An auxiliary adsorption device for an evaporation coater

Abstract

This invention provides an auxiliary adsorption device for an evaporation coating machine, belonging to the technical field of evaporation coating machines. It includes a housing with a servo motor installed at the bottom and a connecting shaft rotatably mounted at the top. A chip removal assembly is installed inside the housing, comprising a chip removal mechanism, an opening / closing mechanism, and a transmission mechanism. A guide groove and a placement groove are sequentially formed from the inside to the outside of the bottom of the housing, and these grooves are connected. The chip removal mechanism includes a first rotating rod and several second rotating rods, each with a transmission gear on its circumferential surface. Through this chip removal mechanism, multiple cleaning brushes can rotate in both directions to achieve comprehensive automated cleaning of the inner wall of the housing, effectively removing attached impurities and preventing the formation of stubborn stains. This also prevents impurities from remaining inside the housing and causing secondary pollution, thus improving the coating quality of the device.

Description

Technical Field

[0001] This invention belongs to the technical field of evaporation coating machines, specifically an auxiliary adsorption device for the operation of an evaporation coating machine. Background Technology

[0002] Evaporation coating machines work in a vacuum environment by heating and evaporating materials to deposit them as gaseous molecules onto the substrate surface to form a thin film. During this process, evaporation materials, contaminants, and byproducts adhere to the inner wall of the coating chamber (box) and gradually accumulate. Traditional equipment lacks an effective online cleaning and impurity collection mechanism, which means that impurities attached to the inner wall of the chamber may evaporate or sublimate again under the heating conditions of subsequent processes, forming an unstable gas source that interferes with the thin film deposition process and ultimately affects the uniformity, density, and overall quality of the coating.

[0003] Therefore, we propose an auxiliary adsorption device for the operation of an evaporation coating machine to solve the problems encountered above. Summary of the Invention

[0004] The purpose of this invention is to address the problem that traditional equipment lacks an effective online cleaning and impurity collection mechanism, which leads to impurities adhering to the inner wall of the chamber potentially evaporating or sublimating again under the heating conditions of subsequent processes, forming an unstable gas source that interferes with the thin film deposition process and ultimately affects the uniformity, density, and overall quality of the coating. Therefore, this invention proposes an auxiliary adsorption device for the operation of an evaporation coating machine.

[0005] The objective of this invention can be achieved through the following technical solution: a housing is included, a servo motor is provided at the bottom inner part of the housing, a connecting shaft is rotatably installed at the top inner part of the housing, a chip removal assembly is provided inside the housing, and the chip removal assembly includes a chip removal mechanism, an opening and closing mechanism and a transmission mechanism, and a guide groove and a placement groove are sequentially opened from the inside to the outside at the bottom inner part of the housing, and the guide groove and the placement groove are connected.

[0006] The chip removal mechanism includes a rotating rod 1 and a rotating rod 2, and there are several rotating rod 2s. The circumferential surfaces of the several rotating rod 2s and rotating rod 1s are all provided with transmission gear 2s. The side of the transmission gear 2 away from the servo motor is meshed with an arc-shaped toothed plate 1. The upper circumferential surfaces of the rotating rod 1 and the several rotating rod 2s are all provided with swing arms, and the other end of the swing arms is provided with a cleaning brush. The cleaning end of the cleaning brush is in close contact with the inner wall of the housing.

[0007] The opening and closing mechanism includes a material guiding ventilation plate, a downward sealing plate, and a cross-shaped sealing material guiding plate. The material guiding ventilation plate is disposed inside the upper end of the guide groove and the placement groove, and the end of the material guiding ventilation plate located in the placement groove does not contact the inner wall of the box. The cross-shaped sealing material guiding plate is rotatably installed inside the upper end of the guide groove and is located above the material guiding ventilation plate. The material guiding ventilation plate has a ventilation hole on the side below the cross-shaped sealing material guiding plate. The downward sealing plate is disposed above the solid side of the material guiding ventilation plate by a return spring.

[0008] In a preferred embodiment of the present invention, the chip removal mechanism further includes a turntable, and two turntables are provided. The two turntables are respectively provided on the circumferential surface of the power output end of the servo motor and the circumferential surface of the connecting shaft. The circumferential surface of the turntable is provided with four arc-shaped protrusions. The circumferential surface of the rotating rod is provided with a transmission gear. The left and right sides of the transmission gear are respectively meshed with a horizontal and vertical toothed plate and a horizontal and vertical toothed plate. The front end of the horizontal and vertical toothed plate is close to the turntable, and the front end of the horizontal and vertical toothed plate is away from the turntable.

[0009] In a preferred embodiment of the present invention, the opening and closing mechanism further includes an arc-shaped lower pressure plate and a pressure plate. The pressure plate is inserted into the inner bottom of the housing and fixedly connected to the upper surface of the lower pressure sealing plate. The arc-shaped lower pressure plate is disposed on the lower surface of the swing arm corresponding to the left front of the pressure plate.

[0010] In a preferred embodiment of the present invention, the transmission mechanism includes a threaded rod, which is rotatably mounted on the inner bottom of the housing. A lifting plate is threadedly connected to the circumferential surface of the threaded rod, and vertical toothed plates are provided at the front end and right side of the lifting plate. A transmission gear four is meshed with one side of the vertical toothed plate, and a rotating rod three is provided in the middle of the transmission gear four. The cross-shaped sealing guide plate is provided on the circumferential surface of the rotating rod three.

[0011] In a preferred embodiment of the present invention, the transmission mechanism further includes a third transmission gear and a second arc-shaped toothed plate. The third transmission gear is disposed at the upper end of the threaded rod, and the second arc-shaped toothed plate is disposed on the lower surface of the swing arm corresponding to the left side of the third transmission gear.

[0012] In a preferred embodiment of the present invention, the interior of the housing is provided with a movable groove, and the lifting plate, the vertical toothed plate and the transmission gear are all disposed inside the movable groove.

[0013] In a preferred embodiment of the present invention, a positioning rod is provided inside the movable groove, and one side of the lifting plate is slidably mounted on the circumferential surface of the positioning rod.

[0014] In a preferred embodiment of the present invention, a collection box is provided inside the placement slot, the material guide ventilation plate is located above the collection box, and sealing doors are provided on the left and right sides and the rear side wall of the bottom of the box.

[0015] In a preferred embodiment of the present invention, a ventilation groove is provided at the bottom of the inner side of the box, the ventilation groove is connected to the bottom of the three guide grooves, and the outer end of the ventilation groove is connected to the air extraction pipe. The inner bottom wall of the box is designed to be inclined, and it presents a wedge-shaped profile that gradually narrows towards the guide groove.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0017] (1) The chip removal mechanism can drive multiple cleaning brushes to rotate in both directions to achieve full automated cleaning of the inner wall of the box, effectively remove attached impurities, avoid the formation of stubborn stains, and at the same time avoid impurities remaining inside the box to cause secondary pollution, thus improving the coating quality of the device.

[0018] (2) Through the set opening and closing mechanism, guide groove and placement groove, the collection channel can be closed in the non-collection state, effectively isolating the collected impurities from the main chamber, preventing them from evaporating or sublimating at high temperature and causing secondary pollution. The intelligent linkage control of the opening and closing of the cross-sealed guide plate and the action of the pressing sealing plate ensures that the pressing sealing plate has sealed the guide ventilation plate before the impurities fall into the collection channel, preventing the airflow from sucking out the impurities in the collection box; after collection is completed, the channel is automatically closed and the system is reset.

[0019] (3) By connecting the guide groove, the ventilation groove and the external ventilation equipment, the original air extraction system of the evaporation coating machine is cleverly utilized. When the guide groove is opened, an airflow is formed in the chamber and flows towards the collection box. This airflow helps impurities enter the collection box more smoothly on the one hand, and forms a barrier on the other hand to prevent the gaseous molecules of impurities in the collection box from diffusing back to the main chamber, thereby further improving the impurity collection effect. Attached Figure Description

[0020] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to the accompanying drawings.

[0021] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0022] Figure 2 This is a perspective view of the present invention.

[0023] Figure 3 This is a first left sectional perspective view of the present invention;

[0024] Figure 4 This is a second left sectional perspective view of the present invention;

[0025] Figure 5 This is a top sectional perspective view of the present invention;

[0026] Figure 6 This is a partial three-dimensional structural schematic diagram of the chip removal mechanism of the present invention;

[0027] Figure 7 This is a partial three-dimensional structural diagram of the opening and closing mechanism of the present invention;

[0028] Figure 8 This is a partial three-dimensional structural diagram of the transmission mechanism of the present invention.

[0029] In the diagram: 1. Housing; 2. Servo motor; 3. Chip removal mechanism; 301. Turntable; 302. Arc-shaped protrusion; 303. Horizontal and vertical toothed plate one; 304. Horizontal and vertical toothed plate two; 305. Transmission gear one; 306. Rotating rod one; 307. Arc-shaped toothed plate one; 308. Rotating rod two; 309. Transmission gear two; 310. Swing arm; 311. Cleaning brush; 4. Opening and closing mechanism; 401. Material guide ventilation plate; 402. Lower sealing plate; 403. Return spring; 404. Arc-shaped lower pressure plate; 405. Pressure plate; 406. Cross-shaped sealing guide plate; 5. Transmission mechanism; 501. Threaded rod; 502. Transmission gear three; 503. Arc-shaped toothed plate two; 504. Vertical toothed plate; 505. Transmission gear four; 506. Rotating rod three; 507. Positioning rod; 6. Guide groove; 7. Placement groove; 8. Collection box; 9. Connecting shaft; 10. Movable groove; 11. Ventilation groove. Detailed Implementation

[0030] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] Please see Figure 1 - Figure 8As shown, an auxiliary adsorption device for an evaporation coating machine includes a housing 1. A servo motor 2 is installed at the bottom of the housing 1, and a connecting shaft 9 is rotatably mounted at the top of the housing 1. Flanges are provided above the power output end of the servo motor 2 and below the connecting shaft 9 to facilitate connection with a shelf via the flanges. A chip removal assembly is installed inside the housing 1, including a chip removal mechanism 3, an opening and closing mechanism 4, and a transmission mechanism 5. This assembly is used to treat contaminants accumulated in the early stages and byproducts generated during processing, preventing impurities accumulated at the bottom from evaporating or sublimating again after heating, forming gaseous molecules that would affect the quality of the evaporation coating. Guide grooves are sequentially opened from the inside to the outside at the bottom of the housing 1. The guide trough 6 and the placement trough 7 are connected. The placement trough 7 is equipped with a collection box 8, which can collect impurities and avoid secondary pollution. The material guide ventilation plate 401 is located above the collection box 8. The left and right sides and the rear side wall of the bottom of the box 1 are equipped with sealing doors. The bottom of the box 1 is provided with a ventilation trough 11, which is connected to the bottom of the three guide troughs 6. The outer end of the ventilation trough 11 is connected to the air extraction pipe. The bottom wall of the box 1 is inclined and has a wedge-shaped profile that gradually narrows towards the guide trough 6. This allows the impurities at the bottom to fall smoothly into the interior of the guide trough 6 under the vibration generated when the device is working, due to their own weight and the inclined guidance.

[0032] It should be noted that the ventilation slot 11 here is additionally connected to the external exhaust pipe and does not affect the original performance of the exhaust pipe. Because the exhaust pipe is always working during the coating process of the evaporation coating machine, when the upper end of the guide slot 6 is closed, the guide slot 6 and the ventilation slot 11 will not exhaust. When the upper end of the guide slot 6 is open for material collection, the guide slot 6 is connected to the inside of the box 1, generating airflow towards the guide slot 6. This prevents impurities inside the collection box 8 from evaporating or sublimating and flowing into the box 1. It also allows the impurities to flow more smoothly into the inside of the guide slot 6 under the influence of the airflow.

[0033] The chip removal mechanism 3 includes a first rotating rod 306 and a second rotating rod 308, with several second rotating rods 308 provided. Each of the several second rotating rods 308 and the first rotating rod 306 has a second transmission gear 309 on its circumferential surface. The side of the second transmission gear 309 furthest from the servo motor 2 is meshed with an arc-shaped toothed plate 307. The lower end of the arc-shaped toothed plate 307 has an arc-shaped moving groove, and a support column is provided inside the arc-shaped moving groove. The lower end of the support column is located at the bottom of the housing 1. The arc-shaped toothed plate 307 is movably mounted above the support column, providing limiting support for the arc-shaped toothed plate 307 without affecting its position. The rotation of the arc-shaped toothed plate 307 is accompanied by the circumferential surface of the upper end of the rotating rod 306 and several rotating rods 308, each equipped with a swing arm 310. A cleaning brush 311 is mounted on the other end of each swing arm 310. The cleaning brush 311 can be made of, but is not limited to, ceramic fiber composite material, enabling it to operate in high-temperature environments. The cleaning end of the cleaning brush 311 is in close contact with the inner wall of the housing 1, allowing it to clean the inner wall of the housing 1 during reciprocating rotation. Simultaneously, the cleaning brush 311 itself also exhibits a certain degree of vibration, allowing impurities to fall smoothly through the inner wall of the housing 1 into the housing. At the bottom of 1, the chip removal mechanism 3 also includes a turntable 301, and there are two turntables 301. The two turntables 301 are respectively set on the circumferential surface of the power output end of the servo motor 2 and the circumferential surface of the connecting shaft 9. The design of the transmission structure of the upper and lower sets of turntables 301 makes the cleaning brush 311 bear force evenly, improving the cleaning quality of the cleaning brush 311. The circumferential surface of the turntable 301 is arrayed with four arc-shaped protrusions 302. The circumferential surface of the rotating rod 306 is provided with a transmission gear 305. The left and right sides of the transmission gear 305 are respectively meshed with a horizontal and vertical toothed plate 303 and a horizontal and vertical toothed plate 304. 4. The front end of the first horizontal toothed plate 303 is close to the turntable 301, and the front end of the second horizontal toothed plate 304 is far away from the turntable 301. The lower ends of the first horizontal toothed plate 303 and the second horizontal toothed plate 304 are provided with horizontal front-back moving grooves, and the interior of the horizontal front-back moving grooves is provided with support rods. The lower ends of the support rods are located at the inner bottom of the housing 1. The first horizontal toothed plate 303 and the second horizontal toothed plate 304 are slidably installed above the two support rods, which provides limiting support for the first horizontal toothed plate 303 and the second horizontal toothed plate 304 without affecting the front-back horizontal movement of the first horizontal toothed plate 303 and the second horizontal toothed plate 304.

[0034] It should be noted that the right side of the front end of both the first horizontal gear plate 303 and the second horizontal gear plate 304 is arc-shaped. This allows the arc-shaped protrusion 302 to smoothly push the first horizontal gear plate 303 and the second horizontal gear plate 304 horizontally backward when the turntable 301 drives the arc-shaped protrusion 302 to rotate counterclockwise. This, in turn, causes the first horizontal gear plate 303 and the second horizontal gear plate 304 to mesh with the first transmission gear 305, driving the first transmission gear 305 to rotate. Specifically, when the turntable 301 drives the arc-shaped protrusion 302 to rotate, the arc-shaped protrusion 302 first contacts the front end of the first horizontal gear plate 303, thus pushing the first horizontal gear plate 303 backward. The first horizontal gear plate 303 then drives the first transmission gear 305 to rotate, which in turn drives the second horizontal gear plate 304 to move horizontally forward. Then, as the same arc-shaped protrusion 302 continues to rotate, it meshes with the front end of the first horizontal gear plate 303. After detachment, and after contact with the front end of the second horizontal toothed plate 304, the second horizontal toothed plate 304 is pushed to move backward, causing the second horizontal toothed plate 304 to drive the first transmission gear 305 to rotate in the opposite direction. Then, the first horizontal toothed plate 303 moves horizontally forward, so that when an arc-shaped protrusion 302 rotates from the right side of the first horizontal toothed plate 303 to the left side of the second horizontal toothed plate 304, the first horizontal toothed plate 303 performs a back-forward and forward movement, the second horizontal toothed plate 304 performs a forward-backward and backward movement, and the first transmission gear 305 performs a forward-reverse rotation once within a certain range. The rotation of the first transmission gear 305 drives the first rotating rod 306, the swing arm 310, and the cleaning brush 311 to perform a forward-reverse rotation once within a certain range, so that each cleaning brush 311 cleans the inner wall of the box 1 within a certain range, sweeping off the impurities attached to the inner wall of the box 1 and preventing the formation of stubborn stains due to long-term adhesion.

[0035] The opening and closing mechanism 4 includes a material guiding and ventilation plate 401, a downward sealing plate 402, and a cross-shaped sealing material guiding plate 406. The material guiding and ventilation plate 401 is disposed inside the upper end of the guide groove 6 and the placement groove 7, and the end of the material guiding and ventilation plate 401 located in the placement groove 7 does not contact the inner wall of the box 1, leaving a gap between the material guiding and ventilation plate 401 and the box 1, so that impurities can flow down through this gap and fall into the interior of the collection box 8. The cross-shaped sealing material guiding plate 406 is rotatably installed inside the upper end of the guide groove 6 and is located above the material guiding and ventilation plate 401. When not in operation, the cross-shaped sealing material guiding plate 406 can close the guide groove 6, preventing it from communicating with the interior of the box 1, thus preventing impurities collected inside the collection box 8 from evaporating or sublimating at high temperatures. The gaseous molecules flow into the interior of the box 1, affecting the coating effect. The material guide ventilation plate 401 is located on one side below the cross-sealed material guide plate 406 and has ventilation holes. The size of the ventilation holes is designed to be smaller than the size of the impurities to prevent the impurities from being sucked away by the airflow and carried to the ventilation pipe or air pump, thereby preventing high-temperature impurities from damaging the ventilation pipe or air pump. The pressure sealing plate 402 is set above the solid side of the material guide ventilation plate 401 by a return spring 403. The opening and closing mechanism 4 also includes an arc-shaped pressure plate 404 and a pressure plate 405. The pressure plate 405 is inserted into the inner bottom of the box 1 and fixedly connected to the upper surface of the pressure sealing plate 402. The arc-shaped pressure plate 404 is set on the lower surface of the swing arm 310 corresponding to the left front of the pressure plate 405.

[0036] It should be noted that when the cross-shaped sealing guide plate 406 closes the guide groove 6, the arc-shaped lower pressure plate 404 is not in contact with the pressure plate 405. Therefore, the lower pressure sealing plate 402 is not in contact with the upper surface of the guide ventilation plate 401 under the action of the return spring 403. At this time, the impurities on the guide ventilation plate 401 will fall into the inside of the collection box 8 under the guidance of vibration and tilt. Before the impurities at the bottom of the box 1 flow into the guide groove 6, the arc-shaped lower pressure plate 404 will first contact the pressure plate 405, pressing the pressure plate 405 and the lower pressure sealing plate 402 downwards. After the lower end of the lower pressure sealing plate 402 abuts against the guide ventilation plate 401, the cross-shaped sealing guide plate 406 will rotate, so that the impurities falling on one side of the cross-shaped sealing guide plate 406 fall into the inside of the guide groove 6, avoiding the airflow from sucking out the impurities inside the collection box 8 when the guide groove 6 is flowing. During the impurity collection process, the arc-shaped lower pressure plate 404 is always in contact with the pressure plate 405.

[0037] The transmission mechanism 5 includes a threaded rod 501, which is rotatably mounted on the inner bottom of the housing 1. A lifting plate is threadedly connected to the circumferential surface of the threaded rod 501. Vertical toothed plates 504 are provided at the front end and right side of the lifting plate. A transmission gear 4 505 is meshed on one side of the vertical toothed plate 504. A rotating rod 3 506 is provided in the middle of the transmission gear 4 505. A cross-shaped sealing guide plate 406 is provided on the circumferential surface of the rotating rod 3 506. The transmission mechanism 5 also includes a transmission gear 3 502 and an arc-shaped toothed plate 2 503. The transmission gear 3 502 is provided at the upper end of the threaded rod 501. The arc-shaped toothed plate 2 503 is provided on the lower surface of the swing arm 310 corresponding to the left side of the transmission gear 3 502. Under the drive of the swing arm 310, the arc-shaped toothed plate 2 503 can smoothly mesh with the transmission gear 3 502, thereby driving the transmission gear 3 502 to rotate.

[0038] It should be noted that because the right swing arm 310 is closer to the right transmission gear 3 502, the right swing arm 310 is connected to the right arc-shaped toothed plate 2 503 via an extension rod, so that when all the swing arms 310 rotate at the same time, the two arc-shaped toothed plates 2 503 will mesh with the corresponding transmission gear 3 502 synchronously.

[0039] The housing 1 has an internal movable groove 10. The lifting plate, vertical toothed plate 504 and transmission gear 4 505 are all located inside the movable groove 10, providing space for the lifting plate, vertical toothed plate 504 and transmission gear 4 505 to move or rotate smoothly. The movable groove 10 is equipped with a positioning rod 507. One side of the lifting plate is slidably mounted on the circumferential surface of the positioning rod 507, which can limit the lifting plate. Then, when the threaded rod 501 rotates, the lifting plate can move vertically stably.

[0040] In use, during the processing, the servo motor 2 drives the turntable 301 to rotate. The rotation of the turntable 301 drives the arc-shaped protrusion 302 to rotate counterclockwise. Then, the arc-shaped protrusion 302 closest to the horizontal toothed plate 303 on the right side rotates to contact the horizontal toothed plate 303, pushing the horizontal toothed plate 303 backward. The horizontal toothed plate 303 drives the transmission gear 305 to rotate. The rotation of the transmission gear 305 drives the horizontal toothed plate 304 to move forward horizontally. At the same time, the rotation of the transmission gear 305 drives the rotating rod 306, the swing arm 310 and the cleaning brush 311 to rotate, so that the cleaning brush 311 cleans the inner wall of the box 1, sweeping away the impurities that adhered to the inner wall of the box 1 during the coating process. The impurities fall into the corner of the inner bottom wall of the box 1 and then flow through the inclined surface of the bottom of the box 1 to the upper side of the cross-shaped sealing guide plate 406.

[0041] At the same time, the rotation of the rotating rod 306 will also drive the transmission gear 309 on it to rotate. The transmission gear 309 will then drive the arc-shaped toothed plate 307 to rotate. The arc-shaped toothed plate 307 will then drive the rotating rod 308 to rotate through other transmission gears 309, so that the swing arm 310 and cleaning brush 311 on the rotating rod 308 will rotate together to clean the inner wall of the box 1, avoiding cleaning dead corners on the inner wall of the box 1.

[0042] When the swing arm 310 on the rotating rod 308 rotates, it will drive the arc-shaped lower pressure plate 404 and the arc-shaped toothed plate 503 to rotate. At this time, the arc-shaped lower pressure plate 404 will first contact the pressure plate 405 and press the pressure plate 405 downward, so that the lower end of the pressure plate 405 abuts against the upper surface of the guide ventilation plate 401. Then, while the arc-shaped lower pressure plate 404 continues to abut against the pressure plate 405, the arc-shaped toothed plate 503 rotates to mesh with the transmission gear 502 and continues to rotate, causing the transmission gear 502 to rotate. The rotation of the transmission gear 502 drives the threaded rod 501 to rotate, so that the lifting plate drives the vertical toothed plate 504 to move vertically, and then drives the transmission gear 505 and the rotating rod 506 to rotate. The rotation of the rotating rod 506 causes the side of the cross-sealed guide plate 406 with impurities to tilt into the guide groove 6, so that the impurities fall into the guide groove 6.

[0043] Then, as the same arc-shaped protrusion 302 continues to rotate, it disengages from the first horizontal toothed plate 303 and contacts the front end of the second horizontal toothed plate 304, pushing the second horizontal toothed plate 304 to move backward. This causes the second horizontal toothed plate 304 to drive the first transmission gear 305 to rotate in the opposite direction, which in turn causes the first horizontal toothed plate 303 to move forward horizontally. Then, the first transmission gear 305 will rotate in the opposite direction back to the initial position, so that the above operations are all reversed to the initial state. The cross-shaped sealing guide plate 406 closes the upper end of the guide groove 6, and the lower sealing plate 402 disengages from the upper surface of the guide ventilation plate 401. At this time, the impurities on the guide ventilation plate 401 fall into the inside of the collection box 8 through tilting guidance and its own weight, completing the impurity collection work.

[0044] After the work is completed, simply open the sealed door on the bottom side wall of the box 1 to remove the collection box 8 from inside the box 1 and process the impurities.

[0045] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to any specific implementation. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. An auxiliary adsorption device for an evaporation coating machine, comprising a housing (1), wherein a servo motor (2) is disposed at the bottom inner side of the housing (1), and a connecting shaft (9) is rotatably mounted at the top inner side of the housing (1), characterized in that, The box (1) is equipped with a chip removal component, which includes a chip removal mechanism (3), an opening and closing mechanism (4) and a transmission mechanism (5). The bottom of the box (1) is provided with a guide groove (6) and a placement groove (7) from the inside to the outside, and the guide groove (6) and the placement groove (7) are connected. The chip removal mechanism (3) includes a rotating rod one (306) and a rotating rod two (308), and there are several rotating rod two (308). The circumferential surfaces of several rotating rod two (308) and rotating rod one (306) are provided with transmission gear two (309). The side of the transmission gear two (309) away from the servo motor (2) is meshed with an arc-shaped toothed plate one (307). The circumferential surfaces of the upper ends of the rotating rod one (306) and several rotating rod two (308) are provided with swing arms (310), and the other end of the swing arms (310) is provided with a cleaning brush (311). The cleaning end of the cleaning brush (311) is in close contact with the inner wall of the box (1). The opening and closing mechanism (4) includes a material guiding ventilation plate (401), a downward sealing plate (402), and a cross-shaped sealing material guiding plate (406). The material guiding ventilation plate (401) is located inside the upper end of the guide groove (6) and the placement groove (7), and the end of the material guiding ventilation plate (401) located in the placement groove (7) does not contact the inner wall of the box (1). The cross-shaped sealing material guiding plate (406) is rotatably installed inside the upper end of the guide groove (6) and located above the material guiding ventilation plate (401). The material guiding ventilation plate (401) has a ventilation hole on the side below the cross-shaped sealing material guiding plate (406). The downward sealing plate (402) is located above the solid side of the material guiding ventilation plate (401) by a reset spring (403). The chip removal mechanism (3) also includes a turntable (301), and there are two turntables (301). The two turntables (301) are respectively set on the circumferential surface of the power output end of the servo motor (2) and the circumferential surface of the connecting shaft (9). The circumferential surface of the turntable (301) is arranged with four arc-shaped protrusions (302). The circumferential surface of the rotating rod (306) is provided with a transmission gear (305). The left and right sides of the transmission gear (305) are respectively meshed with a horizontal and vertical toothed plate (303) and a horizontal and vertical toothed plate (304). The front end of the horizontal and vertical toothed plate (303) is close to the turntable (301), and the front end of the horizontal and vertical toothed plate (304) is far away from the turntable (301). The opening and closing mechanism (4) further includes an arc-shaped lower pressure plate (404) and a pressure plate (405). The pressure plate (405) is inserted into the inner bottom of the box (1) and fixedly connected to the upper surface of the lower pressure sealing plate (402). The arc-shaped lower pressure plate (404) is disposed on the lower surface of the swing arm (310) corresponding to the left front of the pressure plate (405). The transmission mechanism (5) includes a threaded rod (501), which is rotatably installed at the bottom of the housing (1). A lifting plate is threadedly connected to the circumferential surface of the threaded rod (501), and vertical toothed plates (504) are provided at the front end and right side of the lifting plate. A transmission gear four (505) is meshed on one side of the vertical toothed plate (504). A rotating rod three (506) is provided in the middle of the transmission gear four (505), and the cross-shaped sealing guide plate (406) is provided on the circumferential surface of the rotating rod three (506).

2. The auxiliary adsorption device for an evaporation coating machine according to claim 1, characterized in that, The transmission mechanism (5) further includes a transmission gear three (502) and an arc-shaped toothed plate two (503). The transmission gear three (502) is disposed at the upper end of the threaded rod (501), and the arc-shaped toothed plate two (503) is disposed on the lower surface of the swing arm (310) corresponding to the left side of the transmission gear three (502).

3. The auxiliary adsorption device for an evaporation coating machine according to claim 1, characterized in that, The housing (1) has an internal movable groove (10), and the lifting plate, vertical toothed plate (504) and transmission gear four (505) are all located inside the movable groove (10).

4. The auxiliary adsorption device for an evaporation coating machine according to claim 3, characterized in that, The movable groove (10) is provided with a positioning rod (507), and one side of the lifting plate is slidably mounted on the circumferential surface of the positioning rod (507).

5. The auxiliary adsorption device for an evaporation coating machine according to claim 1, characterized in that, The placement slot (7) is equipped with a collection box (8), the material guide ventilation plate (401) is located above the collection box (8), and the bottom left and right sides and the rear side wall of the box body (1) are equipped with sealing doors.

6. The auxiliary adsorption device for an evaporation coating machine according to claim 1, characterized in that, The inner bottom of the box (1) is provided with a ventilation groove (11), which is connected to the inner bottom of the three guide grooves (6), and the outer end of the ventilation groove (11) is connected to the air extraction pipe. The inner bottom wall of the box (1) is designed to be inclined, and it presents a wedge-shaped profile that gradually narrows towards the guide groove (6).

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