Sampling compensation circuit, voltage sampling device and radio frequency power supply equipment

Abstract

The invention provides a sampling compensation circuit, a voltage sampling device and radio frequency power supply equipment, the sampling compensation circuit is used for compensating a sampling voltage value obtained by a voltage sampling circuit, the voltage sampling circuit comprises a sampling input end, a sampling output end and a sampling diode, the sampling diode is used for rectifying a to-be-detected alternating current signal, and the sampling output end is used for outputting the rectified alternating current signal; therefore, a sampling voltage signal is obtained. The sampling compensation circuit comprises a test alternating current source, a test diode, a voltage drop acquisition unit and a sampling compensation unit. The test diode is used for rectifying a test AC signal, and the test diode and the sampling diode have at least partially the same manufacturing parameters. The voltage drop obtaining unit is used for obtaining a voltage difference value signal reflecting the voltage difference value of the two ends of the test diode and outputting the voltage difference value signal through the first output end. The sampling compensation unit is used for compensating the sampling voltage signal at least according to the voltage difference signal so as to obtain a corrected sampling signal. According to the invention, a more accurate sampling voltage value can be obtained.

Description

Technical Field

[0001] This application relates to the field of power electronics technology, and in particular to a sampling compensation circuit, a voltage sampling device, and a radio frequency power supply device. Background Technology

[0002] Currently, in the field of power electronics, voltage sampling is widely used in various power electronic devices. When sampling AC signals, diodes are often used. However, there is a voltage drop across the diode, which causes the obtained sampled voltage value to deviate from the actual AC signal voltage value. Therefore, how to compensate for the voltage drop across the diode to obtain a more accurate sampled voltage value has become a problem that needs to be considered. Summary of the Invention

[0003] This application provides a sampling compensation circuit, a voltage sampling device, and an RF power supply device, which can obtain more accurate sampling voltage values.

[0004] Firstly, a sampling compensation circuit is provided. This circuit compensates for a sampled voltage value obtained by a voltage sampling circuit. The voltage sampling circuit includes at least a sampling input terminal, a sampling output terminal, and a sampling diode. The sampling input terminal is used to input a test AC signal. A first terminal of the sampling diode is connected to the sampling input terminal. The sampling diode rectifies the test AC signal to obtain a sampled voltage signal, which is then output through a second terminal. The sampling compensation circuit includes a test AC source, a test diode, a voltage drop acquisition unit, and a sampling compensation unit. The test AC source outputs a test AC signal. The first terminal of the test diode is connected to the test AC source and rectifies the test AC signal. The manufacturing parameters of the test diode and the sampling diode are at least partially the same. The voltage drop acquisition unit includes a first input terminal, a second input terminal, and a first output terminal. The first and second input terminals of the voltage drop acquisition unit are respectively connected to the first and second terminals of the test diode. The voltage drop acquisition unit is used to acquire a voltage difference signal reflecting the voltage difference across the test diode based on the voltage signals input to the first and second input terminals, and outputs the voltage difference signal through the first output terminal. The sampling compensation unit is connected to the first output terminal of the voltage drop acquisition unit and the second terminal of the sampling diode, and is also connected to the sampling output terminal. The sampling compensation unit is used to acquire the sampling voltage signal output from the second terminal of the sampling diode and the voltage difference signal output from the first output terminal of the voltage drop acquisition unit, and to compensate the sampling voltage signal based at least on the voltage difference signal to obtain a corrected sampling signal, and outputs the corrected sampling signal through the sampling output terminal.

[0005] In one possible implementation, the manufacturing parameters include at least a semiconductor material. The sampling compensation unit is also connected to the test AC source, and is further configured to control and adjust the voltage value of the test AC signal at preset voltage value intervals to multiple different voltage values, thereby obtaining a correspondence between multiple voltage differences and multiple voltage drop correction values. The sampling voltage signal is then compensated based on the correspondence and the voltage difference signal to obtain the corrected sampling signal. Wherein, the multiple voltage drop correction values ​​are the differences between the multiple voltage differences and a reference voltage difference, and the reference voltage difference is the voltage difference across the test diode when the voltage value of the test AC signal is at the reference voltage value.

[0006] In one possible implementation, the sampling compensation unit further includes a control module and a first arithmetic module. The control module is connected to the test AC source and the first output terminal of the voltage drop acquisition unit. The control module is used to control and adjust the voltage value of the test AC signal to multiple different voltage values ​​at preset voltage value intervals to obtain the correspondence, and to determine the corresponding correction voltage value in the correspondence based on the voltage difference reflected by the voltage difference signal, thereby obtaining a correction voltage signal. The first arithmetic module is connected to the control module, the first output terminal of the voltage drop acquisition unit, and the second terminal of the sampling diode, and is also connected to the sampling output terminal. The first arithmetic module is used to perform an addition operation on the correction voltage signal, the voltage difference signal, and the sampled voltage signal to obtain the corrected sampling signal.

[0007] In one possible implementation, the first arithmetic module includes a first adder and a second adder. The two input terminals of the first adder are respectively connected to the first output terminal of the control module and the voltage drop acquisition unit. The output terminal of the first adder is connected to one input terminal of the second adder. The first adder is used to add the corrected voltage signal and the voltage difference signal to obtain a corrected difference signal. The other input terminal of the second adder is connected to the second terminal of the sampling diode. The output terminal of the second adder is connected to the sampling output terminal. The second adder is used to add the corrected difference signal and the sampled voltage signal to obtain the corrected sampled signal.

[0008] In one possible implementation, the sampling compensation unit includes a second arithmetic module. The two input terminals of the second arithmetic module are respectively connected to the first output terminal of the voltage drop acquisition unit and the second terminal of the sampling diode. The output terminal of the second arithmetic module is connected to the sampling output terminal. The second arithmetic module is used to perform an addition operation on the voltage difference signal and the sampled voltage signal to obtain the corrected sampling signal.

[0009] In one possible implementation, the voltage drop acquisition unit includes a first differential module. The two input terminals of the first differential module are respectively the first input terminal and the second input terminal of the voltage drop acquisition unit, and the output terminal of the first differential module is the first output terminal of the voltage drop acquisition unit. The first differential module is used to acquire a voltage difference signal reflecting the voltage difference between the first and second terminals of the sampling diode based on the voltage signals input to the first and second input terminals, respectively.

[0010] In one possible implementation, the voltage sampling circuit further includes a protection unit connected to both the test AC source and the first terminal of the test diode. The protection unit is used at least to protect the test diode.

[0011] In one possible implementation, the voltage sampling circuit further includes a filtering unit connected between the sampling compensation unit and the sampling output terminal. The filtering unit is used to filter the corrected sampling signal output by the sampling compensation unit.

[0012] Secondly, a voltage sampling device is also provided, comprising a voltage sampling circuit and a sampling compensation circuit. The sampling compensation circuit compensates for the sampled voltage value obtained by the voltage sampling circuit. The voltage sampling circuit includes at least a sampling input terminal, a sampling output terminal, and a sampling diode. The sampling input terminal is used to input a test AC signal. The first terminal of the sampling diode is connected to the sampling input terminal, and the sampling diode rectifies the test AC signal to obtain a sampled voltage signal, which is output through the second terminal of the sampling diode. The sampling compensation circuit includes a test AC source, a test diode, a voltage drop acquisition unit, and a sampling compensation unit. The test AC source outputs a test AC signal. The first terminal of the test diode is connected to the test AC source and rectifies the test AC signal. The manufacturing parameters of the test diode and the sampling diode are at least partially the same. The voltage drop acquisition unit includes a first input terminal, a second input terminal, and a first output terminal. The first and second input terminals of the voltage drop acquisition unit are respectively connected to the first and second terminals of the test diode. The voltage drop acquisition unit is used to acquire a voltage difference signal reflecting the voltage difference across the test diode based on the voltage signals input to the first and second input terminals, and outputs the voltage difference signal through the first output terminal. The sampling compensation unit is connected to the first output terminal of the voltage drop acquisition unit and the second terminal of the sampling diode, and is also connected to the sampling output terminal. The sampling compensation unit is used to acquire the sampling voltage signal output from the second terminal of the sampling diode and the voltage difference signal output from the first output terminal of the voltage drop acquisition unit, and to compensate the sampling voltage signal based at least on the voltage difference signal to obtain a corrected sampling signal, and outputs the corrected sampling signal through the sampling output terminal.

[0013] Thirdly, an radio frequency (RF) power supply device is also provided, comprising an RF power supply unit and a voltage sampling unit. The voltage sampling unit includes a voltage sampling circuit and a sampling compensation circuit.

[0014] The sampling compensation circuit, voltage sampling device, and RF power supply equipment of this application, by setting up a test AC source and a test diode, and configuring the manufacturing parameters of the test diode and the sampling diode to be at least partially the same, can reflect the voltage drop of the sampling diode with the voltage drop of the test diode. By configuring a voltage drop acquisition unit, a voltage difference signal reflecting the voltage difference between the first and second terminals of the test diode is obtained, thereby obtaining the voltage drop value of the test diode. Then, by configuring a sampling compensation unit, the sampling voltage signal obtained by the sampling diode is compensated according to the voltage difference signal, thereby obtaining a corrected sampling signal, thus realizing the compensation of the sampling voltage signal. Finally, the corrected sampling signal is output through the sampling output terminal. The corrected sampling signal can more accurately reflect the voltage value of the AC signal under test. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.

[0016] Figure 1 This is a schematic diagram of the sampling compensation circuit in some embodiments of this application.

[0017] Figure 2 This is another schematic diagram of the sampling compensation circuit in some embodiments of this application.

[0018] Figure 3 This is a circuit diagram of the first arithmetic module in some embodiments of this application.

[0019] Figure 4 This is yet another schematic diagram of the sampling compensation circuit in some embodiments of this application.

[0020] Figure 5 The circuit diagrams illustrating the voltage drop acquisition unit of the sampling compensation circuit are shown in some embodiments of this application.

[0021] Figure 6 The following is a circuit diagram illustrating the protection unit of the sampling compensation circuit in some embodiments of this application.

[0022] Figure 7 This is a schematic diagram of a voltage sampling device in some embodiments of this application.

[0023] Figure 8 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application.

[0024] Figure reference numerals: 10, sampling compensation circuit; AC, test AC source; AC2, test AC signal; D2, test diode; 110, voltage drop acquisition unit; 120, sampling compensation unit; 130, protection unit; R1, first resistor; 140, filtering unit; 111, first differential module; 121, control module; 122, first arithmetic module; 122a, first adder; 122b, second adder; 123, second arithmetic module; VS1, voltage difference signal; VS2, corrected voltage signal; VS3, corrected difference signal; SS2, corrected sampling signal; 20, voltage sampling circuit; 210, sampling input terminal; 220, sampling output terminal; D1, sampling diode; AC1, AC signal under test; SS1, sampling voltage signal; 30, voltage sampling device; 40, RF power supply device; 1000, RF power supply equipment; GND, ground. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0026] In the description of the embodiments of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0027] Hereinafter, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of embodiments of this application, unless otherwise stated, "a plurality of" means two or more.

[0028] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or server that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or devices.

[0029] Please see Figure 1 , Figure 1 This is a schematic diagram of the sampling compensation circuit in some embodiments of this application. For example... Figure 1 As shown, this application provides a sampling compensation circuit 10, which is used to compensate the sampled voltage value obtained by a voltage sampling circuit 20. The voltage sampling circuit 20 includes at least a sampling input terminal 210, a sampling output terminal 220, and a sampling diode D1. The sampling input terminal 210 is used to input a test AC signal AC1. The first terminal of the sampling diode D1 is connected to the sampling input terminal 210 and is used to rectify the test AC signal AC1 to obtain a sampled voltage signal SS1, which is output through the second terminal of the sampling diode D1. The sampling compensation circuit 10 includes a test AC source AC, a test diode D2, a voltage drop acquisition unit 110, and a sampling compensation unit 120. The test AC source AC is used to output a test AC signal AC2. The first terminal of the test diode D2 is connected to the test AC source AC and is used to rectify the test AC signal AC2. The manufacturing parameters of the test diode D2 and the sampling diode D1 are at least partially the same. The voltage drop acquisition unit 110 includes a first input terminal, a second input terminal, and a first output terminal. The first and second input terminals of the voltage drop acquisition unit 110 are respectively connected to the first and second terminals of the test diode D2. The voltage drop acquisition unit 110 is used to acquire a voltage difference signal VS1 reflecting the voltage difference across the two ends of the test diode D2 based on the voltage signals input to the first and second input terminals, and outputs the voltage difference signal VS1 through the first output terminal. The sampling compensation unit 120 is connected to the first output terminal of the voltage drop acquisition unit 110 and the second terminal of the sampling diode D1, and is connected to the sampling output terminal 220. The sampling compensation unit 120 is used to acquire the sampling voltage signal SS1 output from the second terminal of the sampling diode D1 and the voltage difference signal VS1 output from the first output terminal of the voltage drop acquisition unit 110, and compensates the sampling voltage signal SS1 based at least on the voltage difference signal VS1 to obtain a corrected sampling signal SS2, and outputs the corrected sampling signal SS2 through the sampling output terminal 220.

[0030] Therefore, the sampling compensation circuit 10 described above in this application, by setting a test AC source AC and a test diode D2, and configuring the manufacturing parameters of the test diode D2 and the sampling diode D1 to be at least partially the same, can reflect the voltage drop of the sampling diode D1 with the voltage drop of the test diode D2. By configuring the voltage drop acquisition unit 110 to acquire the voltage difference signal VS1 reflecting the voltage difference between the first and second terminals of the test diode D2, the voltage drop value of the test diode D2 is obtained. Then, by configuring the sampling compensation unit 120 to compensate the sampling voltage signal SS1 obtained by the sampling diode D1 according to the voltage difference signal VS1, a corrected sampling signal SS2 can be obtained, thereby realizing the compensation of the sampling voltage signal SS1. Then, the corrected sampling signal SS2 is output through the sampling output terminal 220. The corrected sampling signal SS2 can more accurately reflect the voltage value of the AC signal AC1 under test.

[0031] In some embodiments, the manufacturing parameters of the test diode D2 and the sampling diode D1 are at least partially the same. That is, the test diode D2 and the sampling diode D1 can be the same type of diode, using the same semiconductor material, manufactured from the same batch, and have at least partially identical manufacturing parameters. Specifically, "at least partially identical manufacturing parameters" can mean that the core manufacturing parameters, such as doping concentration and junction structure, are the same, or that the ranges of the manufacturing parameters at least partially overlap. For example, the doping concentration ranges of the test diode D2 and the sampling diode D1 at least partially overlap. Further, the overlap range of the manufacturing parameters of the test diode D2 and the sampling diode D1 is greater than a preset percentage, where the preset percentage can be 97%, 98%, 99%, etc.

[0032] In some embodiments, the sampling input terminal 210 can be connected to the transmission path of the AC signal AC1 under test to input the AC signal AC1 under test. The AC signal AC1 under test can be a radio frequency signal, and its power value can be greater than or equal to a preset power value. For example, the preset power value can be 1kW, 1.5kW, 2kW, etc.

[0033] In some embodiments, the first terminal of sampling diode D1 can be the anode of sampling diode D1, and the second terminal of sampling diode D1 can be the cathode of sampling diode D1. Correspondingly, the first terminal of test diode D2 can be the anode of test diode D2, and the second terminal of test diode D2 can be the cathode of test diode D2.

[0034] In some embodiments, the second terminal of the sampling diode D1 can be grounded to GND.

[0035] Furthermore, the first input terminal of the voltage drop acquisition unit 110 can be connected to the first terminal of the test diode D2 through a connection point between the test AC source AC and the first terminal of the test diode D2, and the second input terminal of the voltage drop acquisition unit 110 can be connected to the second terminal of the test diode D2 through a connection point between the second terminal of the test diode D2 and ground GND.

[0036] Furthermore, the connection point between the test AC source and the first terminal of the test diode D2 can be the first sampling point, and the connection point between the second terminal of the test diode D2 and ground GND can be the second sampling point.

[0037] In some embodiments, the voltage sampling circuit 20 may further include a filter capacitor connected between the second terminal of the sampling diode D1 and ground GND. The filter capacitor is used to filter the sampled voltage signal SS1 to obtain a filtered sampled voltage signal SS1. Correspondingly, the sampling compensation unit 120 is used to compensate the filtered sampled voltage signal SS1 at least according to the voltage difference signal VS1 to obtain a corrected sampled signal SS2, and then outputs the corrected sampled signal SS2 through the sampling output terminal 220. Thus, the corrected sampled signal SS2 can be obtained in a more stable state.

[0038] In some embodiments, the voltage drop acquisition unit 110 can obtain the voltage values ​​of the first and second terminals of the test diode D2 by sampling the voltage signals input to the first and second input terminals respectively, and then obtain the voltage difference signal VS1 reflecting the voltage difference between the first and second terminals of the test diode D2 through logic operation. Alternatively, the voltage difference signal VS1 reflecting the voltage difference between the first and second terminals of the test diode D2 can be obtained directly based on the voltage signals input to the first and second input terminals respectively.

[0039] like Figure 1 As shown, the manufacturing parameters include at least semiconductor materials. The sampling compensation unit 120 is also connected to the test AC source AC. The sampling compensation unit 120 is further used to control and adjust the voltage value of the test AC signal AC2 at preset voltage value intervals to multiple different voltage values, thereby obtaining the correspondence between multiple voltage differences and multiple voltage drop correction values. Based on the correspondence and the voltage difference signal VS1, the sampling voltage signal SS1 is compensated to obtain the corrected sampling signal SS2. Here, the multiple voltage drop correction values ​​are the differences between the multiple voltage differences and the reference voltage difference, where the reference voltage difference is the voltage difference across the test diode D2 when the voltage value of the test AC signal AC2 is at the reference voltage value.

[0040] Therefore, the sampling compensation circuit 10 described above in this application, by setting the manufacturing parameters to include at least semiconductor materials, can be considered to have matching static conduction characteristics of the test diode D2 and the sampling diode D1 under the same test / operating conditions when the semiconductor materials of the test diode D2 and the sampling diode D1 are the same. That is, when the same AC signal with the same voltage value is input to one end of the test diode D2 and one end of the sampling diode D1, the voltage difference across the test diode D2 is basically the same as the voltage difference across the sampling diode D1. In other words, the voltage drop acquisition unit 110 can also obtain the voltage difference signal VS1 reflecting the voltage difference across the test diode D2 based on the voltage signals input to the first input terminal and the second input terminal, and can also reflect the voltage difference across the sampling diode D1.

[0041] Furthermore, since the voltage drop of the sampling diode D1 varies depending on the voltage value of the AC signal AC1 under test, and the voltage drop of the sampling diode D1 does not change uniformly, the control module 121 can be configured to control and adjust the voltage value of the test AC signal AC2 to be at multiple different voltage values ​​at preset voltage value intervals. This allows for the determination of a corresponding relationship. Based on the voltage difference reflected by the voltage difference signal VS1, the corresponding correction voltage value is determined in the corresponding relationship, thereby obtaining the correction voltage signal VS2. By configuring the first calculation module 122 to perform an addition operation on the correction voltage signal VS2, the voltage difference signal VS1, and the sampling voltage signal SS1, a more accurate correction sampling signal SS2 can be obtained, increasing the accuracy of sampling compensation.

[0042] In some embodiments, the reference voltage value can be the aforementioned preset voltage value, or it can be any value within a preset range. For example, if the voltage value of the AC signal AC1 under test can be between 1kW and 1.5kW, then the preset range can be between 1kW and 1.5kW, and the reference voltage value can be any value between 1kW and 1.5kW. This minimizes the voltage drop error of the sampling diode D1 caused by different voltage values ​​of the AC signal AC1 under test.

[0043] Please refer to the following: Figure 2 , Figure 2 This is another schematic diagram of the sampling compensation circuit in some embodiments of this application. For example... Figure 1 , Figure 2As shown, the sampling compensation unit 120 also includes a control module 121 and a first calculation module 122. The control module 121 is connected to the test AC source AC and the first output terminal of the voltage drop acquisition unit 110. The control module 121 is used to control and adjust the voltage value of the test AC signal AC2 at preset voltage value intervals to multiple different voltage values ​​to obtain a correspondence. Based on the voltage difference reflected by the voltage difference signal VS1, the control module 121 determines the corresponding correction voltage value in the correspondence to obtain the correction voltage signal VS2. The first calculation module 122 is connected to the control module 121, the first output terminal of the voltage drop acquisition unit 110, and the second terminal of the sampling diode D1, and is connected to the sampling output terminal 220. The first calculation module 122 is used to perform an addition operation on the correction voltage signal VS2, the voltage difference signal VS1, and the sampling voltage signal SS1 to obtain the corrected sampling signal SS2.

[0044] Therefore, the sampling compensation circuit 10 described above in this application, through the configuration control module 121 and the first arithmetic module 122, can obtain the corresponding relationship and can realize the addition operation of the corrected voltage signal VS2, the voltage difference signal VS1 and the sampled voltage signal SS1.

[0045] In some embodiments, the control module 121 may include one or more of a multiplier and a processor. The processor may be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), application-specific integrated circuit (ASIC), field-programmable gate array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, or other logic control devices. It may also be a microprocessor such as a micro control unit (MCU).

[0046] Please refer to the following: Figure 3 , Figure 3 This is a circuit diagram of the first arithmetic module in some embodiments of this application. For example... Figure 2 , Figure 3As shown, the first arithmetic module 122 includes a first adder 122a and a second adder 122b. The two input terminals of the first adder 122a are respectively connected to the first output terminal of the control module 121 and the voltage drop acquisition unit 110. The output terminal of the first adder 122a is connected to one input terminal of the second adder 122b. The first adder 122a is used to add the corrected voltage signal VS2 and the voltage difference signal VS1 to obtain the corrected difference signal VS3. The other input terminal of the second adder 122b is connected to the second terminal of the sampling diode D1. The output terminal of the second adder 122b is connected to the sampling output terminal 220. The second adder 122b is used to add the corrected difference signal VS3 and the sampled voltage signal SS1 to obtain the corrected sampled signal SS2.

[0047] Therefore, the sampling compensation circuit 10 described above in this application, by configuring the first adder 122a and the second adder 122b in cooperation, can sequentially obtain the corrected difference signal VS3 and the corrected sampling signal SS2, thereby realizing the summation of the corrected voltage signal VS2, the voltage difference signal VS1 and the sampled voltage signal SS1.

[0048] Please see Figure 4 , Figure 4 This is yet another schematic diagram of the sampling compensation circuit in some embodiments of this application. For example... Figure 4 As shown, the sampling compensation unit 120 includes a second arithmetic module 123. The two input terminals of the second arithmetic module 123 are respectively connected to the first output terminal of the voltage drop acquisition unit 110 and the second terminal of the sampling diode D1. The output terminal of the second arithmetic module 123 is connected to the sampling output terminal 220. The second arithmetic module 123 is used to perform an addition operation on the voltage difference signal VS1 and the sampled voltage signal SS1 to obtain the corrected sampling signal SS2.

[0049] Therefore, the sampling compensation circuit 10 described above in this application, by setting the second arithmetic module 123, can realize voltage drop compensation for the sampling voltage signal SS1, and sum the voltage difference signal VS1 with the sampling voltage signal SS1 to obtain the corrected sampling signal SS2.

[0050] In some embodiments, the second arithmetic module 123 may include an adder.

[0051] Specifically, the logical operation between one signal and another signal mentioned above can be to perform a logical operation between the values ​​of one signal and another signal at the same time to obtain other signals.

[0052] Please see Figure 5 , Figure 5 The following are circuit diagrams illustrating the voltage drop acquisition unit of the sampling compensation circuit in some embodiments of this application. Figure 5 As shown, the voltage drop acquisition unit 110 includes a first differential module 111. The two input terminals of the first differential module 111 are the first input terminal and the second input terminal of the voltage drop acquisition unit 110, respectively, and the output terminal of the first differential module 111 is the first output terminal of the voltage drop acquisition unit 110. The first differential module 111 is used to acquire a voltage difference signal VS1 reflecting the voltage difference between the first and second terminals of the sampling diode D1 based on the voltage signals input to the first and second input terminals, respectively.

[0053] Therefore, the sampling compensation circuit 10 described above in this application, by setting the first differential module 111, can directly obtain the voltage difference signal VS1 reflecting the voltage difference between the first and second terminals of the test diode D2 based on the voltage signals input to the first input terminal and the second input terminal respectively.

[0054] Please see Figure 6 , Figure 6 The following are circuit diagrams illustrating the protection unit of the sampling compensation circuit in some embodiments of this application. For example... Figure 6 As shown, the voltage sampling circuit 20 also includes a protection unit 130, which is connected to both the test AC source AC and the first terminal of the test diode D2. The protection unit 130 is used at least to protect the test diode D2.

[0055] Therefore, in order to improve the sensitivity of voltage difference detection of the test diode D2 and to protect the test diode D2, the sampling compensation circuit 10 described above in this application adds a protection unit 130 to the test branch, which can realize the protection of the test diode D2.

[0056] In some embodiments, the protection unit 130 may include a first resistor R1, which is connected between the test AC source AC and the first terminal of the test diode D2. The first resistor R1 is used to protect the test AC source AC and the test diode D2.

[0057] In some embodiments, the end of the test AC source that is not connected to the first terminal of the test diode D2 can be grounded to GND.

[0058] like Figure 6 As shown, the voltage sampling circuit 20 also includes a filtering unit 140, which is connected between the sampling compensation unit 120 and the sampling output terminal 220. The filtering unit 140 is used to filter the correction sampling signal SS2 output by the sampling compensation unit 120.

[0059] Therefore, the sampling compensation circuit 10 described above in this application, by configuring the filtering unit 140 to filter the corrected sampling signal SS2 output by the sampling compensation unit 120, can avoid the error caused by the disturbance of the corrected sampling signal SS2 and further improve the accuracy of the corrected sampling signal SS2.

[0060] In some embodiments, the filtering unit 140 may include a low-pass filter connected between the sampling compensation unit 120 and the sampling output terminal 220.

[0061] The sampling compensation circuit 10 of this application, through the above structure and by adopting multiple compensation methods, can achieve compensation for the sampling voltage signal SS1, and the corrected sampling signal SS2 can more accurately reflect the voltage value of the AC signal AC1 under test, while also avoiding the influence on the voltage sampling circuit 20.

[0062] Please see Figure 7 , Figure 7 This is a schematic diagram of a voltage sampling device in some embodiments of this application. For example... Figure 7 As shown, this application also provides a voltage sampling device 30, which includes a voltage sampling circuit 20 and a sampling compensation circuit 10 in any of the foregoing embodiments.

[0063] Please refer to it again. Figure 1 .like Figure 1As shown, the sampling compensation circuit 10 is used to compensate the sampled voltage value obtained by the voltage sampling circuit 20. The voltage sampling circuit 20 includes at least a sampling input terminal 210, a sampling output terminal 220, and a sampling diode D1. The sampling input terminal 210 is used to input the AC signal AC1 to be measured. The first terminal of the sampling diode D1 is connected to the sampling input terminal 210 and is used to rectify the AC signal AC1 to obtain a sampled voltage signal SS1, which is then output through the second terminal of the sampling diode D1. The sampling compensation circuit 10 includes a test AC source AC, a test diode D2, a voltage drop acquisition unit 110, and a sampling compensation unit 120. The test AC source AC is used to output a test AC signal AC2. The first terminal of the test diode D2 is connected to the test AC source AC and is used to rectify the test AC signal AC2. The manufacturing parameters of the test diode D2 and the sampling diode D1 are at least partially the same. The voltage drop acquisition unit 110 includes a first input terminal, a second input terminal, and a first output terminal. The first and second input terminals of the voltage drop acquisition unit 110 are respectively connected to the first and second terminals of the test diode D2. The voltage drop acquisition unit 110 is used to acquire a voltage difference signal VS1 reflecting the voltage difference across the two ends of the test diode D2 based on the voltage signals input to the first and second input terminals, and outputs the voltage difference signal VS1 through the first output terminal. The sampling compensation unit 120 is connected to the first output terminal of the voltage drop acquisition unit 110 and the second terminal of the sampling diode D1, and is connected to the sampling output terminal 220. The sampling compensation unit 120 is used to acquire the sampling voltage signal SS1 output from the second terminal of the sampling diode D1 and the voltage difference signal VS1 output from the first output terminal of the voltage drop acquisition unit 110, and compensates the sampling voltage signal SS1 based at least on the voltage difference signal VS1 to obtain a corrected sampling signal SS2, and outputs the corrected sampling signal SS2 through the sampling output terminal 220.

[0064] For a more detailed description of the sampling compensation circuit 10, please refer to the relevant content of the sampling compensation circuit 10 in any of the foregoing embodiments, which will not be repeated here.

[0065] The sampling compensation circuit 10 and voltage sampling device 30 of this application, through the above structure and by adopting multiple compensation methods, can realize the compensation of the sampled voltage signal SS1, and the corrected sampled signal SS2 can more accurately reflect the voltage value of the AC signal AC1 under test, while also avoiding the influence on the voltage sampling circuit 20.

[0066] Please see Figure 8 , Figure 8 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application. For example... Figure 8As shown, this application also provides an RF power supply device 1000, which includes an RF power supply unit 40 and a voltage sampling device 30 in any of the foregoing embodiments.

[0067] Please refer to it again. Figure 7 .like Figure 7 As shown, the voltage sampling device 30 includes a voltage sampling circuit 20 and a sampling compensation circuit 10.

[0068] For a more detailed description of the voltage sampling device 30, please refer to the relevant content of the voltage sampling device 30 in any of the foregoing embodiments, which will not be repeated here.

[0069] In some embodiments, the radio frequency power supply device 40 is used to output the AC signal AC1 to be tested.

[0070] The sampling compensation circuit 10, voltage sampling device 30, and radio frequency power supply device 1000 of this application, through the above structure and by adopting multiple compensation methods, can realize the compensation of the sampled voltage signal SS1, and the corrected sampled signal SS2 can more accurately reflect the voltage value of the AC signal AC1 under test, while also avoiding the influence on the voltage sampling circuit 20.

[0071] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Where there is no conflict, the embodiments and features in the embodiments of this application can be combined with each other. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A sampling compensation circuit, characterized in that, This is used to compensate for the sampled voltage value obtained by the voltage sampling circuit. The voltage sampling circuit includes at least a sampling input terminal, a sampling output terminal, and a sampling diode. The sampling input terminal is used to input the AC signal to be measured. The first terminal of the sampling diode is connected to the sampling input terminal. The sampling diode is used to rectify the AC signal to be measured to obtain a sampled voltage signal and output it through the second terminal of the sampling diode. The sampling compensation circuit includes: Test AC source, used to output test AC signals; A test diode, the first terminal of which is connected to the test AC source for rectifying the test AC signal, wherein the manufacturing parameters of the test diode are at least partially the same as those of the sampling diode; A voltage drop acquisition unit includes a first input terminal, a second input terminal, and a first output terminal. The first input terminal and the second input terminal of the voltage drop acquisition unit are respectively connected to the first terminal and the second terminal of the test diode. The voltage drop acquisition unit is used to acquire a voltage difference signal reflecting the voltage difference between the two ends of the test diode based on the voltage signals input to the first input terminal and the second input terminal respectively, and output the voltage difference signal through the first output terminal. A sampling compensation unit is connected to the first output terminal of the voltage drop acquisition unit and the second terminal of the sampling diode, and is also connected to the sampling output terminal. The sampling compensation unit is used to acquire the sampling voltage signal output from the second terminal of the sampling diode and the voltage difference signal output from the first output terminal of the voltage drop acquisition unit, and to compensate the sampling voltage signal based at least on the voltage difference signal to obtain a corrected sampling signal, and to output the corrected sampling signal through the sampling output terminal.

2. The sampling compensation circuit according to claim 1, characterized in that, The manufacturing parameters include at least semiconductor materials; The sampling compensation unit is also connected to the test AC source. The sampling compensation unit is also used to control and adjust the voltage value of the test AC signal to be at multiple different voltage values ​​at preset voltage value intervals, so as to obtain the correspondence between multiple voltage difference values ​​and multiple voltage drop correction values, and to compensate the sampling voltage signal according to the correspondence and the voltage difference signal to obtain the corrected sampling signal. Wherein, the plurality of voltage drop correction values ​​are the differences between the plurality of voltage differences and the reference voltage difference, and the reference voltage difference is the voltage difference across the test diode when the voltage value of the test AC signal is at the reference voltage value.

3. The sampling compensation circuit according to claim 2, characterized in that, The sampling compensation unit also includes a control module and a first calculation module; The control module is connected to the test AC source and the first output terminal of the voltage drop acquisition unit. The control module is used to control and adjust the voltage value of the test AC signal to be at multiple different voltage values ​​at preset voltage value intervals to obtain the correspondence. Based on the voltage difference reflected by the voltage difference signal, the corresponding correction voltage value is determined in the correspondence to obtain the correction voltage signal. The first arithmetic module is connected to the control module, the first output terminal of the voltage drop acquisition unit, and the second terminal of the sampling diode, and is also connected to the sampling output terminal. The first arithmetic module is used to perform addition operations on the corrected voltage signal, the voltage difference signal, and the sampled voltage signal to obtain the corrected sampling signal.

4. The sampling compensation circuit according to claim 3, characterized in that, The first arithmetic module includes a first adder and a second adder; The two input terminals of the first adder are respectively connected to the control module and the first output terminal of the voltage drop acquisition unit. The output terminal of the first adder is connected to one of the input terminals of the second adder. The first adder is used to perform an addition operation on the corrected voltage signal and the voltage difference signal to obtain the corrected difference signal. The other input terminal of the second adder is connected to the second terminal of the sampling diode, and the output terminal of the second adder is connected to the sampling output terminal. The second adder is used to perform an addition operation on the corrected difference signal and the sampled voltage signal to obtain the corrected sampling signal.

5. The sampling compensation circuit according to claim 1, characterized in that, The sampling compensation unit includes a second arithmetic module. The two input terminals of the second arithmetic module are respectively connected to the first output terminal of the voltage drop acquisition unit and the second terminal of the sampling diode. The output terminal of the second arithmetic module is connected to the sampling output terminal. The second arithmetic module is used to perform an addition operation on the voltage difference signal and the sampled voltage signal to obtain the corrected sampled signal.

6. The sampling compensation circuit according to claim 1, characterized in that, The voltage drop acquisition unit includes a first differential module, the two input terminals of the first differential module are the first input terminal and the second input terminal of the voltage drop acquisition unit, and the output terminal of the first differential module is the first output terminal of the voltage drop acquisition unit. The first differential module is used to obtain the voltage difference signal reflecting the voltage difference between the first and second terminals of the sampling diode based on the voltage signals input to the first and second input terminals respectively.

7. The sampling compensation circuit according to claim 1, characterized in that, The voltage sampling circuit also includes a protection unit, which is connected to both the test AC source and the first terminal of the test diode. The protection unit is used at least to protect the test diode.

8. The sampling compensation circuit according to claim 1, characterized in that, The voltage sampling circuit further includes a filtering unit, which is connected between the sampling compensation unit and the sampling output terminal; The filtering unit is used to filter the corrected sampling signal output by the sampling compensation unit.

9. A voltage sampling device, characterized in that, It includes a voltage sampling circuit and a sampling compensation circuit as described in any one of claims 1-8.

10. A radio frequency power supply device, characterized in that, It includes a radio frequency power supply device and a voltage sampling device as described in claim 9.

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