Substrate transfer apparatus and transfer method

Abstract

The application relates to the technical field of semiconductors, and provides a substrate transfer device and a transfer method.The substrate transfer device comprises a storage table, a bearing table and a transfer table; the storage table is provided with a plurality of first storage grooves; the bearing table is provided with a plurality of second storage grooves; the substrate transfer device is configured in such a way that the storage table is in contact with the transfer table and is positioned by the transfer table, so that the first storage grooves and the second storage grooves face each other along a first direction, and the substrates in the first storage grooves have a set distance from the bearing table; the transfer table carries the storage table to move relative to the bearing table along the first direction to transfer the substrates in the first storage grooves into the second storage grooves. The above substrate transfer device can solve the problem of misplacement and stacking of substrates in the substrate transfer process.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor, in particular to a substrate transfer device and a transfer method. BACKGROUND

[0002] In the field of semiconductor manufacturing, a variety of processes are involved, and between each process or within a process, the substrate is usually transferred from its storage component (such as a crystal box or a wafer rack) to the equipment of the process.

[0003] For example, in the material preparation process of the substrate (such as a wafer), polishing, cleaning and other processes are required. Before cleaning, the action of separating the substrate from the storage component needs to be completed, and the substrate needs to be transferred to the support. The transfer process is usually completed in the deionized water (DIW) of the water tank. Because the overflow flow of the DIW in the water tank is large, the DIW will impact the substrate, the storage component and the support, which on the one hand causes the deviation of the separation process of the substrate and the storage component, and on the other hand may cause the relative position of the storage component and the support to change, thereby causing the misalignment and stacking phenomenon in the cooperation process of the substrate and the support.

[0004] Therefore, a substrate transfer device and a transfer method are needed to solve the misalignment and stacking phenomenon in the above substrate transfer process. SUMMARY

[0005] The present application provides a substrate transfer device and a transfer method to solve the misalignment and stacking phenomenon in the above substrate transfer process.

[0006] The substrate transfer device comprises a storage table, a support and a transfer table.

[0007] The storage table has a plurality of first storage grooves for storing substrates, the support is provided with a plurality of second storage grooves matched with the first storage grooves, and the transfer table is used to position and transfer the storage table.

[0008] The substrate transfer device is configured to move the storage table to contact the transfer table and be positioned by the transfer table, so that the first storage grooves and the second storage grooves are opposite along a first direction, and the substrates in the first storage grooves have a set distance from the support; the transfer table carries the storage table to move relative to the support along the first direction to transfer the substrates in the first storage grooves to the second storage grooves.

[0009] Optionally, the support comprises a base, a storage part and a driving unit, the storage part is movably arranged on the base, the second storage grooves are arranged on the storage part, and the driving unit is used to drive the storage part to move relative to the base.

[0010] The storage part is driven to move relative to the base by the driving unit to adjust the position of the second storage groove so that each first storage groove is directly opposite to each second storage groove along the first direction.

[0011] Optionally, the substrate transfer device further comprises a position detection device configured to detect the relative position error of the first storage groove and the second storage groove along the first direction.

[0012] The position detection device is configured to drive the storage part to move relative to the base by the driving unit if the relative position error is greater than an error threshold, so that each first storage groove is directly opposite to each second storage groove along the first direction.

[0013] Optionally, the support platform further comprises a position locking unit configured to lock the relative position of the base and the storage part.

[0014] Optionally, a through hollow area is arranged on the storage platform along the first direction, and the first storage groove is located on both sides of the hollow area.

[0015] When the transfer platform carrying the storage platform moves relative to the support platform along the first direction, the support platform passes through the hollow area to transfer the substrate in the first storage groove to the second storage groove.

[0016] Optionally, a first positioning structure is arranged on the storage platform, and a second positioning structure is arranged on the transfer platform.

[0017] When the storage platform moves relative to the transfer platform, the first positioning structure cooperates with the second positioning structure to position the storage platform by the transfer platform.

[0018] Optionally, the first positioning structure is a protrusion arranged on the storage platform, and the second positioning structure is a groove arranged on the transfer platform, and when the first positioning structure cooperates with the second positioning structure, the protrusion is inserted into the groove.

[0019] The application further provides a transfer method, comprising the following steps:

[0020] S1: the storage platform moves to contact the transfer platform and is positioned by the transfer platform so that the first storage groove is directly opposite to the second storage groove along the first direction, and the substrate in the first storage groove has a set distance from the support platform.

[0021] S2: the transfer platform carrying the storage platform moves relative to the support platform along the first direction to transfer the substrate in the first storage groove to the second storage groove.

[0022] Optionally, the step S1 and the step S2 further comprise the following steps:

[0023] detecting the relative position error of the first storage tank and the second storage tank along the first direction, if the relative position error of the first storage tank and the second storage tank is greater than the error threshold, adjusting the position of the second storage tank so that the position error is not greater than the error threshold.

[0024] Optionally, in the step S1:

[0025] The storage platform is located above the transfer platform, and when the storage platform moves downward relative to the transfer platform, the storage platform is in contact with and positioned by the transfer platform.

[0026] And / or, the storage platform is located above the support platform, the first direction is a vertical direction, and when the transfer platform carrying the storage platform moves downward relative to the support platform along the first direction, the substrate in the first storage tank is transferred into the second storage tank.

[0027] In summary, the substrate transfer device comprises a storage platform, a support platform, and a transfer platform; the storage platform has a plurality of first storage tanks thereon, and the first storage tanks are used to store substrates; the support platform is provided with a plurality of second storage tanks matched with the first storage tanks; the transfer platform is used to position and transfer the storage platform; the substrate transfer device is configured to: the storage platform moves into contact with the transfer platform and is positioned by the transfer platform, so that the first storage tank and the second storage tank are directly opposite along a first direction, and the substrate in the first storage tank has a set distance from the support platform; and the transfer platform carrying the storage platform moves relative to the support platform along the first direction to transfer the substrate in the first storage tank into the second storage tank.

[0028] In the substrate transfer device, during the substrate transfer process, the storage platform is first positioned in contact with the transfer platform, and during the positioning process, the substrates stored in the storage platform do not come into contact with the support platform, so as to ensure that the substrates are still in the first storage tank, and at this time, the substrates will not be washed by the DIW to cause instability, effectively eliminating the influence of water flow during the transfer process, and helping to improve the stacking or mis-slot phenomenon during the substrate transfer process. After the storage platform is positioned, the first storage tank and the second storage tank are directly opposite to ensure the position accuracy, and then the support platform carrying the storage platform moves along the directly opposite direction to transfer the substrate from the first storage tank into the second storage tank, thereby ensuring the transfer accuracy of the substrate and further improving the stacking or mis-slot phenomenon during the substrate transfer process. Moreover, the substrate transfer operation is performed after the storage platform is positioned by the transfer platform, which can ensure the stability of the storage platform during the substrate transfer process, effectively preventing the instability phenomenon of the storage platform caused by water flow washing, and further improving the substrate transfer stability and substrate transfer accuracy. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 Structure diagram of substrate transfer device transfer process of an embodiment of the present application;

[0030] Figure 2 Structure diagram of substrate transfer device of an embodiment of the present application;

[0031] Figure 3 Structure diagram of bearing platform of an embodiment of the present application Figure 1 ;

[0032] Figure 4 Structure diagram of bearing platform of an embodiment of the present application Figure 2 ;

[0033] Figure 5 Structure diagram of bearing platform of an embodiment of the present application Figure 3 ;

[0034] Figure 6 Structure diagram of bearing platform of an embodiment of the present application Figure 4 ;

[0035] Figure 7 Adjusting state of bearing platform of an embodiment of the present application Figure 1 ;

[0036] Figure 8 Adjusting state of bearing platform of an embodiment of the present application Figure 2 .

[0037] In the drawings:

[0038] 10 - storage platform; 11 - first positioning structure;

[0039] 20 - bearing platform; 21 - second storage groove; 211 - middle groove; 212 - side groove; 201 - base; 202 - storage part; 203 - driving unit; 204 - position locking unit; 205 - sliding platform; 206 - sliding groove; 207 - bearing surface; 208 - bearing part; 209 - locking groove; 210 - wedge block;

[0040] 30 - transfer platform; 31 - second positioning structure;

[0041] 40 - substrate;

[0042] a - first direction. DETAILED DESCRIPTION

[0043] The substrate transfer device and the substrate transfer method according to the present application will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present application will be more apparent from the following description. It should be noted that the accompanying drawings are very simplified and all use non-precise proportions, which are only for the purpose of conveniently and clearly assisting the description of the embodiments of the present application.

[0044] In the present application, "outer diameter" and "inner diameter" correspond to diameter for circular structure, and for non-circular structure, the inner diameter refers to the diameter of its inscribed circle, and the outer diameter refers to the diameter of its circumscribed circle; "axial direction" corresponds to the direction of the axis for a cylindrical rod, and for a non-cylindrical rod, the axial direction corresponds to the length direction of the rod.

[0045] As used in the present application, the singular forms "a", "an" and "the" include plural referents, the term "or" is used in the inclusive sense, i.e., the term "or" is used in the inclusive sense, the term "at least one" is used in the inclusive sense, the term "at least two" is used in the inclusive sense, and the terms "first", "second", "third" are only used for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second", "third" can be explicitly or implicitly included one or at least two features. In addition, as used in the present application, "mounting", "connection", "connection", "one element" "provided" in another element should be understood broadly, and generally only indicates the connection, coupling, cooperation or transmission relationship between the two elements, and the two elements can be directly or indirectly connected, coupled, cooperated or transmitted through intermediate elements, and cannot be understood as indicating or implying the spatial position relationship between the two elements, i.e. one element can be in any position inside, outside, above, below or one side of another element, unless the content is otherwise explicitly indicated. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used with respect to the exemplary embodiments as they are shown in the drawings, upward or upward direction is toward the top of the corresponding drawing, and downward or downward direction is toward the bottom of the corresponding drawing.

[0046] A substrate transfer device is provided in the present embodiment, which comprises a storage table 10, a supporting table 20 and a transfer table 30.

[0047] Please refer to Figures 1 to 3 As shown in the figure, the storage table 10 has a plurality of first storage grooves (not shown in the figure) for storing substrates 40.

[0048] The first storage grooves on the storage table 10 are parallel and equidistantly arranged, and each first storage groove is used for storing a substrate 40. The first storage grooves are arranged on the upper surface of the storage table 10 and vertically opened, and the substrates 40 are in an upright posture, and the lower half of the substrate 40 is inserted into the first storage groove.

[0049] In addition, the middle part of the storage table 10 has a hollow area in the vertical direction, and the first storage grooves are located on both sides of the hollow area. For example, the storage table 10 is arranged as a box-shaped structure with an approximate trapezoidal shape, the inner cavity of the storage table 10 is used as the hollow area, and the first storage grooves are arranged on the side walls on both sides of the hollow area. When the substrate is in an upright posture, the lowest part of the lower half of the substrate is opposite to the hollow area, and the lowest part is inserted into the first storage grooves on both sides of the hollow area, and the storage table 10 can adopt the same structure as the existing equipment, which will not be described here.

[0050] Please continue to refer to Figures 1 to 3 As shown, the initial position of the support table 20 is below the storage table 10. The support table 20 is provided with a plurality of second storage grooves 21 matched with the first storage grooves; each second storage groove 21 is parallel and equidistantly arranged, and each second storage groove 21 is used for storing a substrate (the stored substrate is transferred from the first storage groove). The second storage grooves 21 are arranged on the upper surface of the support table 20 and vertically opened, and the substrates are inserted into the second storage grooves 21 in an upright posture.

[0051] In the vertical projection, the shape of the support table 20 is smaller than the shape of the hollow area on the storage table 10. In order to ensure that the support table 20 can vertically pass through the hollow area.

[0052] Therefore, when the support table 20 passes through the hollow area of the storage table 10 from bottom to top, the lowest part of the substrate stored on the storage table 10 is first inserted into the second storage groove 21, and then the substrate is lifted as the support table 20 goes up, so that the substrate is separated from the storage table 10, and the purpose of transferring the substrate from the first storage groove to the second storage groove 21 is achieved.

[0053] Please continue to refer to Figures 1 to 3 As shown, the transfer table 30 is used for positioning and transferring the storage table 10.

[0054] The transfer table 30 can be driven to move by a driving device matched therewith, and the driving device can use the existing equipment, which will not be described here. The initial position of the transfer table 30 is below the storage table 10.

[0055] The upper surface of the storage table 10 is provided with a first positioning structure 11, and the transfer table 30 is provided with a second positioning structure 31. When the storage table 10 moves vertically downward relative to the transfer table 30, the first positioning structure 11 cooperates with the second positioning structure 31, so that the storage table 10 is positioned by the transfer table 30. The movement of the storage table 10 can be driven by a driving device matched therewith. The driving device utilizes existing equipment, and thus will not be described herein.

[0056] In combination Figure 3 As shown in the embodiment, the first positioning structure 11 is a protrusion provided on the storage table 10, and the second positioning structure 31 is a groove provided on the transfer table 30. When the storage table 10 moves vertically downward relative to the transfer table 30, the protrusion is inserted into the groove, so that the first positioning structure 11 cooperates with the second positioning structure 31, and the storage table 10 is positioned by the transfer table 30.

[0057] In the embodiment, the protrusion and the groove are both cuboid structures. In other alternative embodiments, the protrusion can be provided in a conical structure or a semispherical structure, and the groove is adapted to the shape of the protrusion. This arrangement makes the protrusion and the groove more convenient to cooperate. Even if there is a positional deviation (which is usually small) between the storage table 10 and the transfer table 30, resulting in a misalignment relationship between the protrusion and the groove, the structure of the protrusion and the groove also allows the protrusion to be slid into the groove, so that the position is automatically corrected through the cooperation of the protrusion and the groove.

[0058] The substrate transfer device is configured such that the storage table 10 moves along a first direction a (vertically) to contact the transfer table 30. At this time, the first positioning structure 11 cooperates with the second positioning structure 31, and the storage table 10 is positioned by the transfer table 30, so that the first storage groove and the second storage groove 21 are directly opposite along the first direction a, and the substrate 40 in the first storage groove has a set distance from the support table 20 (the set distance can be set based on actual requirements to ensure that the substrate 40 does not contact the support table 20 at this time). The set distance can ensure that the bottom of the substrate 40 stored in the storage table 10 is not inserted into the second storage groove 21 when the storage table 10 is positioned, and also ensure that the substrate is not lifted by the support table 20, thereby reducing the influence of water flow and the stability of the substrate. Then, the transfer table 30 carrying the storage table 10 moves relative to the support table 20 along the first direction a (vertically downward), and the support table 20 passes through the hollow area. The bottom of the substrate 40 stored in the storage table 10 is inserted into the second storage groove 21 of the support table 20, and the substrate is lifted by the support table 20 so as to separate the substrate from the storage table 10, thereby transferring the substrate in the first storage groove into the second storage groove 21.

[0059] The substrate transfer device, in the process of transferring the substrate, first makes the storage table 10 contact and position with the transfer table 30, and in the positioning process, the substrate stored in the storage table 10 will not contact with the support table 20, so as to ensure that the substrate is still in the first storage groove, and at this time, the substrate will not be washed by the DIW to cause instability, effectively eliminating the influence of water flow in the transfer process, and helping to improve the stacking or mis-slot phenomenon in the substrate transfer process. After the storage table 10 is positioned, it is ensured that the first storage groove and the second storage groove 21 are opposite, and then the support table 20 carries the storage table 10 to move along the opposite direction, so that the substrate is transferred from the first storage groove to the second storage groove 21, thereby ensuring the transfer accuracy of the substrate and further improving the stacking or mis-slot phenomenon in the substrate transfer process. Moreover, the substrate transfer operation is performed after the storage table 10 is positioned by the transfer table 30, which can ensure the stability of the storage table 10 during the substrate transfer process, effectively prevent the instability phenomenon caused by the washing of the storage table 10 by the water flow, and further improve the substrate transfer stability and the substrate transfer accuracy.

[0060] The substrate transfer process adopts the sequence of first positioning (the storage table 10 first contacts and positions with the transfer table 30) and then transferring (then the substrate contacts with the support table 20). In contrast, the sequence is first transferring (the substrate first contacts with the support table 20) and then positioning (then the storage table 10 positions with the transfer table 30 and is transferred by the transfer table 30). In this transfer process, since the substrate is transferred from the first storage groove to the second storage groove, the storage table 10 is not positioned, and if the storage table 10 is only moved by the mechanical arm, its stability is poor under the washing of the water flow, which easily causes a large positional deviation between the first storage groove and the second storage groove, and further causes the stacking or mis-slot phenomenon. At the same time, the DIW flows in the second storage groove during the transfer process, which will wash the substrate to cause instability, and further aggravate the stacking or mis-slot phenomenon.

[0061] In combination Figure 1 As shown in the embodiment, the first positioning structure 11 (protrusion) is provided with two and is located at the horizontal radial two sides of the storage table 10, and the first positioning structure 11 (protrusion) is in L shape, one side of which is horizontally connected to the outside of the storage table 10, and the other side is vertically downward. The second positioning structure 31 (groove) is provided with two and is located on the upper surface of the transfer table 30, and the middle part of the transfer table 30 is also provided with a hollow area, and the two second positioning structures 31 are located on the two sides of the hollow area. The setting of the hollow area can also be passed through by the support table 20, so as to prevent interference during the substrate transfer process. When the storage table 10 contacts with the transfer table 30, the vertical edges of the two first positioning structures 11 are respectively inserted into the interiors of the two second positioning structures 31. In other alternative embodiments, the first positioning structure 11 can be provided as a groove structure, and the second positioning structure 31 can be provided as a protrusion structure, and the specific structural form of the first positioning structure 11 and the second positioning structure 31 can be adjusted based on actual needs.

[0062] In the embodiment, the transfer station 30 has the function of positioning the storage station 10 and the function of transferring the storage station 10. After the substrate is transferred to the support station 20, the wafer is transferred by the mechanical arm in sequence, and the storage station 10 is empty. At this time, the storage station 10 needs to be transferred to the designated position through the transfer station 30. The specific driving structure of the transfer station 30 can be consistent with the existing structure, which will not be described here.

[0063] In the embodiment, the storage station 10, the support station 20 and the transfer station 30 are arranged vertically, and the first direction a corresponds to the vertical direction, so the support station 20 and the transfer station 30 move along the vertical direction. In other alternative embodiments, the relative position relationship and the relative motion direction of the storage station 10, the support station 20 and the transfer station 30 can be adjusted based on actual needs.

[0064] Further, the support station 20 includes a base 201, a storage part 202 and a driving unit 203. The storage part 202 is movably arranged on the base 201, the second storage groove is arranged on the storage part 202, and the driving unit 203 is used to drive the storage part 202 to move relative to the base 201.

[0065] When the storage part 202 moves relative to the base 201, the position of the second storage groove is adjusted, so that each first storage groove and each second storage groove 21 are directly opposite along the first direction a.

[0066] In combination Figures 4 to 6 In the embodiment, the base 201 is in the form of a cuboid, and the base 201 is provided with a position locking unit 204. The inside of the base 201 is provided with a sliding table 205 along the length direction.

[0067] The middle part of the base 201 is provided with a sliding groove 206, and the sliding table 205 is slidably arranged in the sliding groove 206 along the length direction. In addition, the upper part of the base 201 is provided with a through groove in communication with the sliding groove 206, and the sliding table 205 is connected with the storage part 202 through the intermediate piece passing through the through groove. Therefore, when the sliding table 205 linearly slides in the sliding groove 206, the storage part 202 is driven to linearly move. The bottom of the storage part 202 is attached to the top of the base 201.

[0068] The driving unit 203 can be used to drive the sliding table 205 to move and further drive the storage part 202 to move. Figure 4 and Figure 5The middle driving unit 203 comprises a knob, and further comprises a gear and a rack structure. The knob is in transmission cooperation with a gear, the gear is in meshing with the rack, and the rack is fixed to the sliding table 205. Therefore, when the knob rotates, the gear rotates, the rack moves linearly through the rotation of the gear, and the sliding table 205 moves linearly in the sliding groove 206. In addition, in order to ensure the adjustment accuracy, two gears can be configured. A small gear is connected with the knob, the small gear is in meshing with a large gear, and the large gear is in meshing with the rack, so as to form a larger transmission ratio. At this time, the rotation of the knob can realize the accurate adjustment of the positions of the rack, the sliding table 205 and the storage part 202. Preferably, one rotation of the knob changes the displacement of the storage part 202 by 0.1 mm, so as to realize the accuracy of the position adjustment of the first storage groove.

[0069] In combination with Figure 7 and Figure 8 It is shown that the position adjustment of the storage part 202 to the left is realized by counterclockwise rotation of the knob, and the position adjustment of the storage part 202 to the right is realized by clockwise rotation of the knob.

[0070] In other alternative embodiments, the driving unit 203 can also adopt a hydraulic structure or a linear motor to realize the linear driving of the sliding table 205. Alternatively, the driving unit 203 can also adopt a worm and gear cooperation rack mode, in which the worm is connected with the knob, the worm is in meshing with a worm wheel, and the worm wheel is in meshing with the rack, so as to realize a larger transmission ratio. The specific form of the driving unit 203 can be adjusted based on actual needs.

[0071] Please continue to refer to Figure 5 It is shown that, in the embodiment, the bottom of the cross section of the sliding table 205 is in a dovetail structure with a large upper part and a small lower part, and the top position has a protrusion. The sliding groove 206 is in a shape matched with the cross section of the sliding table 205, so that the sliding table 205 is matched with the sliding groove 206 to ensure the single-degree-of-freedom linear motion of the sliding table 205. The inclined surface structure of the sliding groove 206 and the wedge effect of the sliding table 205 distribute the load to a larger contact surface, which can bear a larger radial force. In other alternative embodiments, the sliding table 205 and the sliding groove 206 can be provided in a rectangular structure or other structures. The specific structure of the sliding table 205 and the sliding groove 206 can be adjusted based on actual needs.

[0072] Please continue to refer to Figure 5 It is shown that, in the embodiment, the upper surface of the storage part 202 has a groove expanding upward, the two side inclined surfaces of the groove are used as bearing surfaces 207, the bottom of the groove has a bearing part 208 protruding upward, and the bearing part 208 is lower than the bearing surfaces 207. In combination with Figure 6As shown, the second storage groove 21 includes a middle groove 211 and two side grooves 212, wherein the middle groove 211 is formed on the upper surface of the supporting portion 208, and the two side grooves 212 are respectively formed on the two supporting surfaces 207. The middle groove 211 and the two side grooves 212 are opposite along the width direction of the storage portion 202. In addition, the second storage groove 21 is provided with multiple groups and arranged along the length direction of the storage portion 202.

[0073] When the substrate is stored in the second storage groove 21, the lower half of the substrate is inserted into the middle groove 211 at the lowest position, and the positions on the two sides of the lowest position are respectively inserted into the two side grooves 212, so as to ensure the stable support of the substrate.

[0074] In other alternative embodiments, the upper surface of the storage portion 202 can be provided as a circular arc, and the second storage groove 21 can be provided as an arc-shaped groove. The specific structure of the storage portion 202 and the shape of the second storage groove 21 can be adjusted based on actual needs.

[0075] Please continue to refer to Figure 5 As shown, the position locking unit 204 is used to lock the relative position of the base 201 and the storage portion 202. The position locking unit 204 includes a knob. The position locking unit 204 also includes a screw rod, the knob is connected with the screw rod, the screw rod is threadedly connected with the base 201, one end of the screw rod is located in the sliding groove 206, and the screw rod is locked by being abutted against the side of the sliding table 205, so as to realize the position locking of the storage portion 202.

[0076] As shown in the figure, Figure 5 As shown, since the side of the sliding table 205 is provided as an inclined structure, a locking groove 209 is formed at the position of one side wall of the sliding groove 206, a wedge-shaped block 210 is stored in the locking groove 209, the inclined surface of the wedge-shaped block 210 is provided as a conformal fit with the side surface of the sliding table 205, and one end of the screw rod is abutted against the right-angled side of the wedge-shaped block 210. Therefore, when the knob of the locking unit 204 is tightened, the screw rod pushes the wedge-shaped block 210 to press against the side surface of the sliding table 205, so as to realize the locking of the sliding table 205.

[0077] In other alternative embodiments, the position locking unit 204 can be provided as a hydraulic structure or a linear motor, and the specific structure of the position locking unit 204 can be adjusted based on actual needs.

[0078] The abovementioned supporting platform 20 can be applied to the substrate transfer of various groove type machines, and has a wide range of applications.

[0079] Further, the substrate transfer device also includes a position detection device, which is used to detect the relative position error of the first storage groove and the second storage groove 21 along the first direction a;

[0080] The position detection device is configured to drive the storage part 202 to move relative to the base 201 by the driving unit 203 if the relative position error of the first storage groove and the second storage groove 21 is greater than the error threshold, so that each first storage groove and each second storage groove 21 is directly opposite along the first direction a.

[0081] The position detection device is configured to drive the storage part 202 to move relative to the base 201 by the driving unit 203 if the relative position error of the first storage groove and the second storage groove 21 is greater than the error threshold, so that each first storage groove and each second storage groove 21 is directly opposite along the first direction a.

[0082] The position detection device, for example, can be a distance sensor, which can be provided on the storage platform 10. After the storage platform 10 and the support platform 20 are positioned, the distance sensor detects the distance between the storage platform 10 and the support platform 20 along the arrangement direction of the first storage groove and the second storage groove 21, and converts the distance into the relative position relationship of the first storage groove and the second storage groove 21, so as to judge the position accuracy of the two, and then realize the real-time adjustment of the position.

[0083] In other alternative embodiments, the position detection device can detect the relative position error of the first storage groove and the second storage groove 21 by image recognition.

[0084] Further, the embodiment also provides a transfer method, which comprises the following steps:

[0085] S1: The storage platform 10 moves to contact the transfer platform 30, and is positioned by the transfer platform 30, so that the first storage groove and the second storage groove 21 are directly opposite along the first direction a, and the substrate in the first storage groove has a set distance from the support platform 20.

[0086] Specifically, please refer to Figure 1 As shown in the figure, the storage platform 10 moves along the first direction a (vertical) to contact the transfer platform 30. At this time, the first positioning structure 11 cooperates with the second positioning structure 31, and the storage platform 10 is positioned by the transfer platform 30, so that the first storage groove and the second storage groove 21 are directly opposite along the first direction a, and the substrate in the first storage groove has a set distance from the support platform 20 (the set distance can be set based on actual needs to ensure that the substrate does not contact the support platform 20 at this time). The set distance ensures that when the storage platform 10 is positioned, the bottom of the substrate stored inside will not be inserted into the inside of the second storage groove 21, and ensures that the substrate will not be lifted by the support platform 20 to ensure the stability of the substrate.

[0087] S2: the transfer station 30 carries the storage station 10 to move relative to the support station 20 along the first direction a to transfer the substrate in the first storage slot to the second storage slot 21.

[0088] Specifically, referring to FIG. 2, the transfer station 30 carries the storage station 10 to move relative to the support station 20 along the first direction a (vertically downward), the support station 20 passes through the hollow area of the storage station 10, the bottom of the substrate stored in the storage station 10 is inserted into the second storage slot 21 of the support station 20, and the substrate is lifted by the support station 20 so as to separate the substrate from the storage station 10, thereby transferring the substrate in the first storage slot to the second storage slot 21. Figure 1 The above substrate transfer method, in the process of transferring the substrate, first makes the storage station 10 contact and position the transfer station 30, in the positioning process, the substrate stored in the storage station 10 will not contact the support station 20, so as to ensure that the substrate is still in the first storage slot, at this time, the substrate will not be washed by the DIW to cause instability, which helps to improve the phenomenon of stacking or mis-slotting in the process of substrate transfer. After the storage station 10 is positioned, the first storage slot and the second storage slot 21 are aligned, then the support station 20 carries the storage station 10 to move along the alignment direction, so that the substrate is transferred from the first storage slot to the second storage slot 21, thereby ensuring the transfer accuracy of the substrate and further improving the phenomenon of stacking or mis-slotting in the process of substrate transfer.

[0089] Further, the step S1 and the step S2 further include the following steps:

[0090] detecting the relative position error of the first storage slot and the second storage slot 21 along the first direction a, if the relative position error of the first storage slot and the second storage slot 21 is greater than an error threshold, adjusting the position of the second storage slot so that the position error is not greater than the error threshold.

[0091]

[0092] ​Specifically, the relative position error of the first storage groove and the second storage groove 21 can be detected by a position detection device. The position detection device can be a distance sensor, for example, which can be arranged on the storage platform 10. After the storage platform 10 is positioned with the support platform 20, the distance sensor detects the distance between the storage platform 10 and the support platform 20 along the arrangement direction of the first storage groove and the second storage groove 21. Specifically, the distance between the set position of the storage platform 10 and the set position on the support platform 20 can be detected. When the first storage groove and the second storage groove 21 are opposite to each other, the distance between them is the standard distance. When the distance between them deviates greatly from the standard distance, it is considered that the relative position of the first storage groove and the second storage groove 21 has deviation. Therefore, the distance between the storage platform 10 and the support platform 20 can be converted into the relative position relationship of the first storage groove and the second storage groove 21, and further converted into the relative position error of the first storage groove and the second storage groove 21. The position error is compared with the error threshold to determine the position accuracy of the two, and then the position is adjusted in real time.

[0093] When the storage platform 10 is positioned with the support platform 20, the positions of the first storage groove and the second storage groove 21 have deviation. At this time, the error signal is sent to the driving unit 203 (the driving unit 203 needs to use an electric device such as a motor or a hydraulic cylinder at this time) through the position detection device to drive the storage part 202 to move, so as to realize the position correction of the first storage groove and the second storage groove 21.

[0094] Through the above steps, the correction of the first storage groove and the second storage groove 21 before the substrate transfer is realized to ensure the position accuracy in the transfer process and further improve the phenomenon of laminating or misalignment of the substrate in the substrate transfer process.

[0095] In other alternative embodiments, the above position detection process can also be performed before step S1 or after step S2. For example, the relative position of the first storage groove and the second storage groove 21 can be detected before the storage platform 10 is positioned with the transfer platform 30, and the position correction is performed. Or after step S2, when the storage platform 10 is transferred to the designated position by the transfer platform 30, the relative position detection of the storage platform 10 and the support platform 20 model is performed on the test machine platform to detect the relative position of the first storage groove and the second storage groove 21 and perform the position correction. At this time, the correction process is after the substrate transfer process, so the correction is convenient for manual intervention.

[0096] In the above detection method, the storage platform 10 is located above the transfer platform 30, and the storage platform 10 moves downward relative to the transfer platform 30 to contact the transfer platform 30;

[0097] The storage platform 10 is located above the support platform 20, the first direction a is a vertical direction, and the transfer platform 30 carries the storage platform 10 to move downward relative to the support platform 20 along the first direction a.

[0098] The setting mode is helpful to simplify the movement of each component in the substrate transfer process, improve the substrate transfer efficiency, and facilitate the positioning of the first storage tank and the second storage tank 21.

[0099] The various embodiments in the specification are described in a progressive manner, and each embodiment focuses on the difference from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0100] The above description is only a description of the preferred embodiments of the present application, and does not limit the scope of the present application. Any modification or modification made by a person skilled in the art according to the above disclosure is within the protection scope of the claims.

Claims

1. A substrate transfer device, comprising: The substrate transfer device comprises: a storage platform, a supporting platform and a transfer platform; the storage platform is provided with a plurality of first storage grooves for storing substrates; the supporting platform is provided with a plurality of second storage grooves matched with the first storage grooves; the transfer platform is used for positioning and transferring the storage platform; the substrate transfer device is configured to: the storage platform moves to contact the transfer platform and is positioned by the transfer platform, so that the first storage grooves and the second storage grooves are opposite in a first direction, and the substrates in the first storage grooves have a set distance from the supporting platform, the first direction being a vertical direction; the transfer platform carries the storage platform to move relative to the supporting platform in the first direction to transfer the substrates in the first storage grooves to the second storage grooves; a through hollow area is provided on the storage platform in the first direction, and the first storage grooves are located on both sides of the hollow area; when the transfer platform carries the storage platform to move relative to the supporting platform in the first direction, the supporting platform passes through the hollow area to transfer the substrates in the first storage grooves to the second storage grooves.

2. The substrate transfer apparatus of claim 1, wherein the supporting platform comprises a base, a storage part and a driving unit, the storage part is movably arranged on the base, the second storage grooves are arranged on the storage part, and the driving unit is used for driving the storage part to move relative to the base; when the storage part moves relative to the base, the position of the second storage grooves is adjusted so that each first storage groove is opposite to each second storage groove in the first direction.

3. The substrate transfer apparatus of claim 2, wherein the substrate transfer device further comprises a position detection device used for detecting the relative position error of the first storage grooves and the second storage grooves in the first direction; the position detection device is configured to: if the relative position error is greater than an error threshold, drive the storage part to move relative to the base by the driving unit so that each first storage groove is opposite to each second storage groove in the first direction.

4. The substrate transfer apparatus of claim 2, wherein the supporting platform further comprises a position locking unit used for locking the relative position of the base and the storage part.

5. The substrate transfer apparatus of claim 1, wherein the storage platform is provided with a first positioning structure, and the transfer platform is provided with a second positioning structure; when the storage platform moves relative to the transfer platform, the first positioning structure cooperates with the second positioning structure to position the storage platform by the transfer platform.

6. The substrate transfer apparatus of claim 5, wherein the first positioning structure is a protrusion arranged on the storage platform, the second positioning structure is a groove arranged on the transfer platform, and when the first positioning structure cooperates with the second positioning structure, the protrusion is inserted into the groove.

7. A transfer method based on the substrate transfer apparatus according to any one of claims 1 or 6, characterized by, the steps comprise: S1: the storage platform moves to contact the transfer platform and is positioned by the transfer platform, so that the first storage grooves and the second storage grooves are opposite in a first direction, and the substrates in the first storage grooves have a set distance from the supporting platform; S2: the transfer platform carries the storage platform to move relative to the supporting platform in the first direction to transfer the substrates in the first storage grooves to the second storage grooves.

8. The transfer method according to claim 7, wherein, the steps S1 and S2 further comprise the following steps: Detecting a relative position error of the first storage tank and the second storage tank along the first direction, if the relative position error of the first storage tank and the second storage tank is greater than an error threshold, adjusting the position of the second storage tank so that the position error is not greater than the error threshold.

9. The transfer method of claim 7, wherein, In the step S1: The storage table is located above the transfer table, and when the storage table moves downward relative to the transfer table, the storage table is in contact with and positioned by the transfer table; And / or, the storage table is located above the support table, and when the transfer table carrying the storage table moves downward relative to the support table along the first direction, the substrate in the first storage tank is transferred to the second storage tank.

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