Multipurpose rotary vapor deposition cladding furnace

Abstract

The invention relates to the technical field of industrial furnaces, in particular to a multipurpose rotary vapor deposition cladding furnace. The multipurpose rotary vapor deposition cladding furnace comprises a furnace body and a gas inlet mechanism, wherein the gas inlet mechanism comprises an inner pipe, a middle pipe and an outer pipe which are sequentially sleeved from inside to outside. A first air outlet pipe is arranged on the inner pipe. A second air outlet pipe is arranged on the middle pipe, and a third air outlet pipe is arranged on the outer pipe. And a corrugated pipe is arranged on each first air outlet pipe. The second air outlet pipe extends out of the third air outlet pipe, and the corrugated pipe extends out of the second air outlet pipe, so that an oxygen source and an aluminum source are not in contact in advance, advanced reaction in the inner pipe, the middle pipe and the outer pipe is avoided, and the inner pipe, the middle pipe and the outer pipe are prevented from being blocked. The invention provides a multi-purpose rotary vapor deposition cladding furnace, aiming at solving the problem that solid deposits are easy to generate at a gas outlet when gas is introduced into an existing cladding furnace.

Description

Technical Field

[0001] This invention relates to the field of industrial furnace technology, and more specifically to a multi-purpose rotary vapor deposition coating furnace. Background Technology

[0002] The multi-purpose rotary vapor deposition coating furnace is an industrial device specifically designed for material surface modification and thin film deposition. It combines the dynamic processing capabilities of a rotary furnace with the precision coating characteristics of chemical vapor deposition (CVD) technology. This equipment transforms gaseous precursors into solid materials through chemical reactions and uniformly deposits them onto the substrate surface. It is widely used in semiconductor manufacturing, solar cells, optoelectronic devices, and metal coatings.

[0003] The working process of a multi-purpose rotary vapor deposition coating furnace can be divided into the following key stages: Charging stage: Powder or granular substrate is uniformly added from one end of the furnace tube, and the system is evacuated to the set pressure. Heating stage: The furnace temperature is raised to the required process temperature through three independently controlled heating units. Reaction stage: Precursor gas is injected into the rotating furnace tube through the first inlet assembly. The rotation of the furnace body continuously agitates the substrate, ensuring full exposure of all surfaces. The gaseous precursor decomposes or reacts at high temperature, and solid products are deposited on the substrate surface. Byproducts and unreacted gases are discharged through the second inlet assembly.

[0004] For example, the utility model patent CN222631547U provides a rotary vapor phase coating intermittent furnace, which effectively reduces the emission of dilution gas and incompletely pyrolyzed gas by optimizing the design of the airflow path and filtration system. However, when gas is introduced into the furnace through the inlet pipe, the temperature at the outlet rises due to the thermal radiation inside the furnace. Coupled with the long process cycle, solid deposits often form at the outlet. Furthermore, during each loading and unloading process, a small amount of powder enters the gas pipe, easily causing blockage at the outlet. Powder accumulation in the inlet pipe can also affect subsequent vapor phase transport. Additionally, when gas is introduced into the furnace through the inlet, uneven mixing between the gas and the powder inside the furnace can lead to insufficient fluidization of the particles, causing them to settle and accumulate. Summary of the Invention

[0005] This invention provides a multi-purpose rotary vapor deposition coating furnace to solve the problem that solid deposits are easily generated at the gas outlet when gas is introduced into the existing coating furnace.

[0006] The present invention discloses a multi-purpose rotary vapor deposition coating furnace, which adopts the following technical solution: A multi-purpose rotary vapor deposition coating furnace includes a furnace body and an air inlet mechanism, the air inlet mechanism being disposed within the furnace body. The air inlet mechanism includes an inner tube, a middle tube, and an outer tube arranged sequentially from the inside to the outside. Multiple first air outlet pipes are arranged on the peripheral wall of the inner tube along the axial direction of the inner tube, and the first air outlet pipes are arranged radially along the inner tube. Multiple second air outlet pipes are arranged on the middle tube, and multiple third air outlet pipes are arranged on the outer tube. Each first air outlet pipe is located within a second air outlet pipe. Each second air outlet pipe is located within a third air outlet pipe, and one end of each second air outlet pipe extends out of the third air outlet pipe. The sequentially arranged first, second, and third air outlet pipes are coaxially arranged. Each first air outlet pipe is provided with a corrugated pipe coaxial with it, and each corrugated pipe is located within a second air outlet pipe. Each corrugated pipe has a first air outlet hole on its peripheral wall.

[0007] The gas inlet mechanism has a first state and a second state. When the furnace body is being fed or discharged, inert gas is introduced into the outer pipe, and the gas inlet mechanism is in the first state. The bellows contracts, closing the first gas outlet and blocking the second gas outlet. When aluminum source is introduced into the middle pipe, and oxygen source is introduced into the inner and outer pipes, the gas inlet mechanism is in the second state. The bellows extends beyond the second gas outlet, opening the first gas outlet and no longer blocking the second gas outlet. This prevents the oxygen and aluminum source from reacting prematurely in the inner, middle, and outer pipes.

[0008] Furthermore, the end of each bellows away from the first vent pipe is sealed. Each bellows has multiple first vent holes, which are spirally distributed. Each third vent pipe has a retaining ring fixedly installed at the end away from the outer pipe. The retaining ring is sleeved over the second vent pipe and has multiple second vent holes.

[0009] Furthermore, a tension spring is fixedly installed inside each bellows, the tension spring is arranged along the axial direction of the bellows, and the tension spring is fixedly connected to the first air outlet pipe.

[0010] Furthermore, a multi-purpose rotary vapor deposition coating furnace also includes a support frame and a drive mechanism. The furnace body is horizontally arranged and rotatably mounted on the support frame. One end of the inner tube, middle tube, and outer tube is fixedly mounted on the support frame, while the other end is located inside the furnace body. A gear ring is fixedly mounted on the furnace body, and the gear ring is coaxially arranged with the furnace body. The drive mechanism includes a first motor and a gear. The first motor is fixedly mounted on the support frame. The gear is fixedly mounted on the output shaft of the first motor, and the gear meshes with the gear ring.

[0011] Furthermore, the inner tube has a first air inlet at one end on the support, the middle tube has a second air inlet at one end on the support, and the outer tube has a third air inlet at one end on the support.

[0012] Furthermore, multiple lifting plates are fixedly installed on the inner circumferential wall of the furnace body. These lifting plates are distributed along the circumference of the furnace body and are used to stir the powder inside the furnace body.

[0013] Furthermore, a furnace door that can be opened and closed is provided on one side of the furnace body.

[0014] Furthermore, a heater is fixedly installed on the outer peripheral wall of the furnace body for heating the furnace body.

[0015] Furthermore, a multi-purpose rotary vapor deposition coating furnace also includes an air pump used to create a vacuum inside the furnace.

[0016] Furthermore, a multi-purpose rotary vapor deposition coating furnace also includes a filtration mechanism, which comprises a filter cartridge, an auger, and a second motor. The filter cartridge is fixedly mounted on a support, and a connecting pipe is fixedly mounted on the filter cartridge. The connecting pipe is horizontally positioned and communicates with the furnace body. Part of the gas inside the furnace body is ejected from the connecting pipe, and the filter cartridge filters the ejected gas. The auger is rotatably mounted inside the connecting pipe, and the second motor is fixedly mounted on the support, with its output shaft fixedly connected to the auger. The auger is used to transport the powder filtered by the filter cartridge back into the furnace body.

[0017] The beneficial effects of the present invention are as follows: The present invention provides a multi-purpose rotary vapor deposition coating furnace. Through the set air inlet mechanism, the powder material is first put into the furnace body. At this time, the air inlet mechanism is in the first state, the bellows is contracted, the first air outlet is closed, and the second air outlet is blocked to prevent the powder from entering the first air outlet and the second air outlet.

[0018] When starting work, oxygen (water vapor or oxygen) is introduced into both the inner and outer tubes. An aluminum source (trimethylaluminum) and a carrier gas (argon, Ar) are introduced into the middle tube. At this time, the air intake mechanism is in the second state, the bellows extends beyond the second outlet tube, its diameter decreases, it no longer blocks the second outlet tube, and the first outlet hole is opened.

[0019] The oxygen source in the inner tube is discharged outward through the first outlet pipe and the corrugated pipe, and then premixed with the aluminum source in the middle tube in the second outlet pipe. The mixed gas is discharged out of the second outlet pipe and then mixed with the oxygen source discharged from the outer tube, making the oxygen and aluminum sources more uniformly mixed. At the same time, the aluminum source in the middle tube is located between the oxygen sources in the inner and outer tubes, which can improve the mixing uniformity of the oxygen and aluminum sources and is beneficial to the oxidation reaction.

[0020] Because the second exhaust pipe extends beyond the third exhaust pipe, and the bellows extends beyond the second exhaust pipe when the intake mechanism is in the second state, the oxygen source and aluminum source will not come into premature contact, thus preventing premature reactions inside the inner, middle, and outer pipes and preventing blockage of these pipes. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of a multi-purpose rotary vapor deposition coating furnace provided in an embodiment of the present invention;

[0023] Figure 2 A side view of a multi-purpose rotary vapor deposition coating furnace provided in an embodiment of the present invention;

[0024] Figure 3 for Figure 2 Sectional view along the middle AA direction;

[0025] Figure 4 for Figure 3 Enlarged view of point B in the middle;

[0026] Figure 5 This is a schematic diagram of the air inlet mechanism of a multi-purpose rotary vapor deposition coating furnace provided in an embodiment of the present invention;

[0027] Figure 6 A cross-sectional view of the air inlet mechanism of a multi-purpose rotary vapor deposition coating furnace provided in an embodiment of the present invention;

[0028] Figure 7 for Figure 6 Enlarged view of point C in the middle;

[0029] Figure 8 for Figure 7 Enlarged view at point D;

[0030] Figure 9 A schematic diagram of the air inlet mechanism of a multi-purpose rotary vapor deposition coating furnace in a first state, provided in an embodiment of the present invention;

[0031] Figure 10 A schematic diagram of another embodiment of a multi-purpose rotary vapor deposition coating furnace provided by the present invention;

[0032] Figure 11 for Figure 10 Enlarged view of point F in the middle.

[0033] In the diagram: 100, support frame; 102, gear ring; 103, auger; 104, lifting plate; 105, filter cartridge; 106, heater; 110, inner tube; 111, first air outlet pipe; 112, first air inlet; 120, middle tube; 121, second air outlet pipe; 122, second air inlet; 130, outer tube; 131, third air outlet pipe; 132, second air outlet; 133, third air inlet; 140, tension spring; 150, bellows; 151, first air outlet; 160, furnace body; 161, furnace door. Detailed Implementation

[0034] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] Reference Figures 1 to 9 As shown in Embodiment 1 of the present invention, a multi-purpose rotary vapor deposition coating furnace includes a furnace body 160 and an air inlet mechanism disposed within the furnace body 160. The air inlet mechanism includes an inner tube 110, a middle tube 120, and an outer tube 130 arranged sequentially from the inside to the outside. The inner tube 110 is provided with a plurality of first air outlet pipes 111, which are distributed sequentially along the axial direction of the inner tube 110 and arranged radially along the inner tube 110. The middle tube 120 is fixedly provided with a plurality of second air outlet pipes 121, and the outer tube 130 is fixedly provided with a plurality of third air outlet pipes 131. Each first air outlet pipe 111 is located within a second air outlet pipe 121. Each second air outlet pipe 121 is located within a third air outlet pipe 131, with one end extending out of the third air outlet pipe 131. The first vent pipe 111, the second vent pipe 121, and the third vent pipe 131 are coaxially arranged and nested sequentially. Each first vent pipe 111 is fixedly provided with a bellows 150, which is arranged radially along the inner pipe 110. Each bellows 150 is located inside a second vent pipe 121, and each bellows 150 has a first vent hole 151 on its peripheral wall.

[0036] The gas inlet mechanism has a first state and a second state. When the furnace body 160 is feeding or discharging material, inert gas is introduced into the outer pipe 130, and the gas inlet mechanism is in the first state. The bellows 150 contracts, closing the first gas outlet 151 and blocking the second gas outlet 121 to prevent powder from entering the first gas outlet 111 and the second gas outlet 121. When aluminum source gas is introduced into the middle pipe 120, and oxygen source gas is introduced into the inner pipe 110 and the outer pipe 130, the gas inlet mechanism is in the second state. The bellows 150 extends beyond the second gas outlet 121, opening the first gas outlet 151 and no longer blocking the second gas outlet 121.

[0037] Since the second exhaust pipe 121 extends beyond the third exhaust pipe 131, and when the intake mechanism is in the second state, the bellows 150 extends beyond the second exhaust pipe 121, thereby preventing the oxygen source and aluminum source from reacting prematurely in the inner pipe 110, middle pipe 120 and outer pipe 130, thus blocking the inner pipe 110, middle pipe 120 and outer pipe 130.

[0038] First, the powder material is put into the furnace body 160. At this time, the air inlet mechanism is in the first state, the bellows 150 is contracted, the first air outlet 151 is closed, and the second air outlet 121 is blocked to prevent the powder from entering the first air outlet 111 and the second air outlet 121.

[0039] When starting work, an oxygen source (water vapor or oxygen) is introduced into the inner tube 110 and the outer tube 130. An aluminum source (trimethylaluminum) and a carrier gas (argon, Ar) are introduced into the middle tube 120. At this time, the air intake mechanism is in the second state, the bellows 150 extends beyond the second outlet tube 121, its diameter decreases, it no longer blocks the second outlet tube 121, and the first outlet 151 is opened.

[0040] The oxygen source in the inner tube 110 is discharged outward through the first outlet pipe 111 and the corrugated pipe 150, and then premixed with the aluminum source in the middle tube 120 in the second outlet pipe 121. The mixed gas is discharged out of the second outlet pipe 121 and then mixed with the oxygen source discharged from the outer tube 130, making the oxygen source and aluminum source more uniformly mixed. At the same time, the aluminum source in the middle tube 120 is located between the oxygen source in the inner tube 110 and the oxygen source in the outer tube 130, which can improve the mixing uniformity of the oxygen source and aluminum source, which is beneficial to the oxidation reaction.

[0041] In another embodiment, during operation, carbon powder is introduced into the furnace body 160. Active porous carbon is selected as the matrix and placed in a specific reaction environment. The temperature inside the reactor is precisely controlled to maintain a stable temperature of approximately 500°C. Inert gas is introduced into the middle tube 120 and the outer tube 130 as insulation material. CO (carbon monoxide) is first introduced into the inner tube 110. The CO enters the furnace body 160 and decomposes into C (carbon) and O (oxygen). The decomposed C (carbon) combines with the carbon powder in the furnace body 160 to fill the gaps in the carbon powder, making the surface of the carbon powder particles denser and smoother, thereby enhancing its conductivity, mechanical stability, and cycle life. Next is the silicon introduction stage, where SiH4 (silane) is introduced into the inner tube 110. Under the above temperature conditions, SiH4 undergoes a thermal decomposition reaction, with the chemical reaction equation: SiH4 → Si + 2H2. The silicon atoms produced by the decomposition have high chemical activity and can rapidly diffuse and penetrate into the nanoporous structure of the active porous carbon. In this process, the nanoporous structure of active porous carbon plays a role in the physical confinement and adsorption of silicon atoms, which helps silicon atoms to be evenly distributed in the pores, thereby forming a preliminary silicon-carbon composite structure.

[0042] The carbon coating stage then begins. After silicon deposition, the temperature of the reaction system is raised to approximately 700°C. C2H2 (acetylene) gas is then introduced, where acetylene undergoes thermal decomposition at this high temperature: C2H2 → 2C + H2. The carbon atoms produced by this decomposition are deposited on the surface and within the pores of the silicon-carbon composite structure, gradually forming a continuous carbon coating layer. This carbon coating layer tightly encapsulates the internal silicon-carbon composite structure, ultimately constructing a silicon-carbon anode material with a C-silicon-C core-shell structure. In this structure, the internal carbon matrix provides a good supporting framework for silicon, effectively mitigating the volume expansion problem of silicon during charging and discharging. The intermediate silicon phase, as the main lithium storage active material, imparts high capacity characteristics to the material. The outer carbon coating layer improves the conductivity of the material while reducing direct contact between silicon and the electrolyte, suppressing side reactions, thereby significantly improving the electrochemical performance and cycle stability of the material.

[0043] The powder and gaseous materials are uniformly mixed within the inner tube 110. The powder material is in a fluidized state in a localized area near the first gas outlet 111, which can quickly achieve a high degree of uniformity of powder within this small (local) area. As the furnace body 160 rotates, the position of the powder in each fluidized area and in areas slightly farther from the first gas outlet 111 is exchanged. After a long period of local fluidization and rolling exchange throughout the entire volume of the furnace body 160, uniformity is achieved across the entire range.

[0044] To prevent gaseous silane or acetylene from cracking before entering the inner tube 110, it needs to be kept below approximately 200 degrees Celsius.

[0045] In this embodiment, the end of each bellows 150 away from the first vent pipe 111 is sealed. Each bellows 150 has multiple first vent holes 151, and the multiple first vent holes 151 are spirally distributed. Each third vent pipe 131 has a retaining ring fixedly provided at one end away from the outer pipe 130. The retaining ring is sleeved on the outside of the second vent pipe 121, and multiple second vent holes 132 are opened on the retaining ring.

[0046] When exhausting gas, the gas in the third exhaust pipe 131 is discharged first, impacting the second exhaust hole 132 and preventing particles from clogging it. The gas discharged from the second exhaust hole 132 flows axially along the third exhaust pipe 131. Meanwhile, the gas discharged from the bellows 150 flows radially, creating multidirectional airflow and thus improving the uniformity of mixing between the gas and the powder in the furnace body 160.

[0047] Meanwhile, the gas discharged from the bellows 150 is spirally distributed, which can reduce the impact on the exhaust of the aluminum source in the second exhaust pipe 121, ensure that the aluminum source is dispersed at the exhaust position, and make the aluminum source evenly distributed in all parts of the powder, thus ensuring the uniformity of the deposition coating.

[0048] In this embodiment, a tension spring 140 is fixedly installed inside each bellows 150. The tension spring 140 is arranged along the axial direction of the bellows 150 and is fixedly connected to the first vent pipe 111.

[0049] When the intake mechanism is in the first state, the bellows 150 contracts under the action of the tension spring 140. After the oxygen source is introduced into the inner tube 110, the tension spring 140 is stretched under the action of the gas in the inner tube 110, and the bellows 150 extends beyond the second exhaust pipe 121, its diameter becomes smaller, it no longer blocks the second exhaust pipe 121, and the first exhaust port 151 opens.

[0050] In this embodiment, a multi-purpose rotary vapor deposition coating furnace further includes a support 100 and a drive mechanism. The furnace body 160 is horizontally arranged and rotatably mounted on the support 100. One end of the inner tube 110, the middle tube 120, and the outer tube 130 is fixedly mounted on the support 100, and the other end of the inner tube 110, the middle tube 120, and the outer tube 130 is located inside the furnace body 160.

[0051] A gear ring 102 is fixedly mounted on the furnace body 160, and the gear ring 102 is coaxially arranged with the furnace body 160. The drive mechanism includes a first motor and a gear. The first motor is fixedly mounted on the bracket 100. The gear is fixedly mounted on the output shaft of the first motor, and the gear meshes with the gear ring 102. When the first motor is started, the furnace body 160 rotates through the meshing of the gear and the gear ring 102.

[0052] In this embodiment, the inner tube 110 has a first air inlet 112 at one end on the support 100, the middle tube 120 has a second air inlet 122 at one end on the support 100, and the outer tube 130 has a third air inlet 133 at one end on the support 100.

[0053] In this embodiment, a plurality of lifting plates 104 are fixedly arranged on the inner peripheral wall of the furnace body 160. The plurality of lifting plates 104 are distributed along the circumference of the furnace body 160 and are used to stir the powder inside the furnace body 160.

[0054] In this embodiment, a furnace door 161 that can be opened and closed is provided on one side of the furnace body 160.

[0055] In this embodiment, a heater 106 is fixedly installed on the outer peripheral wall of the furnace body 160 for heating the furnace body 160.

[0056] In this embodiment, a multi-purpose rotary vapor deposition coating furnace also includes an air pump, which is used to evacuate the furnace body 160°.

[0057] In this embodiment, a multi-purpose rotary vapor deposition coating furnace further includes a filtration mechanism, which comprises a filter cartridge 105, an auger 103, and a second motor. The filter cartridge 105 is fixedly mounted on a support 100, and a connecting pipe is fixedly mounted on the filter cartridge 105. The connecting pipe is horizontally positioned and communicates with the furnace body 160. Part of the gas inside the furnace body 160 is ejected from the connecting pipe, and the filter cartridge 105 filters the ejected gas. The auger 103 is rotatably mounted inside the connecting pipe, and the second motor is fixedly mounted on the support 100. The output shaft of the second motor is fixedly connected to the auger 103. The auger 103 is used to transport the powder filtered by the filter cartridge 105 back into the furnace body 160.

[0058] Reference Figures 10 to 11 As shown, in other embodiments, the air intake mechanism includes an inner tube 110 and an outer tube 130 sequentially sleeved from the inside out. The inner tube 110 has multiple first through holes, which are sequentially distributed along the axial direction of the inner tube 110. The outer tube 130 has multiple second through holes, each second through hole corresponding to one of the first through holes. Thermal insulation material is provided inside the outer tube 130.

[0059] During operation, carbon powder is introduced into the furnace body 160. First, CO (carbon monoxide) is introduced into the inner tube 110. The CO decomposes into C (carbon) and O (oxygen) within the furnace body 160. The decomposed C (carbon) combines with the carbon powder in the furnace body 160 to fill any gaps in the carbon powder. Next, SiH4 (silane) is introduced into the inner tube 110. SiH4 decomposes into Si (silicon) and H (hydrogen). The decomposed Si (silicon) coats the carbon powder and carbon powder composite within the furnace body 160. Finally, C2H2 (acetylene) is introduced into the inner tube 110. C2H2 decomposes into C (carbon) and H (hydrogen). The C (carbon) coats the aforementioned Si (silicon), C (carbon), and carbon powder composite, thus forming a carbon outer layer.

[0060] Working process: First, open the furnace door 161 and put the powdered material into the furnace body 160. Then, close the furnace door 161, start the air pump to evacuate the furnace body 160, and start the heater 106 to heat the furnace body 160. At the same time, inert gas is introduced into the outer pipe 130 through the third air inlet 133, thereby completely expelling moisture and oxygen from the furnace body 160.

[0061] At this time, the air intake mechanism is in the first state. Under the action of the tension spring 140, the bellows 150 contracts, the first air outlet 151 is closed, and the second air outlet 121 is blocked to prevent powder from entering the first air outlet 111 and the second air outlet 121.

[0062] At startup, oxygen (water vapor or oxygen) is introduced into both the inner tube 110 and the outer tube 130 through the first air inlet 112 and the third air inlet 133. An aluminum source (trimethylaluminum) and a carrier gas (argon, Ar) are introduced into the middle tube 120 through the second air inlet 122. Under the action of the gas in the inner tube 110, the tension spring 140 is stretched, the bellows 150 extends beyond the second outlet tube 121, its diameter decreases, and it no longer blocks the second outlet tube 121, while the first outlet 151 opens.

[0063] The oxygen source in the inner tube 110 is discharged outward through the first outlet pipe 111 and the corrugated pipe 150, and then premixed with the aluminum source in the middle tube 120 in the second outlet pipe 121. The mixed gas is discharged out of the second outlet pipe 121 and then mixed with the oxygen source discharged from the outer tube 130, making the oxygen source and aluminum source more uniformly mixed. At the same time, the aluminum source in the middle tube 120 is located between the oxygen source in the inner tube 110 and the oxygen source in the outer tube 130, which can improve the mixing uniformity of the oxygen source and aluminum source, which is beneficial to the oxidation reaction.

[0064] Because the second exhaust pipe 121 extends beyond the third exhaust pipe 131, and the bellows 150 extends beyond the second exhaust pipe 121 when the intake mechanism is in the second state, the oxygen source and aluminum source will not come into premature contact, thus preventing premature reactions inside the inner pipe 110, middle pipe 120, and outer pipe 130, and preventing blockage of the inner pipe 110, middle pipe 120, and outer pipe 130.

[0065] During the exhaust process, since the inner pipe 110 is the innermost part, the temperature of the oxygen source gas inside the inner pipe 110 is lower than the temperature of the oxygen source gas inside the outer pipe 130. Therefore, when the aluminum source in the middle pipe 120 is discharged outward through the second exhaust pipe 121, the aluminum source comes into contact with the oxygen source discharged from the bellows 150 and is cooled in the second exhaust pipe 121. This prevents the rapid oxidation reaction from occurring under the high temperature inside the furnace body 160 after being discharged through the second exhaust pipe 121, which would otherwise result in a thicker deposition near the first exhaust pipe 111, the second exhaust pipe 121, and the third exhaust pipe 131.

[0066] When exhausting gas, the gas in the third exhaust pipe 131 is discharged first, impacting the second exhaust hole 132 and preventing particles from clogging it. The gas discharged from the second exhaust hole 132 flows axially along the third exhaust pipe 131. Meanwhile, the gas discharged from the bellows 150 flows radially, creating multidirectional airflow and thus improving the uniformity of mixing between the gas and the powder in the furnace body 160.

[0067] Meanwhile, the gas discharged from the bellows 150 is spirally distributed, which can reduce the impact on the exhaust of the aluminum source in the second exhaust pipe 121, ensure that the aluminum source is dispersed at the exhaust position, and make the aluminum source evenly distributed in all parts of the powder, thus ensuring the uniformity of the deposition coating.

[0068] While air is being introduced into the furnace body 160 through the air intake mechanism, the first motor is started, and the furnace body 160 rotates through the meshing of the gear and gear ring 102. The lifting plate 104 agitates the powder inside the furnace body 160. As the furnace body 160 rotates relative to the air intake mechanism, the gas discharged from the air intake mechanism mixes with the powder on the periphery of the furnace body 160. Because the powder is blown away by the gas, some dust enters the filter cartridge 105 through the connecting pipe and is filtered, and the filtered gas is discharged. The filtered dust is then transported back into the furnace body 160 by the auger 103.

[0069] During material discharge, air supply to the inner pipe 110, middle pipe 120, and outer pipe 130 is stopped. Under the action of the tension spring 140, the bellows 150 contracts, and the air intake mechanism returns to its first state.

[0070] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A multi-purpose rotary vapor deposition coating furnace, characterized in that: The system includes a furnace body and an air intake mechanism, with the air intake mechanism located inside the furnace body. The air intake mechanism includes an inner tube, a middle tube, and an outer tube arranged sequentially from the inside to the outside. Multiple first air outlets are arranged along the axial direction of the inner tube on its peripheral wall, and these first air outlets are arranged radially along the inner tube. Multiple second air outlets are arranged on the middle tube, and multiple third air outlets are arranged on the outer tube. Each first air outlet is located within a second air outlet. Each second air outlet is located within a third air outlet, with one end extending out of the third air outlet. The sequentially arranged first, second, and third air outlets are coaxially aligned. Each first air outlet has a corrugated pipe coaxial with it, and each corrugated pipe is located within a second air outlet. Each corrugated pipe has a first air outlet hole on its peripheral wall. The gas inlet mechanism has a first state and a second state. When the furnace body is being fed or discharged, inert gas is introduced into the outer pipe, and the gas inlet mechanism is in the first state. The bellows contracts, closing the first gas outlet and blocking the second gas outlet. When the middle pipe is filled with aluminum source and the inner and outer pipes are filled with oxygen source, the gas inlet mechanism is in the second state. The bellows extends beyond the second gas outlet, opening the first gas outlet and no longer blocking the second gas outlet, so as to prevent the oxygen source and aluminum source from reacting prematurely in the inner, middle and outer pipes.

2. The multi-purpose rotary vapor deposition coating furnace according to claim 1, characterized in that: The end of each bellows away from the first vent pipe is sealed; each bellows has multiple first vent holes, and the multiple first vent holes are spirally distributed; each third vent pipe has a retaining ring fixedly installed at the end away from the outer pipe, the retaining ring is sleeved on the second vent pipe, and the retaining ring has multiple second vent holes.

3. The multi-purpose rotary vapor deposition coating furnace according to claim 1, characterized in that: Each bellows has a tension spring fixedly installed inside it. The tension spring is arranged along the axial direction of the bellows and is fixedly connected to the first vent pipe.

4. A multi-purpose rotary vapor deposition coating furnace according to claim 1, characterized in that: It also includes a support and a drive mechanism. The furnace body is horizontally arranged and rotatably mounted on the support. One end of the inner tube, middle tube, and outer tube is fixedly mounted on the support, and the other end of the inner tube, middle tube, and outer tube is inside the furnace body. A gear ring is fixedly mounted on the furnace body and is coaxially arranged with the furnace body. The drive mechanism includes a first motor and a gear. The first motor is fixedly mounted on the support. The gear is fixedly mounted on the output shaft of the first motor, and the gear meshes with the gear ring.

5. A multi-purpose rotary vapor deposition coating furnace according to claim 4, characterized in that: The inner tube has a first air inlet at one end on the support, the middle tube has a second air inlet at one end on the support, and the outer tube has a third air inlet at one end on the support.

6. A multi-purpose rotary vapor deposition coating furnace according to claim 1, characterized in that: Multiple lifting plates are fixedly installed on the inner circumferential wall of the furnace body. These lifting plates are distributed along the circumference of the furnace body and are used to stir the powder inside the furnace body.

7. A multi-purpose rotary vapor deposition coating furnace according to claim 1, characterized in that: A furnace door that can be opened and closed is provided on one side of the furnace body.

8. A multi-purpose rotary vapor deposition coating furnace according to claim 1, characterized in that: Heaters are fixedly installed on the outer peripheral wall of the furnace body for heating the furnace body.

9. A multi-purpose rotary vapor deposition coating furnace according to claim 1, characterized in that: It also includes an air pump, which is used to create a vacuum inside the furnace.

10. A multi-purpose rotary vapor deposition coating furnace according to claim 4, characterized in that: It also includes a filtration mechanism, which consists of a filter cartridge, an auger, and a second motor. The filter cartridge is fixedly mounted on a support, and a connecting pipe is fixedly mounted on the filter cartridge. The connecting pipe is horizontally positioned and communicates with the interior of the furnace body. Some of the gas inside the furnace body is ejected from the connecting pipe, and the filter cartridge filters the ejected gas. The auger is rotatably mounted inside the connecting pipe, and the second motor is fixedly mounted on the support. The output shaft of the second motor is fixedly connected to the auger. The auger is used to transport the powder filtered by the filter cartridge back into the furnace body.

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