light to the sub-scanning area is changed, and the plurality of detection areas respectively acquire a plurality of detection images of the same sub-scanning area under different incidence angles at different time points, and the size of one detection area along the arrangement direction is the same as the size of one sub-scanning area along the arrangement direction; or, during scanning of a sub-scanning area of the to-be-scanned area by using the probe light, the exposure time of the plurality of detection areas to the same sub-scanning area is set to be different, and the plurality of detection areas respectively acquire a plurality of detection images of the same sub-scanning area under different exposure times at different time points, and the size of one detection area along the arrangement direction is the same as the size of one sub-scanning area along the arrangement direction.

[0006] Optionally, the step length of the probe light to the to-be-scanned area along the arrangement direction is less than or equal to the size of the detection area along the arrangement direction.

[0007] Optionally, the size of the detection area along the arrangement direction is equal to an integer multiple of the step length of the probe light to the to-be-scanned area along the arrangement direction.

[0008] Optionally, the relative movement direction comprises a scanning direction along the tangent direction of the relative movement trajectory between the detector and the to-be-detected object, and a stepping direction perpendicular to the scanning direction, and the plurality of detection areas are arranged along the scanning direction or the stepping direction.

[0009] Optionally, the scanning track of the probe light on the to-be-scanned region is a plurality of connected concentric circles or spirals.

[0010] Optionally, the light spot area formed by the probe light on the surface of the to-be-measured object covers the detection region at least in the arrangement direction.

[0011] Optionally, the method further comprises: changing the incident angle of the probe light to the sub-scanning region by using a direction adjusting unit; and the direction adjusting unit is an opto-acoustic modulation module or a rotating mirror.

[0012] Optionally, when the direction adjusting unit is a rotating mirror, the rotating mirror is a planar mirror or a mirror with a plurality of reflecting surfaces; and the method further comprises: rotating the rotating mirror to change the incident angle of the probe light to the sub-scanning region by changing the included angle between the reflecting surface of the rotating mirror receiving the probe light and the probe light.

[0013] Optionally, the plurality of detection regions comprise a first detection region to an Mth detection region arranged in sequence, M being an integer greater than or equal to 2; the to-be-scanned region of the to-be-measured object comprises a first sub-scanning region to an Mth sub-scanning region arranged in sequence; the size of a sub-scanning region in the arrangement direction is the same as the size of a detection region in the arrangement direction; the plurality of detection regions acquire a plurality of detection images of the same sub-scanning region at different incident angles at different time instants, respectively, comprising: any mth detection region acquires detection images of the first sub-scanning region to the Mth sub-scanning region at different time instants at different incident angles, wherein m is an integer greater than or equal to 1 and less than or equal to M; and the plurality of detection regions acquire a plurality of detection images of the same sub-scanning region at different exposure times at different time instants, respectively, comprising: the first detection region to the Mth detection region acquire a plurality of detection images of any mth sub-scanning region at different exposure times at different time instants, respectively, wherein m is an integer greater than or equal to 1 and less than or equal to M.

[0014] Optionally, if the incidence angle of the probe light to the sub-scan area of the to-be-scanned area is changed during the scanning process of the probe light to the sub-scan area, the detection method further comprises: extracting, by the processor, a plurality of probe images of the same sub-scan area under different incidence angles; and obtaining the to-be-detected information of the sub-scan area according to the plurality of probe images of the same sub-scan area. If a plurality of exposure times of the plurality of probe areas to the same sub-scan area are set to be different during the scanning process of the probe light to the sub-scan area of the to-be-detected surface, the detection method further comprises: extracting, by the processor, a plurality of probe images of the same sub-scan area under different exposure times; and obtaining the to-be-detected information of the sub-scan area according to the plurality of probe images of the same sub-scan area.

[0015] Optionally, the to-be-detected information comprises defect information; and obtaining the to-be-detected information of the sub-scan area according to the plurality of probe images of the same sub-scan area comprises: when at least one of the plurality of probe images of the same sub-scan area has a defect, it is determined that the sub-scan area has a defect; and extracting a defect position in the corresponding sub-scan area according to the probe image having the defect.

[0016] Optionally, extracting, by the processor, a plurality of probe images of the same sub-scan area under different incidence angles or exposure times comprises: obtaining, according to a scanning track and a scanning speed, a time interval at which adjacent probe areas acquire images of the same sub-scan area; acquiring, by the plurality of probe areas, a total probe image every time interval during the detection process; dividing each total probe image to divide each total probe image into a plurality of probe images corresponding to each sub-scan area, wherein a characteristic size of the probe image is equal to a product of a size of the sub-scan area along the arrangement direction and a magnification of the probe; the characteristic size is a size along an arrangement direction of each probe image in the total probe image; and obtaining a plurality of probe images of the same sub-scan area by obtaining probe images in different orders from the plurality of total probe images, wherein the coordinates of the probe images of the same sub-scan area in the total probe images along the time interval are sequentially adjacent and decrease by the characteristic size.

[0017] Optionally, the scanning of the to-be-scanned region of the surface of the object to be measured by the probe light comprises: first scanning of the to-be-scanned region by the probe light along a scanning direction; after the first scanning, second scanning of the to-be-scanned region by the probe light along a stepping direction; if the arrangement direction is along the scanning direction, the time interval for acquiring images of the same sub-scanning region by adjacent probe regions according to the scanning trajectory and the scanning speed comprises: determining the time interval according to the scanning speed of each first scanning and the size of the probe region along the scanning direction of the first scanning; if the scanning speed of each first scanning is different, the time interval is determined for each first scanning respectively; if the arrangement direction is along the stepping direction, the time interval for acquiring images of the same sub-scanning region by adjacent probe regions according to the scanning trajectory and the scanning speed comprises: determining the time interval according to the scanning speed of the second scanning, the size of the probe region along the stepping direction, and the scanning time for completing one first scanning; wherein the stepping direction is perpendicular to the scanning direction.

[0018] Optionally, the extraction of the multiple probe images of the same sub-scanning region under different exposure times or different incident angles by the processor comprises: placing each total probe image in a world coordinate system, the coordinates of each point in the world coordinate system in the total probe image representing the position coordinates of the corresponding point on the object to be measured; extracting the regions with the same coordinates of each total probe image in the same world coordinate system to obtain the multiple probe images of the same sub-scanning region under different exposure times or different incident angles.

[0019] Optionally, each of the probe regions comprises multiple rows of pixels; the acquisition of the multiple probe images of the same sub-scanning region under different exposure times by the multiple probe regions at different time instants comprises: acquisition of the feedback light of the same sub-scanning region by each row of pixels of the probe region at different time instants; and integration of the feedback light of the same sub-scanning region acquired by each row of pixels of the probe region at different time instants to obtain the probe image of the sub-scanning region.

[0020] The application further provides a detection system, comprising: a light source configured to emit probe light; a detector comprising multiple probe regions, wherein the arrangement direction of the multiple probe regions is configured to be the same as the relative movement direction between the probe regions and an object to be measured; a direction adjusting unit or an exposure time setting unit, wherein the direction adjusting unit is configured to change the incident angle of the probe light to a sub-scanning region of a to-be-scanned region, and the exposure time setting unit is configured to set different exposure times for the multiple probe regions in the detector to acquire images of the same sub-scanning region.

[0021] Optionally, the system further comprises: a step length setting unit configured to set the step length of the probe light along the arrangement direction to the to-be-scanned region to be less than or equal to the size of the probe region along the arrangement direction.

[0022] Optionally, the relative movement direction comprises a scanning direction along a tangent direction of a relative movement track between the detector and the object to be detected, and a stepping direction perpendicular to the scanning direction; and the plurality of detection areas are arranged along the scanning direction or the stepping direction.

[0023] Optionally, the direction adjusting unit is a photoacoustic modulation module or a rotating mirror; the rotating mirror is a plane mirror or a mirror with multiple reflecting surfaces.

[0024] Optionally, the apparatus further comprises a collection lens group configured to collect feedback light formed by the detection light passing through the area to be scanned and transmit the feedback light to the detector.

[0025] Optionally, the apparatus further comprises a processor configured to extract a plurality of detection images of the same sub-scanning area at different incident angles and obtain the to-be-detected information of the sub-scanning area according to the plurality of detection images of the same sub-scanning area; or the processor is configured to extract a plurality of detection images of the same sub-scanning area at different exposure times and obtain the to-be-detected information of the sub-scanning area according to the plurality of detection images of the same sub-scanning area.

[0026] Optionally, the processor is further configured to obtain the to-be-detected information of the same sub-scanning area according to the plurality of detection images of the same sub-scanning area; the to-be-detected information comprises defect information; and according to the plurality of detection images of the same sub-scanning area, the processor is specifically configured to: when at least one detection image of the plurality of detection images of the same sub-scanning area has a defect, determine that the sub-scanning area has a defect; and extract a defect position in the corresponding sub-scanning area according to the detection image with the defect.

[0027] The technical scheme of the present application has the following advantages:

[0028] In the detection method, the detector with multiple detection areas is used to scan the to-be-scanned area of the to-be-detected object, in the process of scanning the sub-scanning area of the to-be-scanned area by the detection light, the multiple detection areas are arranged along the relative movement between the detection area and the to-be-detected object, the incidence angle of the detection light to the sub-scanning area is changed constantly, so that the multiple detection areas acquire multiple detection images of the same sub-scanning area at different incidence angles at different times, and the size of one detection area along the arrangement direction is the same as the size of one sub-scanning area along the arrangement direction. Alternatively, in the process of scanning the sub-scanning area of the to-be-scanned area by the detection light, the exposure times of the multiple detection areas to the same sub-scanning area are different, and the multiple detection areas acquire multiple detection images of the same sub-scanning area at different exposure times at different times, and the size of one detection area along the arrangement direction is the same as the size of one sub-scanning area along the arrangement direction. Therefore, multiple detection images of the same sub-scanning area at different angles or different exposure times can be acquired, and the detection efficiency can be effectively improved.

[0029] Further, the step length of the detection light along the arrangement direction to the to-be-scanned area is less than or equal to the size of the detection area along the arrangement direction. In this way, the surface of the to-be-detected object can be fully scanned and detected, the accuracy of the surface defect detection of the to-be-detected object can be improved, and missed detection can be prevented.

[0030] Further, the relative movement direction includes a scanning direction along the tangent direction of the relative movement trajectory between the detector and the to-be-detected object, and a stepping direction perpendicular to the scanning direction, and the multiple detection areas are arranged along the scanning direction or the stepping direction. The relative movement direction includes multiple directions, the surface of the to-be-detected object can be fully scanned and detected, the accuracy of the surface defect detection of the to-be-detected object can be improved, and missed detection can be prevented.

[0031] Further, changing the incidence angle of the detection light to the sub-scanning area includes changing the incidence angle of the detection light to the sub-scanning area by using a direction adjusting unit, and the direction adjusting unit is an opto-acoustic modulation module or a rotating mirror. By arranging the direction adjusting unit, the incidence angle of the detection light to the sub-scanning area can be changed, manual operation is not needed, and the detection method can be simplified. BRIEF DESCRIPTION OF DRAWINGS

[0032] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the description of the specific embodiments or the prior art. Obviously, the drawings described below are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0033] Figure 1 A step flow chart of a detection method provided by an embodiment of the present application;

[0034] Figure 2 A step flow chart of a detection method provided by an embodiment of the present application;

[0035] Figure 3 A structural schematic diagram of a detection system provided by an embodiment of the present application in a scanning direction;

[0036] Figure 4 A structural schematic diagram of a detection system provided by an embodiment of the present application in another scanning direction;

[0037] Figure 5 A structural schematic diagram of a detector and a to-be-scanned area of a to-be-detected object provided by an embodiment of the present application;

[0038] Figure 6 A trajectory schematic diagram of a detection light scanning a to-be-scanned area on a surface of a to-be-detected object provided by an embodiment of the present application;

[0039] Figure 7 A trajectory schematic diagram of a detection light scanning a to-be-scanned area on a surface of a to-be-detected object provided by another embodiment of the present application;

[0040] Figure 8 A structural schematic diagram of a detection system provided by an embodiment of the present application;

[0041] Figure 9 A step flow chart of another detection method provided by an embodiment of the present application;

[0042] Figure 10 A structural schematic diagram of another detection system provided by an embodiment of the present application. DETAILED DESCRIPTION

[0043] In a semiconductor detection device, different types of defects often produce the strongest signals under illumination of light beams of different incident angles. In order to prevent missing defects, one method is to use a detector to detect each point on the surface of a to-be-detected object under light beams of different incident angles. However, multiple scanning of the surface of the to-be-detected object by light beams of different incident angles will reduce the detection speed and result in reduced yield.

[0044] The wafer surface for manufacturing chips often has various types of defects, and different types of defects have different exposure requirements. For example, the larger the defect size, the stronger the signal light (reflected light or scattered light) generated, but if the signal light is too strong, it is easy to cause the detector to saturate, thereby making it difficult to detect the defect size. For example, the smaller the defect size, the weaker the signal light generated, but if the signal light is too weak, it is difficult to be detected by the detector, thereby easily causing missed detection. In order to prevent missed detection of defects, one method is to scan the wafer multiple times to obtain images under different intensity signal lights by adding an attenuator in the light path and attenuating the signal light to different degrees. However, this method not only requires multiple scanning of the wafer, resulting in extremely low efficiency, but also results in extremely low light power utilization due to the attenuation of the attenuator to the light signal.

[0045] On this basis, the application provides a detection method and a detection system, which improve the detection efficiency.

[0046] The technical solutions of the present application will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0047] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0048] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0049] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0050] An embodiment of the present application provides a detection method, which refers toFigure 1 , comprising:

[0051] Step S1: scanning a to-be-scanned region on a surface of a to-be-measured object by using a probe light, the probe light forming feedback light after passing through the to-be-scanned region, and receiving the feedback light of the to-be-scanned region by using a detector, a field of view of the detector on the surface of the to-be-measured object including a plurality of detection regions, the plurality of detection regions being arranged along a relative movement direction between the detection regions and the to-be-measured object;

[0052] Step S2: changing an incident angle of the probe light to a sub-scanning region of the to-be-scanned region during scanning of the sub-scanning region by the probe light, and causing the plurality of detection regions to respectively acquire a plurality of detection images of the same sub-scanning region under different incident angles at different time instants, a dimension of one detection region along the arrangement direction being the same as a dimension of one sub-scanning region along the arrangement direction; or setting different exposure times of the plurality of detection regions for the same sub-scanning region during scanning of the sub-scanning region by the probe light, and causing the plurality of detection regions to respectively acquire a plurality of detection images of the same sub-scanning region under different exposure times at different time instants, the dimension of one detection region along the arrangement direction being the same as the dimension of one sub-scanning region along the arrangement direction.

[0053] In one embodiment, with reference to Figure 2 , a detection method, comprising:

[0054] Step S11: scanning a to-be-scanned region on a surface of a to-be-measured object by using a probe light, the probe light forming feedback light after passing through the to-be-scanned region, and receiving the feedback light of the to-be-scanned region by using a detector, a field of view of the detector on the surface of the to-be-measured object including a plurality of detection regions, the plurality of detection regions being arranged along a relative movement direction between the detection regions and the to-be-measured object;

[0055] Step S21: changing an incident angle of the probe light to a sub-scanning region of the to-be-scanned region during scanning of the sub-scanning region by the probe light, and causing the plurality of detection regions to respectively acquire a plurality of detection images of the same sub-scanning region under different incident angles at different time instants, a dimension of one detection region along the arrangement direction being the same as a dimension of one sub-scanning region along the arrangement direction.

[0056] In the detection method of the embodiment, the detector with multiple detection zones is used to scan the to-be-scanned area of the object, and the size of one detection zone along the arrangement direction is the same as the size of one sub-scanning area along the arrangement direction. During the scanning of the detection light on the sub-scanning area of the to-be-scanned area, the multiple detection zones are arranged along the relative movement between the detection zone and the object, so as to constantly change the incident angle of the detection light to the sub-scanning area, thereby enabling the multiple detection zones to acquire multiple detection images of the same sub-scanning area at different incident angles at different times. Since the multiple detection images are detection images of the same sub-scanning area at different incident angles, the detection images of the same sub-scanning area at different angles can be acquired, and the detection efficiency can be effectively improved.

[0057] Reference Figure 3 and Figure 4 The detection light is used to scan the to-be-scanned area P on the surface of the object 100 (reference Figure 4 ), and the detection light forms feedback light through the to-be-scanned area P. The detector T includes multiple detection zones in the field of view on the surface of the object 100, and the multiple detection zones are arranged along the relative movement between the detection zone and the object 100. During the scanning detection on the surface of the object 100, the feedback light is generated on the surface of the object 100, and the feedback light is collected by the detector T. The feedback light includes scattered light and reflected light.

[0058] In some embodiments, reference Figure 3 and Figure 4 Multiple detectors T can be used to receive the feedback light of the to-be-scanned area of the object 100. Part of the detectors T can be dark field detectors T(a), and part of the detectors T can be bright field detectors T(b). The bright field detectors T(b) receive the reflected light, and the dark field detectors T(a) receive the scattered light.

[0059] In other embodiments, the dark field detector T(a) or the bright field detector T(b) can be provided.

[0060] During the scanning of the detection light on the sub-scanning area of the to-be-scanned area, the incident angle of the detection light to the sub-scanning area is changed, and the multiple detection zones acquire multiple detection images of the same sub-scanning area at different incident angles at different times.

[0061] In some embodiments, reference Figure 3 , the detection light and the reflected light are located on two sides of the scanning direction X1 respectively. The projections of the detection light and the reflected light on the surface of the object 100 intersect with the scanning direction X1.

[0062] In other embodiments, reference Figure 4 , the projections of the detection light and the reflected light on the surface of the object 100 are parallel to the scanning direction X2.

[0063] In other embodiments, the scanning direction of the probe light to the surface of the object 100 can also be other directions, as long as the probe light irradiates to the surface of the object 100.

[0064] In one embodiment, the relative movement direction between the probe area and the object 100 includes: a scanning direction Y1 (refer to FIG. 2) along the tangent direction of the relative movement trajectory between the detector T and the object 100; and a stepping direction Y2 (refer to FIG. 2) perpendicular to the scanning direction Y1; and the plurality of probe areas are arranged along the scanning direction Y1 or the stepping direction Y2. In this way, the relative movement direction includes multiple directions, which can sufficiently scan and detect the surface of the object, improve the accuracy of the defect detection of the surface of the object 100, and prevent missed detection. Figure 6 And Figure 7 In one embodiment, the relative movement direction between the probe area and the object 100 includes: a scanning direction Y1 (refer to FIG. 2) along the tangent direction of the relative movement trajectory between the detector T and the object 100; and a stepping direction Y2 (refer to FIG. 2) perpendicular to the scanning direction Y1; and the plurality of probe areas are arranged along the scanning direction Y1 or the stepping direction Y2. In this way, the relative movement direction includes multiple directions, which can sufficiently scan and detect the surface of the object, improve the accuracy of the defect detection of the surface of the object 100, and prevent missed detection. Figure 6 And Figure 7 In one embodiment, the relative movement direction between the probe area and the object 100 includes: a scanning direction Y1 (refer to FIG. 2) along the tangent direction of the relative movement trajectory between the detector T and the object 100; and a stepping direction Y2 (refer to FIG. 2) perpendicular to the scanning direction Y1; and the plurality of probe areas are arranged along the scanning direction Y1 or the stepping direction Y2. In this way, the relative movement direction includes multiple directions, which can sufficiently scan and detect the surface of the object, improve the accuracy of the defect detection of the surface of the object 100, and prevent missed detection.

[0065] In one embodiment, the relative movement direction between the probe area and the object 100 includes: a scanning direction Y1 (refer to FIG. 2) along the tangent direction of the relative movement trajectory between the detector T and the object 100; and a stepping direction Y2 (refer to FIG. 2) perpendicular to the scanning direction Y1; and the plurality of probe areas are arranged along the scanning direction Y1 or the stepping direction Y2. In this way, the relative movement direction includes multiple directions, which can sufficiently scan and detect the surface of the object, improve the accuracy of the defect detection of the surface of the object 100, and prevent missed detection.

[0066] In one embodiment, the relative movement direction between the probe area and the object 100 includes: a scanning direction Y1 (refer to FIG. 2) along the tangent direction of the relative movement trajectory between the detector T and the object 100; and a stepping direction Y2 (refer to FIG. 2) perpendicular to the scanning direction Y1; and the plurality of probe areas are arranged along the scanning direction Y1 or the stepping direction Y2. In this way, the relative movement direction includes multiple directions, which can sufficiently scan and detect the surface of the object, improve the accuracy of the defect detection of the surface of the object 100, and prevent missed detection.

[0067] In one embodiment, the relative movement direction between the probe area and the object 100 includes: a scanning direction Y1 (refer to FIG. 2) along the tangent direction of the relative movement trajectory between the detector T and the object 100; and a stepping direction Y2 (refer to FIG. 2) perpendicular to the scanning direction Y1; and the plurality of probe areas are arranged along the scanning direction Y1 or the stepping direction Y2. In this way, the relative movement direction includes multiple directions, which can sufficiently scan and detect the surface of the object, improve the accuracy of the defect detection of the surface of the object 100, and prevent missed detection.

[0068] For example, in another specific embodiment, the step length of the probe light to the scanning area P along the arrangement direction is equal to the size of the probe area along the arrangement direction, which improves the detection efficiency.

[0069] It can be understood that the "scan step" refers to the size of the movement of the probe light once when the probe light scans the to-be-scanned area P along the scanning direction. The "step size" refers to the size of the step of the probe light on the surface of the to-be-scanned area P along the step direction.

[0070] In one embodiment, referring to Figure 6 , the scanning track of the probe light on the to-be-scanned area is a plurality of connected concentric circles; in another embodiment, referring to Figure 7 , the scanning track of the probe light on the to-be-scanned area is a spiral, so that the to-be-scanned area P on the surface of the to-be-detected object can be fully scanned.

[0071] In other embodiments, the track of one scan is a straight line.

[0072] In one embodiment, the spot area formed by the probe light on the surface of the to-be-detected object 100 covers the detection area at least in the arrangement direction. In this way, the surface of the to-be-detected object 100 can be fully scanned and detected, the accuracy of the defect detection of the surface of the to-be-detected object 100 can be improved, and missed detection can be prevented.

[0073] In one embodiment, the incident angle of the probe light to the sub-scanning area is changed by using a direction adjusting unit. By providing the direction adjusting unit, the incident angle of the probe light to the sub-scanning area can be changed without manual operation, which can simplify the detection method to a certain extent.

[0074] In one embodiment, the direction adjusting unit is an opto-acoustic modulation module or a rotating mirror. When the direction adjusting unit is a rotating mirror, the rotating mirror is a plane mirror or a mirror with multiple reflecting surfaces.

[0075] In a specific embodiment, the incident angle of the probe light to the sub-scanning area is changed by using a direction adjusting unit, which includes changing the incident angle of the probe light to the sub-scanning area by using an opto-acoustic modulation module. The opto-acoustic modulation module uses acousto-optic modulation, which is an external modulation technology. The opto-acoustic modulation module converts the probe light emitted by the light source into an acoustic signal, and the vibration of the acoustic signal changes the incident angle of the probe light to the to-be-scanned area. The acousto-optic modulation technology has higher extinction ratio, lower driving power, better temperature stability, better light spot quality, and lower price; compared with mechanical modulation, it has smaller size, weight, and better output waveform. Therefore, by using the opto-acoustic modulation module to change the incident angle of the probe light to the to-be-scanned area, a high-quality detection image can be obtained.

[0076] In another specific embodiment, the direction adjusting unit is configured to change the incident angle of the probe light to the sub-scan area by rotating the rotating mirror, by changing the angle between the reflecting surface of the rotating mirror receiving the probe light and the probe light, so as to change the incident angle of the probe light to the sub-scan area. Since the rotating mirror is low in cost, the detection method can be reduced in cost by using the rotating mirror. For example, during the detection, the incident angle of the probe light to the sub-scan area can be changed by rotating the mirror with multiple reflecting surfaces, which also simplifies the detection method to a certain extent.

[0077] In one specific embodiment, the mirror with multiple reflecting surfaces is a mirror with six reflecting surfaces. It should be noted that in other embodiments, the mirror with multiple reflecting surfaces can also be a mirror with four reflecting surfaces, a mirror with eight reflecting surfaces, or a mirror with twelve reflecting surfaces, as long as the probe light can be reflected to the surface of the object 100, and the present embodiment does not limit this.

[0078] In one embodiment, referring to Figure 8 The detection method provided in the present embodiment further includes: extracting, by the processor J, multiple probe images of the same sub-scan area under different angles; and obtaining the to-be-detected information of the sub-scan area according to the multiple probe images of the same sub-scan area. The use of the processor J can improve the speed of obtaining the probe images, and thus the detection efficiency of the detection method can be improved.

[0079] In one embodiment, the to-be-detected information includes defect information.

[0080] In one embodiment, the defect information of the sub-scan area is obtained according to the multiple probe images of the same sub-scan area under different angles, including: when at least one of the multiple probe images of the same sub-scan area under different angles has a defect, it is determined that the sub-scan area has a defect; and the defect position in the corresponding sub-scan area is extracted according to the probe image with the defect.

[0081] The multiple probe images of the same sub-scan area under different angles are obtained under probe light of different incident angles, and the feedback light of different types of defects under probe light of different incident angles has different light intensities. In this way, the multiple probe images of the same sub-scan area under different angles contain image information of feedback light of different light intensities of possible defects, which avoids missing detection.

[0082] In one embodiment of the present application, the processor J extracts multiple detection images of the same sub-scanning area at different incident angles, comprising: placing each total detection image in a world coordinate system, wherein the coordinates of each point in the world coordinate system of the total detection image represent the position coordinates of the corresponding point on the object to be detected; extracting the regions of each total detection image having the same coordinates in the same world coordinate system to obtain multiple detection images of the same sub-scanning area at different incident angles.

[0083] In one embodiment, the processor J extracts multiple detection images of the same sub-scanning area at different incident angles, comprising: obtaining the time interval for obtaining images of the same sub-scanning area by the adjacent detection areas according to the scanning trajectory and the scanning speed; obtaining a total detection image by the multiple detection areas at the time interval during the detection process; dividing each total detection image to divide each total detection image into multiple detection images corresponding to each sub-scanning area, wherein the characteristic size of the detection image is equal to the product of the size of the sub-scanning area along the arrangement direction and the magnification of the detector, and the characteristic size is the size along the arrangement direction of each detection image in the total detection image; and obtaining multiple detection images of the same sub-scanning area by obtaining detection images of different orders from the multiple total detection images, wherein the coordinates of the detection images of the same sub-scanning area in the total detection images sequentially adjacent along the time interval decrease by the characteristic size.

[0084] For example, the first total detection image obtains the first detection image, the second detection image, the third detection image and the fourth detection image arranged in sequence, and the position coordinates of the first detection image, the second detection image, the third detection image and the fourth detection image in the first total detection image along the arrangement direction increase. The second total detection image obtains the fifth detection image, the sixth detection image, the seventh detection image and the eighth detection image arranged in sequence, and the position coordinates of the fifth detection image, the sixth detection image, the seventh detection image and the eighth detection image in the second total detection image along the arrangement direction increase. The third total detection image obtains the ninth detection image, the tenth detection image, the eleventh detection image and the twelfth detection image arranged in sequence, and the position coordinates of the ninth detection image, the tenth detection image, the eleventh detection image and the twelfth detection image in the third total detection image along the arrangement direction increase. The fourth total detection image obtains the thirteenth detection image, the fourteenth detection image, the fifteenth detection image and the sixteenth detection image arranged in sequence, and the position coordinates of the thirteenth detection image, the fourteenth detection image, the fifteenth detection image and the sixteenth detection image in the fourth total detection image along the arrangement direction increase. The fourth detection image, the seventh detection image, the tenth detection image and the thirteenth detection image correspond to the same sub-scanning area. The third detection image, the sixth detection image and the ninth detection image correspond to the same sub-scanning area. The second detection image and the fifth detection image correspond to the same sub-scanning area. With continuous scanning, the number of total detection images obtained is greater than the number of detection areas, and each detection area can image each sub-scanning area, so that images of different exposure times or the number of detection areas of each sub-scanning area can be obtained.

[0085] The method for scanning the to-be-scanned area of the surface of the to-be-measured object by the detection light comprises: performing first scanning on the to-be-scanned area by the detection light along a scanning direction; and performing second scanning on the to-be-scanned area by the detection light along a stepping direction after the first scanning.

[0086] When the arrangement direction of the plurality of detection areas is along the scanning direction, the time interval for obtaining images of the same sub-scanning area by adjacent detection areas is obtained according to the scanning trajectory and the scanning speed, which comprises: determining the time interval according to the scanning speed of each first scanning and the size of the detection area along the scanning direction of the first scanning; and if the scanning speed of each first scanning is different, the time interval is determined for each first scanning.

[0087] In another embodiment, when the arrangement direction is along the stepping direction, the time interval for obtaining images of the same sub-scanning area by adjacent detection areas is obtained according to the scanning trajectory and the scanning speed, which comprises: determining the time interval according to the scanning speed of the second scanning, the size of the detection area along the stepping direction, and the scanning time for completing one first scanning.

[0088] In one embodiment, the plurality of detection regions comprises first detection region to Mth detection region arranged in sequence, M is an integer greater than or equal to 2; the to-be-scanned region P of the to-be-measured object comprises first sub-scanning region to Mth sub-scanning region arranged in sequence, the size of the sub-scanning region in the arrangement direction is the same as the size of the detection region along the arrangement direction; the plurality of detection regions respectively acquire a plurality of detection images of the same sub-scanning region at different incident angles at different time instants, comprising: any mth detection region acquires detection images of the first sub-scanning region to the Mth sub-scanning region at different time instants with different incident angles set, wherein m is an integer greater than or equal to 1 and less than or equal to M.

[0089] It should be noted that M can also be other integers, such as 5, 6, 7, 8, or 12, and the present embodiment does not limit this as long as the same technical idea is applied. The present embodiment is exemplarily described in the case of M being 4.

[0090] For example, referring to Figure 5 , the plurality of detection regions of the detector comprises first detection region T1, second detection region T2, third detection region T3, and fourth detection region T4 arranged in sequence; the to-be-scanned region P comprises first sub-scanning region P1, second sub-scanning region P2, third sub-scanning region P3, and fourth sub-scanning region P4 arranged in sequence; in the process of scanning the to-be-scanned region P of the surface of the to-be-measured object 100 by the detection light, the incident angle of the detection light to the to-be-scanned region P is changed, comprising: the first detection region T1 scans the first sub-scanning region P1, the second sub-scanning region P2, the third sub-scanning region P3, and the fourth sub-scanning region P4 at different time instants with different incident angles set respectively, the second detection region T2 scans the first sub-scanning region P1, the second sub-scanning region P2, the third sub-scanning region P3, and the fourth sub-scanning region P4 at different time instants with different incident angles set respectively; the third detection region T3 scans the first sub-scanning region P1, the second sub-scanning region P2, the third sub-scanning region P3, and the fourth sub-scanning region P4 at different time instants with different incident angles set respectively, and the fourth detection region T4 scans the first sub-scanning region P1, the second sub-scanning region P2, the third sub-scanning region P3, and the fourth sub-scanning region P4 at different time instants with different incident angles set respectively.

[0091] In the first time, the incident angle of the probe light emitted by the light source Q to the surface of the object 100 is a first angle, in the second time, the incident angle of the probe light emitted by the light source Q to the surface of the object 100 is a second angle, in the third time, the incident angle of the probe light emitted by the light source Q to the surface of the object 100 is a third angle, and in the fourth time, the incident angle of the probe light emitted by the light source Q to the surface of the object 100 is a fourth angle. In the first time, the first detection area T1 obtains a detection image of the first sub-scanning area P1, the second detection area T2 obtains a detection image of the second sub-scanning area P2, the third detection area T3 obtains a detection image of the third sub-scanning area P3, and the fourth detection area T4 obtains a detection image of the fourth sub-scanning area P4; in the second time, the third detection area T3 obtains a detection image of the fourth sub-scanning area P4, the second detection area T2 obtains a detection image of the third sub-scanning area P3, and the first detection area T1 obtains a detection image of the second sub-scanning area P2; in the third time, the second detection area T2 obtains a detection image of the fourth sub-scanning area P4, and the first detection area T1 obtains a detection image of the third sub-scanning area P3; in the fourth time, the first detection area T1 obtains a detection image of the fourth sub-scanning area P4. Through continuous scanning time, each detection area can obtain detection images of the first sub-scanning area P1, the second sub-scanning area P2, the third sub-scanning area P3 and the fourth sub-scanning area P4.

[0092] The first sub-scanning area P1 can be photographed by the first detection area T1, the second detection area T2, the third detection area T3 and the fourth detection area T4 respectively, and each detection image is obtained at different incident angles; similarly, the second sub-scanning area P2 can be photographed by the first detection area T1, the second detection area T2, the third detection area T3 and the fourth detection area T4 respectively, and each detection image is obtained at different incident angles; the third sub-scanning area P3 can be photographed by the first detection area T1, the second detection area T2, the third detection area T3 and the fourth detection area T4 respectively, and each detection image is obtained at different incident angles, and the fourth sub-scanning area P4 can be photographed by the first detection area T1, the second detection area T2, the third detection area T3 and the fourth detection area T4 respectively, and each detection image is obtained at different incident angles. Therefore, the detection method provided by the application can obtain detection images of each area at different angles, which can effectively improve the detection efficiency.

[0093] Another embodiment of the application provides a detection method, referring to Figure 9 , comprising:

[0094] Step S21: scanning the to-be-scanned area on the surface of the object by using the probe light, the probe light forming feedback light through the to-be-scanned area, and receiving the feedback light of the to-be-scanned area by using a detector; the field of view of the detector on the surface of the object includes a plurality of detection areas, and the plurality of detection areas are arranged along the relative movement direction between the detection area and the object;

[0095] Step S22: During the scanning process of the sub-scanning area of ​​the area to be scanned by the probe light, the exposure time of the same sub-scanning area by multiple probe areas is set to be different, and the multiple probe areas acquire multiple probe images of the same sub-scanning area at different exposure times at different times. The size of a probe area along the arrangement direction is the same as the size of a sub-scanning area along the arrangement direction.

[0096] The detection method provided in this embodiment involves scanning a sub-scanning area of ​​the area to be scanned by a probe light. The size of one probe area along the arrangement direction is the same as the size of one sub-scanning area along the arrangement direction. Multiple probe areas are set to have different exposure times for the same sub-scanning area, and multiple probe areas acquire multiple detection images of the same sub-scanning area at different exposure times at different times. Therefore, multiple detection images of the same sub-scanning area at different exposure times can be acquired. Different exposure times are suitable for detecting defects of different sizes. Thus, for sub-scanning areas with unknown defect sizes, different defects can be identified from appropriate exposure times, thereby detecting the defect, avoiding missed detections, and effectively improving detection efficiency.

[0097] Secondly, there is no need to install attenuators in the optical path to attenuate the feedback light, thus improving the utilization rate of optical power.

[0098] refer to Figure 5 The probe light is used to scan the area P (reference) on the surface of the test object 100. Figure 4 The detector T performs a scan, and the probe light passes through the scanned area P to form feedback light, wherein the probe light is emitted from the light source Q. The field of view of the detector T on the surface of the object 100 includes multiple detection areas, which are arranged in a relative moving manner between the detection areas and the object 100. During the scanning detection of the surface of the object 100, the surface of the object 100 generates feedback light, which is collected by the detector T. The feedback light includes scattered light and reflected light.

[0099] In some embodiments, reference Figure 3 and Figure 4 Multiple detectors T can be used to receive the feedback light from the scanned area of ​​the test object 100. Some detectors T can be dark field detectors T(a), and some detectors T can be bright field detectors T(b). The bright field detector T(b) receives the reflected light, and the dark field detector T(a) receives the scattered light.

[0100] In other embodiments, a dark field detector T(a) or a bright field detector T(b) may be provided.

[0101] In the process of scanning the sub-scan area P of the detection light, the exposure time of the plurality of detection areas to the same sub-scan area is set to be different, and the plurality of detection areas are set to obtain a plurality of detection images of the same sub-scan area under different exposure times at different times.

[0102] In some embodiments, the detection light and the reflected light are located on two sides of the scanning direction X1, respectively. The projections of the detection light and the reflected light on the surface of the object 100 are perpendicular to the scanning direction X1, respectively. Figure 3 In some embodiments, the detection light and the reflected light are located on two sides of the scanning direction X1, respectively. The projections of the detection light and the reflected light on the surface of the object 100 are perpendicular to the scanning direction X1, respectively.

[0103] Figure 4 In some embodiments, the detection light and the reflected light are located on two sides of the scanning direction X1, respectively. The projections of the detection light and the reflected light on the surface of the object 100 are perpendicular to the scanning direction X1, respectively.

[0104] In other embodiments, the scanning direction of the detection light on the surface of the object 100 can also be other directions, as long as the detection light irradiates the surface of the object 100.

[0105] In one embodiment, the relative movement direction between the detection area and the object 100 includes: a scanning direction Y1 along the tangent direction of the relative movement trajectory between the detector T and the object 100 (refer to Figure 6 or Figure 7 ); and a stepping direction Y2 perpendicular to the scanning direction Y1 (refer to Figure 6 or Figure 7 ); and the plurality of detection areas are arranged along the scanning direction Y1 or the stepping direction Y2. In this way, the relative movement direction includes a plurality of directions, which can sufficiently scan and detect the surface of the object 100, improve the accuracy of defect detection on the surface of the object 100, and prevent missed detection.

[0106] In one embodiment, the step length of the detection light along the arrangement direction of the detection area on the scan area P is less than or equal to the size of the detection area along the arrangement direction. In this way, the surface of the object 100 can be sufficiently scanned and detected, the accuracy of defect detection on the surface of the object 100 can be improved, and missed detection can be prevented. In a specific embodiment, when the plurality of detection areas are arranged along the scanning direction, the scanning step length of the detection light along the arrangement direction of the detection area on the scan area P is less than or equal to the size of the detection area along the arrangement direction. In a specific embodiment, when the plurality of detection areas are arranged along the stepping direction, the stepping step length of the detection light along the arrangement direction of the detection area on the scan area P is less than or equal to the size of the detection area along the arrangement direction.

[0107] ​In one embodiment, the size of the detection area along the arrangement direction is equal to an integer multiple of the step length of the detection light along the arrangement direction on the to-be-scanned area P. In a specific embodiment, when the plurality of detection areas are arranged along the scanning direction, the size of the detection area along the arrangement direction is equal to an integer multiple of the scanning step length of the detection light along the arrangement direction on the to-be-scanned area P. In a specific embodiment, when the plurality of detection areas are arranged along the stepping direction, the size of the detection area along the arrangement direction is equal to an integer multiple of the stepping step length of the detection light along the arrangement direction on the to-be-scanned area P.

[0108] In a specific embodiment, the step length of the detection light along the arrangement direction on the to-be-scanned area P is 1 / 2, 1 / 3 or 1 / 10 of the size of the detection area along the arrangement direction. In this way, the same sub-scanning area can be detected multiple times, and the missing detection of the to-be-detected object 100 can be greatly avoided.

[0109] For example, in another specific embodiment, the step length of the detection light along the arrangement direction on the to-be-scanned area P is equal to the size of the detection area along the arrangement direction, which improves the detection efficiency.

[0110] It can be understood that the "scanning step length" refers to the size of the movement of the detection light once when the detection light scans the to-be-scanned area P along the scanning direction. The "stepping step length" refers to the size of the stepping of the detection light on the surface of the to-be-scanned area P along the stepping direction Y2.

[0111] In one embodiment, referring to Figure 6 , the scanning track of the detection light on the to-be-scanned area is a plurality of connected concentric circles; in another embodiment, referring to Figure 7 , the scanning track of the detection light on the to-be-scanned area is a spiral, so that the detection light can fully scan the to-be-scanned area P on the surface of the to-be-detected object.

[0112] In other embodiments, the scanning track is a straight line.

[0113] In one embodiment, the light spot area formed by the detection light on the surface of the to-be-detected object 100 covers the detection area at least in the arrangement direction. In this way, the surface of the to-be-detected object 100 can be fully scanned and detected, the accuracy of the detection of the defects on the surface of the to-be-detected object 100 can be improved, and the missing detection can be prevented.

[0114] In one embodiment, referring to Figure 8 , further comprising: extracting, by the processor J, a plurality of detection images of the same sub-scanning area at different exposure times; and obtaining the to-be-detected information of the sub-scanning area according to the plurality of detection images of the same sub-scanning area.

[0115] In one embodiment of the present application, the processor J extracts multiple detection images of the same sub-scanning area at different exposure times, comprising: placing each total detection image in a world coordinate system, wherein the coordinates of each point in the world coordinate system of the total detection image represent the position coordinates of the corresponding point on the object to be measured; extracting the regions of each total detection image having the same coordinates in the same world coordinate system to obtain multiple detection images of the same sub-scanning area at different exposure times.

[0116] In one embodiment, the processor J extracts multiple detection images of the same sub-scanning area at different exposure times, comprising: obtaining the time interval for the adjacent detection areas to obtain images of the same sub-scanning area according to the scanning trajectory and the scanning speed; obtaining a total detection image by the multiple detection areas every time interval during the detection process; dividing each total detection image to divide each total detection image into multiple detection images corresponding to each sub-scanning area, wherein the characteristic size of the detection image is equal to the product of the size of the sub-scanning area along the arrangement direction and the magnification of the detector, and the characteristic size is the size along the arrangement direction of each detection image in the total detection image; obtaining multiple detection images of the same sub-scanning area by obtaining detection images in different orders from the multiple total detection images, and the coordinates of the detection images of the same sub-scanning area in the total detection images along the time interval decrease by the characteristic size.

[0117] The detection light scans the to-be-scanned area of the object to be measured, comprising: the detection light performs a first scan on the to-be-scanned area along a scanning direction; after the first scan, the detection light performs a second scan on the to-be-scanned area along a stepping direction.

[0118] If the arrangement direction is along the scanning direction, the time interval for the adjacent detection areas to obtain images of the same sub-scanning area is obtained according to the scanning trajectory and the scanning speed, comprising: determining the time interval according to the scanning speed of each first scan and the size of the detection area along the scanning direction of the first scan; if the scanning speed of each first scan is different, then determine the time interval for each first scan respectively.

[0119] If the arrangement direction is along the stepping direction, the time interval for the adjacent detection areas to obtain images of the same sub-scanning area is obtained according to the scanning trajectory and the scanning speed, comprising: determining the time interval according to the scanning speed of the second scan, the size of the detection area along the stepping direction, and the scanning time for completing one first scan.

[0120] The multiple detection areas of the detector are different regions of the same detector. Alternatively, the detector is composed of multiple detection devices, and the multiple detection areas are multiple detection devices.

[0121] In one embodiment, each detection area includes multiple rows of pixels, and the number of pixel rows of each detection area is the same or different; the multiple detection areas acquire multiple detection images of the same sub-scan area at different exposure times at different time instants, including: each row of pixels of a detection area acquires feedback light of the same sub-scan area at different time instants; and integrating the feedback light of the same sub-scan area acquired by each row of pixels of a detection area at different time instants to acquire a detection image of the sub-scan area.

[0122] The pixel row arrangement direction is parallel to the arrangement direction of the different detection areas. The pixel column arrangement direction is perpendicular to the pixel row arrangement direction.

[0123] Specifically, in the embodiment, the detector is a surface array detector, and each detection area includes multiple rows and multiple columns of pixels.

[0124] In one embodiment, the information to be detected includes defect information; the information to be detected of the sub-scan area is acquired according to the multiple detection images of the same sub-scan area, including: when at least one detection image of the multiple detection images of the same sub-scan area has a defect, it is determined that the sub-scan area has a defect; and the defect position in the corresponding sub-scan area is extracted according to the detection image with the defect.

[0125] In one embodiment, the multiple detection areas include first detection area to Mth detection area arranged in sequence, M is an integer greater than or equal to 2; the sub-scan area to be scanned of the object to be detected includes first sub-scan area to Mth sub-scan area arranged in sequence; the size of the sub-scan area along the arrangement direction is the same as the size of the detection area along the arrangement direction; the multiple detection areas acquire multiple detection images of the same sub-scan area at different exposure times at different time instants, including: the first detection area to the Mth detection area acquire multiple detection images of any mth sub-scan area at different exposure times at different time instants, where m is an integer greater than or equal to 1 and less than or equal to M.

[0126] It should be noted that M can also be other integers, for example, 5, 6, 7, 8 or 12, and the embodiment does not limit this as long as the same technical idea is applied. The embodiment is exemplarily described in the case of M being 4.

[0127] For example, reference can be continuously made to Figure 5The plurality of detection areas of the detector comprises the first detection area T1, the second detection area T2, the third detection area T3 and the fourth detection area T4 arranged in sequence; the to-be-scanned area P comprises the first sub-scanning area P1, the second sub-scanning area P2, the third sub-scanning area P3 and the fourth sub-scanning area P4 arranged in sequence; during scanning of the to-be-scanned area P on the surface of the to-be-measured object 100 by the detection light, the plurality of detection areas are set to have different exposure times for the same sub-scanning area, comprising: the first detection area T1 scans the first sub-scanning area P1, the second sub-scanning area P2, the third sub-scanning area P3 and the fourth sub-scanning area P4 respectively at a first exposure time, the second detection area T2 scans the first sub-scanning area P1, the second sub-scanning area P2, the third sub-scanning area P3 and the fourth sub-scanning area P4 respectively at a second exposure time; the third detection area T3 scans the first sub-scanning area P1, the second sub-scanning area P2, the third sub-scanning area P3 and the fourth sub-scanning area P4 respectively at a third exposure time, and the fourth detection area T4 scans the first sub-scanning area P1, the second sub-scanning area P2, the third sub-scanning area P3 and the fourth sub-scanning area P4 respectively at a fourth exposure time.

[0128] At the first time, the first detection area T1 obtains a detection image of the first sub-scanning area P1, the second detection area T2 obtains a detection image of the second sub-scanning area P2, the third detection area T3 obtains a detection image of the third sub-scanning area P3, and the fourth detection area T4 obtains a detection image of the fourth sub-scanning area P4; at the second time, the third detection area T3 obtains a detection image of the fourth sub-scanning area P4, the second detection area T2 obtains a detection image of the third sub-scanning area P3, and the first detection area T1 obtains a detection image of the second sub-scanning area P2; at the third time, the second detection area T2 obtains a detection image of the fourth sub-scanning area P4, and the first detection area T1 obtains a detection image of the third sub-scanning area P3; at the fourth time, the first detection area T1 obtains a detection image of the fourth sub-scanning area P4. Through continuous scanning time, each detection area can obtain detection images of the first sub-scanning area P1, the second sub-scanning area P2, the third sub-scanning area P3 and the fourth sub-scanning area P4.

[0129] The first sub-scanning area P1 can be respectively photographed by the first detection area T1, the second detection area T2, the third detection area T3 and the fourth detection area T4 to obtain a detection image, and each detection image is obtained at different incident angles; similarly, the second sub-scanning area P2 can be respectively photographed by the first detection area T1, the second detection area T2, the third detection area T3 and the fourth detection area T4 to obtain a detection image, and each detection image is obtained at different incident angles; the third sub-scanning area P3 can be respectively photographed by the first detection area T1, the second detection area T2, the third detection area T3 and the fourth detection area T4 to obtain a detection image, and each detection image is obtained at different incident angles, and the fourth sub-scanning area P4 can be respectively photographed by the first detection area T1, the second detection area T2, the third detection area T3 and the fourth detection area T4 to obtain a detection image, and each detection image is obtained at different exposure times. Therefore, by scanning the surface of the measured object 100 once, the images of each sub-scanning area at different exposure times are obtained, which can effectively improve the detection efficiency and the utilization rate of optical power.

[0130] The same parts of the present embodiment as the previous embodiment will not be described in detail.

[0131] The present embodiment also provides a detection system, in combination with the above Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 and Figure 8 , comprising:

[0132] a light source Q, the light source Q is used for emitting detection light;

[0133] a detector T, the detector T comprises a plurality of detection areas, and the arrangement direction of the plurality of detection areas is used for being the same as the relative movement direction between the detection area and the measured object 100;

[0134] a direction adjusting unit 200, used for changing the incident angle of the detection light to the sub-scanning area of the to-be-scanned area P.

[0135] The detection system provided by the present embodiment, the detector T comprises a plurality of detection areas, and the arrangement direction of the plurality of detection areas is used for being the same as the relative movement direction between the detection area and the measured object 100; the direction adjusting unit 200 is used for changing the incident angle of the detection light to the sub-scanning area of the measured object 100. Therefore, by scanning the to-be-scanned area of the measured object 100 by the detector T with a plurality of detection areas, the incident angle of the detection light is changed during the scanning process, so that the plurality of detection areas respectively obtain a plurality of detection images of the same sub-scanning area at different incident angles at different times. Therefore, the detection images of the same sub-scanning area at different angles can be obtained, and the detection efficiency can be effectively improved. Therefore, the detection efficiency of the detection system is high.

[0136] In one embodiment, the relative movement direction comprises a scanning direction along a tangent direction of a relative movement trajectory between the detector T and the object 100 to be detected, and a stepping direction along a perpendicular direction of the scanning direction; and the plurality of detection regions are arranged along the scanning direction or the stepping direction. In this way, the relative movement direction comprises a plurality of directions, so that the surface of the object to be detected can be fully scanned and detected, and the accuracy of detecting the surface defects of the object 100 can be improved, and the missed detection can be prevented.

[0137] In one embodiment, the detection system further comprises a step length setting unit (not shown) configured to set a step length of the detection light along the arrangement direction on the scanning region to be less than or equal to a size of the detection region along the arrangement direction. By setting the step length setting unit, the scanning speed of the detection system is improved, and the step length setting unit can set the step length of the detection light along the arrangement direction on the scanning region to be less than or equal to the size of the detection region along the arrangement direction, so that the surface of the object 100 to be detected can be fully scanned and detected, the accuracy of detecting the surface defects of the object 100 can be improved, and the missed detection can be prevented.

[0138] In one embodiment, the step length setting unit is configured to set the size of the detection region along the arrangement direction to be equal to an integer multiple of the step length of the detection light along the arrangement direction.

[0139] In one embodiment, the detection light is configured to form a light spot region on the surface of the object 100 to be detected, and the light spot region covers the detection region at least along the arrangement direction. In this way, the surface of the object 100 to be detected can be fully scanned and detected, the accuracy of detecting the surface defects of the object 100 can be improved, and the missed detection can be prevented.

[0140] In one embodiment, the direction adjusting unit 200 is arranged in an optical path between the light source Q and the object 100 to be detected.

[0141] In one embodiment, the direction adjusting unit 200 is a photoacoustic modulation module or a rotating mirror.

[0142] For example, the rotating mirror is a plane mirror or a mirror with multiple reflecting surfaces.

[0143] For example, the mirror with multiple reflecting surfaces is a hexagonal mirror. It should be noted that in other embodiments, the mirror with multiple reflecting surfaces can also be a mirror with four reflecting surfaces, a mirror with eight reflecting surfaces, or a mirror with twelve reflecting surfaces, as long as the detection light can be reflected to the surface of the object to be detected, and the present embodiment does not limit this.

[0144] In one embodiment, the plurality of detection zones of the detector T comprises a first detection zone to an Mth detection zone arranged in sequence, M being an integer greater than or equal to 2; the to-be-scanned region of the to-be-detected object comprises a first sub-scanning region to an Mth sub-scanning region arranged in sequence, the size of the sub-scanning region along the arrangement direction being the same as the size of the detection zone along the arrangement direction.

[0145] In one embodiment, with continued reference to Figure 8 , the detection system further comprises a processor J configured to extract a plurality of detection images of the same sub-scanning region at different angles and obtain to-be-detected information of the sub-scanning region according to the plurality of detection images of the same sub-scanning region, wherein the to-be-detected information comprises defect information. In this way, the surface defects of the to-be-detected object 100 can be automatically detected, which is beneficial to avoid detection errors caused by insufficient experience of personnel.

[0146] Exemplarily, the processor J can be a computer.

[0147] The processor J is further configured to obtain to-be-detected information of the sub-scanning region according to the plurality of detection images of the same sub-scanning region; the to-be-detected information comprises defect information; and in obtaining the to-be-detected information of the sub-scanning region according to the plurality of detection images of the same sub-scanning region, the processor is specifically configured to: when at least one detection image of the plurality of detection images of the same sub-scanning region has a defect, determine that the sub-scanning region has a defect; and extract a defect position in the corresponding sub-scanning region according to the detection image having the defect.

[0148] In one embodiment, with continued reference to Figure 8 , the detection system further comprises a half-mirror 400 arranged in the light path between the light source Q and the direction adjusting unit 200.

[0149] In one embodiment, with continued reference to Figure 8 , the detection system further comprises a focusing unit 300, which can focus the light emitted by the light source Q.

[0150] Exemplarily, the focusing unit 300 comprises a focusing lens.

[0151] In one embodiment, the focusing unit 300 is arranged in the light path between the half-mirror 400 and the direction adjusting unit 200.

[0152] In another embodiment, the focusing unit 300 can be placed in the light path between the half-mirror 400 and the light source Q.

[0153] In one embodiment, with continued reference to Figure 8 , the detection system further comprises a diaphragm 500 arranged in the light path between the half-mirror 400 and the detector T.

[0154] The detection system provided in the embodiment further comprises a collection lens set, which is configured to collect feedback light formed by the probe light in the to-be-scanned region and transmit the feedback light to the detector.

[0155] Figure 8 Only one detector T is shown in the figure, and it should be noted that multiple detectors T can be arranged in the detection system.

[0156] For example, referring to Figure 5 , the multiple detection regions comprise a first detection region T1, a second detection region T2, a third detection region T3 and a fourth detection region T4 arranged in sequence, and the to-be-scanned region P comprises a first sub-scanning region P1, a second sub-scanning region P2, a third sub-scanning region P3 and a fourth sub-scanning region P4 arranged in sequence; during the scanning of the to-be-scanned region P on the surface of the to-be-measured object 100 by the probe light, the incident angle of the probe light to the to-be-scanned region P is changed, including: the first detection region T1 scans the first sub-scanning region P1, the second sub-scanning region P2, the third sub-scanning region P3 and the fourth sub-scanning region P4 at different time points with different incident angles respectively, and the second detection region T2 scans the first sub-scanning region P1, the second sub-scanning region P2, the third sub-scanning region P3 and the fourth sub-scanning region P4 at different time points with different incident angles respectively; the third detection region T3 scans the first sub-scanning region P1, the second sub-scanning region P2, the third sub-scanning region P3 and the fourth sub-scanning region P4 at different time points with different incident angles respectively, and the fourth detection region T4 scans the first sub-scanning region P1, the second sub-scanning region P2, the third sub-scanning region P3 and the fourth sub-scanning region P4 at different time points with different incident angles respectively.

[0157] In the first time, the incident angle of the probe light emitted by the light source Q to the surface of the object 100 is a first angle, in the second time, the incident angle of the probe light emitted by the light source Q to the surface of the object 100 is a second angle, in the third time, the incident angle of the probe light emitted by the light source Q to the surface of the object 100 is a third angle, and in the fourth time, the incident angle of the probe light emitted by the light source Q to the surface of the object 100 is a fourth angle. In the first time, the first detection area T1 obtains a detection image of the first sub-scanning area P1, the second detection area T2 obtains a detection image of the second sub-scanning area P2, the third detection area T3 obtains a detection image of the third sub-scanning area P3, and the fourth detection area T4 obtains a detection image of the fourth sub-scanning area P4; in the second time, the third detection area T3 obtains a detection image of the fourth sub-scanning area P4, the second detection area T2 obtains a detection image of the third sub-scanning area P3, and the first detection area T1 obtains a detection image of the second sub-scanning area P2; in the third time, the second detection area T2 obtains a detection image of the fourth sub-scanning area P4, and the first detection area T1 obtains a detection image of the third sub-scanning area P3; in the fourth time, the first detection area T1 obtains a detection image of the fourth sub-scanning area P4. Through continuous scanning time, each detection area can obtain detection images of the first sub-scanning area P1, the second sub-scanning area P2, the third sub-scanning area P3 and the fourth sub-scanning area P4.

[0158] The first sub-scanning area P1 can be photographed by the first detection area T1, the second detection area T2, the third detection area T3 and the fourth detection area T4 respectively, and each detection image is obtained at different incident angles; similarly, the second sub-scanning area P2 can be photographed by the first detection area T1, the second detection area T2, the third detection area T3 and the fourth detection area T4 respectively, and each detection image is obtained at different incident angles; the third sub-scanning area P3 can be photographed by the first detection area T1, the second detection area T2, the third detection area T3 and the fourth detection area T4 respectively, and each detection image is obtained at different incident angles, and the fourth sub-scanning area P4 can be photographed by the first detection area T1, the second detection area T2, the third detection area T3 and the fourth detection area T4 respectively, and each detection image is obtained at different incident angles. Therefore, the detection method provided by the application can obtain detection images of each region at different angles by scanning the surface of the object 100 once, which can effectively improve the detection efficiency.

[0159] The embodiment also provides another detection system, referring to Figure 10 , comprising:

[0160] A light source, the light source is used for emitting probe light;

[0161] A detector, the detector comprises a plurality of detection areas, and the arrangement direction of the plurality of detection areas is used for being the same as the relative movement direction between the detection area and the object.

[0162] The exposure time setting unit is configured to set different exposure times for the multiple detection areas in the detector to the same sub-scanning area.

[0163] The detection system provided in the embodiment includes multiple detection areas, and the arrangement direction of the multiple detection areas is the same as the relative movement direction between the detection areas and the object to be detected. The exposure time setting unit is configured to set different exposure times for the multiple detection areas in the detector to the same sub-scanning area. Therefore, during the scanning of the detection light to the sub-scanning area on the surface of the object to be detected, the multiple detection areas have different exposure times to the same sub-scanning area, and the multiple detection areas can respectively acquire multiple detection images of the same sub-scanning area under different exposure times at different time points. Therefore, multiple detection images of the same sub-scanning area under different exposure times can be acquired after one scanning, and the detection efficiency and the light power utilization rate can be effectively improved.

[0164] In one embodiment, the number of pixel rows of each detection area in the detector is different. Since each detection area includes multiple rows of pixels, each detection area can acquire a clear detection image of the same sub-scanning area, and the detection accuracy of the surface of the object to be detected can be improved to achieve accurate detection of the surface of the object to be detected.

[0165] The difference between the embodiment and the previous embodiment is that the processor is configured to extract multiple detection images of the same sub-scanning area under different exposure times, and acquire the detection information of the sub-scanning area according to the multiple detection images of the same sub-scanning area.

[0166] The processor is further configured to acquire the detection information of the sub-scanning area according to the multiple detection images of the same sub-scanning area. The detection information includes defect information. According to the acquisition of the detection information of the sub-scanning area according to the multiple detection images of the same sub-scanning area, the processor is specifically configured to: when at least one detection image of the multiple detection images of the same sub-scanning area has a defect, it is determined that the sub-scanning area has a defect; and extract the defect position in the corresponding sub-scanning area according to the detection image with the defect.

[0167] The detection system provided in the embodiment further includes a collection lens group configured to collect feedback light formed by the detection light passing through the sub-scanning area to be scanned, and transmit the feedback light to the detector.

[0168] The same parts of the embodiment and the previous embodiment will not be described in detail.

[0169] Obviously, the above embodiments are merely example for clearly illustrating but not limitation to the embodiments. Based on the above description, other different forms of changes or variations can be made by those skilled in the art. Here, all the embodiments need not and can not be enumerated. The obvious changes or variations derived from the above description are still within the protection scope of the present application.

Claims

1. A method of detection, characterized in that, The application relates to a scanning method and device. The scanning method comprises the following steps: scanning a to-be-scanned area on a surface of a to-be-measured object by using probe light, the probe light forming feedback light after passing through the to-be-scanned area, and receiving the feedback light of the to-be-scanned area by using a detector, wherein a field of view of the detector on the surface of the to-be-measured object comprises a plurality of detection areas, and the plurality of detection areas are arranged along a relative movement direction between the detection areas and the to-be-measured object. During the scanning of the probe light on a sub-scanning area of the to-be-scanned area, the incident angle of the probe light on the sub-scanning area is changed, and the plurality of detection areas respectively acquire a plurality of detection images of the same sub-scanning area under different incident angles at different time points, and the size of one detection area along the arrangement direction is the same as the size of one sub-scanning area along the arrangement direction. Alternatively, during the scanning of the probe light on a sub-scanning area of the to-be-scanned area, the exposure time of the plurality of detection areas on the same sub-scanning area is set to be different, and the plurality of detection areas respectively acquire a plurality of detection images of the same sub-scanning area under different exposure times at different time points, and the size of one detection area along the arrangement direction is the same as the size of one sub-scanning area along the arrangement direction.

2. The detection method according to claim 1, characterized in that, The step length of the probe light on the to-be-scanned area along the arrangement direction is less than or equal to the size of the detection area along the arrangement direction.

3. The detection method according to claim 2, characterized in that, The size of the detection area along the arrangement direction is equal to an integer multiple of the step length of the probe light on the to-be-scanned area along the arrangement direction.

4. The method of claim 1, wherein, The relative movement direction comprises a scanning direction along the tangent direction of the relative movement track between the detector and the to-be-measured object, and a stepping direction perpendicular to the scanning direction, and the plurality of detection areas are arranged along the scanning direction or the stepping direction.

5. The method of claim 1, wherein, The scanning track of the probe light on the to-be-scanned area is a plurality of connected concentric circles or spirals.

6. The method of claim 1, wherein, The light spot area formed by the probe light on the surface of the to-be-measured object covers the detection area at least in the arrangement direction.

7. The method of claim 1, wherein, The change of the incident angle of the probe light on the sub-scanning area comprises the following steps: changing the incident angle of the probe light on the sub-scanning area by using a direction adjusting unit, and the direction adjusting unit is an optoacoustic modulation module or a rotating mirror.

8. The detection method according to claim 7, characterized in that, When the direction adjusting unit is a rotating mirror, the rotating mirror is a plane mirror or a mirror with multiple reflecting surfaces. The change of the incident angle of the probe light on the sub-scanning area by using the direction adjusting unit comprises the following steps: rotating the rotating mirror, and changing the included angle between the reflecting surface of the rotating mirror receiving the probe light and the probe light, so as to change the incident angle of the probe light on the sub-scanning area.

9. The method of claim 1, wherein, The plurality of detection areas comprise first detection area to Mth detection area arranged in sequence, M is an integer greater than or equal to 2, and the to-be-scanned area of the to-be-measured object comprises first sub-scanning area to Mth sub-scanning area arranged in sequence, and the size of a sub-scanning area along the arrangement direction is the same as the size of a detection area along the arrangement direction. The plurality of detection areas respectively acquire a plurality of detection images of the same sub-scan area at different incident angles at different time instants, including: any mth detection area acquires detection images of the first sub-scan area to the Mth sub-scan area at different time instants with different incident angles, wherein m is an integer greater than or equal to 1 and less than or equal to M; The plurality of detection areas respectively acquire a plurality of detection images of the same sub-scan area at different exposure times at different time instants, including: the first detection area to the Mth detection area respectively acquire a plurality of detection images of any mth sub-scan area at different exposure times at different time instants, wherein m is an integer greater than or equal to 1 and less than or equal to M.

10. The assay method according to any one of claims 1 to 9, characterized in that, If the incident angle of the detection light to the sub-scan area of the to-be-scanned area is changed during the scanning process of the detection light on the sub-scan area of the to-be-scanned area, the detection method further comprises: using a processor to extract a plurality of detection images of the same sub-scan area at different incident angles; and acquiring the to-be-detected information of the sub-scan area according to a plurality of detection images of the same sub-scan area; If the exposure times of the plurality of detection areas to the same sub-scan area are set to be different during the scanning process of the detection light on the sub-scan area of the to-be-detected surface, the detection method further comprises: using a processor to extract a plurality of detection images of the same sub-scan area at different exposure times; and acquiring the to-be-detected information of the sub-scan area according to a plurality of detection images of the same sub-scan area.

11. The detection method according to claim 10, characterized in that, The to-be-detected information includes defect information; acquiring the to-be-detected information of the sub-scan area according to a plurality of detection images of the same sub-scan area includes: when at least one detection image of the plurality of detection images of the same sub-scan area has a defect, it is determined that the sub-scan area has a defect; and extracting the defect position in the corresponding sub-scan area according to the detection image with the defect.

12. The detection method of claim 10, wherein, Using the processor to extract a plurality of detection images of the same sub-scan area at different incident angles or exposure times includes: acquiring the time interval at which adjacent detection areas acquire images of the same sub-scan area according to the scanning trajectory and the scanning speed; acquiring a total detection image by the plurality of detection areas every time interval during the detection process; dividing each total detection image to divide each total detection image into a plurality of detection images corresponding to each sub-scan area, the feature size of the detection image being equal to the product of the size of the sub-scan area along the arrangement direction and the magnification of the detector, the feature size being the size along the arrangement direction of each detection image in the total detection image; and acquiring a plurality of detection images of the same sub-scan area by acquiring detection images of different orders from a plurality of total detection images, the coordinates of the detection images of the same sub-scan area in the total detection images along the time interval being sequentially adjacent and decreasing by the feature size.

13. The detection method of claim 12, wherein, Scanning the to-be-detected surface of the to-be-scanned area by the detection light includes: the detection light performs first scanning on the to-be-scanned area along the scanning direction; and after the first scanning, the detection light performs second scanning on the to-be-scanned area along the stepping direction. If the arrangement direction is along the scanning direction, the time interval for acquiring images of the same sub-scanning area by adjacent detection areas is obtained according to the scanning trajectory and the scanning speed, including: determining the time interval according to the scanning speed of each first scanning and the size of the detection area along the scanning direction of the first scanning; if the scanning speed of each first scanning is different, the time interval is determined for each first scanning respectively; If the arrangement direction is along the stepping direction, the time interval for acquiring images of the same sub-scanning area by adjacent detection areas is obtained according to the scanning trajectory and the scanning speed, including: determining the time interval according to the scanning speed of the second scanning, the size of the detection area along the stepping direction, and the scanning time for completing one first scanning; The stepping direction is perpendicular to the scanning direction.

14. The detection method of claim 12, wherein, The processor extracts multiple detection images of the same sub-scanning area under different exposure times or different incident angles, including: making each total detection image be in a world coordinate system, and the coordinates of each point in the world coordinate system in the total detection image represent the position coordinates of the corresponding point on the object to be measured; extracting the regions with the same coordinates of each total detection image in the same world coordinate system to obtain multiple detection images of the same sub-scanning area under different exposure times or different incident angles.

15. The method of claim 1, wherein, Each of the detection areas includes multiple rows of pixels; The multiple detection areas acquire multiple detection images of the same sub-scanning area under different exposure times at different time instants, including: each row of pixels of the detection area acquires feedback light of the same sub-scanning area at different time instants; The feedback light of the same sub-scanning area acquired by each row of pixels of the detection area at different time instants is integrated to obtain a detection image of the sub-scanning area.

16. A detection system characterized by, It includes: A light source for emitting detection light; A detector including multiple detection areas, and the arrangement direction of the multiple detection areas is the same as the relative movement direction between the detection areas and the object to be measured; A direction adjusting unit for changing the incident angle of the detection light to the sub-scanning area of the scanning area to be scanned, or an exposure time setting unit for setting different exposure times of the multiple detection areas in the detector for the same sub-scanning area.

17. The detection system of claim 16, wherein, It further includes: A step setting unit for setting the step length of the detection light along the arrangement direction to the scanning area to be scanned to be less than or equal to the size of the detection area along the arrangement direction.

18. The detection system of claim 16, wherein, The relative movement direction includes: a scanning direction along the tangent direction of the relative movement trajectory between the detector and the object to be measured; and a stepping direction perpendicular to the scanning direction; and the multiple detection areas are arranged along the scanning direction or the stepping direction.

19. The detection system of claim 16, wherein, The direction adjusting unit is an opto-acoustic modulation module or a rotating mirror; and the rotating mirror is a plane mirror or a mirror with multiple reflecting surfaces.

20. The detection system of claim 16, wherein, It further includes: A collection lens group for collecting feedback light formed by the detection light passing through the scanning area to be scanned, and transmitting the feedback light to the detector.

21. The detection system of claim 16, wherein, It further includes: A processor; The processor is configured to extract multiple detection images of the same sub-scan area at different incident angles, and obtain to-be-detected information of the sub-scan area according to the multiple detection images of the same sub-scan area. Alternatively, the processor is configured to extract multiple detection images of the same sub-scan area at different exposure times, and obtain to-be-detected information of the sub-scan area according to the multiple detection images of the same sub-scan area.

22. The detection system of claim 21, wherein, The processor is further configured to obtain to-be-detected information of the sub-scan area according to the multiple detection images of the same sub-scan area. The to-be-detected information includes defect information; and when at least one detection image of the multiple detection images of the same sub-scan area has a defect, the processor is configured to determine that the sub-scan area has a defect, and extract a defect position in the sub-scan area according to the detection image having the defect.

Images