Planetary rotating mechanism

Abstract

The invention belongs to the technical field of vacuum treatment, and discloses a planetary rotating mechanism. The planetary rotating mechanism comprises a fixed gear, a revolution gear, a revolution frame and a driving assembly, the fixed gear is fixed on a shell of the vacuum processing cavity, the revolution gear capable of rotating is arranged, the revolution frame is fixed on the revolution gear, a planetary speed regulating gear and a planetary gear are arranged on the revolution frame, the workpiece jig is fixed on the planetary gear, and the driving assembly is arranged on the planetary gear. When the driving assembly drives the revolution gear to rotate, the revolution gear rotates to drive the revolution frame to rotate, then the planetary gear and the planetary speed regulating gear are driven to revolve, the planetary speed regulating gear is meshed with the planetary gear and the fixed gear during revolution, and the planetary speed regulating gear causes the planetary gear to rotate and drives the workpiece jig to rotate. And an existing center rotating shaft and a suspension type structure are replaced, even if the workpiece is heavy, long-term stable operation can be achieved, and the stability of vacuum treatment is effectively improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum processing technology, and more particularly to a planetary rotary mechanism. Background Technology

[0002] Vacuum coating and other vacuum processing technologies are a class of technologies that perform coating and other vacuum processing in a vacuum environment. They are widely used in fields such as semiconductors and optics.

[0003] To improve the uniformity of vacuum processing, a planetary workpiece holder is typically incorporated into vacuum processing equipment. This allows the workpiece fixture to not only revolve around the center of the workpiece holder but also rotate on its own axis. This, in conjunction with the vacuum processing source, enables dynamic incidence of the vacuum source, eliminating inconsistencies in film thickness and other vacuum processing effects caused by fixed spatial positions and incident angles. In existing technologies, the workpiece holder is generally rotatably connected to the top of the vacuum processing chamber via a central shaft, with a suspended planetary disk positioned below it. However, the aforementioned planetary rotation mechanism is complex, and when the workpiece is heavy, the workpiece holder and suspended structure, supported by the central shaft, are prone to swaying, eccentricity, or vibration during high-speed rotation. This not only accelerates component wear but also significantly reduces the equipment's lifespan, failing to ensure long-term operational stability. Summary of the Invention

[0004] The purpose of this invention is to provide a planetary rotating mechanism to improve the stability of vacuum processing while achieving revolution and rotation.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] This invention provides a planetary rotary mechanism, including a fixed gear, a revolving gear, a revolving frame, and a drive assembly. The fixed gear is fixed to the housing of a vacuum processing chamber. The revolving gear is rotatably connected to the housing. The revolving frame is fixed to the revolving gear. The revolving frame is provided with planetary gears and planetary speed-regulating gears. The planetary gears are used to fix workpiece fixtures. The planetary gears mesh with the fixed gear through the planetary speed-regulating gears.

[0007] The drive assembly is used to drive the revolution gear to rotate, the rotation of the revolution gear drives the revolution frame to rotate, and drives the planetary gear and the planetary speed regulating gear to revolve around the rotation axis of the revolution gear, and drives the planetary gear to rotate around the rotation axis of the planetary gear through the planetary speed regulating gear.

[0008] As an optional technical solution for a planetary rotary mechanism, the planetary speed regulating gear meshes internally with the fixed gear, and the planetary speed regulating gear meshes externally with the planetary gear, the planetary gear being used to fix the workpiece fixture.

[0009] As an optional technical solution for a planetary rotating mechanism, the center of the orbital frame is located on the rotation axis of the orbital gear.

[0010] As an optional technical solution for a planetary rotary mechanism, the drive assembly includes a drive member and a transmission gear connected to the drive member. The transmission gear meshes externally with the planetary gear, and the drive member drives the transmission gear to rotate so as to drive the planetary gear to rotate.

[0011] As an optional technical solution for a planetary rotary mechanism, it also includes a slewing bearing, through which the revolution gear is connected to the housing.

[0012] As an optional technical solution for a planetary rotating mechanism, the slewing bearing is located inside the revolution gear and spaced apart from the revolution frame.

[0013] As an optional technical solution for a planetary rotating mechanism, the slewing bearing includes a first pressure ring, a second pressure ring, and at least one roller. The first pressure ring is used to fix the bearing to the housing. The second pressure ring is fixed to the side of the first pressure ring near the orbital frame and spaced apart from the orbital frame. The first pressure ring and the second pressure ring form a raceway to accommodate the roller. The roller rolls into contact with the orbital gear.

[0014] As an optional technical solution for a planetary rotary mechanism, the roller is provided with three rollers, namely a first roller, a second roller and a third roller. The first roller and the second roller are spaced apart and both extend in the horizontal direction, while the third roller extends in the vertical direction. The planetary gear is located between the first roller and the second roller and rolls with the third roller on its side.

[0015] As an optional technical solution for a planetary rotary mechanism, the surface of the roller includes a self-lubricating material; and / or, the surfaces of the first pressure ring and the second pressure ring both include a self-lubricating material.

[0016] As an optional technical solution for a planetary rotating mechanism, the orbital frame is provided with multiple mounting holes for mounting the planetary speed regulating gears, and the distance between the center of the multiple mounting holes and the center of the orbital frame is different.

[0017] Beneficial effects:

[0018] This invention provides a planetary rotating mechanism, which includes a fixed gear, a revolving gear, a revolving frame, and a drive assembly. The fixed gear is fixed to the housing of a vacuum processing chamber. The revolving gear is rotatably connected to the housing. The revolving frame is fixed to the revolving gear and is equipped with planetary gears and planetary speed-regulating gears. The planetary gears are used to fix the workpiece fixture and mesh with the fixed gear through the planetary speed-regulating gears. The drive assembly is used to drive the revolving gear to rotate. The rotation of the revolving gear drives the revolving frame to rotate and drives the planetary gears and planetary speed-regulating gears to revolve around the rotation axis of the revolving gear. The planetary gears also rotate around their own rotation axis through the planetary speed-regulating gears. A fixed gear is fixed on the shell of the vacuum processing chamber, and a rotatable planetary gear is set on it. A planetary carrier is fixed on the planetary gear, and a planetary speed-regulating gear and a planetary gear are set on the planetary carrier. The workpiece fixture is fixed on the planetary gear. When the drive component drives the planetary gear to rotate, the rotation of the planetary gear drives the planetary carrier to rotate, which in turn drives the planetary gear and the planetary speed-regulating gear to rotate. When the planetary speed-regulating gear rotates, it meshes with the planetary gear and the fixed gear. The planetary speed-regulating gear causes the planetary gear to rotate and drives the workpiece fixture to rotate. This replaces the existing central shaft and suspension structure, and can operate stably for a long time even if the workpiece is heavy, effectively improving the stability of vacuum processing. Attached Figure Description

[0019] Figure 1 This is a first-view structural schematic diagram of the planetary rotating mechanism provided in an embodiment of the present invention;

[0020] Figure 2 This is a structural schematic diagram of the planetary rotating mechanism provided in an embodiment of the present invention from a second perspective;

[0021] Figure 3 This is a cross-sectional view of the planetary rotating mechanism provided in an embodiment of the present invention;

[0022] Figure 4 This is a partial cross-sectional view of the planetary rotating mechanism provided in an embodiment of the present invention;

[0023] Figure 5 This is a third-view structural schematic diagram of the planetary rotating mechanism provided in an embodiment of the present invention.

[0024] In the picture:

[0025] 11. Fixed gear; 12. Revolutionary gear; 13. Revolutionary frame; 131. Mounting hole; 14. Planetary gear; 15. Planetary speed regulating gear; 16. Slewing bearing; 161. First pressure ring; 162. Second pressure ring; 163. Roller; 163a. ​​First roller; 163b. Second roller; 163c. Third roller;

[0026] 20. Drive assembly; 21. Drive component; 22. Transmission gear. Detailed Implementation

[0027] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0028] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0029] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0030] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0031] like Figures 1 to 5As shown, this embodiment provides a planetary rotary mechanism, which includes a fixed gear 11, a revolving gear 12, a revolving frame 13, and a drive assembly 20. The fixed gear 11 is fixed to the housing of the vacuum processing chamber. The revolving gear 12 is rotatably connected to the housing. The revolving frame 13 is fixed to the revolving gear 12. The revolving frame 13 is provided with a planetary gear 14 and a planetary speed-regulating gear 15. The planetary gear 14 is used to fix the workpiece fixture. The planetary gear 14 meshes with the fixed gear 11 through the planetary speed-regulating gear 15. The drive assembly 20 is used to drive the revolving gear 12 to rotate. The rotation of the revolving gear 12 drives the revolving frame 13 to rotate, and drives the planetary gear 14 and the planetary speed-regulating gear 15 to revolve around the rotation axis of the revolving gear 12. The planetary gear 14 is driven to rotate around its own rotation axis through the planetary speed-regulating gear 15.

[0032] A fixed gear 11 is fixed on the shell of the vacuum processing chamber, and a rotatable revolving gear 12 is provided. A revolving frame 13 is fixed on the revolving gear 12, and a planetary speed regulating gear 15 and a planetary gear 14 are provided on the revolving frame 13. The workpiece fixture is fixed on the planetary gear 14. When the drive assembly 20 drives the revolving gear 12 to rotate, the rotation of the revolving gear 12 drives the revolving frame 13 to rotate, which in turn drives the planetary gear 14 and the planetary speed regulating gear 15 to revolve. When the planetary speed regulating gear 15 revolves, it meshes with the planetary gear 14 and the fixed gear 11. The planetary speed regulating gear 15 causes the planetary gear 14 to rotate and drives the workpiece fixture to rotate. This replaces the existing central rotating shaft and suspension structure, and can operate stably for a long time even if the workpiece is heavy, effectively improving the stability of vacuum processing.

[0033] Specifically, the drive assembly 20 includes a drive member 21 and a transmission gear 22 connected to the drive member 21. The transmission gear 22 meshes externally with the planetary gear 12, and the drive member 21 drives the transmission gear 22 to rotate, thereby causing the planetary gear 12 to rotate. By externally meshing the transmission gear 22 of the drive assembly 20 with the planetary gear 12, a planetary frame 13 can be set on the planetary gear 12. At the same time, the drive member 21 and the transmission gear 22 are arranged outside the planetary gear 12, so that the arrangement is more flattened to make reasonable use of the shell space of the vacuum processing chamber and to arrange the vacuum processing source.

[0034] In this embodiment, the driving component 21 is a motor, and the transmission gear 22 is keyed to the output shaft of the motor. By using a motor drive, the transmission efficiency is high and the response is fast.

[0035] Furthermore, the center of the orbital frame 13 is located on the rotation axis of the orbital gear 12. In this embodiment, the orbital frame 13 is disc-shaped, and its center is located on the rotation axis of the orbital gear 12. In other embodiments, if the orbital frame 13 is not circular, its geometric center is located on the rotation axis of the orbital gear 12. By setting the center of the orbital frame 13 to be located on the rotation axis of the orbital gear 12, it helps to improve transmission accuracy, eliminate the additional energy loss caused by the eccentric movement of the orbital frame 13, reduce vibration amplitude, and improve reliability and service life.

[0036] Optionally, planetary gear 14 and planetary speed regulating gear 15 revolve around the center of planetary gear 12, and planetary gear 14 rotates around its own center. By adopting rotation around the center, the structure is compact, the load distribution is more uniform, and the load-bearing capacity is stronger.

[0037] In this embodiment, the rotation axis of the revolution gear 12 is parallel to the rotation axis of the planetary gear 14. By setting the rotation axes of revolution and rotation to be parallel, uneven coating caused by the difference in the rotation axis directions of revolution and rotation can be avoided.

[0038] Furthermore, the planetary speed-regulating gear 15 meshes internally with the fixed gear 11, and externally meshes with the planetary gear 14, which is used to fix the workpiece fixture. By using the external meshing of the planetary speed-regulating gear 15 and the planetary gear 14, the rotation direction of the planetary gear 14 can be changed, and the rotation speed of the planetary gear 14 can also be controlled. By using the internal meshing of the planetary speed-regulating gear 15 and the fixed gear 11, the structure is compact and saves space, the transmission is smoother, the contact area between the tooth surfaces is larger, and it can withstand higher loads, making it suitable for heavy-duty working conditions. By using the planetary gear 14 to fix the workpiece fixture, the workpiece fixture can be supported by the planetary gear 14 or suspended on the planetary gear 14 for convenient operation and strong load-bearing capacity.

[0039] Optionally, the rotation direction of the orbiter 13 is the same as the rotation direction of the planetary gear 14. By setting the rotation direction of the orbiter 13 (i.e., the orbital direction) to be the same as the rotation direction of the planetary gear 14, the rotation of the planetary gear 14 is increased by rotating in the same direction on the basis of the orbital revolution, thereby effectively improving the coating uniformity.

[0040] In this embodiment, a single planetary speed-regulating gear 15 is provided. By internally meshing the planetary speed-regulating gear 15 with the fixed gear 11 and externally meshing the planetary gear 14, the rotation direction of the planetary gear 14 can be made the same as the rotation direction of the orbital frame 13. Specifically, when the orbital gear 12 and the orbital frame 13 revolve clockwise, the planetary speed-regulating gear 15 rotates counterclockwise, and the planetary gear 14 rotates clockwise. In other embodiments, multiple meshing planetary speed-regulating gears 15 can be provided according to the actual structure, as long as the rotation direction of the planetary gear 14 is the same as the rotation direction of the orbital frame 13.

[0041] Optionally, the planetary rotary mechanism also includes a slewing bearing 16, through which the planetary gear 12 is connected to the housing. The use of the slewing bearing 16 results in a compact structure, facilitates better utilization of installation space, provides good load-bearing capacity, and facilitates maintenance.

[0042] Optionally, the slewing bearing 16 is located inside the orbital gear 12 and spaced apart from the orbital frame 13. Positioning the slewing bearing 16 inside the orbital gear 12 results in a compact structure, high transmission efficiency, and suitability for high-speed and small-scale applications. The spaced arrangement between the slewing bearing 16 and the orbital frame 13 prevents contact friction between them, thus avoiding interference with the rotation of the orbital gear 12.

[0043] Specifically, the slewing bearing 16 includes a first pressure ring 161, a second pressure ring 162, and at least one roller 163. The first pressure ring 161 is fixed to the housing, and the second pressure ring 162 is fixed to the side of the first pressure ring 161 near the planetary gear 13 and spaced apart from the planetary gear 13. The first pressure ring 161 and the second pressure ring 162 form a raceway to accommodate the roller 163, which rolls in engagement with the planetary gear 12. By using the slewing bearing 16 with rollers 163, it has a higher load-bearing capacity than ordinary bearings and can adapt to high-speed operation.

[0044] Furthermore, three rollers 163 are provided, namely a first roller 163a, a second roller 163b, and a third roller 163c. The first rollers 163a and 163b are spaced apart and extend horizontally, while the third roller 163c extends vertically. The planetary gear 12 is located between the first rollers 163a and 163b and its side is in rolling contact with the third roller 163c. By using three rollers 163, axial force, radial force, and overturning moment can be simultaneously withstood, ensuring the stability and positioning accuracy of the workpiece fixture during rotation.

[0045] In this embodiment, the second roller 163b is located on the side of the orbital gear 12 near the orbital frame 13, and the second roller 163b is spaced apart from the orbital frame 13; the first roller 163a is used to support the orbital gear 12, the second roller 163b is used to prevent off-center loading, the first roller 163a and the second roller 163b can reduce the axial displacement of the orbital gear 12, and the third roller 163c is used to reduce the radial displacement of the orbital gear 12.

[0046] Optionally, the surface of the roller 163 includes a self-lubricating material. Optionally, the surfaces of the first pressure ring 161 and the second pressure ring 162 both include a self-lubricating material. The roller 163, the first pressure ring 161, and the second pressure ring 162 can be made of the same or different self-lubricating materials, including but not limited to modified polytetrafluoroethylene. By using a special self-lubricating material to support the roller 163 and the pressure rings, excellent lubrication performance can be maintained even at high temperatures, and it does not cause particulate or chemical contamination during the film formation process, completely overcoming the problem of dust contamination of the film layer caused by friction generated by commonly used solid lubricants (such as molybdenum disulfide and tungsten disulfide).

[0047] Because the self-lubricating material of the roller 163 and the raceway is selected or the contact surface between the roller 163 and the raceway is specially lubricated, the wear or adhesion problems caused by the direct contact between the roller 163, the first pressure ring 161 and the second pressure ring 162 and the same metal material or metal material that is prone to cold welding can be avoided. The lubrication and wear resistance are good.

[0048] In this embodiment, both the first pressure ring 161 and the second pressure ring 162 undergo special tempering heat treatment to significantly reduce their geometric deformation under high-temperature conditions. This ensures that the slewing bearing 16 will not experience jamming of the roller 163, reduced operating accuracy, or failure due to high-temperature deformation of the first pressure ring 161 and the second pressure ring 162 during high-temperature use.

[0049] See Figure 5 The planetary gear 13 has multiple mounting holes 131 for mounting the planetary speed regulating gear 15. The distance between the center of each mounting hole 131 and the center of the planetary gear 13 is different. By setting multiple mounting holes 131 at different positions on the planetary gear 13, and since the distance between the center of each mounting hole 131 and the center of the planetary gear 13 is different, when it is necessary to replace the planetary gear 14 and the planetary speed regulating gear 15 of different sizes, it is not necessary to replace the planetary gear 13. The replaced planetary speed regulating gear 15 can be directly installed in the corresponding mounting hole 131, which can ensure that the planetary speed regulating gear 15 meshes with the planetary gear 14 and the fixed gear 11. The structure is simple and facilitates the maintenance and replacement of the planetary speed regulating gear 15.

[0050] In this embodiment, the orbital frame 13 is provided with three mounting holes 131 spaced apart. The distance between the center of the three mounting holes 131 and the center of the orbital frame 13 is different. The planetary speed regulating gear 15 is installed in one of the mounting holes 131.

[0051] It is understood that the planetary rotary mechanism provided in this embodiment is not limited to one set of planetary gears 14 and one set of workpiece fixtures. The corresponding planetary gears 14 and planetary speed regulating gears 15 can be designed according to the actual number of workpiece fixtures. The planetary rotary mechanism can be applied to workpiece fixtures of different diameters. The single gear transmission drive mode of the transmission gear 22 can also be adjusted to multi-gear drive as needed.

[0052] The following is a detailed description of the use of a planetary rotary mechanism:

[0053] The driving component 21 drives the transmission gear 22 to rotate. The transmission gear 22 meshes externally with the planetary gear 12 to drive the planetary gear 12 to rotate. The planetary frame 13, planetary gear 14, and planetary speed regulating gear 15 rotate with the planetary gear 12 to achieve revolution. The planetary speed regulating gear 15 meshes internally with the fixed gear 11 and externally with the planetary gear 14, thereby driving the planetary gear 14 to achieve rotation. The workpiece fixture is fixed on the planetary gear 14, so that it revolves with the planetary frame 13 and rotates with the planetary gear 14.

[0054] Compared to existing umbrella-type vacuum processing chambers, the planetary rotating mechanism design is more flattened, which helps save space and is suitable for coating large-size substrates. The existing umbrella-type hoisting is replaced by planetary gears 14 supporting and fixing the workpiece fixture. This planetary rotating mechanism, through the use of specially designed slewing bearings 16, can effectively drive heavy-duty large substrates and workpiece fixtures to achieve stable rotation and revolution. It can operate reliably under high temperature and high load. At the same time, due to the non-polluting properties of the lubricating material, it helps to improve the quality and purity of the final film layer. The rotational speed range of the planetary gears 14 can be changed by adding gears, thereby controlling the rotational speed of the substrate and workpiece fixture.

[0055] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A planetary rotary mechanism, characterized in that, The assembly includes a fixed gear (11), a revolving gear (12), a revolving frame (13), and a drive assembly (20). The fixed gear (11) is fixed to the housing of the vacuum processing chamber. The revolving gear (12) is rotatably connected to the housing. The revolving frame (13) is fixed to the revolving gear (12). The revolving frame (13) is provided with a planetary gear (14) and a planetary speed-regulating gear (15). The planetary gear (14) is used to fix the workpiece fixture. The planetary gear (14) meshes with the fixed gear (11) through the planetary speed-regulating gear (15). The drive assembly (20) is used to drive the revolution gear (12) to rotate. The rotation of the revolution gear (12) drives the revolution frame (13) to rotate, and drives the planetary gear (14) and the planetary speed regulating gear (15) to revolve around the rotation axis of the revolution gear (12). The planetary speed regulating gear (15) drives the planetary gear (14) to rotate around the rotation axis of the planetary gear (14).

2. The planetary rotary mechanism according to claim 1, characterized in that, The planetary speed regulating gear (15) meshes internally with the fixed gear (11), and the planetary speed regulating gear (15) meshes externally with the planetary gear (14). The planetary gear (14) is used to fix the workpiece fixture.

3. The planetary rotary mechanism according to claim 1, characterized in that, The center of the orbital frame (13) is located on the rotation axis of the orbital gear (12).

4. The planetary rotary mechanism according to claim 1, characterized in that, The drive assembly (20) includes a drive member (21) and a transmission gear (22) connected to the drive member (21). The transmission gear (22) meshes externally with the planetary gear (12). The drive member (21) drives the transmission gear (22) to rotate so as to drive the planetary gear (12) to rotate.

5. The planetary rotary mechanism according to claim 1, characterized in that, It also includes a slewing bearing (16), through which the revolution gear (12) is connected to the housing.

6. The planetary rotary mechanism according to claim 5, characterized in that, The slewing bearing (16) is located inside the orbital gear (12) and spaced apart from the orbital frame (13).

7. The planetary rotary mechanism according to claim 5, characterized in that, The slewing bearing (16) includes a first pressure ring (161), a second pressure ring (162), and at least one roller (163). The first pressure ring (161) is fixed to the housing. The second pressure ring (162) is fixed to the side of the first pressure ring (161) near the orbital frame (13) and spaced apart from the orbital frame (13). The first pressure ring (161) and the second pressure ring (162) form a raceway to accommodate the roller (163). The roller (163) rolls with the orbital gear (12).

8. The planetary rotary mechanism according to claim 7, characterized in that, The roller (163) is provided in three parts, namely a first roller (163a), a second roller (163b) and a third roller (163c). The first roller (163a) and the second roller (163b) are spaced apart and both extend in the horizontal direction. The third roller (163c) extends in the vertical direction. The planetary gear (12) is located between the first roller (163a) and the second roller (163b) and its side is in rolling engagement with the third roller (163c).

9. The planetary rotary mechanism according to claim 7, characterized in that, The surface of the roller (163) includes a self-lubricating material; and / or, the surfaces of the first pressure ring (161) and the second pressure ring (162) both include a self-lubricating material.

10. The planetary rotary mechanism according to any one of claims 1-9, characterized in that, The orbital frame (13) is provided with a plurality of mounting holes (131) for mounting the planetary speed regulating gear (15), and the distance between the center of the plurality of mounting holes (131) and the center of the orbital frame (13) is different.

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