Cavity heating abnormity detection system based on semiconductor equipment

Abstract

The invention discloses a cavity heating anomaly detection system based on semiconductor equipment, and relates to the technical field of semiconductor manufacturing, the system is provided with at least two paths of thermocouple elements, the two paths of thermocouple elements are used for sampling thermocouple signals, and after the same filtering and amplification are performed in the same signal processing container, the thermocouple signals are output. The micro-control unit carries out sampling to obtain signal sampling values and carries out comparative judgment, the judgment result is that the two paths of signal sampling values are equal or have a small error, and if the two paths of signal sampling values are normal, an analog quantity signal is output after the two paths of thermocouple signals are subjected to average filtering and is sent to the programmable logic controller; on the contrary, if the difference between the signal sampling values of the two paths is too large or the signal sampling value exceeds the allowable error range, a low-level signal is output and sent to the programmable logic controller, and an alarm is given, so that the problems that an existing traditional detection method only depends on a single thermocouple signal and lacks a signal processing and abnormity judgment mechanism are solved; and abnormal heating cannot be identified in real time.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, in particular to a cavity heating anomaly detection system based on a semiconductor device. BACKGROUND

[0002] With the rapid development of chip technology, the real-time, efficiency and reliability of semiconductor devices are increasingly demanding, and the process requirements for semiconductor devices are also increasingly demanding. Among them, the sampling process of the semiconductor device is essential.

[0003] The semiconductor manufacturing process has very high real-time requirements for temperature control, especially during rapid heating or cooling stages, and the system needs to quickly capture temperature changes and respond. The existing traditional detection method only relies on a single thermocouple signal, but the response speed of a single thermocouple is relatively slow. When the cavity temperature changes, due to the lack of signal processing and anomaly judgment mechanism of the single thermocouple signal, the actual temperature state cannot be reflected in time, resulting in the identification of heating anomalies.

[0004] In view of this, we need a cavity heating anomaly detection system based on a semiconductor device to solve the above problems. SUMMARY

[0005] The purpose of the present application is to solve the problem that the existing traditional detection method only relies on a single thermocouple signal and lacks signal processing and anomaly judgment mechanism, and cannot identify heating anomalies in real time. In order to solve the above technical problems, a cavity heating anomaly detection system based on a semiconductor device is provided, which relies on multi-channel thermocouple signal detection, has signal processing and anomaly judgment mechanism, and can identify heating anomalies in real time.

[0006] To achieve the above purpose, the embodiments of the present application adopt the following technical solutions: a cavity heating anomaly detection system based on a semiconductor device, wherein the system comprises a thermocouple element, a filter amplification circuit and a micro control unit; the thermocouple element is provided with at least two channels, and the thermocouple element is used for collecting thermocouple signals; the output signals of the two channels of thermocouple elements are connected to the filter amplification circuit respectively, the filter amplification circuit comprises a common mode filter and an LC filter circuit, the filter amplification circuit is used for simultaneously suppressing common mode noise and differential mode noise, and the filter amplification circuits of the two channels of thermocouple elements are integrated in the same signal processing container; the micro control unit is connected with the output end of the filter amplification circuit, the micro control unit is used for ADC sampling the thermocouple signals after filtering and amplification, to obtain the signal sampling values of the two channels, and to compare the signal sampling values of the two channels with a preset threshold in real time; when the signal sampling values of the two channels are too different or the signal sampling values exceed the allowable error range, a low level signal is output; otherwise, the two channels of thermocouple signals are subjected to average filtering processing, and an analog signal after average filtering is output.

[0007] Further, according to the embodiment of the present application, the system further comprises a programmable logic controller connected with the micro control unit, and the programmable logic controller is configured to receive the low-level signal or the average filtered analog signal output by the micro control unit.

[0008] Further, according to the embodiment of the present application, the signal processing container is made of metal to improve the anti-interference performance.

[0009] Further, according to the embodiment of the present application, the signal processing container adopts a single-point grounding mode and is connected with the system grounding end through a wire to enhance the anti-electromagnetic interference capability.

[0010] Further, according to the embodiment of the present application, when the difference between the two signal sampling values is too large or the signal sampling value exceeds the allowable error range, the pin of the micro control unit outputs a low-level signal and triggers an alarm program.

[0011] Further, according to the embodiment of the present application, the micro control unit triggers an interrupt when the difference between the two signal sampling values is too large or the signal sampling value exceeds the allowable error range, and controls the buzzer to emit an alarm sound or the alarm indicator light to execute the alarm operation.

[0012] Further, according to the embodiment of the present application, when the two signal sampling values are within the allowable error range, the two thermocouple signals are subjected to average filtering processing by using an average arithmetic.

[0013] Further, according to the embodiment of the present application, the low-level signal or the analog signal output by the micro control unit is connected with the programmable logic controller through an interface and a cable.

[0014] Further, according to the embodiment of the present application, the cavity heating anomaly detection system comprises: simulation debugging of the temperature change and noise interference scene of the cavity heating anomaly detection system; using an oscilloscope to monitor the signal waveform output by the filter amplification circuit and checking the noise suppression effect of the common-mode filter and the LC filter circuit; observing the signal sampling value and the abnormality judgment output of the micro control unit to verify whether the micro control unit can accurately perform ADC sampling and abnormality judgment.

[0015] Further, according to the embodiment of the present application, the cavity heating anomaly detection system comprises: detecting whether the programmable logic controller can correctly receive and process the low-level signal or the analog signal output by the micro control unit, and if not, adjusting the connection and parameters between the micro control unit and the programmable logic controller.

[0016] Beneficial effects:

[0017] The application sets at least two thermocouple elements, uses two thermocouple elements to sample thermocouple signals, and after the same filtering and amplification in the same signal processing container, the micro control unit samples the signal sampling value and compares and judges, the judgment result should be that the two signal sampling values are equal or the error is small, if the two signal sampling values are normal, then the two thermocouple signals are filtered and averaged, and an analog signal is output and sent to the programmable logic controller; otherwise, if the signal sampling values of the two signals are too different or the signal sampling values exceed the allowed error range, a low-level signal is output and sent to the programmable logic controller and an alarm is given, thereby achieving the technical effect of relying on multiple thermocouple signal detection, having a signal processing and abnormality judgment mechanism, and being able to identify heating abnormalities in real time, solving the technical problems that the existing traditional detection method only relies on a single thermocouple signal, lacks a signal processing and abnormality judgment mechanism, and cannot identify heating abnormalities in real time. BRIEF DESCRIPTION OF DRAWINGS

[0018] The application will be further described below in combination with the drawings and examples.

[0019] Fig. 1 is a flowchart of the cavity heating abnormality detection system based on the semiconductor device of the application.

[0020] Fig. 2 is a schematic diagram of the signal processing container based on the semiconductor device of the application. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical scheme of the application clear, complete and more clear and understandable, the embodiments of the application will be further described in combination with the drawings. It should be understood that the specific embodiments described here are part of the embodiments of the application, not all the embodiments, and are only used to explain the embodiments of the application, and do not limit the embodiments of the application, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the application.

[0022] In the description of the application, it should be noted that the terms "center", "middle", "upper", "lower", "left", "right", "inner", "outer", "top", "bottom", "side", "vertical", "horizontal" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation on the application. In addition, the terms "one", "first", "second", "third", "fourth", "fifth", "sixth" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance.

[0023] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0024] For purposes of simplicity and illustration, the principles of the embodiments are described primarily by way of example. In the following description, numerous specific details are set forth to provide a thorough understanding of the embodiments. However, it will be apparent to those skilled in the art that these embodiments may not be limited to these specific details in practice. In some instances, well-known methods and structures have not been described in detail to avoid unnecessarily obscuring these embodiments. Furthermore, all embodiments can be used in combination with each other.

[0025] Example 1:

[0026] like Figs. 1-2 As shown, this embodiment provides a cavity heating anomaly detection system based on semiconductor devices. The system includes thermocouple elements, a filtering and amplification circuit, and a microcontroller unit. The thermocouple elements have at least two channels and are used to acquire thermocouple signals. The output signals of the two thermocouple elements are respectively connected to the filtering and amplification circuit, which includes a common-mode filter and an LC filter circuit. The filtering and amplification circuit is used to simultaneously suppress common-mode noise and differential-mode noise, and the filtering and amplification circuits for both thermocouple elements are integrated within the same signal processing container. The microcontroller unit is connected to the output of the filtering and amplification circuit. The microcontroller unit is used to perform ADC (Analog-to-Digital Converter) sampling on the filtered and amplified thermocouple signals to obtain the signal sample values ​​of the two channels, and to compare the two signal sample values ​​with a preset threshold in real time. When the difference between the two signal sample values ​​is too large or the signal sample values ​​exceed the allowable error range, a low-level signal is output; otherwise, the two thermocouple signals are averaged and filtered, and the averaged and filtered analog signal is output.

[0027] Furthermore, the system also includes a programmable logic controller (PLC), which is connected to the microcontroller unit (MCU). The PLC is used to receive low-level signals or averaged and filtered analog signals output by the MCU.

[0028] The application is provided with at least two thermocouple elements in the signal processing container, which are used as detection elements. The temperature measurement range of the exemplary thermocouple elements can reach-200℃-1300℃. The thermocouple elements are suitable for temperature detection of most semiconductor equipment cavities. In actual arrangement, two thermocouple elements can be respectively installed at symmetrical positions of the signal processing container, for example, at the top and bottom center positions of the signal processing container. Such a layout can comprehensively monitor the temperature conditions of different parts in the signal processing container, avoiding misjudgment caused by undetected local temperature abnormalities.

[0029] The two thermocouple elements sample thermocouple signals, i.e. temperature, and after the same filtering and amplification in the same signal processing container, the micro control unit samples the signal sampling values and compares them. The result of the comparison should be that the two signal sampling values are equal or have a small error. If the two signal sampling values are normal, the two thermocouple signals are averaged and filtered, and an analog signal is output and sent to the programmable logic controller. If the two signal sampling values differ greatly or the signal sampling values exceed the allowed error range, a low-level signal is output and sent to the programmable logic controller and an alarm is triggered. The reason for the two signal sampling values differing greatly or the signal sampling values exceeding the allowed error range can be that one of the thermocouple elements is damaged, resulting in abnormal signals or an open circuit. This ensures that the system can still work after one thermocouple element is damaged, and can rely on multiple thermocouple signal detection, is not easily affected by electromagnetic interference and signal drift, and will not cause false alarms or missed detection.

[0030] The filtering and amplification circuit uses hybrid filtering, which includes a common-mode filter and an LC filter circuit. The thermocouple signal passes through the common-mode filter and the LC filter circuit, which are used to suppress common-mode noise and differential-mode noise at the same time. The two thermocouple elements and the filtering and amplification circuit are placed in the same signal processing container to improve the anti-interference performance and suppress external environmental electromagnetic interference.

[0031] Further, the signal processing container is made of metal to improve the anti-interference performance. The signal processing container uses a single-point grounding method and is connected to the system grounding end through a wire to enhance the ability to resist external electromagnetic interference.

[0032] Further, when it is detected that the two signal sampling values differ greatly or the signal sampling values exceed the allowed error range, the pin of the micro control unit outputs a low-level signal and triggers an alarm program. The micro control unit realizes abnormal alarm through interruption. When it is detected that the two signal sampling values differ greatly or the signal sampling values exceed the allowed error range, the micro control unit triggers an interruption and controls the buzzer to emit an alarm sound or turns on the alarm indicator light to execute the alarm operation. When it is detected that the two signal sampling values are within the allowed error range, the two thermocouple signals are averaged and filtered using an average arithmetic operation.

[0033] The embedded algorithm in the micro control unit can realize signal adaptive processing, that is, output a low-level signal and alarm immediately in an abnormal state, and output a stable analog signal filtered by a moving average filter in a normal state, giving consideration to real-time performance and data smoothness. The alarm threshold can be flexibly configured to adapt to different process requirements, such as CVD (Chemical Vapor Deposition) and other scenarios with large differences in temperature sensitivity.

[0034] Further, the low-level signal or analog signal output by the micro control unit is connected to the programmable logic controller through an interface and a cable.

[0035] Further, the cavity heating anomaly detection system comprises the following steps: simulating and debugging the temperature change and noise interference scene of the cavity heating anomaly detection system; using an oscilloscope to monitor the signal waveform output by the filter amplifier circuit, and checking the noise suppression effect of the common-mode filter and LC filter circuit; by observing the signal sampling value and abnormality judgment output of the micro control unit, verifying whether the micro control unit can accurately perform ADC sampling and abnormality judgment.

[0036] Further, the cavity heating anomaly detection system comprises the following steps: detecting whether the programmable logic controller can correctly receive and process the low-level signal or analog signal output by the micro control unit, and if not, adjusting the connection and parameters between the micro control unit and the programmable logic controller.

[0037] The present application sets at least two thermocouple elements, uses two thermocouple elements to sample thermocouple signals, and after the same filtering and amplification in the same signal processing container, the micro control unit samples the signal sampling value and compares and judges, the judgment result should be that the two signal sampling values are equal or have small errors, if the two signal sampling values are normal, an analog signal is output after averaging filtering of the two thermocouple signals, and sent to the programmable logic controller; otherwise, if the two signal sampling values differ greatly or the signal sampling value exceeds the allowable error range, a low-level signal is output and sent to the programmable logic controller and an alarm is given, thereby achieving the technical effects of relying on multiple thermocouple signal detection, having signal processing and abnormality judgment mechanism, and being able to identify heating anomalies in real time, solving the technical problems that the existing traditional detection method only relies on a single thermocouple signal, lacks signal processing and abnormality judgment mechanism, and cannot identify heating anomalies in real time.

[0038] While the forgoing detailed description of the application has shown specific embodiments of the application, it is to be understood that changes and modifications can be made to the specific embodiments without departing from the spirit and scope of the application as defined by the claims set forth below.

Claims

1. A cavity heating abnormality detection system based on a semiconductor device, wherein, The system comprises a thermocouple element, a filter-amplifier circuit and a micro control unit; The thermocouple element is provided with at least two channels, and is used to collect thermocouple signals; The output signals of the two channels of the thermocouple element are connected to the filter-amplifier circuit respectively, the filter-amplifier circuit comprises a common-mode filter and an LC filter circuit, and is used to simultaneously suppress common-mode noise and differential-mode noise, and the filter-amplifier circuits of the two channels of the thermocouple element are integrated in the same signal processing container; The micro control unit is connected to the output end of the filter-amplifier circuit, and is used to perform ADC sampling on the thermocouple signals after filtering and amplification, to obtain signal sampling values of the two channels, and to compare the signal sampling values of the two channels with a preset threshold in real time; When it is detected that the signal sampling values of the two channels are too different or the signal sampling values exceed the allowable error range, a low-level signal is output; otherwise, the thermocouple signals of the two channels are subjected to average filtering processing, and an analog signal after average filtering is output.

2. The semiconductor device based cavity heating anomaly detection system of claim 1, wherein, The system further comprises a programmable logic controller connected to the micro control unit, and the programmable logic controller is used to receive the low-level signal or the analog signal after average filtering output by the micro control unit.

3. The semiconductor device based cavity heating anomaly detection system of claim 1, wherein, The signal processing container is made of metal to improve the anti-interference performance.

4. The semiconductor device based cavity heating anomaly detection system of claim 1, wherein, The signal processing container adopts a single-point grounding mode and is connected to the system grounding end through a wire to enhance the anti-electromagnetic interference capability.

5. The semiconductor device based cavity heating anomaly detection system of claim 1, wherein, When it is detected that the signal sampling values of the two channels are too different or the signal sampling values exceed the allowable error range, the pin of the micro control unit outputs the low-level signal and triggers an alarm program.

6. The semiconductor device based cavity heating anomaly detection system of claim 5, wherein, The micro control unit realizes abnormal alarm through an interruption mode, and when it is detected that the signal sampling values of the two channels are too different or the signal sampling values exceed the allowable error range, the micro control unit triggers an interruption and controls a buzzer to emit an alarm sound or a warning indicator lamp to execute an alarm operation.

7. The semiconductor device based cavity heating anomaly detection system of claim 1, wherein, When it is detected that the signal sampling values of the two channels are within the allowable error range, the thermocouple signals of the two channels are subjected to average filtering processing by using an average arithmetic.

8. The semiconductor device based cavity heating anomaly detection system of claim 1, wherein, The low-level signal or the analog signal output by the micro control unit is connected to the programmable logic controller through an interface and a cable.

9. The semiconductor device based cavity heating anomaly detection system of claim 1, wherein, The system further comprises: The cavity heating abnormality detection system is simulated and debugged in terms of temperature change and noise interference scenarios; An oscilloscope is used to monitor the signal waveform output by the filter-amplifier circuit, and the suppression effect of the common-mode filter and the LC filter circuit on noise is checked; Whether the micro control unit can accurately perform ADC sampling and abnormality judgment is verified by observing the signal sampling values and abnormality judgment output of the micro control unit.

10. The semiconductor device based cavity heating anomaly detection system of claim 2, wherein, The system further comprises: Whether the programmable logic controller can correctly receive and process the low-level signal or the analog signal output by the micro control unit is detected, and if not, the connection and parameters between the micro control unit and the programmable logic controller are adjusted.

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