Vibration reduction method and system, semiconductor vibration reduction equipment and storage medium

Abstract

The invention discloses a vibration reduction method and system, semiconductor vibration reduction equipment and a storage medium. The method comprises the steps that sensor data of supporting legs of a vibration reduction platform are obtained; grouping the supporting legs, and performing logic axis fitting on the sensor data of each group of supporting legs to obtain logic axis data of the group of supporting legs; refitting all the logic axis data to obtain overall logic axis data of the vibration reduction platform, and performing vibration reduction processing on the supporting legs according to the overall logic axis data until the overall logic axis data is not greater than a preset vibration reduction threshold value; through two times of logic axis fitting on sensor data, redundant interference of local sensor data can be eliminated, and the damping efficiency is improved by fully utilizing mathematical model characteristics of logic axes; and the condition that the overall logic axis data is not larger than the preset vibration reduction threshold value serves as the vibration reduction closed-loop control condition, the vibration reduction result can be continuously fed back and optimized, and the vibration reduction effect precision is ensured.

Description

Technical Field

[0001] This invention relates to the field of vibration reduction management technology, specifically to a vibration reduction method, system, semiconductor vibration reduction device, and storage medium. Background Technology

[0002] Currently, vibration in industrial equipment operation not only affects equipment stability but can also severely impact product quality, especially in the semiconductor manufacturing field, where even minor vibrations can damage or degrade the performance of precision components. Therefore, effectively detecting and controlling equipment vibration has become a crucial aspect of improving production efficiency and product quality.

[0003] In the process of vibration reduction, existing technologies often require increasing the number of support legs. However, the more support legs there are, the more complex the vibration reduction system becomes and the more data calculations are required. Since vibration reduction systems generally only vibrate in certain areas or only need to focus on the vibration of certain areas, this leads to waste of resources and low efficiency.

[0004] Therefore, existing technologies suffer from low vibration reduction accuracy during the vibration reduction process. Summary of the Invention

[0005] This invention provides a vibration reduction method, system, semiconductor vibration reduction device, and storage medium, aiming to solve the problem of low vibration reduction accuracy in the existing technology during the vibration reduction process.

[0006] To address the aforementioned technical problems, the embodiments of the present invention provide the following technical solutions: A vibration reduction method, comprising: Acquire sensor data from the support legs of the vibration damping platform; The support legs are grouped, and the sensor data of each group of support legs are fitted with logical axes to obtain the logical axis data of that group of support legs. All logical axis data are refitted to obtain the overall logical axis data of the vibration reduction platform, and the support leg is subjected to vibration reduction treatment based on the overall logical axis data until the overall logical axis data is not greater than the preset vibration reduction threshold.

[0007] Optionally, the step of refitting all logical axis data to obtain the overall logical axis data of the vibration damping platform, and performing vibration damping treatment on the support leg based on the overall logical axis data until the overall logical axis data is not greater than a preset vibration damping threshold, further includes: Based on the logical axis data, vibration reduction processing is performed on each corresponding support leg until the logical axis data is no greater than the preset vibration reduction threshold.

[0008] Optionally, the step of grouping the support legs and performing logical axis fitting on the sensor data of each group of support legs to obtain the logical axis data of that group of support legs includes: The support legs are divided into multiple groups based on preset grouping rules, resulting in multiple groups of support legs; Modal matrix transformation is performed on the sensor data of each support leg to obtain the logical axis data of that support leg; The preset grouping rules include at least one of the following: fixed area occupation rules, fixed number of support legs rules, and input specified grouping rules.

[0009] Optionally, before acquiring the sensor data of the support legs of the vibration damping platform, the following steps are also included: The vibration reduction area of ​​the vibration reduction platform is screened based on preset screening rules to determine the area to be vibration reduced; The preset filtering rules include at least one of the following: load-bearing area filtering rules, environmental vibration sensitivity filtering rules, historical vibration reduction data filtering rules, and input specified area filtering rules.

[0010] Optionally, the step of performing vibration reduction processing on the support leg based on the overall logical axis data until the overall logical axis data is not greater than a preset vibration reduction threshold includes: When the overall logical axis data is greater than the preset vibration reduction threshold, the logical axis data is modally decoupled, and the vibration reduction adjustment result of the support leg is determined according to the decoupling result. Based on the vibration reduction adjustment results, the support leg is subjected to vibration reduction treatment until the overall logical axis data is not greater than the preset vibration reduction threshold.

[0011] Optionally, acquiring sensor data from the support legs of the vibration damping platform includes: The vibration reduction detection interval is determined based on the natural vibration period of the vibration reduction platform; Based on the vibration reduction detection interval, the support leg is periodically velocity-displacement detected to obtain sensor data of the support leg.

[0012] Optionally, the step of determining the preset vibration reduction threshold includes: Acquire historical sensor data of the vibration reduction platform under stable conditions; The mean value of the historical sensor data is determined to be the preset vibration reduction threshold.

[0013] A vibration reduction system, comprising: The sensor data acquisition module is used to acquire sensor data from the support legs of the vibration damping platform. The logical axis data acquisition module is used to group the support legs and perform logical axis fitting on the sensor data of each group of support legs to obtain the logical axis data of that group of support legs. The vibration reduction module is used to refit all the logical axis data to obtain the overall logical axis data of the vibration reduction platform, and to perform vibration reduction processing on the support leg according to the overall logical axis data until the overall logical axis data is not greater than a preset vibration reduction threshold.

[0014] A semiconductor vibration damping device includes a memory and a processor. The memory stores a computer program, which, when executed by the processor, causes the processor to perform the following steps: Acquire sensor data from the support legs of the vibration damping platform; The support legs are grouped, and the sensor data of each group of support legs are fitted with logical axes to obtain the logical axis data of that group of support legs. All logical axis data are refitted to obtain the overall logical axis data of the vibration reduction platform, and the support leg is subjected to vibration reduction treatment based on the overall logical axis data until the overall logical axis data is not greater than the preset vibration reduction threshold.

[0015] A computer-readable storage medium having a computer program stored thereon, the computer program being loaded by a processor to perform the steps in the vibration reduction method described above.

[0016] In this embodiment of the invention, by grouping the support legs and fitting the sensor data of each group of support legs with logical axes, redundant interference of local sensor data can be eliminated, and the core vibration dimension of each group of support legs can be accurately extracted. By refitting all logical axis data, the overall logical axis data of the vibration reduction platform is obtained, and the support legs are subjected to vibration reduction processing based on the overall logical axis data. This avoids the problem of local optima and overall imbalance caused by isolated analysis of individual sensor data. Using the overall logical axis data not exceeding a preset vibration reduction threshold as the closed-loop control condition for vibration reduction, the vibration reduction results can be continuously fed back and optimized, ensuring the stability of the vibration reduction effect. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of a scenario of an embodiment of the vibration reduction system provided in this invention; Figure 2This is a schematic diagram of another embodiment of the vibration reduction system provided in this invention. Figure 3 This is a schematic flowchart of an embodiment of the vibration reduction method provided by the present invention; Figure 4 This is a three-dimensional structural schematic diagram of an embodiment of the vibration reduction platform provided in this application; Figure 5 This is a front view structural schematic diagram of an embodiment of the vibration reduction platform provided in this application; Figure 6 This is a schematic diagram of the grouping results of the support legs provided in an embodiment of the present invention; Figure 7 This is a schematic diagram showing the result of an embodiment of refitting logical axis data provided by the present invention. Figure 8 This is a schematic diagram of the structure of an embodiment of the vibration reduction system provided by the present invention; Figure 9 This is a schematic diagram of the structure of an embodiment of the semiconductor vibration damping device provided in this invention. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] In the following description, specific embodiments of the invention will be illustrated with reference to steps and symbols performed by one or more computers, unless otherwise stated. Therefore, these steps and operations will be referred to several times as being performed by a computer, and computer execution as referred to herein includes operations by a computer processing unit representing electronic signals of data in a structured format. This operation transforms the data or maintains it at a location in the computer's memory system, which can be reconfigured or otherwise alter the operation of the computer in a manner well known to those skilled in the art. The data structure maintained by the data is the physical location of the memory, which has specific characteristics defined by the data format. However, the principles of the invention described above are not intended to be limiting, and those skilled in the art will understand that many of the steps and operations described below can also be implemented in hardware.

[0021] The terms "module" or "unit" as used herein can be considered as software objects executing on the computing system. The different components, modules, engines, and services described herein can be considered as implementation objects on the computing system. The apparatus and methods described herein are preferably implemented in software, but can also be implemented in hardware, both of which are within the scope of this invention.

[0022] This invention provides a vibration reduction method, system, semiconductor vibration reduction device, and storage medium.

[0023] Please see Figure 1 , Figure 1 This is a schematic diagram of a scenario of an embodiment of the vibration reduction system provided in this invention. The vibration reduction system may include a client 100 and a server 200, which are connected via a network. The server 200 integrates a vibration reduction device and may be a work platform server (i.e., a server loaded with a work platform), such as... Figure 1 In this embodiment of the invention, the server 200 is mainly used to acquire sensor data of the support legs of the vibration damping platform; group the support legs and perform logical axis fitting on the sensor data of each group of support legs to obtain the logical axis data of that group of support legs; refit all the logical axis data to obtain the overall logical axis data of the vibration damping platform, and perform vibration damping processing on the support legs according to the overall logical axis data until the overall logical axis data is not greater than a preset vibration damping threshold.

[0024] In this embodiment of the invention, the server 200 can be a standalone server, a server network, or a server cluster. For example, the server 200 described in this embodiment includes, but is not limited to, a computer, a network host, a single network server, a set of multiple network servers, or a cloud server composed of multiple servers. The cloud server is composed of a large number of computers or network servers based on cloud computing. In this embodiment of the invention, communication between the server and the client can be achieved through any communication method, including but not limited to, mobile communication based on the 3rd Generation Partnership Project (3GPP), Long Term Evolution (LTE), and Worldwide Interoperability for Microwave Access (WiMAX), or computer network communication based on the TCP / IP Protocol Suite (TCP / IP) and User Datagram Protocol (UDP).

[0025] It is understood that the client 100 used in this embodiment of the invention can be understood as a client device. A client device includes both receiving and transmitting hardware, that is, a device with receiving and transmitting hardware capable of performing bidirectional communication on a bidirectional communication link. Such a client device may include cellular or other communication devices, having a single-line display, a multi-line display, or a cellular or other communication device without a multi-line display. Specifically, the client 100 may be a desktop terminal or a mobile terminal, specifically a mobile phone, tablet computer, laptop computer, etc.

[0026] Those skilled in the art will understand that Figure 1 The application environment shown is merely one application scenario of the solution in this application and does not constitute a limitation on the application scenario of the solution in this application. Other application environments may include those that are more specific to this application. Figure 1 The number of more or fewer servers shown, or the server network connectivity relationships, for example... Figure 1 Only one server and two clients are shown in the diagram. It is understood that the vibration damping system may also include one or more other servers, and / or one or more clients connected to the server network, which is not limited here.

[0027] In some embodiments of the present invention, the working platform may be an enterprise office platform, such as WeChat for Business. Taking server 200 as an example, it may further include an enterprise office platform contact server, an enterprise office platform configuration management server, and a web management server. Enterprise users or developers can access the web management server using a web browser terminal to configure the field configuration information on the enterprise office platform configuration management server, and set and store the enterprise user information of enterprise employees of the enterprise office platform on the enterprise office platform contact server.

[0028] In addition, such as Figure 2 As shown, Figure 2 This is a schematic diagram of another embodiment of the vibration reduction system provided in this invention. The vibration reduction system may also include a storage terminal 300 for storing data, such as a storage object database. The object database stores object data, which may include various sensor data such as velocity data, displacement data, and temperature data.

[0029] It should be noted that, Figure 1-2 The schematic diagram of the vibration reduction system shown is merely an example. The vibration reduction system and scenarios described in the embodiments of the present invention are intended to more clearly illustrate the technical solutions of the embodiments of the present invention and do not constitute a limitation on the technical solutions provided by the embodiments of the present invention. As those skilled in the art will know, with the evolution of vibration reduction systems and the emergence of new business scenarios, the technical solutions provided by the embodiments of the present invention are also applicable to similar technical problems.

[0030] The following detailed description is based on specific embodiments.

[0031] In this embodiment, the description will be from the perspective of a vibration damping device, which can be integrated into the server 200.

[0032] This invention provides a vibration reduction method; please refer to [link / reference]. Figure 3 , Figure 3 This is a schematic flowchart of an embodiment of the vibration reduction method provided by the present invention, including: S301: Acquire sensor data from the support legs of the vibration damping platform; It should be noted that the vibration damping platform includes multiple vibration damping zones, and each vibration damping zone is equipped with at least one support leg.

[0033] In one specific embodiment, please refer to Figures 4 to 5 , Figure 4 This is a three-dimensional structural schematic diagram of an embodiment of the vibration reduction platform provided in this application. Figure 5 This is a front view structural schematic diagram of an embodiment of the vibration reduction platform provided in this application. Figures 4 to 5As shown, the vibration damping platform includes a base plate 10 and a top plate 20 arranged at relative intervals, and a vibration damping support assembly 30 disposed between the base plate 10 and the top plate 20; the vibration damping support assembly 30 includes multiple support legs 310 and a data processor (not shown).

[0034] The vibration damping area can be the area where the top plate 20 is located, or it can be extended on the basis of the top plate 20, and the area obtained by setting the support leg 310 in the extended area is much larger than the area of ​​the top plate 20. There is no limitation here.

[0035] The support leg 310 can be a component with telescopic properties such as a hydraulic cylinder, a pneumatic cylinder, or an elastic support column. Each support leg 310 is fixedly connected to the top plate 20, and its specific form is not limited to the structure shown in the figure.

[0036] The area to be damped refers to the area that needs to be damped, specifically all or part of the area to be damped. It should be noted that the area to be damped must include at least one support leg 310.

[0037] Sensor data refers to the velocity and / or displacement measurements of the support legs on the vibration damping platform collected by sensors, representing the real-time state of vibration energy transmission in the area where the support legs are located.

[0038] S302: Group the support legs and perform logical axis fitting on the sensor data of each group of support legs to obtain the logical axis data of that group of support legs; Logical axis fitting refers to fusing sensor data from multiple support legs using a specific algorithm to fit a virtual logical axis, which represents the overall vibration state of that group of support legs. The logical axis data of each support leg group will serve as the basis for subsequent higher-level logical axis fitting, and will be aggregated level by level upwards to ultimately form a unified control input.

[0039] Specifically, the logical axis fitting method involves fitting two degrees of freedom of sensor data into six degrees of freedom, thereby obtaining the state data of each support leg in six degrees of freedom.

[0040] S303: Refit all logical axis data to obtain the overall logical axis data of the vibration reduction platform, and perform vibration reduction treatment on the support legs according to the overall logical axis data until the overall logical axis data is not greater than the preset vibration reduction threshold.

[0041] It should be noted that in this embodiment, only two logical axis fittings were performed on the sensor data. However, when the area of ​​the vibration damping platform is large, or when higher precision is required to process the sensor data of the support legs of the vibration damping platform, multiple logical axis fittings can be performed on the sensor data. There is no limit to the number of fittings, which will not be elaborated here.

[0042] In one specific embodiment, the preset vibration reduction threshold is a reference value set according to the actual working conditions of the vibration reduction platform. Generally, the preset vibration reduction threshold is set to zero.

[0043] The overall logical axis data is a globally unified vibration state characterization quantity obtained by refitting all grouped logical axis data, which reflects the overall vibration energy distribution of the vibration reduction platform in six degrees of freedom.

[0044] Vibration reduction specifically refers to offsetting the vibration energy of the vibration damping platform by adjusting the extension and retraction length of the support legs, thereby reducing the vibration amplitude of the platform. That is, by applying control signals to the support legs and using the output of an external motor to counteract vibration, the hydraulic or pneumatic pressure inside the support legs changes, thus altering the extension and retraction state of the support legs to effectively suppress the vibration of the vibration damping platform.

[0045] In summary, this embodiment eliminates redundant interference from local sensor data and accurately extracts the core vibration dimension of each group of support legs by grouping the support legs and fitting the sensor data of each group with logical axes. By refitting all logical axis data, the overall logical axis data of the vibration reduction platform is obtained, and the support legs are subjected to vibration reduction processing based on the overall logical axis data. This avoids the problem of local optima and overall imbalance caused by isolated analysis of individual sensor data. Using the overall logical axis data not exceeding a preset vibration reduction threshold as the closed-loop control condition for vibration reduction, the vibration reduction results can be continuously fed back and optimized, ensuring the stability of the vibration reduction effect.

[0046] In one specific embodiment, in S301, in order to improve the targeting of vibration reduction, before acquiring the sensor data of the support legs of the vibration reduction platform, the vibration reduction area of ​​the vibration reduction platform is screened to determine the area to be vibration reduced. Specifically, this includes: screening the vibration reduction area of ​​the vibration reduction platform based on preset screening rules to determine the area to be vibration reduced; wherein, the preset screening rules include at least one of the following: load area screening rules, environmental vibration sensitivity screening rules, historical vibration reduction data screening rules, and input specified area screening rules.

[0047] It should be noted that the load-bearing area screening rule specifically refers to the static load distribution characteristics of the vibration damping platform, that is, the load distribution and weight concentration on the vibration damping platform, and prioritizing the identification and screening of areas bearing larger loads or concentrated loads as areas to be vibration damped.

[0048] The environmental vibration sensitivity screening rule refers to prioritizing the screening of highly sensitive areas that require focused vibration reduction based on the sensitivity of specific areas on the vibration reduction platform (such as areas containing precision instruments, high-precision equipment, or critical components with extremely low vibration tolerance).

[0049] The historical vibration reduction data screening rule refers to analyzing the execution records of historical vibration reduction measures and identifying areas that repeatedly trigger vibration reduction requirements or whose vibration reduction effects fail to meet standards as areas to be affected by vibration reduction.

[0050] The input-defined area filtering rules refer to allowing users to manually specify specific areas of interest through the input interface. In other words, the system can filter specific areas according to the user's actual needs, thereby improving the system's flexibility and applicability.

[0051] Furthermore, this application can also use multiple rules for cross-filtering (such as prioritizing the identification of critical load-bearing areas, vibration-sensitive areas, and user-specified areas) to accurately pinpoint the core areas that truly require vibration reduction, thus avoiding ineffective processing of non-critical areas, which will not be elaborated here.

[0052] In summary, this embodiment achieves accurate identification of the area to be vibration-damped by combining multi-dimensional preset rules such as load-bearing area, environmental vibration sensitivity, historical vibration reduction data, and input of a specified area.

[0053] In one specific embodiment, since the vibration damping platform does not need to perform vibration damping adjustments in real time, in order to reduce data redundancy, the acquisition of sensor data of the support leg specifically includes: determining the vibration damping detection interval period based on the inherent vibration period of the vibration damping platform; performing periodic velocity displacement detection on the support leg based on the vibration damping detection interval period to obtain the sensor data of the support leg.

[0054] It should be noted that the inherent vibration period of the vibration reduction platform refers to the vibration characteristics of the system itself under the condition of no external interference. It reflects the core vibration characteristics of the vibration reduction platform. By making reasonable use of this periodicity, it can be ensured that periodic detection can completely capture key dynamic information in the vibration process (such as vibration peak value, periodic characteristics, etc.), and avoid data loss due to excessively long detection intervals or redundancy due to excessively short detection intervals.

[0055] Periodic vibration velocity testing of the support legs can avoid the energy consumption and computational resource waste caused by high-frequency testing, and prevent the loss of key data caused by low-frequency testing. It can achieve dynamic adaptation between the testing frequency and the vibration characteristics of the system, and improve the testing economy while ensuring data quality.

[0056] In one specific embodiment, in S302, in order to group the support legs and perform logical axis fitting on the sensor data of each group of support legs to obtain the logical axis data of that group of support legs, the specific steps include: dividing the support legs into multiple groups based on a preset grouping rule to obtain multiple groups of support legs; performing modal matrix transformation on the sensor data of each group of support legs to obtain the logical axis data of that group of support legs; wherein, the preset grouping rule includes at least one of a fixed area occupation rule, a fixed number of support legs rule, and a specified grouping rule entered by the user.

[0057] It should be noted that the fixed area rule specifically refers to dividing the support legs into areas according to a preset area threshold to ensure that the physical area covered by each group of support legs is basically the same.

[0058] The fixed number of support legs rule refers to grouping the support legs into equal groups according to a set number, ensuring that the number of support legs in each group is equal or similar, so as to achieve a balanced distribution of load.

[0059] The specified grouping rules entered can include user-defined grouping preferences, such as targeted grouping based on the physical location, functional area, or historical failure rate of the support leg structure. A specific group of support legs can also be distributed in non-adjacent physical areas. The grouping strategy can also be flexibly adjusted according to actual needs, thereby improving the accuracy of logical axis fitting and the level of precision in vibration reduction control.

[0060] Modal matrix transformation refers to mapping sensor data from physical space to modal space using mathematical modeling techniques. Specifically, it decouples the six degrees of freedom motion information of the sensor data into mutually independent modal coordinates, thereby extracting the dominant vibration mode characteristics of the support leg group and realizing the coordinated analysis and control of the vibration behavior of multiple support legs.

[0061] Specifically, during the modal matrix transformation process, a filtering algorithm is used to filter the sensor data, remove noise interference from the data, retain the main vibration feature vectors, thereby improving the accuracy and stability of the logical axis data, enhancing the vibration reduction system's ability to identify complex vibration modes, and optimizing the execution effect of the vibration reduction control strategy.

[0062] In one specific embodiment, for a visual representation of the grouping results of the support legs, please refer to [link to relevant documentation]. Figure 6 , Figure 6 This is a schematic diagram of the grouping results of the support legs provided in an embodiment of the present invention. There are a total of 16 support legs on the vibration reduction platform, which are divided into 4 groups on average. Each group includes 4 support legs. By fitting the sensor data of each group of support legs with logical axes, data of 4 logical axes can be obtained.

[0063] In summary, by setting appropriate grouping rules, the system's adaptability to complex vibration modes can be improved, making the logical axis fitting more accurate.

[0064] In one specific embodiment, in S303, after obtaining the logical axis data of each set of support legs, in order to perform vibration reduction, all logical axis data are refitted to obtain the overall logical axis data of the vibration reduction platform, and the support legs are subjected to vibration reduction processing based on the overall logical axis data until the overall logical axis data is not greater than a preset vibration reduction threshold. Alternatively, it can be replaced by: Vibration reduction is applied to each support leg based on the logical axis data until the logical axis data is no greater than the preset vibration reduction threshold.

[0065] In this embodiment, vibration reduction is performed on each group of support legs based on the logical axis data of each group, ensuring that the vibration characteristics of each group meet the vibration reduction target. The condition for determining that vibration reduction of each group of support legs is complete is that the logical axis data corresponding to that group of support legs is not greater than a preset vibration reduction threshold. In other words, in this embodiment, each group of support legs is processed as an independent vibration reduction control unit.

[0066] In one specific embodiment, all logical axis data are refitted to obtain the overall logical axis data of the vibration damping platform. Specifically, this means performing logical axis fitting on all logical axis data to obtain the overall logical axis data of the vibration damping platform. This is similar to the process of performing logical axis fitting on the sensor data of each support leg mentioned earlier, except that the sensor data of each support leg is replaced with the logical axis data corresponding to each support leg for data conversion processing.

[0067] In one specific embodiment, to visually demonstrate the results of refitting the logical axis data, please refer to [link to relevant documentation]. Figure 7 , Figure 7 This is a schematic diagram illustrating the result of an embodiment of refitting logical axis data provided by the present invention. Figure 6 Correspondingly, the secondary logic axis chassis 1-4 control the data of logic axes 1-4 respectively, while the primary logic axis chassis controls the overall logic axis data.

[0068] Obviously, three-level logic axis housings, four-level logic axis housings, etc., can be set up as needed to achieve multi-level fitting and management of sensor data, which will not be elaborated here.

[0069] Furthermore, after obtaining the overall logical axis data, in order to perform vibration reduction processing on the support leg based on the overall logical axis data until the overall logical axis data is not greater than the preset vibration reduction threshold, the process specifically includes: when the overall logical axis data is greater than the preset vibration reduction threshold, performing modal decoupling on the logical axis data, and determining the vibration reduction adjustment result of the support leg based on the decoupling result; and performing vibration reduction processing on the support leg based on the vibration reduction adjustment result until the overall logical axis data is not greater than the preset vibration reduction threshold.

[0070] It should be noted that modal decoupling refers to decomposing coupled vibration modes into multiple independent subsystems through mathematical transformations, so that vibration reduction control can be performed independently for the vibration characteristics of each subsystem. Specifically, by performing eigenvalue analysis on the overall logical axis data, the main vibration modes are identified, and vibration reduction priorities are assigned based on the contribution of each mode. Furthermore, the vibration reduction adjustment results are dynamically adjusted according to the vibration energy distribution of each subsystem to ensure that high-energy modes are suppressed first, thereby effectively reducing the overall vibration level.

[0071] To standardize the determination of the preset vibration velocity threshold, the steps for determining the preset vibration velocity threshold include: acquiring historical sensor data of the vibration reduction platform under stable conditions; and determining the mean value of the historical sensor data as the preset vibration velocity threshold.

[0072] In this embodiment, historical sensor data under stable conditions of the vibration damping platform is used as the basis, making the determined preset vibration velocity threshold more targeted and adaptable, accurately reflecting the vibration baseline level of the vibration damping platform during normal operation. Furthermore, by using the average of historical sensor data as the preset vibration velocity threshold, the interference of accidental fluctuations on the threshold can be effectively smoothed, improving the stability and reliability of the threshold. When determining whether vibration damping needs to be activated based on the preset vibration velocity threshold, the normal stable operating state of the platform can be accurately distinguished from the abnormal vibration state requiring vibration damping, avoiding misjudgments (such as premature activation of vibration damping and waste of resources) or missed judgments (such as failure to dampen vibration in time when vibration exceeds the threshold) caused by general thresholds or single data points. This improves the accuracy and effectiveness of vibration damping control, ensuring that the vibration damping platform can respond to vibration states requiring vibration damping in a timely and accurate manner while ensuring normal operation, thereby improving the overall vibration damping effect and operational stability.

[0073] To facilitate better implementation of the vibration reduction method provided in the embodiments of the present invention, the present invention also provides a system based on the above-described vibration reduction method. The meanings of the terms used are the same as in the vibration reduction method described above, and specific implementation details can be found in the descriptions in the method embodiments.

[0074] Please see Figure 8 , Figure 8 This is a schematic diagram of a vibration reduction system according to an embodiment of the present invention, wherein the vibration reduction system 800 may include: The sensor data acquisition module 801 is used to acquire sensor data of the support legs of the vibration damping platform; The logical axis data acquisition module 802 is used to group the support legs and perform logical axis fitting on the sensor data of each group of support legs to obtain the logical axis data of that group of support legs. The vibration reduction processing module 803 is used to refit all the logical axis data to obtain the overall logical axis data of the vibration reduction platform, and to perform vibration reduction processing on the support legs according to the overall logical axis data until the overall logical axis data is not greater than the preset vibration reduction threshold.

[0075] This invention also provides a semiconductor vibration damping device, such as... Figure 9 As shown, Figure 9 This is a schematic diagram of an embodiment of the semiconductor vibration damping device provided in this invention. Specifically: The semiconductor vibration damping device may include components such as a processor 901 with one or more processing cores, a memory 902 with one or more computer-readable storage media, a power supply 903, and an input unit 904. Those skilled in the art will understand that... Figure 9 The semiconductor vibration damping device structure shown does not constitute a limitation on the semiconductor vibration damping device. It may include more or fewer components than shown, or combine certain components, or have different component arrangements. Wherein: The processor 901 is the control center of the semiconductor vibration damping device. It connects various parts of the device via interfaces and lines, and performs various functions and processes data by running or executing software programs and / or modules stored in the memory 902, and by calling data stored in the memory 902, thereby performing overall testing of the semiconductor vibration damping device. Optionally, the processor 901 may include one or more processing cores; preferably, the processor 901 may integrate an application processor and a modem processor, wherein the application processor mainly handles the operation of the storage medium, user interface, and application programs, and the modem processor mainly handles wireless communication. It is understood that the modem processor may not be integrated into the processor 901.

[0076] The memory 902 can be used to store software programs and modules. The processor 901 executes various functional applications and data processing by running the software programs and modules stored in the memory 902. The memory 902 may mainly include a program storage area and a data storage area. The program storage area may store application programs required for operating the storage medium and at least one function (such as sound playback function, image playback function, etc.); the data storage area may store data created based on the use of the semiconductor vibration damping device. In addition, the memory 902 may include high-speed random access memory and may also include non-volatile memory, such as at least one disk storage device, flash memory device, or other volatile solid-state storage device. Accordingly, the memory 902 may also include a memory controller to provide the processor 901 with access to the memory 902.

[0077] The semiconductor vibration damping device also includes a power supply 903 that supplies power to the various components. Preferably, the power supply 903 can be logically connected to the processor 901 through a power management storage medium, thereby enabling functions such as charging, discharging, and power consumption management through the power management storage medium. The power supply 903 may also include one or more DC or AC power supplies, recharge storage media, power fault detection circuits, power converters or inverters, power status indicators, and other arbitrary components.

[0078] The semiconductor vibration damping device may also include an input unit 904, which can be used to receive input digital or character information, and generate keyboard, mouse, joystick, optical or trackball signal inputs related to user settings and function control.

[0079] Although not shown, the semiconductor vibration damping device may also include a display unit, etc., which will not be described in detail here. Specifically, in this embodiment, the processor 901 in the semiconductor vibration damping device loads the executable files corresponding to the processes of one or more application programs into the memory 902 according to the following instructions, and the processor 901 runs the application programs stored in the memory 902 to realize various functions, as follows: Acquire sensor data of the support legs of the vibration damping platform; group the support legs and perform logical axis fitting on the sensor data of each group of support legs to obtain the logical axis data of that group of support legs; refit all the logical axis data to obtain the overall logical axis data of the vibration damping platform, and perform vibration damping processing on the support legs according to the overall logical axis data until the overall logical axis data is not greater than the preset vibration damping threshold.

[0080] Those skilled in the art will understand that all or part of the steps in the various methods of the above embodiments can be performed by instructions, or by instructions controlling related hardware. These instructions can be stored in a computer-readable storage medium and loaded and executed by a processor.

[0081] Therefore, embodiments of the present invention provide a computer-readable storage medium storing a computer program thereon, the computer program being loaded by a processor to execute the steps in any of the vibration reduction methods provided in the embodiments of the present invention. For example, the computer program, when loaded by a processor, can execute the following steps: Acquire sensor data of the support legs of the vibration damping platform; group the support legs and perform logical axis fitting on the sensor data of each group of support legs to obtain the logical axis data of that group of support legs; refit all the logical axis data to obtain the overall logical axis data of the vibration damping platform, and perform vibration damping processing on the support legs according to the overall logical axis data until the overall logical axis data is not greater than the preset vibration damping threshold.

[0082] For details on the implementation of each of the above operations, please refer to the previous examples, which will not be repeated here.

[0083] The computer-readable storage medium may include: read-only memory (ROM), random access memory (RAM), disk or optical disk, etc.

[0084] Since the computer program stored in the computer-readable storage medium can execute the steps in any of the vibration reduction methods provided in the embodiments of the present invention, the beneficial effects that any of the vibration reduction methods provided in the embodiments of the present invention can achieve can be realized, as detailed in the preceding embodiments, and will not be repeated here.

[0085] The above provides a detailed description of a vibration reduction method, system, semiconductor vibration reduction device, and storage medium provided by embodiments of the present invention. Specific examples have been used to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. At the same time, those skilled in the art will recognize that there will be changes in the specific implementation methods and application scope based on the ideas of the present invention. Therefore, the content of this specification should not be construed as a limitation of the present invention.

Claims

1. A vibration reduction method, characterized in that, include: Acquire sensor data from the support legs of the vibration damping platform; The support legs are grouped, and the sensor data of each group of support legs are fitted with logical axes to obtain the logical axis data of that group of support legs. All logical axis data are refitted to obtain the overall logical axis data of the vibration reduction platform, and the support leg is subjected to vibration reduction treatment based on the overall logical axis data until the overall logical axis data is not greater than the preset vibration reduction threshold.

2. The vibration reduction method according to claim 1, characterized in that, The step of refitting all logical axis data to obtain the overall logical axis data of the vibration reduction platform, and performing vibration reduction processing on the support leg based on the overall logical axis data until the overall logical axis data is not greater than a preset vibration reduction threshold, further includes: Based on the logical axis data, vibration reduction processing is performed on each corresponding support leg until the logical axis data is no greater than the preset vibration reduction threshold.

3. The vibration reduction method according to claim 1, characterized in that, The process of grouping the support legs and fitting the logical axes of the sensor data for each group of support legs to obtain the logical axis data for that group of support legs includes: The support legs are divided into multiple groups based on preset grouping rules, resulting in multiple groups of support legs; Modal matrix transformation is performed on the sensor data of each support leg to obtain the logical axis data of that support leg; The preset grouping rules include at least one of the following: fixed area occupation rules, fixed number of support legs rules, and input specified grouping rules.

4. The vibration reduction method according to claim 1, characterized in that, Before acquiring sensor data from the support legs of the vibration damping platform, the following steps are also included: The vibration reduction area of ​​the vibration reduction platform is screened based on preset screening rules to determine the area to be vibration reduced; The initial support leg within the area to be damped is determined as the support leg; The preset filtering rules include at least one of the following: load-bearing area filtering rules, environmental vibration sensitivity filtering rules, historical vibration reduction data filtering rules, and input specified area filtering rules.

5. The vibration reduction method according to claim 1, characterized in that, The step of performing vibration reduction processing on the support leg based on the overall logical axis data until the overall logical axis data is not greater than a preset vibration reduction threshold includes: When the overall logical axis data is greater than the preset vibration reduction threshold, the logical axis data is modally decoupled, and the vibration reduction adjustment result of the support leg is determined according to the decoupling result. Based on the vibration reduction adjustment results, the support leg is subjected to vibration reduction treatment until the overall logical axis data is not greater than the preset vibration reduction threshold.

6. The vibration reduction method according to claim 1, characterized in that, The acquisition of sensor data from the support legs of the vibration damping platform includes: The vibration reduction detection interval is determined based on the natural vibration period of the vibration reduction platform; Based on the vibration reduction detection interval, the support leg is periodically velocity-displacement detected to obtain sensor data of the support leg.

7. The vibration reduction method according to claim 1, characterized in that, The steps for determining the preset vibration reduction threshold include: Acquire historical sensor data of the vibration reduction platform under stable conditions; The mean value of the historical sensor data is determined to be the preset vibration reduction threshold.

8. A vibration reduction system, characterized in that, include: The sensor data acquisition module is used to acquire sensor data from the support legs of the vibration damping platform. The logical axis data acquisition module is used to group the support legs and perform logical axis fitting on the sensor data of each group of support legs to obtain the logical axis data of that group of support legs. The vibration reduction module is used to refit all the logical axis data to obtain the overall logical axis data of the vibration reduction platform, and to perform vibration reduction processing on the support leg according to the overall logical axis data until the overall logical axis data is not greater than a preset vibration reduction threshold.

9. A semiconductor vibration damping device, characterized in that, It includes a memory and a processor, wherein the memory stores a computer program, and when the computer program is executed by the processor, the processor causes the processor to perform the following steps: Acquire sensor data from the support legs of the vibration damping platform; The support legs are grouped, and the sensor data of each group of support legs are fitted with logical axes to obtain the logical axis data of that group of support legs. All logical axis data are refitted to obtain the overall logical axis data of the vibration reduction platform, and the support leg is subjected to vibration reduction treatment based on the overall logical axis data until the overall logical axis data is not greater than the preset vibration reduction threshold.

10. A computer-readable storage medium, characterized in that, It stores a computer program, which is loaded by a processor to perform the steps of the vibration reduction method according to any one of claims 1-7.

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